Material surface treatment device and method

Abstract

The present invention discloses a material surface treatment device and method, the device includes a feeding device, an ultrasonic cleaning device, a vacuum drying device, a vacuum plasma cleaning device, and a discharging device which are arranged in sequence; the ultrasonic cleaning device includes an ultrasonic cleaning tank for accommodating a hydrocarbon cleaning agent, and is provided with a first outlet and an inlet, and the first outlet and the inlet are connected to a first separation circulation system, the first separation circulation system is used to distill and regenerate the hydrocarbon cleaning agent; the first separation circulation system includes a first separation tank, a hydrocarbon cleaning agent evaporation device, and a hydrocarbon cleaning agent condensation device which are connected in sequence. Ultrasonic hydrocarbon washing is used to replace ultrasonic water washing, the hydrocarbon cleaning agent is recycled, and the three steps of hydrocarbon cleaning, vacuum drying, and vacuum plasma cleaning are combined in sequence, so as to achieve zero discharge of waste gas and wastewater, and be green and environmentally friendly.

Description

Technical Field

[0001] The present invention relates to the field of mechanical engineering surface treatment, and in particular to a material surface treatment device and method. Background Art

[0002] Material surface engineering is a systematic engineering that processes the surface of materials, such as washing, coating, surface modification, etc., to change the chemical composition, organizational structure and stress state of solid metal surfaces or non-metal surfaces, so as to obtain the required surface characteristics. For various fields such as chips, aluminum alloy products, and electroplated products, materials need to be cleaned before welding, plating, and spraying. For example, the surface of the material is plated (including painting, electroplating, chemical plating, electrophoresis, etc.). The process in the prior art is usually as follows: feeding → degreasing → multiple ultrasonic water washing → multiple drying → plating → multiple water washing → drying → discharging. Water is needed in the process before, during, and after plating, and wastewater is generated. The discharge of these wastewaters will cause great pollution and cannot meet the environmental / environmental protection standards required by the country. The main factors affecting the environment are the discharge of wastewater and waste gas. In order to meet the national emission standards, many companies finally use additional wastewater and waste gas treatment equipment for treatment, thereby increasing costs. Summary of the invention

[0003] In order to solve the above problems, the present invention proposes a material surface treatment device and method, which can achieve zero emission of wastewater and waste gas during the process of material surface treatment.

[0004] The present invention discloses a material surface treatment equipment, comprising a feeding device, an ultrasonic cleaning device, a vacuum drying device, a vacuum plasma cleaning device, a discharging device, and a sealing door for sealing each device and an outer sealing door for sealing the overall treatment equipment, which are arranged in sequence; the ultrasonic cleaning device comprises an ultrasonic cleaning tank for accommodating a hydrocarbon cleaning agent, and is provided with a first outlet and an inlet, and the first outlet and the inlet are connected to a first separation circulation system, and the first separation circulation system is used for recycling and regenerating the hydrocarbon cleaning agent; the first separation circulation system comprises a first separation tank, a hydrocarbon cleaning agent evaporating device, and a hydrocarbon cleaning agent condensing device, which are connected in sequence; the first separation tank is connected to the first outlet, and is used for receiving the hydrocarbon cleaning agent to be regenerated in the ultrasonic cleaning device, and the hydrocarbon cleaning agent condensing device is connected to the inlet, and is used for circulating the regenerated hydrocarbon cleaning agent to the ultrasonic cleaning device; the hydrocarbon cleaning agent is recycled and regenerated in a closed system to prevent leakage.

[0005] Preferably, the ultrasonic cleaning tank comprises a rough washing tank, a fine washing tank and a rinsing tank which are arranged in sequence countercurrent to the flow direction of the hydrocarbon cleaning agent; a first overflow port is arranged between the rough washing tank and the fine washing tank, and a second overflow port is arranged between the fine washing tank and the rinsing tank; the first outlet is arranged on the rough washing tank, and the inlet is arranged on the rinsing tank.

[0006] Further preferably, the ultrasonic cleaning tank forms a height difference with the first separation tank and the hydrocarbon cleaning agent condensing device; when the material surface is treated, the height difference forms a power source for the first separation circulation system, so that the hydrocarbon cleaning agent to be regenerated in the rough washing tank flows into the first separation tank under the action of gravity, and the hydrocarbon cleaning agent regenerated in the hydrocarbon cleaning agent condensing device flows into the rinsing tank under the action of gravity; the height of the first overflow port is lower than the height of the second overflow port, so that the hydrocarbon cleaning agent flows from the rinsing tank into the fine washing tank and then into the rough washing tank.

