Scrubber system with automatic pressure control venturi

Abstract

The present invention relates to a scrubber system equipped with a pressure automatic control venturi tube. The present invention provides a scrubber system as follows: the structure of the existing scrubber air inlet protection device is improved, the diameter of the lower end of the second cleaning liquid buffer (3) constituting the lower end of the air inlet protection device is enlarged, and a separate nozzle is arranged at the lower tube part so that the generated powder does not block the lower end of the air inlet protection device, and the path of the object to be processed is formed such that after the first descent along the air inlet protection device, the first ascent along the first chamber and the second chamber is made, and the second descent to the third chamber is made again, and an automatic pressure control system equipped with a venturi tube is arranged at the upper end of the third chamber to prevent the backflow of the object to be processed, and guide it to the fourth chamber with a polypropylene absorber, and discharge it to the discharge port after the second ascent in the fourth chamber.

Description

Technical Field

[0001] The present invention relates to a scrubber, and more particularly to a scrubber capable of automatically controlling the pressure of a venturi tube. Background Art

[0002] The epitaxial process (EPi Process) mainly uses Centura's EPi Process Tool. Among them, the main problem is the large amount of by-products in the form of viscous liquids. Harmful by-products are present throughout the entire area, including the chamber outlet, the fore-line between the pump and the scrubber, and the inside of the scrubber. The epitaxial process produces a large number of harmful by-products during the process, and these harmful by-products are present throughout the entire area from the back end of the process chamber to the exhaust line. The by-products are highly reactive, especially when the by-products are exposed to air with moisture or are impacted, the by-products react violently. From viscous liquids (called Honey) to fine powders, the by-products have various forms. In order to reduce condensation in the back end line of the process chamber, fore-line heating is required. Since using a honey trap to capture byproducts at the front end of the scrubber will cause safety problems during maintenance of the honey trap, this method is not recommended. For safety reasons, the byproducts should be completely reacted with SiO2 in the scrubber, and the reaction heat generated during the reaction should be absorbed by a large amount of water. The air inlet guard that allows the exhaust gas to flow into the scrubber should not be accumulated with powder. In Korean Patent No. 10-1580368 applied for and authorized by the applicant, the generation of powder is prevented by applying a cyclonic supply of cleaning liquid and a gas curtain. However, if used for a long time, the powder is accumulated near the lower guide, so compensation is required.

[0003] Furthermore, backflow should not occur between the main tool (Main Tool) on which the scrubber is installed and the scrubber, so it is best to install a blower at the rear end of the scrubber to prevent gas or particles from flowing back to the main tool side. However, there is a problem as follows: if the gas used in the main tool has the risk of causing an explosion when the blower is running, the blower cannot be installed. Summary of the invention

[0004] The object of the present invention is to provide a scrubber system that solves the problem of powder stacking on the air inlet guard during long-term use, does not cause backflow to the main tool side even without a blower, and can introduce the object to be processed along the processing path of the scrubber.

[0005] According to the stated purpose, the present invention provides a scrubber system as follows: improving the structure of the existing scrubber air inlet guard device, enlarging the diameter of the lower end of the second cleaning liquid buffer 3 constituting the lower end of the air inlet guard device, and arranging a separate nozzle on the lower tube portion so that the generated powder does not block the lower end of the air inlet guard device, and forming the path of the object to be processed to descend for the first time along the air inlet guard device, ascend for the first time along the first chamber and the second chamber, and descend for the second time to the third chamber again, and arranging an automatic pressure control system equipped with a venturi tube at the upper end of the third chamber to prevent the backflow of the object to be processed, and guide it to the fourth chamber with a polypropylene absorber, and discharge it to the discharge port after ascending for the second time in the fourth chamber.

[0006] In the above content, the first chamber, the second chamber, the third chamber and the fourth chamber are all equipped with water treatment devices to perform water treatment on the object to be treated.

[0007] In the above, the water treatment nozzle is arranged at the upper portion spaced apart from the upper end of the venturi tube to spray water toward the venturi tube.

