3d printing processing method of aluminum nitride electrostatic chuck for photoetching machine

Abstract

The invention discloses a 3d printing processing method of an aluminum nitride electrostatic chuck for a photoetching machine, which comprises the following steps of: 1, preparing a base, namely putting a stainless acid-resistant steel material into a circular mold, and stamping the stainless acid-resistant steel material in the mold by stamping equipment to form the base by the stainless acid-resistant steel material; 2, combined connection is conducted, specifically, the composite material composed of the aluminum alloy and the ceramic is placed in 3D printing equipment, the composite material composed of the aluminum alloy and the ceramic is printed into a combined layer through the 3D printing equipment, and the combined layer is fixedly arranged on the base; according to the 3d printing processing method of the aluminum nitride electrostatic chuck for the photoetching machine, the aluminum oxide electrostatic chuck can be more conveniently printed in a 3d mode through the setting of the five steps of stainless acid-resistant steel base preparation, ceramic plate bonding layer connection, uniform heating, stable pressurization and comprehensive polishing, the operation steps are simplified, and the production efficiency is improved. And therefore, the aluminum oxide electrostatic chuck can be efficiently produced in batches.

Description

Technical Field

[0001] The invention relates to the technical field of 3D printing, and in particular to a 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine. Background Art

[0002] As we all know, 3D printer, also known as three-dimensional printer, is a kind of rapid prototyping process equipment. Due to its high efficiency and powerful functions, it is increasingly widely used in various fields of manufacturing.

[0003] Existing photolithography machines often generate static electricity when in use. In order to solve the static electricity problem, people began to use aluminum oxide electrostatic chucks to eliminate static electricity. However, the existing aluminum oxide electrostatic chucks have many steps in processing and production, which is not convenient for more efficient mass production of aluminum oxide electrostatic chucks. Therefore, we propose a 3D printing processing method for aluminum nitride electrostatic chucks for photolithography machines.

[0004] The above information disclosed in the Background section is only for enhancement of understanding of the background of the present disclosure and therefore it may include information that does not constitute the prior art that is already known to one of ordinary skill in the art. Summary of the invention

[0005] The purpose of the present invention is to provide a 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine to solve the problems raised in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solution: a 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine, comprising the following steps:

[0007] Step 1: prepare a base, place the stainless acid-resistant steel material into a circular mold, and then use a stamping device to stamp the stainless acid-resistant steel material in the mold to form a base;

[0008] Step 2: Combining and connecting, placing the composite material composed of aluminum alloy and ceramic into a 3D printing device, allowing the 3D printing device to print the composite material composed of aluminum alloy and ceramic into a bonding layer, and the bonding layer is fixedly arranged on the base, and then mixing the aluminum oxide powder and the alloy powder and placing them into the 3D printing device, so that the 3D printing device prints the aluminum oxide powder and the alloy powder into a ceramic plate with an antistatic effect;

[0009] Step 3: uniform heating, by applying pressure to the first motor on the ceramic plate so that the second motor generates heat under the action of voltage, and then the temperature of the ceramic plate is affected by the heating of the second motor and the cooling effect of the stainless acid-resistant steel base, so that the ceramic plate obtains stable and uniform heat;

[0010] Step 4: Stable pressure is applied. A sheet-shaped attachment plate is prepared at the bottom of the ceramic plate, and a layer of polymer fluid coating is arranged on the bottom surface of the sheet-shaped attachment plate. After the ceramic plate drives the polymer fluid coating to contact the bonding layer through the sheet-shaped attachment plate, a pressure device is used to pressurize the ceramic plate and the base so that the ceramic plate and the base form a fixedly connected whole, thereby making the alumina electrostatic chuck be manufactured;

[0011] Step 5: Fully polishing: Use polishing equipment to perform multi-angle and full-scale polishing on the finished alumina electrostatic chuck to clean up the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0012] Preferably, in step one, the stainless acid-resistant steel base has stainlessness and corrosion resistance as main characteristics, and the chromium content is at least between 10% and 12%, and the carbon content is at most between 1% and 3%.

