Vacuum coating machine capable of improving coating purity

Abstract

The invention relates to the technical field of vacuum coating, in particular to a vacuum coating machine capable of improving coating purity, which comprises a bearing frame and a coating cavity mounted in the bearing frame, and the coating cavity is of an inverted conical structure; a rotary driving rod is mounted in the middle of the upper part of the coating cavity in a penetrating manner, and a non-contact transmission assembly is mounted above a main mounting rod, so that friction caused by contact is avoided; the interior of the lower portion of the bearing frame is connected with the evaporation source carrying table through a rotary lifting control mechanism. According to the vacuum coating machine capable of improving the coating purity, the cleanliness of a coating area can be improved through the non-contact transmission assembly, so that the coating purity and the product performance can be further improved, airflow generated by pressure difference can be reduced through the arrangement of the hollow interlayer groove, and the situation that the purity and the adhesive force of a formed film are affected due to the fact that tiny dust particles are raised is avoided; therefore, the cleanliness of the coating area can be further improved, and the coating purity is further improved.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, in particular to a vacuum coating machine capable of improving the purity of coating. Background Art

[0002] The vacuum coating machine is a device that coats the surface of the wafer under vacuum, thereby improving the product performance of the wafer. At present, there are still some problems in the use of vacuum coating machines on the market, such as: The patent name disclosed in the prior art with application number "CN201310209692.6" is "An OLED coating machine with a double rotating mechanism", which discloses that the flange and the central axis are connected to the driving power system of the rotating mechanism arranged in the top of the vacuum chamber to obtain power rotation, thereby driving three small rotating pot-shaped brackets to rotate synchronously, that is, the synchronous "revolution" of the workpiece bracket; each of the three support arms is also provided with a transmission shaft of the same design, and bevel gears and worm gears are respectively provided at both ends of the shaft, and the bevel gears and the flange are connected. The driving gear on the central axis meshes to obtain rotational power, so that the three small rotating pot-shaped brackets "rotate" while "revolving"; by changing the direction of the thread on the worm and the worm wheel, the pot-shaped bracket can be rotated counterclockwise or clockwise. The other set is composed of a rotating cylindrical bracket arranged along the inner circumference of the lower middle part of the vacuum chamber, and is characterized in that the support rods extending from the ends of the three support arms are firmly connected to the rotating cylindrical bracket with screws and nuts, that is, the rotating cylindrical bracket is suspended on the entire support frame composed of the support arms, and rotates synchronously with the three small rotating pot-shaped brackets.

[0003] The patent name disclosed in the prior art with application number "CN201910747796.X" is "A round pot clamp and a coating device". It discloses that the round pot clamp body can rotate around the round pot clamp bearing while revolving on the round pot clamp track to form a planetary rotation motion. The revolution direction is exactly opposite to the rotation direction. Through the revolution and rotation of the round pot clamp body and the rotation of the wafer clamp, the uniformity of wafer coating can be greatly improved. The round pot clamp body can drive the four wafer clamps to rotate around the wafer clamp bearing in the opposite direction of the rotation direction of the round pot clamp body through the planetary rotation mechanism. The planetary rotation mechanism includes a center gear and a driven gear. The four driven gears are in meshing transmission contact with the center gear to realize the rotation of the center gear and drive the driven gears to rotate.

[0004] When the vacuum coating machine in the above-mentioned prior art is in use, the meshing transmission contact between the center gear and the driven gear in the planetary rotating mechanism is used to make the center gear drive the driven gear to rotate. However, if used for a long time, the tooth surface of the center gear will contact with the tooth surface of the driven gear and generate friction. In the process of friction, metal dust particles will be generated. These metal dust particles will fall into the coating chamber, which will affect the cleanliness of the coating chamber, and thus affect the purity of the coating and the performance of the product.

[0005] Therefore, we proposed a vacuum coating machine which can improve the purity of coating in order to solve the above problems. Summary of the invention

[0006] The object of the present invention is to provide a vacuum coating machine that can improve the purity of the coating, so as to solve the problem proposed in the above background technology that the tooth surface of the center gear of the vacuum coating machine currently on the market contacts with the tooth surface of the driven gear and generates friction, and metal dust particles are generated during the friction process. These metal dust particles will fall downward into the coating chamber, which will affect the cleanliness of the coating chamber, and thus affect the purity of the coating and the performance of the product.

[0007] To achieve the above object, the present invention provides the following technical solution: a vacuum coating machine capable of improving the purity of coating, comprising a carrier frame and a coating cavity installed in the carrier frame, wherein the coating cavity is arranged in an inverted cone shape; A rotating drive rod is installed through the middle position of the upper part of the coating chamber, and the outer side of the lower end of the rotating drive rod is connected to three groups of main mounting rods through three groups of second support arms, and the mounting carrier at the lower end of the main mounting rod is connected to the coating pot mounting rod above the coating pot body through a clamping assembly; A contactless transmission assembly is installed above the main mounting rod to avoid friction caused by contact; The lower interior of the carrier is connected to the evaporation source carrier through a rotating lifting control mechanism. The evaporation source carrier is equipped with a crucible evaporation source and an evaporation source baffle, and an evaporation source baffle is arranged above the crucible evaporation source.