[0008] In the above content, the first chamber is connected to the lower end of the air inlet protection device, the second chamber is arranged at the upper end of the first chamber, the third chamber is arranged at the side end of the diagonal direction of the first chamber and the second chamber, and the fourth chamber is arranged at the side end of the third chamber. A partition having an opening is provided between the first chamber and the second chamber, the second chamber and the third chamber are connected by a pipeline, and the third chamber and the fourth chamber are connected by a pipeline or separated by a partition having an opening.

[0009] In the above, the nozzle provided on the lower pipe part connected to the lower pipe of the second cleaning liquid buffer member 3 of the air intake guard is arranged to enable the liquid to cross the pipeline of the lower pipe part or to be sprayed upward or downward.

[0010] That is, the present invention provides an air inlet protection device for a scrubber, characterized in that it includes: an air inlet, allowing the object to be treated to flow into the scrubber from the inlet for introducing the object to be treated; a cleaning liquid buffer, which is combined with the air inlet and supplies cleaning liquid; and an air inlet lower pipe nozzle, which is arranged on the lower pipe part connected to the lower part of the cleaning liquid buffer or the lower end of the cleaning liquid buffer to allow the object to be treated to pass through, so as to spray liquid into the inside of the pipeline through which the object to be treated passes, wherein the cross-sectional area of ​​the cleaning liquid buffer is maintained constant or gradually expands downward.

[0011] According to the above content, an air inlet protection device for a scrubber is provided, characterized in that the air inlet is a double air inlet including a double-layer tube, and the cleaning liquid buffer comprises: a first cleaning liquid buffer, equipped with a gas inlet and a cleaning liquid inlet; a second cleaning liquid buffer, combined with the lower end of the first cleaning liquid buffer.

[0012] An automatic pressure control system is provided, which forms a negative pressure so that the to-be-treated fluid flowing in through the air inlet protection device of the scrubber flows into a chamber included in the scrubber, and is characterized in that it comprises: a venturi tube, which is arranged inside the chamber included in the scrubber; an automatic pressure control device nozzle, which is arranged above the venturi tube and at the top of the chamber, wherein the venturi tube is configured to be arranged in a tubular shape with a cross-sectional area that becomes wider as it goes downwards, and the automatic pressure control device nozzle is arranged to be separated from the upper end of the venturi tube and is arranged to be able to supply liquid to the inner diameter of the upper end of the venturi tube.

[0013] A scrubber is provided, characterized in that it comprises: an air inlet guard device for the scrubber; a first chamber connected to a lower tube portion of the air inlet guard device for the scrubber; a second chamber divided from the first chamber by a partition having an opening and adjacent to the first chamber; a third chamber connected to the second chamber through a pipeline; and a fourth chamber adjacent to the third chamber and connected through a partition having an opening or a pipeline and comprising a polypropylene absorber, wherein the third chamber comprises an automatic pressure control system for the scrubber, and a to-be-processed object passes through the air inlet guard device for the scrubber and then through the first chamber and the second chamber, flows into the third chamber and passes through the third chamber by virtue of the negative pressure formed by the automatic pressure control system for the scrubber, then flows into the fourth chamber and passes through the polypropylene absorber, and then is discharged through an outlet.

[0014] According to the above content, a scrubber is provided, characterized in that the second chamber is arranged at the upper end of the first chamber, the third chamber is arranged on one side projected along the diagonal direction relative to the space where the first chamber and the second chamber are located, one side of the fourth chamber is adjacent to the third chamber and the other side is arranged to be adjacent to the space where the first chamber and the second chamber are located, and the first chamber, the second chamber, the third chamber and the fourth chamber include nozzles for wet processing.

[0015] According to the above content, a scrubber is provided, characterized in that the object to be treated passes through the air inlet protection device and descends for the first time, ascends for the first time while passing through the second chamber from the first chamber, descends for the second time in the third chamber, and ascends for the second time in the fourth chamber.

