Thin film material phase change temperature measuring device capable of stably loading and unloading sample

Abstract

The invention discloses a thin film material phase change temperature measuring device capable of stably loading and unloading a sample, and belongs to the field of semiconductor thin film thermal performance measurement, the thin film material phase change temperature measuring device comprises a quick closing door, a vacuum cavity, a box plate valve, a sample injection cabin and a magnetic sample injection rod, the quick closing door is arranged on one side of the vacuum cavity, and the sample injection cabin is arranged on one side, away from the quick closing door, of the vacuum cavity; the box plate valve is installed on the side, close to the vacuum cavity, of the sample injection cabin, the magnetic sample injection rod is installed on the side, away from the box plate valve, of the sample injection cabin, an electric control displacement platform is arranged at the bottom of the vacuum cavity, a receiving frame is arranged in the vacuum cavity, the electric control displacement platform is sleeved with an evaporation source, and the evaporation source is located under the receiving frame. According to the device, the magnetic sampling rod, the receiving frame and the evaporation source are matched with one another; the problem that a sample is not fixed in a sample injection process is solved, and the stability of a light path is ensured; meanwhile, the stability of the sample table and the leakproofness of the cavity are also ensured; and the sample and the thermocouple can be in stable pressure contact.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor film thermal performance testing, and in particular to a thin film material phase change temperature measuring device with stable sample loading and unloading. Background Art

[0002] The stable injection of phase change film is the premise and important guarantee for the accurate measurement of phase change temperature by the thin film phase change temperature measuring instrument. At the same time, the injection must also meet the convenience of operation. At present, there are two main injection methods for the phase change temperature measuring instrument of phase change film material. One is that the phase change film material sample is placed directly in the tray without being fixed. The instrument temperature measuring thermocouple has no pressure contact with the sample. The tray is horizontally connected to the push-pull rod, and the push-pull rod is fixed on the horizontal guide rail. The sample is transported horizontally to the sample chamber through the guide rail and the push-pull rod together with the tray. The other is to manually place the sample on the sample table inside the instrument through the observation window of the sample chamber. The instrument temperature measuring thermocouple has pressure contact with the sample, and the sample is fixedly installed on the sample table. In the first injection method, the sample is not fixed. During the sample pushing and testing process, the sample is prone to move, causing the optical path to deviate and causing temperature measurement errors. In the second injection method, frequent opening of the observation window destroys the airtightness of the instrument, and manual loading of samples is inconvenient. Long-term installation causes the thermocouple to deform, causing temperature measurement errors.

[0003] In view of the shortcomings of the existing technical solutions, the present application proposes a thin film material phase change temperature measurement device with stable sample loading and unloading. Summary of the invention

[0004] The purpose of the present invention is to provide a thin film material phase change temperature measuring device with stable sample loading and unloading. The sample stage is grabbed by a magnetic rod and sent to a receiving frame of a suspended sample stage. The sample stage is fixed by the receiving frame of the sample stage, and then the electric-controlled displacement platform is started to raise the evaporation source. The evaporation source surrounds the receiving device for heating. This design solves the problem of sample instability during the sampling process, and also ensures the stability of the sample stage and the airtightness of the chamber.

[0005] To achieve the above-mentioned purpose, the present invention provides a thin film material phase change temperature measuring device with stable sample loading and unloading, comprising a quick-closing door, a vacuum chamber, a cartridge valve, an injection chamber, and a magnetic injection rod, wherein the quick-closing door is arranged on one side of the vacuum chamber, the injection chamber is arranged on the side of the vacuum chamber away from the quick-closing door, the cartridge valve is installed on the side of the injection chamber close to the vacuum chamber, the magnetic injection rod is installed on the side of the injection chamber away from the cartridge valve, an electric-controlled displacement platform is arranged at the bottom of the vacuum chamber, a receiving frame is arranged inside the vacuum chamber, an evaporation source is arranged on the outside of the electric-controlled displacement platform, the evaporation source is located directly below the receiving frame, and a sample stage is arranged at one end of the magnetic injection rod close to the injection chamber.

[0006] Preferably, the vacuum chamber comprises a chamber shell and a sealed observation window, the sealed observation windows are symmetrically arranged on both sides of the vacuum chamber and the line connecting the two sealed observation windows is perpendicular to the line connecting the quick-closing door and the injection chamber.

[0007] Preferably, the magnetic injection rod includes an adjustment frame, a magnetic rod and a locking handle. The adjustment frame is fixed to one side of the magnetic rod and connected to the injection chamber. The magnetic rod is the main part of the magnetic injection rod. A locking mechanism is provided at the head of the magnetic rod close to one end of the adjustment frame. The opening and closing state of the locking mechanism can be controlled by rotating the locking handle.

[0008] Preferably, the magnetic injection rod is connected to the sample stage via a locking mechanism.

