A coating device

Abstract

The present invention relates to the technical field of coating equipment, and discloses a coating device, comprising a base and a plurality of vacuum coating containers, wherein the top wall of the vacuum coating container is provided with a first vacuum port, a hanging mechanism for hanging a workpiece to be coated is provided in the vacuum coating container, a vacuum zone and a coating zone are provided at the top of the base, and a coating groove and a containing groove are provided below the coating zone of the base; the present invention realizes parallel processing of vacuuming and coating operations by introducing a plurality of independent vacuum coating containers and cooperating with special vacuuming zones and coating zones, and significantly shortens the waiting time of the workpiece before coating; in addition, by arranging a movable sealing disk and an elastic connecting piece, it is ensured that the coating groove can be quickly connected with the vacuum coating container after the vacuuming is completed, thereby further optimizing the coating process, and this design not only improves the overall efficiency of the coating operation, but also reduces the equipment cost and operation complexity by reducing the dependence on large vacuum chambers.

Description

Technical Field

[0001] The invention relates to the technical field of film coating equipment, in particular to a film coating device. Background Art

[0002] Vacuum coating equipment is a kind of technical equipment that performs coating under high vacuum degree. It deposits one or more layers of thin film on the surface of substrate by physical or chemical methods to change the surface characteristics of substrate. This equipment is widely used in modern industry, such as optical coating, semiconductor manufacturing, decorative coating and other fields.

[0003] Chinese patent CN114318296B discloses a vacuum coating device, which includes a coating chassis, multiple evaporation boats, electrodes, positive electrical parts, negative electrical parts and connecting electrical parts. A vacuum coating chamber is provided in the coating chassis, the positive electrical parts and the negative electrical parts are installed outside the coating chassis, the electrodes are installed in the vacuum coating chamber, and multiple evaporation boats are installed in the vacuum coating chamber in a longitudinal arrangement, the positive end of the evaporation boat is electrically connected to the positive electrical part, and the negative end of the evaporation boat is electrically connected to the negative electrical part. The first ends of the positive electrical part, the negative electrical part and the connecting electrical part are located on the same side, the second ends of the positive electrical part, the negative electrical part and the connecting electrical part are located on the same side, the first end of the positive electrical part is used to connect to the positive pole of the power supply, the second end of the connecting electrical part is electrically connected to the second end of the negative electrical part, and the first end of the connecting electrical part is used to connect to the negative pole of the power supply. The vacuum coating device of the present invention can make the heating power of each evaporation boat equal.

[0004] As shown in the above patent, in the coating process, since it needs to be carried out in a vacuum environment to ensure the uniformity and adhesion of the film, the vacuum procedure must be performed first after the workpiece to be coated is placed in the coating chamber. This process needs to be repeated for each new workpiece placed in the coating chamber, resulting in the inability to perform the coating operation during this period. In view of the large volume of the coating chamber itself, it takes a lot of time to complete a full vacuum operation, which significantly reduces the overall coating efficiency.

[0005] Therefore, it is necessary to provide a coating device to solve the above technical problems. Summary of the invention

[0006] The object of the present invention is to provide a coating device, which realizes the parallel processing of vacuuming and coating operations and significantly shortens the waiting time of the workpiece before coating.

[0007] The above technical objectives of the present invention are achieved through the following technical solutions: a coating device, comprising a base and a plurality of vacuum coating containers, the top wall of the vacuum coating container is provided with a first vacuum port, the vacuum coating container is provided with a hanging mechanism for hanging the workpiece to be coated, the top of the base is provided with a vacuum zone and a coating zone, the base is provided with a coating groove and a accommodating groove below the coating zone, the top of the coating groove is open, the coating mechanism is provided in the coating groove, an electric push rod is fixedly installed on one side of the base, the output end of the electric push rod is connected to the coating mechanism, the coating groove is provided with a second vacuum port, the bottom of the vacuum coating container is provided with a through groove, a sealing disk for closing the through groove is provided below the through groove, an elastic connecting piece is installed at the bottom of the inner cavity of the vacuum coating container, and the telescopic end of the elastic connecting piece passes through the bottom wall of the vacuum coating container and is connected to the sealing disk.

[0008] The present invention is further configured as follows: the elastic connecting piece includes a connecting tube, a connecting column and a spring, the connecting tube is fixedly installed at the bottom of the inner cavity of the vacuum coating container, the bottom end of the connecting column is fixedly connected to the sealing disk, the top end of the connecting column extends into the connecting tube, and the connecting column and the connecting tube are slidably matched, the top end of the spring is fixedly connected to the top wall of the connecting tube, and the bottom end of the spring is fixedly connected to the top end of the connecting column.