[0007] Further preferably, a discharge port is provided at the bottom of each cleaning tank, and the discharge port is connected to the third separation tank, and the third separation tank is further connected to the hydrocarbon cleaning agent evaporation device to form a second separation circulation system; when it is necessary to treat the dirt in each cleaning tank, the discharge port can be opened, so that the hydrocarbon cleaning agent to be regenerated together with the dirt passes through the discharge port in sequence through the separation in the third separation tank, the evaporation in the hydrocarbon cleaning agent evaporation device and the condensation in the hydrocarbon cleaning agent condensation device, and then circulates to the ultrasonic cleaning tank for regeneration.

[0008] More preferably, a filter screen and a slag discharge port are provided in the first separation tank or the third separation tank, and the filter screen is used to filter and separate the dirt insoluble in the hydrocarbon cleaning agent and discharge it from the slag discharge port.

[0009] Preferably, it also includes a refrigeration cycle system, which includes a compressor and a refrigerant condenser and a refrigerant evaporator connected to the compressor; the hydrocarbon cleaning agent condensing device is connected to the refrigerant evaporator of the refrigeration cycle system to send the cold air generated when the refrigerant evaporator of the refrigeration cycle system evaporates into the hydrocarbon cleaning agent condensing device to assist in the condensation of the hydrocarbon cleaning agent; the hydrocarbon cleaning agent evaporating device is connected to the refrigerant condenser of the refrigeration cycle system to send the hot air discharged when the refrigerant condenser of the refrigeration cycle system condenses into the hydrocarbon cleaning agent evaporating device to assist in the evaporation of the hydrocarbon cleaning agent; thereby, the heat generated by the compressor is recycled by the hydrocarbon cleaning agent evaporating device.

[0010] Further preferably, the tank body of the ultrasonic cleaning tank adopts a jacket, water is placed in the jacket, and the heat generated by the compressor is used to heat the jacket.

[0011] Preferably, the ultrasonic cleaning device and the vacuum drying device are connected to the hydrocarbon cleaning agent condensing device, and the hydrocarbon cleaning agent evaporated in the ultrasonic cleaning tank and the hydrocarbon cleaning agent discharged from the vacuum drying device are condensed and recovered by the hydrocarbon cleaning agent condensing device.

[0012] Further preferably, a second separation tank is provided between the inlet and the hydrocarbon cleaning agent condensing device for separating condensed water and hydrocarbon cleaning agent.

[0013] Preferably, the hydrocarbon cleaning agent has a flash point above 200° C., a boiling point between 65° C. and 80° C., and a viscosity below 1000 mPa·s.

[0014] Preferably, the vacuum plasma cleaning device comprises: a sealed plasma chamber and plasma plates distributed in the sealed plasma chamber; during plasma cleaning, the vacuum degree in the sealed plasma chamber is below 30 Pa.

[0015] Further preferably, during plasma cleaning, gas is introduced into the sealed plasma chamber to continuously generate plasma, the flow rate of the gas is 200-400 ml / 100 L·min, and the gas includes at least one of argon, oxygen, nitrogen, hydrogen, and carbon tetrafluoride.

[0016] Preferably, the feeding device and the discharging device are ship-lock type feeding device and ship-lock type discharging device, so as to ensure that the whole equipment is a closed system during feeding and discharging, and the volatilized hydrocarbon cleaning agent in the system does not leak.

[0017] The present invention also provides a material surface treatment method, comprising: the material enters a closed material surface treatment device through a feeding device, and is successively cleaned by a hydrocarbon cleaning agent of an ultrasonic cleaning device, vacuum dried by a vacuum drying device, and vacuum plasma treated by a vacuum plasma cleaning device, and then discharged from the closed material surface treatment device through a discharging device; the ultrasonic cleaning device is connected to a first separation circulation system for closed-loop regeneration of the hydrocarbon cleaning agent; the hydrocarbon cleaning agent to be regenerated flows out of the ultrasonic cleaning device, enters the first separation circulation system, is successively separated, evaporated, and condensed, and then circulated back to the ultrasonic cleaning device.