[0008] Preferably, two groups of channels are symmetrically installed on the left side of the coating chamber, the left ends of the two groups of channels are both installed with first gate valves, and the left side of the first gate valve is fixed with a first cryogenic pump; A second gate valve is installed below the coating chamber, and an evaporation source carrier is correspondingly arranged below the right side of the second gate valve; A hollow interlayer groove is provided inside the lower left side of the second gate valve, a third gate valve is connected to the lower left side of the second gate valve, and a second cryogenic pump is installed below the third gate valve; A door frame is installed on the right side of the coating chamber, an opening and closing door is arranged inside the door frame, an observation window is installed inside the opening and closing door, and the opening and closing door is tightly and sealedly connected to the right side of the coating chamber; The first gate valve, the first cryogenic pump, the second gate valve, the third gate valve and the second cryogenic pump are all connected to the carrier.

[0009] Preferably, a bearing seat is installed on the outer side of one end of the second support arm close to the main mounting rod, the main mounting rod is installed through the bearing seat, and a mounting carrier is arranged below the bearing seat; The contactless transmission assembly includes a small gear installed on the outside of the main mounting rod, and the contactless transmission assembly also includes a large gear installed on the inner wall above the coating cavity, and three groups of small gears are arranged on the outside of the large gear in a non-contact manner; The outer side of the large gear and the outer side of the small gear are both equipped with gear teeth by screws; The gear teeth on the outside of the large gear and the gear teeth on the outside of the small gear are both made of magnets, and both have the same magnetic poles. The small gear revolves and rotates on the outside of the large gear in a contactless manner.

[0010] Preferably, the spherical centers of the three plating pot bodies coincide with the positions of the crucible evaporation sources.

[0011] Preferably, the mounting carrier is arranged in a "U"-shaped structure, and a placement groove is provided inside the bottom surface of the mounting carrier, the placement groove is matched with the upper end of the plating pot mounting rod in a concave-convex manner, and through holes are symmetrically provided on the outer side surface of the mounting carrier; A handle is arranged on the plating pot body.

[0012] Preferably, the clamping assembly comprises an ejector pin installed in the through hole, a compression spring is nested and connected to the outer side of the ejector pin, the upper end of the plating pot mounting rod is arranged in a rectangular shape, the two side surfaces of the upper end of the plating pot mounting rod are arranged in an inclined shape, the inner end of the ejector pin is fitted on the two side surfaces of the upper end of the plating pot mounting rod, and the lowest point of the inclined surface of the upper end of the plating pot mounting rod is lower than the lowest point of the ejector pin; The outer end of the ejector pin is connected to the lever.

[0013] Preferably, the rotation and lifting control mechanism comprises a first support arm mounted on the bottom surface of the evaporation source carrier, a connecting sleeve is fixed to the other end of the first support arm, and a limiting column is installed inside the lower part of the connecting sleeve; A vertical rod is provided in the connecting sleeve, a limiting groove is provided inside the vertical rod, and a limiting column is provided in the limiting groove; A lifting control frame is arranged on the outer side of the connecting sleeve, and a vertical rod is arranged through the lifting control frame.

[0014] Preferably, the right side of the lifting control frame is arranged in a "U"-shaped structure, and the lower left side of the lifting control frame is connected to the electric push rod in the lower part of the bearing frame; The bottom end of the vertical rod is connected to the motor below the carrier frame; The connecting sleeve forms a lifting structure with the vertical rod through the lifting control frame, and the connecting sleeve rotates synchronously with the vertical rod.

[0015] Preferably, the clamping assembly comprises a clamping column symmetrically installed through the outer side of the upper end of the plating pot mounting rod, and a return spring is nested and connected to the outer side of the inner end of the clamping column; A regulating block with a conical structure is installed in the internal slot above the plating pot installation rod, and the lower part of the regulating block is connected to the inside of the plating pot installation rod through an adjusting spring; The inner end of the clamping column is fitted on the outer side of the regulating block. The clamping column forms a sliding structure with the plating pot mounting rod through the lifting and lowering of the regulating block, and the outer end of the clamping column is inserted into the through hole. The highest point of the plated pot mounting rod is higher than the highest point of the through hole.

