Liquid spray pipe adjustment assembly
By adopting the ball joint and lifting cavity design in the liquid spray tube, the flexible position adjustment and accuracy of the liquid spray tube are achieved, solving the problem of inflexible adjustment of the traditional liquid supply swing arm and is suitable for a variety of wafers Cleaning scene.
Patent Information
- Application Number
- CN202411328899.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-24
- Publication Date
- 2024-12-31
- Estimated Expiration
- 2044-09-24
AI Technical Summary
The liquid spray pipe of the traditional liquid supply swing arm is fixed after production, and the height and angle of the liquid outlet cannot be flexibly adjusted, resulting in the need to replace the liquid supply swing arm of different structures for cleaning wafers of different sizes or positions, which has poor flexibility in use. And the cost is high, and the liquid outlet offset cannot be corrected in time, resulting in an increase in replacement cost.
The liquid spray pipe adjustment assembly including a fixed frame, a first ball joint structure, a second ball joint structure and a moving pipe is adopted. Through the design of the ball joint and the lifting cavity, the liquid outlet of the liquid spray pipe can be manually adjusted and fixed. Improve position accuracy and flexibility and reduce replacement costs.
It realizes flexible position adjustment and accuracy improvement of liquid spray pipes, which are suitable for different types of wafer cleaning, reduces replacement costs and repair needs, and improves usage flexibility and accuracy.
Smart Images
Figure CN118831876B_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of semiconductor integrated circuit manufacturing, and in particular relates to a liquid spray pipe regulating assembly. Background Art
[0002] For the semiconductor industry, wafer cleaning is a very important process, and the liquid supply swing arm that supplies liquid during the wafer cleaning process is a crucial component. During the liquid supply cleaning process, the liquid supply swing arm's liquid spray pipe must ensure both the distance and angle from the wafer and the overall stability during liquid supply.
[0003] However, the position and size of the liquid spray pipe of the traditional liquid supply swing arm are fixed after production, and the height and angle of the liquid outlet of the liquid spray pipe cannot be flexibly adjusted. The liquid spray pipe can only be guaranteed to be in the posture required by the wafer to be cleaned by improving the processing accuracy. This results in the need to equip liquid supply swing arms with different structures to meet the different requirements of the corresponding liquid outlet height and angle when corresponding to wafers of different sizes or wafers that need to be cleaned at different positions, resulting in the need to equip a new liquid supply swing arm for each different liquid outlet position requirement, resulting in poor flexibility in the use of the liquid supply swing arm and high application cost; at the same time, after the liquid supply swing arm has been running for a long time, the position of the liquid outlet will have a certain offset, and the liquid supply swing arm cannot flexibly adjust the position of the liquid spray pipe, and cannot correct the offset angle of the liquid outlet in time. Manual adjustment of the liquid spray pipe cannot ensure that the liquid spray pipe can maintain the adjusted position after being adjusted. Only replacing a new liquid supply swing arm to ensure the position accuracy of the liquid outlet leads to a further increase in the replacement cost of the liquid supply swing arm.
[0004] Therefore, there is an urgent need for a structure or method that can flexibly adjust the position of the liquid spray pipe, improve the position accuracy of the liquid spray pipe, and reduce the adjustment cost of the liquid spray pipe.
[0005] It should be noted that the above introduction to the technical background is only for the convenience of providing a clear and complete description of the technical solutions of the present application and for the convenience of understanding by those skilled in the art. It cannot be considered that the above technical solutions are well known to those skilled in the art simply because these solutions are described in the background technology part of the present application. Summary of the invention
[0006] In view of the above shortcomings of the prior art, an object of the present invention is to provide a liquid spray pipe adjustment assembly for solving the problems of inflexible adjustment of the liquid spray pipe and high adjustment cost in the prior art.
[0007] To achieve the above object, the present invention provides a liquid spray pipe regulating assembly, the liquid spray pipe regulating assembly comprising: a fixed frame, a first ball joint structure, a second ball joint structure and a movable pipeline;
[0008] The fixed frame includes a pipeline movable cavity, a first axial hole and a second axial hole, the pipeline movable cavity communicates with the first axial hole and the second axial hole; the first ball joint structure includes a first fixed structure, and the second ball joint structure includes a second fixed structure; the movable pipeline includes a liquid spraying pipe, the liquid spraying pipe passes through the pipeline movable cavity and is pin-connected in the first axial hole and the second axial hole, and one end of the liquid outlet of the liquid spraying pipe extends out of the pipeline movable cavity;
[0009] A first ball joint is disposed at a position of the outer wall of the liquid spraying pipe corresponding to the first shaft hole, the first ball joint is located in the first shaft hole and can roll in the first shaft hole, and the first fixing structure can control the first ball joint to be unable to move in the first shaft hole;
[0010] A second ball joint is disposed at a position of the outer wall of the liquid spraying pipe corresponding to the second axial hole, the second ball joint is located in the second axial hole and can roll in the second axial hole, and the second fixing structure can control the second ball joint to be unable to move in the second axial hole;
[0011] The inner diameter of the pipeline movable cavity is set according to a preset distribution, and the spray pipe can rotate in the pipeline movable cavity through the rolling of the first ball joint and the second ball joint to adjust the position of one end of the liquid outlet of the spray pipe.
