A device and method for adsorbing and grabbing optical parts from a sticky blue film

Abstract

The present invention discloses a device and method for adsorbing and grabbing optical parts from a sticky blue film. The device for grabbing optical parts includes a grabbing device and an adsorption device; the grabbing device includes a mounting substrate, a connecting spring, a nozzle mounting plate and a nozzle assembly; one end of the connecting spring is connected to the mounting substrate, and the other end is connected to the nozzle mounting plate; the nozzle assembly is mounted on the nozzle mounting plate; the adsorption device includes a heating module, a first vacuum pump, an ejector pin and a stroke control device; a heat-conducting column is provided at the center of the top of the heating module, and a fence is provided around it; an adsorption plate covered with air holes is provided at the top of the fence; a vacuum chamber is formed between the heating module, the fence, the heat-conducting column and the adsorption plate, and the vacuum chamber is connected to the first vacuum pump; a through stroke hole is provided on the heat-conducting column and the heating module, and the tail of the ejector pin is connected to the stroke control device and the head extends into the stroke hole. The present invention effectively improves the success rate of adsorbing and grabbing samples from a sticky blue film, and at the same time reduces the requirements for the positioning accuracy of the robot arm.

Description

Technical Field

[0001] The invention relates to a device and a method for adsorbing and grabbing optical parts from a sticky blue film, belonging to the field of preparation of optical parts. Background Art

[0002] Microelectronics, micro-optics and micro-photonics devices often use sticky blue films to carry devices during the production process. After the front-end process is completed, each micro-device needs to be removed from the blue film and enter the back-end process (such as cleaning, testing, sorting, packaging, etc.).

[0003] Removing the product from the blue film is a difficult problem in current production practice. The materials used to produce microelectronics, micro-optics, and micro-photonics are all special materials that are brittle, soft, easy to break, and easy to be scratched. In practice, the success rate of removing samples from the blue film by negative pressure adsorption alone is very low. On the one hand, during adsorption, it is necessary to increase the squeezing force of the nozzle on the sample to improve the stability of adsorption as much as possible, which can easily cause damage to the sample during the adsorption process. On the other hand, during peeling, it is easy to cause the nozzle to leak when pulling the sample from the blue film, which in turn causes the sample to fall off the nozzle, resulting in sampling failure. At the same time, under actual working conditions, the spatial positioning accuracy of the robotic arm is also limited. Excessive requirements not only lead to a substantial increase in equipment costs, but also bring serious burdens to equipment calibration, maintenance, and other production and use. Summary of the invention

[0004] The present invention provides a device and method for adsorbing and grasping optical parts from a sticky blue film, which effectively improves the success rate of adsorbing and grasping optical parts from a sticky blue film and reduces the requirements for the positioning accuracy of a mechanical arm.

[0005] In order to solve the above technical problems, the technical solutions adopted by the present invention are as follows:

[0006] A device for adsorbing and grabbing optical parts from a sticky blue film, comprising a grabbing device and an adsorption device;

[0007] The gripping device comprises a mounting base, a connecting spring, a nozzle mounting plate and a nozzle assembly; the mounting base and the nozzle mounting plate are arranged opposite to each other; the connecting spring is located between the mounting base and the nozzle mounting plate, one end of the connecting spring is connected to the mounting base, and the other end is connected to the nozzle mounting plate; a flexible nozzle is provided on the nozzle assembly, the nozzle assembly is mounted on the nozzle mounting plate, and the flexible nozzle extends from the outer side of the nozzle mounting plate, wherein the area between the mounting base and the nozzle mounting plate is inside, and the area opposite to the mounting base is outside;

[0008] The adsorption device comprises a heating module, a first vacuum pump, a pin and a stroke control device; a fence is provided along the periphery of the top of the heating module; a heat-conducting column is provided on the top of the heating module inside the fence; an adsorption plate is provided on the top of the fence outside the heat-conducting column, the adsorption plate is annular, the inner periphery of the adsorption plate is connected to the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the outer periphery of the adsorption plate is connected to the periphery of the fence, and air holes are distributed on the adsorption plate; a vacuum chamber is formed in the part between the heating module, the fence, the heat-conducting column and the adsorption plate, and the vacuum chamber is connected to the first vacuum pump through a pipeline; an axially arranged and through-going stroke hole is provided on the heat-conducting column and the heating module, the length of the pin is greater than the axial length of the stroke hole, one end of the pin is a head and the other end is a tail, the tail of the pin is connected to the stroke control device, the head of the pin extends into the stroke hole from one side of the heating module, and driven by the stroke control device, the pin moves axially along the heat-conducting column, and the head of the pin can extend from the end of the heat-conducting column.

[0009] When in use, the mounting base is connected to moving parts such as a robot arm and an automated XYZR moving stage, and usually the mounting base and the nozzle mounting plate are arranged up and down, with the flexible nozzle located at the bottom of the nozzle mounting plate.

