Petal type getter for getter pump
By adopting a petal getter pump, using the combination of titanium-based getter alloy and metal fixing ring, the problems of small surface area and low firmness of the existing getter pump are solved, and higher gas suction efficiency and pump stability.
Patent Information
- Application Number
- CN202323557100.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-26
- Publication Date
- 2025-01-03
- Estimated Expiration
- 2033-12-26
AI Technical Summary
The surface area of the disc-shaped getter used in existing non-evaporative getter pumps is low, resulting in a small gas flow conduction. The getter tablets need to be increased to increase the gas extraction speed, but this reduces the firmness and difficulty of activation of the pump. .
The petal getter pump is adopted, including a getter composed of a titanium-based getter alloy and a metal fixing ring. It has a petal shape and contains multiple elliptical petals, which improves the suction surface area and the stability of the pump and enhances the gas inhalation capacity.
It improves the stability and firmness of the getter pump, enhances gas suction efficiency, reduces energy consumption and clogging risks, extends the service life of the pump, and improves reliability and stability.
Smart Images
Figure CN222296436U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum equipment, in particular to a getter for a petal-shaped getter pump. Background Art
[0002] Getters are mainly used in the vacuum field. They are commonly used materials in the vacuum and gas purification fields. Their function is to eliminate impurity gases in the device and maintain the vacuum degree in the vacuum cavity, thereby extending the device life and reducing noise.
[0003] Getters can be divided into two categories according to whether they evaporate or not. One category is called evaporative getters. When heated and activated in a vacuum, alkaline earth metals evaporate from the getters and quickly adhere to the inner wall of the vacuum device to form a getter film, which has a strong gettering ability. The second category is called non-evaporative getters. Common materials are metals and compounds such as zirconium and titanium. This type of getter will form a dense passivation layer on its surface in the atmosphere. High-temperature activation of the getter in a vacuum destroys the surface passivation layer, and the getter can absorb the residual gas and diffuse it into the getter.
[0004] Getter pumps are generally composed of non-evaporable porous getter materials and heating structures. Non-evaporable porous getter materials are generally made of one or more metals selected from titanium, zirconium, hafnium, tantalum, yttrium, niobium, molybdenum, vanadium, manganese, iron, nickel, cobalt, aluminum, rare earth and their alloys. The specific composition is determined by the activation temperature that can be provided, the requirements for the equilibrium pressure of hydrogen, and the firmness requirements of the porous material.
[0005] Getter pumps are generally used in vacuum chambers to maintain vacuum, purify gases, etc. Because getter pumps have a high pumping speed for hydrogen in an ultra-high vacuum environment and are clean and pollution-free, they have unique advantages in the ultra-high vacuum field.
[0006] The non-evaporable getter pumps currently available on the market generally use traditional disc-shaped getters, which have a low air suction surface area and a small gas flow conductance. As a result, the getter pumps often choose to add more getter sheets to obtain a higher gas pumping speed. However, continuously increasing the number of getters will lead to problems such as reduced firmness of the getter pump and difficulty in activation. Utility Model Content
[0007] In order to make up for the shortcomings of the prior art, non-evaporable getter pumps generally use traditional disc-shaped getters, which have a low air suction surface area and a small gas flow conductance, resulting in the getter pump often choosing to add more getter sheets to obtain a higher gas pumping speed. However, continuously increasing the number of getters will lead to the problem of reduced firmness of the getter pump and difficulty in activation. The utility model proposes a getter for a petal-shaped getter pump.
[0008] The technical solution adopted by the utility model to solve the technical problem is: a getter for a petal-shaped getter pump, comprising a getter, wherein the getter consists of a fixing ring and a titanium-based getter alloy, wherein the getter has a petal-shaped shape and comprises a plurality of elliptical petals.
[0009] Preferably, the titanium-based getter alloy comprises one or more of zirconium, aluminum, titanium, molybdenum, vanadium, iron, tantalum, hafnium and rare earth.
[0010] Preferably, the outer ring of the getter contains 7-30 elliptical petals in total.
[0011] Preferably, the fixing ring is made of metal, generally made of ferroalloy, steel, titanium or titanium alloy and the like, the diameter of the fixing ring is 4mm-8mm, and the height of the fixing ring is 0.5mm-3mm.
[0012] Preferably, the maximum outer diameter of the getter is 30 mm, and the height of the getter is 0.5 mm-3 mm.
