A trimethyl phosphate distillation tail gas deodorization equipment

Abstract

The invention relates to the technical field of tail gas treatment, and discloses a trimethyl phosphate distillation tail gas deodorization device, comprising a mounting platform, a mounting shaft rotatably connected in the mounting platform, and a deodorization box rotatably connected to the mounting platform at one end of the mounting shaft. The trimethyl phosphate distillation tail gas deodorization device is characterized in that trimethyl phosphate is introduced into the deodorization box, and then the trimethyl phosphate is absorbed by an ethanol solvent in the deodorization box, and at the same time, an extrusion fusion mechanism in a dust removal box is cooperated to fully stir and extrude the processed tail gas and the ethanol solvent, so that the trimethyl phosphate in the tail gas is fully fused with the solvent, and then the purified tail gas is absorbed and purified again by the cooperation of a rear-end purification mechanism, so that the trimethyl phosphate in the tail gas is fully fused into the ethanol solvent, thereby greatly improving the absorption effect of the trimethyl phosphate, and further improving the deodorization effect of the trimethyl phosphate.

Description

Technical Field

[0001] The invention relates to the technical field of tail gas treatment, and in particular to a trimethyl phosphate distillation tail gas deodorization device. Background Art

[0002] Among semiconductor deposition materials, trimethyl phosphate (TMP) is the main phosphorus source for deposition and generation of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) during wafer manufacturing. However, the preparation of phosphosilicate glass (PSG) and borophosphosilicate glass (BPSG) requires the main content of TMP to be above 99.99% and the purity to be above 8.5N to meet the demand, so TMP needs to be distilled in the production process.

[0003] The inventors have found that the process is simple to use, but because TMP is volatile, it produces a pungent bitter smell, which is easy to cause foul smell on site, damage the health of production personnel, and is not conducive to the normal progress of production operations. Since trimethyl phosphate is easily soluble in ethanol solvent, trimethyl phosphate can be absorbed and treated by ethanol solvent. Most of the methods currently used are to directly pass the tail gas containing trimethyl phosphate into ethanol solvent for absorption, but this method has a poor absorption effect on the trimethyl phosphate in the tail gas, and a part of the trimethyl phosphate is still not absorbed, resulting in the problem of tail gas containing trimethyl phosphate polluting the environment. Summary of the invention

[0004] The object of the present invention is to provide a trimethyl phosphate distillation tail gas deodorization device to solve the deficiencies in the above-mentioned background technology.

[0005] The purpose of the present invention can be achieved by the following technical solutions:

[0006] A deodorizing device for tail gas from distillation of trimethyl phosphate, comprising a mounting platform, a mounting shaft rotatably connected inside the mounting platform, one end of the mounting shaft being fixedly connected to a deodorizing box rotatably connected to the mounting platform, one side of the deodorizing box being fixedly connected to an air inlet pipe, a gas one-way valve being arranged on the air inlet pipe, one end of the air inlet pipe being fixedly connected to a hose fixedly connected to the mounting platform, one side of the deodorizing box being fixedly connected to an exhaust pipe, an electromagnetic valve being arranged on the exhaust pipe, one end of the exhaust pipe being fixedly connected to a first mounting pipe fixedly connected to the mounting platform via a hose, the top end of the first mounting pipe being fixedly connected to an elastic airbag, the top of the elastic airbag being fixedly connected to a second mounting pipe, the second mounting pipe being arranged with an electromagnetic valve, the outer surface of the second mounting pipe being drivingly connected to a rear-end purification mechanism fixedly connected to the mounting platform, the rear-end purification mechanism being used for re-purifying and deodorizing the gas purified by the deodorizing box;

[0007] The deodorizing box is provided with an extrusion and fusion mechanism, which is used for absorbing trimethyl phosphate with an organic solution. The outer surface of the mounting shaft is transmission-connected with a first transmission mechanism connected to the mounting platform, and the first transmission mechanism is used for driving the mounting shaft to rotate.

