Reaction furnace and coating equipment

Abstract

The reaction furnace comprises a furnace body, a furnace cover, an electric connecting piece and an electromagnetic shielding sleeve, the furnace body is hollow, the end portion of the furnace body in the first direction is open to form an opening, the furnace cover is connected to the end portion of the furnace body in the first direction and blocks the opening, and the electromagnetic shielding sleeve is connected with the furnace cover. A closed reaction cavity is defined by the furnace cover and the furnace body; wherein one end, in the first direction, of the electric connecting piece is used for being electrically connected with a graphite boat, and the other end of the electric connecting piece penetrates through the furnace cover, extends out of the reaction cavity and is used for being electrically connected with a radio frequency power supply; the electromagnetic shielding sleeve is arranged in the reaction cavity, sleeves the electric connecting piece and is used for preventing the electric connecting piece from radiating energy to the furnace body; and a gap is formed between the outer wall of the electric connecting piece and the inner wall of the electromagnetic shielding sleeve. Utilization of output power of the radio frequency power supply is improved, waste is reduced, and energy consumption is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell, and in particular to a reactor and coating equipment. Background Art

[0002] In existing PECVD coating equipment, due to the action of the radio frequency power supply, a high-voltage electric field is established in the PECVD reaction chamber. The reaction gas is excited into plasma under a certain temperature, gas pressure and high-voltage electric field, and a glow discharge is generated between the graphite boats, which greatly reduces the deposition reaction temperature, accelerates the chemical reaction process, and increases the deposition rate.

[0003] At present, part of the electrode rod is located inside the reaction chamber, and part is located outside the reaction chamber, and the RF power supply is connected to the graphite boat in the reaction chamber through the electrode rod. However, under the excitation of the high frequency or very high frequency power supply, the electric field intensity on the surface of the electrode rod in the reaction chamber is very high, resulting in excessive propagation of the electromagnetic energy provided by the RF power supply between the electrode rod and the furnace tube, thereby wasting the output power of the RF power supply and increasing energy consumption. Utility Model Content

[0004] In view of the above-mentioned problems, an embodiment of the present invention has been proposed to provide a reactor and coating device that overcomes the above-mentioned problems or at least partially solves the above-mentioned problems.

[0005] In order to solve the above problems, the embodiment of the utility model discloses a reaction furnace and a coating device, including: a furnace body, a furnace cover, an electrical connector, and an electromagnetic shielding sleeve, wherein the interior of the furnace body is hollow, and the end of the furnace body in a first direction is open to form an opening, the furnace cover is connected to the end of the furnace body in the first direction and blocks the opening, and the furnace cover and the furnace body are enclosed to form a closed reaction chamber; wherein,

[0006] One end of the electrical connection member in the first direction is for electrical connection with the graphite boat, and the other end extends out of the reaction chamber through the furnace cover and for electrical connection with the radio frequency power supply;

[0007] The electromagnetic shielding sleeve is arranged in the reaction chamber and is sleeved outside the electrical connection member for preventing the electrical connection member from radiating energy to the furnace body;

[0008] There is a gap between the outer wall of the electrical connection and the inner wall of the electromagnetic shielding sleeve.

[0009] Optionally, the electromagnetic shielding sleeve is connected to the furnace cover at a first end in the first direction;

[0010] A portion of the electrical connection extends out of the second end of the electromagnetic shielding sleeve in the first direction so that the electromagnetic shielding sleeve and the graphite boat are spaced apart.

[0011] Optionally, the coating device further comprises an insulating sleeve;

[0012] The insulating sleeve is provided outside the electrical connection member and embedded in the electromagnetic shielding sleeve.

[0013] Optionally, the insulating sleeve is connected to the furnace cover at one end in the first direction and the other end is used to connect to the graphite boat.

[0014] Optionally, the insulating sleeve comprises a plurality of sub-sleeves;

[0015] A plurality of the sub-sleeves are arranged spaced along the first direction; and / or,

[0016] The electromagnetic shielding sleeve and the insulating sleeve are both adapted to the electrical connection;

[0017] The cross-sectional shape of the electrical connection member along the first direction includes one of a linear type, a flexural type and an arc type.

[0018] Optionally, the electromagnetic shielding sleeve comprises one of a rigid structure and a flexible wire mesh; and / or,

[0019] The gap between the outer wall of the electrical connection member and the inner wall of the electromagnetic shielding sleeve is 10-30 mm.