[0016] According to the present invention, by enlarging the diameter of the lower tube of the second cleaning liquid buffer member 3 of the lower tube constituting the scrubber air inlet protection device, even if the generated powder falls, it can pass through the pipeline without pipeline blockage, and the nozzle arranged in the lower tube portion sprays liquid with a propulsion force that crosses the diameter of the lower tube portion, so that the powder is not stacked on the wall of the lower tube portion, thereby actively eliminating pipeline blockage.

[0017] Furthermore, the present invention provides an automatic pressure control system equipped with a venturi tube in such a manner that the object to be treated can flow along the internal path of the scrubber, so that the object to be treated will not flow back toward the main tool even without a blower. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic flowchart showing the schematic structure and processing flow of the present invention.

[0019] Figure 2 is a diagram showing the structure and problems of a scrubber air inlet guard according to the prior art.

[0020] Figure 3 2 is a cross-sectional view showing the overall structure of a scrubber air inlet guard according to the present invention.

[0021] Figures 4 to 6 2 is a cross-sectional view specifically showing the structure of the scrubber air inlet guard device according to the present invention.

[0022] Figure 7 2 is a diagram showing an automatic pressure control system according to the present invention.

[0023] Figure 8 It is a diagram for explaining the function of the automatic pressure control system of the present invention.

[0024] Fig. 9 It is a diagram showing a specific structure of the automatic pressure control system of the present invention.

[0025] Fig.10 It is a figure which shows the whole structure and function of the scrubber of this invention.

[0026] Description of reference numerals:

[0027] 1: Double air intake

[0028] 2: First cleaning liquid buffer

[0029] 3: Second cleaning liquid buffer

[0030] 4: Guide

[0031] 5: Down tube

[0032] 10: Inlet

[0033] 20: Export

[0034] 55: (Inlet lower pipe) nozzle

[0035] 100: Air inlet guard

[0036] 110: First Chamber

[0037] 120: Second chamber

[0038] 130: The third chamber

[0039] 140: The fourth chamber

[0040] 30: Powder

[0041] 21, 22: Gas inlet

[0042] 31, 32: Cleaning fluid inlet

[0043] 35: Gap

[0044] 13: Gap

[0045] 16: Inner tube

[0046] 15: Outer tube

[0047] 14: Flange

[0048] 11, 12, 21, 22: Gas inlet

[0049] 200: Automatic pressure control system

[0050] 210: Venturi tube

[0051] 125: Pipeline

[0052] 135: Separator

[0053] 220: (Automatic pressure control device) Nozzle

[0054] 215: Support DETAILED DESCRIPTION

[0055] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[0056] Figure 1The structure of the scrubber of the present invention is schematically shown, and it is a schematic flow chart showing the processing flow. The object to be treated, including harmful gases, particles, etc. generated by the main tool such as a semiconductor manufacturing device, flows into the air inlet guard 100 through the inlet 10 introduced into the scrubber side, and flows into the first chamber 110 of the lower pipe part connected to the lower end of the air inlet guard, and rises to the second chamber 120 arranged above the first chamber 110. The first chamber 110 and the second chamber 120 are adjacent to each other in the up and down direction by placing a partition with an opening therebetween, and the object to be treated rises through the opening. The air inlet guard 100 has a nozzle for supplying water so that the object to be treated can flow without accumulation by the flow of water, and the first chamber 110 and the second chamber 120 implement preliminary wet treatment on the object to be treated. In the first chamber, a nozzle that rises and sprays like a fountain is wet treated, and a nozzle for descending spray and a nozzle for ascending spray are provided in the second chamber, and wet treatment is performed through these nozzles.