[0009] The present invention is further configured as follows: the coating mechanism comprises a support platform and an evaporation boat, the support platform is fixedly connected to the output end of the electric push rod, and the evaporation boat is fixedly installed on the top of the support platform.

[0010] The present invention is further configured as follows: the suspension mechanism includes a mounting pin, the top end of the mounting pin is fixedly connected to the top wall of the vacuum coating container, a rotating disk is rotatably mounted on the mounting pin, a plurality of connecting shafts are rotatably mounted on the edge of the rotating disk, a hook is fixedly mounted on the bottom end of the connecting shaft, and a transmission assembly for driving the rotating disk to rotate is provided on one side of the inner cavity of the vacuum coating container.

[0011] The present invention is further configured as follows: the transmission assembly includes a first gear, a first rotating shaft, a second rotating shaft and a second gear; the top end of the first rotating shaft is rotatably connected to the top wall of the vacuum coating container, the bottom end of the second rotating shaft is rotatably connected to the bottom wall of the sealing disk, the bottom end of the first rotating shaft extends into the second rotating shaft and slides up and down; the first gear is fixedly mounted on the top of the first rotating shaft, the second gear is fixedly mounted on the bottom of the second rotating shaft, a tooth groove is provided on the outer peripheral wall of the rotating disk, the first gear is meshed with the tooth groove, and a driving assembly for driving the second gear to rotate is provided on the support platform.

[0012] The present invention is further configured as follows: the driving assembly includes a motor and a fifth gear, and when the sealing disk and the support platform are both located in the coating tank, the fifth gear is meshed with the second gear.

[0013] The present invention is further configured as follows: a fourth gear is fixedly mounted on the top ends of the plurality of connecting shafts, a third gear is fixedly mounted on the mounting pin, and the plurality of fourth gears are meshed with the third gear.

[0014] The present invention is further configured as follows: a first bracket is fixedly mounted on the base, the first bracket is arranged above the coating area, a first hydraulic cylinder is fixedly mounted on the top of the first bracket, and an output end of the first hydraulic cylinder passes through the top wall of the first bracket and is fixedly mounted with a first pressure seat.

[0015] The present invention is further configured as follows: a second bracket is fixedly mounted on the base, the second bracket is arranged above the vacuum zone, a second hydraulic cylinder is fixedly mounted on the top of the second bracket, an output end of the second hydraulic cylinder passes through the top wall of the second bracket and is fixedly mounted on a second pressure seat, a connecting plate is fixedly mounted on the second pressure seat, a vacuum nozzle is fixedly mounted on the connecting plate, and the vacuum nozzle is adapted to the first vacuum port.

[0016] The present invention is further configured as follows: a second annular sealing gasket is fixedly mounted on the top of the base, the second annular sealing gasket is arranged in the coating area, and when the vacuum coating container is placed in the coating area, the bottom wall of the vacuum coating container contacts the second annular sealing gasket.

[0017] In summary, the present invention has the following beneficial effects: the present invention introduces a plurality of independent vacuum coating containers, and cooperates with special vacuuming areas and coating areas, thereby realizing parallel processing of vacuuming and coating operations, and significantly shortening the waiting time of the workpiece before coating. In addition, by providing a movable sealing disk and an elastic connector, it is ensured that after the vacuuming of the coating tank is completed, it can be quickly connected to the vacuum coating container, thereby further optimizing the coating process. This design not only improves the overall efficiency of the coating operation, but also reduces the equipment cost and operation complexity by reducing the dependence on large vacuum chambers. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a schematic cross-sectional structural diagram of the vacuum coating container of the present invention;

[0020] Figure 3 This is one of the schematic diagrams of the structure inside the vacuum coating container of the present invention;

[0021] Figure 4This is the second schematic diagram of the structure inside the vacuum coating container of the present invention;

[0022] Figure 5 It is a schematic structural diagram of the bottom of the vacuum coating container of the present invention;

[0023] Figure 6 It is a partial cross-sectional structural schematic diagram of the base of the present invention;

[0024] Figure 7 is a schematic cross-sectional structural diagram of the elastic connector of the present invention;

[0025] Figure 8 It is a schematic diagram of the cross-sectional structure of the present invention during film coating;

[0026] Fig. 9 for Figure 8 A is an enlarged structural diagram of FIG.

