Multi-chamber vacuum coating equipment

Abstract

The present invention relates to the field of vacuum coating technology, and discloses a multi-chamber vacuum coating equipment, which includes a plurality of chambers, each chamber includes two oppositely arranged chamber walls, wherein an isolation gate valve is arranged between an inlet and outlet chamber and an adjacent chamber, and further includes a chamber door, wherein the chamber door, the chamber wall and the isolation gate valve jointly enclose the inlet and outlet chamber, and the chamber door is movably hinged on the inlet and outlet end of the inlet and outlet chamber so that the chamber door forms a mounting portion toward one side of the inlet and outlet chamber. The invention has the advantages of reducing cost and floor space.

Description

Technical Field

[0001] The present invention relates to the field of vacuum coating technology, and in particular to a multi-chamber vacuum coating device. Background Art

[0002] Vacuum coating is an important aspect of vacuum application field. It is based on vacuum technology, uses physical or chemical methods, and absorbs a series of new technologies such as electron beam, molecular beam, ion beam, plasma beam, radio frequency and magnetron to provide a new process for thin film preparation for scientific research and practical production.

[0003] Before coating, the workpiece needs to be heated and cleaned to exhaust the gas and moisture in the workpiece and remove pollutants on the surface of the workpiece. Before coating, there are impurities such as gas and moisture inside the workpiece. These impurities will be discharged into the vacuum chamber after heating, reducing the vacuum degree and even some gases contain toxic components, which will directly damage the mechanical structure in the vacuum chamber and cause the equipment to not operate normally. In addition, during the coating process, the gas in the workpiece itself will expand due to heating, which can easily cause the film layer that has been coated to crack. Therefore, it is very necessary to heat and exhaust the workpiece before coating.

[0004] At present, in continuous multi-chamber vacuum coating equipment, lifting isolation gate valves are used for opening and closing between each chamber and at the entrance and exit ends of the chamber. The workpieces to be coated are mounted on a rotatable transmission hub and spliced ​​into a polygonal cylindrical structure. The transmission hub moves between the chambers along the axial direction. Therefore, functional modules such as heating devices or cleaning devices can only be arranged on the chamber walls on both sides of the moving direction of the transmission hub, and the arrangement space on the chamber wall is limited (it cannot interfere with the movement of the transmission hub). It is often necessary to set up multiple chambers to arrange the functional modules for processing. This not only increases the manufacturing cost of the equipment, but also increases the floor space. Summary of the invention

[0005] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a multi-chamber vacuum coating device with reduced cost and floor space.

[0006] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0007] A multi-chamber vacuum coating equipment, the vacuum coating equipment includes multiple chambers, each chamber includes two oppositely arranged chamber walls, wherein an isolation gate valve is provided between an entrance and exit chamber and an adjacent chamber, and also includes a chamber door, the chamber door, the chamber wall and the isolation gate valve together enclose an entrance and exit chamber, the chamber door is movably hinged on the entrance and exit ends of the entrance and exit chamber so that the chamber door forms a mounting portion toward one side of the entrance and exit chamber.

[0008] As a further improvement of the above technical solution:

[0009] A first heating device is arranged on one of the two cavity walls, and a first cleaning device is arranged on the other cavity wall. A second heating device that cooperates with the first heating device to form a supplementary temperature is installed on the installation portion.

[0010] The mounting portion is configured as a cavity, the second heating device is mounted in the cavity, and a second cleaning device or an evaporation and dripping device is also disposed in the cavity.

[0011] The second heating device comprises two heating components, and the second cleaning device or evaporation and dripping device is arranged between the two heating components.

[0012] The heating assembly comprises a connecting plate and a heating plate. The connecting plate is connected in the mounting portion by bolts. The connecting plate is provided with an inclined surface close to the workpiece, and the heating plate is mounted on the inclined surface.

[0013] The in-and-out direction of the workpiece in the inlet and outlet chamber is defined as the horizontal direction. The connection plate is provided with an adjustment waist hole for bolt connection, and the connection position can be adjusted to change the distance between the heating plate and the workpiece.