[0016] Preferably, a sliding groove is provided in one of the handles above the plating pot body, a sliding rod is connected through the sliding groove, the diameter of the middle part of the sliding rod is smaller than the diameters at both ends, and the diameters at both ends of the sliding rod are larger than the height of the sliding groove; One side surface of the sliding rod is connected to one end of a connecting rope, and the other end of the connecting rope penetrates through the handle and the plating pot mounting rod and is connected to the bottom surface of the regulating block through a guide wheel.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows: the vacuum coating machine capable of improving the purity of the coating can improve the cleanliness of the coating area through the contactless transmission component, thereby further improving the purity of the coating and product performance; the airflow generated by the pressure difference can be reduced through the setting of the hollow interlayer groove, and tiny dust particles can be prevented from being raised to affect the purity and adhesion of the film, thereby further improving the cleanliness of the coating area and further improving the purity of the coating. The specific contents are as follows: The gear teeth on the outside of the large gear in the contactless transmission assembly have the same magnetic poles, and the gear teeth on the outside of the small gear have the same magnetic poles. The magnetism of the gear teeth on the outside of the large gear is the same as that of the gear teeth on the outside of the small gear. Therefore, through the principle of repulsion of magnetic poles of the same name, the large gear and the small gear can rotate without contact, thereby avoiding direct contact between the tooth surfaces of the gear teeth on the outside of the large gear and the gear teeth on the outside of the small gear to cause wear, thereby avoiding the generation of metal dust particles and the falling of particles during the wear process, thereby improving the cleanliness of the coating area, thereby further improving the purity of the coating and product performance; The magnetic field of the large gear and the small gear only affects the handle at the maximum, and will not reach the plating pot body, so it will not affect the coating work; By setting up the hollow interlayer groove, the second cryopump can be connected to the evaporation source area, so that when the second gate valve between the upper coating area and the evaporation source area is opened, the airflow generated by the pressure difference can be reduced to prevent tiny dust particles from being raised and affecting the purity and adhesion of the film, thereby further improving the cleanliness of the coating area, which not only improves the purity of the coating, but also improves the quality of the coating.

[0018] (2) By using two first gate valves, only the required area can be returned to the atmospheric pressure state, so that each area can be controlled separately, thereby shortening the time spent on each vacuum pumping, thereby improving the utilization efficiency of the entire vacuum coating machine; The coating chamber is set in an inverted cone shape, which can reduce the space between the coating chamber and the coating pot body, thereby reducing the space within the non-use evaporation range of the coating pot body, and further shortening the vacuum pumping time, thereby further improving the use efficiency of the vacuum coating machine.

[0019] (3) The evaporation source carrier can be rotated to the outside of the carrier frame by the rotary lifting control mechanism, so it is convenient to add materials, repair and maintain the crucible evaporation source. The second cryogenic pump and the third gate valve are installed in coordination with each other, and there is no need to directly connect the second cryogenic pump to the evaporation source carrier. Therefore, the gravity of the second cryogenic pump itself can be prevented from generating a large gravity load on the first support arm of the evaporation source carrier, which is convenient for protecting the first support arm.

[0020] (4) By setting the clamping assembly, it is convenient to install and disassemble the mounting carrier and the plating pot mounting rod, thereby facilitating the installation and disassembly of the plating pot body, and the operation is convenient; The clamping assembly includes an ejector pin and a lever. The ejector pin can be separated from the inclined surface of the upper surface of the plating pot mounting rod by simply pulling the lever outward so that the lever drives the ejector pin to move outward, thereby facilitating the separation of the plating pot mounting rod from the mounting carrier. The clamping assembly includes a clamping column and an adjusting block. You only need to hold the sliding rod and the handle together so that the sliding rod pulls the connecting rope, and then the connecting rope pulls the adjusting block downward, thereby causing the clamping column to move in the opposite direction and reset through the stored force of the reset spring, so that the clamping column is separated from the through hole, thereby separating the plating pot mounting rod from the mounting carrier. The operation is convenient and does not require the use of both hands. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a left-side stereoscopic structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of the main stereoscopic structure of the present invention; Figure 3 It is a right-side stereoscopic structural schematic diagram of the present invention; Figure 4 It is a schematic diagram of a partial bottom-sectional structure of the second gate valve and the third gate valve separated from each other according to the present invention; Figure 5 This is a schematic diagram of the structure in which the first support arm and the vertical rod are separated in the second embodiment of the present invention; Figure 6 This is a schematic cross-sectional view of the connection between the first support arm and the vertical rod in the second embodiment of the present invention; Figure 7 This is a schematic diagram of the internal structure of the coating chamber of the present invention; Figure 8 This is a schematic diagram of the three-dimensional structure of the plating pot body of the present invention; Fig. 9 It is a schematic diagram of the connection structure between the bearing seat and the mounting carrier of the present invention; Fig.10 It is a schematic diagram of the cross-sectional structure of the connection between the support and the mounting carrier of the present invention; Fig.11 For the present invention Fig.10 The enlarged structural diagram at A in the middle; Fig.12 It is a schematic diagram of the separation structure of the mounting carrier and the plating pot mounting rod of the present invention; Fig.13 This is a schematic diagram of the connection structure between the bearing seat and the mounting carrier in the third embodiment of the present invention; Fig.14 This is a schematic cross-sectional view of the connection between the mounting carrier and the plating pot mounting rod in the third embodiment of the present invention; Fig.15 This is a schematic diagram of the structure in which the handle and the sliding rod are separated in Embodiment 3 of the present invention; Fig.16 This is a schematic diagram of the three-dimensional structure of the large gear of the present invention; Fig.17 It is a schematic diagram of a partial cross-sectional structure of the connection between the large gear and the small gear of the present invention; Fig.18 It is a partial exploded schematic diagram of the separation of the large gear and the small gear from the outer gear teeth of the present invention.

