Manufacturing method of light field display device and light field display device

By using a top-down method to form a planar concave lens layer and a first planarization layer on the substrate in the light field display technology, the problem of high cost and difficulty in large-size microlens substrates in the prior art is solved, and the uniformity and alignment accuracy of the microlens array are improved.

CN114815299BActive Publication Date: 2025-02-28BOE TECHNOLOGY GROUP CO LTD
View PDF 2 Cites 0 Cited by

Patent Information

Application Number
CN202110060930.6
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2021-01-18
Publication Date
2025-02-28
Estimated Expiration
2041-01-18

AI Technical Summary

Technical Problem

Among the existing light field display technology, nanoimprinting technology has problems such as high cost, difficulty in making microlens substrates, and difficulty in realizing the production of an adhesion lens.

Method used

A planar concave lens layer is formed on the substrate by a top-down method, and a first planarization layer is formed on the planar concave lens layer to form a microlens array. The alignment marks in the planar concave lens layer are aligned with the display panel to ensure sufficient filling and uniformity of the lens structure.

Benefits of technology

It improves the uniformity and alignment accuracy of the microlens array, realizes precise alignment with the display panel, and has a wide range of application prospects.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN114815299B_ABST
    Figure CN114815299B_ABST
Patent Text Reader

Abstract

The present invention discloses a method for manufacturing a light field display device and a light field display device, wherein the method for manufacturing the light field display device comprises: forming a plano-concave lens layer on a substrate, the plano-concave lens layer comprising a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks set at preset positions; forming a first planarization layer covering the plano-concave lens layer to form a microlens array, the refractive index of the first planarization layer being greater than the refractive index of the plano-concave lens layer; and attaching the light-emitting side of the display panel to the side of the microlens array away from the substrate according to the alignment marks. The method for manufacturing the light field display device provided by the present invention forms a microlens array in a top-down manner by forming a plano-concave lens layer on a substrate and forming a first planarization layer on the plano-concave lens layer, and uses the alignment marks included in the plano-concave lens layer to align with the display panel, so that the material is fully filled during the lens formation process and accurate alignment with the display panel is achieved.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The present invention relates to the field of display technology, and in particular to a method for manufacturing a light field display device and the light field display device. Background Art

[0002] In naked-eye 3D or light field display technology, nanoimprint technology is currently mainly used to make microlens substrates. This method requires the production of microlens (MLA) templates first. There are two ways to make MLA templates: single-point diamond and photolithography thermal reflow. Among them, in the process of using single-point diamond for MLA templates, there are problems such as high cost and difficulty in large-scale. Photolithography thermal reflow has the advantages of low cost and large size, while the thermal reflow method is difficult to achieve the production of close-contact lenses (lenses), but a light-shielding layer can be added between the lenses to achieve the effect of close-contact lenses. Summary of the invention

[0003] In order to solve at least one of the above problems, the first aspect of the present invention provides a method for manufacturing a light field display device, comprising:

[0004] Forming a plano-concave lens layer on a substrate, wherein the plano-concave lens layer includes a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks disposed at preset positions;

[0005] forming a first planarization layer covering the plano-concave lens layer to form a microlens array, wherein the refractive index of the first planarization layer is greater than the refractive index of the plano-concave lens layer;

[0006] The light-emitting side of the display panel is attached to the side of the microlens array away from the substrate according to the alignment mark.

[0007] In some optional embodiments, the plano-concave lens layer further includes a spacer disposed between two adjacent plano-concave lenses, and forming a first planarization layer covering the plano-concave lens layer to form a microlens array further includes:

[0008] Forming a plurality of light shielding portions on the first planarization layer according to the alignment mark, wherein the orthographic projections of the light shielding portions on the substrate cover the orthographic projections of the spacer portions on the substrate;

[0009] A second planarization layer covering the light shielding portion and the first planarization layer is formed on the light shielding portion and the exposed first planarization layer to form a microlens array.

[0010] In some optional embodiments, laminating the light emitting side of the display panel to the side of the microlens array away from the substrate according to the alignment mark further comprises:

[0011] According to the alignment mark, the light-emitting side of the display panel is attached to the side of the second planarization layer away from the substrate.