[0057] The second chamber 120 is adjacent to the third chamber 130, and a pipe connecting the two is arranged or a partition with an opening is arranged, so that the object to be treated flows into the third chamber 130 through a pipeline or an opening. In the present embodiment, the second chamber 120 and the third chamber are connected by a pipeline. A nozzle for supplying water is arranged on the top surface of the third chamber 130, and as an automatic pressure control system 200 for strengthening the inflow of the object to be treated and preventing backflow, the venturi tube is separated from the nozzle and arranged below the nozzle. The object to be treated that descends to the bottom of the third chamber 130 through the venturi tube implements the water treatment of the intermediate step in the third chamber 130, and flows into the fourth chamber 140 adjacent to the third chamber and connected to each other through a pipeline or an opening, and the fourth chamber 140 implements the final water treatment using a polypropylene absorber (PP Absorber). The object to be treated that is finally treated is discharged to the outside of the scrubber through the outlet 20 provided in the fourth chamber 140. A plurality of nozzles for wet processing may be arranged in each of the first chamber, the second chamber, the third chamber, and the fourth chamber.

[0058] The path of the object to be processed is as follows. The object to be processed flows into the air inlet guard device 100 and descends for the first time along the air inlet guard device, and flows into the first chamber connected to the lower tube portion at the lower end of the air inlet guard device, then flows into the second chamber located above the first chamber and ascends for the first time, and then flows into the third chamber adjacent to the second chamber, then descends for the second time in the third chamber, and flows into the fourth chamber adjacent to the third chamber, thereby ascending for the second time in the fourth chamber while passing through the polypropylene absorber and being discharged through the outlet.

[0059] In this embodiment, the structure is as follows: the first chamber is located at the lower part relative to the second chamber, the third chamber is located longer at the part corresponding to the side of the first chamber and the second chamber, and the fourth chamber is arranged at the side of the third chamber with almost the same length, thereby saving space. The first chamber and the second chamber have a partition with an opening placed between them, and a pipeline connected to the upper part of the third chamber (the upper side based on the center of the third chamber) is arranged in the second chamber. This is because the third chamber is arranged at the side end projected in the diagonal direction relative to the first chamber and the second chamber. That is, the third chamber is adjacent to the space where the air inlet guard is arranged side by side, and is located in the space adjacent to the fourth chamber side by side.

[0060] Figure 2 1 is a diagram showing the structure and problems of a scrubber air inlet guard according to the prior art. It relates to the air inlet guard disclosed in Korean Patent No. 10-1580368 applied for and authorized by the present applicant, and shows that powder 30 is generated inside the guide due to moisture. If a large amount of powder is accumulated, it falls due to its own weight, and accordingly, the lower tube diameter of the second cleaning liquid buffer member constituting the lower tube of the air inlet guard gradually narrows and becomes tapered, so that a clogging phenomenon may occur in the lower tube portion.

[0061] Figure 3 is a cross-sectional view showing the overall structure of the scrubber air inlet protection device according to the present invention. Figure 3 As shown in the figure, the present invention enlarges the diameter of the lower tube and the lower tube portion of the air inlet guard. That is, if the diameter of the end of the narrowed second cleaning liquid buffer lower tube of the conventional air inlet guard is 3 inches, the present invention does not adopt a narrowing structure but retains the cylindrical profile of the second cleaning liquid buffer, so that the diameter of the end of the lower tube becomes 6 inches. The above values ​​are only exemplary values, and the diameter of the lower tube of the second cleaning liquid buffer of the air inlet guard may not be narrowed, but may be kept at the original diameter, or may be further expanded.

[0062] Figures 4 to 6 1 is a cross-sectional view specifically showing the structure of the scrubber air inlet guard 100 according to the present invention. Except for the shape of the lower pipe of the second cleaning liquid buffer and the lower pipe portion, it is the same as that disclosed in Korean Patent No. 10-1580368, and the content of the above patent will be directly introduced within the scope of overlap with the present invention.

[0063] The air inlet protection device for the scrubber is equipped with: a double air inlet 1, which is the first path for the toxic gas to flow in; a first cleaning liquid buffer 2, which is arranged below the double air inlet 1 in the form of surrounding it; and a second cleaning liquid buffer 3, which is arranged close to the lower end of the first cleaning liquid buffer 2.

[0064] Figure 4The first cleaning liquid buffer 2 is shown as the upper part of the cleaning liquid buffer. Figure 5 The second cleaning liquid buffer 3 and the guide 4 arranged below the first cleaning liquid buffer 2 are shown.

