Electrospark micro-hole machining device and electrospark micro-hole machining method

Abstract

The present invention relates to an electrospark micro-hole machining device and an electrospark micro-hole machining method. The electrospark micro-hole machining device includes a shell, a ceramic nozzle and a workpiece fixing part. The shell is provided with a cavity, and the cavity is used to carry an electrode wire; the shell is also provided with a vent hole, which is connected to the cavity, and the vent hole is used to introduce gas into the cavity; the ceramic nozzle is connected to one end of the shell, and the ceramic nozzle and the shell are coaxially arranged, and the opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through; the workpiece fixing part is used to fix the workpiece, so that the plane where the bottom of the workpiece is located is perpendicular to the axial direction of the shell and the ceramic nozzle. The electrospark micro-hole machining device can control the dimensional accuracy of the workpiece electrode and reduce the verticality error between the electrode wire and the workpiece plane.

Description

Technical Field

[0001] The invention relates to the field of micro-hole machining, in particular to an electric spark micro-hole machining device and an electric spark micro-hole machining method. Background Art

[0002] As product parts develop towards precision and miniaturization, micropores (aperture < 0.1mm) are widely developed in aerospace, precision instruments and automobile manufacturing with their unique functional structures, such as damping sleeves in the air duct of high-pressure compressors of aircraft engines, front shaft damping cylinders and rear shaft damping rings of high-pressure turbines, electron microscope light bars, chemical fiber spinnerets and automobile engine fuel injectors. As an important part of micro-machining, micro-EDM technology with non-contact, no obvious macroscopic force and softness over hardness processing characteristics is widely used in micro-hole processing of difficult-to-process materials, solving processing problems that are difficult or even impossible to solve with traditional processing methods, and playing an irreplaceable role in some high-end manufacturing fields.

[0003] The production methods of micro-tool electrodes are divided into offline production and online production. Offline production mainly includes traditional methods such as turning and grinding, which are suitable for mass production, but there is a problem of micro-electrode deflection caused by secondary clamping. The production of micro-tool electrodes directly affects the shape accuracy and size accuracy of micro-holes. In order to avoid the error of secondary clamping, online production is often used. At present, the commonly used online production methods of micro-tool electrodes are block electrode reverse handcuffing method and wire electrode electric spark grinding method.

[0004] The block electrode reverse handcuffing method is a traditional method for making online electrodes. The processing process is line contact discharge, and the processing efficiency is high. However, due to the inevitable verticality errors between the work table and the block electrode working surface, the flatness errors of the block electrode working surface, and the errors in the electric field force and fluid dynamics, the processing accuracy is difficult to guarantee.

[0005] Wire electrode EDM grinding is to continuously erode the excess part of the tool electrode through point discharge between a very small diameter electrode wire and the tool electrode, so as to process various fine and special-shaped tool electrodes. The biggest advantage of this method is that the electrode wire is in motion during the processing, which can continuously compensate for its own loss, so that the electrode wire involved in the grinding process can achieve "zero loss", so it is easier to control the dimensional accuracy of the fine tool electrode, but there is still a problem of verticality error between the electrode wire and the workpiece plane during the processing. Summary of the invention

[0006] Based on this, it is necessary to provide an electrospark micro-hole machining device that can control the dimensional accuracy of the workpiece and reduce the verticality error between the electrode wire and the workpiece plane.

[0007] In addition, it is necessary to provide an electrospark micro-hole machining method.

[0008] An electrospark micro-hole machining device comprises: a housing, a ceramic nozzle and a workpiece fixing member;

[0009] The shell is provided with a cavity, and the cavity is used to carry the electrode wire; the shell is also provided with a vent hole, and the vent hole is connected with the cavity, and the vent hole is used to pass gas into the cavity;

[0010] The ceramic nozzle is connected to one end of the shell, and the ceramic nozzle is coaxially arranged with the shell. The opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through;

[0011] The workpiece fixing piece is used to fix the workpiece so that the plane where the bottom of the workpiece is located is arranged perpendicular to the axial direction of the shell and the ceramic nozzle.