[0012] In some optional embodiments, forming a plurality of light shielding portions on the first planarization layer according to the alignment mark further includes:

[0013] forming a light shielding layer on the first planarization layer;

[0014] The light shielding layer is patterned according to the alignment mark to form a plurality of light shielding portions.

[0015] In some optional embodiments,

[0016] The length of the spacer is less than or equal to 5 μm;

[0017] and / or

[0018] The light shielding portion is a black matrix, the length of the light shielding portion is greater than or equal to the length of the spacer portion and less than or equal to 10 μm, and the thickness of the light shielding portion is greater than or equal to 1 μm and less than or equal to 3 μm;

[0019] and / or

[0020] The thickness of the second planarization layer is greater than or equal to 2 μm and less than or equal to 5 μm.

[0021] In some optional embodiments, a plano-concave lens layer is formed on a substrate, wherein the plano-concave lens layer includes a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks disposed at preset positions, further comprising:

[0022] Coating a nanoimprint adhesive on a substrate to form an imprint adhesive layer;

[0023] The plano-concave lens layer is formed by imprinting the imprinted adhesive layer using a preset nanoimprint template, wherein the nanoimprint template comprises a plurality of convex lenses arranged in an array and a plurality of alignment marks arranged at preset positions.

[0024] In some optional embodiments,

[0025] The aperture of the plano-concave lens is greater than or equal to 5 μm and less than or equal to 500 μm, and the arch height of the plano-concave lens is greater than or equal to 2 μm and less than or equal to 50 μm;

[0026] and / or

[0027] The thickness of the plano-concave lens layer is greater than or equal to 5 μm and less than or equal to 50 μm, the refractive index of the plano-concave lens layer is greater than or equal to 1.3 and less than or equal to 1.45, and the transmittance of the plano-concave lens layer is greater than 80%;

[0028] and / or

[0029] The thickness of the first planarization layer is greater than or equal to 5 μm and less than or equal to 50 μm, the refractive index of the first planarization layer is greater than or equal to 1.55 and less than or equal to 1.75, and the transmittance of the first planarization layer is greater than 80%.

[0030] A second aspect of the present invention provides a light field display device manufactured using the manufacturing method described above, comprising a display panel and a microlens array arranged on the light-emitting side of the display panel, the microlens array comprising a substrate, a plano-concave lens layer and a first planarization layer sequentially arranged on the substrate from far to near the display panel, the plano-concave lens layer comprising a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks arranged at preset positions, and the refractive index of the first planarization layer is greater than the refractive index of the plano-concave lens layer.

[0031] In some optional embodiments, the plano-concave lens layer of the microlens array further includes a spacer portion arranged between two adjacent plano-concave lenses, the microlens array further includes a light-shielding portion arranged on the first planarization layer, and a second planarization layer covering the light-shielding portion and the exposed first planarization layer, and the orthographic projection of the light-shielding portion on the substrate covers the orthographic projection of the spacer portion on the substrate.

[0032] In some optional embodiments, the display panel is one of a liquid crystal display panel, an electroluminescent display panel, a quantum dot light-emitting display panel, a micro LED display panel, a Micro LED display panel and a Mini LED display panel.

[0033] The beneficial effects of the present invention are as follows:

[0034] In view of the existing problems, the present invention develops a method for manufacturing a light field display device and a light field display device, wherein a microlens array is formed by forming a plano-concave lens layer on a substrate in a top-down manner and a first flattening layer on the plano-concave lens layer, and alignment marks included in the plano-concave lens layer are used to align with a display panel, so that the material is fully filled during the lens formation process, thereby improving the uniformity of the lens, and at the same time, precise alignment with the display panel can be achieved, and the light field display device has broad application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0036] Figure 1 A schematic diagram showing a method for manufacturing a light field display device from bottom to top in the prior art is shown.

[0037] Figure 2 A schematic block diagram showing a method for manufacturing a light field display device according to an embodiment of the present invention.