[0065] The first cleaning liquid buffer 2 relatively located at the upper part includes: a gas inlet end, provided with a pair of gas inlets 21, 22 for supplying nitrogen; and a cleaning liquid inlet end, which is formed integrally with the gas inlet end and formed at its lower end. A pair of cleaning liquid inlets 31, 32 are formed in a rotating manner at the cleaning liquid inlet end in an adjustable direction, and these cleaning liquid inlets 31, 32 are configured so that the cleaning liquid flows in and out along the tangential direction (tangential component) toward the cleaning liquid inlet end wall surface formed in a cylindrical shape or a polygonal column close to a cylindrical shape. A pair of cleaning liquid inlets 31, 32 are formed at positions facing each other, and the outlet sides of the cleaning liquid inlets 31, 32 are oriented in a manner of guiding the flow path, so that the inflow direction of the cleaning liquid flowing in through the pair of cleaning liquid inlets 31, 32 is set to be able to rotate along the wall surface to generate a vortex. The cleaning liquid can be a solution including water and mixed with chemicals as needed.

[0066] The cleaning liquid inlet 31, 32 is constructed as follows: there is an opening in the gap 35 between the outer wall surface and the inner wall surface of the cleaning liquid inlet end, and the cleaning liquid fills the gap 35 and overflows upward, thereby flowing in along the inner wall surface of the cleaning liquid inlet end. The structure of the cleaning liquid inlet 31, 32 as described above can prevent the inflowing cleaning liquid from flowing vertically at the cleaning liquid inlet end and the inner wall surface of the second cleaning liquid buffer 3 located below it, but rotates along the radial direction on the inner wall surface and flows downward. This rotational motion itself has the ability to prevent the generation of powder or remove powder, thereby preventing the air inlet from being blocked.

[0067] A pair of gas inlets 21, 22 formed at the gas inlet end arranged at the upper end of the cleaning liquid inlet end are also formed at positions facing each other. These gas inlets supply nitrogen or inert gas, and make the gas rotate and flow downward together with the cleaning liquid, thereby forming a curtain for the cleaning liquid. That is, the nitrogen or inert gas plays a role of surrounding the surface of the cleaning liquid to prevent the cleaning liquid from meeting with the toxic gas and forming powder. Therefore, the pair of gas inlets 21, 22 also preferably adopts the same opposing structure as the cleaning liquid inlets 31, 32.

[0068] The first cleaning liquid buffer 2 as described above is assembled on the second cleaning liquid buffer 3. The second cleaning liquid buffer 3 is formed into a cylindrical shape or a polygonal column close to a cylindrical shape, and its lower part is constituted as a lower tube that does not become a taper but maintains or increases the diameter, and its lower tube end is connected to the lower tube part 5 and connected to the main processing device. The connection part is equipped with a plurality of recessed parts or steps and flanges required for assembly.

[0069] like Figure 4 As shown, a double air inlet 1 is provided to more reliably prevent powder from being generated by contact between the cleaning liquid and the toxic gas.

[0070] The double air inlet 1 is constructed by using double-layered tubes 15 and 16, the central channel formed by the inner tube 16 serves as an inlet for toxic gas, and the gap 13 between the two tubes serves as a passage for gas such as nitrogen. That is, a pair of gas inlets 11 and 12 are provided on the outer tube 15 in the double-layered tube, so that nitrogen or inert gas flows in and flows through the gap 13 between the tubes. The upper end of the inner tube 16 is formed in a funnel shape and is surrounded by the inside of the outer tube 15. The gas inlets 11 and 12 are provided at the upper end of the outer tube 15, and the upper end is thicker than the lower end, so that the gap space is wider, so that it can withstand the initial inflow. In addition, in consideration of the convenience of assembly, a flange portion 14 is formed at the upper end of the outer tube 15, and the outer tube 15 is extended to the bottom of the flange portion 14. The nitrogen or inert gas flowing down the tube slit 13 acts as a mistblower to prevent the mist generated from the cleaning liquid flowing down the wall of the cleaning liquid buffer from meeting the toxic gas flowing in along the central channel and generating powder at the end of the slit 13 .