[0012] In one of the embodiments, it also includes an electrode wire clamp, which passes through the shell along the side of the shell and is fixed on the shell, and the portion of the electrode wire clamp in the cavity of the shell is provided with a receiving hole, the diameter of the receiving hole is smaller than the diameter of the cavity, the receiving hole is coaxially arranged with the cavity, and the receiving hole enables the electrode wire to pass through.

[0013] In one of the embodiments, the electrode wire clamp is fixed on a side of the shell close to the ceramic mouth.

[0014] In one of the embodiments, the workpiece fixing member is provided with two fixing screws, and the two fixing screws fix the workpiece in directions perpendicular to each other.

[0015] In one of the embodiments, an XY platform is further included, and the two fixing screws fix the workpiece along the X-axis and Y-axis of the XY platform respectively.

[0016] In one embodiment, a microscope is further included, and the microscope is used to observe the moving position of the workpiece fixing member, so that the workpiece fixing member can move the workpiece to the axially colinear position of the to-be-processed hole of the workpiece and the shell and the ceramic nozzle during the processing.

[0017] In one of the embodiments, a ceramic nozzle fixing valve is further included, and the ceramic nozzle fixing valve is used to fix the ceramic nozzle on the shell.

[0018] In one embodiment, the ceramic nozzle fixing valve is a screw, and corresponding threaded holes are provided on the shell and the side wall of the ceramic nozzle.

[0019] In one of the embodiments, a clamp is further included, and the clamp is capable of fixing the shell so that the axial direction of the shell is perpendicular to the plane where the bottom of the workpiece is located.

[0020] In one of the embodiments, the vent hole is arranged on a side of the shell, and the vent hole is arranged on a side of the shell away from the ceramic mouth.

[0021] An electrospark micro-hole machining method comprises the following steps:

[0022] Providing a shell, wherein the shell is provided with a cavity, and the shell is also provided with a vent hole, wherein the vent hole is communicated with the cavity;

[0023] Connect one end of the shell to the ceramic nozzle, so that the cavity of the shell is coaxial with the ceramic nozzle, and the opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through;

[0024] Passing a constant flow of gas into the cavity through the vent hole;

[0025] Clamping the workpiece with a workpiece fixture;

[0026] The plane where the bottom of the workpiece is located is arranged perpendicular to the axial direction of the shell and the ceramic nozzle;

[0027] Inserting the electrode wire into the cavity and passing it out from one end of the ceramic nozzle; and

[0028] The workpiece is processed by using the electrode wire.

[0029] In one embodiment, the gas is argon or air.

[0030] In one embodiment, the flow rate of the gas is 0.02m 3 / min~0.1m 3 / min.

[0031] In one of the embodiments, after the step of setting the plane where the bottom of the workpiece is located perpendicular to the axial direction of the shell and the ceramic nozzle, the step further includes: observing the moving position of the workpiece fixing device through a microscope so that the workpiece fixing device moves the workpiece so that the hole to be processed in the workpiece is set in line with the axial direction of the shell and the ceramic nozzle.

[0032] In one of the embodiments, in the step of passing the electrode wire into the cavity and out from one end of the ceramic mouth, the electrode wire also passes through the receiving hole of the electrode wire clamp, the electrode wire clamp passes through the shell along the side of the shell and is fixed on the shell, the receiving hole of the electrode wire clamp is coaxially arranged with the cavity, and the diameter is smaller than the diameter of the cavity.

[0033] The above-mentioned electrospark micro-hole machining device includes a shell, a ceramic nozzle and a workpiece fixing part. By arranging an air vent on the shell, a constant flow of gas can be introduced into the cavity through the air vent, so as to avoid the deflection or displacement of the electrode wire caused by the instability of the airflow and the force during the machining process. At the same time, a ceramic nozzle is arranged at one end of the shell, and the size of the ceramic nozzle becomes smaller in the direction away from the shell, so that the electrode wire can still maintain a good verticality with the plane of the workpiece when passing through the ceramic nozzle, and avoid the end of the electrode wire relative to the upper end of the electrode wire being deflected in the vertical direction with respect to the plane of the workpiece when the electrode wire passes through the shell. Therefore, the above-mentioned electrospark micro-hole machining device is a wire electrode electrospark grinding device, which has the advantage of easily controlling the dimensional accuracy of the workpiece. At the same time, compared with the traditional wire electrode electrospark grinding device, it reduces the verticality error of the electrode wire with the plane of the workpiece during the machining process, and further improves the machining accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a structural schematic diagram of an electrospark micro-hole machining device according to an embodiment;