[0008] As a further solution of the present invention: the extrusion and fusion mechanism includes a transmission shaft rotatably connected to the deodorizing box, the outer surface of the transmission shaft is fixedly connected to a plurality of mounting frames, two transmission columns are slidably connected in the mounting frames, one end of the transmission column is fixedly connected to a first extrusion plate, the outer surface of the transmission column is fixedly connected to a mounting block, the outer surface of the transmission column is fixedly sleeved with a spring fixedly connected to the mounting block, the outer surface of the transmission column is fixedly connected to a second extrusion plate, one end of the transmission column is fixedly connected to a transmission wheel, the inner surface of the deodorizing box is fixedly connected to a plurality of transmission arc blocks slidably connected to the transmission wheel, and the outer surface of the transmission shaft is transmission-connected to a driving mechanism connected to the deodorizing box.

[0009] As a further solution of the present invention: the driving mechanism includes a driving motor fixedly connected to the deodorizing box, the output end of the driving motor is fixedly connected to the driving shaft through a coupling, the outer surface of the driving shaft is fixedly sleeved with a first driving gear, and the outer surface of the first driving gear is meshingly connected with a second driving gear fixedly sleeved with the transmission shaft.

[0010] As a further solution of the present invention: the first transmission mechanism includes a first transmission motor fixedly connected to the mounting platform, the output end of the first transmission motor is fixedly connected to the first rotating shaft through a coupling, the outer surface of the first rotating shaft is fixedly sleeved with a first transmission gear, and the outer surface of the first transmission gear is meshingly connected with a second transmission gear fixedly sleeved with the mounting shaft.

[0011] As a further solution of the present invention: the rear-end purification mechanism includes a purification box fixedly connected to the mounting table, a partition is fixedly connected inside the purification box, a transmission pipe rotatably connected to the partition is rotatably connected inside the purification box, a partition block is fixedly connected to the middle position of the transmission pipe, a plurality of air outlet pipes are fixedly connected to the outer surface of the transmission pipe, one end of the transmission pipe is rotatably connected to a first connecting pipe fixedly connected to the purification box, one end of the first connecting pipe is fixedly connected to a second mounting pipe through a pipeline, a one-way valve is provided on the pipeline, and the outer surface of the transmission pipe is transmission-connected to a second transmission mechanism connected to the purification box.

[0012] As a further solution of the present invention: the other end of the transmission pipe is rotatably connected to a second connecting pipe fixedly connected to the purification box, one end of the second connecting pipe is fixedly connected to a third connecting pipe fixedly connected to the purification box, and the top of the purification box is fixedly connected to an exhaust hole.

[0013] As a further solution of the present invention: the second transmission mechanism includes a second transmission motor fixedly connected to the purification box, the output end of the second transmission motor is fixedly connected to the second rotating shaft through a coupling, the outer surface of the second rotating shaft is fixedly sleeved with a third transmission gear, and the outer surface of the third transmission gear is meshingly connected with a fourth transmission gear fixedly sleeved with the transmission pipe.

[0014] As a further solution of the present invention: a first water inlet pipe is fixedly connected to the top of the purification box, a first drain pipe is fixedly connected to the bottom of the purification box, and electromagnetic valves are provided on the first water inlet pipe and the first drain pipe.

[0015] As a further solution of the present invention: a second water inlet pipe is fixedly connected to the top of the deodorizing box, a second drain pipe is fixedly connected to the bottom of the deodorizing box, and electromagnetic valves are provided on the second water inlet pipe and the second drain pipe.

[0016] Beneficial effects of the present invention:

[0017] (1) The trimethyl phosphate is introduced into a deodorization box, and then the trimethyl phosphate is absorbed by the ethanol solvent in the deodorization box. At the same time, the processing tail gas and the ethanol solvent are fully stirred and extruded in cooperation with the extrusion and fusion mechanism in the dust removal box, so that the trimethyl phosphate in the tail gas and the solvent are fully fused, and then the purified tail gas is reabsorbed and purified by the cooperation of the rear-end purification mechanism, so that the trimethyl phosphate in the tail gas is fully fused into the ethanol solvent, which greatly improves the absorption effect of the trimethyl phosphate, thereby further improving the deodorization effect of the trimethyl phosphate.