[0071] That is, when supplying cleaning liquid, the present invention causes the cleaning liquid to flow out while rotating on the wall surface of the cleaning liquid buffer, thereby preventing the generation of powder by its own movement, and supplies nitrogen or inert gas through the gas inlet 21, 22 formed in the first cleaning liquid buffer to form a curtain for the cleaning liquid, thereby preventing the generation of powder once, and then blows nitrogen or inert gas into the gap 13 between the tubes of the double air inlet 1 through which the toxic gas flows in, thereby secondarily blocking the generation of powder due to mist, thereby realizing an air inlet for the scrubber that can be used for a long time without clogging.

[0072] Furthermore, a guide may be installed to more reliably maintain the flow path of the cleaning liquid. Figure 5, a guide 4 is shown, the guide 4 is equipped with a disc-shaped plane portion having an opening in the center and a guide portion folded vertically from its outer end. The guide 4 is assembled between the outer wall surface of the outer tube 15 of the double air inlet 1 and the inner wall surface of the second cleaning liquid buffer 3 in an interference fit manner. The vertical guide portion is used to guide the flow path of the cleaning liquid so that the flow path of the cleaning liquid does not deviate from the inner wall surface of the cleaning liquid buffer, so that the generation of mist can be suppressed, and finally the generation of powder can be more completely blocked.

[0073] In the above embodiment, each gas inlet 11, 12, 21, 22 and cleaning liquid inlet 31, 32 is provided as a pair, but it can also be provided as more than one pair. In addition, the first cleaning liquid buffer and the second cleaning liquid buffer can also be formed as one body.

[0074] Figure 6 The air inlet lower tube nozzle 55 provided on the lower tube 5 of the air inlet guard device according to the present invention is shown. As described above, the lower tube 5 of the air inlet guard device is formed with almost the same diameter as the lower part of the second cleaning liquid buffer, and is equipped with a nozzle 55, and the nozzle 55 is arranged in a direction that enables the liquid to be sprayed toward the pipeline that crosses the lower tube 5. Preferably, the nozzle 55 is arranged at the part where the lower tube 5 begins to bend after extending vertically downward. This is because the problem that powder is easily accumulated on the curved inclined surface is taken into consideration. The liquid sprayed from the nozzle 55 exerts power while impacting the powder and dissolving it, so that it descends without blockage. However, the position of the air inlet lower tube nozzle 55 is not limited to this, and can be set at a position slightly upward or slightly downward with the part where the lower tube begins to bend as the center.

[0075] Furthermore, in the above content, the lower tube portion 5 connected to the second cleaning liquid buffer member 3 may also be formed as a whole with the second cleaning liquid buffer member 3. In this case, the lower tube portion 5 may be regarded as the lower portion of the second cleaning liquid buffer member 3 itself, and the nozzle 55 is provided thereon. That is, the nozzle 55 is arranged in the lower tube portion constituting the lower portion of the overall structure of the air inlet guard 100, and prevents clogging by spraying liquid.

[0076] The expansion of the lower tube without narrowing, the diameter of the lower tube portion that expands accordingly, and the configuration of the nozzle provided in the lower tube portion ensure that the scrubber is not affected by clogging with powder even when used for a long time.

[0077] The object to be treated passing through the air inlet protection device is wet-treated by multiple nozzles arranged in each chamber while passing through the first chamber and the second chamber. The liquid is mainly water, which can be pure water or a liquid with medicine added as needed, and is purified by water treatment. The object to be treated moving from the second chamber to the third chamber will pass through the pipeline connecting the second chamber and the third chamber. In order to reduce the space occupied by the scrubber and arrange the air inlet and outlet as far as possible, the third chamber is arranged at a position facing the first chamber and the second chamber in a diagonal direction, and a pipeline for introducing the object to be treated in the second chamber into the third chamber is arranged. At this time, an automatic pressure system is installed in the third chamber to guide the smooth flow of the object to be treated and prevent the backflow of the object to be treated.