[0012] Optionally, the first fixing structure includes a first ball pin, a first tightening threaded hole and a first tightening screw; the first ball pin is a spherical table annular shell located in the first axial hole and can be contracted under force, the spherical table annular shell includes two opposite circular bottom surface openings, and the spray pipe passes through the two circular bottom surface openings of the spherical table annular shell; the first tightening threaded hole is located at a position above the first axial hole corresponding to the fixing frame, and the first tightening threaded hole exposes the first ball pin; the first tightening screw can be threadedly connected to the first tightening threaded hole, and the first tightening screw can be screwed into the first tightening threaded hole to tighten the first ball pin so that the first ball joint in the first ball pin cannot move.
[0013] Optionally, the ball band of the ball table annular shell of the first ball pin includes a deformation gap, and the deformation gap is located on the cross-section of the ball table annular shell perpendicular to the circular bottom opening; when the first ball pin is pressed, the deformation gap shrinks, so that the inner surface of the ball table annular shell presses the first ball joint inside, making the first ball joint unable to move.
[0014] Optionally, the second fixing structure is a second ball pin, a second clamping threaded hole and a second clamping screw; the second ball pin is a ball table annular shell located in the second axial hole and can be contracted under force, the ball table annular shell includes two opposite circular bottom surface openings, and the spray pipe passes through the two circular bottom surface openings of the ball table annular shell; the second clamping threaded hole is located at a position above the second axial hole corresponding to the fixing frame, and the second clamping threaded hole exposes the second ball pin; the second clamping screw and the second clamping threaded hole can be threadedly connected, and the second clamping screw can be screwed into the second clamping threaded hole to clamp the second ball pin so that the second ball joint in the second ball pin cannot move.
[0015] Optionally, the ball band of the ball table annular shell of the second ball pin includes a deformation gap, and the deformation gap is located on the cross-section of the ball table annular shell perpendicular to the circular bottom surface opening; when the second ball pin is pressed, the deformation gap shrinks, so that the inner surface of the ball table annular shell presses the second ball joint inside, making the second ball joint unable to move.
[0016] Optionally, the fixed frame further includes a lifting cavity and a lifting control structure;
[0017] The lifting chamber is located at the position where the pipeline activity chamber passes through the first shaft hole, the lifting chamber includes a lifting block, the first shaft hole is located in the lifting block, the liquid injection pipe passes through the lifting block and is pin-connected in the first shaft hole, and the first fixing structure controls the first ball joint in the first shaft hole from the fixing frame above the lifting block through the lifting block;
[0018] The lifting control structure comprises a lifting threaded hole, a lifting screw, a limiting step hole and a lifting control hole; the lifting threaded hole is located in the fixed frame below the lifting block, and the lifting threaded hole exposes the bottom of the lifting cavity; the limiting step hole is located below the lifting threaded hole, and the aperture of the limiting step hole is larger than the aperture of the lifting threaded hole; the lifting screw comprises a connected head and a stud, the limiting step hole comprises an upper hole surface and a lower hole surface, the head is between the upper hole surface and the lower hole surface of the limiting step hole, and the diameter of the head is larger than the inner hole diameter of the upper hole surface and the lower hole surface of the lifting threaded hole, so that the head can rotate in the limiting step hole but cannot move up and down;
[0019] The stud can be threadedly connected to the lifting threaded hole, and the lifting control hole is located at a position below the fixed frame corresponding to the limiting step hole and penetrates the fixed frame below the limiting step hole, so that the head can be rotated from the lifting control hole at the bottom of the fixed frame, and the rotation of the head can control the lifting block to drive the lifting movement of the first ball joint.
[0020] Optionally, the fixed frame also includes a limiting structure, which includes a limiting threaded hole and a limiting screw; the limiting threaded hole passes through the corresponding position of the fixed frame above the first fixed structure, the limiting screw and the limiting threaded hole can be threadedly connected, and the limiting screw can be screwed into the limiting threaded hole to limit the rising height of the lifting block below.
[0021] Optionally, the movable pipeline further comprises a connecting pipe, one end of the liquid spraying pipe away from the liquid outlet is connected to the connecting pipe, and the connecting pipe is used for introducing the liquid to be sprayed.
[0022] Optionally, the connecting pipe is a deformable hose, and the connecting pipe can be deformed by applying stress in the direction of the connecting pipe by the liquid spraying pipe, so that the liquid spraying pipe is displaced in the direction of the connecting pipe.