[0020] Optionally, the coating device further comprises a transition connector disposed outside the reaction chamber;

[0021] The transition connector is mounted and fixed with the furnace cover in one end in the first direction, and the other end is used for installation and fixing with the radio frequency power supply;

[0022] The inner hollow of the transition connector is to form a connecting through hole that penetrates in the first direction, and an insulating mounting sleeve is embedded in the connecting through hole;

[0023] The electrical connection member passes through the insulating mounting sleeve and is used for electrical connection with the radio frequency power supply.

[0024] In the second aspect, the utility model also discloses a coating device, including a radio frequency power supply, a graphite boat and the above-mentioned reactor;

[0025] The electrical connections of the reactor are electrically connected to the radio frequency power supply and the graphite boat, respectively.

[0026] Optionally, the reactor comprises two groups of electrical connectors and an electromagnetic shielding sleeve, the graphite boat comprises a first connection assembly and a second connection assembly, the first connection assembly comprises a plurality of first boat blades arranged at intervals, and the second connection assembly comprises a plurality of second boat blades arranged at intervals;

[0027] The first boat blades and the second boat blades are arranged alternately;

[0028] Two adjacent first boat blades are connected by a first graphite block, and two adjacent second boat blades are connected by a second graphite block;

[0029] One end of one of the electrical connectors is electrically connected to the transmitting end of the RF power supply, and the other end is electrically connected to the first graphite block; one end of the other electrical connector is electrically connected to the ground end of the RF power supply, and the other end is electrically connected to the second graphite block.

[0030] Optionally, along the first direction, the distance between the electromagnetic shielding sleeve of the reactor and the graphite boat is a first value;

[0031] The distance between adjacent first boat blades and second boat blades is a second value, and the second value is smaller than the first value.

[0032] The utility model embodiment includes the following advantages:

[0033] In an embodiment of the utility model, the electromagnetic shielding sleeve is arranged in the reaction chamber and sleeved outside the electrical connector, so that the electromagnetic shielding sleeve can block the electrical connector from radiating energy into the reaction chamber. Since one end of the electrical connector is used to electrically connect to the graphite boat, and the other end is used to electrically connect to the radio frequency power supply, the electromagnetic shielding sleeve can block the excessive propagation of the electromagnetic energy provided by the radio frequency power supply between the electrical connector and the furnace body, effectively prevent energy leakage, and load the energy of the radio frequency power supply to the graphite boat more effectively, which is conducive to improving the field strength between the boat blades of the graphite boat, thereby improving the utilization of the output power of the radio frequency power supply, reducing waste, and reducing energy consumption. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of a coating device of the utility model;

[0035] Figure 2 It is a schematic diagram of the cooperation between an electromagnetic shielding sleeve and an insulating sleeve of the utility model;

[0036] Figure 3 It is a schematic diagram of cooperation between another electromagnetic shielding sleeve and an insulating sleeve of the utility model;

[0037] Figure 4 It is a structural schematic diagram of a boat blade of a graphite boat of the utility model;

[0038] Figure 5 This is a structural schematic diagram of a graphite boat of the utility model;

[0039] Figure 6 It is a top view of a graphite boat of the utility model.

[0040] Description of reference numerals:

[0041] 1-furnace body, 2-furnace cover, 3-electrical connector, 4-electromagnetic shielding sleeve, 6-graphite boat, 61-boat blade, 611-first boat blade, 612-second boat blade, 62-first graphite block, 63-second graphite block, 7-insulating sleeve, 71-sub-sleeve, 8-transition connector, 91-connecting flange, 92-quartz tube, 93-support rod. DETAILED DESCRIPTION

[0042] In order to make the above-mentioned purposes, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0043] The term "first" or "second" in the specification and claims of this application may include one or more of the features explicitly or implicitly. In the description of this utility model, unless otherwise specified, "multiple" means two or more. In addition, "and / or" in the specification and claims means at least one of the connected objects, and the character " / " generally means that the objects connected before and after are in an "or" relationship.

