Powder vibrating machine based on tube-shaped target production and implementation method thereof
By using frequency extraction components and power output components in powder vibrating machine, and using the misalignment and reset mechanisms of frequency bars and impact plates, high-frequency vibration is achieved, solving the problem of power limitation of vibration frequency in the prior art. Improves the vibration effect of the powder.
Patent Information
- Application Number
- CN202211463840.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2022-11-17
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2042-11-17
AI Technical Summary
The vibration frequency of powder vibrating equipment in the production of existing target materials is affected by the equipment power, resulting in low vibration efficiency and cannot meet the high-frequency vibration requirements.
A powder vibrating machine based on tube-type target production is designed, using frequency extraction components and power output components to generate high-frequency vibrations through the misalignment and reset of frequency bars and impact plates, which increases the vibration frequency and improves the vibration of powder. Real effect.
Without increasing the power of the drive device, the compaction frequency and effect of the powder are significantly improved, and the compaction performance of the powder is enhanced.
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Figure CN116000294B_ABST
Abstract
Description
Technical Field
[0001] The invention relates to the technical field of target material production, in particular to a powder vibrating machine based on the production of tubular target materials and an implementation method thereof. Background Art
[0002] Target material is one of the main materials for preparing thin films. It is mainly used in integrated circuits, flat panel displays, solar cells, recording media, smart glass, etc. It has high requirements on material purity and stability. Target materials can be divided into tubular targets, cylindrical targets and semicircular targets according to their shapes.
[0003] In this regard, China applied for patent number: CN113275575A, which discloses a method for producing a tubular target material, which uses a powder compacting device, which includes a bottom plate, a workbench, a fixing device and a compacting device. The specific method flow of using the above powder compacting device to produce tubular targets is as follows: powder weighing, powder filling, compression preforming, demolding, heat treatment and mechanical processing, and the compacting device includes a support rod, a top plate, a drive motor, a drive cam, a lateral block, a lifting block, a pressure ring, an internal compacting frame, a fixing column and an external compacting frame. The present invention fixes multiple tubular molds through a material placement device, and then uses a compacting device to perform compacting operations from the top, inside and outside of the mold respectively, so that the compacting efficiency is significantly improved, and the tubular mold can be driven to rotate during the compacting process, which can increase the contact range between the compacting device and the tubular mold and improve the compacting effect.
[0004] Nowadays, the processing of target material production powder requires vibration compaction through a vibrating machine. However, when the vibrating compaction equipment is processing powder, the frequency of its vibration is determined by the frequency of the equipment's shaking. When completing high-frequency vibration, the composite generated by the equipment is also improved. The vibration frequency of the equipment is affected by the power of the equipment.
[0005] In view of the above problems, a powder compactor based on the production of tubular target materials and an implementation method thereof are proposed. Summary of the invention
[0006] The purpose of the present invention is to provide a powder compactor based on the production of tubular target materials and an implementation method thereof, which solves the problems in the background technology.
[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a powder material vibrating machine based on the production of tubular target materials and an implementation method thereof, comprising a vibrating assembly, wherein the vibrating assembly comprises a processing chamber, and the upper end of the processing chamber is wrapped with a protective sleeve;
[0008] The interior of the processing chamber is connected with a frequency-raising component, and the frequency-raising component includes a tubular mold, a tubular mold is connected to the interior of the processing chamber, a column is fixedly connected to the interior of the processing chamber, a frequency bar is embedded in the interior of the processing chamber, a connecting rod is connected to the upper end of the tubular mold, and a transmission ring is connected to the upper end of the connecting rod, a connecting thin rod is embedded in the interior of the transmission ring and connected, a return spring is embedded in the interior of the transmission ring and connected, an impact plate is fixedly connected to the outer wall of the transmission ring, a blocking plate is connected to the upper end of the column, and a power output component is connected to the upper end of the protective cover, and the power output component includes a support column, a positioning ring is connected to the upper end of the support column, a telescopic push rod is connected to the upper end of the positioning ring, and the bottom end of the telescopic push rod is connected to the transmission rod, and a connecting roller is connected to one side of the transmission rod, and the connecting roller and the column are fixedly connected.
[0009] Preferably, the tubular molds surround the upper end of the column, and the four groups of tubular molds are fixedly connected to the upper end of the transmission ring through connecting rods.