[0035] Figure 2 for Figure 1 A cross-sectional view of the electrospark micro-hole machining device shown;

[0036] Figure 3 for Figure 1 A physical picture of the electrospark micro-hole machining device shown;

[0037] Figure 4 The present invention is a process flow chart of an electrospark micro-hole machining method according to one embodiment. DETAILED DESCRIPTION

[0038] In order to facilitate the understanding of the present invention, the present invention will be described more comprehensively below in conjunction with the specific embodiments. Preferred embodiments of the present invention are provided in the specific embodiments. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0039] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0040] In the figure, the components and their corresponding numbers are as follows: the electrospark micro-hole machining device 100 includes a shell 110, a ceramic nozzle 120, a workpiece fixing part 130, an electrode wire 20, a vent 114, a workpiece 30, an electrode wire clamp 140, a ceramic nozzle fixing valve 150, a clamp 160, and a fixing screw 132.

[0041] The principle of electrospark micro-hole machining is to remove excess metal based on the electro-corrosion phenomenon during pulsed spark discharge between the workpiece and the electrode (positive and negative electrodes) to achieve the predetermined machining requirements for the size, shape and surface quality of the parts. The main reason for electrospark erosion is that a large amount of heat is instantly generated in the channel during the electrospark discharge, reaching a very high temperature, which is enough to melt the metal material locally, gasify it and erode it away, forming a discharge pit. The electrospark machining method is achieved by the electrothermal effect during the discharge. The machinability of the material mainly depends on the conductivity and thermal properties of the material, and has almost nothing to do with the mechanical properties of the material. This breaks through the limitations of traditional machining on tools and can achieve soft tools to process hard workpieces. More importantly, since the electrode and the workpiece are not in direct contact during machining, there is no macroscopic cutting force of mechanical machining, so it is more suitable for machining low-rigidity workpieces and fine workpieces, and can obtain a fairly high precision and accuracy. In this embodiment, a high-precision electrospark micro-hole machining device is provided to achieve high-precision micro-hole machining.

[0042] For details, please also refer to Figure 1 to Figure 3 An electrospark micro-hole machining device 100 according to one embodiment includes a housing 110 , a ceramic nozzle 120 and a workpiece fixing member 130 .

[0043] The shell 110 is provided with a cavity, and the cavity is used to carry the electrode wire 20 ; the shell 110 is also provided with a vent hole 114 , which is connected to the cavity, and is used to introduce gas into the cavity.

[0044] The housing 110 is provided with a vent hole 114 , through which a constant flow of gas can be introduced into the cavity to avoid deflection of the electrode wire 20 caused by unstable airflow, force, etc. during processing.

[0045] Specifically, both ends of the housing 110 are open to allow the electrode wire 20 to pass through. In one embodiment, the vent hole 114 can coincide with one of the openings, that is, a certain amount of constant gas is introduced into the cavity through one opening of the housing 110. Preferably, the vent hole 114 coincides with the opening at the upper end of the housing 110.

[0046] In another embodiment, the vent hole 114 does not overlap with the two openings of the housing 110. The vent hole 114 is disposed on the side of the housing 110 and close to the upper end of the housing 110. The vent hole 114 is disposed on the side of the housing 110 to avoid affecting the electrode wire 20 during ventilation.

[0047] It is understood that the EDM micro-hole machining device 100 further includes a gas supply member, which can be in communication with the vent hole 114 to introduce a constant flow of gas into the cavity through the vent hole 114. In one embodiment, the gas is air or argon.

[0048] The ceramic nozzle 120 is connected to one end of the shell 110 , and the ceramic nozzle 120 and the shell 110 are coaxially arranged. The opening size of the ceramic nozzle 120 becomes smaller in the direction away from the shell 110 , and the ceramic nozzle 120 can allow the electrode wire 20 to pass through.