[0014] The heating plate is configured as an arc-shaped plate close to the surface of the workpiece.

[0015] The evaporation and dripping device comprises two mounting columns and a plurality of crucibles. The two mounting columns are fixed in the mounting part, and the crucibles are arranged between the two mounting columns at intervals.

[0016] It also includes a driving mechanism and a clamping mechanism. The driving mechanism is arranged on the entrance and exit end near the hinge point of the chamber door and drives the chamber door to rotate around the hinge point. The clamping mechanism is installed at the end of the chamber door away from the hinge point and is clamped at the corresponding entrance and exit after the chamber door is closed.

[0017] The chamber door is movably hinged on any one of the left and right ends of the entrance and exit.

[0018] The chamber door is movably hinged at the upper end of the access end.

[0019] Compared with the prior art, the advantages of the present invention are:

[0020] The multi-chamber vacuum coating equipment of the present invention, by hingedly arranging a chamber door on the entrance and exit ends of the entrance and exit chambers, can seal the entrance and exit chambers when closed to ensure the vacuum degree, and is convenient for the entry and exit of the transmission hub for mounting the workpiece when opened. Compared with the existing lifting isolation gate valve, a heating device can be additionally arranged on the chamber door for supplementary heating, which has a good heating effect, thoroughly degasses the workpiece, and improves the coating quality. In addition, a heating device is arranged on the chamber door, which cooperates with the heating device on the chamber wall to heat the workpiece in multiple directions and evenly. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is an application schematic diagram (front view) of embodiment 1 of the present invention.

[0022] Figure 2 Schematic diagram of the application of embodiment 1 of the present invention (closed state).

[0023] Figure 3 yes Figure 2 Enlarged view of point A in the middle.

[0024] Figure 4 This is an application diagram of Example 1 of the present invention (in the open state).

[0025] Figure 5 It is a structural schematic diagram (stereoscopic diagram) of embodiment 1 of the present invention.

[0026] Figure 6 2 is an application diagram of embodiment 2 of the present invention (closed state).

[0027] Figure 7 This is an application diagram of Example 3 of the present invention (in the open state).

[0028] The symbols in the figure represent:

[0029] 1. Chamber door; 11. Mounting part; 2. Chamber wall; 3. Isolation gate valve; 4. First heating device; 5. First cleaning device; 6. Second heating device; 61. Heating assembly; 611. Connecting plate; 6111. Adjusting waist hole; 612. Heating plate; 7. Second cleaning device; 8. Evaporation dripping device; 81. Mounting column; 82. Crucible; 9. Driving mechanism; 10. Clamping mechanism; 100. Transmission hub. DETAILED DESCRIPTION

[0030] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Embodiment 1:

[0032] like Figures 1 to 5As shown, the first embodiment of the multi-chamber vacuum coating equipment of the present invention is a multi-chamber vacuum coating equipment, the vacuum coating equipment includes a plurality of chambers, each chamber includes two oppositely arranged chamber walls 2, wherein an isolation gate valve 3 is provided between the inlet and outlet chamber and the adjacent chamber, and also includes a chamber door 1, the chamber door 1, the chamber wall 2 and the isolation gate valve 3 together enclose the inlet and outlet chamber, the chamber door 1 is movably hinged on the inlet and outlet ends of the inlet and outlet chamber so that the chamber door 1 forms a mounting portion 11 facing the side of the inlet and outlet chamber. The present invention movably hinges a chamber door 1 on the inlet and outlet ends of the inlet and outlet chamber, and compared with the traditional lifting gate valve, a mounting portion 11 can be formed on the chamber door 1 to install various functional modules, thereby improving space utilization, thereby reducing the number of chambers of the vacuum coating equipment, reducing costs and reducing the site occupied area.