[0022] In the figure: 1, support frame; 2, coating chamber; 3, opening and closing door; 4, first gate valve; 5, first cryogenic pump; 6, channel; 7, second gate valve; 71, hollow interlayer groove; 8, vertical rod; 81, limit groove; 9, first support arm; 91, limit column; 92, lifting control frame; 93, connecting sleeve; 10, evaporation source carrier; 11, crucible evaporation source; 12, evaporation source baffle; 13, third gate valve; 14, rotation drive rod; 15, main installation rod; 151, small gear ; 16. Second support arm; 161. Bearing seat; 17. Plating pot body; 18. Handle; 181. Sliding groove; 182. Sliding rod; 19. Mounting carrier; 191. Through hole; 192. Ejector pin; 193. Push rod; 194. Placement groove; 195. Compression spring; 20. Plating pot mounting rod; 21. Snap-in column; 22. Control block; 23. Reset spring; 24. Connecting rope; 25. Adjustment spring; 26. Second cryogenic pump; 27. Observation window; 28. Large gear. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] See also Figure 1-Figure 18 , the present invention provides the following technical solutions: Embodiment 1: The vacuum coating machine capable of improving the purity of coating in this embodiment can improve the cleanliness of the coating area in multiple aspects during use, thereby improving the purity of coating and product performance, and also improving the efficiency of the vacuum coating machine. For specific structure, refer to the attached Figure 1-Figure 4 And attached Figure 7-Figure 12As shown, it includes a carrier frame 1 and a coating chamber 2 installed in the carrier frame 1. The coating chamber 2 is arranged in an inverted cone shape. A rotating drive rod 14 is installed through the upper middle position of the coating chamber 2. The outer side of the lower end of the rotating drive rod 14 is connected to three groups of main mounting rods 15 through three groups of second support arms 16. The mounting carrier 19 at the lower end of the main mounting rod 15 is connected to the coating pot mounting rod 20 above the coating pot body 17 through a clamping assembly. A contactless transmission assembly is installed above the main mounting rod 15 to avoid friction caused by contact. The lower interior of the carrier frame 1 is connected to the evaporation source carrier 10 through a rotating lifting control mechanism. A crucible evaporation source 11 and an evaporation source baffle 12 are installed in the evaporation source carrier 10. The evaporation source baffle 12 is arranged above the crucible evaporation source 11. The left side of the coating chamber 2 is symmetrical. Two groups of channels 6 are installed, and the left ends of the two groups of channels 6 are both installed with first gate valves 4, and the left side of the first gate valve 4 is fixed with a first cryogenic pump 5, a second gate valve 7 is installed below the coating chamber 2, and an evaporation source carrier 10 is correspondingly arranged below the right side of the second gate valve 7, a hollow interlayer groove 71 is opened inside the lower left side of the second gate valve 7, and the lower left side of the second gate valve 7 is connected with a third gate valve 13, and a second cryogenic pump 26 is installed below the third gate valve 13, a door frame is installed on the right side of the coating chamber 2, an opening and closing door 3 is arranged inside the door frame, and an observation window 27 is installed inside the opening and closing door 3, and the opening and closing door 3 is sealed and connected to the right side surface of the coating chamber 2, and the first gate valve 4, the first cryogenic pump 5, the second gate valve 7, the third gate valve 13 and the second cryogenic pump 26 are all connected to the carrier frame 1.

[0025] A bearing seat 161 is installed on the outer side of one end of the second support arm 16 close to the main mounting rod 15, and the main mounting rod 15 is installed through the bearing seat 161. A mounting carrier 19 is arranged below the bearing seat 161. The contactless transmission component includes a small gear 151 installed on the outer side above the main mounting rod 15. The contactless transmission component also includes a large gear 28 installed on the inner wall above the coating chamber 2. Three groups of small gears 151 are arranged on the outer side of the large gear 28 in a non-contact manner. The outer sides of the large gear 28 and the outer sides of the small gear 151 are both installed with gear teeth by screws. The gear teeth on the outer side of the large gear 28 and the gear teeth on the outer side of the small gear 151 are both made of magnet material, and the gear teeth on the outer side of the large gear 28 and the gear teeth on the outer side of the small gear 151 have the same magnetic poles. The small gear 151 revolves and rotates on the outer side of the large gear 28 in a non-contact manner. The center of the plating pot body 17 coincides with the position of the crucible evaporation source 11, the mounting carrier 19 is arranged in a "U" shape, and a placement groove 194 is provided inside the bottom surface of the mounting carrier 19, the placement groove 194 is matched with the upper end of the plating pot mounting rod 20, and the outer side surface of the mounting carrier 19 is symmetrically provided with through holes 191, and a handle 18 is installed on the plating pot body 17, and the clamping assembly includes a ejector pin 192 which is installed through the through hole 191, and a compression spring 195 is nested and connected to the outer side of the ejector pin 192, the upper end of the plating pot mounting rod 20 is arranged in a rectangular shape, and the two side surfaces of the upper end of the plating pot mounting rod 20 are arranged in an inclined shape, and the inner ends of the ejector pin 192 are fitted on the two side surfaces of the upper end of the plating pot mounting rod 20, and the lowest point of the inclined surface of the upper end of the plating pot mounting rod 20 is lower than the lowest point of the ejector pin 192; the outer end of the ejector pin 192 is connected to the lever 193.