[0018] Beneficial effects of the present invention: The present invention combines the three steps of hydrocarbon cleaning, vacuum drying and vacuum plasma cleaning in sequence to treat the material surface, which can reduce costs to the greatest extent. At the same time, the hydrocarbon cleaning agent is recycled in a closed system, truly solving the zero emission problem of wastewater and waste gas from the source of the process itself, and the entire process is green and environmentally friendly. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1It is a three-dimensional schematic diagram of a material surface treatment device in an embodiment of the present invention.

[0020] Figure 2 It is a front schematic diagram of a material surface treatment device in an embodiment of the present invention.

[0021] Figure 3 It is a schematic top view of a material surface treatment device in an embodiment of the present invention.

[0022] Figure 4 Schematic diagram of the circulation of hydrocarbon cleaning agent in an embodiment of the present invention.

[0023] Figure 5 Schematic diagram of heat circulation in an embodiment of the present invention. DETAILED DESCRIPTION

[0024] The present invention will be further described in detail below in conjunction with specific implementations and with reference to the accompanying drawings. It should be emphasized that the following description is merely exemplary and is not intended to limit the scope of the present invention and its application.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0026] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] like Figure 1-3As shown, this embodiment provides a material surface treatment device 10, including a feeding device 100, an ultrasonic cleaning device 200, a vacuum drying device 300, a vacuum plasma cleaning device 400 and a discharging device 500 arranged in sequence on a production line. The periphery of the entire treatment device is closed by an external sealing door, and each device itself is also independently sealed (not shown in the figure); to ensure the safe operation of the equipment, the heat preservation effect, and to prevent the volatilization of the solvent.

[0028] A railing 11 and an automatic manipulator 12 are installed above the feeding device 100, the ultrasonic cleaning device 200, the vacuum drying device 300, the vacuum plasma cleaning device 400 and the discharging device 500. The automatic manipulator 12 is connected to the electronic control system 13 and can move up and down, as well as move left and right along the railing 11 between the devices.

[0029] The feeding device 100 includes a feeding conveyor 101 and a material frame 102, and a movable sealing door is arranged between the feeding device 100 and the ultrasonic cleaning device 200. The external robot arm puts the material into the material frame 102, and the material frame 102 is sent to the bottom of the robot 12 by the feeding conveyor 101, and then the robot 12 grabs the material frame 102, and opens the movable sealing door at the same time, and sends the material frame 102 into the ultrasonic cleaning device. The discharging device 500 also includes a discharging conveyor, and a movable sealing door is arranged between the discharging device and the vacuum plasma cleaning device 400. The robot grabs the cleaned material in the vacuum plasma cleaning device 400, and opens the movable sealing door at the same time, puts the material frame on the discharging conveyor, and then the discharging conveyor sends the device out. The feeding device 100 and the discharging device 500 are ship-lock type feeding devices and ship-lock type discharging devices, which ensure that the entire device is a closed system during feeding and discharging, and the volatilized hydrocarbon cleaning agent in the system does not leak.

[0030] The ultrasonic cleaning device 200 includes three ultrasonic cleaning tanks containing cleaning agents, namely a rough cleaning tank 201, a fine cleaning tank 202 and a rinsing tank 203, which are respectively used for rough cleaning (cleaning cutting oil, metal particles, dust, etc. on the surface of the material), fine cleaning (further cleaning the less cutting oil on the surface of the material) and rinsing (further cleaning the trace amount of cutting oil on the surface of the material). The selection of cleaning agents must have the following characteristics: ① degreasing in both cold and hot and steam states, ② high liquid phase density and low surface tension, ③ non-flammable, non-decomposable, non-deteriorating, and non-corrosive to metals, ④ stable, non-toxic, and non-irritating odor, ⑤ high liquid phase density and low surface tension, ⑥ low viscosity, low specific heat capacity and vaporization heat, and steam is heavier than air, ⑦ easy to separate from oil and dirt, and does not pollute the air. Specifically, hydrocarbon cleaning agents are selected. Hydrocarbon cleaning agents have good environmental protection characteristics and cleaning capabilities, especially strong cleaning power for processing oils such as metals, and good cleaning effects for small surface tension, fine cracks, and fine holes. The hydrocarbon cleaning agent preferably has a flash point above 200° C., a boiling point between 65° C. and 80° C., and a viscosity below 1000 mPa·s, and is preferably one of trichloroethylene, n-decane, and bromopropane.