[0023] Optionally, the fixed frame includes a base plate, an adjustment substrate, a first cover plate and a second cover plate, the adjustment substrate is fixed to the base plate, the first cover plate and the second cover plate are fixed to the adjustment substrate; the first axial hole is located between the adjustment substrate and the first cover plate, and the second axial hole is located between the adjustment substrate and the second cover plate.
[0024] As described above, the liquid spray pipe adjustment assembly of the present invention has the following beneficial effects:
[0025] The present invention provides a first ball joint structure and a second ball joint structure, so that the liquid spray pipe can be directly manually adjusted to a suitable position and then fixed, so that the liquid spray pipe adjustment assembly can be suitable for different types of wafer cleaning;
[0026] The present invention can quickly and conveniently adjust the liquid spraying position of the liquid spraying pipe by arranging the first ball joint structure and the second ball joint structure, thereby improving the liquid spraying accuracy and reducing the cost of replacing the liquid spraying pipe.
[0027] The present invention uses the lifting chamber and the lifting control structure to control the height of the first ball joint through the lifting screw, thereby further improving the accuracy of the liquid spraying position of the liquid spraying pipe;
[0028] The present invention cooperates with the deformable connecting pipe so that the length of the liquid spraying pipe can be adjusted in the telescopic direction, thereby improving the freedom of adjusting the liquid spraying position of the liquid spraying pipe. BRIEF DESCRIPTION OF THE DRAWINGS
[0029] Figure 1 Shown is a schematic diagram of the overall three-dimensional structure of the liquid spray pipe adjustment assembly of the present invention.
[0030] Figure 2 Shown is a schematic structural diagram of a partially half-sectioned three-dimensional back view of the liquid spray pipe adjustment assembly of the present invention.
[0031] Figure 3 Shown is a partially enlarged detail view of the rear perspective view of the liquid spray pipe adjustment assembly of the present invention.
[0032] Figure 4 Shown is a schematic side cross-sectional view of the liquid spray pipe adjustment assembly of the present invention.
[0033] Component number description
[0034] 10. Fixed frame; 11. Bottom plate; 12. Adjustment base plate; 13. First cover plate; 14. Second cover plate; 15. Pipeline activity chamber; 16. First axial hole; 17. Second axial hole; 18. Lifting chamber; 181. Lifting block; 182. Lifting threaded hole; 183. Lifting screw; 1831. Head; 1832. Stud; 184. Limiting step hole; 185. Lifting control hole; 191. Limiting threaded hole; 192. Limiting screw;
[0035] 21. first ball pin; 22. first clamping threaded hole; 23. first clamping screw;
[0036] 31. second ball pin; 311. deformation gap; 32. second clamping threaded hole; 33. second clamping screw;
[0037] 41. Liquid spray pipe; 411. First ball joint; 412. Second ball joint; 42. Connecting pipe. DETAILED DESCRIPTION
[0038] The following describes the embodiments of the present invention through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present invention.
[0039] For example, when describing the embodiments of the present invention in detail, for the sake of convenience, the schematic diagrams showing the device structure will not be partially enlarged according to the general scale, and the schematic diagrams are only examples, which should not limit the scope of protection of the present invention. In addition, in actual production, the three-dimensional dimensions of length, width and depth should be included.
[0040] For convenience of description, spatially relative terms such as "under", "below", "below", "below", "above", "on", etc. may be used herein to describe the relationship of one element or feature shown in the drawings to other elements or features. It will be understood that these spatially relative terms are intended to encompass other orientations of the device in use or operation in addition to the orientation depicted in the drawings.
[0041] In the context of the present application, a structure in which a first feature is described as being "above" a second feature may include embodiments in which the first and second features are in direct contact, and may also include embodiments in which additional features are formed between the first and second features, such that the first and second features may not be in direct contact.
[0042] It should be noted that the illustrations provided in this embodiment are only used to illustrate the basic concept of the present invention in a schematic manner, and therefore the illustrations only show components related to the present invention rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.
[0043] The present invention provides a Figure 1-Figure 4 The spray pipe adjustment assembly shown in FIG. Figure 1 This is the overall stereogram of the liquid pipe adjustment assembly. Figure 2 This is a partial half-section stereoscopic view of the back of the spray pipe adjustment assembly, with the section line being Figure 1 AA' in Figure 3 for Figure 2 A partial enlarged detail of the middle M part. Figure 4 This is a side cross-sectional view of the liquid injection pipe adjustment assembly, with the section line being Figure 2 BB' in the figure, the liquid spray pipe adjustment assembly comprises: a fixed frame 10, a first ball joint 411 structure, a second ball joint 412 structure and a movable pipeline;
[0044] The fixed frame 10 includes a pipeline movable cavity 15, a first axial hole 16 and a second axial hole 17, wherein the pipeline movable cavity 15 is connected to the first axial hole 16 and the second axial hole 17; the first ball joint 411 structure includes a first fixed structure, and the second ball joint 412 structure includes a second fixed structure; the movable pipeline includes a liquid spraying pipe 41, which passes through the pipeline movable cavity 15 and is pin-connected to the first axial hole 16 and the second axial hole 17, and one end of the liquid outlet of the liquid spraying pipe 41 extends out of the pipeline movable cavity 15;
[0045] A first ball joint 411 is disposed on the outer wall of the liquid spraying pipe 41 at a position corresponding to the first shaft hole 16. The first ball joint 411 is located in the first shaft hole 16 and can roll in the first shaft hole 16. The first fixing structure can control the first ball joint 411 to be unable to move in the first shaft hole 16.
