A dual-cavity lifting wafer transfer device

Abstract

The present invention discloses a dual-cavity lifting type wafer transfer device, which relates to the field of semiconductor technology. The dual-cavity lifting type wafer transfer device includes a dual-cavity chamber, a mounting seat, a lifting frame, a driving motor, a transmission mechanism, a displacement difference detection element and two lifting parts. The dual-cavity chamber is provided with two transfer cavities, the mounting seat is connected to the dual-cavity chamber, the driving motor is installed on the mounting seat, and is connected to the lifting frame through the transmission mechanism, the two lifting parts are relatively installed at the two ends of the lifting frame, each lifting part extends into a transfer cavity, and the displacement difference detection element is installed on the lifting frame. The dual-cavity lifting type wafer transfer device provided by the present invention can realize the synchronous lifting of two wafers in the dual cavity, so as to facilitate the synchronous loading and unloading of the two wafers in time, ensure the continuity of the transfer process, improve the transfer efficiency, and improve the production capacity.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a dual-cavity lifting type wafer transfer device. Background Art

[0002] At present, in the process of using semiconductor equipment to deposit wafers, the loading and unloading functions of wafers are generally realized through the joint action of the robot and the lifting mechanism in the transfer device. If the transfer device is a dual-chamber type (capable of transferring two wafers at the same time), there are two lifting mechanisms, which are independently controlled and used to drive the two wafers up or down respectively. However, in this way, the synchronization of the two lifting mechanisms is poor, and the lifting and lowering actions of the two lifting mechanisms are prone to delays, resulting in the robot being unable to load the two wafers to the transfer device synchronously in time, and unable to unload the two wafers synchronously in time (because the two lifting mechanisms are lifted and lowered one after the other, the robot can only wait until the two lifting mechanisms are in place before loading and unloading the two wafers synchronously), which directly affects the continuity of the transfer process, reduces transfer efficiency, and reduces production capacity.

[0003] In view of this, it is particularly important to design and manufacture a dual-cavity lifting wafer transfer device that can be lifted and lowered synchronously and has high transfer efficiency, especially in semiconductor production. Summary of the invention

[0004] The purpose of the present invention is to provide a dual-cavity lifting type wafer transfer device, which can realize the synchronous lifting and lowering of two wafers in the dual cavity, so as to facilitate the synchronous loading and unloading of the two wafers in time, ensure the continuity of the transfer process, improve the transfer efficiency, and increase the production capacity.

[0005] The present invention is achieved by adopting the following technical solutions.

[0006] A dual-cavity lifting type wafer transfer device comprises a dual-cavity chamber, a mounting seat, a lifting frame, a driving motor, a transmission mechanism, a displacement difference detection element and two lifting members, wherein two transfer cavities are arranged between the dual-cavity chamber, the mounting seat is connected to the dual-cavity chamber, the driving motor is mounted on the mounting seat and is connected to the lifting frame through the transmission mechanism, the two lifting members are relatively mounted at two ends of the lifting frame, each lifting member extends into a transfer cavity, each lifting member is used to carry a wafer, the driving motor is used to synchronously drive the two lifting members to rise or fall through the lifting frame, the displacement difference detection element is mounted on the lifting frame, the displacement difference detection element is used to detect the displacement difference between the two ends of the lifting frame in the lifting direction, and control the driving motor to pause when the displacement difference is greater than or equal to a preset difference.

[0007] Optionally, the transmission mechanism includes a coupling, a screw, a nut and a sleeve. The drive motor is connected to the screw through the coupling. The screw passes through the nut and cooperates with the nut thread. The sleeve is installed on the lifting frame and is sleeved outside the nut.