[0018] (2) The drive mechanism on the deodorizing box drives the transmission shaft and the mounting frame to rotate. At the same time, the mounting frame drives the transmission column and the extrusion plate to stir the ethanol solvent in the dust removal box while rotating. During the stirring, a certain extrusion force is generated between the exhaust gas and the ethanol solvent through the extrusion plate, so that the ethanol and the exhaust gas are fully mixed to fully absorb the trimethyl phosphate in the exhaust gas, thereby greatly improving the absorption effect of the trimethyl phosphate in the exhaust gas.

[0019] (3) The purified exhaust gas is temporarily stored by the elastic airbag and then discharged into the purification box. Then, it is evenly introduced into the ethanol solvent in the purification box through the transmission pipe and the exhaust pipe on the purification box for absorption. After absorption, it is absorbed again, so that the residual trimethyl phosphate in the exhaust gas is completely absorbed into the ethanol solvent, which greatly reduces the emission of trimethyl phosphate in the exhaust gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] Figure 1It is a three-dimensional diagram of the external structure of the invention;

[0022] Figure 2 is a first stereogram of the internal structure of the present invention;

[0023] Figure 3 is a second stereoscopic view of the internal structure of the present invention;

[0024] Figure 4 It is a partial stereogram of the extrusion fusion mechanism of the present invention;

[0025] Figure 5 The present invention Figure 1 A magnified view of middle;

[0026] Figure 6 The present invention Figure 3 Enlarged view of middle B;

[0027] Figure 7 The present invention Figure 3 Enlarged view of C in the middle.

[0028] In the figure: 1, mounting table; 2, mounting shaft; 3, deodorizing box; 4, air inlet pipe; 5, gas one-way valve; 6, exhaust pipe; 7, first mounting pipe; 8, elastic airbag; 9, second mounting pipe; 11, transmission shaft; 12, mounting frame; 13, transmission column; 14, first extrusion plate; 15, mounting block; 16, spring; 17, second extrusion plate; 18, transmission wheel; 19, transmission arc block; 21, driving motor; 22, driving shaft; 23, first driving gear; 24, second driving gear ; 31. first transmission motor; 32. first rotating shaft; 33. first transmission gear; 34. second transmission gear; 41. purification box; 42. partition; 43. transmission pipe; 44. exhaust pipe; 45. first connecting pipe; 46. second connecting pipe; 47. third connecting pipe; 51. second transmission motor; 52. second rotating shaft; 53. third transmission gear; 54. fourth transmission gear; 61. first water inlet pipe; 62. first drain pipe; 71. second water inlet pipe; 72. second drain pipe. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Embodiment 1

[0031] See also Figure 1-Figure 7As shown, the present invention is a trimethyl phosphate distillation tail gas deodorization equipment, including a mounting platform 1, a mounting shaft 2 is rotatably connected in the mounting platform 1, one end of the mounting shaft 2 is fixedly connected to a deodorizing box 3 rotatably connected to the mounting platform 1, one side of the deodorizing box 3 is fixedly connected to an air inlet pipe 4, the air inlet pipe 4 is provided with a gas one-way valve 5, one end of the air inlet pipe 4 is fixedly connected to a hose fixedly connected to the mounting platform 1, one side of the deodorizing box 3 is fixedly connected to an exhaust pipe 6, the exhaust pipe 6 is provided with an electromagnetic valve, one end of the exhaust pipe 6 is fixedly connected to a first mounting pipe 7 fixedly connected to the mounting platform 1 through a hose, the top of the first mounting pipe 7 is fixedly connected to an elastic airbag 8, the top of the elastic airbag 8 is fixedly connected to a second mounting pipe 9, the second mounting pipe 9 is provided with an electromagnetic valve, the outer surface of the second mounting pipe 9 is drivingly connected to a rear-end purification mechanism fixedly connected to the mounting platform 1, the rear-end purification mechanism is used to purify and deodorize the gas purified by the deodorizing box 3 again;