[0010] The setting of the connecting spring on the above-mentioned grasping device is very important; the applicant has found through research that when the flexible suction nozzle works with the robot arm or the XYZ motion mechanism, it comes to the top of the target sample being operated, gradually descends and starts the negative pressure of the suction nozzle, and is ready to suck the target sample. Under normal circumstances, due to the negative pressure of the suction nozzle, a hemispherical negative pressure area will be generated near the suction nozzle. When the suction nozzle is close to the target sample, there is no need for direct contact between the suction nozzle and the sample, and the tiny part sample will be sucked by the suction nozzle; but if the target sample is adhered to the blue film, due to the relatively large viscosity of the blue film, the negative pressure of the suction nozzle is difficult to suck the part, and it is an inevitable operation for the suction nozzle to further descend until it touches the surface of the sample; however, in the production of microelectronics, micro-optics, and micro-photoelectronic devices The materials of the parts are all special materials that are brittle, soft, easy to break and easily scratched. The hard contact of the robot arm will have destructive consequences on the target sample due to the excessive impact force. In addition, under actual working conditions, the spatial positioning accuracy of the robot arm is also limited. Excessive requirements not only lead to a substantial increase in equipment costs, but also bring serious burdens on equipment calibration, maintenance and other production and use. The present application uses the setting of a connecting spring to allow the mechanical interaction force generated by the direct contact between the suction nozzle and the target sample to be more absorbed by the spring without damaging the quality of the sample surface. At the same time, the requirements for the positioning accuracy of the robot arm are reduced, and a certain Z-direction position tolerance is allowed, which will not affect the working effect of sucking the target sample.

[0011] The above-mentioned adsorption device takes the heating module as the core, and a protruding columnar heat-conducting column is provided on the heating module. The main body below the heat-conducting column is the heating area, and an annular vacuum chamber is provided around the heat-conducting column. The outer periphery of the adsorption plate is closely matched with the periphery of the enclosure, and the inner periphery of the adsorption plate is closely matched with the periphery of the heat-conducting column; the heat-conducting column and the heating module are provided with through travel holes, and the ejector pin moves along the axial direction of the heat-conducting column, and the head of the ejector pin can extend from the end of the heat-conducting column.

[0012] There is no adhesive on the lower surface of the blue film, but there is adhesive on the upper surface. The air holes on the adsorption plate are used to adsorb the lower surface of the blue film. When in use, the blue film is firmly adsorbed on the adsorption plate on the top of the vacuum chamber, with the side of the blue film with the adhesive on the top, and the optical parts are adhered to the adhesive of the blue film. After completing a series of processing steps, the optical parts are safely removed from the blue film through the device of the present application.

[0013] The heating module heats the blue film through heat-conducting columns in order to reduce the adhesion of the blue film.

[0014] The heat-conducting column and the heating module are provided with a travel hole which is arranged along the axial direction and is connected thereto, which means that both the heat-conducting column and the heating module are provided with a travel hole, and the travel holes on the heat-conducting column and the heating module are connected to each other and are arranged coaxially, and the ejector pin can move up and down in the travel hole.

[0015] The stroke control device is a device that can drive the ejector pin to move up and down. The specific structure of the stroke control device can refer to the prior art. The present application does not make any special improvements to the specific structure of the stroke control device, so it will not be described in detail.

[0016] Normally, the grabbing device is on top and the adsorption device is on the bottom. Driven by the stroke control device, the ejector pin can move along the axial direction of the heat-conducting column (up and down) and extend from the end of the heat-conducting column (the top of the heat-conducting column) to separate the optical parts bonded to the blue film from the blue film. In the process of the optical parts being gradually lifted up, the optical parts will separate from the blue film from the periphery to the center, and finally only the point where the ejector pin head contacts will remain.

[0017] During assembly, in order to facilitate mechanical installation, the nozzle assembly is first installed on the nozzle mounting plate, and then connected to the mounting base plate through a connecting spring.

[0018] The applicant has found through research that if the above-mentioned adsorption device structure is not designed, the optical parts will adhere to the blue film. Due to the elasticity of the blue film, there is also a certain uncertainty in the XY position of the optical parts, and the position uncertainty in the Z direction is very large, which brings great difficulty to subsequent operations and easily causes operation failure. The present application uses vacuum adsorption to fix the blue film on the adsorption plate, thereby achieving fixation of the optical parts in all directions of XYZ; and if only negative pressure adsorption is relied upon, the robot arm with the suction nozzle is pressed down to the surface of the optical part, which requires a large downward force, causing a stress condition in which the middle of the optical part is pressed down while the edge is pressed up by the blue film, similar to a stress condition of "bending" from the middle to the edge. Due to the brittleness and easy cracking of optical parts, such a stress condition can easily cause the operated sample to break, which will not only cause the failure of the suction operation, but also affect the yield rate. The present application only requires the robot arm with the suction nozzle to adsorb to the optical part, without the need for a large downward pressure Force, when the suction nozzle sucks the optical part, the ejector pin moves upward under the control of the stroke control device, and the head of the ejector pin extends from the top of the heat-conducting column. Under the action of the downward negative pressure adsorption force and the upward thrust of the ejector pin, the optical part gradually leaves the blue film from the periphery to the center, and finally only a small area of ​​contact with the head of the ejector pin remains. In the process of the ejector pin moving upward with the target optical part, the suction nozzle only needs to move upward synchronously with it, and at the same time, the blue film is heated by the heat-conducting column and the adhesion of the blue film is reduced. Therefore, the early peeling of the optical part of the present application is mainly completed by heating the heat-conducting column to reduce the adhesion, and at the same time, the upward thrust of the ejector pin and the downward adsorption of the adsorption plate are used to complete it. Finally, only the blue film of the size of the ejector pin head is in contact with the optical part. At this time, the suction nozzle can easily remove the optical part; and through the setting of the connecting spring, the force of the suction nozzle and the optical part can be buffered and absorbed, further reducing the damage of the parts, and at the same time reducing the requirements for the accuracy of the robot arm.

