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Piezoelectric acceleration sensor

An acceleration sensor, piezoelectric technology, applied in the measurement of acceleration, multi-dimensional acceleration measurement, speed/acceleration/impact measurement, etc., can solve the problems of increased cost, complex circuit structure, etc., and achieve the effect of suppressing unevenness

Inactive Publication Date: 2005-05-18
STAR MICRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, it will lead to complex circuit structure and increase cost

Method used

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  • Piezoelectric acceleration sensor

Examples

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Embodiment Construction

[0017] figure 1 is a simplified cross-sectional view of the piezoelectric acceleration sensor of the embodiment of the present invention. figure 2 is along figure 1 Cross-sectional view of midline II-II. In the drawings, reference numeral 1 denotes a housing, and 2 denotes an acceleration detecting unit. It should be noted that, figure 1 It is a figure in which the upper part of the housing 1 is omitted to facilitate understanding of its internal structure.

[0018] The case 1 includes a metal cover 1a and a resin-made base 1b. A circular recess 11 is formed in the inner center of the base 1b. In addition, a trapezoidal portion 12 of the placement acceleration detection unit 2 is formed around the recess 11 . A plurality of terminals 5 penetrate the base 1b at a pair of mutually parallel edge portions of the base 1b, and their upper ends are bent in an L or U shape. Such as figure 1 As shown, the terminal 5 having an L-shaped portion is connected to the accelerati...

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Abstract

A piezoelectric acceleration sensor includes an acceleration detection unit having a weight fixed on one surface of a vibrating membrane, and a piezoelectric element on the other surface where the piezoelectric element is fixed by bonding the back surface of the piezoelectric element. an electric element; and surface electrodes and back electrodes respectively formed on respective surfaces of the piezoelectric element, wherein a support pattern for maintaining a uniform distance between the vibrating film and the surface electrodes is formed on the back of the piezoelectric element to suppress Bonding is not uniform when the piezoelectric element and diaphragm are connected, and eliminates variations in detection sensitivity for each axis.

Description

technical field [0001] The present invention relates to a piezoelectric acceleration sensor using a piezoelectric element. Background technique [0002] Acceleration sensors are widely used in the automotive industry, the mechanical industry and similar fields, for example as sensors for controlling airbags in automobiles. The acceleration sensor can be classified into a uniaxial type, a triaxial type, a type depending on the number of detection directions, etc., and the detection types include a piezoresistive type, a capacitive type, a piezoelectric type, and the like. [0003] Fig. 5 is a diagram illustrating a configuration of a conventional piezoelectric acceleration sensor related to the present invention. Figure 5A is a simplified overall profile, and Figure 5B It is a partial sectional view of the basic part. A piezoelectric acceleration sensor is a sensor in which a vibrating membrane is distorted by gravitational acceleration, and this distortion can be detecte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/09G01P15/18
CPCG01P15/09G01P15/18G01P2015/084
Inventor 和气尚美胜冈健太郎山田博巳武田秀树
Owner STAR MICRONICS