[0027] In the figure: 1, base; 101, coating tank; 102, accommodating tank; 2, first bracket; 3, first hydraulic cylinder; 4, first pressure seat; 5, vacuum coating container; 501, through slot; 502, notch; 503, circular slot; 504, first annular sealing gasket; 6, sealing disk; 7, elastic connector; 71, connecting cylinder; 72, connecting column; 73, spring; 8, mounting pin; 9, rotating disk; 10, first gear; 11, first rotating shaft; 12, second rotating shaft; 13, second gear; 14 , connecting shaft; 15, hook; 16, third gear; 17, fourth gear; 18, first vacuum port; 19, sealing door; 20, guide seat; 21, guide column; 22, electric push rod; 23, support platform; 24, evaporation boat; 25, fifth gear; 26, motor; 27, second vacuum port; 28, vacuum mechanism; 29, second bracket; 30, second hydraulic cylinder; 31, second pressure seat; 32, connecting plate; 33, vacuum nozzle; 34, second annular sealing gasket; 35, intake valve. DETAILED DESCRIPTION

[0028] The present invention will be further described below with reference to the accompanying drawings in the embodiments of the present invention.

[0029] See also Figures 1 to 7In an embodiment of the present invention, a coating device includes a base 1 and a plurality of vacuum coating containers 5, the top wall of the vacuum coating container 5 is provided with a first vacuum port 18, the vacuum coating container 5 is provided with a hanging mechanism for hanging a workpiece to be coated, the top of the base 1 is provided with a vacuum zone and a coating zone, the base 1 is provided with a coating tank 101 and a containing tank 102 below the coating zone, the top of the coating tank 101 is open, the coating tank 101 is provided with a coating mechanism, an electric push rod 22 is fixedly installed on one side of the base 1, the output end of the electric push rod 22 is connected to the coating mechanism, The coating tank 101 is provided with a second vacuum port 27, a through groove 501 is provided at the bottom of the vacuum coating container 5, a sealing plate 6 for closing the through groove 501 is provided below the through groove 501, a circular groove 503 is provided on the bottom wall of the vacuum coating container 5, the circular groove 503 is connected with the through groove 501, a first annular sealing gasket 504 is provided in the circular groove 503, when the sealing plate 6 closes the through groove 501, the top wall of the sealing plate 6 fits with the first annular sealing gasket 504, so as to improve the sealing performance, an elastic connector 7 is installed at the bottom of the inner cavity of the vacuum coating container 5, and the telescopic end of the elastic connector 7 The bottom wall of the vacuum coating container 5 is connected to the sealing disk 6, and an air inlet valve 35 is provided on one side of the accommodating groove 102; the vacuum coating container 5 can be equipped with multiple ones according to needs. During coating, the sealing door 19 on the vacuum coating container 5 is first opened, and after the workpiece to be coated is fixed on the hanging mechanism, the sealing door 19 is closed and locked, and then the vacuum coating container 5 is placed in the vacuumizing area for vacuumizing. After the vacuumizing is completed, under the action of atmospheric pressure, the sealing disk 6 is pressed on the circular groove 503, thereby sealing the through groove 501, and then the vacuum coating container 5 is transferred to the coating area, and the coating groove 10 is evacuated through the second vacuumizing port 27. 1 is evacuated. When the coating tank 101 is in a vacuum state, the air pressure above and below the sealing disk 6 is balanced, so that under the action of the elastic connecting member 7, the sealing disk 6 pops up downward and enters the bottom of the inner cavity of the coating tank 101, and then the coating mechanism is driven by the electric push rod 22 to move to the top of the sealing disk 6, and then the evaporation material is evaporated by the coating mechanism to perform coating. After the coating is completed, the output end of the electric push rod 22 is controlled to contract, so that the coating mechanism moves into the containing tank 102, and then the air inlet valve 35 is opened to allow external gas to enter the containing tank 102 and the vacuum coating container 5, and then the vacuum coating container 5 is removed;By setting the elastic connector 7 and the sealing disk 6, after the coating tank 101 is evacuated, the sealing disk 6 can move downward to connect the vacuum coating chamber with the coating tank 101. By setting a plurality of vacuum coating containers 5, the vacuuming and coating are performed independently in two areas. Before coating, only the coating tank 101 and the containing tank 102 need to be evacuated. The volumes of the coating tank 101 and the containing tank 102 are small, which effectively reduces the time required for vacuuming before coating and improves the coating efficiency. In addition, by setting a detachable vacuum coating container 5, vacuum coating containers 5 of different specifications can be used according to the size of the workpiece to be coated, which can reduce the time required for the vacuuming stage. ;

