A rotating sample stage

Abstract

The present invention discloses a rotating sample stage, including a sample stage assembly, a support platform, a drive assembly, a rotating shaft, an adjustment assembly and a positioning assembly, wherein one end of the rotating shaft passes through the support platform and is connected to the drive assembly, and the other end of the rotating shaft is connected to the sample stage assembly. The device adopts a ring design and is divided into 6 parallel sample stages, each of which can be placed on substrates of different materials, such as FTO, metal, silicon wafer, etc., so as to observe the deposition effect of the composite on different materials. The sample stage adopts a single stage and a swing function design to ensure the deposition uniformity of the sample, improve the experimental efficiency, and can perform parallel experiments to ensure the reliability of experimental parameter adjustment. In addition, the sample stage is also provided with a slot for placing a magnet, and a strong magnet is installed to provide more dimensional regulation for the assembly experiment. Each sample receiving stage is separated by a baffle to prevent contamination caused by mutual deposition between different sample stages during the spray experiment.

Description

Technical Field

[0001] The invention relates to the technical field of test instruments, in particular to a rotating sample table. Background Art

[0002] PVD is the abbreviation of Physical Vapor Deposition. Physical vapor deposition technology refers to the technology of using physical methods under vacuum conditions to vaporize the surface of the material source (solid or liquid) into gaseous atoms, molecules or partially ionize them into ions, and deposit a thin film with certain special functions on the surface of the substrate through a low-pressure gas or plasma process.

[0003] At present, whether it is experimental or industrial production PVD coating equipment, a single rotating sample stage cannot meet the coating needs of workpieces of multiple sizes and complex surface morphologies, and it is difficult to adjust the height of the sample stage. There are limitations when coating workpieces of different heights, which reduces processing efficiency. Therefore, how to use a set of rotating sample stages to simultaneously meet the deposition coating of a series of workpieces with different sizes and morphologies has become a bottleneck problem restricting the rapid development of this industry. Summary of the invention

[0004] The purpose of the present invention is to provide a rotating sample stage to solve the problem in the above background technology that the existing equipment cannot meet the coating requirements of workpieces with multiple sizes and complex surface morphology, and to provide a rotating sample stage.

[0005] To achieve the above object, the present invention provides the following technical solutions:

[0006] A rotating sample stage comprises a sample stage assembly, a supporting platform, a driving assembly, a rotating shaft, an adjusting assembly and a positioning assembly. One end of the rotating shaft passes through the supporting platform and is connected to the driving assembly, while the other end of the rotating shaft is connected to the sample stage assembly. The driving assembly is fixed to the bottom of the supporting platform.

[0007] Preferably, the sample stage assembly includes a middle rotating frame, a rotating table, a partition, a magnet slot and a magnet. The middle rotating frame is sleeved on the rotating shaft and fixed on one end thereof by a flange. There are 6 rotating tables, and one end of each of them is symmetrically fixed to the middle rotating frame by bolts. A partition is installed between adjacent rotating tables, and the partition is fixed to the middle rotating frame by bolts.

[0008] Preferably, the magnet slots are respectively mounted on the rotating stage by bonding, and the magnets are respectively mounted in the magnet slots by bonding. The number of partitions, magnet slots and magnets corresponds to the number of rotating stages, and 6 are respectively provided.

[0009] Preferably, the drive assembly includes a drive bracket, a synchronous belt, a drive motor, an angular displacement sensor, a first pulley, and a second pulley. The angular displacement sensor and the synchronous belt, and the drive bracket are fixed to the bottom of the support platform by bolts, and the drive motor is fixed to the drive bracket by bolts.

[0010] Preferably, the first pulley is sleeved on the main shaft of the driving motor, the second pulley is sleeved on the other end of the rotating shaft, the first pulley and the second pulley are connected by a synchronous belt transmission, the angular displacement sensor is installed at the other end of the rotating shaft, the synchronous belt is a synchronous toothed belt, the first pulley and the second pulley are synchronous pulleys, and the driving motor is a stepper motor.