[0008] Optionally, the jacket includes a sleeve portion, a connecting portion, a first movable portion and a second movable portion, the first movable portion and the second movable portion are relatively arranged at two ends of the connecting portion and are both connected to the connecting portion, the first movable portion and the second movable portion are spaced apart and connected by an adjusting screw, the sleeve portion is connected to the connecting portion and is spaced apart from the first movable portion and the second movable portion at the same time, the first movable portion and the lifting frame are connected by a first fixing screw, the sleeve portion is sleeved outside a part of the nut, the connecting portion, the first movable portion and the second movable portion are jointly surrounded outside another part of the nut, and the adjusting screw is used to adjust the distance between the first movable portion and the second movable portion to tighten or loosen the nut.

[0009] Optionally, the nut is made of an elastic material, and the nut can be elastically deformed under the action of the adjusting screw to ensure the matching accuracy between the nut and the lead screw.

[0010] Optionally, the lifting frame is provided with a clearance hole, the sleeve portion is arranged through the clearance hole, and the connecting portion, the first movable portion and the second movable portion are all arranged in close contact with the lifting frame.

[0011] Optionally, the transmission mechanism also includes a positioning block, which is arranged on a side of the first movable part away from the sleeve part and connected to the first movable part through a second fixing screw. A flange is provided at one end of the sleeve part away from the connecting part, and the nut is clamped between the flange and the positioning block.

[0012] Optionally, the positioning block is arranged in an arc shape, is arranged outside the lead screw, and is coaxial with the lead screw and arranged at intervals.

[0013] Optionally, the mounting seat is provided with a slide rail, the lifting frame is provided with a slider, the extension direction of the slide rail is the same as the lifting direction of the lifting frame, and the slider is slidably matched with the slide rail.

[0014] Optionally, the lifting frame includes a matching block, two connecting arms and two reinforcing ribs, the two connecting arms are relatively arranged on both sides of the matching block and are both connected to the matching block, the matching block is connected to the transmission mechanism, each reinforcing rib is simultaneously connected to the matching block and a connecting arm, and each lifting member is installed at the free end of a connecting arm.

[0015] Optionally, the lifting frame also includes two bellows, each bellows is sleeved outside a lifting member, one end of the bellows is connected to the connecting arm, and the other end is connected to the double-chamber chamber, and the bellows is connected to the transfer cavity.

[0016] Optionally, the displacement difference detection element includes a first sensor, a controller and a second sensor, the first sensor is installed at one end of the lifting frame, and the second sensor is installed at the other end of the lifting frame, the first sensor and the second sensor are both electrically connected to the controller, and the controller is electrically connected to the drive motor, the first sensor is used to detect a first displacement of one end of the lifting frame in the lifting direction, and the second sensor is used to detect a second displacement of the other end of the lifting frame in the lifting direction, and the controller is used to calculate the displacement difference based on the first displacement and the second displacement, and control the drive motor to pause when the displacement difference is greater than or equal to a preset difference.

[0017] Optionally, the first sensor includes a scale grating and a grating reading head. The grating reading head is installed at the end of the lifting frame and is electrically connected to the controller. The scale grating is connected to the double-cavity chamber and extends along the lifting direction of the lifting frame. The grating reading head is used to read the reading on the scale grating.

[0018] The dual-cavity lifting type wafer transfer device provided by the present invention has the following beneficial effects:

[0019] The dual-cavity lifting type wafer transfer device provided by the present invention has two transfer cavities arranged between the dual-cavity chambers, a mounting seat connected to the dual-cavity chambers, a driving motor mounted on the mounting seat and connected to the lifting frame through a transmission mechanism, two lifting parts relatively mounted at the two ends of the lifting frame, each lifting part extending into a transfer cavity, each lifting part used to carry a wafer, a driving motor used to synchronously drive the two lifting parts to rise or fall through the lifting frame, a displacement difference detection element mounted on the lifting frame, the displacement difference detection element used to detect the displacement difference between the two ends of the lifting frame in the lifting direction, and control the driving motor to pause when the displacement difference is greater than or equal to a preset difference. Compared with the prior art, the dual-cavity lifting type wafer transfer device provided by the present invention can realize the synchronous lifting and lowering of the two wafers in the dual cavities due to the use of two lifting parts relatively mounted at the two ends of the lifting frame and the displacement difference detection element mounted on the lifting frame, so as to facilitate the synchronous loading and unloading of the two wafers in a timely manner, ensure the continuity of the transfer process, improve the transfer efficiency, and improve the production capacity. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0021] Figure 1 A schematic diagram of the structure of a dual-cavity lifting wafer transfer device provided by an embodiment of the present invention;