[0030] In this embodiment, preferably, the elastic connecting member 7 includes a connecting tube 71, a connecting column 72 and a spring 73. The connecting tube 71 is fixedly installed at the bottom of the inner cavity of the vacuum coating container 5, the bottom end of the connecting column 72 is fixedly connected to the sealing disk 6, the top end of the connecting column 72 extends into the connecting tube 71, and the connecting column 72 and the connecting tube 71 are slidably matched, the top end of the spring 73 is fixedly connected to the top wall of the connecting tube 71, the bottom end of the spring 73 is fixedly connected to the top end of the connecting column 72, and the spring 73 is in a compressed state, thereby realizing the elastic connection between the sealing disk 6 and the vacuum coating container 5.

[0031] In this embodiment, preferably, the coating mechanism includes a support table 23 and an evaporation boat 24, the support table 23 is fixedly connected to the output end of the electric push rod 22, and the evaporation boat 24 is fixedly installed on the top of the support table 23. During coating, the evaporation material is placed in the evaporation boat 24, and electrodes are provided on the evaporation boat 24. The evaporation material is heated by the electrodes to evaporate the evaporation material.

[0032] In this embodiment, preferably, a second annular sealing gasket 34 is fixedly installed on the top of the base 1, and the second annular sealing gasket 34 is arranged in the coating area. When the vacuum coating container 5 is placed in the coating area, the bottom wall of the vacuum coating container 5 contacts the second annular sealing gasket 34, thereby improving the sealing performance; a first bracket 2 is fixedly installed on the base 1, and the first bracket 2 is arranged above the coating area. A first hydraulic cylinder 3 is fixedly installed on the top of the first bracket 2, and the output end of the first hydraulic cylinder 3 passes through the top wall of the first bracket 2 and is fixedly installed with a first pressure seat 4; when the vacuum coating container 5 is placed in the coating area, the first pressure seat 4 is driven to move downward by the extension of the output end of the first hydraulic cylinder 3, so that the first pressure seat 4 is pressed on the top wall of the vacuum coating container 5, and the bottom wall of the vacuum coating container 5 is pressed on the second annular sealing gasket 34, so as to improve the sealing performance.

[0033] In this embodiment, preferably, a second bracket 29 is fixedly installed on the base 1, and the second bracket 29 is arranged above the vacuum zone. A second hydraulic cylinder 30 is fixedly installed on the top of the second bracket 29, and the output end of the second hydraulic cylinder 30 passes through the top wall of the second bracket 29 and is fixedly installed with a second pressure seat 31, and a connecting plate 32 is fixedly installed on the second pressure seat 31, and a vacuum nozzle 33 is fixedly installed on the connecting plate 32, and the vacuum nozzle 33 is adapted to the first vacuum port 18, and a vacuum mechanism 28 is provided on one side of the base 1, and the vacuum mechanism 28 includes a vacuum pump, and the vacuum pump is provided There are two exhaust ends, and the two exhaust ends of the vacuum pump are respectively connected to the vacuum nozzle 33 and the second vacuum port 27, so that the vacuum nozzle 33 and the second vacuum port 27 can be vacuumed independently. When the vacuum coating container 5 is placed in the vacuum coating area, the second pressure seat 31 is driven to move downward by the output end of the second hydraulic cylinder 30, so that the second pressure seat 31 is pressed on the top wall of the vacuum coating container 5. At the same time, when the second pressure seat 31 moves downward, it drives the vacuum nozzle 33 to move downward through the connecting plate 32, so that the vacuum nozzle 33 is connected to the first vacuum port 18, and then the vacuum coating container 5 can be vacuumed.

[0034] In this embodiment, preferably, a plurality of guide pillars 21 are fixedly installed on the top of the base 1, and guide seats 20 are fixedly installed on both sides of the bottom of the vacuum coating container 5. Guide holes are opened in the guide seats 20, and the guide pillars 21 are adapted to the guide holes; two guide pillars 21 are provided in the vacuuming area and the coating area, which can guide the vacuum coating container 5 when it is placed on the vacuuming area and the coating area.