[0019] In order to further improve the stability of the grasping device, the grasping device also includes a guide rod to prevent the connection spring from shifting to the side during the expansion and contraction process. The guide rod is a hollow tubular structure. The setting of the guide rod can fix the position of the spring in the XY direction, prevent the spring from shifting to the side, and only allow displacement along the axial direction (Z direction) of the spring, thereby improving the accuracy of grasping.

[0020] The guide rod is a hollow tubular structure, which, on the one hand, facilitates the installation of other components, and on the other hand, saves materials and reduces the weight of the device.

[0021] As one of the specific implementation schemes of the guide rod, the guide rod is an axially retractable hollow tubular structure, the guide rod is located inside the connecting spring, one end of the guide rod is connected to the mounting base plate, and the other end is connected to the nozzle mounting plate. When the connecting spring is extended or retracted, the guide rod can be extended or retracted along with the spring, and at the same time, the guide rod also effectively prevents the connecting spring from deviating to the side.

[0022] The guide rod is an axially retractable structure, that is, the guide rod can be retracted along its axial direction. The specific retractable structure and principle can refer to the prior art, such as the retractable principle similar to that of a selfie stick, an antenna, a teaching pen, etc. This application has no special improvements on this, so it will not be repeated.

[0023] As another specific implementation scheme of the guide rod, the guide rod is a round tube structure, a through hole is provided on the mounting substrate, the inner diameter of the through hole is not less than the outer diameter of the guide rod, the guide rod is located inside the connecting spring, one end of the guide rod is a connecting end, and the other end is a free end, the connecting end of the guide rod is connected to the nozzle mounting plate, and the free end extends into the through hole on the mounting substrate. When the connecting spring is in a free state, the free end of the guide rod is located in the through hole on the mounting substrate, and the guide rod can slide relative to the through hole on the mounting substrate. When the spring is compressed, the guide rod can play a guiding role in the Z direction, effectively preventing the connecting spring from shifting to the side, while not affecting the compression of the spring.

[0024] In order to improve the accuracy of suction and release, the nozzle assembly includes a vacuum tube, a second vacuum pump and a flexible nozzle; the flexible nozzle is arranged on the outer side of the nozzle mounting plate, one end of the vacuum tube is connected to the flexible nozzle connecting pipe, and the other end extends from the side wall of the nozzle mounting plate; the end of the vacuum tube extending from the side wall of the nozzle mounting plate is connected to the suction pipe of the second vacuum pump through a connecting pipeline; in the direction from the flexible nozzle to the second vacuum pump, the end of the vacuum tube extending from the side wall of the nozzle mounting plate is successively provided with a pressure sensor, an exhaust pipe and a first air valve, and the exhaust pipe is provided with a second air valve; the flexible nozzle is made of rubber or silicone; the vacuum tube is made of rigid material. When in use, start the second vacuum pump, open the first air valve, and close the second air valve. When the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, and the vacuum value in the vacuum tube rises sharply instantly. The pressure sensor senses that the target optical part has been sucked, and immediately stops the downward movement of the flexible suction nozzle, which can ensure effective adsorption and avoid excessive squeezing of the optical part. When the target optical part is moved to the specified position, close the first air valve to isolate the vacuum, and open the second air valve to release the vacuum in the vacuum tube. At this time, the target optical part adsorbed on the flexible suction nozzle will automatically detach under the action of gravity because it is no longer subject to the suction force of the vacuum. It is simple, convenient, and well controllable. The above-mentioned suction nozzle assembly has the functions of self-sensing and adsorption.

[0025] The above-mentioned pressure sensor is a negative pressure sensor.

[0026] In order to improve adaptability, as one of the implementation solutions, the enclosure is cylindrical, the heat conducting column is cylindrical, and the vacuum chamber is annular.

[0027] Preferably, the heat-conducting column is arranged at the central position of the top of the heating module, and the travel hole is arranged along the axis of the heating module and the heat-conducting column.

[0028] That is, the ejector pin is arranged at the center of the heating module.

[0029] In order to improve the stability of adsorption, the air holes on the adsorption plate are distributed in an array; the head of the ejector pin is spherical, which can not only effectively lift the optical parts upward, but also reduce the contact area between the optical parts and the blue film after being lifted.

[0030] The following uses the vertical arrangement of the grasping device and the adsorption device as an example to explain the grasping method, which is based on the positional relationship shown in the accompanying drawings.

[0031] A method for adsorbing and grabbing optical parts from a sticky blue film is completed using the above-mentioned device for adsorbing and grabbing optical parts from a sticky blue film, comprising the following steps:

[0032] 1) Move the adsorption device to the bottom of the target optical component (because the target optical component is adhered to the blue film, it is of course also under the blue film), and the heat-conducting column starts to heat the blue film to increase the temperature to reduce the viscosity of the blue film and facilitate the demolding operation of the optical component. At the same time, start the first vacuum pump and use negative pressure to adsorb the blue film on the adsorption plate. At this time, the position of the optical component is fixed in all directions of XYZ. At this time, the optical component is firmly fixed in this position, which is convenient for subsequent operations;

[0033] 2) The gripping device is driven by the robot arm or the XYZ platform to move to the top of the target optical part, the flexible suction nozzle faces the target optical part, and the gripping device gradually moves downward toward the target optical part until the suction nozzle sucks the optical part;