[0046] A second ball joint 412 is disposed on the outer wall of the liquid spraying pipe 41 at a position corresponding to the second shaft hole 17. The second ball joint 412 is located in the second shaft hole 17 and can roll in the second shaft hole 17. The second fixing structure can control the second ball joint 412 to be unable to move in the second shaft hole 17.
[0047] The inner diameter of the pipeline active cavity 15 is set according to a preset distribution, and the spray pipe 41 can rotate in the pipeline active cavity 15 through the rolling of the first ball joint 411 and the second ball joint 412 to adjust the position of one end of the liquid outlet of the spray pipe 41.
[0048] In the prior art, during the liquid supply cleaning process, the liquid spray pipe 41 of the liquid supply swing arm must ensure both the distance and angle from the wafer and the overall stability during liquid supply. However, the position and size of the liquid spray pipe 41 of the traditional liquid supply swing arm are fixed after production, and the height and angle of the liquid outlet of the liquid spray pipe 41 cannot be flexibly adjusted. The liquid spray pipe 41 can only be ensured to have the required posture for the wafer to be cleaned by improving the processing accuracy. This results in the need to equip liquid supply swing arms with different structures to meet the different requirements of the corresponding liquid outlet height and angle when corresponding to wafers of different sizes or wafers that need to be cleaned at different positions. As a result, a new liquid supply swing arm needs to be equipped for each different liquid outlet position requirement, resulting in poor flexibility in the use of the liquid supply swing arm and high application cost. At the same time, after the liquid supply swing arm has been running for a long time, the position of the liquid outlet will have a certain offset, and the liquid supply swing arm cannot flexibly adjust the position of the liquid spray pipe 41, and cannot correct the offset angle of the liquid outlet in time. Manual adjustment of the liquid spray pipe 41 cannot guarantee that the liquid spray pipe 41 can maintain the adjusted position after being adjusted. Only replacing a new liquid supply swing arm to ensure the position accuracy of the liquid outlet will further increase the replacement cost of the liquid supply swing arm.
[0049] The present invention provides a first ball joint 411 structure and a second ball joint 412 structure, so that the liquid outlet of the liquid spray pipe 41 extending out of the pipeline active cavity 15 can be directly adjusted manually to a suitable position, and then the first ball joint 411 and the second ball joint 412 are fixed by the first fixing structure and the second fixing structure, so that the liquid outlet position of the liquid spray pipe 41 can be maintained at the adjusted position, so that the liquid spray pipe adjustment assembly can directly manually adjust the liquid outlet position of the liquid spray pipe 41 when used for different types of wafer cleaning to perform adaptive adjustment of the liquid spray pipe 41, so that the liquid spray pipe adjustment assembly can be applicable to a variety of wafer cleaning processes of different sizes or types, thereby improving the liquid spray pipe adjustment efficiency. The assembly is flexible in use. At the same time, since a liquid spray pipe adjustment assembly can adapt to different wafer cleaning scenarios directly by adjusting the liquid outlet of the liquid spray pipe 41, there is no need to equip different liquid spray pipe 41 structures for different wafer cleaning scenarios, thereby reducing the use cost of the liquid spray pipe 41 structure. Moreover, since the position of the liquid outlet of the liquid spray pipe 41 can be directly adjusted and fixed, when the position of the liquid outlet of the liquid spray pipe 41 that has been running for a long time has a certain offset, the position of the liquid spray pipe 41 can be flexibly adjusted and then fixed, thereby timely correcting the offset angle of the liquid outlet, without the need to replace a new liquid spray pipe 41, and the maintenance and replacement costs of the liquid spray pipe 41 can be further reduced.
[0050] Specifically, although the concept of the present invention mainly comes from the problem of adjusting the liquid outlet position of the spray pipe 41 used for wafer cleaning, the solution of the present invention can also be used in other semiconductor process equipment that requires flexible adjustment of the liquid outlet position of the spray pipe 41, all of which are within the protection scope of the present invention.
