InP seed crystal surface treatment device and working method thereof

By using limit protection components in the InP seed surface treatment device, the problem of liquid sputtering and operation troubles during the cleaning process is solved, and the container is stable in and out quickly is realized, thereby improving work efficiency.

CN118904805BActive Publication Date: 2024-12-31SUZHOU ZHONGYU SEMICON MATERIALS CO LTD
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Patent Information

Application Number
CN202411148619.7
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2024-08-21
Publication Date
2024-12-31
Estimated Expiration
2044-08-21

AI Technical Summary

Technical Problem

In the prior art, the seed crystal container is sputtered in the container due to the rotation of the third container during the cleaning process, and the traditional limit work installation is troublesome, which is not conducive to the rapid pick-up and placement of the container.

Method used

An InP seed crystal surface treatment device is designed, and the limit protection component is adopted, including a limit cylinder, a guide plate, a protective plate, a limit plate and a buffer strip. The vertical movement of the container and the sliding of the guide plate are achieved to achieve the stability of the container. Place and prevent liquid sputtering, and use a buffer bar to achieve rapid top-push removal when taken out.

Benefits of technology

It effectively prevents the liquid in the container from splashing outward, improves the stability of the container in the container, simplifies the container pick-up and placement process, and improves work efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention relates to the field of cleaning technology, in particular to cleaning in contact with liquid, specifically to an InP seed crystal surface treatment device and a working method thereof; the present invention provides an InP seed crystal surface treatment device, comprising: a workbench, on which a plurality of containing boxes are rotatably arranged, the containing boxes being suitable for containing containers; a position limiting protection component, which is arranged in the containing boxes, the position limiting protection component being suitable for limiting liquid splashing in the container; wherein, when the container moves vertically downward, the guide piece of the position limiting protection component slides to both sides so that the container is inserted into the position limiting protection component; the protection plate of the position limiting protection component is suitable for covering the open upper end of the container; through the arrangement of the position limiting protection component, the descending speed of the container can be buffered during the process of placing the container therein, and at the same time, after the container is placed therein, the protection plate can prevent the liquid in the container from splashing outward, thereby improving the stability of the container in the containing box.
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Description

Technical Field

[0001] The present invention relates to the field of cleaning technology, in particular to cleaning in contact with liquid, and specifically to an InP seed crystal surface treatment device and a working method thereof. Background Art

[0002] Authorization announcement number: CN217342554U, discloses a seed crystal cleaning device. The utility model arranges a plurality of third containing boxes in the second cleaning area. The third containing boxes are containers for containing seed crystals, and the containers contain acetone solution.

[0003] However, after the container is placed in the third container box, the container will be displaced relative to the third container box due to the circumferential rotation of the third container box. Although the container can be clamped and fixed by a limiting tool, the rotation of the third container box will cause the solution in the container to splash outward.

[0004] At the same time, the traditional limiting tooling is cumbersome to operate during the process of taking and placing containers, which is not conducive to the rapid taking and placing of containers.

[0005] Therefore, how to solve the shaking of the container and the splashing of the liquid therein is a technical problem that urgently needs to be solved in this field. Summary of the invention

[0006] The object of the present invention is to provide an InP seed crystal surface treatment device and a working method thereof.

[0007] In order to solve the above technical problems, the present invention provides an InP seed crystal surface treatment device, comprising:

[0008] A workbench, on which a plurality of containing boxes are rotatably arranged, wherein the containing boxes are suitable for containing containers;

[0009] A position limiting protection component, which is arranged on the container box and is suitable for limiting the splashing of liquid in the container;

[0010] The container moves vertically downward, and the guide pieces of the position limiting protection assembly slide to both sides so that the container is inserted into the position limiting protection assembly;

[0011] The protection plate of the position limiting protection assembly is suitable for covering the open upper end of the container.