[0032] An extrusion and fusion mechanism is provided in the deodorizing box 3, and the extrusion and fusion mechanism is used for absorbing trimethyl phosphate with an organic solution. The outer surface of the mounting shaft 2 is transmission-connected with a first transmission mechanism connected to the mounting platform 1, and the first transmission mechanism is used for driving the mounting shaft 2 to rotate.

[0033] By injecting two-thirds of ethanol solvent into the deodorizing box 3, the tail gas containing trimethyl phosphate generated in the distillation process is then passed into the air inlet pipe 4 through a hose, and then passed into the deodorizing box 3 through the gas one-way valve 5 on the air inlet pipe 4, and then the gas in the deodorizing box 3 is discharged into the elastic airbag 8 through the air outlet pipe 44, the hose and the first mounting pipe 7. At this time, the electromagnetic valve on the second mounting pipe 9 is closed, and the elastic airbag 8 is inflated to collect the original gas in the deodorizing box 3, so that the tail gas containing trimethyl phosphate enters the deodorizing box 3. When the elastic airbag 8 is fully inflated, the tail gas is stopped from being supplied to the deodorizing box 3, and then the tail gas entering is fully extruded and mixed with the ethanol solvent through the extrusion and fusion mechanism in the deodorizing box 3. At the same time, the mounting shaft 2 and the deodorizing box 3 are driven to swing back and forth by the first transmission mechanism, so that the trimethyl phosphate in the tail gas is separated from the tail gas. Ethanol is fully absorbed. After a period of absorption treatment, the electromagnetic valve on the second mounting tube 9 is then opened, and the elastic airbag 8 is then contracted to discharge the gas in the elastic airbag 8 into the rear-end purification mechanism. The electromagnetic valve on the second mounting tube 9 is then closed, and the tail gas containing trimethyl phosphate is then introduced into the deodorizing box 3 again. At this time, the treated tail gas containing trimethyl phosphate in the deodorizing box 3 is discharged into the elastic airbag 8 through the outlet pipe 44, and the tail gas in the deodorizing box 3 is then treated. After the treatment is completed, the electromagnetic valve on the second mounting tube 9 is opened, and the treated tail gas containing trimethyl phosphate in the elastic airbag 8 is introduced into the rear-end purification mechanism, and the rear-end purification mechanism then purifies the tail gas again. The above actions are repeated in sequence, thereby achieving sufficient purification of the tail gas containing trimethyl phosphate, which greatly improves the treatment effect and efficiency of the tail gas.

[0034] Embodiment 2

[0035] Based on Example 1, please refer to Figure 2 , Figure 3 , Figure 4 and Figure 6 As shown, the extrusion and fusion mechanism includes a transmission shaft 11 rotatably connected to the deodorizing box 3, a plurality of mounting frames 12 are fixedly connected to the outer surface of the transmission shaft 11, two transmission columns 13 are slidably connected in the mounting frame 12, one end of the transmission column 13 is fixedly connected to a first extrusion plate 14, the outer surface of the transmission column 13 is fixedly connected to a mounting block 15, the outer surface of the transmission column 13 is fixedly sleeved with a spring 16 fixedly connected to the mounting block 15, the outer surface of the transmission column 13 is fixedly connected to a second extrusion plate 17, one end of the transmission column 13 is fixedly connected to a transmission wheel 18, the inner surface of the deodorizing box 3 is fixedly connected to a plurality of transmission arc blocks 19 slidably connected to the transmission wheel 18, and the outer surface of the transmission shaft 11 is transmission-connected to a driving mechanism connected to the deodorizing box 3.