[0078] Figure 7 2 is a diagram showing an automatic pressure control system according to the present invention.

[0079] The pressure of the object to be treated flowing in from the side of the air inlet guard 100 may be reduced. In this case, the inflow of the object to be treated into the third chamber 130 may be weakened, and then a backflow to the main tool may occur. The EPI and TCS processes do not have a dry pump (Dry Pump) at the front end of the scrubber, and since the main tool (Main Tool) is directly connected to the scrubber, when the main tool door is opened / closed, if the pressure of the scrubber becomes lower than the pressure of the main tool, the problem of particles existing in the main tool may occur. Therefore, the pressure of the scrubber should be maintained at a higher negative pressure (-100mmH2O) than the main tool. In addition, a blower cannot be installed at the rear end of the scrubber, so negative pressure cannot be generated by the operation of the blower. This is because the H2 gas discharged from the scrubber may cause an explosion problem due to sparks generated when the fan of the blower is operated. Accordingly, the present invention constitutes an automatic pressure control system 200 in order to generate and maintain negative pressure in the scrubber.

[0080] A pipe 125 is connected to the upper part of the partition 135 of the third chamber so that the object to be treated flows from the second chamber into the third chamber. In order to strengthen the inflow to the third chamber side by forming a negative pressure on the inflowing object to be treated, a venturi tube 210 in the shape of a tube with a downwardly increasing cross-sectional area (e.g., a conical shape) is arranged around the opening of the pipe 125. The venturi tube 210 is arranged with an end with a narrower diameter on the side of the opening of the pipe 125, and an end with a larger diameter as it goes downward. The lower end of the venturi tube is supported by a support body 215. According to the arrangement of this venturi tube, the object to be treated passing through the opening of the pipe 125 is subjected to negative pressure and descends along the strong airflow toward the inside of the venturi tube. In addition, an automatic pressure control device nozzle 220 is arranged on the top surface of the third chamber, so as to spray a liquid mixed with water or medicine into the narrow diameter opening of the venturi tube 210. Accordingly, the negative pressure increases while the object to be processed is wet treated, thereby increasing the flow rate of the object to be processed due to the Venturi effect, which again promotes the increase of the negative pressure, thereby producing a synergistic effect. This automatic pressure control system 200 becomes a pressure compensation device when the pressure on the air inlet guard side decreases, and guides the flow of the object to be processed. Figure 8 Helps understand the flow of this process and the role of automatic pressure control systems.

[0081] Fig. 9 It is a diagram showing a specific structure of the automatic pressure control system of the present invention.

[0082] The specific shapes of the nozzle 220 and the conical venturi tube 210 are shown in detail. The diameter of the nozzle disposed at the top of the third chamber is configured to be smaller than the small side diameter of the venturi tube. Liquid is supplied at the nozzle 220 at an appropriate water pressure.

[0083] Fig.10 It is a figure which shows the whole structure and function of the scrubber of this invention.

[0084] The object to be processed that flows into the air inlet guard through the inlet is first descended through the air inlet guard and first ascended through the first chamber and the second chamber. The object to be processed that is preliminarily wet-treated by the plurality of nozzles in the first chamber and the second chamber and flows into the third chamber by the negative pressure from the automatic pressure control device of the third chamber is second descended in the third chamber, flows into the fourth chamber provided with the PP absorber, passes through the PP absorber and is second ascended, and is then discharged through the outlet.

[0085] As described above, it is possible to realize a scrubber which does not clog the air inlet guard even if used for a long time and can smoothly process objects to be processed even without a separate blower.

[0086] In addition, the specific numerical values ​​proposed in the above-mentioned embodiments are exemplary and can be deformed as needed, and it can be understood by those skilled in the art that the present invention can also be implemented in other specific forms without changing its technical ideas or essential features. Therefore, it should be understood that the above-mentioned embodiments are exemplary and not restrictive in all aspects. The scope of the present invention is not limited by the above-mentioned detailed description, but by the scope of the claims, and all changes or deformed forms derived from the meaning and scope of the scope of the claims and their equivalent concepts should be interpreted as included in the scope of the present invention.