[0013] Preferably, in step one, the stainless acid-resistant steel base is also coated with an antistatic coating, and the antistatic coating is antistatic paint.

[0014] Preferably, in step 2, the alumina powder is a white solid that is poorly soluble in water, and is odorless, tasteless, extremely hard, and easily absorbs moisture without being deliquescent. In addition, alumina is a typical amphoteric oxide that is soluble in inorganic acids and alkaline solutions, and is almost insoluble in water and non-polar organic solvents.

[0015] Preferably, in step 2, the aluminum alloy powder has a density of 2.6 to 2.8 g / cm3, has relatively high strength, and also has good casting properties and plastic processing properties, good electrical and thermal conductivity, good corrosion resistance and weldability.

[0016] Preferably, in step 4, the polymer in the polymer fluid coating is a high molecular weight polymer, which is a compound with a relative molecular weight of several thousand to several million. Most of the high molecular weight compounds are mixtures of many homologues with different relative molecular weights.

[0017] Preferably, in step 4, in order to make the sheet-like attachment plate have good thermoplasticity, the sheet-like attachment plate is made of polyethylene.

[0018] Preferably, in step five, in order to achieve a better polishing effect, a curved surface flexible polishing method is adopted when polishing the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0019] In summary, the present application includes at least one of the following beneficial technical effects:

[0020] The 3D printing processing method of the aluminum nitride electrostatic chuck for the lithography machine can make the aluminum oxide electrostatic chuck more convenient to be 3D printed and simplify the operation steps, thereby facilitating the efficient mass production of the aluminum oxide electrostatic chuck through the setting of five steps including the preparation of a stainless acid-resistant steel base, the connection of a ceramic plate bonding layer, uniform heating, stable pressurization and comprehensive polishing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the 3D printing processing method of the aluminum nitride electrostatic chuck for the lithography machine of the present invention. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] See also Figure 1 , this embodiment provides three technical solutions:

[0024] Embodiment 1

[0025] A 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine comprises the following steps:

[0026] Step 1: prepare a base, place the stainless acid-resistant steel material into a circular mold, and then use a stamping device to stamp the stainless acid-resistant steel material in the mold to form a base;

[0027] Step 2: Combining and connecting, placing the composite material composed of aluminum alloy and ceramic into a 3D printing device, allowing the 3D printing device to print the composite material composed of aluminum alloy and ceramic into a bonding layer, and the bonding layer is fixedly arranged on the base, and then mixing the aluminum oxide powder and the alloy powder and placing them into the 3D printing device, so that the 3D printing device prints the aluminum oxide powder and the alloy powder into a ceramic plate with an antistatic effect;

[0028] Step 3: uniform heating, by applying pressure to the first motor on the ceramic plate so that the second motor generates heat under the action of voltage, and then the temperature of the ceramic plate is affected by the heating of the second motor and the cooling effect of the stainless acid-resistant steel base, so that the ceramic plate obtains stable and uniform heat;

[0029] Step 4: Stable pressure is applied. A sheet-shaped attachment plate is prepared at the bottom of the ceramic plate, and a layer of polymer fluid coating is arranged on the bottom surface of the sheet-shaped attachment plate. After the ceramic plate drives the polymer fluid coating to contact the bonding layer through the sheet-shaped attachment plate, a pressure device is used to pressurize the ceramic plate and the base so that the ceramic plate and the base form a fixedly connected whole, thereby making the alumina electrostatic chuck be manufactured;

[0030] Step 5: Fully polishing: Use polishing equipment to perform multi-angle and full-scale polishing on the finished alumina electrostatic chuck to clean up the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0031] It should be noted that in step 1, the stainless acid-resistant steel base has stainlessness and corrosion resistance as main characteristics, and the chromium content is at least 10% and the carbon content is at most 1%.