[0044] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0045] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] One of the core concepts of the embodiment of the utility model is to disclose a reaction furnace, such as Figure 1 As shown,

[0047] The reactor comprises: a furnace body 1, a furnace cover 2, an electrical connector 3, and an electromagnetic shielding sleeve 4. The interior of the furnace body 1 is hollow, and the end of the furnace body 1 in the first direction is open to form an opening. The furnace cover 2 is connected to the end of the furnace body 1 in the first direction and blocks the opening. The furnace cover 2 and the furnace body 1 are enclosed to form a closed reaction chamber; wherein one end of the electrical connector 3 in the first direction is used for electrical connection with the graphite boat 6, and the other end passes through the furnace cover 2 and extends out of the reaction chamber and is used for electrical connection with the radio frequency power supply; the electromagnetic shielding sleeve 4 is arranged in the reaction chamber and is sleeved on the outside of the electrical connector 3 to block the electrical connector 3 from radiating energy to the furnace body 1; there is a gap between the outer wall of the electrical connector 3 and the inner wall of the electromagnetic shielding sleeve 4.

[0048] In the embodiment of the utility model, the electromagnetic shielding sleeve 4 is arranged in the reaction chamber and sleeved outside the electrical connector 3, so that the electromagnetic shielding sleeve 4 can block the electrical connector 3 from radiating energy into the reaction chamber. Since one end of the electrical connector 3 is used to electrically connect to the graphite boat 6, and the other end is used to electrically connect to the radio frequency power supply, the electromagnetic shielding sleeve 4 can block the electromagnetic energy provided by the radio frequency power supply from being guided into the reaction chamber by the electrical connector 3, effectively preventing energy leakage, and more effectively loading the energy of the radio frequency power supply onto the graphite boat 6, which is conducive to improving the field strength between the boat blades of the graphite boat 6, thereby improving the utilization of the output power of the radio frequency power supply, reducing waste, reducing energy consumption, and improving the coating quality and efficiency.

[0049] Specifically, the reactor can be used in a coating device, and the coating device can be used in industries such as semiconductors and new energy that require coating. The coating device can be specifically a plasma enhanced chemical vapor deposition (PECVD) device, which uses radio frequency power discharge to excite gas glow discharge to form plasma, and under the action of the electromagnetic field, promotes the decomposition, combination, excitation and ionization of process gas molecules, accelerates the generation of reactive groups, and reduces the film deposition temperature, thereby achieving the coating function. Specifically, the coating device can also include a graphite boat 6 and a radio frequency power supply, and the graphite boat 6 can be detachably connected to the reaction chamber of the reactor. When coating, the battery cell to be coated is first placed between two adjacent boat leaves of the graphite boat 6, and then the graphite boat 6 is placed in the reaction chamber of the reactor. The adjacent two boat leaves are separated and supported by an intermediate piece, and the positive and negative electrodes of the radio frequency power supply are connected to the graphite boat 6, so that an electric field can be formed between two adjacent boat leaves on the graphite boat 6, thereby achieving discharge.

[0050] Specifically, Figure 4 and 5As shown, the graphite boat 6 has two groups of connection components, each group of connection components includes multiple boat blades 61 arranged at intervals, and the two groups of pole piece components are staggered. The multiple boat blades 61 in one group of pole piece components can be connected through the first graphite block 62, and the multiple boat blades 61 in the other group of pole piece components can be connected through the second graphite block 63. The first graphite block 62 and the second graphite block 63 can be connected to the positive and negative poles of the power supply respectively, so as to generate an electric field and ionize the gas into plasma. Among them, the first graphite block 62 and the second graphite block 63 are both the intermediate parts.

[0051] Specifically, the reaction furnace comprises a furnace body 1 and a furnace cover 2. The furnace body 1 is hollow inside, and the two ends of the furnace body 1 along the first direction can be opened to form an opening; the furnace cover 2 can be connected to the two ends of the furnace body 1 in the first direction, and the furnace cover 2 can be used to block the opening, so that the furnace cover 2 and the furnace body 1 can be enclosed to form a closed reaction chamber. Figure 1 As shown, the furnace cover 2 can be installed and fixed to the furnace body 1 through the connecting flange 91 to achieve a fixed connection between the furnace cover 2 and the furnace body 1, thereby improving the reliability of the furnace cover 2 and the furnace body 1 enclosing a closed reaction chamber.

[0052] Specifically, the reaction furnace further includes an electromagnetic shielding sleeve 4 and an electrical connector 3. The graphite boat 6, the electrical connector 3 and the electromagnetic shielding sleeve 4 can all be arranged in the reaction chamber.