[0022] Figure 2A schematic diagram of the structure in which a driving motor in a dual-chamber lifting wafer transfer device provided by an embodiment of the present invention is connected to a lifting frame through a transmission mechanism;

[0023] Figure 3 for Figure 2 Schematic diagram of the structure of the middle jacket;

[0024] Figure 4 A cross-sectional view showing a dual-chamber lifting wafer transfer device provided by an embodiment of the present invention, in which a driving motor is connected to a lifting frame through a transmission mechanism;

[0025] Figure 5 for Figure 4 A partial enlarged view of the middle V;

[0026] Figure 6 A schematic structural diagram of the connection between the transmission mechanism and the lifting frame in the dual-cavity lifting type wafer transfer device provided in an embodiment of the present invention.

[0027] Icons: 100-dual-chamber lifting wafer transfer device; 110-dual-chamber chamber; 111-transfer cavity; 120-mounting seat; 121-slide rail; 130-lifting frame; 131-allowance hole; 132-slider; 133-matching block; 134-connecting arm; 135-reinforcement rib; 136-bellows; 140-drive motor; 150-transmission mechanism; 151-coupling; 152-screw; 153-nut; 154- Jacket; 1541-sleeve part; 1542-connecting part; 1543-first movable part; 1544-second movable part; 1545-flange; 155-adjusting screw; 156-first set screw; 157-positioning block; 158-second set screw; 160-displacement difference detection element; 161-first sensor; 1611-scale grating; 1612-grating reading head; 162-second sensor; 170-lifting member. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0029] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0031] In the description of the present invention, it should be noted that the terms "inside", "outside", "upper", "lower", "horizontal", etc. indicate the orientation or position relationship based on the orientation or position relationship shown in the drawings, or the orientation or position relationship in which the product of the invention is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0032] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "set", "connect", "install", and "connect" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] Some embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the absence of conflict, the features of the following embodiments can be combined with each other.

[0034] Please refer to Figures 1 to 6 The embodiment of the present invention provides a dual-chamber lifting type wafer transfer device 100 for transferring wafers (not shown). It can realize the synchronous lifting and lowering of two wafers in the dual chambers, so as to facilitate the synchronous loading and unloading of the two wafers in time, ensure the continuity of the transfer process, improve the transfer efficiency, and increase the production capacity.

[0035] The dual-chamber lifting wafer transfer device 100 includes a dual-chamber chamber 110, a mounting seat 120, a lifting frame 130, a driving motor 140, a transmission mechanism 150, a displacement difference detection element 160 and two lifting members 170. The dual-chamber chamber 110 is provided with two transfer cavities 111 at intervals, and each transfer cavity 111 is used to accommodate a wafer, so as to transfer two wafers at the same time. The mounting seat 120 is connected to the dual-chamber chamber 110, and the mounting seat 120 is arranged below the dual-chamber chamber 110, and the dual-chamber chamber 110 can fix the position of the mounting seat 120. The driving motor 140 is installed on the mounting seat 120, and is connected to the lifting frame 130 through the transmission mechanism 150. The driving motor 140 can drive the lifting frame 130 to rise or fall through the transmission mechanism 150. Specifically, two lifting members 170 are relatively installed at both ends of the lifting frame 130, and each lifting member 170 extends into a transfer cavity 111. Each lifting member 170 is used to carry a wafer. The driving motor 140 is used to synchronously drive the two lifting members 170 to rise or fall through the lifting frame 130 to achieve synchronous lifting and lowering of the two wafers in the dual cavity, thereby facilitating timely synchronous loading and unloading of the two wafers, ensuring the continuity of the transfer process, improving transfer efficiency, and increasing production capacity.