[0036] The driving mechanism includes a driving motor 21 fixedly connected to the deodorizing box 3. The driving motor 21 is controlled by a PLC programming program, and the driving motor 21 can be controlled to rotate forward and reverse and rotate at an angle. The output end of the driving motor 21 is fixedly connected to a driving shaft 22 through a coupling. The outer surface of the driving shaft 22 is fixedly sleeved with a first driving gear 23, and the outer surface of the first driving gear 23 is meshingly connected with a second driving gear 24 fixedly sleeved with the transmission shaft 11.

[0037] The driving motor 21 drives the driving shaft 22 to rotate, and the driving shaft 22 drives the transmission shaft 11 to rotate through the first driving gear 23 and the second driving gear 24 .

[0038] The first transmission mechanism includes a first transmission motor 31 fixedly connected to the mounting table 1. The first transmission motor 31 is controlled by a PLC programming program, and can be controlled to rotate forward and reverse and rotate at an angle. The output end of the first transmission motor 31 is fixedly connected to a first rotating shaft 32 through a coupling, and a first transmission gear 33 is fixedly sleeved on the outer surface of the first rotating shaft 32. The outer surface of the first transmission gear 33 is meshingly connected to a second transmission gear 34 fixedly sleeved on the mounting shaft 2.

[0039] The first rotating shaft 32 is driven to rotate by the first transmission motor 31 , and the first rotating shaft 32 drives the installation shaft 2 to rotate through the first transmission gear 33 and the second transmission gear 34 .

[0040] The tail gas containing trimethyl phosphate is introduced into the deodorizing box 3, and then the transmission shaft 11 of the driving mechanism is rotated, the transmission shaft 11 drives the installation frame 12 to rotate, the installation frame 12 drives the transmission column 13 to rotate, so that the transmission wheel 18 rotates in the deodorizing box 3, and the transmission column 13 drives the first extrusion plate 14 and the second extrusion plate 17 to rotate. At this time, the installation frame 12, the transmission column 13, the first extrusion plate 14 and the second extrusion plate 17 stir and mix the ethanol solvent and the tail gas containing trimethyl phosphate in the deodorizing box 3, and the trimethyl phosphate is dissolved in the ethanol solvent. At the same time, while rotating, the transmission wheel 18 on the transmission column 13 contacts the transmission arc block 19, and the transmission arc block 19 drives the transmission column 13 to move, and the spring 16 is compressed. At this time, the transmission column 13 drives the first extrusion plate 14 and the second extrusion plate 17 to stir and mix the ethanol solvent and the tail gas containing trimethyl phosphate in the deodorizing box 3, and the trimethyl phosphate is dissolved in the ethanol solvent. 14 moves, and the multiple first extrusion plates 14 are squeezed together to generate a certain extrusion pressure between the exhaust gas and the ethanol solvent. At the same time, when the transmission wheel 18 is separated from the transmission arc block 19, the transmission column 13 is driven to move by the resilience of the spring 16, and the transmission column 13 drives the second extrusion plate 17 to move. At this time, a certain extrusion pressure is generated between the second extrusion plate 17 and the inner wall of the deodorization box 3, so that a certain extrusion pressure is generated between the exhaust gas and the ethanol solvent again, so that the exhaust gas and the ethanol solvent are better fused. At the same time, the first transmission mechanism drives the mounting shaft 2 and the deodorization box 3 to swing back and forth, which once again promotes the fusion of the ethanol solvent and the exhaust gas, thereby achieving full fusion of the trimethyl phosphate in the exhaust gas, greatly improving the absorption effect of the trimethyl phosphate, and further improving the deodorization effect of the trimethyl phosphate.