[0010] Preferably, the transmission ring is configured as a semi-ring, two semi-ring-shaped transmission rings are connected via a return spring, and the transmission ring is wrapped around the upper end of the tubular mold.
[0011] Preferably, frequency bars are embedded on the left and right sides of the interior of the processing chamber, and the frequency bars correspond to the impact plates, and the frequency bars and the impact plates are meshed with each other.
[0012] Preferably, a buffer spring is fixedly connected to the bottom end of the tubular mold, and a bottom end of the buffer spring is fixedly connected to a bottom tray.
[0013] Preferably, the bottom end of the bottom tray is embedded in the interior of the processing chamber, and the column is located inside the tubular mold.
[0014] Preferably, the blocking piece is embedded in the interior of the two groups of the tubular molds, and the two side surfaces of the blocking piece are configured as curved surfaces.
[0015] Preferably, the telescopic push rod is fixedly connected to the inner wall of the positioning ring, the positioning ring is in a circular ring shape, and the output end of the telescopic push rod is fixedly connected to one side of the transmission rod.
[0016] Preferably, both ends of the connecting thin rod are embedded in the transmission ring, the two groups of transmission rings are connected by the connecting thin rod, and the side of the transmission rod away from the telescopic push rod is embedded in the connecting roller.
[0017] A powder compaction implementation method based on the production of tubular target materials is implemented in which the powder is filled into the interior of a tubular mold. When the tubular mold moves up and down, the misalignment between the frequency bar and the impact piece produces a high-frequency impact. The impact generates a rebound force that acts on the upper end of the tubular mold, causing the internal powder to vibrate at a high frequency.
[0018] Compared with the prior art, the present invention has the following beneficial effects:
[0019] The powder compaction machine based on the production of tubular target materials provided by the present invention is provided with a frequency-raising component and a power output component. The tubular mold can be lifted and lowered by the power output component. During the lifting and lowering process, the frequency strip and the impact plate are dislocated with each other, and after the dislocation, they are reset under the reset spring. During the sliding process, higher-frequency vibrations are generated, and the frequency of the vibrations is improved without increasing the power of the driving device, thereby making the compaction effect on the powder more excellent. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the overall structure of the present invention;
[0021] Figure 2 It is a structural schematic diagram of the power output assembly of the present invention;
[0022] Figure 3 It is a schematic diagram of the structure of the column and the frequency strip of the present invention;
[0023] Figure 4 It is a schematic structural diagram of the transmission ring and the tubular mold of the present invention;
[0024] Figure 5 It is a schematic diagram of the structure of the transmission ring and the return spring of the present invention;
[0025] Figure 6 It is a schematic structural diagram of the upright column and the blocking piece of the present invention.
[0026] In the figure: 1. compaction assembly; 110. processing chamber; 120. protective cover; 2. frequency-increasing assembly; 210. tubular mold; 220. column; 230. frequency strip; 240. transmission ring; 250. reset spring; 260. impact plate; 270. blocking plate; 280. connecting rod; 290. connecting thin rod; 2110. bottom tray; 2120. buffer spring; 3. power output assembly; 310. positioning ring; 320. telescopic push rod; 330. support column; 340. transmission rod; 350. connecting roller. DETAILED DESCRIPTION
[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
[0028] In order to further understand the content of the present invention, the present invention is described in detail in conjunction with the accompanying drawings.
[0029] Combination Figure 1-Figure 6 The powder material vibrating machine based on the production of tubular target materials of the present invention comprises a vibrating assembly 1, the vibrating assembly 1 comprises a processing chamber 110, and the upper end of the processing chamber 110 is wrapped with a protective cover 120;
[0030] The interior of the processing chamber 110 is connected to a frequency-boosting assembly 2, which includes a tubular mold 210. The interior of the processing chamber 110 is connected to a tubular mold 210. The interior of the processing chamber 110 is fixedly connected to a column 220. The interior of the processing chamber 110 is embedded with a frequency bar 230. The upper end of the tubular mold 210 is connected to a connecting rod 280. The upper end of the connecting rod 280 is connected to a transmission ring 240. The tubular mold 210 surrounds the upper end of the column 220. Four groups of tubular molds 210 are fixedly connected to the upper end of the transmission ring 240 through the connecting rod 280. Among them, the raw material powder is adjusted inside the four groups of tubular molds 210. The powder is processed inside the tubular mold 210 to become compact, and each group of tubular molds 210 is connected to the upper end of the transmission ring 240 through the connecting rod 280, and moves synchronously with the movement of the transmission ring 240.