[0053] Specifically, two ends of the electrical connector 3 are electrically connected to the RF power supply and the graphite boat 6, respectively, to achieve electrical connection between the RF power supply and the graphite boat 6. The electrical connector 3 may be a rigid connector or a flexible connector.

[0054] Furthermore, the graphite boat 6 can be connected to the reaction chamber or taken out of the reaction chamber. The RF power supply is arranged outside the reaction chamber; one end of the electrical connector 3 is arranged in the reaction chamber and electrically connected to the graphite boat 6, and the other end of the electrical connector 3 can pass through the furnace cover 2 to be electrically connected to the RF power supply.

[0055] Specifically, the electrical connector 3 may include an electrode rod and an electrode head connected to each other, one end of the electrode rod may be electrically connected to the graphite boat 6 through the electrode head, and the other end of the electrode rod may pass through the furnace cover 2 to extend out of the reaction chamber and be electrically connected to the RF power supply.

[0056] Specifically, the reaction furnace further includes a support rod 93 , which can be disposed in the reaction chamber. The support rod 93 can be fixedly connected to the furnace body 1 by welding or bolt connection, and the support rod 93 is used to support and fix the graphite boat 6 .

[0057] Specifically, the reaction furnace may further include a quartz tube 92, which may be disposed in the furnace body 1 and fixedly connected to the furnace body 1 or the furnace cover 2 by welding or bolting. The reaction chamber may be formed in the quartz tube 92, and one end of the quartz tube 92 may be used for air intake, and the other end may be used for air exchange, so as to ventilate the reaction chamber.

[0058] Optionally, the coating equipment may further include a transition connector 8, which is arranged outside the reaction chamber; one end of the transition connector 8 in the first direction is installed and fixed to the furnace cover 2, and the other end is used to be installed and fixed to the RF power supply; the interior of the transition connector 8 is hollow to form a connecting through hole that passes through the first direction, and an insulating mounting sleeve is embedded in the connecting through hole; the electrical connector 3 passes through the insulating mounting sleeve and is used to be electrically connected to the RF power supply.

[0059] In the embodiment of the utility model, the transition connector 8 is respectively installed and fixed to the furnace cover 2 and the RF power supply, and the transition connector 8 can be used to be passed through by the electrical connector 3, so as to facilitate the electrical connector 3 to pass through the furnace cover 2 and connect to the RF power supply.

[0060] Specifically, a mounting hole may be provided on the furnace cover 2, one end of the transition connector 8 may be mounted and fixed in the mounting hole, and the other end is used to be mounted and fixed with the RF power supply. The transition connector 8 may be fixedly connected to the furnace cover 2 via a mounting flange, and the transition connector 8 may be sealed and connected to the furnace cover 2.

[0061] Specifically, the transition connector 8 is arranged outside the reaction chamber to play the role of transition connection. The transition connector 8 can be a rigid sleeve to improve the structural strength of the transition connector 8, thereby improving the reliability of the transition connector 8 being installed and fixed to the furnace cover 2 and the RF power supply respectively. The transition connector 8 is provided with a connecting through hole that passes through along the first direction, and an insulating mounting sleeve is embedded in the connecting through hole. In this way, the electrical connector 3 is inserted into the insulating mounting sleeve, and the insulating mounting sleeve can separate the electrical connector 3 and the transition connector 8, which can avoid electrical conduction between the electrical connector 3 and the transition connector 8.

[0062] Specifically, the insulating mounting sleeve is an insulating sleeve made of insulating material, which can be sleeved outside the electrical connector 3 to achieve insulation protection for the electrical connector 3 .

[0063] Optionally, the electromagnetic shielding sleeve 4 is sleeved outside the electrical connector 3 to block the electrical connector 3 from radiating energy to the furnace body 1. In this way, under the blocking effect of the electromagnetic shielding sleeve 4, energy leakage can be reduced. Under the excitation of a high-frequency or very high-frequency radio frequency power supply, the power of the radio frequency power supply will be transmitted between the electrical connector 3 and the graphite boat 6 in the form of electromagnetic waves, and the electromagnetic wave energy can be confined between the electrical connector 3 and the metal shielding, and the energy of the radio frequency power supply can be more effectively loaded onto the graphite boat 6, which is beneficial to increase the field strength between the boat blades 61 of the graphite boat 6 and reduce the field strength between the graphite boat 6 and the furnace body 1, thereby improving the utilization rate of the radio frequency power supply, reducing energy consumption, and improving the coating quality and efficiency.