[0038] Figure 3-9 It is a cross-sectional view showing the manufacturing process of the manufacturing method of the light field display device according to an embodiment of the present invention. DETAILED DESCRIPTION

[0039] In order to more clearly illustrate the present invention, the present invention is further described below in conjunction with preferred embodiments and accompanying drawings. Similar components in the accompanying drawings are represented by the same reference numerals. It should be understood by those skilled in the art that the content specifically described below is illustrative rather than restrictive, and should not be used to limit the scope of protection of the present invention.

[0040] It should be noted that the terms “on…”, “formed on…” and “disposed on…” mentioned herein may mean that one layer is directly formed or disposed on another layer, or may mean that one layer is indirectly formed or disposed on another layer, i.e., there are other layers between the two layers.

[0041] At present, nanoimprinting technology is usually used to make plano-convex lenses from the bottom up. During the molding process of plano-convex lenses, the lens size is relatively large, the diameter is generally several hundred microns, and the arch height is generally several tens of microns. There are strict requirements for the imprinting method and the imprinting glue, otherwise it is difficult to achieve nearly 100% structural filling. And the traditional bottom-up method is to use the alignment device of the imprinting equipment to overlap and align the plano-convex lens imprinting layer and the front film layer shading layer, but due to the poor alignment accuracy of nanoimprinting, especially for large sizes (greater than 12 inches), it is basically more than several hundred microns, resulting in a large deviation from the shading layer.

[0042] Especially when the plano-convex lenses are not arranged in close contact, the alignment problem is more obvious. Figure 1 The process flow of making a display device in the prior art is shown. First, an alignment mark is made on the substrate, and a patterned light-shielding layer is made based on the alignment mark. Subsequently, a plano-convex lens with a high refractive index is imprinted based on the alignment mark, followed by the flattening of the low refractive layer, the production of the protective layer, and the bonding process with the display panel. Because the alignment device of the nanoimprinting equipment is used here to align the lens layer and the light-shielding layer, there is a problem of poor alignment accuracy, which leads to the problem of misalignment between the lens and the light-shielding layer. In addition, the bottom-up production method imprints a plano-convex lens. Since the adhesive material uses the principle of capillary tension, the upward filling process has the problem of difficulty in 100% structural filling for large-sized lenses, which will lead to problems of poor uniformity and repeatability of the lenses in the overall lens array.

[0043] Based on one of the above questions, such as Figure 2 As shown, an embodiment of the present invention provides a method for manufacturing a light field display device, comprising:

[0044] S1, forming a plano-concave lens layer on a substrate, wherein the plano-concave lens layer includes a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks set at preset positions;

[0045] S2, forming a first planarization layer covering the plano-concave lens layer to form a microlens array, wherein the refractive index of the first planarization layer is greater than the refractive index of the plano-concave lens layer;

[0046] S3, attaching the light-emitting side of the display panel to the side of the microlens array away from the substrate according to the alignment mark.

[0047] In this embodiment, a microlens array is formed by forming a plano-concave lens layer on a substrate in a top-down manner and forming a first planarization layer on the plano-concave lens layer, and the alignment marks included in the plano-concave lens layer are used to align with the display panel, so that the lens structure is fully filled during the lens formation process, and the formed lenses have good uniformity and can be accurately aligned with the display panel, which has broad application prospects.

[0048] The following further references Figures 3 to 9 Specific embodiments are described.

[0049] In step S1, if Figure 3-4 As shown, firstly, a plano-concave lens layer 203 is formed on a provided substrate 201. The plano-concave lens layer 203 includes a plurality of plano-concave lenses 213 and a plurality of alignment marks 223 arranged at preset positions.

[0050] Specifically, in this embodiment, a nanoimprint glue layer is formed by coating a nanoimprint glue on the substrate 201, and then the pre-set nanoimprint template is used to imprint the imprint glue layer to form a plano-concave lens layer 203. The nanoimprint template includes a plurality of convex lenses arranged in an array and a plurality of alignment marks set at preset positions.

[0051] Optionally, the aperture of the plano-concave lens 213 is greater than or equal to 5 μm and less than or equal to 500 μm, and the arch height is greater than or equal to 2 μm and less than or equal to 50 μm.

[0052] Optionally, the thickness of the plano-concave lens layer 203 is greater than or equal to 5 μm and less than or equal to 50 μm.