[0012] Preferably, the position limiting protection assembly comprises: a position limiting cylinder, which is vertically arranged in the container box;

[0013] A guide sheet, two guide sheets are arranged opposite to each other, and the guide sheets are suitable for sliding radially along the limiting cylinder;

[0014] Protective plates, the two protective plates are slidably arranged on the limiting cylinder, and the lower ends of the guide plates are fixed on the protective plates;

[0015] The container pushes the two guide plates to move apart, and after the container is placed in the limiting cylinder, the bottom wall of the protection plate is suitable for abutting against the open cup wall of the container.

[0016] Preferably, two limiting plates are slidably arranged in the limiting cylinder, one limiting plate corresponds to one protective plate, and the limiting plates are linked to the protective plates.

[0017] Preferably, a protrusion is fixed to the lower end of the protective plate, and the protrusion is suitable for abutting against the inner wall of the limiting plate.

[0018] Preferably, a positioning strip is fixed to the outer wall of the limiting piece, the positioning strip passes through the limiting tube, and the positioning strip is suitable for abutting against the inner wall of the containing box.

[0019] Preferably, the limiting piece is in an arc shape, and the outer diameter of the circle formed by the two limiting pieces is smaller than the inner diameter of the limiting cylinder.

[0020] Preferably, a support plate is fixed to the inner wall of each of the limiting plates, and the line where the two support plates abut against each other and the line where the two limiting plates abut against each other are perpendicular to each other.

[0021] Preferably, a buffer bar is fixed on the support plate, and one end of the buffer bar is slidably disposed on another support plate that is oppositely disposed.

[0022] Preferably, the buffer strip is arranged along the circumference of the inner wall of the limiting piece;

[0023] When the two limiting plates move away from each other, the two buffer strips move toward each other.

[0024] Preferably, the longitudinal section of the buffer strip is trapezoidal, and the inner wall of the buffer strip is arc-shaped.

[0025] Preferably, a slide groove adapted to the protective plate is provided on the limiting cylinder, and the bottom wall of the protective plate is adapted to abut against the inner bottom wall of the slide groove;

[0026] Wherein, when the two protection plates move away from each other, the side wall of the slide groove is suitable for scraping off the liquid adhered to the bottom wall of the protection plate.

[0027] On the other hand, the present invention also provides a working method of an InP seed crystal surface treatment device, comprising:

[0028] When the container is moved vertically downward and placed into the container box, the container presses the two guide plates to move them apart until the container is inserted into the limit protection assembly;

[0029] After the container is placed inside, the two protection plates move toward each other, and while clamping the container to limit the position, the protection plates cover the upper end of the container to prevent the liquid in the container from splashing outward.

[0030] The beneficial effect of the present invention is that the InP seed crystal surface treatment device of the present invention, through the setting of the limit protection component, can buffer the descent speed of the container during the process of placing the container therein, and at the same time, after the container is placed inside, the protection plate can prevent the liquid in the container from splashing outward, thereby improving the stability of the container in the container box; at the same time, in the process of taking out the container, the two limit bars move towards each other to push the container upward, which is convenient for quickly taking the container out of the limit cylinder, thereby improving work efficiency.

[0031] Other features and advantages of the present invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practicing the present invention.

[0032] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0034] Figure 1 is a stereogram of a preferred embodiment of an InP seed crystal surface treatment device according to an embodiment of the present invention;

[0035] Figure 2 is a first-perspective stereoscopic diagram of a position limiting protection assembly according to an embodiment of the present invention;

[0036] Figure 3 is a second perspective stereogram of the position limiting protection assembly according to an embodiment of the present invention;

[0037] Figure 4 is a sectional stereoscopic view of the inner wall of the limiting cylinder according to an embodiment of the present invention;

[0038] Figure 5 is a longitudinal sectional stereoscopic view of a position limiting protection assembly according to an embodiment of the present invention;

[0039] Figure 6 is a schematic diagram of the moving state of the buffer strip and the limiting piece according to an embodiment of the present invention;

[0040] Figure 72 is a three-dimensional diagram of a support plate and a buffer strip located on the left side of an embodiment of the present invention.