[0049] A ceramic nozzle 120 is arranged at one end of the shell 110, and the opening size of the ceramic nozzle 120 becomes smaller in the direction away from the shell 110, so that the electrode wire 20 can still maintain a good verticality with the plane of the workpiece 30 when passing through the ceramic nozzle 120, thereby preventing the end of the electrode wire 20 from being deflected relative to the upper end of the electrode wire 20 in the vertical direction with respect to the plane of the workpiece 30 when the electrode wire 20 passes through the shell 110.

[0050] Specifically, the EDM micro-hole machining device 100 further includes a ceramic nozzle fixing valve 150, which is used to fix the ceramic nozzle 120 on the housing 110. The ceramic nozzle fixing valve 150 can be used to fix the ceramic nozzle 120 on one hand, and can also ensure that the ceramic nozzle 120 and the housing 110 are coaxially arranged on the other hand, thereby ensuring the verticality of the ceramic nozzle 120 and the plane of the workpiece 30.

[0051] In one embodiment, the ceramic nozzle fixing valve 150 is a screw, and corresponding threaded holes are provided on the side walls of the housing 110 and the ceramic nozzle 120. It is understood that in other embodiments, the ceramic nozzle fixing valve 150 is not limited to a screw, but can also be other fixing valves commonly used in the art.

[0052] The workpiece fixing member 130 is used to fix the workpiece 30 so that the plane where the bottom of the workpiece 30 is located is perpendicular to the axial direction of the housing 110 and the ceramic nozzle 120 .

[0053] Specifically, the workpiece fixing member 130 is provided with two fixing screws 132, and the two fixing screws 132 fix the workpiece 30 in mutually perpendicular directions. The two fixing screws 132 are provided on the workpiece fixing member 130, so as to ensure that the plane where the bottom of the workpiece 30 is located is horizontal.

[0054] In one embodiment, the electrospark micro-hole machining device 100 further includes an XY platform, and two fixing screws respectively fix the workpiece 30 along the X-axis and Y-axis of the XY platform. By setting the XY platform, the plane where the bottom of the workpiece 30 is located is ensured to be horizontal.

[0055] Furthermore, the electrospark micro-hole machining device 100 further includes a microscope, which is used to observe the moving position of the workpiece fixture 130, so that the workpiece fixture 130 moves the workpiece 30 to the axial collinear arrangement of the hole to be machined of the workpiece 30 and the housing 110 and the ceramic nozzle 120 during the machining process. The precise movement of the workpiece 30 can be achieved by setting the microscope. In addition, the microscope can also be used to observe the morphology of the workpiece 30 during the machining process. In one embodiment, the microscope is set on an XY platform.

[0056] Furthermore, the above-mentioned electrospark micro-hole machining device 100 also includes an electrode wire clamp 140, which passes through the shell 110 along the side of the shell 110 and is fixed on the shell 110. The portion of the electrode wire clamp 140 in the cavity of the shell 110 is provided with a receiving hole, the diameter of the receiving hole is smaller than the diameter of the cavity, the receiving hole is coaxially arranged with the cavity, and the receiving hole can allow the electrode wire 20 to pass through. The electrode wire clamp 140 can cooperate with the ceramic nozzle 120 to further fix the electrode wire 20 within a certain range without deflection. Specifically, the electrode wire clamp 140 cooperates with the ceramic nozzle 120 to control the electrode wire 20 to deflect within 20 microns.

[0057] In one embodiment, the electrode wire clamp 140 is fixed on the side of the housing 110 close to the ceramic nozzle 120. Since the diameter of the electrode wire 20 is very small, the electrode wire 20 at the lower end will inevitably deviate to a certain extent during the process of the electrode wire 20 passing through the housing 110. By providing the electrode wire clamp 140 and the ceramic nozzle 120, the concentricity of the electrode wire 20 at the lower end and the electrode wire 20 at the upper end can be high.