[0036] Furthermore, the displacement difference detection element 160 is installed on the lifting frame 130. The displacement difference detection element 160 is used to detect the displacement difference between the two ends of the lifting frame 130 in the lifting direction, and control the driving motor 140 to pause when the displacement difference is greater than or equal to the preset difference. Specifically, when the displacement difference between the two ends of the lifting frame 130 in the lifting direction is greater than or equal to the preset difference, it means that the lifting frame 130 is tilted, and the lifting synchronization between the two ends of the lifting frame 130 is poor, which directly affects the synchronous loading and unloading of the two wafers. At this time, the displacement difference detection element 160 controls the driving motor 140 to pause and sends an alarm to the staff to prompt the staff to inspect and maintain the entire dual-cavity lifting wafer transfer device 100 to ensure that the displacement difference between the two ends of the lifting frame 130 in the lifting direction is less than the preset difference.

[0037] The transmission mechanism 150 includes a coupling 151, a lead screw 152, a nut 153 and a jacket 154. The drive motor 140 is connected to the lead screw 152 through the coupling 151. The drive motor 140 can drive the lead screw 152 to rotate through the coupling 151. The coupling 151 is used to ensure transmission stability and transmission efficiency. Specifically, the lead screw 152 is set through the nut 153 and is threaded with the nut 153. The jacket 154 is installed on the lifting frame 130 and is sleeved outside the nut 153. The jacket 154 is used to fix the relative position of the nut 153 and the lifting frame 130. The lead screw 152 can drive the nut 153 to move along the axial direction of the lead screw 152 during the rotation process, thereby driving the lifting frame 130 to rise or fall through the jacket 154, and then driving the two lifting members 170 installed at both ends of the lifting frame 130 to rise or fall, so as to facilitate the timely synchronous loading and unloading of two wafers.

[0038] The jacket 154 includes a sleeve portion 1541, a connecting portion 1542, a first movable portion 1543, and a second movable portion 1544. The first movable portion 1543 and the second movable portion 1544 are disposed at opposite ends of the connecting portion 1542 and are both connected to the connecting portion 1542. The first movable portion 1543 and the second movable portion 1544 can both move relative to the connecting portion 1542. The first movable portion 1543 and the second movable portion 1544 are disposed at intervals and connected by an adjusting screw 155. The adjusting screw 155 can adjust the interval between the first movable portion 1543 and the second movable portion 1544. The first movable portion 1543 and the second movable portion 1544 can move relative to the connecting portion 1542 during the interval adjustment process. The sleeve portion 1541 is connected to the connecting portion 1542 and is disposed at intervals from the first movable portion 1543 and the second movable portion 1544 to avoid interference with the movement of the first movable portion 1543 and the second movable portion 1544 during the interval adjustment process, thereby ensuring the stability of the interval adjustment process.

[0039] Furthermore, the first movable portion 1543 and the lifting frame 130 are connected by a first set screw 156, and the first set screw 156 is used to fix the relative position of the first movable portion 1543 and the lifting frame 130 to prevent the first movable portion 1543 from being separated from the lifting frame 130, thereby preventing the jacket 154 from being separated from the lifting frame 130. Specifically, since the position of the first movable portion 1543 is limited, when the adjustment screw 155 adjusts the distance between the first movable portion 1543 and the second movable portion 1544, the first movable portion 1543 remains stationary, and the second movable portion 1544 moves relative to the connecting portion 1542 and approaches or moves away from the first movable portion 1543.