[0041] 1. Workbench;

[0042] 2. Container box;

[0043] 3. Position limiting protection assembly; 31. Position limiting cylinder; 32. Guide piece; 33. Protection plate; 34. Position limiting piece; 35. Bump; 36. Positioning strip; 37. Support plate; 38. Buffer strip;

[0044] 4 containers. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0046] like Figures 1 to 7 As shown, in at least one embodiment, an InP seed crystal surface treatment device is provided, comprising: a workbench 1, on which a plurality of containing boxes 2 are rotatably arranged, and the containing boxes 2 are suitable for containing containers 4; the container 4 described in this embodiment may be a glass container 4, and preferably, the container 4 may be a beaker. A position limiting protection component 3 is arranged on the containing box 2, and the position limiting protection component 3 is suitable for limiting the splashing of liquid in the container 4; the position limiting protection component 3 is detachably arranged in the containing box 2, and the diameter of the position limiting cylinder 31 is greater than the diameter of the container 4. Wherein, the container 4 moves vertically downward, and the guide piece 32 of the position limiting protection component 3 slides to both sides so that the container 4 is inserted into the position limiting protection component 3; the protection plate 33 of the position limiting protection component 3 is suitable for covering the open upper end of the container 4. By setting the limiting protection assembly 3, the descending speed of the container 4 can be buffered during the process of placing the container 4 therein. At the same time, after the container 4 is placed therein, the protection plate 33 can prevent the liquid in the container 4 from splashing outward, thereby improving the stability of the container 4 in the containing box 2; at the same time, in the process of taking out the container 4, the two buffer bars move toward each other to push the container 4 to move upward, which is convenient for quickly taking the container 4 out of the limiting cylinder 31, thereby improving work efficiency.

[0047] Reference Figure 2The position limiting protection assembly 3 comprises: a position limiting cylinder 31, which is vertically arranged in the container box 2; a fixed work clamp is fixed in the container box 2, and the fixed workpiece is suitable for clamping the fixed position limiting cylinder 31. Furthermore, a through groove is provided on the side wall of the fixed workpiece, and the positioning strip 36 is suitable for inserting into the through groove to improve the stability of the fixing between the position limiting cylinder 31 and the fixed work clamp. A guide piece 32, two guide pieces 32 are arranged oppositely, and the guide pieces 32 are suitable for radially sliding along the position limiting cylinder 31; the guide pieces 32 are arranged obliquely, and the inclined surfaces of the two guide pieces 32 are arranged oppositely. When the container 4 moves vertically downward, the bottom wall of the container 4 is suitable for squeezing the inclined surface of the guide piece 32, and the container 4 is suitable for pushing the two guide pieces 32 to move apart. The protective plates 33 are slidably arranged on the limiting cylinder 31, and the lower end of the guide piece 32 is fixed on the protective plates 33; when the guide piece 32 is pushed outward by the container 4, the guide piece 32 is suitable for driving the protective plates 33 to slide outward synchronously. In order to facilitate the reset movement of the protective plates 33, two reset springs are symmetrically fixed on the inner wall of the limiting cylinder 31, and one reset spring corresponds to one protective plate 33; when the container 4 is placed in the limiting cylinder 31, the reset spring is suitable for pushing the protective plates 33 to move inward until the ends of the two protective plates 33 abut. Among them, the container 4 pushes the two guide pieces 32 to move away from each other, and after the container 4 is placed in the limiting cylinder 31, the bottom wall of the protective plate 33 is suitable for abutting against the open cup wall of the container 4.