[0032] It should be noted that: in step 1, the stainless acid-resistant steel base is also coated with an antistatic coating, and the antistatic coating is antistatic paint.

[0033] It should be noted that in step 2, the alumina powder is a white solid that is difficult to dissolve in water, and is odorless, tasteless, extremely hard, and easy to absorb moisture without being deliquescent. In addition, alumina is a typical amphoteric oxide that is soluble in inorganic acids and alkaline solutions, and is almost insoluble in water and non-polar organic solvents.

[0034] It should be noted that in step 2, the density of the aluminum alloy powder is 2.6 g / cm 3 It has high strength, good casting performance and plastic processing performance, good electrical and thermal conductivity, good corrosion resistance and weldability.

[0035] It should be noted that in step 4, the polymer in the polymer fluid coating is a high molecular weight polymer, which is a compound with a relative molecular weight of several thousand to several million. Most of the high molecular weight compounds are mixtures of many homologues with different relative molecular weights.

[0036] It should be noted that: in step 4, in order to make the sheet-shaped attachment plate have good thermoplasticity, the sheet-shaped attachment plate is made of polyethylene.

[0037] It should be noted that: in step 5, in order to achieve a better polishing effect, a curved surface flexible polishing method is used when polishing the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0038] Embodiment 2

[0039] A 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine comprises the following steps:

[0040] Step 1: prepare a base, place the stainless acid-resistant steel material into a circular mold, and then use a stamping device to stamp the stainless acid-resistant steel material in the mold to form a base;

[0041] Step 2: Combining and connecting, placing the composite material composed of aluminum alloy and ceramic into a 3D printing device, allowing the 3D printing device to print the composite material composed of aluminum alloy and ceramic into a bonding layer, and the bonding layer is fixedly arranged on the base, and then mixing the aluminum oxide powder and the alloy powder and placing them into the 3D printing device, so that the 3D printing device prints the aluminum oxide powder and the alloy powder into a ceramic plate with an antistatic effect;

[0042] Step 3: uniform heating, by applying pressure to the first motor on the ceramic plate so that the second motor generates heat under the action of voltage, and then the temperature of the ceramic plate is affected by the heating of the second motor and the cooling effect of the stainless acid-resistant steel base, so that the ceramic plate obtains stable and uniform heat;

[0043] Step 4: Stable pressure is applied. A sheet-shaped attachment plate is prepared at the bottom of the ceramic plate, and a layer of polymer fluid coating is arranged on the bottom surface of the sheet-shaped attachment plate. After the ceramic plate drives the polymer fluid coating to contact the bonding layer through the sheet-shaped attachment plate, a pressure device is used to pressurize the ceramic plate and the base so that the ceramic plate and the base form a fixedly connected whole, thereby making the alumina electrostatic chuck be manufactured;

[0044] Step 5: Fully polishing: Use polishing equipment to perform multi-angle and full-scale polishing on the finished alumina electrostatic chuck to clean up the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0045] It should be noted that in step 1, the stainless acid-resistant steel base has stainless and corrosion-resistant properties as main characteristics, and the chromium content is at least 11% and the carbon content is at most 2%.

[0046] It should be noted that: in step 1, the stainless acid-resistant steel base is also coated with an antistatic coating, and the antistatic coating is antistatic paint.

[0047] It should be noted that in step 2, the alumina powder is a white solid that is difficult to dissolve in water, and is odorless, tasteless, extremely hard, and easy to absorb moisture without being deliquescent. In addition, alumina is a typical amphoteric oxide that is soluble in inorganic acids and alkaline solutions, and is almost insoluble in water and non-polar organic solvents.

[0048] It should be noted that in step 2, the density of the aluminum alloy powder is 2.7 g / cm 3 It has high strength, good casting performance and plastic processing performance, good electrical and thermal conductivity, good corrosion resistance and weldability.