[0051] In one embodiment, Figure 3-Figure 4 As shown, the first fixing structure includes a first ball pin 21, a first clamping threaded hole 22 and a first clamping screw 23; the first ball pin 21 is a ball table annular shell located in the first axial hole 16 and can be contracted under force, the ball table annular shell includes two opposite circular bottom openings, and the spray pipe 41 passes through the two circular bottom openings of the ball table annular shell; the first clamping threaded hole 22 is located at a position above the fixing frame 10 corresponding to the first axial hole 16, and the first clamping threaded hole 22 exposes the first ball pin 21; the first clamping screw 23 can be threadedly connected to the first clamping threaded hole 22, and the first clamping screw 23 can be screwed into the first clamping threaded hole 22 to clamp the first ball pin 21 so that the first ball joint 411 in the first ball pin 21 cannot move.
[0052] In one embodiment, the ball band of the ball table annular shell of the first ball pin 21 includes a deformation gap, and the deformation gap is located on the cross-section of the ball table annular shell perpendicular to the circular bottom opening; when the first ball pin 21 is pressed, the deformation gap shrinks, so that the inner surface of the ball table annular shell presses the first ball joint 411 inside, making the first ball joint 411 unable to move.
[0053] The present invention arranges the first ball pin 21 to include a deformation gap, so that the first ball joint 411 can be fixed by pressing the first ball pin 21 with the first clamping screw 23, thereby fixing the position of the liquid outlet of the spray pipe 41 after adjustment. The structure is simple and the operation is convenient, which is conducive to improving the operating efficiency of the spray pipe adjustment assembly.
[0054] In one embodiment, Figure 3-Figure 4 As shown, the second fixing structure is a second ball pin 31, a second clamping threaded hole 32 and a second clamping screw 33; the second ball pin 31 is a ball table annular shell located in the second axial hole 17 and can be contracted under force, the ball table annular shell includes two opposite circular bottom openings, and the spray pipe 41 passes through the two circular bottom openings of the ball table annular shell; the second clamping threaded hole 32 is located at a position above the fixing frame 10 corresponding to the second axial hole 17, and the second clamping threaded hole 32 exposes the second ball pin 31; the second clamping screw 33 can be threadedly connected to the second clamping threaded hole 32, and the second clamping screw 33 can be screwed into the second clamping threaded hole 32 to clamp the second ball pin 31 so that the second ball joint 412 in the second ball pin 31 cannot move.
[0055] In one embodiment, Figure 3 As shown, the ball band of the ball table annular shell of the second ball pin 31 includes a deformation gap 311, and the deformation gap 311 is located on the cross section of the ball table annular shell perpendicular to the circular bottom opening; when the second ball pin 31 is pressed, the deformation gap 311 shrinks, so that the inner surface of the ball table annular shell presses the second ball joint 412 inside, making the second ball joint 412 unable to move.
[0056] The present invention arranges the second ball pin 31 to include a deformation gap 311, so that the second ball joint 412 can be fixed by pressing the second ball pin 31 with the second clamping screw 33, thereby fixing the position of the liquid outlet of the spray pipe 41 after adjustment. The structure is simple and the operation is convenient, which is conducive to improving the operating efficiency of the spray pipe adjustment assembly.
[0057] Specifically, the first fixing structure and the second fixing structure may also adopt other suitable structures to fix the position of the ball joint, all of which are within the protection scope of the present invention.
[0058] In one embodiment, Figure 4 As shown, the fixed frame 10 also includes a lifting chamber 18 and a lifting control structure;
[0059] The lifting chamber 18 is located at the position where the pipeline active chamber 15 passes through the first shaft hole 16. The lifting chamber 18 includes a lifting block 181. The first shaft hole 16 is located in the lifting block 181. The liquid spraying pipe 41 passes through the lifting block 181 and is pin-connected in the first shaft hole 16. The first fixing structure controls the first ball joint 411 in the first shaft hole 16 from the fixing frame 10 above the lifting block 181 through the lifting block 181.
[0060] The lifting control structure includes a lifting threaded hole 182, a lifting screw 183, a limiting step hole 184 and a lifting control hole 185; the lifting threaded hole 182 is located on the fixed frame 10 below the lifting block 181, and the lifting threaded hole 182 reveals the bottom of the lifting cavity 18; the limiting step hole 184 is located below the lifting threaded hole 182, and the aperture of the limiting step hole 184 is larger than the aperture of the lifting threaded hole 182; the lifting screw 183 includes a connected head 1831 and a stud 1832, the limiting step hole 184 includes an upper hole surface and a lower hole surface, the head 1831 is between the upper hole surface and the lower hole surface of the limiting step hole 184, and the diameter of the head 1831 is larger than the inner hole diameter of the upper hole surface and the lower hole surface of the lifting threaded hole 182, so that the head 1831 can rotate in the limiting step hole 184 but cannot move up and down;
[0061] The stud 1832 can be threadedly connected to the lifting threaded hole 182, and the lifting control hole 185 is located at a position below the fixed frame 10 corresponding to the limiting step hole 184 and passes through the fixed frame 10 below the limiting step hole 184, so that the head 1831 can be rotated from the lifting control hole 185 at the bottom of the fixed frame 10, and the rotation of the head 1831 can control the lifting block 181 to drive the lifting movement of the first ball joint 411.