[0064] In some optional embodiments of the present invention, there is a gap between the outer wall of the electrical connector 3 and the inner wall of the electromagnetic shielding sleeve 4 .

[0065] In the embodiment of the utility model, there is a gap between the outer wall of the electrical connector 3 and the inner wall of the electromagnetic shielding sleeve 4, which can avoid conduction between the electrical connector 3 and the electromagnetic shielding sleeve 4 and avoid electrical breakdown between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0066] Optionally, the gap between the outer wall of the electrical connector 3 and the inner wall of the electromagnetic shielding sleeve 4 is 10-30 mm, which can effectively separate the electrical connector 3 and the electromagnetic shielding sleeve 4 and avoid electrical breakdown between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0067] Optionally, both the electrical connector 3 and the electromagnetic shielding sleeve 4 are rigid structures, which can further improve the reliability of fixed installation of the electrical connector 3 and the electromagnetic shielding sleeve 4 and facilitate the realization of a gap between the outer wall of the electrical connector 3 and the inner wall of the electromagnetic shielding sleeve 4.

[0068] Specifically, the electrical connector 3 can be a metal part, so that the electrical connector 3 can be electrically connected to the RF power supply and the graphite boat 6. The electromagnetic shielding sleeve 4 can be a metal part, so that the electromagnetic shielding sleeve 4 can shield energy and constrain the electromagnetic wave energy between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0069] Specifically, the electrical connector 3 may be a metal rod, and the electromagnetic shielding sleeve 4 may be a metal sleeve.

[0070] Optionally, the first end of the electromagnetic shielding sleeve 4 in the first direction is connected to the furnace cover 2; part of the electrical connector 3 can extend out of the second end of the electromagnetic shielding sleeve 4 in the first direction, so that the electromagnetic shielding sleeve 4 and the graphite boat 6 are spaced apart.

[0071] In the embodiment of the utility model, the electromagnetic shielding sleeve 4 and the graphite boat 6 are spaced apart to avoid electrical conduction between the electromagnetic shielding sleeve 4 and the graphite boat 6, thereby avoiding electrical breakdown between the electromagnetic shielding sleeve 4 and the graphite boat 6. Moreover, the first end of the electromagnetic shielding sleeve 4 in the first direction is connected to the furnace cover 2, which is conducive to achieving a gap between the electromagnetic shielding sleeve 4 and the electrical connector 3 to avoid electrical conduction between the electromagnetic shielding sleeve 4 and the electrical connector 3.

[0072] Specifically, the electromagnetic shielding sleeve 4 can be fixedly connected to the furnace cover 2 by bolt connection or flange connection.

[0073] In some other optional embodiments of the present invention, the reactor further comprises an insulating sleeve 7 ; the insulating sleeve 7 is sleeved outside the electrical connector 3 and embedded in the electromagnetic shielding sleeve 4 , and the insulating sleeve 7 is used to separate the electrical connector 3 and the electromagnetic shielding sleeve 4 .

[0074] In the embodiment of the utility model, the insulating sleeve 7 can isolate the electrical connector 3 from the reaction gas, prevent gas ionization on the electrical connector 3, prevent powder from being formed on the surface of the electrical connector 3, and avoid introducing impurities into the cell plating process. At the same time, since the insulating sleeve 7 is arranged between the electrical connector 3 and the electromagnetic shielding sleeve 4, the insulating sleeve 7 has good insulation performance and can also effectively prevent electrical breakdown between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0075] Specifically, the insulating sleeve 7 may be an insulating sleeve made of an insulating material, which is sleeved on the electrical connector 3 to provide isolation and insulation protection for the electrical connector 3 .

[0076] Optionally, the inner wall of the insulating sleeve 7 is in contact with or spaced apart from the outer wall of the electrical connector 3 .

[0077] Optionally, the outer wall of the insulating sleeve 7 is in contact with or spaced apart from the electromagnetic shielding sleeve 4 .

[0078] Optionally, one end of the insulating sleeve 7 in the first direction is connected to the furnace cover 2, and the other end is used to connect to the graphite boat 6, so that the insulating sleeve 7 can be wrapped around the part of the electrical connector 3 arranged in the reaction chamber, which can improve the reliability of isolation and insulation protection of the electrical connector 3.