[0033] In this embodiment, a first heating device 4 is arranged on one of the two cavity walls 2, a first cleaning device 5 is arranged on the other cavity wall 2, and a second heating device 6 is installed on the mounting portion 11 to cooperate with the first heating device 4 to form a supplementary temperature. The second heating device 6 is installed to heat and degas the workpiece in the chamber, and it cooperates with the first heating device 4 installed on the cavity wall 2 to perform supplementary heating, so that the heating is uniform and the effect is better, and the degassing is thorough, thereby improving the coating quality.

[0034] In this embodiment, the mounting portion 11 is configured as a cavity, the second heating device 6 is mounted in the cavity, and an evaporation dripping device 8 is also disposed in the cavity. By arranging the evaporation dripping device 8 for evaporation, the cleaning, heating and coating processes of the workpiece can be completed in the same cavity, with a compact structure and space saving.

[0035] In this embodiment, the second heating device 6 includes two heating components 61, and the evaporation dripping device 8 is arranged between the two heating components 61. In this structure, the second heating device is composed of two heating components 61, which increases the heating area and ensures the heating effect. The heating component 61 heats the workpiece to discharge the gas and moisture in the workpiece. It is used in conjunction with the first heating device 4 on one side of the cavity wall 2 to improve the heating and degassing effect. It is used in conjunction with the first cleaning device 5 on the other side of the cavity wall 2 to improve the cleaning effect.

[0036] In this embodiment, the heating assembly 61 includes a connecting plate 611 and a heating plate 612. The connecting plate 611 is connected to the mounting portion 11 by bolts. The connecting plate 611 is provided with an inclined surface close to the workpiece, and the heating plate 612 is installed on the inclined surface. In this structure, by installing the heating plate 612 on the inclined surface provided on the connecting plate 611, the heating plate 612 is closer to the workpiece on the transmission hub 100. In this way, when each workpiece on the transmission hub 100 rotates to this point, the difference in the distance of each workpiece to the heating plate 612 in the lateral direction is reduced, and the heating is more uniform.

[0037] In this embodiment, the in-and-out direction of the workpiece in the inlet and outlet chamber is defined as the horizontal direction, and the connecting plate 611 is provided with an adjustment waist hole 6111 for bolt connection, and the connection position can be adjusted to change the distance between the heating plate 612 and the workpiece. In this structure, the distance between the heating plate 612 and the workpiece is adjusted by adjusting the waist hole 6111 to meet the needs of workpieces (transmission hub 100) of different sizes.

[0038] In this embodiment, the heating plate 612 is configured as an arc-shaped plate close to the surface of the workpiece. In this structure, the arc-shaped plate is configured to further make the heating uniform.

[0039] In this embodiment, the evaporation dripping device 8 includes two mounting columns 81 and a plurality of crucibles 82. The two mounting columns 81 are fixedly mounted in the mounting portion 11, and the crucibles 82 are spaced apart between the two mounting columns 81. The structure is simple.

[0040] In this embodiment, a driving mechanism 9 and a clamping mechanism 10 are also included. The driving mechanism 9 is arranged on the inlet and outlet end near the hinge point of the chamber door 1 and drives the chamber door 1 to rotate around the hinge point. The clamping mechanism 10 is installed at the end of the chamber door 1 away from the hinge point and is clamped at the corresponding inlet and outlet end after the chamber door 1 is closed. In this structure, the chamber door 1 is driven to rotate around the hinge point by the driving mechanism 9. After closing, the inlet and outlet ends are clamped by the clamping mechanism 10 to ensure the sealing effect and meet the vacuum requirements. In this embodiment, the driving mechanism 9 is composed of a DC motor, a reducer and a connecting rod mechanism. The reducer is connected to the rotating shaft of the DC motor through a coupling. One end of the connecting rod mechanism is connected to the output end of the reducer, and the other end is connected to the chamber door 1. In other embodiments, the driving mechanism 9 can also be set as a cylinder or a hydraulic cylinder. The cylinder or hydraulic cylinder is movably hinged on the inlet and outlet end, and its output end is movably hinged to the chamber door 1; the clamping mechanism 10 is set as a lever clamping cylinder.