[0031] Each ultrasonic cleaning tank is made of 316 stainless steel plates that are precisely welded. A vibration plate is installed on the inner side of the ultrasonic cleaning tank, and multiple vibration heads are installed in the vibration plate. There are a total of 200 vibration heads in a single tank, and each tank is equipped with a set of generators. The ultrasonic frequency is 28KHz. Ultrasonic waves cause the hydrocarbon cleaning agent to vibrate and tear rapidly to form numerous vacuum bubbles. The bubbles will generate huge impact force at the moment of closing. The bubbles are repeatedly formed and closed, so that the oil stains are quickly dissolved and peeled off.

[0032] like Figure 4 As shown, the ultrasonic cleaning device 200 is connected to the first separation circulation system (solid line in the figure) for the regeneration and recycling of hydrocarbon cleaning agents. Specifically, the first separation circulation system includes a first separation tank, a hydrocarbon cleaning agent evaporation device, a hydrocarbon cleaning agent condensation device and a second separation tank connected in sequence. The rough washing tank 201 is provided with a first outlet, which is connected to the first separation tank; the rinsing tank 203 is provided with an inlet, which is connected to the second separation tank. A first overflow port is provided between the rough washing tank 201 and the fine washing tank 202, and a second overflow port is provided between the fine washing tank 202 and the rinsing tank 203, and the height of the first overflow port is lower than the height of the second overflow port. At the same time, the height of the ultrasonic cleaning device is lower than the second separation tank, and higher than the first separation tank (that is, the height of the rough washing tank is higher than the first separation tank, and the height of the rinsing tank is lower than the second separation tank) to form a height difference.

[0033] The circulation of hydrocarbon cleaning agent is as follows Figure 4As shown, under the action of the height difference, the hydrocarbon cleaning agent to be regenerated in the rough washing tank 201 flows into the first separation tank, and a stainless steel filter screen is arranged inside the first separation tank, with a filtration accuracy of about 20 μm, which separates the dirt insoluble in the hydrocarbon cleaning agent from the cleaning agent (solid-liquid separation), and the insoluble dirt can be regularly taken out from the slag discharge port of the first separation tank, and the hydrocarbon cleaning agent to be regenerated (the insoluble dirt has been filtered out, but it still contains cutting oil, etc. soluble in the cleaning agent) flows into the hydrocarbon cleaning agent evaporation device, and the hydrocarbon cleaning agent to be regenerated is fractionated and purified in the hydrocarbon cleaning agent evaporation device, and the purified hydrocarbon cleaning agent (that is, the regenerated hydrocarbon cleaning agent) enters the hydrocarbon cleaning agent condensation device for condensation; the hydrocarbon cleaning agent evaporation device is also provided with a discharge port for discharging and recovering the cutting oil, etc. Since the moisture in the air may also be condensed into water during the condensation process, the regenerated hydrocarbon cleaning agent and water are separated in the second separation tank (liquid-liquid separation), and then flow into the rinsing tank under the action of the height difference, and then overflow from the rinsing tank to the fine washing tank, and then overflow to the rough washing tank, completing the regeneration cycle of the entire hydrocarbon cleaning agent. The overflow rate of the regenerated hydrocarbon cleaning agent per hour is 1.5-2 times the volume of a single tank.

[0034] The hydrocarbon cleaning agent evaporation device is connected to the refrigerant evaporator 204 of the refrigeration cycle system, and the refrigerant evaporator 204 of the refrigeration cycle system heats the hydrocarbon cleaning agent evaporation device; the hydrocarbon cleaning agent condensation device is connected to the refrigerant evaporator 205 of the refrigeration cycle system, and the refrigerant evaporator 205 of the refrigeration cycle system cools down the hydrocarbon cleaning agent condensation device. The refrigerant evaporator of the refrigeration cycle system and the refrigerant condenser of the refrigeration cycle system are connected to the compressor to form a refrigeration cycle system. The circulation of the refrigerant is as follows: Figure 5 As shown, the exhaust port of the compressor is connected to one end of the refrigerant condenser of the refrigeration cycle system, the other end of the refrigerant condenser of the refrigeration cycle system is connected to the refrigerant evaporator of the refrigeration cycle system, and the other end of the refrigerant evaporator of the refrigeration cycle system is connected to the suction port of the compressor. The heat generated by the compressor is connected to the hydrocarbon cleaning agent evaporation device through a pipeline and is recycled by the hydrocarbon cleaning agent evaporation device.