[0031] The transmission ring 240 is embedded with a connecting rod 290, and the transmission ring 240 is embedded with a reset spring 250. The transmission ring 240 is set to a semi-ring shape. The two semi-ring-shaped transmission rings 240 are connected by the reset spring 250. The transmission ring 240 is wrapped around the upper end of the tubular mold 210. The outer wall of the transmission ring 240 is fixedly connected with an impact piece 260. The left and right sides of the processing chamber 110 are embedded with frequency bars 230. The frequency bars 230 and the impact piece 260 correspond to each other. The frequency bars 230 and the impact piece 260 are meshed. When the transmission ring 240 rises, it drives the transmission ring 240 to rise. During the rising process of the transmission ring 240, the impact piece 260 is driven. 0 slides on the upper end of the frequency bar 230. After sliding, the latch teeth at the upper ends of the frequency bar 230 and the impact plate 260 are respectively dislocated, and then reset again after dislocation, thereby changing the position of the transmission ring 240 in the left and right directions. When the transmission ring 240 rises rapidly, the impact plate 260 slides on the upper end of the frequency bar 230. The vibration generated by the sliding is transmitted to the upper end of the tubular mold 210, thereby compacting the powder inside the tubular mold 210. The amplitude of the vibration of the powder during the vibration process is small, which can prevent the internal powder from flying. Under the small high-frequency vibration, the gap between the powders is gradually reduced, so the compaction effect is also more excellent.
[0032] The bottom end of the tubular mold 210 is fixedly connected to a buffer spring 2120, and the bottom end of the buffer spring 2120 is fixedly connected to a bottom tray 2110. The bottom end of the bottom tray 2110 is embedded in the interior of the processing chamber 110, and the column 220 is located inside the tubular mold 210. When the tubular mold 210 rises and falls, the bottom end of the bottom tray 2110 hits the upper end of the processing chamber 110, and the buffer spring 2120 provides a certain degree of buffering, wherein the tubular mold 210 and the bottom tray 2110 are slidably connected.
[0033] The upper end of the column 220 is connected to a blocking piece 270, which is embedded in the two groups of tubular molds 210. The two side surfaces of the blocking piece 270 are set as arc surfaces. In order to increase the frequency of vibration, when the tubular mold 210 vibrates, the column 220 will also vibrate and drive the blocking piece 270 to vibrate. The material of the tubular mold 210 and the blocking piece 270 are different, and the vibration frequency is also inconsistent. Therefore, the tubular mold 210 and the blocking piece 270 collide with each other, thereby increasing the vibration frequency and significantly improving the processing effect of the powder.
[0034] The upper end of the protective sleeve 120 is connected to a power output assembly 3, and the power output assembly 3 includes a support column 330, and the upper end of the support column 330 is connected to a positioning ring 310, and the upper end of the positioning ring 310 is connected to a telescopic push rod 320, and the bottom end of the telescopic push rod 320 is connected to a transmission rod 340, and the telescopic push rod 320 is fixedly connected to the inner wall of the positioning ring 310, and the positioning ring 310 is annular, and the output end of the telescopic push rod 320 is fixedly connected to one side of the transmission rod 340, and one side of the transmission rod 340 is connected to a connecting roller 350, and both ends of the connecting thin rod 290 are embedded in the interior of the transmission ring 240, and the two sets of transmission rings 2 40 are connected by connecting thin rod 290, the side of transmission rod 340 away from telescopic push rod 320 is embedded in the inside of connecting roller 350, connecting roller 350 and column 220 are fixedly connected, and telescopic push rod 320 is fixed by positioning ring 310, and the operation of telescopic push rod 320 drives the rising and falling of transmission rod 340, and the rising and falling process drives connecting roller 350 to work, and when connecting roller 350 rises, it drives column 220, and after driving column 220, it drives impact plate 260 to slide on the upper end of frequency bar 230, thereby driving tubular mold 210 to vibrate.