[0058] In one embodiment, the electrospark micro-hole machining device 100 further includes a fixture 160, which can fix the housing 110 so that the housing 110 is vertically arranged with respect to the plane where the bottom of the workpiece 30 is located. The fixture 160 is used to fix the groove of the electrode wire 20 to ensure the verticality of the groove of the electrode wire 20 and the product platform.

[0059] Preferably, in one embodiment, the clamp 160 is a telescopic clamp 160. The clamp 160 is configured as a telescopic clamp 160 for easy placement and fixing.

[0060] It can be understood that the above-mentioned electrospark micro-hole machining device 100 may also include other components commonly used in the art, such as a power supply, and the two poles of the power supply are respectively connected to the electrode wire and the workpiece.

[0061] The above-mentioned electrospark micro-hole machining device 100 has at least the following advantages:

[0062] (1) The above-mentioned electrospark micro-hole machining device 100 includes a shell 110, a ceramic nozzle 120 and a workpiece fixing part 130. By arranging an air vent 114 on the shell 110, a constant flow of gas can be introduced into the cavity through the air vent 114, so as to avoid the deflection or displacement of the electrode wire 20 caused by the instability of the airflow and the force during the machining process. At the same time, a ceramic nozzle 120 is arranged at one end of the shell 110. The size of the ceramic nozzle 120 becomes smaller in the direction away from the shell 110, so that the electrode wire 20 can still maintain a good verticality with the plane of the workpiece 30 when passing through the ceramic nozzle 120, so as to avoid the end of the electrode wire 20 being deflected relative to the upper end of the electrode wire 20 in the vertical direction with respect to the plane of the workpiece 30 when the electrode wire 20 passes through the shell 110. Therefore, the above-mentioned EDM micro-hole machining device 100 is a wire electrode EDM grinding device, which has the advantage of easily controlling the dimensional accuracy of the workpiece 30. At the same time, compared with the traditional wire electrode EDM grinding device, it reduces the verticality error between the electrode wire 20 and the plane of the workpiece 30 during the machining process, further improving the machining accuracy.

[0063] (2) The electrospark micro-hole machining device 100 has a simple structure and is easy to apply industrially.

[0064] Specifically, see Figure 4 , an electrospark micro-hole machining method according to an embodiment of the present invention comprises the following steps:

[0065] Step S210: providing a shell, wherein the shell is provided with a cavity and a vent hole is also provided on the shell, and the vent hole is communicated with the cavity.

[0066] Specifically, both ends of the shell are open to allow the electrode wire to pass through. In one embodiment, the vent hole can coincide with one of the openings, that is, a certain amount of constant gas is introduced into the cavity through one opening of the shell. Preferably, the vent hole coincides with the opening at the upper end of the shell.

[0067] In another embodiment, the vent hole does not overlap with the two openings of the shell. The vent hole is arranged on the side of the shell and close to the upper end of the shell. The vent hole is arranged on the side of the shell to avoid affecting the electrode wire during the ventilation process.

[0068] Step S220: Connect one end of the shell to the ceramic nozzle so that the cavity of the shell is coaxial with the ceramic nozzle. The opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through.

[0069] One end of the shell is connected to the ceramic nozzle, and the size of the ceramic nozzle becomes smaller in the direction away from the shell, so that the electrode wire can still maintain a good verticality with the workpiece plane when passing through the ceramic nozzle, avoiding the end of the electrode wire from being deflected in the vertical direction with respect to the upper end of the electrode wire when passing through the shell.

[0070] Step S230: introducing a constant flow of gas into the cavity through the vent hole.

[0071] Specifically, the gas flow rate is 0.02m 3 / min~0.1m 3 / min.

[0072] In one embodiment, the gas is argon or air.

[0073] A constant flow of gas can be introduced into the cavity through the vent hole to avoid deflection of the electrode wire caused by unstable airflow, force, etc. during processing.

[0074] Step S240: clamping the workpiece with the workpiece fixing member.

[0075] Specifically, the workpiece fixing member is provided with two fixing screws, and the two fixing screws fix the workpiece in directions perpendicular to each other. The two fixing screws are arranged on the workpiece fixing member to ensure that the plane where the bottom of the workpiece is located is horizontal.