Claims

1. A scrubber, characterized in that: include: An air inlet protection device for a scrubber, comprising an air inlet, a cleaning liquid buffer, and a nozzle of a lower pipe portion of the air inlet, wherein the air inlet allows an object to be treated to flow into the scrubber from an inlet for introducing the object to be treated, the cleaning liquid buffer is combined with the air inlet and supplies cleaning liquid, and the nozzle of the lower pipe portion of the air inlet is arranged on a lower pipe portion connected to a lower portion of the cleaning liquid buffer or a lower end of the cleaning liquid buffer so that the object to be treated passes through, so as to spray liquid into the interior of a pipeline through which the object to be treated passes; a first chamber connected to a lower tube portion of the scrubber air inlet guard; A second chamber is divided from the first chamber by a partition having an opening and is adjacent to the first chamber; a third chamber connected to the second chamber through a pipeline; and a fourth chamber, adjacent to the third chamber and connected to the third chamber via a partition or a pipe having an opening, and comprising a polypropylene absorber, The third chamber includes an automatic pressure control system for a scrubber that forms a negative pressure so that the to-be-treated gas flowing in through the scrubber air inlet protection device flows into the chamber included in the scrubber. The nozzle of the lower tube part of the air inlet is arranged at the position where the curved part starts after the lower tube part extends downward, and liquid is sprayed from the nozzle of the lower tube part of the air inlet for the powder accumulated on the curved inclined surface so that the liquid impacts the powder and dissolves it, thereby applying power to the powder to make it descend without blockage. The cross-sectional area of ​​the cleaning liquid buffer is maintained constant or gradually expands downward. The automatic pressure control system for the scrubber comprises: a venturi tube disposed within a chamber included in the scrubber; The automatic pressure control device has a nozzle arranged above the venturi tube and at the top of the chamber, The venturi tubes are arranged in a tubular shape with a cross-sectional area gradually widening downward. The nozzle of the automatic pressure control device is arranged spaced apart from the upper end of the venturi tube and arranged to be able to supply liquid to the inner diameter of the upper end of the venturi tube, The object to be treated passes through the air inlet protection device for the scrubber, then passes through the first chamber and the second chamber, flows into the third chamber and passes through the third chamber by the negative pressure formed by the automatic pressure control system for the scrubber, then flows into the fourth chamber and passes through the polypropylene absorber for final water treatment, and then is discharged through the outlet. The object to be processed passes through the air inlet protection device and performs a first descent, performs a first ascent while passing from the first chamber through the second chamber, performs a second descent in the third chamber, and performs a second ascent in the fourth chamber. A pipeline for allowing the object to be processed to flow from the second chamber into the third chamber is provided on the upper portion of the partition of the third chamber, and the venturi tube is arranged around the opening of the pipeline.

2. The scrubber according to claim 1, characterized in that The second chamber is arranged at the upper end of the first chamber, the third chamber is arranged on one side projected along the diagonal direction relative to the space where the first chamber and the second chamber are located, one side of the fourth chamber is adjacent to the third chamber and the other side is arranged to be adjacent to the space where the first chamber and the second chamber are located, and the first chamber, the second chamber, the third chamber and the fourth chamber include nozzles for wet processing.

3. The scrubber according to claim 1, characterized in that The air inlet is a double air inlet formed by a double-layer tube. The cleaning liquid buffer comprises: a first cleaning liquid buffer, equipped with a gas inlet and a cleaning liquid inlet; a second cleaning liquid buffer, connected to the lower end of the first cleaning liquid buffer, The lower tube portion connected to the second cleaning liquid buffer is integrally formed with the second cleaning liquid buffer, the lower tube portion becomes the lower portion of the second cleaning liquid buffer itself, and the air inlet lower tube portion nozzle is arranged on the lower tube portion which becomes the lower portion of the second cleaning liquid buffer itself.

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