[0079] Specifically, the insulating sleeve 7 may be an integral structure. One end of the insulating sleeve 7 in the first direction may abut against or be fixedly connected to the furnace cover 2 , and the other end may abut against or be fixedly connected to the graphite boat 6 .

[0080] Optionally, the insulating sleeve 7 may include multiple sub-sleeves 71; the multiple sub-sleeves 71 may be spaced apart along the first direction, so that the multiple sub-sleeves 71 may form multiple isolation zones between the electrical connector 3 and the electromagnetic shielding sleeve 4, which may effectively prevent electrical breakdown between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0081] Specifically, a plurality of sub-sleeves 71 may be spaced apart along the first direction, and a distance between two adjacent sub-sleeves 71 in the first direction may be greater than or equal to zero. This may be specifically set according to actual needs, and the embodiment of the utility model does not specifically limit this.

[0082] Optionally, the electromagnetic shielding sleeve 4 may include one of a rigid structure and a flexible wire mesh, which may improve the structural diversity of the electromagnetic shielding sleeve 4 .

[0083] Specifically, the electromagnetic shielding sleeve 4 can be sleeved outside the insulating sleeve 7, and can confine the electromagnetic wave energy between the electrical connector 3 and the electromagnetic shielding sleeve 4, which is beneficial to improving the field strength between the boat blades 61 of the graphite boat 6 and reducing the field strength between the graphite boat 6 and the furnace body 1, thereby improving the utilization rate of the RF power supply, reducing energy consumption, and improving the coating quality and efficiency.

[0084] Specifically, the electromagnetic shielding sleeve 4 may be a metal mesh structure or a metal sleeve, so as to improve the structural diversity of the electromagnetic shielding sleeve 4 and ensure the reliability of the electromagnetic shielding sleeve 4 in confining electromagnetic wave energy.

[0085] Optionally, the electromagnetic shielding sleeve 4 and the insulating sleeve 7 are both adapted to the electrical connector 3 ; the cross-sectional shape of the electrical connector 3 along the first direction includes: a straight line type, a broken line type and an arc type.

[0086] In the embodiment of the utility model, the electromagnetic shielding sleeve 4 and the insulating sleeve 7 are both adapted to the electrical connector 3, which can improve the shape of the electromagnetic shielding sleeve 4 and the insulating sleeve 7 can be adapted to the shape of the electrical connector 3, and facilitate the assembly of the three. The cross-sectional shape of the electrical connector 3 along the first direction includes: one of a straight line type, a broken line type and an arc type, which can improve the structural diversity of the electrical connector 3.

[0087] Specifically, the shapes of the electromagnetic shielding sleeve 4 and the insulating sleeve 7 can be adapted to the shape of the electrical connector 3 , and the cross-sectional shapes of the electromagnetic shielding sleeve 4 and the insulating sleeve 7 along the first direction can be the same as or different from the cross-sectional shapes of the electrical connector 3 along the first direction.

[0088] Specifically, Figure 2 and Figure 3 The figure only illustrates the case where the cross-sectional shape of the electrical connector 3 along the first direction is a straight line, and other cases may refer to the settings.

[0089] The reactor described in the embodiment of the utility model has at least the following advantages:

[0090] In the embodiment of the utility model, the electromagnetic shielding sleeve is arranged in the reaction chamber and sleeved outside the electrical connector, so that the electromagnetic shielding sleeve can block the electrical connector from radiating energy into the reaction chamber. Since one end of the electrical connector is used to electrically connect to the graphite boat, and the other end is used to electrically connect to the radio frequency power supply, the electromagnetic shielding sleeve can block the electromagnetic energy provided by the radio frequency power supply from being guided into the reaction chamber by the electrical connector, effectively preventing energy leakage, and more effectively loading the energy of the radio frequency power supply onto the graphite boat, which is conducive to improving the field strength between the boat blades of the graphite boat, thereby improving the utilization of the output power of the radio frequency power supply, reducing waste, and reducing energy consumption.

[0091] In a second aspect, the utility model further discloses a coating device, which may include a radio frequency power supply, a graphite boat 6 and the above-mentioned reaction furnace; the electrical connector 3 of the reaction furnace is connected to the radio frequency power supply and the graphite boat 6 respectively.