[0011] Preferably, the adjustment assembly includes a support cover, the bottom surface of the support cover is fixedly connected to a mounting plate, the upper surface of the mounting plate is fixedly mounted with a servo motor, the output end of the servo motor is fixedly mounted with an adjusting screw, the outer surface of the adjusting screw is threadedly connected with a threaded ring, the outer surface of the threaded ring is fixedly connected with an adjusting cover, the upper surface of the adjusting cover is fixedly connected to the bottom surface of the sample stage assembly, and the top end of the adjusting screw is fixedly connected with a limiting plate.

[0012] Preferably, the positioning assembly includes a positioning plate, the front surfaces of the two positioning plates are respectively fixedly connected to the outer surfaces of the two adjustment assemblies, the upper surfaces of the positioning plates are provided with two positioning holes, the bottom surface of the sample stage assembly is fixedly connected to two positioning rods, the bottom ends of the two positioning rods both pass through the positioning holes and extend to the bottom of the positioning holes, and the outer surfaces of the positioning rods are slidably connected to the inner walls of the positioning holes.

[0013] Preferably, a mounting groove is provided on the bottom surface of the sample stage assembly, an ultrasonic ranging sensor is fixedly mounted on the inner wall of the mounting groove, and the ultrasonic ranging sensor is located above the positioning assembly.

[0014] Preferably, each of the rotating stages can hold a silicon wafer substrate.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] 1. The rotating sample stage of this device adopts a ring design and is divided into 6 parallel sample stages. Each sample stage can be placed on substrates of different materials, such as FTO, metal, silicon wafer, etc., so as to observe the deposition effect of the composite on different materials. The sample stage adopts a single stage and swing function design to ensure the uniformity of sample deposition, improve the experimental efficiency, and conduct parallel experiments to ensure the reliability of experimental parameter adjustment. In addition, the sample stage is also provided with a slot for placing magnets. The installation of strong magnets provides more dimensional regulation for assembly experiments. The sample receiving stages are separated by baffles to prevent contamination caused by mutual deposition between different sample stages during the spray experiment.

[0017] 2. This device uses an ultrasonic distance measuring sensor to detect the distance between the sample stage assembly and the positioning assembly, which is convenient for detecting and understanding the height fine-tuning distance of the sample stage assembly. Through the setting of the support cover and the servo motor, the servo motor can drive the adjusting screw to rotate, and cooperate with the threaded ring to drive the adjusting cover to move up and down through the threaded ring, and then drive the sample stage assembly to perform lifting and lowering fine-tuning, avoiding the limitation of coating workpieces of different heights and improving processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is the overall structural diagram of the present invention;

[0019] Figure 2 is a front view of the rotating shaft of the present invention;

[0020] Figure 3 It is the overall structural diagram of the sample stage assembly of the present invention;

[0021] Figure 4 is a structural diagram of the angular displacement sensor of the present invention;

[0022] Figure 5 It is a structural diagram of the drive assembly of the present invention;

[0023] Figure 6 It is a three-dimensional structural schematic diagram of a bottom view of the sample stage assembly in the present invention;

[0024] Figure 7 It is a three-dimensional structural schematic diagram of the positioning assembly in the present invention;

[0025] Figure 8 It is a sectional view of the front view of the adjustment assembly in the present invention.