[0049] It should be noted that in step 4, the polymer in the polymer fluid coating is a high molecular weight polymer, which is a compound with a relative molecular weight of several thousand to several million. Most of the high molecular weight compounds are mixtures of many homologues with different relative molecular weights.

[0050] It should be noted that: in step 4, in order to make the sheet-shaped attachment plate have good thermoplasticity, the sheet-shaped attachment plate is made of polyethylene.

[0051] It should be noted that: in step 5, in order to achieve a better polishing effect, a curved surface flexible polishing method is used when polishing the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0052] Embodiment 3

[0053] A 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine comprises the following steps:

[0054] Step 1: prepare a base, place the stainless acid-resistant steel material into a circular mold, and then use a stamping device to stamp the stainless acid-resistant steel material in the mold to form a base;

[0055] Step 2: Combining and connecting, placing the composite material composed of aluminum alloy and ceramic into a 3D printing device, allowing the 3D printing device to print the composite material composed of aluminum alloy and ceramic into a bonding layer, and the bonding layer is fixedly arranged on the base, and then mixing the aluminum oxide powder and the alloy powder and placing them into the 3D printing device, so that the 3D printing device prints the aluminum oxide powder and the alloy powder into a ceramic plate with an antistatic effect;

[0056] Step 3: uniform heating, by applying pressure to the first motor on the ceramic plate so that the second motor generates heat under the action of voltage, and then the temperature of the ceramic plate is affected by the heating of the second motor and the cooling effect of the stainless acid-resistant steel base, so that the ceramic plate obtains stable and uniform heat;

[0057] Step 4: Stable pressure is applied. A sheet-shaped attachment plate is prepared at the bottom of the ceramic plate, and a layer of polymer fluid coating is arranged on the bottom surface of the sheet-shaped attachment plate. After the ceramic plate drives the polymer fluid coating to contact the bonding layer through the sheet-shaped attachment plate, a pressure device is used to pressurize the ceramic plate and the base so that the ceramic plate and the base form a fixedly connected whole, thereby making the alumina electrostatic chuck be manufactured;

[0058] Step 5: Fully polishing: Use polishing equipment to perform multi-angle and full-scale polishing on the finished alumina electrostatic chuck to clean up the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0059] It should be noted that in step 1, the stainless acid-resistant steel base has stainlessness and corrosion resistance as main characteristics, and the chromium content is at least 12% and the carbon content is at most 3%.

[0060] It should be noted that: in step 1, the stainless acid-resistant steel base is also coated with an antistatic coating, and the antistatic coating is antistatic paint.

[0061] It should be noted that in step 2, the alumina powder is a white solid that is difficult to dissolve in water, and is odorless, tasteless, extremely hard, and easy to absorb moisture without being deliquescent. In addition, alumina is a typical amphoteric oxide that is soluble in inorganic acids and alkaline solutions, and is almost insoluble in water and non-polar organic solvents.

[0062] It should be noted that in step 2, the density of the aluminum alloy powder is 2.8 g / cm 3 It has high strength, good casting performance and plastic processing performance, good electrical and thermal conductivity, good corrosion resistance and weldability.

[0063] It should be noted that in step 4, the polymer in the polymer fluid coating is a high molecular weight polymer, which is a compound with a relative molecular weight of several thousand to several million. Most of the high molecular weight compounds are mixtures of many homologues with different relative molecular weights.

[0064] It should be noted that: in step 4, in order to make the sheet-shaped attachment plate have good thermoplasticity, the sheet-shaped attachment plate is made of polyethylene.

[0065] It should be noted that: in step 5, in order to achieve a better polishing effect, a curved surface flexible polishing method is used when polishing the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

[0066] In summary: The 3D printing processing method of the aluminum nitride electrostatic chuck for the lithography machine makes it easier to 3D print the alumina electrostatic chuck and simplifies the operation steps, thereby facilitating the efficient mass production of the alumina electrostatic chuck by preparing a stainless acid-resistant steel base, connecting a ceramic plate bonding layer, and setting up five steps of uniform heating, stable pressurization and comprehensive polishing.