[0092] Optionally, the reactor may include two groups of electrical connectors 3 and an electromagnetic shielding sleeve, the graphite boat 6 includes a first connecting component and a second connecting component, the first connecting component includes a plurality of first boat blades 611 arranged at intervals, and the second connecting component includes a plurality of second boat blades 612 arranged at intervals; the first boat blades 611 and the second boat blades 612 are arranged alternately; two adjacent first boat blades 611 are connected by a first graphite block 62, and two adjacent second boat blades 612 are connected by a second graphite block 63; one end of one of the electrical connectors 3 is electrically connected to the transmitting end of the RF power supply, and the other end is electrically connected to the first graphite block 62; one end of the other electrical connector 3 is electrically connected to the ground terminal of the RF power supply, and the other end is electrically connected to the second graphite block 63, so that the graphite boat 6 is conveniently connected to the RF power supply through the two electrical connectors 3.

[0093] Specifically, the two electrical connectors 3 can be a first electrical connector and a second electrical connector, respectively. The first electrical connector can be used as a feed-in portion of the RF power supply, and the second electrical connector can be used as a ground portion of the RF power supply. One end of the first electrical connector is connected to the transmitting end of the RF power supply, and the other end is connected to the first graphite block 62; one end of the second electrical connector is connected to the ground end of the RF power supply, and the other end is connected to the second graphite block 63.

[0094] Specifically, Figure 5 As shown, the first graphite block 62 can be arranged in the middle area of ​​the graphite boat 6, and the second graphite block can be arranged at the bottom of the graphite boat 6; or the first graphite block 62 can also be arranged at the bottom of the graphite boat 6, and the second graphite block 63 can be arranged in the middle area of ​​the graphite boat 6.

[0095] Specifically, the first graphite block 62 may be connected to the first electrical connector, and since two adjacent first boat blades 611 may be connected via the first graphite block 62, the first electrical connector may be indirectly electrically connected to the first boat blade 611. The second graphite block 63 may be connected to the second electrical connector, and since two adjacent second boat blades 612 may be connected via the second graphite block 63, the second electrical connector and the second boat blade 612 may be indirectly electrically connected.

[0096] Specifically, the first graphite block 62 and the first boat blade 611 may be physically connected and fixed by a graphite rod; the second graphite block 63 and the second boat blade 612 may be physically connected and fixed by a graphite rod.

[0097] Optionally, the width of the gap between the electromagnetic shielding sleeve 4 and the electrical connector 3 is greater than the spacing between the adjacent first boat blade 611 and the second boat blade 612, which can effectively separate the electrical connector 3 and the electromagnetic shielding sleeve 4 to avoid electrical breakdown between the electrical connector 3 and the electromagnetic shielding sleeve 4.

[0098] Optionally, in the first direction, the spacing between the electromagnetic shielding sleeve 4 and the graphite boat 6 of the reactor is a first value; the spacing between adjacent first boat blades 611 and second boat blades 612 is a second value, and the second value is smaller than the first value. In this way, it can be ensured that there is sufficient spacing between the electrical connector 3 and the graphite boat 6, effectively avoiding electrical breakdown between the electromagnetic shielding sleeve 4 and the graphite boat 6.

[0099] Specifically, Figure 2 and Figure 3 As shown, in the first direction, the distance between the second end of the electromagnetic shielding sleeve 4 and the graphite boat 6 is L. Figure 6 As shown, the distance between the adjacent first boat blade 611 and the second boat blade 612 is D, and L>D.

[0100] The coating equipment described in the embodiment of the utility model has at least the following advantages:

[0101] In the embodiment of the utility model, the electromagnetic shielding sleeve is arranged in the reaction chamber and sleeved outside the electrical connector, so that the electromagnetic shielding sleeve can block the electrical connector from radiating energy into the reaction chamber. Since one end of the electrical connector is used to electrically connect to the graphite boat, and the other end is used to electrically connect to the radio frequency power supply, the electromagnetic shielding sleeve can block the electromagnetic energy provided by the radio frequency power supply from being guided into the reaction chamber by the electrical connector, effectively preventing energy leakage, and more effectively loading the energy of the radio frequency power supply onto the graphite boat, which is conducive to improving the field strength between the boat blades of the graphite boat, thereby improving the utilization of the output power of the radio frequency power supply, reducing waste, and reducing energy consumption.