[0034] 3) The ejector moves upward under the control of the stroke control device, and the ejector head extends from the top of the heat-conducting column. Under the action of the downward negative pressure adsorption force and the upward thrust of the ejector, the optical part gradually leaves the blue film from the periphery to the center, and finally only a small area of ​​contact with the ejector head remains (that is, only the ejector head of the optical part is still bonded to the blue film). At this time, the ejector stops moving upward; in the process of the ejector moving upward against the target optical part, the flexible suction nozzle also moves upward synchronously;

[0035] 4) The flexible suction nozzle continues to rise with the target optical part, and the target optical part leaves the blue film and is moved to the designated position; after the target optical part leaves the blue film, the first vacuum pump is turned off, and the ejector pin is moved down and reset to a position where the head is not higher than the top of the heat-conducting column, and then the suction device is moved as a whole to the next target optical part;

[0036] 5) Repeat steps 1)-4) to perform batch operations.

[0037] The target optical part is moved to the designated location and enters the next process.

[0038] In step 2), due to the presence of the spring, the robot arm or XYZ platform can complete the operation task and absorb the optical part even if the position accuracy is slightly poor during the descent process.

[0039] In step 3), due to the setting of the connecting spring, the requirement for the synchronous upward movement of the ejector pin and the flexible suction nozzle is not high, and a certain error can be allowed;

[0040] In step 3), since the viscosity of the blue film is too great, the suction force of the flexible suction nozzle itself is difficult to offset the adhesion of the blue film and remove the optical component from the blue film. On the contrary, the optical component may fall off the suction nozzle due to insufficient suction force of the flexible suction nozzle, resulting in suction failure. In order to avoid the above situation, when the flexible suction nozzle sucks the optical component and starts to withdraw and rise, the ejector pin at the center of the heating module also rises with the flexible suction nozzle at the same speed against the blue film; the action of tearing the blue film from the edge of the optical component is mainly completed by the upward push force of the ejector pin, the downward suction force of the adsorption plate on the blue film, and the interaction of the heating module increasing the temperature of the blue film and reducing the adhesion of the blue film. The flexible suction nozzle only needs to maintain the sucked state, and there is no need to provide suction to tear the blue film from the optical component.

[0041] In step 3), as the ejector pin is lifted upward, the blue film is gradually torn from the edge of the optical component, making the contact area between the optical component and the blue film smaller and smaller, until only a small area at the head of the ejector pin still has contact with the optical component. At this time, the adhesion of the blue film to the optical component is greatly reduced due to two reasons: (1) the heating module increases the temperature of the blue film, reducing the adhesion of the blue film; (2) the contact area between the blue film and the optical component is greatly reduced to only the area of ​​the ejector pin ball, which greatly reduces the adhesion of the blue film to the optical component and facilitates removal by the flexible suction nozzle.

[0042] In step 3), when only a small area of ​​the ejector pin's head is still in contact with the blue film and the optical component, only a small suction force is required to separate the optical component from the blue film. Therefore, the flexible suction nozzle is fully capable of sucking the target optical component away from the blue film, so that the target optical component is completely separated from the blue film.

[0043] When the above-mentioned nozzle assembly with self-sensing function is used,

[0044] In step 2), when the gripping device moves to the top of the target optical part, the second vacuum pump and the first air valve are turned on, and the second air valve is closed. The gripping device gradually moves toward the target optical part. When the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, and the vacuum value in the vacuum tube rises sharply instantly. The pressure sensor senses that the target optical part has been sucked, and immediately stops the downward movement of the flexible suction nozzle.

[0045] In step 4), when the target optical part is moved to the specified position, the first air valve is closed to isolate the vacuum, and the second air valve is opened to release the vacuum in the vacuum tube. At this time, the target optical part adsorbed on the flexible suction nozzle will automatically detach under the action of gravity because it is no longer affected by the vacuum suction.

[0046] This application can be combined with existing automation and other technologies to achieve automation. This application does not make any special improvements to automation and other technologies, so it will not be elaborated.

[0047] The technologies not mentioned in the present invention are all referred to the prior art.

[0048] The device for adsorbing and grabbing optical parts from a sticky blue film of the present invention effectively solves the problem of "grabbing" samples from a high-viscosity blue film, improves the success rate and reduces breakage; the setting of the connecting spring on the grabbing device makes the suction nozzle assembly as a whole have greater elasticity, which can allow the moving parts of the robot arm or XYZ module to have a larger positioning tolerance, reducing the difficulty of engineering application; combined with the improvement of the adsorption device, the suction nozzle is allowed to absorb the sample without rigid contact with the sample, avoiding damage caused by rigid contact between the suction nozzle and the sample; the sample on the blue film has a determined XYZ position, which is convenient for subsequent operation processes; the heating module Heating the blue film reduces the stickiness of the blue film and the adhesion between the sample and the blue film, which is beneficial to sample demolding. The design of the ejector pin utilizes the interaction between the ejector pin's ejection force and the suction force of the suction cup on the blue film to achieve the peeling of the blue film from the edge of the sample, greatly reducing the contact area between the blue film and the sample, thereby reducing the adhesion between the sample and the blue film. The mutual coordination of the upward movement of the ejector pin and the nozzle assembly after sucking the sample becomes feasible with the cooperation of the spring mechanism, allowing a slight difference in movement speed between the ejector pin and the nozzle assembly. For example, the rising speed of the ejector pin can be slightly higher than the rising speed of the nozzle assembly, which greatly facilitates the assembly and adjustment of the equipment during production. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is a structural schematic diagram of the grabbing device in Example 1;