[0041] Embodiment 3

[0042] Based on Example 2, please refer to Figure 1 and Figure 2 As shown, the rear-end purification mechanism includes a purification box 41 fixedly connected to the mounting platform 1, a partition 42 is fixedly connected inside the purification box 41, a transmission pipe 43 rotatably connected to the partition 42 is rotatably connected inside the purification box 41, a partition block is fixedly connected to the middle position of the transmission pipe 43, a plurality of air outlet pipes 44 are fixedly connected to the outer surface of the transmission pipe 43, one end of the transmission pipe 43 is rotatably connected to a first connecting pipe 45 fixedly connected to the purification box 41, one end of the first connecting pipe 45 is fixedly connected to the second mounting pipe 9 through a pipeline, a one-way valve is provided on the pipeline, and the outer surface of the transmission pipe 43 is transmission-connected to a second transmission mechanism connected to the purification box 41.

[0043] The other end of the transmission pipe 43 is rotatably connected to a second connecting pipe 46 fixedly connected to the purification box 41 , one end of the second connecting pipe 46 is fixedly connected to a third connecting pipe 47 fixedly connected to the purification box 41 , and the top of the purification box 41 is fixedly connected to an exhaust hole.

[0044] The second transmission mechanism includes a second transmission motor 51 fixedly connected to the purification box 41, the output end of the second transmission motor 51 is fixedly connected to the second rotating shaft 52 through a coupling, the outer surface of the second rotating shaft 52 is fixedly sleeved with a third transmission gear 53, and the outer surface of the third transmission gear 53 is meshingly connected with a fourth transmission gear 54 fixedly sleeved with the transmission tube 43.

[0045] The second rotating shaft 52 is driven to rotate by the second transmission motor 51 , and the second rotating shaft 52 drives the transmission tube 43 to rotate through the third transmission gear 53 and the fourth transmission gear 54 .

[0046] First, four-fifths of ethanol solvent is injected into the purification box 41, and then the transmission pipe 43 is driven to rotate by the second transmission mechanism, and the electromagnetic valve on the second installation pipe 9 is opened, and then the purified exhaust gas is supplied to the transmission pipe 43 through the one-way valve on the pipeline and the first connecting pipe 45 through the second installation pipe 9, and then the exhaust gas is evenly introduced into the purification box 41 through the exhaust pipe 44 on the surface of the transmission pipe 43, and then the exhaust pipe 44 is driven to rotate by the transmission pipe 43 to evenly pass the exhaust gas. The exhaust gas is then discharged through the exhaust pipe 44 in the transmission pipe 43 and then evenly introduced into the purification box 41 again through the exhaust pipe 44, so that the exhaust gas is absorbed and purified again, thereby achieving sufficient purification of the trimethyl phosphate in the purified exhaust gas, thereby greatly improving the treatment effect of the exhaust gas.

[0047] A first water inlet pipe 61 is fixedly connected to the top of the purification box 41 , and a first drain pipe 62 is fixedly connected to the bottom of the purification box 41 . Both the first water inlet pipe 61 and the first drain pipe 62 are provided with electromagnetic valves.

[0048] The ethanol solution that absorbs trimethyl phosphate is discharged through the first drainage pipe 62 , and the ethanol solution is replenished into the purification box 41 through the first water inlet pipe 61 .

[0049] A second water inlet pipe 71 is fixedly connected to the top of the deodorizing box 3 , and a second drain pipe 72 is fixedly connected to the bottom of the deodorizing box 3 . Both the second water inlet pipe 71 and the second drain pipe 72 are provided with electromagnetic valves.

[0050] The ethanol solution that absorbs trimethyl phosphate is discharged through the second drainage pipe 72, and the ethanol solution is replenished in the deodorizing box 3 through the second water inlet pipe 71.