[0009] Preferably, the receiving frame includes a support rod, an elastic pressing sheet, a receiving platform and a fixed plate, the fixed plate is fixed to the inner surface of the upper side of the vacuum chamber, the support rod is fixed to the lower side of the supporting plate, the receiving platform is connected to the support rod, and the elastic pressing sheet is arranged on both sides of the receiving platform close to the support rod.

[0010] Preferably, the sample stage comprises an upper plate, a sample support plate and a nut, a light hole is arranged at the center of the upper plate, the sample support plate is arranged below the upper plate, and the upper plate and the sample support plate are connected via the nut.

[0011] Preferably, the evaporation source is a heating furnace.

[0012] Therefore, the thin film material phase change temperature measuring device with stable sample loading and unloading using the above structure of the present invention has the following advantages:

[0013] 1. It solves the problem of inconvenience in manually loading and unloading samples by opening and closing the door. The sample delivery rod can stably and accurately deliver the sample into the sample chamber; at the same time, it ensures the airtightness of the instrument;

[0014] 2. Fixing the sample to be tested by the sample stage solves the problem of the sample being placed unfixed or being inconvenient to fix from below, ensuring that the test sample is accurately fixed and easy to operate;

[0015] 3. Accurately load and unload samples and sample stages under visual conditions. At the same time, regardless of changes in sample thickness, the position of the sample surface is fixed, which improves the stability and repeatability of the sampling process and ensures the accuracy of the test results. The sample loading and unloading operation of this application proposal is simple and convenient;

[0016] 4. The layout of the adjustment rack ensures the fault tolerance of the injection process and reduces the system error accuracy of technical and process problems;

[0017] 5. The receiving rack double-positions and fixes the sample stage through the channel of the main body and the elastic pressing piece to ensure the stability of the sample and the accuracy of the position;

[0018] 6. The suspended arrangement of the receiving rack ensures the layout space of the evaporation source under the entire instrument, and is also conducive to the experimenter to observe the sampling process inside the instrument through the observation window.

[0019] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a front view of a thin film material phase change temperature measuring device with stable sample loading and unloading according to the present invention;

[0021] Figure 2 It is a rear view of a thin film material phase change temperature measuring device with stable sample loading and unloading according to the present invention;

[0022] Figure 3 This is a structural diagram of a receiving frame of a thin film material phase change temperature measuring device for stably loading and unloading samples of the present invention;

[0023] Figure 4 A sample stage pattern for a thin film material phase change temperature measurement device with stable sample loading and unloading according to the present invention;

[0024] Figure 5 This is an assembly diagram of a sample stage and a receiving frame of a thin film material phase change temperature measuring device with stable sample loading and unloading according to the present invention.

[0025] Reference numerals

[0026] 1. Quick closing door; 2. Vacuum chamber; 201. Chamber shell; 202. Sealed observation window; 3. Box plate valve; 4. Injection chamber; 5. Magnetic injection rod; 501. Adjustment frame; 502. Magnetic rod; 503. Locking handle; 6. Electric displacement platform; 7. Receiving frame; 701. Support rod; 702. Elastic pressing piece; 703. Receiving platform; 704. Fixed plate; 8. Sample stage; 801. Upper plate; 802. Sample support plate; 803. Nut; 9. Evaporation source. DETAILED DESCRIPTION

[0027] Example

[0028] In the description of the present invention, it should be noted that the terms "upper", "lower", "inside", "outside", etc. indicate directions or positional relationships based on the directions or positional relationships shown in the accompanying drawings, or are directions or positional relationships in which the product of the invention is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0029] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0030] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the following embodiments and features in the embodiments can be combined with each other.

[0031] like Figure 1-5As shown, a thin film material phase change temperature measuring device with stable sample loading and unloading of the present invention comprises a quick-closing door 1, a vacuum chamber 2, a cartridge valve 3, a sampling chamber 4, and a magnetic sampling rod 5. The quick-closing door 1 is arranged on one side of the vacuum chamber 2, the sampling chamber 4 is arranged on the side of the vacuum chamber 2 away from the quick-closing door 1, the cartridge valve 3 is installed on the side of the sampling chamber 4 close to the vacuum chamber 2, the magnetic sampling rod 5 is installed on the side of the sampling chamber 4 away from the cartridge valve 3, an electric-controlled displacement platform 6 is arranged at the bottom of the vacuum chamber 2, a receiving frame 7 is arranged inside the vacuum chamber 2, an evaporation source 9 is arranged outside the electric-controlled displacement platform 6, and the evaporation source 9 is located directly below the receiving frame 7, and a sample stage 8 is arranged at one end of the magnetic sampling rod 5 close to the sampling chamber 4. The vacuum chamber 2 comprises a chamber housing 201 and a sealed observation window 202, the sealed observation windows 202 are symmetrically arranged on both sides of the vacuum chamber 2, and the connecting line of the two sealed observation windows 202 is perpendicular to the connecting line of the quick-closing door 1 and the sampling chamber 4. The magnetic injection rod 5 comprises an adjustment frame 501, a magnetic rod 502 and a locking handle 503. The adjustment frame 501 is fixed to one side of the magnetic rod 502 and connected to the injection chamber 4. The head of the magnetic rod 502 near one end of the adjustment frame 501 is provided with a locking mechanism, and the opening and closing state of the locking mechanism can be controlled by rotating the locking handle 503. The magnetic injection rod 5 is connected to the sample stage 8 through a locking mechanism. The receiving frame 7 comprises a support rod 701, an elastic pressing sheet 702, a receiving platform 703 and a fixed disk 704. The fixed disk 704 is fixed to the inner surface of the upper side of the vacuum chamber 2, the support rod 701 is fixed to the lower side of the support disk, the receiving platform 703 is connected to the support rod 701, and the elastic pressing sheet 702 is arranged on both sides of the receiving platform 703 near the support rod 701. The sample stage 8 includes an upper plate 801 , a sample support plate 802 and a nut 803 . A light hole is provided at the center of the upper plate 801 . The sample support plate 802 is provided below the upper plate 801 . The upper plate 801 and the sample support plate 802 are connected via a nut 803 .