[0050] Figure 2 is a schematic structural diagram of the adsorption device in Example 1;

[0051] Figure 3 is a top view of the adsorption plate in Example 1;

[0052] Figure 4 It is a schematic structural diagram of the device for adsorbing and grabbing optical parts from the sticky blue film in Example 1;

[0053] Figure 5 It is a schematic diagram of the lifting of the ejector pin of the device for adsorbing and grabbing optical parts from the sticky blue film in Example 1;

[0054] Figure 6 A schematic diagram of withdrawing the grasping device of the device for grasping the optical component from the sticky blue film by adsorption in Example 1;

[0055] Figure 7 It is a structural schematic diagram of the grabbing device in Example 2;

[0056] Figure 8 It is a structural schematic diagram of the grabbing device in Example 3;

[0057] Fig. 9 It is a structural schematic diagram of the grabbing device in Example 4;

[0058] In the figure, 101 is a mounting substrate, 1011 is a through hole, 102 is a connecting spring, 103 is a nozzle mounting plate, 104 is a nozzle assembly, 1041 is a vacuum tube, 1042 is a flexible nozzle, 1043 is a pressure sensor, 1044 is an exhaust pipe, 1045 is a first air valve, 1046 is a second air valve, 105 is a guide rod, 201 is a blue film, 202 is a target optical part, 203 is a vacuum chamber, 204 is a heating module, 2041 is a heat-conducting column, 205 is a pin, 206 is an adsorption plate, and 2061 is an air hole. DETAILED DESCRIPTION

[0059] In order to better understand the present invention, the content of the present invention is further explained below in conjunction with the embodiments, but the content of the present invention is not limited to the following embodiments.

[0060] In this application, directional words such as "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the orientation or position relationship shown in the drawings or in use, and are only for the convenience of describing this application, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on this application.

[0061] Example 1

[0062] like Figure 1-6 As shown, a device for adsorbing and grabbing optical parts from a sticky blue film comprises a grabbing device and an adsorbing device;

[0063] The gripping device comprises a mounting base, a connecting spring, a nozzle mounting plate and a nozzle assembly; the mounting base and the nozzle mounting plate are arranged opposite to each other; the connecting spring is located between the mounting base and the nozzle mounting plate, one end of the connecting spring is connected to the mounting base, and the other end is connected to the nozzle mounting plate; a flexible nozzle is provided on the nozzle assembly, the nozzle assembly is mounted on the nozzle mounting plate, and the flexible nozzle extends from the outer side of the nozzle mounting plate, wherein the area between the mounting base and the nozzle mounting plate is inside, and the area opposite to the mounting base is outside;

[0064] The adsorption device includes a heating module, a first vacuum pump, a ejector pin and a stroke control device; a fence is provided along the periphery of the top of the heating module; a heat-conducting column is provided in the center of the top of the heating module inside the fence, the fence is cylindrical, and the heat-conducting column is cylindrical; an adsorption plate is provided on the top of the fence outside the heat-conducting column, the adsorption plate is annular, the inner periphery of the adsorption plate is connected to the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the outer periphery of the adsorption plate is connected to the periphery of the fence, and the adsorption plate is provided with air holes distributed in an array; a vacuum chamber is formed between the heating module, the fence, the heat-conducting column and the adsorption plate. The vacuum chamber is in a circular shape, and is connected to the first vacuum pump through a pipeline, and negative pressure is provided by the first vacuum pump; the axis of the heat-conducting column and the heating module is provided with an axially arranged and through-going stroke hole, the length of the ejector pin is greater than the axial length of the stroke hole, one end of the ejector pin is a head, and the other end is a tail, the tail of the ejector pin is connected to the stroke control device, and the head of the ejector pin extends into the stroke hole from one side of the heating module. Driven by the stroke control device, the ejector pin moves along the axial direction of the heat-conducting column (that is, moves along the axial direction of the stroke hole), and the head of the ejector pin can extend from the end of the heat-conducting column, and the head of the ejector pin is spherical.

[0065] When in use, the mounting base is connected to moving parts such as a robotic arm and an automated XYZR moving table, and usually the mounting base and the nozzle mounting plate are arranged up and down, with the flexible nozzle located at the bottom of the nozzle mounting plate; the adsorption device is located below the grasping device.

[0066] The setting of the connecting spring on the above-mentioned grasping device is very important; the applicant has found through research that when the flexible suction nozzle works with the robot arm or the XYZ motion mechanism, it comes to the top of the target sample being operated, gradually descends and starts the negative pressure of the suction nozzle, and is ready to suck the target sample. Under normal circumstances, due to the negative pressure of the suction nozzle, a hemispherical negative pressure area will be generated near the suction nozzle. When the suction nozzle is close to the target sample, there is no need for direct contact between the suction nozzle and the sample, and the tiny part sample will be sucked by the suction nozzle; but if the target sample is adhered to the blue film, due to the relatively large viscosity of the blue film, the negative pressure of the suction nozzle is difficult to suck the part, and it is an inevitable operation for the suction nozzle to further descend until it touches the surface of the sample; however, in the production of microelectronics, micro-optics, and micro-photoelectronic devices The materials of the parts are all special materials that are brittle, soft, easy to break and easily scratched. The hard contact of the robot arm will have destructive consequences on the target sample due to the excessive impact force. In addition, under actual working conditions, the spatial positioning accuracy of the robot arm is also limited. Excessive requirements not only lead to a substantial increase in equipment costs, but also bring serious burdens on equipment calibration, maintenance and other production and use. The present application uses the setting of a connecting spring to allow the mechanical interaction force generated by the direct contact between the suction nozzle and the target sample to be more absorbed by the spring without damaging the quality of the sample surface. At the same time, the requirements for the positioning accuracy of the robot arm are reduced, and a certain Z-direction position tolerance is allowed, which will not affect the working effect of sucking the target sample.