[0035] In the powder compaction implementation method based on the production of tubular target materials, the powder is filled into the interior of the tubular mold 210. When the tubular mold 210 moves up and down, the misalignment between the frequency bar 230 and the impact plate 260 generates a high-frequency impact. The impact generates a rebound force that acts on the upper end of the tubular mold 210, causing the internal powder to vibrate at a high frequency.
[0036] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.
[0037] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.
Claims
1. A powder compactor based on the production of tubular target materials, comprising a compactor assembly (1), characterized in that: The vibration assembly (1) comprises a processing chamber (110), and the upper end of the processing chamber (110) is wrapped with a protective sleeve (120); The processing chamber (110) is internally connected to a frequency-raising component (2), the frequency-raising component (2) comprising a tubular mold (210), the processing chamber (110) is internally connected to a tubular mold (210), the processing chamber (110) is internally fixedly connected to a column (220), frequency bars (230) are embedded on the left and right sides of the processing chamber (110), the frequency bars (230) and the impact plates (260) correspond to each other, the frequency bars (230) and the impact plates (260) are meshed, the upper end of the tubular mold (210) is connected to a connecting rod (280), the upper end of the connecting rod (280) is connected to a transmission ring (240), the transmission ring (240) is internally embedded with a connecting thin rod (290), the transmission ring (240) is internally connected to a connecting thin rod (290), and the transmission ring (240) is internally connected to a connecting thin rod (290). The upper end of the column (220) is connected to a blocking plate (270); the upper end of the protective sleeve (120) is connected to a power output assembly (3); the power output assembly (3) comprises a support column (330); the upper end of the support column (330) is connected to a positioning ring (310); the upper end of the positioning ring (310) is connected to a telescopic push rod (320); the bottom end of the telescopic push rod (320) is connected to a transmission rod (340); one side of the transmission rod (340) is connected to a connecting roller (350); the connecting roller (350) and the column (220) are fixedly connected; after the connecting roller (350) is lifted up, it drives the column (220).
2. The powder compaction machine based on the production of tubular target materials according to claim 1, characterized in that: The tubular mold (210) surrounds the upper end of the column (220), and four groups of the tubular molds (210) are fixedly connected to the upper end of the transmission ring (240) via a connecting rod (280).
3. The powder compaction machine based on the production of tubular target materials according to claim 2, characterized in that: The transmission ring (240) is configured in a semi-ring shape, and two semi-ring-shaped transmission rings (240) are connected via a return spring (250). The transmission ring (240) is wrapped around the upper end of the tubular mold (210).
4. The powder compaction machine based on the production of tubular target materials according to claim 1, characterized in that: The bottom end of the tubular mold (210) is fixedly connected to a buffer spring (2120), and the bottom end of the buffer spring (2120) is fixedly connected to a bottom tray (2110).
5. The powder compaction machine based on the production of tubular target materials according to claim 4, characterized in that: The bottom end of the bottom tray (2110) is embedded in the interior of the processing chamber (110), and the upright column (220) is located inside the tubular mold (210).
6. The powder compaction machine based on the production of tubular target materials according to claim 1, characterized in that: The blocking piece (270) is embedded in the interior of the two sets of the tubular molds (210), and the two side surfaces of the blocking piece (270) are configured as curved surfaces.
7. The powder compaction machine based on the production of tubular target materials according to claim 1, characterized in that: The telescopic push rod (320) is fixedly connected to the inner wall of the positioning ring (310); the positioning ring (310) is in the shape of a circular ring; and the output end of the telescopic push rod (320) is fixedly connected to one side of the transmission rod (340).
8. The powder compaction machine based on the production of tubular target materials according to claim 1, characterized in that: Both ends of the connecting thin rod (290) are embedded in the interior of the transmission ring (240), and the two sets of transmission rings (240) are connected via the connecting thin rod (290). The side of the transmission rod (340) away from the telescopic push rod (320) is embedded in the interior of the connecting roller (350).
9. The implementation method of the powder vibrating machine based on the production of tubular target materials according to any one of claims 1 to 8, characterized in that: By filling the inside of the tubular mold (210) with powder, the frequency strip (230) and the impact plate (260) are misaligned to generate high-frequency impact when the tubular mold (210) moves up and down. The impact generates a rebound force that acts on the upper end of the tubular mold (210), causing the powder inside to vibrate at a high frequency.
Citation Information
Patent Citations
Production method of tubular target material
CN113275575A
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CN106216613A
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