[0035] Since the boiling point of the hydrocarbon cleaning agent selected in this embodiment is relatively low (65-80°C), the hydrocarbon cleaning agent evaporation device does not need to be distilled under reduced pressure, but can be separated by distillation under normal pressure. The heating method of the hydrocarbon cleaning agent evaporation device is jacket heating, and an outer layer is placed outside the inner layer for accommodating the hydrocarbon cleaning agent to be distilled, and water is placed between the inner and outer layers. The heat generated by the compressor is connected to the jacket of the hydrocarbon cleaning agent evaporation device through a pipeline and heats the water in the jacket, thereby performing distillation and regeneration of the hydrocarbon cleaning agent. By using the heat generated by the compressor to heat the hydrocarbon cleaning agent evaporation device, the purpose of energy saving can be achieved.

[0036] The tank bodies of the rough washing tank, fine washing tank, and rinsing tank can also be jacketed. An outer tank body is placed on the inner tank body for accommodating hydrocarbon cleaning agents. Pure water is placed between the inner tank body and the outer tank body. The heat generated by the compressor is used to heat the jacket, which can effectively prevent the hydrocarbon cleaning agent from agglomerating due to uneven heating. Similarly, the heat generated by the compressor is used to heat the ultrasonic cleaning tank, further saving energy consumption and costs.

[0037] It is inevitable that some hydrocarbon cleaning agents will volatilize in the ultrasonic cleaning tank, and at the same time, hydrocarbon cleaning agents will also evaporate in the vacuum drying device. However, since each device has its own sealing door, and a sealing door is also provided outside the overall equipment, a double sealing method can effectively prevent hydrocarbon cleaning agents from being discharged to the outside. In addition, each cleaning tank in the ultrasonic cleaning device and the vacuum drying device are connected to a hydrocarbon cleaning agent condensing device, which condenses the cleaning agent volatilized in the cleaning tank and the cleaning agent evaporated in the vacuum drying device together with the regenerated cleaning agent fractionated by the hydrocarbon cleaning agent evaporating device, thereby further recycling the hydrocarbon cleaning agent, achieving zero emission of waste gas, and saving energy and cost.

[0038] During the operation of the equipment, when the workpiece is subjected to surface treatment, its hydrocarbon cleaning agent circulation and refrigeration cycle are also running all the time. After the equipment has been used for a long time, in order to further purify the hydrocarbon cleaning agent, a discharge port can be provided at the bottom of the rough washing tank 201, the fine washing tank 202 and the rinsing tank 203 respectively. The discharge port can be manually controlled to switch, and the discharge port is connected to the third separation tank. At the same time, the third separation tank is connected to the hydrocarbon cleaning agent evaporation device to form a second separation circulation system. Similarly, there is a height difference between the ultrasonic cleaning tank and the third separation tank. Tanks such as Figure 4 As shown by the dotted lines in the figure, when the material surface is not treated, the discharge ports of the rough washing tank, the fine washing tank and the rinsing tank are opened, and the cleaning agents in each ultrasonic cleaning tank flow into the third separation tank at one time for solid-liquid separation, and then sequentially undergo fractional distillation and purification by the hydrocarbon cleaning agent evaporation device and condensation by the hydrocarbon cleaning agent condensation device, and finally flow back to the rinsing tank under the action of the height difference to complete the purification and recycling of all hydrocarbon cleaning agents. The third separation tank is equipped with a stainless steel filter with a filtration accuracy of 20μm to separate the dirt insoluble in the hydrocarbon cleaning agent from the cleaning agent; the solid waste residue is discharged from the slag discharge port of the third separation tank. The purification and cleaning of the hydrocarbon cleaning agent can be achieved through the second separation circulation system.

[0039] The vacuum drying device 300 dries the cleaned material and may include one or more boxes to perform drying in multiple steps. As shown in the figure, it includes two vacuum drying devices, 301 and 302, respectively. The drying condition is 1.0×10 4 Pa–1.01×10 5 Pa.

[0040] The vacuum plasma cleaning device 400 is used to clean the dried material. Although the material is cleaned of oil and other impurities by the ultrasonic cleaning device, hydrocarbon cleaning agent or a small amount of residual oil will remain on its surface. The vacuum plasma cleaning device 400 can generate plasma to clean the cleaning agent on the surface of the material and the residual oil that is not removed during the hydrocarbon cleaning process.