[0062] By setting up a lifting chamber 18 and a lifting control structure, the present invention can control the height of the first ball joint 411 through the lifting screw 183, thereby further improving the position adjustment accuracy of the liquid outlet of the spray pipe 41, thereby further improving the position accuracy of the liquid outlet of the spray pipe 41 and improving adaptability to different wafer cleaning scenarios.
[0063] In one embodiment, Figure 4As shown, the fixed frame 10 also includes a limiting structure, which includes a limiting threaded hole 191 and a limiting screw 192; the limiting threaded hole 191 passes through the fixed frame 10 at a corresponding position above the first fixed structure, and the limiting screw 192 can be threadedly connected to the limiting threaded hole 191. The limiting screw 192 can be screwed into the limiting threaded hole 191 to limit the rising height of the lifting block 181 below.
[0064] The present invention can limit the rising height of the lifting block 181 by setting a limiting structure, thereby preventing the lifting screw 183 from being rotated when the lifting block 181 rises to the limit position, causing deformation and damage to the pipeline active cavity 15, and affecting the service life of the spray pipe adjustment assembly; at the same time, by understanding the depth of the limiting screw 192 screwed into the limiting threaded hole 191, it can be determined that the rising height of the lifting block 181 corresponding to different wafer cleaning scenarios is different, thereby increasing the control force of adjusting the liquid outlet position of the spray pipe 41 for different wafer cleaning scenarios during the adjustment process, thereby improving the adaptability of the spray pipe adjustment assembly.
[0065] In one embodiment, Figure 4 As shown, the movable pipeline further includes a connecting pipe 42, and one end of the liquid spraying pipe 41 away from the liquid outlet is connected to the connecting pipe 42, and the connecting pipe 42 is used to pass the liquid to be sprayed.
[0066] In one embodiment, Figure 4 As shown, the connecting pipe 42 is a deformable hose, and the connecting pipe 42 can be deformed by applying stress from the liquid spraying pipe 41 toward the connecting pipe 42 so that the liquid spraying pipe 41 is displaced toward the connecting pipe 42 .
[0067] The present invention provides a deformable connecting pipe 42 to connect with the end of the spray pipe 41 away from the liquid outlet, so that the spray pipe 41 can be extended and retracted along the direction of the pipeline active cavity 15, and the length of the liquid outlet of the spray pipe 41 extending out of the pipeline active cavity 15 can be adjusted, thereby further improving the freedom of adjusting the spray position of the spray pipe 41, which is conducive to further improving the flexibility of use of the spray pipe adjustment assembly.
[0068] In one embodiment, Figure 1-Figure 3 As shown, the fixed frame 10 includes a bottom plate 11, an adjusting substrate 12, a first cover plate 13 and a second cover plate 14; the adjusting substrate 12 is fixed on the bottom plate 11, and the first cover plate 13 and the second cover plate 14 are fixed on the adjusting substrate 12; the first axial hole 16 is located between the adjusting substrate 12 and the first cover plate 13, and the second axial hole 17 is located between the adjusting substrate 12 and the second cover plate 14.
[0069] The present invention adopts different cover plates by setting the first axial hole 16 and the second axial hole 17 respectively, thereby reducing the possibility of problems such as poor structural strength and easy breakage caused by uneven stress distribution inside the cover plate due to different stresses generated by the first ball joint 411 and the second ball joint 412 on the cover plate during rolling, thereby improving the structural reliability and service life of the spray pipe adjustment assembly.
[0070] Specifically, Figure 4 As shown, the inner diameter distribution of the pipeline active cavity 15 needs to make the range of the spray pipe 41 during the rotation process meet the range requirement of the spray pipe 41 adjustment. The inner diameter distribution of the pipeline active cavity 15 needs to be designed accordingly between the first axial hole 16 and the second axial hole 17, from the second axial hole 17 to the position where the spray pipe 41 extends out of the pipeline active cavity 15, and the position where the spray pipe 41 is connected to the connecting pipe 42.
[0071] In one embodiment, the adjustment base plate 12 in the spray pipe adjustment assembly is installed on the base plate 11 by bolt connection; the first cover plate 13 is installed on the adjustment base plate 12 by bolt connection, and the second cover plate 14 is fixed on the adjustment base plate 12 by bolt connection; the lifting block 181 is connected to the inside of the adjustment base plate 12 by a pin shaft and can slide up and down in the adjustment base plate 12.