[0048] Reference Figure 3 In order to facilitate the positioning and fixing of the container 4, two limiting pieces 34 are slidably arranged in the limiting cylinder 31, one limiting piece 34 corresponds to one protective plate 33, and the limiting piece 34 is linked with the protective plate 33. A spring is arranged between the outer wall of the limiting piece 34 and the limiting cylinder 31, and the spring is suitable for pushing the limiting piece 34 to move toward the axial direction. The limiting piece 34 is in an arc shape, and the two limiting pieces 34 are suitable for positioning the container 4 when they move toward each other and abut against each other.

[0049] Reference Figure 5 In order to facilitate the movement of the limiting piece 34 outward, a protrusion 35 is fixed at the lower end of the protective plate 33, and the protrusion 35 is suitable for abutting against the inner wall of the limiting piece 34. The protrusion 35 is arranged at the bottom wall of one protective plate 33 near the other protective plate 33, and the container 4 pushes the guide piece 32 to move outward. After the protrusion 35 abuts against the inner wall of the limiting piece 34, when the protective plate 33 continues to move outward, the protrusion 35 pushes the limiting piece 34 to move outward synchronously.

[0050] Reference Figure 3In order to improve the stability of the fixing between the limiting tube 31 and the container box 2, a positioning strip 36 is fixed to the outer wall of the limiting piece 34, and the positioning strip 36 passes through the limiting tube 31, and the positioning strip 36 is suitable for abutting against the inner wall of the container box 2. When the two guide pieces 32 are pushed outward by the container 4, the limiting piece 34 moves outward synchronously, and the positioning strip 36 passes through the limiting tube 31, and the positioning strip 36 is suitable for inserting and fixing the side wall of the work clamp, thereby improving the fixing stability of the limiting tube 31 in the container box 2. In addition, due to the presence of the positioning strip 36, the limiting tube 31 becomes a detachable setting, so as to facilitate subsequent overall disassembly, replacement or cleaning.

[0051] Reference Figure 6 The limiting piece 34 is in the shape of an arc, and the circle formed by the two limiting pieces 34 has an outer diameter that is smaller than the inner diameter of the limiting tube 31. The inner diameter of the limiting piece 34 is not smaller than the outer diameter of the container 4. A support plate 37 is fixed to the inner wall of each limiting piece 34, and the support plate 37 is semicircular, and the two support plates 37 are arranged opposite to each other; when the limiting piece 34 moves outward, it is suitable for driving the corresponding support plate 37 to move outward synchronously, and at this time, the support plate 37 drives a corresponding buffer bar 38 to move toward the axial direction. The line where the two support plates 37 abut against each other is perpendicular to the line where the two limiting pieces 34 abut against each other. A buffer bar 38 is fixed on the support plate 37, and the buffer bar 38 is arranged at one end of the support plate 37 away from the limiting piece 34; one end of the buffer bar 38 is slidably arranged on another support plate 37 arranged oppositely. The buffer strip 38 is arranged along the circumference of the inner wall of the limiting piece 34; wherein, when the two limiting pieces 34 move apart, the two buffer strips 38 move toward each other. The longitudinal section of the buffer strip 38 is trapezoidal, and the inner wall of the buffer strip 38 is arc-shaped. The buffer strip 38 is a flexible member, and when the two limiting pieces 34 move apart, the limiting piece 34 drives a corresponding support plate 37 to move outward, and the support plate 37 drives a corresponding buffer strip 38 to move inward, until the bottom of the container 4 abuts against the buffer strip 38; after the container 4 is completely placed in the limiting tube 31, the reset spring pushes the protective plate 33 to reset and slide inward, and the two limiting pieces 34 move toward each other synchronously; refer to the attached Figure 4 The two buffer bars 38 move away from each other until the inner wall of the buffer bar 38 abuts against the outer wall of the container 4. The two buffer bars 38 are suitable for clamping the limiting container 4 from both sides.

[0052] When taking out the container 4, the two protective plates 33 move away from each other. At this time, the two buffer bars 38 move toward each other. The inner arc surface of the buffer bar 38 is suitable for pushing the container 4 to move upward along the axial direction of the limiting cylinder 31, so as to facilitate the clamping robot to clamp the container 4 from the limiting cylinder 31.