[0026] Before the entire vacuum coating machine is used, the first gate valve 4 at the corresponding position is opened, and the first cryogenic pump 5 at the corresponding position is started. At this time, the first cryogenic pump 5 can effectively extract the steam and air in the coating chamber 2, so as to ensure the vacuum cleanliness and vacuum degree in the coating chamber 2. At the same time, through the coordinated use of two groups of first gate valves 4 and the first cryogenic pump 5, the sub-area control can be carried out, thereby reducing the time of each vacuuming, which can greatly improve the use efficiency of the entire vacuum coating machine. At the same time, during the vacuuming process, since the coating chamber 2 is set in an inverted cone shape, the space between the coating chamber 2 and the coating pot body 17 can be reduced, thereby reducing the non- By using the space within the evaporation range, the vacuuming time can be further shortened, thereby further improving the utilization efficiency of the vacuum coating machine. Then, the second gate valve 7 and the third gate valve 13 are opened, and the second cryogenic pump 26 is started at this time, so that the second cryogenic pump 26 is connected to the evaporation source area through the third gate valve 13 and the hollow interlayer groove 71, so that the second cryogenic pump 26 can well control the pressure difference between the coating area and the evaporation source area in the coating chamber 2, and can reduce the airflow generated by the pressure difference, thereby avoiding tiny dust particles from being lifted up and affecting the purity and adhesion of the film, thereby improving the cleanliness of the coating area, which not only improves the purity of the coating, but also improves the quality of the coating.

[0027] Then, the evaporation source baffle 12 is opened, and the crucible evaporation source 11 starts the coating operation. This part is the prior art and will not be introduced in detail here. At the same time, the motor at the upper end of the rotating drive rod 14 is started, and the motor drives the rotating drive rod 14 to rotate. Then, the rotating drive rod 14 drives the three sets of main mounting rods 15 to revolve through the second support arm 16 and the bearing seat 161. At this time, the main mounting rod 15 drives the mounting carrier 19 and the plating pot mounting rod 20 to revolve together, and then the plating pot mounting rod 20 drives the plating pot body 17 to revolve. When the main mounting rod 15 revolves, it will drive the small gear 151 installed on the top to revolve together. At this time, the small gear 15 1 revolves around the outside of the large gear 28. At this time, since the large gear 28 is fixed and immovable, and the gear teeth on the outside of the large gear 28 and the gear teeth on the outside of the small gear 151 have the same magnetic poles, a repulsive force will be generated between the large gear 28 and the small gear 151, so that the gear teeth on the outside of the small gear 151 and the gear teeth on the outside of the large gear 28 are concave-convex matched and do not contact each other, and then the small gear 151 revolves and rotates around the outside of the large gear 28 without contact, thereby avoiding direct contact between the gear teeth on the outside of the small gear 151 and the gear teeth on the outside of the large gear 28 to produce greater wear, so that no metal dust will be generated. The particles and the particles fall, thereby further improving the cleanliness of the coating area, thereby further improving the purity of the coating and the product performance. (A magnetic field will be generated between the large gear 28 and the small gear 151 with the same magnetic pole. During the design, the suction range of the magnetic field between the large gear 28 and the small gear 151 can be controlled by controlling the shape and size of the large gear 28 and the small gear 151, or by designing the appropriate distance between the large gear 28 and the small gear 151 and the plating pot body 17, so that the maximum suction range of the magnetic field between the large gear 28 and the small gear 151 is only to the position of the handle 18, and will not reach the plating pot itself. The position of the body 17 will not affect the coating work of the magnetic wafers in the coating pot body 17, so it is convenient for the vacuum coating machine to perform the coating work well. The influence range of this part of the magnetic field control is the existing technology and will not be introduced in detail here). Then, when the pinion 151 rotates, it will drive the main mounting rod 15 installed inside to rotate together, so that the main mounting rod 15 can rotate stably in the bearing seat 161, so that the main mounting rod 15 can rotate while revolving, so that the main mounting rod 15 drives the coating pot body 17 to revolve and rotate at the same time, so as to evenly coat the wafers in the coating pot body 17.

