A silicon wafer detection device structure

Abstract

The present invention relates to a silicon wafer detection device structure, including an execution drive device, the execution drive device is vertically arranged, the moving end of the execution drive device is connected to the upper end of the vertical plate, the lower end of the vertical plate is connected to the bottom plate, a mounting boss is arranged in the middle of the bottom plate, a rotating sleeve is rotatably installed in the mounting boss, a first cover plate and a second cover plate are arranged at the upper and lower ends of the mounting boss respectively, a rotating shaft is rotatably installed in the rotating sleeve, a fixed ring and an origin triggering piece are installed on the upper part of the rotating sleeve, a second limiting rod is installed on the side of the fixed ring, a first limiting rod is arranged on the top of the first cover plate, the first limiting rod is connected to one end of a spring, the other end of the spring is connected to the origin triggering piece, the lower end of the rotating shaft is fixedly connected to a swing arm, a roller is installed at the lower part of the swing arm, a magnet is installed on the bottom plate, and an origin position detection switch is arranged on the side of the mounting boss. The present invention has the characteristics of simple structure, small space occupation, easy processing and assembly, convenient and flexible use, and saving about 60% of liquid usage.

Description

Technical Field

[0001] The invention belongs to the technical field of solar silicon wafer production and relates to a silicon wafer detection device structure. Background Art

[0002] In the prior art, the position of the silicon chip is located by optical signals. This method has high requirements on the transparency of the liquid. When the liquid is turbid, the optical signal cannot be received. This leads to increased frequency of liquid replacement and increased costs. Summary of the invention

[0003] The object of the present invention is to provide a silicon wafer detection device structure which can solve the problem of difficulty in positioning silicon wafers and reduce production costs.

[0004] According to the technical solution provided by the present invention: a silicon wafer detection device structure comprises an execution drive device, the execution drive device is vertically arranged, the moving end of the execution drive device is connected to the upper end of the vertical plate, the lower end of the vertical plate is connected to the bottom plate, the middle part of the bottom plate is provided with a mounting boss, a rotating sleeve is rotatably installed in the mounting boss, the upper and lower ends of the mounting boss are respectively provided with a first cover plate and a second cover plate, the first cover plate and the second cover plate are respectively connected to the upper and lower ends of the rotating sleeve, a rotating shaft is rotatably installed in the rotating sleeve, the upper and lower parts of the rotating shaft both extend out of the rotating sleeve, a fixing ring and an origin triggering piece are installed on the upper part of the rotating sleeve, a second limiting rod is installed on the side of the fixing ring, a first limiting rod is arranged on the top of the first cover plate, the first limiting rod is connected to one end of a spring, and the other end of the spring is connected to the origin triggering piece, the lower end of the rotating shaft is fixedly connected to a swing arm, a roller is installed at the lower part of the swing arm, a suction plate is installed under the first cover plate, a magnet is installed on the bottom plate, and an origin position detection switch is provided on the side of the mounting boss.

[0005] As a further improvement of the present invention, a limit position trigger piece is provided below the origin trigger piece, and a limit position detection switch is provided below the origin position detection switch.

[0006] As a further improvement of the present invention, a handle is connected below the second cover plate.

[0007] As a further improvement of the present invention, the first cover plate and the second cover plate are respectively connected to the upper and lower ends of the rotating sleeve by bolts.

[0008] As a further improvement of the present invention, the rotating shaft is rotatably mounted in the rotating sleeve via a bearing.

[0009] As a further improvement of the present invention, the execution drive device is a cylinder.

[0010] As a further improvement of the present invention, the origin position detection switch is an origin position photoelectric switch, and the limit position detection switch is a limit position photoelectric switch.

[0011] As a further improvement of the present invention, a buffer wheel is installed on the outer periphery of the roller.

[0012] The positive and progressive effects of the present invention are:

[0013] The invention has the characteristics of simple structure, small space occupation, easy processing and assembly, convenient and flexible use, and saving about 60% of liquid usage. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is an axonometric view of the present invention.

[0015] Figure 2 It is a front view of the present invention.

[0016] Figure 3 for Figure 2 Sectional view in . DETAILED DESCRIPTION

[0017] The specific implementation of the present invention will be further described below in conjunction with the accompanying drawings.

[0018] Figure 1-3 The invention comprises 1-roller, 2-buffer wheel, 3-swing arm, 4-handle, 5-magnet, 6-suction plate, 7-first cover plate, 8-first limit rod, 9-second limit rod, 10-spring, 11-cylinder, 12-fixing ring, 13-origin trigger plate, 14-limit position trigger plate, 15-origin position photoelectric switch, 16-limit position photoelectric switch, 17-bottom plate, 18-rotating sleeve, 19-rotating shaft, 20-second cover plate, 21-bearing, 22-vertical plate, 23-magnet bracket and the like.

[0019] like Figure 1-3 As shown, the present invention is a structure of a silicon wafer detection device, including an execution drive device, the execution drive device is vertically arranged, the moving end of the execution drive device is connected to the upper end of the vertical plate 22, the lower end of the vertical plate 22 is connected to the bottom plate 17, the middle of the bottom plate 17 is provided with a mounting boss, the rotating sleeve 18 is rotatably installed in the mounting boss, the upper and lower ends of the mounting boss are respectively provided with a first cover plate 7 and a second cover plate 20, the first cover plate 7 and the second cover plate 20 are respectively connected to the upper and lower ends of the rotating sleeve 18 by bolts, the rotating shaft 19 is rotatably installed in the rotating sleeve 18 through a bearing 21, the upper and lower parts of the rotating shaft 19 are extended out of the rotating sleeve 18, the upper part of the rotating sleeve 18 is installed with a fixed ring 12 and an origin trigger plate 13, and the side of the fixed ring 12 is horizontally installed with a second limit rod 9. The first limit rod 8 is vertically arranged on the top of the first cover plate 7, the first limit rod 8 is connected to one end of the spring 10, and the other end of the spring 10 is connected to the origin trigger plate 13. The lower end of the rotating shaft 19 is fixedly connected to the swing arm 3, and the roller 1 is installed at the lower part of the swing arm 3. A suction plate 6 is installed below the first cover plate 7 , and a magnet 5 is installed on the bottom plate 17 .

