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System and priority ranking method

A technology of priority and priority information, applied in the field of semiconductors, can solve problems such as affecting product delivery time and product indicators, reducing accuracy and efficiency, and taking a long time to achieve reduced probability, improve production efficiency, product fast information

Inactive Publication Date: 2019-09-06
ZHENGZHOU UNIV OF IND TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this kind of manual ordering takes a long time, increases the probability of misoperation, easily misses products that need to be processed first, reduces accuracy and efficiency, and affects product delivery time and product indicators.

Method used

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Embodiment Construction

[0034] In order to make the purpose, features and effects of the present invention more obvious and understandable, the specific implementation manners of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0035] Many specific details are set forth in the following description to facilitate a full understanding of the present invention, but the present invention can also be implemented in other ways than described here, so the present invention is not limited by the specific embodiments disclosed below.

[0036] Wafers are loaded into wafer cassettes, and each process is executed sequentially through the equipment corresponding to the process according to the preset process flow. The MES system records all current product (ie wafer) information in real time. The product information recorded in the MES system is based on information items (not limited to the following information items: product name, product code, site code, ...

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Abstract

The invention relates to a system and a priority ranking method. The system comprises an operation screen with a setting function and a display function, an EAP system and a controller, wherein the setting function is suitable for setting sorted priority information items; the display function is adapted to display an output of the controller. According to the invention, the order of goods discharging can be better controlled, and manual mistaken goods discharging is reduced, so that the goods delivery period and the product index are ensured.

Description

technical field [0001] The invention relates to the field of semiconductors, in particular to a system and a prioritization method. Background technique [0002] In the production and manufacture of integrated circuits, each wafer needs to go through hundreds or even thousands of processes from raw materials to final products, and all the processes that the wafer passes through constitute the process flow. Under normal circumstances, the wafer performs each process step by step on the equipment corresponding to the process according to the preset process flow, that is to say, the content of each process in the process flow is preset, and each process The content also includes specific process parameters, and the process drive engine controls the wafer to execute each process in sequence according to the preset process flow. [0003] With the development of semiconductor technology, semiconductor companies will use software control systems to maximize the production capacity...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06Q10/06G06F9/451G05B15/02
CPCG06Q10/06316G06F9/451G05B15/02
Inventor 欧阳富
Owner ZHENGZHOU UNIV OF IND TECH
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