[0067] The above-mentioned adsorption device takes the heating module as the core, and a protruding columnar heat-conducting column is provided on the heating module. The main body below the heat-conducting column is the heating area, and an annular vacuum chamber is provided around the heat-conducting column. The outer periphery of the adsorption plate is closely matched with the periphery of the enclosure, and the inner periphery of the adsorption plate is closely matched with the periphery of the heat-conducting column; the heat-conducting column and the heating module are provided with through travel holes, and the ejector pin moves along the axial direction of the heat-conducting column, and the head of the ejector pin can extend from the end of the heat-conducting column.

[0068] There is no adhesive on the lower surface of the blue film, and an adhesive is provided on the upper surface. The air holes on the adsorption plate are used to adsorb the lower surface of the blue film. When in use, the blue film is firmly adsorbed on the adsorption plate at the top of the vacuum chamber, with the side of the blue film provided with the adhesive on the top, and the optical parts are adhered to the adhesive of the blue film. After completing a series of processing procedures, the optical parts are safely removed from the blue film through the device of the present application. The heating module heats the blue film through a heat-conducting column in order to reduce the adhesion of the blue film. Driven by the stroke control device, the ejector pin can move axially along the heat-conducting column and extend from the end of the heat-conducting column to separate the optical parts bonded to the blue film from the blue film. In the process of the optical parts being gradually lifted up, the optical parts will separate from the blue film from the periphery to the center, and finally only the point where the ejector pin head contacts will remain.

[0069] During assembly, in order to facilitate mechanical installation, the nozzle assembly is first installed on the nozzle mounting plate, and then connected to the mounting base plate through a connecting spring.

[0070] In practice, if the above-mentioned adsorption device structure is not designed, the optical parts will adhere to the blue film. Due to the elasticity of the blue film, the XY position of the optical parts will also have a certain uncertainty, and the position uncertainty in the Z direction is very large, which will bring great difficulty to subsequent operations and easily cause operation failure. The present application uses vacuum adsorption to fix the blue film on the adsorption plate, thereby realizing the fixation of the optical parts in all directions of XYZ; and if only negative pressure adsorption is relied upon, the mechanical arm with the suction nozzle will be pressed down to the surface of the optical part, which requires a large downward force, causing a stress condition in which the middle of the optical part is pressed down while the edge is pressed up by the blue film, similar to a stress condition of "bending" from the middle to the edge. Due to the brittleness and easy cracking of optical parts, such a stress condition can easily cause the operated sample to break, which will not only cause the failure of the absorption operation, but also affect the yield rate. The present application only needs the mechanical arm with the suction nozzle to adsorb to the optical part, without the need for large downward pressure. After the suction nozzle sucks the optical part, the ejector pin moves upward under the control of the stroke control device, and the head of the ejector pin extends from the top of the heat-conducting column. Under the action of the downward negative pressure adsorption force and the upward thrust of the ejector pin, the optical part gradually leaves the blue film from the periphery to the center, and finally only a small area of ​​contact with the head of the ejector pin remains. In the process of the ejector pin moving upward with the target optical part, the suction nozzle only needs to move upward synchronously with it. At the same time, the blue film is heated by the heat-conducting column and the adhesion of the blue film is reduced. Therefore, the early peeling of the optical part in the present application is mainly completed by heating the heat-conducting column to reduce the adhesion, and at the same time, the upward thrust of the ejector pin and the downward adsorption of the adsorption plate are used to complete it. Finally, only the blue film the size of the ejector pin head is in contact with the optical part. At this time, the suction nozzle can easily remove the optical part; and through the setting of the connecting spring, the force of the suction nozzle and the optical part can be buffered and absorbed to further reduce part damage and reduce the requirements for the accuracy of the robot arm.

[0071] The method for adsorbing and grabbing optical parts from a sticky blue film using the above-mentioned device for adsorbing and grabbing optical parts from a sticky blue film comprises the following steps:

[0072] 1) Move the adsorption device to the bottom of the target optical component (because the target optical component is adhered to the blue film, it is of course also under the blue film), and the heat-conducting column starts to heat the blue film to increase the temperature to reduce the viscosity of the blue film and facilitate the demolding operation of the optical component. At the same time, start the first vacuum pump and use negative pressure to adsorb the blue film on the adsorption plate. At this time, the position of the optical component is fixed in all directions of XYZ. At this time, the optical component is firmly fixed in this position, which is convenient for subsequent operations;

[0073] 2) The gripping device is driven by the robot arm or the XYZ platform to move to the top of the target optical part, the flexible suction nozzle faces the target optical part, and the gripping device gradually moves downward toward the target optical part until the suction nozzle sucks the optical part;