[0041] In this embodiment, the chamber door 1 is hinged on the right end of the access end. In this structure, the chamber door 1 rotates in the horizontal direction, and the load of the drive mechanism 9 is relatively small compared to the upside-down closing of the access end.

[0042] Embodiment 2:

[0043] like Figure 6 As shown, the second embodiment of the multi-chamber vacuum coating equipment of the present invention is basically the same as the embodiment 1, except that:

[0044] In this embodiment, a second cleaning device 7 is further provided in the mounting portion 11, and the second cleaning device 7 is provided between the two heating components 61. In this structure, the second cleaning device 7 is provided as an anode layer ion source, and the cleaning ability is improved on the basis of providing the first cleaning device 5, and the second cleaning device 7 is used in conjunction with the heating component 61 to further improve the cleaning effect.

[0045] Embodiment 3:

[0046] like Figure 7 As shown, the third embodiment of the multi-chamber vacuum coating equipment of the present invention is basically the same as the first embodiment, except that:

[0047] In this embodiment, the chamber door 1 is hinged at the upper end of the access end. Its structure is simple.

[0048] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A multi-chamber vacuum coating device, comprising a plurality of chambers, each chamber comprising two chamber walls (2) arranged opposite to each other, wherein an isolation gate valve (3) is arranged between an inlet and outlet chamber and an adjacent chamber, characterized in that: The invention also comprises a chamber door (1), wherein the chamber door (1), the chamber wall (2) and the isolation gate valve (3) together enclose an inlet and outlet chamber, wherein the chamber door (1) is movably hinged on the inlet and outlet ends of the inlet and outlet chamber so that the chamber door (1) faces the side of the inlet and outlet chamber to form a mounting portion (11), and further comprises a driving mechanism (9) and a clamping mechanism (10), wherein the driving mechanism (9) is arranged on the inlet and outlet end near the hinge point of the chamber door (1) and drives the chamber door (1) to rotate around the hinge point, and the clamping mechanism (10) is installed at the end of the chamber door (1) away from the hinge point and is clamped at the corresponding inlet and outlet end after the chamber door (1) is closed, and a first heating device (4) is arranged on one of the two chamber walls (2), and a second heating device (5) is arranged on the other chamber wall (2). A first cleaning device (5) is provided. A second heating device (6) is installed on the mounting portion (11) and cooperates with the first heating device (4) to form a compensation temperature. The second heating device (6) comprises two heating components (61). The heating component (61) comprises a connecting plate (611) and a heating plate (612). The connecting plate (611) is connected to the mounting portion (11) by bolts. The connecting plate (611) is provided with an inclined surface close to a workpiece. The heating plate (612) is installed on the inclined surface. The connecting plate (611) is provided with an adjustment waist hole (6111) for bolt connection and capable of adjusting the connection position to change the distance between the heating plate (612) and the workpiece. The heating plate (612) is arranged as an arc-shaped plate close to the surface of the workpiece.

2. The multi-chamber vacuum coating equipment according to claim 1, characterized in that: The mounting portion (11) is configured as a cavity, the second heating device (6) is mounted in the cavity, and a second cleaning device (7) or an evaporation dripping device (8) is also disposed in the cavity.

3. The multi-chamber vacuum coating equipment according to claim 2, characterized in that: The second cleaning device (7) or the evaporation dripping device (8) is arranged between the two heating components (61).

4. The multi-chamber vacuum coating equipment according to claim 3, characterized in that: The evaporation and dripping device (8) comprises two mounting columns (81) and a plurality of crucibles (82); the two mounting columns (81) are fixedly mounted in the mounting portion (11); and the crucibles (82) are arranged at intervals between the two mounting columns (81).

5. The multi-chamber vacuum coating equipment according to claim 4, characterized in that: The chamber door (1) is movably hinged on either the left or right end of the entrance and exit ends.

6. The multi-chamber vacuum coating equipment according to claim 4, characterized in that: The chamber door (1) is movably hinged at the upper end of the entrance and exit ends.

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