[0076] In one embodiment, two fixing screws fix the workpiece along the X-axis direction and the Y-axis direction of the XY platform respectively. By setting the XY platform, the plane where the bottom of the workpiece is located is guaranteed to be horizontal.

[0077] Step S250: The plane where the bottom of the workpiece is located is arranged perpendicular to the axial direction of the shell and the ceramic nozzle.

[0078] In one embodiment, after the step of setting the plane where the bottom of the workpiece is located perpendicular to the axial direction of the shell and the ceramic nozzle, it also includes: observing the moving position of the workpiece fixing member through a microscope, so that the workpiece fixing member moves the workpiece to make the hole to be processed of the workpiece collinear with the axial direction of the shell and the ceramic nozzle. The precise movement of the workpiece can be achieved by setting the microscope. In addition, the microscope can also be used to observe the morphology of the workpiece during the processing process.

[0079] Step S260: insert the electrode wire into the cavity and pass it out from one end of the ceramic nozzle.

[0080] In one of the embodiments, in the step of passing the electrode wire into the cavity and out from one end of the ceramic mouth, the electrode wire also passes through the receiving hole of the electrode wire clamp, the electrode wire clamp passes through the shell along the side of the shell and is fixed on the shell, and the diameter of the receiving hole of the electrode wire clamp is smaller than the diameter of the cavity, and the receiving hole is coaxially arranged with the cavity.

[0081] The electrode wire clamp can cooperate with the ceramic nozzle to further fix the electrode wire within a certain range without deflection. Specifically, the electrode wire clamp cooperates with the ceramic nozzle to control the electrode wire to deflect within 20 microns.

[0082] In one embodiment, the electrode wire clamp is fixed on one side of the shell near the ceramic nozzle. Since the diameter of the electrode wire is very small, the electrode wire at the lower end will inevitably deviate to a certain extent during the process of the electrode wire passing through the shell. By providing the electrode wire clamp and the ceramic nozzle, the concentricity of the electrode wire at the lower end and the electrode wire at the upper end can be high.

[0083] Step S270: Processing the workpiece using the electrode wire.

[0084] Specifically, in the process of machining a workpiece using an electrode wire, the electrode wire moves at a certain speed in the direction close to the workpiece so as to continuously compensate for its own loss, so that the electrode wire involved in the grinding process achieves "zero loss", thereby making it easier to control the dimensional accuracy of the workpiece. It can be understood that the method of machining a workpiece using an electrode wire can be a commonly used method in the art, and will not be described in detail here.

[0085] The above-mentioned electrospark micro-hole machining method has at least the following advantages:

[0086] (1) The above-mentioned electrospark micro-hole machining method is provided with a vent hole on the shell, and a constant flow of gas is introduced into the cavity through the vent hole to avoid the deflection or displacement of the electrode wire caused by the instability of the airflow and the force during the machining process. At the same time, a ceramic nozzle is provided at one end of the shell, and the size of the ceramic nozzle becomes smaller in the direction away from the shell, so that the electrode wire can still maintain a good verticality with the plane of the workpiece when passing through the ceramic nozzle, and avoid the end of the electrode wire relative to the upper end of the electrode wire being deflected in the vertical direction with respect to the plane of the workpiece when the electrode wire passes through the shell. Therefore, the above-mentioned electrospark micro-hole machining method is a wire electrode electrospark grinding method, which has the advantage of easy control of the dimensional accuracy of the workpiece. At the same time, compared with the traditional wire electrode electrospark grinding method, it reduces the verticality error of the electrode wire with the plane of the workpiece during the machining process, and further improves the machining accuracy.

[0087] (2) The above-mentioned electrospark micro-hole machining method is simple in process and easy to apply industrially.

[0088] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0089] The above-mentioned embodiments only express several implementation methods of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the patent of the present invention shall be subject to the attached claims.