[0041] The vacuum plasma cleaning device includes a sealed plasma chamber and a plasma plate distributed in the sealed plasma chamber. The plasma substrate is symmetrically distributed inside the plasma chamber, and two symmetrical plates can be set, or four symmetrical plates can be set around the inner side. After the material enters the sealed plasma chamber, the sealing door is closed, and then the vacuum is evacuated. When the vacuum degree is below 30Pa, gas is introduced into the sealed plasma chamber to continuously generate plasma. The introduced gas includes argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride, etc. Different gases are selected according to different materials. For example, the circuit board selects one of argon, oxygen, and carbon tetrafluoride, and the metal selects one of argon, oxygen, and hydrogen. For a sealed plasma chamber with a volume of 100L, the flow rate of the gas into the cleaning tank is 200-400ml / min. During the plasma cleaning process, the duration of the gas introduction is about 3-5min. The pressure of plasma cleaning in this embodiment is 1-100Pa, preferably 30Pa or 80Pa.

[0042] The principle of plasma cleaning of material surface is: in a vacuum chamber, a radio frequency power source is ignited under a certain pressure to generate high-energy plasma, which then bombards the material surface to produce a microscopic peeling effect to achieve the purpose of cleaning. The peeling depth can be adjusted by adjusting the plasma bombardment time. The effect of plasma is at the nanometer level, so it will not damage the cleaning object.

[0043] Plasma cleaning also has the following advantages: 1. Dry treatment method, no pollution, no wastewater, no solvent, green and environmentally friendly; 2. Only a small amount of gas is needed to form plasma, with low cost, low power consumption, short cleaning time and high efficiency; 3. The plasma is not very directional and can penetrate into the tiny pores and depressions of objects, so there is no need to consider the shape of the material too much; in addition, different materials, whether metals, semiconductors, oxides or polymer materials, can be cleaned; 4. While completing the cleaning and decontamination, it can also improve the surface properties of the material itself, such as improving the wetting properties of the surface, improving the adhesion of the film, and improving the firmness of the welding.

[0044] After the above ultrasonic hydrocarbon cleaning, vacuum drying and vacuum plasma cleaning, the surface cleaning effect of the material is good. For metal materials, the surface tension can reach more than 60dyn after cleaning; for plastics, the surface tension can reach more than 40dyn after cleaning; for glass, the surface tension can reach more than 60dyn after cleaning.

[0045] The experimental data of the water drop angle before and after cleaning the silicon plate material are as follows: before cleaning, the left contact angle of the water drop angle is 99° and the right contact angle is 101.54°; after cleaning, the left contact angle of the water drop angle is 12.5° and the right contact angle is 11.95°. From the experimental data, it can be seen that the cleaning effect is good.

[0046] Taking plastic as an example, the ultrasonic hydrocarbon cleaning + plasma cleaning method is used in this embodiment. Compared with the traditional ultrasonic water cleaning or ultrasonic hydrocarbon cleaning alone, the water mark test, dyne value, water drop angle and overall energy consumption are as follows:

[0047]

[0048]

[0049] From the above data, we can see that the ultrasonic hydrocarbon cleaning + plasma cleaning method has good cleaning effect and low energy consumption.

[0050] As described above, the devices in the equipment are on an assembly line. For batch operation, an automatic manipulator 12 can be set above each device / tank. During operation, the automatic manipulators above each device or tank work synchronously on different workpieces to improve efficiency.

[0051] For feeding, the external robot arm puts the material into the material frame 102. After the material frame 102 is sent to the bottom of the robot arm 12 by the feeding conveyor 101, the automatic robot arm 12 moves downward to grab the material frame 102 and then moves upward, while opening the movable sealing door. The automatic robot arm moves one grid to the right and stops above the rough washing tank 201, then moves downward to send the material frame 102 into the rough washing tank 201. Finally, the automatic robot arm returns to its position.

[0052] Similarly, the working process of the automatic manipulators above other devices / tanks is the same as above, that is, first open the sealing door of each device, then grab the material frame of the workpiece that has been processed in the previous step through the automatic manipulator, and then send it to the next device or tank, and finally close their respective sealing doors.