[0040] It should be noted that the sleeve portion 1541 is sleeved outside a portion of the nut 153, the sleeve portion 1541 and the nut 153 are coaxially arranged, the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 are jointly arranged outside another portion of the nut 153, and the sleeve portion 1541, the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 work together to limit the position of the nut 153. Specifically, the nut 153 is sandwiched between the first movable portion 1543 and the second movable portion 1544, and the adjusting screw 155 is used to adjust the distance between the first movable portion 1543 and the second movable portion 1544 to clamp or loosen the nut 153, thereby facilitating the installation and removal of the nut 153 and improving maintenance efficiency.

[0041] In this embodiment, the sleeve portion 1541 , the connecting portion 1542 , the first movable portion 1543 and the second movable portion 1544 are integrally formed to improve the connection strength.

[0042] Preferably, the nut 153 is made of an elastic material, and the nut 153 can be elastically deformed under the action of the adjusting screw 155 to ensure the matching accuracy of the nut 153 and the lead screw 152, so as to accurately control the lifting height of the lifting frame 130. Specifically, since the first movable part 1543 and the lifting frame 130 are connected by the first set screw 156, the gravity of the lifting frame 130 is transmitted to the nut 153 through the first movable part 1543. Therefore, in the process of the driving motor 140 driving the lifting frame 130 to rise and fall, the part of the nut 153 corresponding to the position of the first movable part 1543 (the part of the nut 153 sandwiched between the first movable part 1543 and the second movable part 1544) is subjected to the greatest force, so that the wear of the part of the nut 153 in the process of threaded matching with the lead screw 152 is also the greatest. When the wear of the part of the nut 153 reaches a certain degree, the matching accuracy of the nut 153 and the lead screw 152 will be affected. In this regard, in the present invention, when the partial nut 153 is worn to a certain extent, the adjustment screw 155 is used to reduce the distance between the first movable part 1543 and the second movable part 1544 to clamp the partial nut 153 and cause it to elastically deform, so that the partial nut 153 and the lead screw 152 are tightly matched again, thereby ensuring the matching accuracy of the nut 153 and the lead screw 152.

[0043] In this embodiment, the nut 153 is made of metal or alloy material, preferably tin bronze, which has good elasticity and can undergo adaptive elastic deformation along with the first movable part 1543 and the second movable part 1544, but is not limited to this. In other embodiments, the nut 153 can also be made of other materials, and the material of the nut 153 is not specifically limited.

[0044] In this embodiment, the lifting frame 130 is provided with a clearance hole 131, the sleeve portion 1541 is arranged through the clearance hole 131, and the connecting portion 1542, the first movable portion 1543 and the second movable portion 1544 are all arranged in close contact with the lifting frame 130 to ensure the reliability of the connection between the jacket 154 and the lifting frame 130. The lead screw 152 is arranged through the jacket 154 from bottom to top, and is threadedly matched with the nut 153 in the jacket 154.

[0045] Preferably, the transmission mechanism 150 further includes a positioning block 157. The positioning block 157 is disposed on a side of the first movable portion 1543 away from the sleeve portion 1541, and is connected to the first movable portion 1543 via a second set screw 158. The second set screw 158 is used to fix the relative position of the first movable portion 1543 and the positioning block 157, and prevent the positioning block 157 from being separated from the first movable portion 1543. Specifically, a flange 1545 is disposed at one end of the sleeve portion 1541 away from the connecting portion 1542, and the nut 153 is clamped between the flange 1545 and the positioning block 157. The flange 1545 and the positioning block 157 work together to limit the nut 153, and prevent the nut 153 from moving up and down relative to the jacket 154, thereby ensuring the stability of the nut 153 driving the lifting frame 130 to rise and fall through the jacket 154 under the action of the rotation of the lead screw 152.

[0046] Furthermore, the positioning block 157 is arranged in an arc shape, and the positioning block 157 is arranged outside the screw 152, and is coaxial with the screw 152 and arranged at a distance to avoid interfering with the rotation of the screw 152. The nut 153 is abutted against the positioning block 157, and the positioning block 157 can support and position the nut 153 to prevent the nut 153 from falling out of the sleeve 154.

