A multi-line anode circulating transmission scanning electrodeposition processing device

Abstract

The present invention discloses a multi-line anode circulation transmission scanning type electroplating processing device, comprising a mounting rod, a stirring paddle detachably fixed on the mounting rod, a linear anode and a cathode substrate, and a transmission unit and a leveling frame. The transmission unit comprises a conveyor belt, a driving wheel and a driven wheel, and the conveyor belt is tensionedly fixed on the driving wheel and the driven wheel. A stirring paddle passage hole is provided in the middle of the leveling frame, and a group of equal-length slideways that are parallel to each other and relatively installed are provided on two sides of the leveling frame. Guide blocks are provided at both ends of the mounting rod. The guide blocks and the slideways are connected by transition fit. There are more than three mounting rods, which are rotatably arranged on the conveyor belt at equal intervals and parallel to each other. The leveling frame is located directly below the transmission unit, and the cathode substrate is located directly below the leveling frame. When the device is working, there are at least three linear anodes in a charged working state (depositing metal on the cathode substrate), and the process can be carried out continuously without idle processing time, thereby greatly improving production efficiency.

Description

Technical Field

[0001] The invention belongs to the field of electrochemical processing, and in particular relates to a scanning electrochemical deposition processing device. Background Art

[0002] Linear anode scanning electrodeposition is a unique electrodeposition processing method that can achieve extremely high thickness uniformity. It realizes electrodeposition by making a reciprocating scanning motion of a linear anode close to the cathode. The electrodeposition process can be decomposed into two processes: one is the process in which a trace amount of deposited metal is gradually spread on the cathode surface as the linear anode moves; the other is the process in which the metal thin layer accumulates and stacks layer by layer as the number of scans increases. Linear anode scanning electrodeposition initially used a single linear anode (see patent application number CN201810453008.1). At this time, the metal layer on the cathode is intermittently stacked layer by layer, and a layer of metal is stacked each time the linear anode scans. Compared with the conventional electrodeposition process in which metal layers are continuously stacked layer by layer, its efficiency is obviously lower. To this end, the patent application number CN201910158272.7 discloses a scanning electrodeposition processing method and device with multi-line anodes arranged in parallel. This method increases the production efficiency to a certain extent by increasing the number of linear anodes, but it is still not ideal. The main reason is that after each scan of multiple linear anodes, a long adjustment and waiting time is required before the next scan can be started, resulting in an insignificant increase in production efficiency. Therefore, it is necessary to research and develop a more efficient linear anode near-cathode scanning electrodeposition processing device to achieve efficient electrodeposition processing of multiple linear anodes in a continuous cycle (without waiting and adjustment time). Summary of the invention

[0003] The object of the present invention is to provide a new scanning electroplating processing device, which can enable multiple linear anodes to continuously circulate and perform efficient electroplating processing.

[0004] A multi-line anode circulation transmission scanning electrodeposition processing device, comprising a mounting rod, a stirring paddle detachably fixed on the mounting rod, a linear anode and a cathode substrate, characterized in that: it also includes a transmission unit and a leveling frame; the transmission unit comprises a conveyor belt, a driving wheel and a driven wheel; the driving wheel and the driven wheel are in the shape of circular drums; the conveyor belt is tensionedly fixed on the driving wheel and the driven wheel; the middle part of the leveling frame is provided with a stirring paddle passage hole, and its two side frames are provided with a group of equal-length slide grooves parallel to each other and relatively installed; guide blocks are provided at both ends of the mounting rod; the stirring paddle is in the shape of a plane frame, and a through hole is provided in the middle part; the mounting rod is more than 3, rotatably arranged on the conveyor belt at equal intervals and parallel to each other; the guide block and the slide groove are connected by transition fit; the leveling frame is located directly below the transmission unit; the cathode substrate is located directly below the leveling frame.

[0005] The linear anode is fixed to the bottom of the stirring paddle, and its lowermost edge is flush with the bottom surface of the stirring paddle.

[0006] The bottom surface of the stirring paddle and the linear anode are both parallel to the surface of the cathode substrate.

