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A Two-dimensional Grating for High-Resolution and High-Precision Plane Displacement Measurement

A two-dimensional grating and displacement measurement technology, applied in the field of two-dimensional gratings, can solve the problem that absolute plane displacement measurement cannot be solved well, and achieve two-dimensional plane displacement measurement, simple and convenient image recognition, and high resolution. and high precision

Active Publication Date: 2022-02-11
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

In the traditional technology center, methods such as moiré fringe method and magnetic grid cannot solve the problem of absolute plane displacement measurement.

Method used

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  • A Two-dimensional Grating for High-Resolution and High-Precision Plane Displacement Measurement
  • A Two-dimensional Grating for High-Resolution and High-Precision Plane Displacement Measurement
  • A Two-dimensional Grating for High-Resolution and High-Precision Plane Displacement Measurement

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Embodiment Construction

[0035] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0036] refer to figure 1 , a (16×16)-bit coded two-dimensional grating disclosed in an embodiment of the present invention, comprising: a disk body 1 and coded marking lines 2 . The coding marking line 2 is engraved on the disc body 1 . The disc body 1 is an opaque square disc made of glass or metal coated with an opaque film.

[0037] refer to figure 2 , a schematic diagram of the shape of the coding marking line disclosed in the embodiment of the present invention, including: shape one 21 , shape two 22 , shape three 23 , and shape four 24 . Let the horizontal coding value be x, and the vertical coding value be y, then the coding value represented by shape 1 is {x=0, y=0}, shape 2 is {x=1, y=0}, and shape 3 is {x= 1, y=1}, the shape four is {x=0, y=1}.

[0038] The first shape 21, the second shape 22, the third shape 23, and the fourth...

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Abstract

A two-dimensional grating for high-resolution and high-precision plane displacement measurement, including: a disk body and coding marking lines. Among them, the disk body is made of glass material coated with an opaque coating, or an opaque metal material; the coding marking line is a group of light-transmitting marking lines arranged according to a specific code. Let x represent the coding element of the horizontal dimension, and y represent the coding element of the vertical dimension, then the coding markings include respectively representing {x=0, y=0}, {x=1, y=0}, {x=1, y =1}, {x=0, y=1} four kinds of coding marking lines, all coding marking lines have the same horizontal spacing, and the vertical spacing is also equal. When the image sensor is used to image the code disc, the code value can be recognized, and then the horizontal and vertical displacement information can be obtained through the decoding table. At the same time, since the spacing of all coding marking lines is the same, the subdivision operation of the displacement can be realized conveniently through the operation of the centroid. By cooperating with image recognition, the present invention can realize two-dimensional displacement measurement with high resolution and high precision.

Description

technical field [0001] The invention relates to the field of photoelectric displacement precision measurement, in particular to a two-dimensional grating used for high-resolution and high-precision plane displacement measurement. Background technique [0002] Digital photoelectric displacement measurement is a high-precision measurement technology that integrates optoelectronics and electromechanics. With its advantages of high precision, high resolution, wide measurement range, and easy connection with digital equipment, it has become a popular choice in the fields of industrial manufacturing, aerospace, and military equipment. key technologies. At the same time, with the increasing development of the manufacturing industry, higher requirements are put forward for digital displacement measurement technology, mainly including: high measurement accuracy and high resolution capability. Research on high-resolution and high-precision plane displacement measurement is a hot spot...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 于海万秋华赵长海
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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