Rotation rate sensor and method for manufacturing a rotation rate sensor
A speed sensor and structure technology, which is applied in the direction of gyroscope/steering sensing equipment, speed/acceleration/shock measurement, speed/acceleration/electric shock meter detailed information, etc., can solve problems such as interference and affecting the performance of the speed sensor, and achieve reduction non-linear effect
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[0025] exist figure 1A plan view of a detail of a rotational speed sensor according to an embodiment of the invention is schematically shown. The rotational speed sensor comprises a spring arrangement 10 which connects the drive structure 2 to a substrate arranged substantially below the illustrated spring arrangement 10 . The substrate is not shown in detail. The spring assembly 10 comprises a first spring part 20 , a second spring part 30 and an intermediate piece 40 by means of which a mechanical connection between the first and second spring part 20 , 30 is established. The first spring part 20 comprises a first subregion 21 configured as a beam and a second subregion 22 configured as a beam, wherein the first and second subregions 21 , 22 are connected to a central region 25 . The second subarea 22 comprises a further first subsection 221 , a further second subsection 222 and a further third subsection 223 , wherein the further second subsection 222 extends along the se...
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