[0074] 3) The ejector moves upward under the control of the stroke control device, and the ejector head extends from the top of the heat-conducting column. Under the action of the downward negative pressure adsorption force and the upward thrust of the ejector, the optical part gradually leaves the blue film from the periphery to the center, and finally only a small area of ​​contact with the ejector head remains. At this time, the ejector stops moving upward; in the process of the ejector moving upward against the target optical part, the flexible suction nozzle also moves upward synchronously;

[0075] 4) The flexible suction nozzle continues to rise with the target optical part, and the target optical part leaves the blue film and is moved to the designated position; after the target optical part leaves the blue film, the first vacuum pump is turned off, and the ejector pin is moved down and reset to a position where the head is not higher than the top of the heat-conducting column, and then the suction device is moved as a whole to the next target optical part;

[0076] 5) Repeat steps 1)-4) to perform batch operations.

[0077] Example 2

[0078] On the basis of Example 1, the following improvements were made: Figure 7 As shown, the gripping device also includes a guide rod to prevent the connection spring from shifting to the side during the expansion and contraction process. The guide rod is an axially retractable hollow tubular structure. The guide rod is located inside the connection spring. One end of the guide rod is connected to the mounting base plate, and the other end is connected to the nozzle mounting plate. When the connection spring is expanded and contracted, the guide rod can be expanded and contracted together with the spring. At the same time, the guide rod also effectively prevents the connection spring from shifting to the side.

[0079] Example 3

[0080] On the basis of Example 1, the following improvements were made: Figure 8 As shown, the guide rod is a round tube structure, a through hole is provided on the mounting base plate, the inner diameter of the through hole is not less than the outer diameter of the guide rod, the guide rod is located inside the connecting spring, one end of the guide rod is a connecting end, and the other end is a free end, the connecting end of the guide rod is connected to the nozzle mounting plate, and the free end extends into the through hole on the mounting base plate. When the connecting spring is in a free state, the free end of the guide rod is located in the through hole on the mounting base plate, and the guide rod can slide relative to the through hole on the mounting base plate. When the spring is compressed, the guide rod can play a guiding role to prevent the connecting spring from shifting to the side without affecting the compression of the spring.

[0081] Example 4

[0082] On the basis of embodiment 1 or 2 or 3, the following improvements are further made: Fig. 9As shown, the nozzle assembly includes a vacuum tube, a second vacuum pump and a flexible nozzle; the flexible nozzle is arranged on the outer side of the nozzle mounting plate, one end of the vacuum tube is connected to the flexible nozzle connecting tube, and the other end extends from the side wall of the nozzle mounting plate; the end of the vacuum tube extending from the side wall of the nozzle mounting plate is connected to the suction pipe of the second vacuum pump through a connecting pipeline (the vacuum pump can be directly purchased from existing equipment, and the vacuum pump is provided with a suction pipe and an exhaust pipe); in the direction from the flexible nozzle to the second vacuum pump, the end of the vacuum tube extending from the side wall of the nozzle mounting plate is provided with a pressure sensor, an exhaust pipe and a first air valve in sequence, and the exhaust pipe is provided with a second air valve; the flexible nozzle is made of rubber or silicone; the vacuum tube is made of rigid material; the pressure sensor is a negative pressure pressure sensor. The above structure senses whether the part sample is completely sucked by detecting the vacuum value on the pressure sensor, has a tactile-like performance, reduces the accuracy requirements for robot positioning, and facilitates the unmanned processing and manufacturing of optical parts.

[0083] After adopting the above-mentioned suction nozzle assembly, its operation method is different from that of Example 1 in that: in step 2), when the grasping device moves to the top of the target optical part, the second vacuum pump and the first air valve are turned on, and the second air valve is closed. The grasping device gradually moves toward the target optical part. When the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, and the vacuum value in the vacuum tube rises sharply instantly. The pressure sensor senses that the target optical part has been sucked and immediately stops the downward movement of the flexible suction nozzle. In step 4), when the target optical part is moved to the specified position, the first air valve is closed to isolate the vacuum, and the second air valve is opened to release the vacuum in the vacuum tube. At this time, the target optical part adsorbed on the flexible suction nozzle will automatically detach under the action of gravity because it is no longer subject to the suction force of the vacuum.