[0102] Although the preferred embodiments of the utility model embodiments have been described, those skilled in the art may make additional changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications that fall within the scope of the utility model embodiments.

[0103] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0104] The above is a detailed introduction to a reactor and a coating device provided by the present invention. Specific examples are used in this article to illustrate the principle and implementation method of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.

Claims

1. A reactor, characterized in that: include: A furnace body, a furnace cover, an electrical connector, and an electromagnetic shielding sleeve, wherein the interior of the furnace body is hollow, the end of the furnace body in a first direction is open to form an opening, the furnace cover is connected to the end of the furnace body in the first direction and blocks the opening, and the furnace cover and the furnace body are enclosed to form a closed reaction chamber; wherein, One end of the electrical connector in the first direction is used for electrical connection with the graphite boat, and the other end passes through the furnace cover and extends out of the reaction chamber and is used for electrical connection with the radio frequency power supply; The electromagnetic shielding sleeve is arranged in the reaction chamber and sleeved outside the electrical connector to prevent the electrical connector from radiating energy to the furnace body; There is a gap between the outer wall of the electrical connector and the inner wall of the electromagnetic shielding sleeve.

2. The reaction furnace according to claim 1, characterized in that: The first end of the electromagnetic shielding sleeve in the first direction is connected to the furnace cover; A portion of the electrical connector extends out of the second end of the electromagnetic shielding sleeve in the first direction, so that the electromagnetic shielding sleeve and the graphite boat are spaced apart.

3. The reaction furnace according to claim 1, characterized in that: The reactor also includes an insulating sleeve; The insulating sleeve is sleeved outside the electrical connector and embedded in the electromagnetic shielding sleeve.

4. The reaction furnace according to claim 3, characterized in that: One end of the insulating sleeve in the first direction is connected to the furnace cover, and the other end is used to be connected to the graphite boat.

5. The reaction furnace according to claim 3, characterized in that: The insulating sleeve comprises a plurality of sub-sleeves; A plurality of said sub-sleeves are arranged at intervals along the first direction; and / or, The electromagnetic shielding sleeve and the insulating sleeve are both adapted to the electrical connector; The cross-sectional shape of the electrical connector along the first direction includes one of a straight line, a folded line and an arc line.

6. The reaction furnace according to claim 1, characterized in that: The electromagnetic shielding sleeve comprises one of a rigid structure and a flexible wire mesh; and / or, The gap between the outer wall of the electrical connector and the inner wall of the electromagnetic shielding sleeve is 10-30 mm.

7. The reaction furnace according to claim 1, characterized in that: The reactor further comprises a transition piece, wherein the transition piece is arranged outside the reaction chamber; One end of the transition connector in the first direction is mounted and fixed to the furnace cover, and the other end is used to be mounted and fixed to the RF power supply; The interior of the transition connector is hollow to form a connecting through hole penetrating in the first direction, and an insulating mounting sleeve is embedded in the connecting through hole; The electrical connector passes through the insulating mounting sleeve and is used to be electrically connected to the radio frequency power supply.

8. A coating device, characterized in that: It comprises a radio frequency power supply, a graphite boat and a reactor as claimed in any one of claims 1 to 7; The electrical connectors of the reaction furnace are electrically connected to the radio frequency power supply and the graphite boat respectively.

9. The coating device according to claim 8, characterized in that: The reactor comprises two groups of electrical connectors and an electromagnetic shielding sleeve, the graphite boat comprises a first connection assembly and a second connection assembly, the first connection assembly comprises a plurality of first boat blades arranged at intervals, and the second connection assembly comprises a plurality of second boat blades arranged at intervals; The first boat blades and the second boat blades are arranged alternately; Two adjacent first boat blades are connected by a first graphite block, and two adjacent second boat blades are connected by a second graphite block; One end of one of the electrical connectors is electrically connected to the transmitting end of the RF power supply, and the other end is electrically connected to the first graphite block; one end of the other electrical connector is electrically connected to the ground end of the RF power supply, and the other end is electrically connected to the second graphite block.

10. The coating device according to claim 9, characterized in that: Along the first direction, the distance between the electromagnetic shielding sleeve of the reactor and the graphite boat is a first value; The distance between adjacent first boat blades and second boat blades is a second value, and the second value is smaller than the first value.

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