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Two-dimensional grating for high-resolution and high-precision plane displacement measurement

A two-dimensional grating and displacement measurement technology, which is applied in the field of two-dimensional gratings, can solve problems such as absolute plane displacement measurement cannot be better solved, and achieve two-dimensional plane displacement measurement, high resolution and high precision, and simple The effect of convenient image recognition

Active Publication Date: 2020-12-25
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

In the traditional technology center, methods such as moiré fringe method and magnetic grid cannot solve the problem of absolute plane displacement measurement.

Method used

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  • Two-dimensional grating for high-resolution and high-precision plane displacement measurement
  • Two-dimensional grating for high-resolution and high-precision plane displacement measurement
  • Two-dimensional grating for high-resolution and high-precision plane displacement measurement

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Embodiment Construction

[0035] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0036] refer to figure 1 , a (16×16)-bit coded two-dimensional grating disclosed in an embodiment of the present invention, comprising: a disk body 1 and coded marking lines 2 . The coding marking line 2 is engraved on the disc body 1 . The disc body 1 is an opaque square disc made of glass or metal coated with an opaque film.

[0037] refer to figure 2 , a schematic diagram of the shape of the coding marking line disclosed in the embodiment of the present invention, including: shape one 21 , shape two 22 , shape three 23 , and shape four 24 . Let the horizontal coding value be x, and the vertical coding value be y, then the coding value represented by shape 1 is {x=0, y=0}, shape 2 is {x=1, y=0}, and shape 3 is {x= 1, y=1}, the shape four is {x=0, y=1}.

[0038] The first shape 21, the second shape 22, the third shape 23, and the fourth...

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Abstract

The invention discloses a two-dimensional grating for high-resolution and high-precision plane displacement measurement. The two-dimensional grating comprises a disc body and coding marked lines, wherein the disc body is made of a glass material plated with a lightproof coating film or a lightproof metal material; and the coding marked lines are a group of light-transmitting marked lines and are arranged according to specific codes. X represents a coding element of a transverse dimension, y represents a coding element of a longitudinal dimension, the coding marked lines comprise four coding marked lines which respectively represent {x=0, y=0}, {x=1, y=0}, {x=1, y=1} and {x=0, y=1}, and the transverse distances and the longitudinal distances of all the coding marked lines are the same. Whenan image sensor is used for imaging a coded disc, a coded value can be recognized, and then transverse and longitudinal displacement information is obtained through a decoding table. Meanwhile, due to the fact that the distances of all the coding marked lines are the same, subdivision operation of displacement can be conveniently achieved through centroid operation. According to the two-dimensional grating, through cooperation with image identification, high-resolution and high-precision two-dimensional displacement measurement can be achieved.

Description

technical field [0001] The invention relates to the field of photoelectric displacement precision measurement, in particular to a two-dimensional grating used for high-resolution and high-precision plane displacement measurement. Background technique [0002] Digital photoelectric displacement measurement is a high-precision measurement technology that integrates optoelectronics and electromechanics. With its advantages of high precision, high resolution, wide measurement range, and easy connection with digital equipment, it has become a popular choice in the fields of industrial manufacturing, aerospace, and military equipment. key technologies. At the same time, with the increasing development of the manufacturing industry, higher requirements are put forward for digital displacement measurement technology, mainly including: high measurement accuracy and high resolution capability. Research on high-resolution and high-precision plane displacement measurement is a hot spot...

Claims

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Application Information

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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 于海万秋华赵长海
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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