[0047] In this embodiment, the positioning block 157 is arranged in a semicircular shape, and the projection of the positioning block 157 on the plane where the first movable part 1543 is located completely falls within the first movable part 1543. Since the first movable part 1543 is connected to the lifting frame 130 through the first fastening screw 156, and the positioning block 157 is connected to the first movable part 1543 through the second fastening screw 158, the relative position between the positioning block 157 and the lifting frame 130 is fixed, ensuring the positioning effect of the positioning block 157 on the nut 153.

[0048] It is worth noting that when the nut 153 is severely worn and needs to be replaced, first loosen the second fixing screw 158 to remove the positioning block 157; then loosen the adjusting screw 155 to release the limiting function of the first movable part 1543 and the second movable part 1544. At this time, the first movable part 1543 and the second movable part 1544 no longer clamp the nut 153; then take out the old nut 153 in the jacket 154, and install the new nut 153 into the jacket 154; then tighten the adjusting screw 155 to clamp the nut 153 through the first movable part 1543 and the second movable part 1544; then install the positioning block 157, and tighten the second fixing screw 158 to complete the replacement of the nut 153.

[0049] Preferably, the mounting seat 120 is provided with a slide rail 121, and the lifting frame 130 is provided with a slider 132. The extension direction of the slide rail 121 is the same as the lifting direction of the lifting frame 130. The lifting direction of the lifting frame 130 is the axial direction of the lead screw 152. The slider 132 slides with the slide rail 121. The slider 132 can slide corresponding to the slide rail 121. The slide rail 121 can guide and limit the slider 132 so that the lifting frame 130 can only rise or fall along the axial direction of the lead screw 152, thereby preventing the lifting frame 130 from tilting or deflecting.

[0050] The lifting frame 130 includes a matching block 133, two connecting arms 134 and two reinforcing ribs 135. The two connecting arms 134 are arranged on both sides of the matching block 133 and are connected to the matching block 133. The matching block 133 is connected to the jacket 154 of the transmission mechanism 150. The driving motor 140 can drive the matching block 133 to rise or fall through the transmission mechanism 150, so as to drive the entire lifting frame 130 to rise or fall. Specifically, each reinforcing rib 135 is connected to the matching block 133 and one connecting arm 134 at the same time to improve the structural strength of the entire lifting frame 130. Each lifting member 170 is installed at the free end of a connecting arm 134. The connecting arm 134 can drive the lifting member 170 to rise or fall, so as to drive the wafer on the lifting member 170 to rise or fall.

[0051] Preferably, the lifting frame 130 further includes two bellows 136. Each bellows 136 is sleeved outside a lifting member 170, one end of the bellows 136 is connected to the connecting arm 134, and the other end is connected to the dual-chamber chamber 110. The bellows 136 is in communication with the transfer cavity 111, and the bellows 136 is used to connect to the air pipe installed on the connecting arm 134 to achieve air intake or exhaust of the transfer cavity 111 and prevent the gas in the transfer cavity 111 from leaking out. Specifically, during the lifting process of the lifting frame 130, since the dual-chamber chamber 110 remains stationary, the distance between the lifting frame 130 and the dual-chamber chamber 110 changes continuously, and the height of the lifting member 170 extending into the transfer cavity 111 also changes continuously. During this process, the bellows 136 stretches or contracts to ensure air tightness and prevent gas leakage.