Claims

1. A device for picking up optical parts from a sticky blue film by suction, characterized in that: It includes a grasping device and a suction device; The gripping device comprises a mounting base, a connecting spring, a nozzle mounting plate and a nozzle assembly; the mounting base and the nozzle mounting plate are arranged opposite to each other; the connecting spring is located between the mounting base and the nozzle mounting plate, one end of the connecting spring is connected to the mounting base, and the other end is connected to the nozzle mounting plate; a flexible nozzle is provided on the nozzle assembly, the nozzle assembly is mounted on the nozzle mounting plate, and the flexible nozzle extends from the outer side of the nozzle mounting plate, wherein the area between the mounting base and the nozzle mounting plate is inside, and the area opposite to the mounting base is outside; The adsorption device comprises a heating module, a first vacuum pump, a pin and a stroke control device; a fence is provided along the periphery of the top of the heating module; a heat-conducting column is provided on the top of the heating module inside the fence; an adsorption plate is provided on the top of the fence outside the heat-conducting column, the adsorption plate is annular, the inner periphery of the adsorption plate is connected to the periphery of the top of the heat-conducting column, the top of the adsorption plate is flush with the top of the heat-conducting column, the outer periphery of the adsorption plate is connected to the periphery of the fence, and air holes are distributed on the adsorption plate; a vacuum chamber is formed in the part between the heating module, the fence, the heat-conducting column and the adsorption plate, and the vacuum chamber is connected to the first vacuum pump through a pipeline; a stroke hole arranged axially and passing through is provided on the heat-conducting column and the heating module, the length of the pin is greater than the axial length of the stroke hole, one end of the pin is a head and the other end is a tail, the tail of the pin is connected to the stroke control device, the head of the pin extends into the stroke hole from one side of the heating module, and driven by the stroke control device, the pin moves axially along the heat-conducting column, and the head of the pin can extend from the end of the heat-conducting column; The nozzle assembly includes a vacuum tube, a second vacuum pump and a flexible nozzle; the flexible nozzle is arranged on the outer side of the nozzle mounting plate, one end of the vacuum tube is connected to the flexible nozzle connecting tube, and the other end extends from the side wall of the nozzle mounting plate; the end of the vacuum tube extending from the side wall of the nozzle mounting plate is connected to the suction pipe of the second vacuum pump through a connecting pipeline; in the direction from the flexible nozzle to the second vacuum pump, the end of the vacuum tube extending from the side wall of the nozzle mounting plate is provided with a pressure sensor, an exhaust pipe and a first air valve in sequence, and the exhaust pipe is provided with a second air valve; the flexible nozzle is made of rubber or silicone; the vacuum tube is made of rigid material; The air holes on the adsorption plate are distributed in an array; the head of the ejector pin is spherical.

2. The device for picking up optical parts from an adhesive blue film by suction as claimed in claim 1, characterized in that: The grabbing device also includes a guide rod for preventing the connecting spring from deviating to the side during the expansion and contraction process, and the guide rod is a hollow tubular structure.

3. The device for picking up optical parts from an adhesive blue film by suction as claimed in claim 2, characterized in that: The guide rod is an axially retractable hollow tubular structure, the guide rod is located inside the connecting spring, one end of the guide rod is connected to the mounting base plate, and the other end is connected to the suction nozzle mounting plate.

4. The device for picking up optical parts from an adhesive blue film by suction as claimed in claim 2, characterized in that: The guide rod is a circular tube structure, and a through hole is provided on the mounting base. The inner diameter of the through hole is not less than the outer diameter of the guide rod. The guide rod is located on the inner side of the connecting spring. One end of the guide rod is the connecting end and the other end is the free end. The connecting end of the guide rod is connected to the suction nozzle mounting plate, and the free end extends into the through hole on the mounting base.

5. The device for adsorbing and grabbing optical parts from an adhesive blue film according to any one of claims 1 to 4, characterized in that: The enclosure is cylindrical, the heat-conducting column is cylindrical, and the vacuum chamber is annular.

6. The device for adsorbing and grabbing optical parts from an adhesive blue film according to any one of claims 1 to 4, characterized in that: The heat-conducting column is arranged at the central position of the top of the heating module, and the travel hole is arranged along the axis of the heating module and the heat-conducting column.

7. A method for picking up optical parts from a sticky blue film by adsorption, which is accomplished by using the device for picking up optical parts from a sticky blue film according to any one of claims 1 to 6, characterized in that: The steps include: 1) Move the adsorption device to the bottom of the target optical component. The heat-conducting column starts to heat the blue film. At the same time, the first vacuum pump is turned on to use negative pressure to adsorb the blue film onto the adsorption plate. At this time, the position of the optical component is fixed in all directions of XYZ. 2) Driven by the robotic arm or XYZ platform, the gripping device moves to the top of the target optical part, the flexible suction nozzle faces the target optical part, and the gripping device gradually moves downward toward the target optical part until the suction nozzle sucks the optical part; 3) The ejector moves upward under the control of the stroke control device, and the ejector head extends from the top of the heat-conducting column. Under the action of the downward negative pressure adsorption force and the upward thrust of the ejector, the optical part gradually leaves the blue film from the periphery to the center, and finally only the ejector head is in contact, at which point the ejector stops moving upward; in the process of the ejector moving upward against the target optical part, the flexible suction nozzle also moves upward synchronously; 4) The flexible suction nozzle continues to rise with the target optical part, and the target optical part leaves the blue film and is moved to the designated position; after the target optical part leaves the blue film, the first vacuum pump is turned off, and the ejector pin is moved down and reset to a position where the head is not higher than the top of the heat-conducting column, and then the adsorption device is moved as a whole to the next target optical part; 5) Repeat steps 1)-4) to perform batch operations.

8. The method according to claim 7, characterized in that: In step 2), when the gripping device moves to the top of the target optical part, the second vacuum pump and the first air valve are turned on, and the second air valve is closed. The gripping device gradually moves toward the target optical part. When the flexible suction nozzle completely contacts the surface of the optical part, the flexible suction nozzle is blocked, and the vacuum value in the vacuum tube rises sharply instantly. The pressure sensor senses that the target optical part has been sucked, and immediately stops the downward movement of the flexible suction nozzle. In step 4), when the target optical part is moved to the specified position, the first air valve is closed to isolate the vacuum, and the second air valve is opened to release the vacuum in the vacuum tube. At this time, the target optical part adsorbed on the flexible suction nozzle will automatically detach under the action of gravity because it is no longer subject to the suction force of the vacuum.

Images