[0035] See also Figures 3 to 5 , Figure 8 and Fig. 9In the embodiment of the present invention, the hanging mechanism includes a mounting pin 8, the top end of the mounting pin 8 is fixedly connected to the top wall of the vacuum coating container 5, a rotating disk 9 is rotatably mounted on the mounting pin 8, a plurality of connecting shafts 14 are rotatably mounted on the edge of the rotating disk 9, a hook 15 is fixedly mounted on the bottom end of the connecting shaft 14, and a transmission component for driving the rotating disk 9 to rotate is provided on one side of the inner cavity of the vacuum coating container 5; the transmission component includes a first gear 10, a first rotating shaft 11, a second rotating shaft 12, and a second gear 13, the top end of the first rotating shaft 11 is rotatably connected to the top wall of the vacuum coating container 5, the bottom end of the second rotating shaft 12 is rotatably connected to the bottom wall of the sealing disk 6, the bottom end of the first rotating shaft 11 extends into the second rotating shaft 12 and slides up and down, and the outer wall of the first rotating shaft 11 is provided with a A limit strip is provided, a limit groove is provided on the inner wall of the second rotating shaft 12, and the limit strip is provided in the limit groove, so that the first rotating shaft 11 can only slide up and down relative to the second rotating shaft 12, and cannot rotate relative to the second rotating shaft 12, the first gear 10 is fixedly sleeved on the top of the first rotating shaft 11, and the second gear 13 is fixedly sleeved on the bottom of the second rotating shaft 12, and the outer peripheral wall of the rotating disk 9 is provided with a tooth groove, and the first gear 10 is meshed with the tooth groove, and a notch 502 for the second gear 13 to pass through is provided on one side of the through groove 501, and a driving component for driving the second gear 13 to rotate is provided on the support platform 23; the driving component includes a motor 26 and a fifth gear 25, and when the sealing disk 6 and the support platform 23 are both located in the coating tank 101, the fifth gear 25 is meshed with the second gear 13;

[0036] When the sealing disk 6 moves downward into the coating tank 101, the electric push rod 22 drives the support platform 23 to move into the coating tank 101, so that the fifth gear 25 is meshed with the second gear 13, and then the motor 26 is turned on. The output end of the motor 26 drives the second gear 13 to rotate through the fifth gear 25, thereby driving the first gear 10 to rotate through the second rotating shaft 12 and the first rotating shaft 11. When the first gear 10 rotates, it drives the rotating disk 9 to rotate, thereby driving the multiple hooks 15 to rotate in a circular trajectory to improve the uniformity of the coating. The power source for driving the rotating disk 9 to rotate is set on the support platform 23. On the support platform 23, after the support platform 23 moves into the coating tank 101, the driving component can be connected to the transmission component to drive the rotating disk 9 to rotate, thereby avoiding the installation of the motor 26 on the vacuum coating container 5, which can effectively reduce the cost, and the second gear 13 follows the movement of the sealing disk 6 and extends into the coating tank 101, the motor 26 and the fifth gear 25 follow the support platform 23 into the coating tank 101, and there is no need to set up other driving structures, which reduces the cost and ensures the synchronization of operation, and the docking process is carried out when the through slot 501 is opened, which will not affect the overall sealing.

[0037] In this embodiment, preferably, the top ends of the plurality of connecting shafts 14 are fixedly mounted with a fourth gear 17, the mounting pin 8 is fixedly mounted with a third gear 16, and the plurality of fourth gears 17 are meshed with the third gear 16; through the arrangement of the third gear 16 and the fourth gear 17, when the rotating disk 9 rotates, the connecting shaft 14 moves in a circular trajectory, so that the fourth gear 17 rotates around the third gear 16, and the third gear 16 is in a stationary state, so that the fourth gear 17 can rotate, thereby driving the hook 15 to rotate through the connecting shaft 14, so that the workpiece suspended on the hook 15 can rotate while revolving, so as to improve the uniformity of the coating.

[0038] The above description is only a preferred embodiment of the present invention, so all equivalent changes or modifications made according to the structure, characteristics and principles described in the scope of the patent application of the present invention are included in the scope of the patent application of the present invention.