[0053] It should be noted that, although the cross-sectional view of the alignment mark is shown in the figure, and it is shown that two alignment marks are included, the present invention is not intended to limit the specific shape and specific number of the alignment mark, and the appropriate shape and number can be selected according to specific design requirements. In addition, multiple plano-concave lenses and multiple alignment marks can be formed simultaneously by one embossing template, and multiple plano-concave lenses and multiple alignment marks can also be formed in batches by two embossing templates including plano-convex lenses and alignment marks respectively, and the present invention is not intended to limit it.

[0054] In step S2, if Figure 5As shown, a first planarization layer 205 covering the plano-concave lens layer 203 is formed to form a microlens array, that is, the portion of the planarization layer 205 filled in the plano-concave lens 213 is used to form a microlens using the morphology of the plano-concave lens, thereby forming a microlens array. The refractive index of the first planarization layer 205 is greater than the refractive index of the plano-concave lens 203 to achieve the modulation effect of the lens array on the light and improve the light extraction efficiency.

[0055] Specifically, in this embodiment, the refractive index of the plano-concave lens layer 203 is greater than or equal to 1.3 and less than or equal to 1.45, the transmittance of the plano-concave lens layer is greater than 80%, the refractive index of the first planarization layer 205 is greater than or equal to 1.55 and less than or equal to 1.75, and the transmittance of the first planarization layer 205 is greater than 80%.

[0056] In step S3, if Figure 6 As shown, the light-emitting side of the display panel 210 is attached to the side of the microlens array away from the substrate 201 according to the alignment mark 223. Specifically, according to the alignment mark 223, the light-emitting side of the display panel 210 is attached to the side of the first planarization layer 205 away from the substrate 201. Those skilled in the art should understand that when attaching, there is an alignment mark in the display panel corresponding to the position and shape of the alignment mark 223. The alignment mark is illustrated by four black squares in the figure, but the present application is not intended to be limited thereto and will not be described in detail herein.

[0057] Considering that the lens arrays that are not closely arranged may affect the light effect, in some optional embodiments, for example Figure 4 As shown, the plurality of plano-concave lenses 213 are arranged in non-close contact, that is, the plano-concave lens layer 201 further includes a spacer 233 between two adjacent plano-concave lenses 213 , and a light shielding portion is further formed on the first planarization layer.

[0058] In addition, those skilled in the art may understand that when the plurality of plano-concave lenses 213 are not arranged in close contact, the alignment mark 223 may be arranged in the spacer 233 , and no further restrictions are made here.

[0059] Specifically, forming a first planarization layer 205 covering the plano-concave lens layer 203 to form a microlens array further includes: Figure 7 As shown, a plurality of light shielding portions 207 are formed on the first planarization layer 205 according to the alignment mark 223, and the orthographic projection of the light shielding portion 207 on the substrate 201 covers the orthographic projection of the spacer 233 on the substrate 201; Figure 8 As shown, a second planarization layer 209 covering the light shielding portion 207 and the exposed first planarization layer 205 is formed on the light shielding portion 207 and the exposed first planarization layer 205 to form a microlens array.

[0060] Specifically, in this embodiment, a plurality of light shielding portions 207 are formed by forming a light shielding layer on the first planarization layer 205 and patterning the light shielding layer using a mask according to the alignment mark 223. The light shielding portions 207 constitute a black matrix, and by forming the light shielding portions 207, the light emitting effect of a lens array arranged in close proximity can be achieved.

[0061] In addition, it is worth noting that in order to achieve the light emitting effect of the closely arranged microlens array, the length of the spacer 233 between two adjacent plano-concave lenses 213 in the plano-concave lens layer 201 should be less than or equal to 5 μm. The length of the light shielding portion 207 along the surface of the first planarization layer 205 is greater than the length of the spacer 233, and the thickness of the light shielding portion is greater than or equal to 1 μm and less than or equal to 3 μm.

[0062] Optionally, the thickness of the second planarization layer 209 is greater than or equal to 2 μm and less than or equal to 5 μm.

