Evaporation source

An evaporation source and evaporation material technology, applied in the field of evaporation sources, can solve the problem that the quality of the substrate cannot meet the high-resolution display and large-scale design of OLED, maximize the evaporation area, ensure the evaporation efficiency, and increase the evaporation. area effect

Pending Publication Date: 2022-06-28
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In view of this, the embodiment of the present application provides an evaporation source to solve the problem that the quality of the substrate evaporated by the existing evaporation technology in the prior art cannot meet the requirements of OLED high-resolution display and large-size design. technical problem

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Embodiment Construction

[0042] In order to better understand the technical solutions of the present application, the embodiments of the present application are described in detail below with reference to the accompanying drawings.

[0043] It should be clear that the described embodiments are only a part of the embodiments of the present application, but not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of this application.

[0044] The terms used in the embodiments of the present application are only for the purpose of describing specific embodiments, and are not intended to limit the present application. As used in the embodiments of this application and the appended claims, the singular forms "a," "the," and "the" are intended to include the plural forms as well, unless the context clearly dictates otherwise.

[0045] It should be understood ...

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Abstract

The invention provides an evaporation source which comprises a nozzle, a container and a fixing device, the container is fixed in the fixing device, the container is used for containing an evaporation material, and the evaporation material is sublimated to the nozzle from the container in the first direction; the container is provided with a first cavity and a second cavity, the first cavity and the second cavity are connected and communicated with each other in the first direction, and the first cavity and the second cavity extend in the second direction perpendicular to the first direction; the maximum inner diameter of the first cavity is smaller than the maximum inner diameter of the second cavity in the third direction perpendicular to the first direction and the second direction. According to the evaporation source, the evaporation area of an evaporation material can be increased, meanwhile, the islanding effect in the evaporation process is effectively avoided, disassembly and maintenance are convenient, overall replacement of components is avoided, and the maintenance cost in the production process is reduced.

Description

【Technical field】 [0001] The present application relates to the technical field of evaporation, and in particular, to an evaporation source. 【Background technique】 [0002] In order to meet the requirements of high-resolution display and large-scale design of organic electroluminescence displays (OLED, Organic Electroluminescence Display), a higher-quality evaporation source is required to evaporate the substrate; but the evaporation source of the existing evaporation source The quality of evaporation is poor, which leads to problems such as low yield and poor product quality of the prepared OLED; in addition, the maintenance cost of the existing evaporation source equipment is high, which increases the production cost of panel manufacturers. [Content of the invention] [0003] In view of this, the embodiment of the present application provides an evaporation source to solve the problem that the quality of the substrate evaporated by the existing evaporation technology in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/12
CPCC23C14/243C23C14/12
Inventor 林文晶
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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