[0028] When the coating is completed, when it is necessary to disassemble a plating pot body 17 near the opening and closing door 3, the opening and closing door 3 in the door frame installed on the right side of the coating chamber 2 is manually opened first, and then the staff puts his hand into the coating chamber 2 (later, the three groups of plating pot bodies 17 are driven to rotate by rotating the driving rod 14, so that the three groups of plating pot bodies 17 can be rotated to the position close to the opening and closing door 3 in turn, which is convenient for disassembling the three groups of plating pot bodies 17 in turn), and the two levers 193 in the clamping assembly can be pulled outwards with both hands at the same time. At this time, the lever 193 drives the ejector pin 192 to be pulled outwards. At this time, the inner ends of the two ejector pins 192 enter the through hole 191 in the mounting carrier 19, and at the same time, the compression spring 195 is charged, and then The inner end of the rear ejector pin 192 is separated from the inclined surface of the upper surface of the plating pot mounting rod 20, and then another staff member holds the handle 18 and moves it upward and then outward, so that the plating pot body 17 and the plating pot mounting rod 20 move upward together first. At this time, the top of the plating pot mounting rod 20 is separated from the placement groove 194, and then the plating pot mounting rod 20 moves outward again and slides out from the opening on the side of the mounting carrier 19, so that the mounting carrier 19 is separated from the plating pot mounting rod 20, so that it is convenient to disassemble the plating pot body 17, and then the plating pot body 17 can be taken out from the opening on the right side of the coating chamber 2, so as to facilitate the later disassembly of the wafer in the plating pot body 17. When the plating pot body 17 needs to be installed, as shown above, the reverse operation can be performed.

[0029] Embodiment 2: The vacuum coating machine capable of improving the purity of the coating in this embodiment is convenient for rotating the evaporation source carrier 10 to the outside of the carrier frame 1 after use, so that it is convenient to add materials, repair and maintain the crucible evaporation source 11. The specific structure is shown in the attached Figure 1-Figure 3 And attached Figure 5-Figure 6 As shown, the rotary lifting control mechanism includes a first support arm 9 installed on the bottom surface of the evaporation source carrier 10, and a connecting sleeve 93 is fixed to the other end of the first support arm 9, and a limiting column 91 is installed inside the lower part of the connecting sleeve 93; a vertical rod 8 is arranged through the connecting sleeve 93, and a limiting groove 81 is arranged inside the vertical rod 8, and the limiting column 91 is arranged through the limiting groove 81; a lifting control frame 92 is arranged on the outer side of the connecting sleeve 93, and the vertical rod 8 is arranged through the lifting control frame 92, and the right side of the lifting control frame 92 is arranged in a "U" shape structure, and the lower left side of the lifting control frame 92 is connected to the electric push rod inside the lower part of the carrier frame 1; the bottom end of the vertical rod 8 is connected to the motor inside the lower part of the carrier frame 1; the connecting sleeve 93 and the vertical rod 8 form a lifting structure through the lifting control frame 92, and the connecting sleeve 93 rotates synchronously with the vertical rod 8.

[0030] When the vacuum coating machine is finished using, it is necessary to add materials, repair and maintain the crucible evaporation source 11, then the electric push rod under the carrier 1 is started first, and then the electric push rod drives the lifting control frame 92 to move downward, and then the lifting control frame 92 drives the connecting sleeve 93 to move downward, and at this time the connecting sleeve 93 slides downward on the outside of the vertical rod 8, and the limiting column 91 in the connecting sleeve 93 slides downward in the limiting groove 81, and then the connecting sleeve 93 drives the first support arm 9 to move downward, and the first support arm 9 drives the evaporation source carrier 10, the crucible evaporation source 11 and the evaporation source baffle 12 to move downward together, so that the evaporation The source platform 10 is separated from the bottom of the second gate valve 7, and then the motor under the support frame 1 is started again, and then the motor drives the vertical rod 8 to rotate. At this time, the limit column 91 is set in the limit groove 81, so that when the vertical rod 8 rotates, it drives the connecting sleeve 93 and the first support arm 9 to rotate together, and then the connecting sleeve 93 drives the evaporation source platform 10 to rotate, so that the evaporation source platform 10 rotates to the outside of the support frame 1. At this time, there is no obstruction above the evaporation source platform 10, and the crucible evaporation source 11 in the evaporation source platform 10 can be added with materials, repaired and maintained, etc., which can meet different usage requirements.