[0053] The specific process of processing each workpiece by the above material surface treatment equipment is as follows: feeding → rough washing → fine washing → rinsing → secondary drying → vacuum plasma treatment → discharging.

[0054] Compared with the cleaning process in the background technology, the material surface treatment process of this embodiment has the following beneficial effects:

[0055] 1. This application combines the three steps of ultrasonic hydrocarbon cleaning, vacuum drying and vacuum plasma cleaning in sequence. Compared with the previous ultrasonic water cleaning or ultrasonic hydrocarbon cleaning, it has a good cleaning effect, short cleaning time and high efficiency. At the same time, it can also improve the surface properties of the material itself, which is beneficial to the subsequent processing of the material.

[0056] 2. Sealed doors are installed outside each device in the equipment and the whole equipment. The hydrocarbon cleaning agent is recycled during the cleaning process. At the same time, the hydrocarbon cleaning agent volatilized in the cleaning tank and the hydrocarbon cleaning agent evaporated in the first vacuum box enter the hydrocarbon cleaning agent condensation device for circulation, completely avoiding the discharge of wastewater and waste gas, truly solving the problem of wastewater and waste gas discharge from the source of the process, and the entire process is green, environmentally friendly and pollution-free. In addition, resources are saved and costs are reduced.

[0057] 3. Connect the hydrocarbon cleaning evaporation device and the hydrocarbon cleaning condensation device to the refrigeration cycle system. At the same time, the heat generated by the compressor is used for heating the hydrocarbon cleaning evaporation device and the ultrasonic cleaning tank, etc., to achieve heat recovery and maximize energy saving and consumption reduction.

[0058] The above contents are further detailed descriptions of the present invention in combination with specific / preferred embodiments, and it cannot be determined that the specific implementation of the present invention is limited to these descriptions. For ordinary technicians in the technical field to which the present invention belongs, they can also make several substitutions or modifications to these described embodiments without departing from the concept of the present invention, and these substitutions or modifications should be regarded as belonging to the protection scope of the present invention.

Claims

1. A material surface treatment device, characterized in that: It includes a feeding device, an ultrasonic cleaning device, a vacuum drying device, a vacuum plasma cleaning device, a discharging device, and a sealing door for sealing each device and an outer sealing door for sealing the overall processing equipment, which are arranged in sequence; The ultrasonic cleaning device comprises an ultrasonic cleaning tank for accommodating a hydrocarbon cleaning agent, and is provided with a first outlet and an inlet, and the first outlet and the inlet are connected to a first separation circulation system, and the first separation circulation system is used for circulating and regenerating the hydrocarbon cleaning agent; The first separation circulation system comprises a first separation tank, a hydrocarbon cleaning agent evaporation device, and a hydrocarbon cleaning agent condensation device which are connected in sequence; the first separation tank is connected to the first outlet to receive the hydrocarbon cleaning agent to be regenerated in the ultrasonic cleaning device, and the hydrocarbon cleaning agent condensation device is connected to the inlet to circulate the regenerated hydrocarbon cleaning agent to the ultrasonic cleaning device, and the hydrocarbon cleaning agent is circulated and regenerated in a closed system to prevent leakage; The ultrasonic cleaning tank comprises a rough washing tank, a fine washing tank, and a rinsing tank which are sequentially arranged in countercurrent to the flow direction of the hydrocarbon cleaning agent; a first overflow port is arranged between the rough washing tank and the fine washing tank, and a second overflow port is arranged between the fine washing tank and the rinsing tank; the first outlet is arranged on the rough washing tank, and the inlet is arranged on the rinsing tank; The ultrasonic cleaning tank forms a height difference with the first separation tank and the hydrocarbon cleaning agent condensing device; when treating the surface of the material, the height difference forms the power source of the first separation circulation system, so that the hydrocarbon cleaning agent to be regenerated in the rough cleaning tank flows into the first separation tank under the action of gravity, and the hydrocarbon cleaning agent regenerated in the hydrocarbon cleaning agent condensing device flows into the rinsing tank under the action of gravity; the height of the first overflow port is lower than the height of the second overflow port, so that the hydrocarbon cleaning agent flows from the rinsing tank into the fine cleaning tank and then into the rough cleaning tank; A discharge port is also provided at the bottom of each cleaning tank, and the discharge port is connected to the third separation tank, and the third separation tank is further connected to the hydrocarbon cleaning agent evaporation device to form a second separation circulation system; when it is necessary to treat the dirt in each cleaning tank, the discharge port can be opened, so that the hydrocarbon cleaning agent to be regenerated together with the dirt passes through the discharge port in sequence through the separation in the third separation tank, the evaporation of the hydrocarbon cleaning agent evaporation device and the condensation of the hydrocarbon cleaning agent condensation device, and then circulates to the ultrasonic cleaning tank for regeneration.