[0067] Parts not involved in the present invention are the same as the prior art or can be implemented by the prior art. Although the embodiments of the present invention have been shown and described, it is understood by those skilled in the art that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine, characterized in that: The following steps are involved: Step 1: prepare a base, place the stainless acid-resistant steel material into a circular mold, and then use a stamping device to stamp the stainless acid-resistant steel material in the mold to form a base; Step 2: Combining and connecting, placing the composite material composed of aluminum alloy and ceramic into a 3D printing device, allowing the 3D printing device to print the composite material composed of aluminum alloy and ceramic into a bonding layer, and the bonding layer is fixedly arranged on the base, and then mixing the aluminum oxide powder and the alloy powder and placing them into the 3D printing device, so that the 3D printing device prints the aluminum oxide powder and the alloy powder into a ceramic plate with an antistatic effect; Step 3: uniform heating, by applying pressure to the first motor on the ceramic plate so that the second motor generates heat under the action of voltage, and then the temperature of the ceramic plate is affected by the heating of the second motor and the cooling effect of the stainless acid-resistant steel base, so that the ceramic plate obtains stable and uniform heat; Step 4: Stable pressure is applied. A sheet-shaped attachment plate is prepared at the bottom of the ceramic plate, and a layer of polymer fluid coating is arranged on the bottom surface of the sheet-shaped attachment plate. After the ceramic plate drives the polymer fluid coating to contact the bonding layer through the sheet-shaped attachment plate, a pressure device is used to pressurize the ceramic plate and the base so that the ceramic plate and the base form a fixedly connected whole, thereby making the alumina electrostatic chuck be manufactured; Step 5: Fully polishing: Use polishing equipment to perform multi-angle and full-scale polishing on the finished alumina electrostatic chuck to clean up the impurity particles protruding from the stainless acid-resistant steel base and the ceramic plate.

2. The 3D printing processing method of an aluminum nitride electrostatic chuck for a photolithography machine according to claim 1, characterized in that: In step one, the stainless acid-resistant steel base has stainless and corrosion-resistant properties as main characteristics, and the chromium content is at least between 10% and 12%, and the carbon content is at most between 1% and 3%.

3. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 2, characterized in that: In step one, the stainless acid-resistant steel base is also coated with an antistatic coating, which is an antistatic paint.

4. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 1, characterized in that: In step 2, the aluminum oxide powder is a white solid that is difficult to dissolve in water, and is odorless, tasteless, extremely hard, and easy to absorb moisture without being deliquescent. In addition, aluminum oxide is a typical amphoteric oxide that is soluble in inorganic acid and alkaline solutions, and is almost insoluble in water and non-polar organic solvents.

5. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 1, characterized in that: In step 2, the aluminum alloy powder has a density of 2.6 to 2.8 g / cm3, has high strength, good casting performance and plastic processing performance, good electrical and thermal conductivity, good corrosion resistance and weldability.

6. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 1, characterized in that: In step 4, the polymer in the polymer fluid coating is a high molecular weight polymer, which is a compound with a relative molecular weight of several thousand to several million. Most of the high molecular weight compounds are mixtures of many homologues with different relative molecular weights.

7. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 6, characterized in that: In step 4, in order to make the sheet-shaped attachment plate have good thermoplasticity, the sheet-shaped attachment plate is made of polyethylene.

8. The 3D printing processing method of the aluminum nitride electrostatic chuck for a photolithography machine according to claim 1, characterized in that: In step five, in order to achieve a better polishing effect, a curved surface flexible polishing method is used when polishing the stainless acid-resistant steel base and the protruding impurity particles on the ceramic plate.

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