[0052] The displacement difference detection element 160 includes a first sensor 161, a controller (not shown) and a second sensor 162. The first sensor 161 is installed at one end of the lifting frame 130, and the second sensor 162 is installed at the other end of the lifting frame 130. The first sensor 161 and the second sensor 162 are both electrically connected to the controller, and the controller is electrically connected to the drive motor 140. Specifically, the first sensor 161 is used to detect a first displacement of one end of the lifting frame 130 in the lifting direction, and the second sensor 162 is used to detect a second displacement of the other end of the lifting frame 130 in the lifting direction. The controller is used to calculate the displacement difference according to the first displacement and the second displacement, and judge the size of the displacement difference and the preset difference. When the displacement difference is greater than or equal to the preset difference, the controller controls the drive motor 140 to pause, and prompts the staff to perform maintenance on the entire dual-cavity lifting wafer transfer device 100 to ensure that the displacement difference between the two ends of the lifting frame 130 in the lifting direction is less than the preset difference.

[0053] In this embodiment, the preset difference is 0.5 mm, but is not limited thereto. In other embodiments, the preset difference may be 0.3 mm or 0.8 mm, and the size of the preset difference is not specifically limited.

[0054] The first sensor 161 includes a scale grating 1611 and a grating reading head 1612. The grating reading head 1612 is installed at the end of the lifting frame 130 and is electrically connected to the controller. The scale grating 1611 is connected to the double-chamber chamber 110 and is extended along the lifting direction of the lifting frame 130. Specifically, the grating reading head 1612 is used to read the reading on the scale grating 1611, and obtain the first displacement according to the reading, and then send the first displacement data to the controller.

[0055] In this embodiment, the specific structure of the second sensor 162 is the same as the specific structure of the first sensor 161 , and will not be described in detail herein.

[0056] The dual-chamber lifting wafer transfer device 100 provided in the embodiment of the present invention has a dual-chamber chamber 110 with two transfer cavities 111 arranged at intervals, a mounting seat 120 connected to the dual-chamber chamber 110, a driving motor 140 mounted on the mounting seat 120, and connected to the lifting frame 130 through a transmission mechanism 150, two lifting members 170 are relatively mounted at two ends of the lifting frame 130, each lifting member 170 extends into a transfer cavity 111, each lifting member 170 is used to carry a wafer, the driving motor 140 is used to synchronously drive the two lifting members 170 to rise or fall through the lifting frame 130, a displacement difference detection element 160 is mounted on the lifting frame 130, the displacement difference detection element 160 is used to detect the displacement difference between the two ends of the lifting frame 130 in the lifting direction, and control the driving motor 140 to pause when the displacement difference is greater than or equal to a preset difference. Compared with the prior art, the dual-chamber lifting type wafer transfer device 100 provided by the present invention adopts two lifting parts 170 relatively installed at both ends of the lifting frame 130 and a displacement difference detection element 160 installed on the lifting frame 130. Therefore, it can realize the synchronous lifting and lowering of the two wafers in the dual chamber, so as to facilitate the synchronous loading and unloading of the two wafers in time, ensure the continuity of the transfer process, improve the transfer efficiency, and increase the production capacity.

[0057] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A dual-chamber lifting wafer transfer device, characterized in that: It comprises a double-chamber chamber, a mounting seat, a lifting frame, a driving motor, a transmission mechanism, a displacement difference detection element and two lifting members, wherein the double-chamber chamber is provided with two transfer cavities, the mounting seat is connected to the double-chamber chamber, the driving motor is mounted on the mounting seat and connected to the lifting frame through the transmission mechanism, the two lifting members are relatively mounted at two ends of the lifting frame, each of the lifting members extends into one of the transfer cavities, each of the lifting members is used to carry a wafer, the driving motor is used to synchronously drive the two lifting members to rise or fall through the lifting frame, the displacement difference detection element is mounted on the lifting frame, the displacement difference detection element is used to detect the displacement difference between the two ends of the lifting frame in the lifting direction, and control the driving motor to pause when the displacement difference is greater than or equal to a preset difference value; The transmission mechanism includes a coupling, a lead screw, a nut and a jacket, the drive motor is connected to the lead screw through the coupling, the lead screw passes through the nut and is threadedly matched with the nut, and the jacket is installed on the lifting frame and sleeved outside the nut; The jacket includes a sleeve portion, a connecting portion, a first movable portion and a second movable portion. The first movable portion and the second movable portion are relatively arranged at two ends of the connecting portion and are both connected to the connecting portion. The first movable portion and the second movable portion are spaced apart and connected by an adjusting screw. The sleeve portion is connected to the connecting portion and is spaced apart from the first movable portion and the second movable portion at the same time. The first movable portion and the lifting frame are connected by a first set screw. The sleeve portion is sleeved outside a portion of the nut. The connecting portion, the first movable portion and the second movable portion are jointly surrounded outside another portion of the nut. The adjusting screw is used to adjust the distance between the first movable portion and the second movable portion to tighten or loosen the nut.

