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Rotation rate sensor and method for manufacturing a rotation rate sensor

A speed sensor and structure technology, which is applied in the direction of gyroscope/steering sensing equipment, speed/acceleration/shock measurement, speed/acceleration/electric shock meter detailed information, etc., can solve problems such as interference and affecting the performance of the speed sensor, and achieve reduction non-linear effect

Inactive Publication Date: 2019-02-26
ROBERT BOSCH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the spring assemblies known from the prior art (also known as DFBS) have some large deviations from the desired linear restoring force during operation, which has a disturbing effect on the performance of the rotational speed sensor.

Method used

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  • Rotation rate sensor and method for manufacturing a rotation rate sensor
  • Rotation rate sensor and method for manufacturing a rotation rate sensor
  • Rotation rate sensor and method for manufacturing a rotation rate sensor

Examples

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Embodiment Construction

[0025] exist figure 1A plan view of a detail of a rotational speed sensor according to an embodiment of the invention is schematically shown. The rotational speed sensor comprises a spring arrangement 10 which connects the drive structure 2 to a substrate arranged substantially below the illustrated spring arrangement 10 . The substrate is not shown in detail. The spring assembly 10 comprises a first spring part 20 , a second spring part 30 and an intermediate piece 40 by means of which a mechanical connection between the first and second spring part 20 , 30 is established. The first spring part 20 comprises a first subregion 21 configured as a beam and a second subregion 22 configured as a beam, wherein the first and second subregions 21 , 22 are connected to a central region 25 . The second subarea 22 comprises a further first subsection 221 , a further second subsection 222 and a further third subsection 223 , wherein the further second subsection 222 extends along the se...

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Abstract

A rotation rate sensor includes a substrate and a drive structure that is movable relative to the substrate and is fastened to the substrate via a spring system that includes first and second spring components that each connects the drive structure and the substrate and that are joined by an intermediate piece, the drive structure being joined to the intermediate piece via the first portion, and the intermediate piece or a center area, which is at least partially situated between the first and second portions, being joined to the substrate via the second portion, the first and / or second portions having a respective varying base area in a respective main extension direction of the first and second portions, respectively.

Description

technical field [0001] The invention relates to a rotational speed sensor. Background technique [0002] Rotational speed sensors on a substrate are generally known. Such a rotational speed sensor involves a dedicated micro-electromechanical system (MEMS) by means of which the rotational speed can be measured. Such sensors are used in a variety of applications. In this case, the rotational speed sensor typically has one or more drives. These drive structures are moved by means of a spring assembly and are spring-loaded connected to the substrate via the spring assembly. A spring assembly / spring structure formed from a folded beam tends to have a lower tensile stress than a simply supported beam at the same rigidity. This type of spring is called a U-shaped spring. A special embodiment of the spring assembly is two connected U-shaped springs which are connected by a wide spring head (Flying-Bar). This type of spring assembly is also known as "Double-Folded Beam Suspensi...

Claims

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Application Information

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IPC IPC(8): G01P3/00G01P1/00
CPCG01P1/00G01P3/00G01C19/5755F16F2238/022G01C19/5642G01P2015/0805
Inventor M·普特尼克S·卡丹奥比莱
Owner ROBERT BOSCH GMBH