[0051] The working principle of the present invention is as follows: the tail gas containing trimethyl phosphate is introduced into the deodorizing box 3, and then the transmission shaft 11 of the driving mechanism is rotated, the transmission shaft 11 drives the installation frame 12 to rotate, the installation frame 12 drives the transmission column 13 to rotate, so that the transmission wheel 18 rotates in the deodorizing box 3, and at the same time, the transmission column 13 drives the first extrusion plate 14 and the second extrusion plate 17 to rotate. At this time, the installation frame 12, the transmission column 13, the first extrusion plate 14 and the second extrusion plate 17 stir and mix the ethanol solvent and the tail gas containing trimethyl phosphate in the deodorizing box 3, and the trimethyl phosphate is dissolved in the ethanol solvent. At the same time, while rotating, the transmission wheel 18 on the transmission column 13 contacts the transmission arc block 19, and at this time, the transmission arc block 19 drives the transmission column 13 to move, and the spring 16 is compressed. At this time, the transmission column 13 drives the first extrusion plate 14 and the second extrusion plate 17 to rotate. One extrusion plate 14 moves, and multiple first extrusion plates 14 are squeezed together to generate a certain extrusion pressure between the exhaust gas and the ethanol solvent. At the same time, when the transmission wheel 18 is separated from the transmission arc block 19, the transmission column 13 is driven to move by the resilience of the spring 16, and the transmission column 13 drives the second extrusion plate 17 to move. At this time, a certain extrusion pressure is generated between the second extrusion plate 17 and the inner wall of the deodorization box 3, so that a certain extrusion pressure is generated between the exhaust gas and the ethanol solvent again, so that the exhaust gas and the ethanol solvent are better integrated. At the same time, the first transmission mechanism drives the mounting shaft 2 and the deodorization box 3 to swing back and forth, which once again promotes the integration of the ethanol solvent and the exhaust gas, thereby achieving full integration of the trimethyl phosphate in the exhaust gas, greatly improving the absorption effect of the trimethyl phosphate, and further improving the deodorization effect of the trimethyl phosphate.

[0052] The transmission pipe 43 is driven to rotate by the second transmission mechanism, and the electromagnetic valve on the second mounting pipe 9 is opened, and then the purified exhaust gas is supplied to the transmission pipe 43 through the one-way valve on the pipeline and the first connecting pipe 45 through the second mounting pipe 9. Then the exhaust gas is evenly introduced into the purification box 41 through the exhaust pipe 44 on the surface of the transmission pipe 43. Then the exhaust pipe 44 is driven to rotate by the transmission pipe 43, and the exhaust gas is evenly introduced into the purification box 41, so that the ethanol solvent absorbs the trimethyl phosphate in the exhaust gas. Then the gas enters the second connecting pipe 46 at the other end of the transmission pipe 43 through the third connecting pipe 47, and then enters the exhaust pipe 44 in the transmission pipe 43 through the second connecting pipe 46 to be discharged, and then the exhaust gas is evenly introduced into the purification box 41 again through the exhaust pipe 44, so that the exhaust gas is absorbed and purified again, thereby achieving sufficient purification of the trimethyl phosphate in the purified exhaust gas, thereby greatly improving the treatment effect of the exhaust gas.