[0026] In the figure: 100, sample table assembly; 200, support platform; 300, drive assembly; 400, rotating shaft; 500, adjustment assembly; 600, positioning assembly; 700, mounting slot; 800, ultrasonic ranging sensor; 101, middle rotating frame; 102, rotating table; 103, partition; 104, magnet slot; 105, magnet; 301, bracket; 302, synchronous belt; 303, drive motor; 304, angular displacement sensor; 305, first pulley; 306, second pulley; 501, support cover; 502, adjustment cover; 503, mounting plate; 504, servo motor; 505, threaded ring; 506, adjusting screw; 507, limit plate; 601, positioning plate; 602, positioning hole; 603, positioning rod. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0028] For examples, see Figure 1-8In the present invention, a rotating sample stage includes a sample stage assembly 100, a support platform 200, a drive assembly 300, a rotating shaft 400, an adjusting assembly 500 and a positioning assembly 600. One end of the rotating shaft 400 passes through the support platform 200 and is connected to the drive assembly 300. The drive assembly 300 includes a drive bracket 301, a synchronous belt 302, a drive motor 303, an angular displacement sensor 304, a first pulley 305, and a second pulley 306. The angular displacement sensor 304 and the synchronous belt 302, the drive bracket 301 is fixed to the bottom of the support platform 200 by bolts, the drive motor 303 is fixed to the drive bracket 301 by bolts, and the first pulley 305 is fixed to the second pulley 306. 5 is sleeved on the main shaft of the driving motor 303, the second pulley 306 is sleeved on the other end of the rotating shaft 400, the first pulley 305 and the second pulley 306 are connected through the synchronous belt 302, the synchronous belt 302 is a synchronous toothed belt, the first pulley 305 and the second pulley 306 are synchronous pulleys, the driving motor 303 is a stepping motor, the angular displacement sensor 304 is installed on the other end of the rotating shaft 400, and the other end of the rotating shaft 400 is connected to the sample stage assembly 100. The sample stage assembly 100 includes a middle rotating frame 101, a rotating stage 102, a partition 103, a magnet slot 104 and a magnet 105. The middle rotating frame 101 is sleeved on the rotating shaft 400 through The flange is fixed on one end thereof, wherein 6 rotating stands 102 are provided, and one end of each of them is symmetrically fixed to the middle rotating stand 101 by bolts, and a partition 103 is installed between adjacent rotating stands 102, and the partition 103 is fixed to the middle rotating stand 101 by bolts. The rotating stand 102 adopts a single stand and a swing function design, which ensures the uniformity of sample deposition, improves the experimental efficiency, and can perform parallel experiments while ensuring the reliability of experimental parameter adjustment. The sample stage assembly 100 is also provided with a magnet slot 104 for placing a magnet 105. The installation of the magnet 105 provides more dimensional regulation for the assembly experiment, and each sample stage assembly 100 is connected by a partition. 103 is separated to prevent contamination caused by mutual deposition between different sample stage assemblies 100 during the spray experiment. The magnet slots 104 are respectively installed on the rotating table 102 by bonding. The rotating table 102, each rotating table 102 can place a silicon wafer substrate, especially the rotating table 102 can also be made of materials such as FTO, metal, etc., so as to observe the deposition effect of the composite on different materials. The magnets 105 are respectively installed in the magnet slots 104 by bonding. The partitions 103, the magnet slots 104 and the magnets 105 correspond to the number of the rotating tables 102, and 6 are respectively provided. The driving assembly 300 is fixed to the bottom of the supporting platform 200.

[0029] The adjustment assembly 500 includes a support cover 501, the bottom surface of the support cover 501 is fixedly connected to a mounting plate 503, the upper surface of the mounting plate 503 is fixedly installed with a servo motor 504, the output end of the servo motor 504 is fixedly installed with an adjustment screw 506, the outer surface of the adjustment screw 506 is threadedly connected to a threaded ring 505, the outer surface of the threaded ring 505 is fixedly connected to an adjustment cover 502, the upper surface of the adjustment cover 502 is fixedly connected to the bottom surface of the sample stage assembly 100, and the top of the adjustment screw 506 is fixedly connected to The limit plate 507 is connected, and through the setting of the support cover 501 and the servo motor 504, the servo motor 504 can drive the adjusting screw 506 to rotate, and cooperate with the threaded ring 505, which will drive the adjusting cover 502 to move up and down through the threaded ring 505, and then drive the sample stage assembly 100 to perform lifting and fine-tuning. The positioning assembly 600 includes positioning plates 601, and the front surfaces of the two positioning plates 601 are respectively fixedly connected to the outer surfaces of the two adjusting assemblies 500, and the upper surface of the positioning plates 601 is provided with Two positioning holes 602, two positioning rods 603 are fixedly connected to the bottom surface of the sample stage assembly 100, the bottom ends of the two positioning rods 603 pass through the positioning holes 602 and extend to the bottom of the positioning holes 602, and the outer surface of the positioning rod 603 is slidably connected to the inner wall of the positioning hole 602. Through the arrangement of the positioning plate 601 and the positioning hole 602, the positioning rod 603 can slide up and down on the inner wall of the positioning hole 602, which will make the sample stage assembly 100 more stable when performing lifting and lowering fine-tuning to avoid shaking. A mounting groove 700 is provided on the bottom surface of the sample stage assembly 100, and an ultrasonic ranging sensor 800 is fixedly installed on the inner wall of the mounting groove 700. The ultrasonic ranging sensor 800 is located above the positioning assembly 600. The ultrasonic ranging sensor 800 can be installed through the mounting groove 700. The ultrasonic ranging sensor 800 can be used to detect the distance between the sample stage assembly 100 and the positioning assembly 600, thereby facilitating the detection and understanding of the height fine-tuning distance of the sample stage assembly 100.