[0007] The distance between the leveling frame and the cathode substrate is adjustable.

[0008] The guide block and the slideway are made of polytetrafluoroethylene because polytetrafluoroethylene has an extremely low sliding friction coefficient, which is conducive to the guide block passing through the slideway with low friction and resistance.

[0009] The guide block can slide along the slide groove.

[0010] The length of the chute is more than 2.5 times the distance between two adjacent mounting rods, so that there are always at least three linear anodes directly above the cathode in a charged working state (as anodes for electrodeposition).

[0011] The cross-section of the chute is rectangular.

[0012] The working principle of the present invention is that the driving wheel, the driven wheel and the conveyor belt form a conveying unit. The driving wheel rotates under the drive of the power source (not shown in the figure), and at the same time drives the driven wheel to rotate. The two drive the conveyor belt to do a circular motion together, and then drive several linear anodes fixed on the conveyor belt to rotate circularly. In the process of the linear anode following the movement of the conveyor belt, when the linear anode is carried to the bottom of the conveying unit, the guide blocks at both ends of the mounting rod fixedly connected to the linear anode gradually enter the chute, and form a transitional matching relationship with the chute and slide forward in the chute. At the same time, the linear anode is connected to the electro-deposition circuit (not shown in the figure) at the moment the guide block enters the chute. In the process of the mounting rod sliding along the chute, due to the limiting effect of the chute on the guide block, the mounting rod cannot rotate and deflect, thereby keeping the stirring paddle in a relatively static state relative to the conveyor belt. As the linear anode slides forward, the cathode area passed by the linear anode undergoes electro-deposition until the linear anode drives out of the chute and the power is cut off (the linear anode loses the anode function), and then it circulates with the conveying unit to the entrance of the chute to start the next electro-deposition process. Each linear anode entering the chute deposits metal on the cathode substrate in a similar manner and process. As described above, linear anodes continuously enter the chute and continuously leave the chute (cathode substrate), and the linear anodes are continuously cyclically connected to the electrodeposition circuit to deposit metal on the cathode substrate. Since the length of the chute is at least 2.5 times the distance between two adjacent mounting rods, there are at least 3 linear anodes in the charged working state. It can be seen that the deposition efficiency of the present invention is significantly improved compared with the prior art.

[0013] Compared with the prior art, the present invention has the following notable features and advantages: there are at least three straight anodes in a charged working state (depositing metal onto the cathode substrate), and the process can be carried out continuously without idle processing time, thus greatly improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the device of the present invention.

[0015] Figure 2 It is a schematic diagram of the installation rod of the present invention.

[0016] Figure 3 It is a schematic diagram of the cooperation between the guide block and the slide groove of the present invention.

[0017] Figure 4 It is a schematic diagram of the leveling frame of the present invention.

[0018] In the figure, 1, mounting rod; 1-1, round shaft; 1-2, guide block; 2, bridge-shaped pressing plate; 3, transmission unit; 3-1, conveyor belt; 3-2, driving wheel; 3-3, driven wheel; 4, rotating shaft; 5, stirring paddle; 5-1, mounting shaft; 5-2, through hole; 6, linear anode; 7, cathode base; 8, leveling frame; 8-1, stirring paddle passage hole; 8-2, slide groove; 8-3, pressure plate; 8-4, spring. DETAILED DESCRIPTION

[0019] The present invention is further described below in conjunction with the accompanying drawings.

[0020] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 The device of the present invention comprises a mounting rod 1, a stirring paddle 5 detachably fixed to the mounting rod 1, a linear anode 6 and a cathode substrate 7, and also comprises a transmission unit 3 and a leveling frame 8. The transmission unit 3 comprises a conveyor belt 3-1, a cylindrical driving wheel 3-1 and a cylindrical driven wheel 3-2, and the conveyor belt 3-1 is tensionedly fixed on the driving wheel 3-2 and the driven wheel 3-3. A stirring paddle passage hole 8-1 is provided in the middle of the leveling frame 8, and a group of polytetrafluoroethylene slide grooves 8-2 of equal length parallel to each other and installed oppositely are provided on its two sides. The cross-sectional shape of the slide groove 8-2 is rectangular, and the length is 3 times the distance between two adjacent mounting rods 1. Polytetrafluoroethylene guide blocks 1-2 are provided at both ends of the mounting rod 1. The stirring paddle 5 is in the shape of a plane frame, and a through hole 5-2 is provided in the middle thereof. The linear anode 6 is fixed to the bottom of the stirring paddle 5, and its lowermost edge is flush with the bottom surface of the stirring paddle 5.