[0013] The utility model is beneficial in that:
[0014] 1. The utility model improves the stability and firmness of the getter pump, can better resist the influence of vibration, impact and other external forces, and at the same time, also increases the suction surface area of the getter pump, thereby sucking more gas into the pump, which helps to improve the suction efficiency, speed up the gas suction speed, and enable the getter pump to handle a larger gas flow rate, so that it has a stronger extraction capacity, and is also beneficial to reduce the energy consumption of the pump, and reduce the pressure and load on the pump, prolonging the service life of the pump, and at the same time can reduce the speed and pressure of the gas entering the pump, reduce the risk of blockage caused by suspended solid particles or impurities in the gas, thereby achieving the purpose of improving the reliability and stability of the pump. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0016] Figure 1 It is a structural schematic diagram of the utility model.
[0017] In the figure: 1. getter; 11. fixing ring; 12. titanium-based getter alloy. DETAILED DESCRIPTION
[0018] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0019] The following is combined with Figure 1 To further explain this application in detail,
[0020] The embodiment of the present application discloses a getter for a petal-shaped getter pump, including a getter 1, which consists of a fixing ring 11 and a titanium-based getter alloy 12, wherein the getter 1 has a petal-shaped appearance and includes a plurality of elliptical petals, and the titanium-based getter alloy 12 includes one or more of zirconium, aluminum, titanium, molybdenum, vanadium, iron, tantalum, hafnium, and rare earth. The outer ring of the getter 1 includes 7-30 elliptical petals in total, and the fixing ring 11 is made of metal, generally made of iron alloy, steel, titanium or titanium alloy, etc. The diameter of the fixing ring 11 is 4mm-8mm, the height of the fixing ring 11 is 0.5mm-3mm, the maximum outer diameter of the getter 1 is 30mm, and the height of the getter 1 is 0.5mm-3mm;
[0021] A metal fixing seat and a prepared getter alloy powder are made into a sheet-like getter sheet, and then the getter sheet is sent to a vacuum sintering furnace for sintering to be sintered into a petal shape, wherein the middle part of the getter 1 is a fixing ring 11 made of ferroalloy, steel, titanium or titanium alloy, and the outer side of the getter 1 is a titanium-based getter alloy 12 made of one or more of zirconium, aluminum, titanium, molybdenum, vanadium, iron, tantalum, hafnium, and rare earth, and the prepared getter 1 is a petal-shaped getter 1. Then the prepared getter alloy powder is directly made into a getter sheet, and then the getter sheet is sent to a vacuum sintering furnace for sintering into a getter 1. At this time, the getter 1 is a traditional disc-shaped getter 1 in the prior art.
[0022] Workflow: Assemble the two getter sheets into a self-heating getter pump at the same time. Each getter pump is loaded with 20 sintered getter sheets in Example 1 and Example 2. Then put the getter sheets into the vacuum system test bench for testing. The test method is based on GB∕T40344.1-2021 "Standard Method for Measurement of Vacuum Pump Performance in Vacuum Technology".
[0023] The pumping speed of the assembled getter pump in Test Example 1 is 600 L / s, and the pumping speed of the assembled getter pump in Test Example 2 is 400 L / s.
[0024] The two groups of samples were compared by simulating actual vibration conditions. A piece of getter 1 of Example 1 and a piece of getter 1 of Example 2 were placed in a beaker filled with alcohol. The two beakers were placed in an ultrasonic machine for a 15-minute vibration test. After the vibration test, the dust monitoring device was observed under a microscope.
[0025] The results showed that no gaps were found in Example 1, but a small number of gaps were found in the inner circle of the ring in Example 2.
[0026] The above shows and describes the basic principle, main features and advantages of the utility model. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions are only for explaining the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model may have various changes and improvements, and these changes and improvements fall within the scope of the utility model to be protected.
Claims
1. A getter for a petal-shaped getter pump, characterized in that: The getter (1) comprises a getter (1), wherein the getter (1) is composed of two parts: a fixing ring (11) and a titanium-based getter alloy (12), wherein the getter (1) has a petal-shaped appearance and comprises a plurality of elliptical petals.
2. A getter for a petal-shaped getter pump according to claim 1, characterized in that: The outer ring of the getter (1) comprises 7 to 30 elliptical petals in total.
3. The getter for a petal-shaped getter pump according to claim 1, characterized in that: The fixing ring (11) is made of metal, generally made of iron alloy, steel, titanium or titanium alloy, the diameter of the fixing ring (11) is 4 mm to 8 mm, and the height of the fixing ring (11) is 0.5 mm to 3 mm.
4. The getter for a petal-shaped getter pump according to claim 1, characterized in that: The maximum outer diameter of the getter (1) is 30 mm, and the height of the getter (1) is 0.5 mm to 3 mm.