Claims

1. An electrospark micro-hole machining device, characterized in that: include: housing, ceramic nozzle and workpiece fixture; The shell is provided with a cavity, and the cavity is used to carry the electrode wire; the shell is also provided with a vent hole, and the vent hole is connected with the cavity, and the vent hole is used to pass gas into the cavity; The ceramic nozzle is connected to one end of the shell, and the ceramic nozzle is coaxially arranged with the shell. The opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through; The workpiece fixing member is used to fix the workpiece so that the plane where the bottom of the workpiece is located is arranged perpendicular to the axial direction of the housing and the ceramic nozzle; The electrospark micro-hole machining device further comprises a gas supply component, which can be communicated with the vent hole so as to introduce a constant flow of gas into the cavity through the vent hole.

2. The electrospark micro-hole machining device according to claim 1, characterized in that: It also includes an electrode wire clamp, which passes through the shell along the side of the shell and is fixed on the shell. The part of the electrode wire clamp in the cavity of the shell is provided with a receiving hole, the diameter of the receiving hole is smaller than the diameter of the cavity, the receiving hole is coaxially arranged with the cavity, and the receiving hole enables the electrode wire to pass through.

3. The electrospark micro-hole machining device according to claim 2, characterized in that: The electrode wire clamp is fixed on one side of the shell body close to the ceramic nozzle.

4. The electrospark micro-hole machining device according to claim 1, characterized in that: The workpiece fixing member is provided with two fixing screws, and the two fixing screws fix the workpiece in directions perpendicular to each other.

5. The electrospark micro-hole machining device according to claim 4, characterized in that: It also includes an XY platform, and the two fixing screws fix the workpiece along the X-axis and Y-axis directions of the XY platform respectively.

6. The electrospark micro-hole machining device according to claim 1, characterized in that: It also includes a ceramic nozzle fixing valve, which is used to fix the ceramic nozzle on the shell.

7. The electrospark micro-hole machining device according to claim 6, characterized in that: The ceramic nozzle fixing valve is a screw, and corresponding threaded holes are provided on the shell and the side wall of the ceramic nozzle.

8. The electrospark micro-hole machining device according to claim 1, characterized in that: It also includes a clamp, which can fix the shell so that the axial direction of the shell is perpendicular to the plane where the bottom of the workpiece is located; and / or, The vent hole is arranged on the side of the shell, and the vent hole is arranged on the side of the shell away from the ceramic nozzle; and / or, It also includes a microscope for observing the moving position of the workpiece fixing member, so that the workpiece fixing member can move the workpiece to the axially colinear position of the to-be-processed hole of the workpiece and the shell and the ceramic nozzle during the processing.

9. An electrospark micro-hole machining method, characterized in that: The steps include: Providing a shell, wherein the shell is provided with a cavity, and the shell is also provided with a vent hole, wherein the vent hole is communicated with the cavity; Connect one end of the shell to the ceramic nozzle, so that the cavity of the shell is coaxial with the ceramic nozzle, and the opening size of the ceramic nozzle becomes smaller in the direction away from the shell, and the ceramic nozzle can allow the electrode wire to pass through; Passing a constant flow of gas into the cavity through the vent hole; Clamping the workpiece with a workpiece fixture; The plane where the bottom of the workpiece is located is arranged perpendicular to the axial direction of the shell and the ceramic nozzle; Inserting the electrode wire into the cavity and passing it out from one end of the ceramic nozzle; and The workpiece is processed by using the electrode wire.

10. The electrospark micro-hole machining method according to claim 9, characterized in that: The gas is argon or air; and / or, The gas flow rate is 0.02m 3 / min~0.1m 3 / min; and / or, After the step of setting the plane where the bottom of the workpiece is located perpendicular to the axial direction of the shell and the ceramic nozzle, the method further includes: observing the moving position of the workpiece fixing member through a microscope so that the workpiece fixing member moves the workpiece to make the hole to be processed of the workpiece collinear with the axial direction of the shell and the ceramic nozzle; and / or, In the step of passing the electrode wire into the cavity and out from one end of the ceramic mouth, the electrode wire also passes through the accommodating hole of the electrode wire clamp. The electrode wire clamp passes through the shell along the side of the shell and is fixed on the shell. The accommodating hole of the electrode wire clamp is coaxially arranged with the cavity and has a diameter smaller than the diameter of the cavity.

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