2. The material surface treatment equipment according to claim 1, characterized in that: The first separation tank or the third separation tank is provided with a filter screen and a slag discharge port, wherein the filter screen is used to filter and separate the dirt insoluble in the hydrocarbon cleaning agent and discharge it from the slag discharge port.

3. The material surface treatment equipment according to claim 1, characterized in that: It also includes a refrigeration cycle system, which includes a compressor and a refrigerant condenser and a refrigerant evaporator connected to the compressor; the hydrocarbon cleaning agent condensing device is connected to the refrigerant evaporator of the refrigeration cycle system to send the cold air generated when the refrigerant evaporator of the refrigeration cycle system evaporates into the hydrocarbon cleaning agent condensing device to assist in the condensation of the hydrocarbon cleaning agent; the hydrocarbon cleaning agent evaporating device is connected to the refrigerant condenser of the refrigeration cycle system to send the hot air discharged when the refrigerant condenser of the refrigeration cycle system condenses into the hydrocarbon cleaning agent evaporating device to assist in the evaporation of the hydrocarbon cleaning agent; thereby, the heat generated by the compressor is recycled and utilized by the hydrocarbon cleaning agent evaporating device.

4. The material surface treatment equipment according to claim 3, characterized in that: The tank body of the ultrasonic cleaning tank adopts a jacket, water is placed in the jacket, and the heat generated by the compressor is used to heat the jacket.

5. The material surface treatment equipment according to claim 1, characterized in that: The ultrasonic cleaning device and the vacuum drying device are connected to the hydrocarbon cleaning agent condensing device, and the hydrocarbon cleaning agent evaporated in the ultrasonic cleaning tank and the hydrocarbon cleaning agent discharged from the vacuum drying device are condensed and recovered by the hydrocarbon cleaning agent condensing device.

6. The material surface treatment equipment according to claim 5, characterized in that: A second separation tank is also provided between the inlet and the hydrocarbon cleaning agent condensing device for separating condensed water and hydrocarbon cleaning agent.

7. The material surface treatment equipment according to claim 1, characterized in that: The hydrocarbon cleaning agent has a flash point of more than 200° C., a boiling point of between 65° C. and 80° C., and a viscosity of less than 1000 mPa·s.

8. The material surface treatment equipment according to claim 1, characterized in that: The vacuum plasma cleaning device comprises: a sealed plasma cavity and plasma plates distributed in the sealed plasma cavity; during plasma cleaning, the vacuum degree in the sealed plasma cavity is below 30 Pa.

9. The material surface treatment equipment according to claim 8, characterized in that: During plasma cleaning, gas is introduced into the sealed plasma chamber to continuously generate plasma, the flow rate of the gas is 200-400 ml / 100 L·min, and the gas includes at least one of argon, oxygen, nitrogen, hydrogen, and carbon tetrafluoride.

10. The material surface treatment equipment according to claim 1, characterized in that: The feeding device and the discharging device are ship lock type feeding device and ship lock type discharging device, which ensure that the whole equipment is a closed system during feeding and discharging, and the volatilized hydrocarbon cleaning agent in the system does not leak.

11. A material surface treatment method using the material surface treatment equipment according to any one of claims 1 to 10, characterized in that: include: The material enters the closed material surface treatment equipment through the feeding device, and is successively cleaned by the hydrocarbon cleaning agent of the ultrasonic cleaning device, vacuum dried by the vacuum drying device, and vacuum plasma treated by the vacuum plasma cleaning device, and then discharged from the closed material surface treatment equipment through the discharging device; The ultrasonic cleaning device is connected to the first separation circulation system and is used for closed-loop regeneration of the hydrocarbon cleaning agent; the hydrocarbon cleaning agent to be regenerated flows out of the ultrasonic cleaning device, enters the first separation circulation system, and is sequentially separated, evaporated, and condensed before being circulated back to the ultrasonic cleaning device.

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