Claims

1. A coating device, comprising a base (1) and a plurality of vacuum coating containers (5), characterized in that: The top wall of the vacuum coating container (5) is provided with a first vacuum port (18), a suspension mechanism for suspending a workpiece to be coated is provided in the vacuum coating container (5), a vacuum zone and a coating zone are provided at the top of the base (1), a coating groove (101) and a receiving groove (102) are provided below the coating zone on the base (1), the top of the coating groove (101) is open, a coating mechanism is provided in the coating groove (101), and an electric push rod (22) is fixedly mounted on one side of the base (1). ), the output end of the electric push rod (22) is connected to the coating mechanism, a second vacuum port (27) is provided in the coating tank (101), a through groove (501) is provided at the bottom of the vacuum coating container (5), a sealing disk (6) for closing the through groove (501) is provided below the through groove (501), an elastic connector (7) is installed at the bottom of the inner cavity of the vacuum coating container (5), and the telescopic end of the elastic connector (7) penetrates the bottom wall of the vacuum coating container (5) and is connected to the sealing disk (6); The elastic connecting member (7) comprises a connecting tube (71), a connecting column (72) and a spring (73); the connecting tube (71) is fixedly mounted on the bottom of the inner cavity of the vacuum coating container (5); the bottom end of the connecting column (72) is fixedly connected to the sealing disk (6); the top end of the connecting column (72) extends into the connecting tube (71); the connecting column (72) and the connecting tube (71) are slidably matched; the top end of the spring (73) is fixedly connected to the top wall of the connecting tube (71); and the bottom end of the spring (73) is fixedly connected to the top end of the connecting column (72); A first bracket (2) is fixedly mounted on the base (1), the first bracket (2) is arranged above the coating area, a first hydraulic cylinder (3) is fixedly mounted on the top of the first bracket (2), and an output end of the first hydraulic cylinder (3) passes through the top wall of the first bracket (2) and is fixedly mounted with a first pressure seat (4); A second bracket (29) is fixedly mounted on the base (1), and the second bracket (29) is arranged above the vacuum zone. A second hydraulic cylinder (30) is fixedly mounted on the top of the second bracket (29), and an output end of the second hydraulic cylinder (30) passes through the top wall of the second bracket (29) and is fixedly mounted with a second pressure seat (31). A connecting plate (32) is fixedly mounted on the second pressure seat (31), and a vacuum nozzle (33) is fixedly mounted on the connecting plate (32), and the vacuum nozzle (33) is compatible with the first vacuum port (18).

2. A coating device according to claim 1, characterized in that: The coating mechanism comprises a support platform (23) and an evaporation boat (24); the support platform (23) is fixedly connected to the output end of the electric push rod (22); and the evaporation boat (24) is fixedly mounted on the top of the support platform (23).

3. A coating device according to claim 2, characterized in that: The suspension mechanism comprises a mounting pin (8), the top end of which is fixedly connected to the top wall of the vacuum coating container (5), a rotating disk (9) is rotatably mounted on the mounting pin (8), a plurality of connecting shafts (14) are rotatably mounted on the edge of the rotating disk (9), a hook (15) is fixedly mounted on the bottom end of the connecting shaft (14), and a transmission component for driving the rotating disk (9) to rotate is provided on one side of the inner cavity of the vacuum coating container (5).

4. A coating device according to claim 3, characterized in that: The transmission assembly comprises a first gear (10), a first rotating shaft (11), a second rotating shaft (12) and a second gear (13); the top end of the first rotating shaft (11) is rotatably connected to the top wall of the vacuum coating container (5); the bottom end of the second rotating shaft (12) is rotatably connected to the bottom wall of the sealing disk (6); the bottom end of the first rotating shaft (11) extends into the second rotating shaft (12) and slides up and down; the first gear (10) is fixedly mounted on the top of the first rotating shaft (11); the second gear (13) is fixedly mounted on the bottom of the second rotating shaft (12); a tooth groove is provided on the outer peripheral wall of the rotating disk (9); the first gear (10) is meshed with the tooth groove; and a driving assembly for driving the second gear (13) to rotate is provided on the support platform (23).

5. A coating device according to claim 4, characterized in that: The driving assembly comprises a motor (26) and a fifth gear (25); when the sealing disk (6) and the support platform (23) are both located in the coating tank (101), the fifth gear (25) meshes with the second gear (13).

6. A coating device according to claim 5, characterized in that: A fourth gear (17) is fixedly sleeved on the top ends of the plurality of connecting shafts (14), a third gear (16) is fixedly sleeved on the mounting pin (8), and the plurality of fourth gears (17) are meshed with the third gear (16).

7. A coating device according to claim 1, characterized in that: A second annular sealing gasket (34) is fixedly mounted on the top of the base (1), and the second annular sealing gasket (34) is arranged in the coating area. When the vacuum coating container (5) is placed in the coating area, the bottom wall of the vacuum coating container (5) contacts the second annular sealing gasket (34).

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