[0020] An origin detection switch is provided on the side of the mounting boss.

[0021] In this embodiment, the execution driving device is a cylinder 11 , the limit position detection switch is a limit position photoelectric switch 16 , and the origin position detection switch is an origin position photoelectric switch 15 .

[0022] In order to enable the structure to sound an alarm in the event of failure, a limit position triggering piece 14 is provided below the origin triggering piece 13, and a limit position detection switch is provided below the origin position detection switch.

[0023] In order to facilitate maintenance of the structure, a handle 4 is connected below the second cover plate 20 .

[0024] In order to reduce the wear of the silicon wafer during the detection process, a buffer wheel 2 is installed on the periphery of the roller 1.

[0025] In the second embodiment of the present invention, the suction plate 6 may also be installed under the second cover plate 20 .

[0026] The working process of the present invention is as follows:

[0027] Under normal circumstances, the magnet 5 attracts the suction plate 6, thereby fixing the first cover plate 7, the rotating sleeve 18, and the second cover plate 20. When the silicon wafer contacts the buffer wheel 2 during the forward movement, it drives the swing arm 3 to swing clockwise, and the swing arm 3 drives the rotating shaft 19 and the origin trigger plate 13 to rotate clockwise at the same time. When the origin trigger plate 13 blocks the origin position photoelectric switch 15, the photoelectric signal is fed back to the PLC to notify the cylinder 11 to lift and separate the detection mechanism from the silicon wafer. The origin trigger plate 13 rotates counterclockwise under the contraction of the spring 10 until the second limit rod 9 presses against the first limit rod 8, and the swing arm 3 is reset.

[0028] As shown in the figure: if the origin position photoelectric switch 15 is damaged, the swing arm 3 continues to swing clockwise, and when the limit position trigger sheet 14 blocks the limit position photoelectric switch 16, the machine alarms and stops.

[0029] When maintenance is needed, manually pull 4 to drive the rotating sleeve 18, the first cover plate 7, and the suction plate 6 to rotate counterclockwise to disengage the magnet 5.

[0030] The above description is not a limitation of the present invention, and the present invention is not limited to the above examples. Changes, modifications, additions and substitutions made by technicians in this technical field within the essential scope of the present invention should also fall within the protection scope of the present invention.

Claims

1. A silicon wafer detection device structure, characterized in that: The structure comprises an execution drive device, the execution drive device is vertically arranged, the moving end of the execution drive device is connected to the upper end of the vertical plate (22), the lower end of the vertical plate (22) is connected to the bottom plate (17), the middle part of the bottom plate (17) is provided with a mounting boss, a rotating sleeve (18) is rotatably mounted in the mounting boss, the upper and lower ends of the mounting boss are respectively provided with a first cover plate (7) and a second cover plate (20), the first cover plate (7) and the second cover plate (20) are respectively connected to the upper and lower ends of the rotating sleeve (18), a rotating shaft (19) is rotatably mounted in the rotating sleeve (18), and the upper and lower parts of the rotating shaft (19) both extend out of the rotating sleeve (18) ), a fixing ring (12) and an origin triggering piece (13) are installed on the upper part of the rotating sleeve (18), a second limiting rod (9) is installed on the side of the fixing ring (12), a first limiting rod (8) is arranged on the top of the first cover plate (7), the first limiting rod (8) is connected to one end of a spring (10), and the other end of the spring (10) is connected to the origin triggering piece (13), the lower end of the rotating shaft (19) is fixedly connected to the swing arm (3), a roller (1) is installed on the lower part of the swing arm (3), a suction plate (6) is installed under the first cover plate (7), a magnet (5) is installed on the bottom plate (17), and an origin position detection switch is arranged on the side of the mounting boss.

2. The silicon wafer inspection device structure according to claim 1, characterized in that: A limit position triggering piece (14) is provided below the origin triggering piece (13), and a limit position detection switch is provided below the origin position detection switch.

3. The silicon wafer inspection device structure according to claim 1, characterized in that: The lower side of the second cover plate (20) is connected to a handle (4).

4. The silicon wafer inspection device structure according to claim 1, characterized in that: The first cover plate (7) and the second cover plate (20) are respectively connected to the upper and lower ends of the rotating sleeve (18) by bolts.

5. The silicon wafer inspection device structure according to claim 1, characterized in that: The rotating shaft (19) is rotatably mounted in the rotating sleeve (18) via a bearing (21).

6. The silicon wafer inspection device structure according to claim 1, characterized in that: The execution drive device is a cylinder (11).

7. The silicon wafer inspection device structure according to claim 2, characterized in that: The origin position detection switch is an origin position photoelectric switch (15), and the limit position detection switch is a limit position photoelectric switch (16).

8. The silicon wafer inspection device structure according to claim 1, characterized in that: A buffer wheel (2) is mounted on the outer periphery of the roller (1).

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