[0031] Embodiment 3: The vacuum coating machine capable of improving the purity of the coating in this embodiment discloses another structure of the clamping assembly based on the embodiment 1, so that the coating pot body 17 can be disassembled with only one hand, and the operation is more convenient. For the specific structure, refer to the attached Figure 13-Figure 15As shown, the clamping assembly includes a clamping column 21 symmetrically installed through the outer side of the upper end of the plating pot mounting rod 20, and a reset spring 23 is nested and connected to the outer side of the inner end of the clamping column 21; a regulating block 22 with a conical structure is installed in the upper internal groove of the plating pot mounting rod 20, and the lower part of the regulating block 22 is connected to the inside of the plating pot mounting rod 20 through an adjusting spring 25; the inner end of the clamping column 21 is fitted on the outer side of the regulating block 22, and the clamping column 21 forms a sliding structure with the plating pot mounting rod 20 through the lifting of the regulating block 22, and the outer end of the clamping column 21 is inserted into the through hole 191; the highest point of the plating pot mounting rod 20 is higher than the through hole 191 91, a sliding groove 181 is provided in one of the handles 18 above the plating pot body 17, a sliding rod 182 is connected through the sliding groove 181, the diameter of the middle part of the sliding rod 182 is smaller than the diameter of the two ends, and the diameter of the two ends of the sliding rod 182 is larger than the height of the sliding groove 181, one side of the sliding rod 182 is connected to one end of the connecting rope 24, and the other end of the connecting rope 24 passes through the handle 18 and the plating pot mounting rod 20 and is connected to the bottom surface of the regulating block 22 through the guide wheel. When the plating is completed, the plating pot body 17 needs to be disassembled. At this time, the staff only needs to manually adjust one of the parts on the plating pot body 17. A handle 18 and a corresponding sliding rod 182 are held together, and the middle position of the sliding rod 182 slides in the sliding groove 181, and then the sliding rod 182 pulls one end of the connecting rope 24, and the other end of the connecting rope 24 applies a downward pulling force to the regulating block 22 through the guide wheel, and then the regulating block 22 moves downward to squeeze the adjusting spring 25 to store force. When the regulating block 22 with a conical structure moves downward to a certain position, the clamping column 21 automatically moves inward and resets through the stored force of the reset spring 23, and the outer end of the clamping column 21 enters the plating pot mounting rod 20 from the through hole 191. , so that the clamping column 21 is separated from the through hole 191, and then the staff can drive the plating pot body 17 to move upwards through the handle 18, so that the plating pot body 17 drives the plating pot mounting rod 20 to move upwards, so that the upper end of the plating pot mounting rod 20 is separated from the placement groove 194, and then drive the plating pot body 17 to move outwards through the handle 18, so that the upper end of the plating pot mounting rod 20 slides out from the opening on one side of the mounting carrier 19, thereby separating the mounting carrier 19 from the plating pot mounting rod 20, so that it is easy to disassemble the plating pot body 17 without using both hands, and the operation is more convenient and quick, thereby completing a series of tasks.

[0032] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vacuum coating machine capable of improving the purity of a coating, comprising a carrier frame (1), and a coating chamber (2) installed in the carrier frame (1), wherein the coating chamber (2) is arranged in an inverted cone-shaped structure; It is characterized in that A rotating drive rod (14) is installed through the middle of the upper part of the coating chamber (2); the outer side of the lower end of the rotating drive rod (14) is connected to three groups of main mounting rods (15) through three groups of second support arms (16); the mounting carrier (19) at the lower end of the main mounting rod (15) is connected to the coating pot mounting rod (20) above the coating pot body (17) through a clamping assembly; A contactless transmission assembly is installed above the main mounting rod (15) to avoid friction caused by contact; The lower interior of the carrier frame (1) is connected to the evaporation source carrier (10) via a rotating lifting control mechanism; a crucible evaporation source (11) and an evaporation source baffle (12) are installed in the evaporation source carrier (10); and an evaporation source baffle (12) is arranged above the crucible evaporation source (11).

2. A vacuum coating machine capable of improving coating purity according to claim 1, characterized in that: Two groups of channels (6) are symmetrically installed on the left side of the coating chamber (2), a first gate valve (4) is installed at the left end of each of the two groups of channels (6), and a first cryogenic pump (5) is fixed to the left side of the first gate valve (4); A second gate valve (7) is installed below the coating chamber (2), and an evaporation source carrier (10) is correspondingly arranged below the right side of the second gate valve (7); A hollow interlayer groove (71) is provided in the lower left side of the second gate valve (7), the lower left side of the second gate valve (7) is connected to a third gate valve (13), and a second cryogenic pump (26) is installed below the third gate valve (13); A door frame is installed on the right side of the coating chamber (2), an opening and closing door (3) is arranged inside the door frame, an observation window (27) is installed inside the opening and closing door (3), and the opening and closing door (3) is tightly and sealingly connected to the right side surface of the coating chamber (2); The first gate valve (4), the first cryogenic pump (5), the second gate valve (7), the third gate valve (13) and the second cryogenic pump (26) are all connected to the carrier (1).