[0030] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

Claims

1. A rotating sample stage, characterized in that: The invention comprises a sample stage assembly (100), a support platform (200), a drive assembly (300), a rotating shaft (400), an adjustment assembly (500) and a positioning assembly (600), wherein one end of the rotating shaft (400) passes through the support platform (200) and is connected to the drive assembly (300), and the other end of the rotating shaft (400) is connected to the sample stage assembly (100), and the drive assembly (300) is fixed to the bottom of the support platform (200). The sample stage assembly (100) comprises a middle rotating frame (101), a rotating stage frame (102), a partition (103), a magnet slot (104) and a magnet (105), and the middle rotating frame (101) is sleeved on the rotating shaft (400) and fixed to one end thereof by a flange, wherein the rotating shaft (400) is provided at a position of 104 and a position of 105. Six racks (102) are provided, and one end of each rack is symmetrically fixed to the middle rotating rack (101) by bolts. A partition (103) is installed between adjacent rotating racks (102), and the partition (103) is fixed to the middle rotating rack (101) by bolts. The driving assembly (300) includes a driving bracket (301), a synchronous belt (302), a driving motor (303), an angular displacement sensor (304), a first pulley (305), and a second pulley (306). The angular displacement sensor (304) and the synchronous belt (302), the driving bracket (301) are fixed to the bottom of the supporting platform (200) by bolts, the driving motor (303) is fixed to the driving bracket (301) by bolts, and the adjusting assembly ( The present invention relates to a method for manufacturing a sample stage assembly (100) comprising a support cover (501), wherein the bottom surface of the support cover (501) is fixedly connected to a mounting plate (503), the upper surface of the mounting plate (503) is fixedly installed with a servo motor (504), the output end of the servo motor (504) is fixedly installed with an adjusting screw (506), the outer surface of the adjusting screw (506) is threadedly connected to a threaded ring (505), the outer surface of the threaded ring (505) is fixedly connected to an adjusting cover (502), the upper surface of the adjusting cover (502) is fixedly connected to the bottom surface of the sample stage assembly (100), the top end of the adjusting screw (506) is fixedly connected to a limiting plate (507), and the positioning assembly (600) comprises a positioning plate (601), two positioning plates ( The front of the sample stage assembly (100) is fixedly connected to the outer surfaces of the two adjustment assemblies (500) respectively, the upper surface of the positioning plate (601) is provided with two positioning holes (602), the bottom surface of the sample stage assembly (100) is fixedly connected to two positioning rods (603), the bottom ends of the two positioning rods (603) both pass through the positioning holes (602) and extend to the bottom of the positioning holes (602), and the outer surfaces of the positioning rods (603) are slidably connected to the inner walls of the positioning holes (602), the bottom surface of the sample stage assembly (100) is provided with a mounting groove (700), the inner wall of the mounting groove (700) is fixedly installed with an ultrasonic ranging sensor (800), and the ultrasonic ranging sensor (800) is located above the positioning assembly (600).

2. A rotating sample stage according to claim 1, characterized in that: The magnet slots (104) are respectively mounted on the rotating platform (102) by bonding, and the magnets (105) are respectively mounted in the magnet slots (104) by bonding. The number of partitions (103), magnet slots (104) and magnets (105) corresponds to the number of rotating platforms (102), and six are respectively provided.

3. The rotating sample stage according to claim 1, characterized in that: The first pulley (305) is sleeved on the main shaft of the driving motor (303), the second pulley (306) is sleeved on the other end of the rotating shaft (400), the first pulley (305) and the second pulley (306) are connected by a synchronous belt (302), the angular displacement sensor (304) is installed on the other end of the rotating shaft (400), the synchronous belt (302) is a synchronous toothed belt, the first pulley (305) and the second pulley (306) are synchronous pulleys, and the driving motor (303) is a stepping motor.

4. A rotating sample stage according to claim 2, characterized in that: The rotating stage (102), each of the rotating stages (102) can be used to place a silicon wafer substrate.

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