[0072] In one embodiment, the method of using the liquid spray pipe adjustment assembly is:
[0073] Loosen the first clamping screw 23 and the second clamping screw 33, thereby releasing the pressure of the first ball pin 21 and the second ball pin 31 on the ball joint, so that the first ball joint 411 and the second ball joint 412 included in the liquid spraying pipe 41 can move freely in the first ball pin 21 and the second ball pin 31;
[0074] The position of the liquid outlet of the liquid spray pipe 41 is adjusted by manually directly moving one end of the liquid spray pipe 41 extending out of the pipeline active cavity 15; and / or after rotating the limit screw 192 to a preset limit height, the lifting screw 183 is rotated to drive the lifting block 181 to drive the first ball joint 411 to perform lifting and lowering movements, thereby driving the rotation of the liquid spray pipe 41 to adjust the liquid outlet of the liquid spray pipe 41 to a suitable position; and / or the connecting pipe 42 is deformed by pushing and pulling the liquid spray pipe 41 along the direction of the pipeline active cavity 15 to adjust the length position of the liquid outlet of the liquid spray pipe 41 extending out of the pipeline active cavity 15;
[0075] The first clamping screw 23 and the second clamping screw 33 are tightened to prevent the first ball joint 411 and the second ball joint 412 from moving in the first ball pin 21 and the second ball pin 31 , thereby fixing the position of the liquid outlet of the liquid spraying pipe 41 .
[0076] Specifically, by directly adjusting one end of the spray pipe 41 extending out of the pipeline active cavity 15, the position of the liquid outlet of the spray pipe 41 on the plane perpendicular to the pipeline active cavity 15 can be controlled, and by pushing and pulling the spray pipe 41, the length position of the liquid outlet of the spray pipe 41 extending out of the pipeline active cavity 15 can be controlled, thereby realizing the adjustment freedom of the liquid outlet of the spray pipe 41 in three-dimensional space, greatly improving the position adjustment flexibility of the spray pipe 41.
[0077] Specifically, the part for manually adjusting the liquid spraying pipe 41 may also be replaced by an automatic control structure such as a programmable robotic arm to further improve the adjustment precision and accuracy.
[0078] In summary, the spray pipe adjustment assembly of the present invention can be provided with a first ball joint structure and a second ball joint structure so that the spray pipe can be directly manually adjusted to a suitable position and then fixed, so that the spray pipe adjustment assembly can be suitable for different types of wafer cleaning, and at the same time, the spray position of the spray pipe can be adjusted quickly and conveniently, thereby improving the spray accuracy and reducing the cost of replacing the spray pipe; in addition, through the lifting chamber and the lifting control structure, the height of the first ball joint can be controlled by the lifting screw, thereby further improving the spray position accuracy of the spray pipe; finally, in conjunction with the deformable connecting pipe, the spray pipe can be adjusted in length in the telescopic direction, thereby improving the freedom of adjustment of the spray position of the spray pipe.
[0079] Therefore, the present invention effectively overcomes various shortcomings in the prior art and has high industrial utilization value.
[0080] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.
Claims
1. A liquid spray pipe adjustment assembly, characterized in that: The liquid spray pipe adjustment assembly is used in a wafer cleaning process, and the liquid spray pipe adjustment assembly comprises: a fixed frame, a first ball joint structure, a second ball joint structure and a movable pipeline; The fixed frame includes a pipeline movable cavity, a first axial hole and a second axial hole, the pipeline movable cavity communicates with the first axial hole and the second axial hole; the first ball joint structure includes a first fixed structure, and the second ball joint structure includes a second fixed structure; the movable pipeline includes a liquid spraying pipe, the liquid spraying pipe passes through the pipeline movable cavity and is pin-connected in the first axial hole and the second axial hole, and one end of the liquid outlet of the liquid spraying pipe extends out of the pipeline movable cavity; A first ball joint is disposed at a position of the outer wall of the liquid spraying pipe corresponding to the first shaft hole, the first ball joint is located in the first shaft hole and can roll in the first shaft hole, and the first fixing structure can control the first ball joint to be unable to move in the first shaft hole; A second ball joint is disposed at a position of the outer wall of the liquid spraying pipe corresponding to the second axial hole, the second ball joint is located in the second axial hole and can roll in the second axial hole, and the second fixing structure can control the second ball joint to be unable to move in the second axial hole; The inner diameter of the pipeline movable cavity is set according to a preset distribution, and the liquid spraying pipe can rotate in the pipeline movable cavity through the rolling of the first ball joint and the second ball joint to adjust the position of one end of the liquid outlet of the liquid spraying pipe; The fixed frame also includes a lifting cavity and a lifting control structure; The lifting chamber is located at the position where the pipeline activity chamber passes through the first shaft hole, the lifting chamber includes a lifting block, the first shaft hole is located in the lifting block, the liquid injection pipe passes through the lifting block and is pin-connected in the first shaft hole, and the first fixing structure controls the first ball joint in the first shaft hole from the fixing frame above the lifting block through the lifting block; The lifting control structure comprises a lifting threaded hole, a lifting screw, a limiting step hole and a lifting control hole; the lifting threaded hole is located in the fixed frame below the lifting block, and the lifting threaded hole exposes the bottom of the lifting cavity; the limiting step hole is located below the lifting threaded hole, and the aperture of the limiting step hole is larger than the aperture of the lifting threaded hole; the lifting screw comprises a connected head and a stud, the limiting step hole comprises an upper hole surface and a lower hole surface, the head is between the upper hole surface and the lower hole surface of the limiting step hole, and the diameter of the head is larger than the inner hole diameter of the upper hole surface and the lower hole surface of the lifting threaded hole, so that the head can rotate in the limiting step hole but cannot move up and down; The stud can be threadedly connected to the lifting threaded hole, and the lifting control hole is located at a position below the fixed frame corresponding to the limiting step hole and penetrates the fixed frame below the limiting step hole, so that the head can be rotated from the lifting control hole at the bottom of the fixed frame, and the rotation of the head can control the lifting block to drive the lifting movement of the first ball joint.