[0063] In step S3, if Fig. 9 As shown, the light-emitting side of the display panel 210 is attached to the side of the microlens array away from the substrate 201 according to the alignment mark 223. Specifically, according to the alignment mark 223, the light-emitting side of the display panel 210 is attached to the side of the second planarization layer 209 away from the substrate 201. Those skilled in the art should understand that when attaching, there is an alignment mark corresponding to the position and shape of the alignment mark 223 in the display panel, and the alignment mark is illustrated by four black squares in the figure, but the present application is not intended to be limited thereto and will not be described in detail here.

[0064] Corresponding to the manufacturing method of the light field display device, such as Figure 6 As shown, an embodiment of the present invention further provides a light field display device manufactured using the manufacturing method described in the above embodiment, including a display panel 210 and a microlens array arranged on the light-emitting side of the display panel 210, the microlens array including a substrate 201, a plano-concave lens layer 203 and a first planarization layer 205 sequentially arranged on the substrate 201 from far to near the display panel 210, the plano-concave lens layer including a plurality of plano-concave lenses 213 arranged in an array and a plurality of alignment marks 223 arranged at preset positions, and the refractive index of the first planarization layer 205 is greater than the refractive index of the plano-concave lens layer 203.

[0065] In this embodiment, the display device includes a display panel and a microlens array formed by forming a plano-concave lens layer on a substrate in a top-down manner and forming a first planarization layer on the plano-concave lens layer. The display device is formed by aligning the plano-concave lens layer with the display panel using alignment marks included in the plano-concave lens layer, so that the formed lens structure is fully filled, so that the formed lens has good uniformity, and can be accurately aligned with the display panel, and has broad application prospects.

[0066] In some optional embodiments, such as Fig. 9 As shown, the plano-concave lens layer 205 of the microlens array further includes a spacer 233 disposed between two adjacent plano-concave lenses 213, and the microlens array further includes a light shielding portion 207 disposed on the first planarization layer 205, and a second planarization layer 209 covering the light shielding portion 207 and the exposed first planarization layer 205, and the orthographic projection of the light shielding portion 207 on the substrate 201 covers the orthographic projection of the spacer 233 on the substrate 201. By providing the light shielding portion, the spacer can be shielded to prevent light from directly transmitting through the spacer and forming stray light, thereby improving the light effect.

[0067] In an embodiment of the present invention, the display panel is one of a liquid crystal display panel, an electroluminescent display panel, a quantum dot light-emitting display panel, a micro LED display panel, a Micro LED display panel and a Mini LED display panel.

[0068] In addition, the light field display device provided by the present invention can be any product or component with a display function, such as a mobile phone, a tablet computer, a television, a display, a laptop computer, a digital photo frame, a navigator, etc. Other essential components of the display device should be understood by ordinary technicians in the field, and will not be repeated here, nor should they be used as limitations to the present application.

[0069] In view of the existing problems, the present invention develops a method for manufacturing a light field display device and a light field display device, wherein a plano-concave lens layer is formed on a substrate in a top-down manner and a first flattening layer is formed on the plano-concave lens layer to form a microlens array, and alignment marks included in the plano-concave lens layer are used to align with a display panel, so that the lens structure is fully filled during the lens formation process, so that the formed lens has good uniformity and can be accurately aligned with the display panel, and has broad application prospects.

[0070] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not limitations on the implementation methods of the present invention. For ordinary technicians in the relevant field, other different forms of changes or modifications can be made based on the above description. It is impossible to list all the implementation methods here. All obvious changes or modifications derived from the technical solution of the present invention are still within the protection scope of the present invention.

Claims

1. A method for manufacturing a light field display device, characterized in that: include: A plano-concave lens layer is formed on a substrate, wherein the plano-concave lens layer includes a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks set at preset positions, including: Coating a nanoimprint adhesive on the substrate to form an imprint adhesive layer; Imprinting the imprinted adhesive layer using a preset nanoimprint template to form a plano-concave lens layer, wherein the nanoimprint template is formed by photolithography thermal reflow and includes a plurality of convex lenses arranged in an array and a plurality of alignment marks set at preset positions; forming a first planarization layer covering the plano-concave lens layer to form a microlens array, wherein the refractive index of the first planarization layer is greater than the refractive index of the plano-concave lens layer; The light-emitting side of the display panel is attached to a side of the microlens array away from the substrate according to the alignment mark.