[0053] The above is a detailed description of an embodiment of the present invention, but the content is only a preferred embodiment of the present invention and cannot be considered to limit the scope of implementation of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A trimethyl phosphate distillation tail gas deodorization device, comprising a mounting platform, characterized in that: An installation shaft is rotatably connected in the installation platform, one end of the installation shaft is fixedly connected to a deodorizing box rotatably connected to the installation platform, an air inlet pipe is fixedly connected to one side of the deodorizing box, a gas one-way valve is arranged on the air inlet pipe, one end of the air inlet pipe is fixedly connected to a hose fixedly connected to the installation platform, an exhaust pipe is fixedly connected to one side of the deodorizing box, an electromagnetic valve is arranged on the exhaust pipe, one end of the exhaust pipe is fixedly connected to a first installation pipe fixedly connected to the installation platform through the hose, an elastic airbag is fixedly connected to the top of the first installation pipe, a second installation pipe is fixedly connected to the top of the elastic airbag, an electromagnetic valve is arranged on the second installation pipe, and a rear-end purification mechanism fixedly connected to the installation platform is drivingly connected to the outer surface of the second installation pipe, and the rear-end purification mechanism is used for re-purifying and deodorizing the gas purified by the deodorizing box; An extrusion and fusion mechanism is provided in the deodorizing box, and the extrusion and fusion mechanism is used for the organic solution to absorb trimethyl phosphate. The outer surface of the mounting shaft is transmission-connected with a first transmission mechanism connected to the mounting platform, and the first transmission mechanism is used for driving the mounting shaft to rotate; The extrusion and fusion mechanism comprises a transmission shaft rotatably connected to the deodorizing box, a plurality of mounting frames are fixedly connected to the outer surface of the transmission shaft, two transmission columns are slidably connected in the mounting frame, a first extrusion plate is fixedly connected to one end of the transmission column, a mounting block is fixedly connected to the outer surface of the transmission column, a spring fixedly sleeved with the mounting block is fixedly connected to the outer surface of the transmission column, a second extrusion plate is fixedly connected to the outer surface of the transmission column, a transmission wheel is fixedly connected to one end of the transmission column, a plurality of transmission arc blocks slidably connected to the transmission wheel are fixedly connected to the inner surface of the deodorizing box, and a driving mechanism connected to the deodorizing box is transmission-connected to the outer surface of the transmission shaft; The driving mechanism includes a driving motor fixedly connected to the deodorizing box, the output end of the driving motor is fixedly connected to the driving shaft through a coupling, the outer surface of the driving shaft is fixedly sleeved with a first driving gear, and the outer surface of the first driving gear is meshingly connected with a second driving gear fixedly sleeved with the transmission shaft.

2. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 1, characterized in that: The first transmission mechanism includes a first transmission motor fixedly connected to the mounting platform, the output end of the first transmission motor is fixedly connected to the first rotating shaft through a coupling, the outer surface of the first rotating shaft is fixedly sleeved with a first transmission gear, and the outer surface of the first transmission gear is meshingly connected with a second transmission gear fixedly sleeved with the mounting shaft.

3. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 1, characterized in that: The rear-end purification mechanism includes a purification box fixedly connected to the mounting platform, a partition is fixedly connected inside the purification box, a transmission pipe rotatably connected to the partition is rotatably connected inside the purification box, a partition block is fixedly connected to the middle position of the transmission pipe, a plurality of air outlet pipes are fixedly connected to the outer surface of the transmission pipe, one end of the transmission pipe is rotatably connected to a first connecting pipe fixedly connected to the purification box, one end of the first connecting pipe is fixedly connected to the second mounting pipe through a pipeline, a one-way valve is arranged on the pipeline, and the outer surface of the transmission pipe is transmission-connected to a second transmission mechanism connected to the purification box.

4. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 3, characterized in that: The other end of the transmission pipe is rotatably connected to a second connecting pipe fixedly connected to the purification box, one end of the second connecting pipe is fixedly connected to a third connecting pipe fixedly connected to the purification box, and the top of the purification box is fixedly connected to an exhaust hole.

5. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 3, characterized in that: The second transmission mechanism includes a second transmission motor fixedly connected to the purification box, the output end of the second transmission motor is fixedly connected to the second rotating shaft through a coupling, the outer surface of the second rotating shaft is fixedly sleeved with a third transmission gear, and the outer surface of the third transmission gear is meshingly connected with a fourth transmission gear fixedly sleeved with the transmission pipe.

6. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 3, characterized in that: The top of the purification box is fixedly connected with a first water inlet pipe, the bottom of the purification box is fixedly connected with a first drain pipe, and both the first water inlet pipe and the first drain pipe are provided with electromagnetic valves.

7. A trimethyl phosphate distillation tail gas deodorization equipment according to claim 1, characterized in that: The top of the deodorizing box is fixedly connected with a second water inlet pipe, the bottom of the deodorizing box is fixedly connected with a second drainage pipe, and the second water inlet pipe and the second drainage pipe are both provided with electromagnetic valves.

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