2. The dual-chamber lifting wafer transfer device according to claim 1, characterized in that: The nut is made of an elastic material and can be elastically deformed under the action of the adjusting screw to ensure the matching accuracy between the nut and the lead screw.

3. The dual-chamber lifting wafer transfer device according to claim 1, characterized in that: The lifting frame is provided with a clearance hole, the sleeve portion is arranged through the clearance hole, and the connecting portion, the first movable portion and the second movable portion are all arranged in close contact with the lifting frame.

4. The dual-chamber lifting wafer transfer device according to claim 1, characterized in that: The transmission mechanism also includes a positioning block, which is arranged on a side of the first movable part away from the sleeve part and is connected to the first movable part through a second set screw. A flange is provided at one end of the sleeve part away from the connecting part, and the nut is clamped between the flange and the positioning block.

5. The dual-chamber lifting wafer transfer device according to claim 4, characterized in that: The positioning block is arranged in an arc shape, is arranged outside the lead screw, and is coaxial with the lead screw and arranged at intervals.

6. The dual-chamber lifting wafer transfer device according to any one of claims 1 to 5, characterized in that: The mounting seat is provided with a slide rail, and the lifting frame is provided with a slider. The extending direction of the slide rail is the same as the lifting direction of the lifting frame, and the slider is slidably matched with the slide rail.

7. The dual-chamber lifting wafer transfer device according to any one of claims 1 to 5, characterized in that: The lifting frame includes a matching block, two connecting arms and two reinforcing ribs. The two connecting arms are relatively arranged on both sides of the matching block and are both connected to the matching block. The matching block is connected to the transmission mechanism. Each reinforcing rib is simultaneously connected to the matching block and one of the connecting arms. Each lifting member is installed at the free end of one of the connecting arms.

8. The dual-chamber lifting type wafer transfer device according to claim 7, characterized in that: The lifting frame also includes two bellows, each of which is sleeved outside one of the lifting components, one end of the bellows is connected to the connecting arm, and the other end is connected to the double-chamber chamber, and the bellows is in communication with the transfer cavity.

9. The dual-chamber lifting wafer transfer device according to any one of claims 1 to 5, characterized in that: The displacement difference detection element includes a first sensor, a controller, and a second sensor. The first sensor is installed at one end of the lifting frame, and the second sensor is installed at the other end of the lifting frame. The first sensor and the second sensor are both electrically connected to the controller, and the controller is electrically connected to the drive motor. The first sensor is used to detect a first displacement of one end of the lifting frame in a lifting direction, and the second sensor is used to detect a second displacement of the other end of the lifting frame in the lifting direction. The controller is used to calculate the displacement difference according to the first displacement and the second displacement, and control the drive motor to pause when the displacement difference is greater than or equal to the preset difference.

10. The dual-chamber lifting type wafer transfer device according to claim 9, characterized in that: The first sensor includes a scale grating and a grating reading head. The grating reading head is installed at the end of the lifting frame and is electrically connected to the controller. The scale grating is connected to the double-chamber chamber and extends along the lifting direction of the lifting frame. The grating reading head is used to read the reading on the scale grating.

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