2. The method according to claim 1, characterized in that: The plano-concave lens layer further includes a spacer disposed between two adjacent plano-concave lenses, and the forming of a first planarization layer covering the plano-concave lens layer to form a microlens array further includes: forming a plurality of light shielding portions on the first planarization layer according to the alignment mark, wherein the orthographic projections of the light shielding portions on the substrate cover the orthographic projections of the spacers on the substrate; A second planarization layer covering the light shielding portion and the first planarization layer is formed on the light shielding portion and the exposed first planarization layer to form a microlens array.

3. The method according to claim 2, characterized in that: The step of attaching the light-emitting side of the display panel to the side of the microlens array away from the substrate according to the alignment mark further comprises: According to the alignment mark, the light emitting side of the display panel is attached to the side of the second planarization layer away from the substrate.

4. The method according to claim 2, characterized in that: The forming of a plurality of light shielding portions on the first planarization layer according to the alignment mark further comprises: forming a light shielding layer on the first planarization layer; The light shielding layer is patterned according to the alignment mark to form a plurality of light shielding portions.

5. The method according to claim 2, characterized in that: The length of the spacer is less than or equal to 5 μm; and / or The light shielding portion is a black matrix, the length of the light shielding portion is greater than or equal to the length of the spacer and less than or equal to 10 μm, and the thickness of the light shielding portion is greater than or equal to 1 μm and less than or equal to 3 μm; and / or The thickness of the second planarization layer is greater than or equal to 2 μm and less than or equal to 5 μm.

6. The method according to any one of claims 1 to 5, characterized in that: The aperture of the plano-concave lens is greater than or equal to 5 μm and less than or equal to 500 μm, and the arch height of the plano-concave lens is greater than or equal to 2 μm and less than or equal to 50 μm; and / or The thickness of the plano-concave lens layer is greater than or equal to 5 μm and less than or equal to 50 μm, the refractive index of the plano-concave lens layer is greater than or equal to 1.3 and less than or equal to 1.45, and the transmittance of the plano-concave lens layer is greater than 80%; and / or The thickness of the first planarization layer is greater than or equal to 5 μm and less than or equal to 50 μm, the refractive index of the first planarization layer is greater than or equal to 1.55 and less than or equal to 1.75, and the transmittance of the first planarization layer is greater than 80%.

7. A light field display device manufactured by the manufacturing method according to any one of claims 1 to 6, characterized in that: The invention comprises a display panel and a microlens array arranged on the light-emitting side of the display panel, wherein the microlens array comprises a substrate, a plano-concave lens layer and a first planarization layer which are arranged on the substrate in sequence from far to near the display panel, wherein the plano-concave lens layer comprises a plurality of plano-concave lenses arranged in an array and a plurality of alignment marks arranged at preset positions, wherein the refractive index of the first planarization layer is greater than the refractive index of the plano-concave lens layer, wherein the plurality of plano-concave lenses and the alignment marks of the plano-concave lens layer are formed by imprinting an imprinted adhesive layer using a preset nanoimprint template, wherein the nanoimprint template is formed by photolithography thermal reflow and comprises a plurality of convex lenses arranged in an array and a plurality of alignment marks arranged at preset positions, and the imprinted adhesive layer is formed by coating nanoimprint adhesive on the substrate.

8. The light field display device according to claim 7, characterized in that: The plano-concave lens layer of the microlens array also includes a spacer portion arranged between two adjacent plano-concave lenses, and the microlens array also includes a light-shielding portion arranged on the first planarization layer, and a second planarization layer covering the light-shielding portion and the exposed first planarization layer, and the orthographic projection of the light-shielding portion on the substrate covers the orthographic projection of the spacer portion on the substrate.

9. The light field display device according to claim 7 or 8, characterized in that: The display panel is one of a liquid crystal display panel, an electroluminescent display panel, a quantum dot light-emitting display panel, a micro LED display panel, a Micro LED display panel and a MiniLED display panel.

Citation Information

Patent Citations

  • Method for manufacturing microlens array substrate, microlens array substrate, electro-optic device, and electronic equipment

    JP2014092601A

  • Manufacturing method of electro-optic device substrate, electro-optic device substrate, electro-optic device, and electronic device

    US20150002790A1