3. The vacuum coating machine capable of improving coating purity according to claim 1, characterized in that: A bearing seat (161) is installed on the outer side of one end of the second support arm (16) close to the main mounting rod (15), the main mounting rod (15) is installed through the bearing seat (161), and a mounting carrier (19) is arranged below the bearing seat (161); The contactless transmission assembly comprises a small gear (151) mounted on the outer side above the main mounting rod (15), and the contactless transmission assembly also comprises a large gear (28) mounted on the inner wall above the coating cavity (2), and three groups of small gears (151) are arranged on the outer side of the large gear (28) in a non-contact manner; The outer side of the large gear (28) and the outer side of the small gear (151) are both provided with gear teeth by screws; The gear teeth on the outside of the large gear (28) and the gear teeth on the outside of the small gear (151) are both made of magnet material, and the gear teeth on the outside of the large gear (28) and the gear teeth on the outside of the small gear (151) have the same magnetic poles, and the small gear (151) performs non-contact orbital and rotational motion on the outside of the large gear (28).

4. The vacuum coating machine capable of improving coating purity according to claim 1, characterized in that: The spherical centers of the three plating pot bodies (17) coincide with the positions of the crucible evaporation source (11).

5. The vacuum coating machine capable of improving coating purity according to claim 1, characterized in that: The mounting carrier (19) is arranged in a "U"-shaped structure, and a placement groove (194) is provided inside the bottom surface of the mounting carrier (19), the placement groove (194) is matched with the upper end of the plating pot mounting rod (20) in a concave-convex manner, and through holes (191) are symmetrically provided on the outer side surface of the mounting carrier (19); A handle (18) is mounted on the plating pot body (17).

6. A vacuum coating machine capable of improving coating purity according to claim 5, characterized in that: The clamping assembly comprises an ejector pin (192) installed through the through hole (191), a compression spring (195) is nested and connected to the outer side of the ejector pin (192), the upper end of the plating pot mounting rod (20) is arranged in a rectangular shape, the two side surfaces of the upper end of the plating pot mounting rod (20) are arranged in an inclined shape, the inner end of the ejector pin (192) is fitted on the two side surfaces of the upper end of the plating pot mounting rod (20), and the lowest point of the inclined surface of the upper end of the plating pot mounting rod (20) is lower than the lowest point of the ejector pin (192); The outer end of the ejector pin (192) is connected to the lever (193).

7. The vacuum coating machine capable of improving coating purity according to claim 1, characterized in that: The rotation and lifting control mechanism comprises a first support arm (9) mounted on the bottom surface of the evaporation source carrier (10), a connecting sleeve (93) being fixed to the other end of the first support arm (9), and a limiting column (91) being mounted inside the lower part of the connecting sleeve (93); A vertical rod (8) is provided through the connecting sleeve (93), a limiting groove (81) is provided inside the vertical rod (8), and a limiting column (91) is provided through the limiting groove (81); A lifting control frame (92) is arranged outside the connecting sleeve (93), and a vertical rod (8) is arranged through the lifting control frame (92).

8. The vacuum coating machine capable of improving coating purity according to claim 7, characterized in that: The right side of the lifting control frame (92) is arranged in a "U"-shaped structure, and the lower left side of the lifting control frame (92) is connected to the electric push rod in the lower part of the supporting frame (1); The bottom end of the vertical rod (8) is connected to the motor below the supporting frame (1); The connecting sleeve (93) forms a lifting structure with the vertical rod (8) through the lifting control frame (92), and the connecting sleeve (93) and the vertical rod (8) rotate synchronously.

9. The vacuum coating machine capable of improving coating purity according to claim 5, characterized in that: The clamping assembly comprises a clamping column (21) symmetrically installed through the outer side of the upper end of the plating pot mounting rod (20), and a return spring (23) is nested and connected to the outer side of the inner end of the clamping column (21); A regulating block (22) having a conical structure is installed in a groove on the upper inner portion of the plating pot mounting rod (20), and the lower portion of the regulating block (22) is connected to the inside of the plating pot mounting rod (20) via an adjusting spring (25); The inner end of a clamping column (21) is fitted on the outer side of the regulating block (22); the clamping column (21) forms a sliding structure with the plating pot mounting rod (20) through the lifting and lowering of the regulating block (22); and the outer end of the clamping column (21) is inserted into the through hole (191); The highest point of the plating pot mounting rod (20) is higher than the highest point of the through hole (191).

10. A vacuum coating machine capable of improving coating purity according to claim 9, characterized in that: A sliding groove (181) is provided in one of the handles (18) above the plating pot body (17), a sliding rod (182) is connected through the sliding groove (181), the diameter of the middle portion of the sliding rod (182) is smaller than the diameters at both ends, and the diameters at both ends of the sliding rod (182) are larger than the height of the sliding groove (181); One side of the sliding rod (182) is connected to one end of a connecting rope (24), and the other end of the connecting rope (24) passes through the handle (18) and the plating pot mounting rod (20) and is connected to the bottom surface of the regulating block (22) through a guide wheel.

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