[0032] The device works as Figure 1-5 As shown, at the beginning of the experiment, the sample stage 8 carrying the sample to be tested is first installed on the magnetic sampling rod 5 in the sampling chamber 4, and the locking mechanism is controlled to fall and open by rotating the locking handle 503 to lock the magnetic sampling rod 5 and the sample stage 8, and the sampling chamber 4 is closed, and the sampling chamber 4 is evacuated. After the vacuuming is completed, the cartridge valve 3 is opened to connect the heated vacuum chamber 2 and the sample injection chamber 4, and the sample stage 8 carrying the sample to be tested is sent into the vacuum chamber 2 by the magnetic sampling rod 5, and the magnetic rod 502 is controlled to fix the sample stage 8 on the receiving platform 703, and the locking handle 503 is rotated to control the locking mechanism to be retracted and closed, and then the magnetic rod 502 is controlled to retract, and the cartridge valve 3 is closed, and the evaporation source 9 rises under the control of the electric control displacement platform 6, and rises to the receiving frame 7 at the center of the evaporation source 9, stops, and starts heating.

[0033] Therefore, the present invention adopts the above-mentioned structure to measure the phase change temperature of thin film materials with stable sample loading and unloading. The sample stage is grabbed by a magnetic rod, and the sample stage is sent into a receiving device of a suspended sample stage. The sample stage is fixed by the receiving device of the sample stage, and then the electric-controlled lifting device is started to raise the heating system. The evaporation source (heating furnace) surrounds the receiving device for heating. This design solves the problem of unstable samples during the sampling process, and also ensures the stability of the sample stage and the airtightness of the chamber.

[0034] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that they can still modify or replace the technical solution of the present invention with equivalents, and these modifications or equivalent replacements cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of the present invention.

Claims

1. A thin film material phase change temperature measurement device with stable sample loading and unloading, characterized in that: The invention comprises a quick-closing door, a vacuum chamber, a cartridge valve, an injection chamber, and a magnetic injection rod, wherein the quick-closing door is arranged at one side of the vacuum chamber, the injection chamber is arranged at a side of the vacuum chamber away from the quick-closing door, the cartridge valve is installed at a side of the injection chamber close to the vacuum chamber, the magnetic injection rod is installed at a side of the injection chamber away from the cartridge valve, an electric-controlled displacement platform is arranged at the bottom of the vacuum chamber, a receiving frame is arranged inside the vacuum chamber, an evaporation source is arranged on the outside of the electric-controlled displacement platform, the evaporation source is located directly below the receiving frame, and a sample stage is arranged at one end of the magnetic injection rod close to the injection chamber.

2. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The vacuum chamber comprises a chamber shell and a sealed observation window, wherein the sealed observation windows are symmetrically arranged on both sides of the vacuum chamber and a line connecting the two sealed observation windows is perpendicular to a line connecting the quick-closing door and the injection chamber.

3. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The magnetic injection rod comprises an adjustment frame, a magnetic rod and a locking handle. The adjustment frame is fixed on one side of the magnetic rod and connected to the injection chamber. A locking mechanism is provided at the head of the magnetic rod close to one end of the adjustment frame. The opening and closing state of the locking mechanism is controlled by rotating the locking handle.

4. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The magnetic injection rod is connected to the sample platform through a locking mechanism.

5. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The receiving frame includes a support rod, an elastic pressing sheet, a receiving platform and a fixed plate, the fixed plate is fixed to the inner surface of the upper side of the vacuum chamber, the support rod is fixed to the lower side of the supporting plate, the receiving platform is connected to the support rod, and the elastic pressing sheet is arranged on both sides of the receiving platform close to the support rod.

6. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The sample stage comprises an upper plate, a sample support plate and a nut. A light hole is arranged at the center of the upper plate. The sample support plate is arranged below the upper plate. The upper plate and the sample support plate are connected via the nut.

7. The thin film material phase change temperature measuring device with stable sample loading and unloading according to claim 1, characterized in that: The evaporation source is a heating furnace.

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