[0021] Eight mounting rods 1 fixed with linear anodes 6 are rotatably installed on the conveyor belt 3-1 at equal intervals and parallel to each other, and the guide block 1-2 is connected with the slide groove 8-2 by transition fit. The leveling frame 8 is located directly below the conveying unit 3, and the cathode base 7 is located directly below the leveling frame 8. The bottom surface of the stirring paddle 5 and the linear anode 6 are parallel to the surface of the cathode base 7. The distance between the leveling frame 8 and the cathode base 7 is adjustable. The guide block 1-2 can slide along the slide groove 8-2.

Claims

1. A multi-line anode circulating transmission scanning electrodeposition processing device, comprising a mounting rod (1), a stirring blade (5) detachably fixed to the mounting rod (1), a linear anode (6) and a cathode substrate (7), characterized in that: It also includes a transmission unit (3) and a leveling frame (8); the transmission unit (3) includes a transmission belt (3-1), a driving wheel (3-2) and a driven wheel (3-3); the driving wheel (3-2) and the driven wheel (3-3) are in the shape of round drums; the transmission belt (3-1) is tensionedly fixed on the driving wheel (3-2) and the driven wheel (3-3); the leveling frame (8) is provided with a stirring paddle passage hole (8-1) in the middle, and a group of equal-length slide grooves (8-2) are provided on two sides thereof and are parallel to each other and relatively installed; guide blocks are provided at both ends of the installation rod (1). (1-2); the stirring paddle (5) is in the shape of a plane frame, with a through hole (5-2) in the middle thereof; the number of the mounting rods (1) is more than three, which are rotatably mounted on the conveyor belt (3-1) at equal intervals and parallel to each other; the guide block (1-2) and the slide groove (8-2) are connected by transition fit; the leveling frame (8) is located directly below the conveying unit (3); the cathode base (7) is located directly below the leveling frame (8); the linear anode (6) is fixed to the bottom of the stirring paddle (5), and its lowermost edge is flush with the bottom surface of the stirring paddle (5); The guide block (1-2) can slide along the slide groove (8-2); When the linear anode follows the conveyor belt, after the linear anode is carried to the bottom of the conveying unit, the guide blocks at both ends of the mounting rod fixedly connected to the linear anode gradually enter the slide groove, and form a transition fit relationship with the slide groove and slide forward in the slide groove; At the same time, the linear anode is connected to the electrodeposition circuit the moment the guide block enters the chute; As the linear anode slides forward, electrodeposition occurs in the cathode regions that the linear anode passes through until the linear anode drives out of the chute and the power is cut off.

2. A multi-line anode circulating transmission scanning electrodeposition processing device according to claim 1, characterized in that: The bottom surface of the stirring paddle (5) and the linear anode (6) are both parallel to the surface of the cathode substrate (7).

3. The multi-line anode circulating transmission scanning electrodeposition processing device according to claim 1, characterized in that: The distance between the leveling frame (8) and the cathode base (7) is adjustable.

4. The multi-line anode circulating transmission scanning electrodeposition processing device according to claim 1, characterized in that: The guide block (1-2) and the slide groove (8-2) are both made of polytetrafluoroethylene.

5. The multi-line anode circulating transmission scanning electrodeposition processing device according to claim 1, characterized in that: The length of the slide groove (8-2) is more than 2.5 times the distance between two adjacent mounting rods (1).

6. The multi-line anode circulating transmission scanning electrodeposition processing device according to claim 1, characterized in that: The cross-sectional shape of the slide groove (8-2) is a rectangle.

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