2. The liquid spray pipe adjustment assembly according to claim 1, characterized in that: The first fixing structure includes a first ball pin, a first tightening threaded hole and a first tightening screw; the first ball pin is a ball table annular shell located in the first axial hole and can be contracted under force, the ball table annular shell includes two opposite circular bottom openings, and the spray pipe passes through the two circular bottom openings of the ball table annular shell; the first tightening threaded hole is located at a position above the first axial hole corresponding to the fixing frame, and the first tightening threaded hole exposes the first ball pin; the first tightening screw can be threadedly connected to the first tightening threaded hole, and the first tightening screw can be screwed into the first tightening threaded hole to tighten the first ball pin so that the first ball joint in the first ball pin cannot move.
3. The liquid spray pipe adjustment assembly according to claim 2, characterized in that: The ball band of the ball table annular shell of the first ball pin includes a deformation gap, and the deformation gap is located on the cross section of the ball table annular shell perpendicular to the circular bottom opening; when the first ball pin is pressed, the deformation gap shrinks, so that the inner surface of the ball table annular shell presses the first ball joint inside, making the first ball joint unable to move.
4. The liquid spray pipe adjustment assembly according to claim 1, characterized in that: The second fixing structure is a second ball pin, a second clamping threaded hole and a second clamping screw; the second ball pin is a ball table annular shell located in the second axial hole and can be contracted under force, the ball table annular shell includes two opposite circular bottom surface openings, and the spray pipe passes through the two circular bottom surface openings of the ball table annular shell; the second clamping threaded hole is located at a position above the fixing frame corresponding to the second axial hole, and the second clamping threaded hole exposes the second ball pin; the second clamping screw and the second clamping threaded hole can be threadedly connected, and the second clamping screw can be screwed into the second clamping threaded hole to clamp the second ball pin so that the second ball joint in the second ball pin cannot move.
5. The liquid spray pipe adjustment assembly according to claim 4, characterized in that: The ball band of the ball table annular shell of the second ball pin includes a deformation gap, and the deformation gap is located on the cross-section of the ball table annular shell perpendicular to the circular bottom opening; when the second ball pin is pressed, the deformation gap shrinks, so that the inner surface of the ball table annular shell presses the second ball joint inside, making the second ball joint unable to move.
6. The liquid spray pipe adjustment assembly according to claim 1, characterized in that: The fixed frame also includes a limiting structure, which includes a limiting threaded hole and a limiting screw; the limiting threaded hole passes through the corresponding position of the fixed frame above the first fixed structure, the limiting screw and the limiting threaded hole can be threadedly connected, and the limiting screw can be screwed into the limiting threaded hole to limit the rising height of the lifting block below.
7. The liquid spray pipe adjustment assembly according to claim 1, characterized in that: The movable pipeline also includes a connecting pipe, one end of the liquid spraying pipe away from the liquid outlet is connected to the connecting pipe, and the connecting pipe is used to pass the liquid to be sprayed.
8. The liquid spray pipe adjustment assembly according to claim 7, characterized in that: The connecting pipe is a deformable hose, and the liquid spraying pipe applies stress in the direction of the connecting pipe to deform the connecting pipe so that the liquid spraying pipe is displaced in the direction of the connecting pipe.
9. The liquid spray pipe adjustment assembly according to claim 1, characterized in that: The fixed frame comprises a bottom plate, an adjustment substrate, a first cover plate and a second cover plate, the adjustment substrate is fixed on the bottom plate, and the first cover plate and the second cover plate are fixed on the adjustment substrate; The first shaft hole is located between the adjusting substrate and the first cover plate, and the second shaft hole is located between the adjusting substrate and the second cover plate.