[0053] Furthermore, in order to prevent the liquid on the bottom wall of the protective plate 33 from dripping into the container 4, a slide groove adapted to the protective plate 33 is provided on the limiting cylinder 31, and the bottom wall of the protective plate 33 is adapted to abut against the inner bottom wall of the slide groove; wherein, when the two protective plates 33 move away from each other, the side wall of the slide groove is adapted to scrape off the liquid adhering to the bottom wall of the protective plate 33. The liquid remaining on the bottom wall of the protective plate 33 is scraped off by the inner wall of the limiting cylinder 31, and the liquid is adapted to drip downward along the inner wall of the limiting cylinder 31, thereby preventing the liquid remaining on the protective plate 33 from dripping into the container 4 when the protective plate 33 is covered on the next container 4 again.

[0054] The specific working principle is as follows:

[0055] When the container 4 moves vertically downward to be placed in the container box 2, the container 4 squeezes the two guide pieces 32 to move away from each other. When the two guide pieces 32 move away from each other outward, they drive the protective plates 33 to slide away from each other outward synchronously until the container 4 is placed in the limiting cylinder. When the two protective plates 33 move away from each other outward, they drive a corresponding limiting piece 34 to move outward horizontally until the distance between the two limiting pieces 34 is greater than the diameter of the container 4. At this time, the container 4 can be placed in the limiting cylinder 31.

[0056] The limiting plate 34 drives a corresponding supporting plate 37 to move outward horizontally synchronously, and the supporting plate 37 drives a corresponding buffer strip 38 to move outward synchronously; therefore, when the two protective plates 33 move outwardly away from each other, they drive the two buffer strips 38 to gradually move toward each other.

[0057] The distance between the two limiting pieces 34 is greater than the diameter of the container 4 . At this time, the two buffer strips 38 are located directly below the container 4 , so the buffer strips 38 first contact the container 4 , thereby playing a buffering role for the container 4 .

[0058] When the container 4 is completely placed in the limiting cylinder 31, the two protection plates 33 are reset and moved toward each other until they are in contact.

[0059] The protection plate 33 drives the two limit plates 34 to reset synchronously; correspondingly, the two buffer bars 38 move away from each other at this time, until the inner wall of the buffer bar 38 abuts against the outer wall of the bottom of the container 4, that is, clamps the bottom of the container 4.

[0060] Reference Figure 6 When taking out the container 4, the two protective plates 33 move apart, the two limiting plates 34 move apart synchronously, and the limiting plates 34 drive the corresponding buffer strips 38 to move toward each other; at this time, the inner arc surface of the buffer strip 38 is suitable for pushing the container 4, so that it moves upward along the axial direction of the limiting cylinder 31, so as to facilitate the clamping robot to clamp the container 4 from the limiting cylinder 31.

[0061] As an optional embodiment, since a beaker is used as the container 4, and the bottom of the beaker is provided with a rounded corner, the arc-shaped buffer strip 38 can extend into the rounded corner of the bottom of the beaker, thereby limiting and fixing the bottom. By designing the size of the buffer strip, it is also possible to clamp the side wall of the beaker through the limiting piece and fill the rounded corner of the bottom of the beaker through the buffer strip. The beaker is then stably fixed, and the buffer strip is designed to be arc-shaped, which is also convenient for subsequent insertion into the bottom of the beaker to lift the beaker.

[0062] Some embodiments further provide a working method of an InP seed crystal surface treatment device, characterized by comprising:

[0063] When the container 4 is moved vertically downward and placed into the container box 2, the container 4 presses the two guide pieces 32 to move them apart until the container 4 is inserted into the limit protection assembly 3.

[0064] After the container 4 is placed inside, the two protection plates 33 move toward each other, and while clamping and limiting the container 4, the protection plates 33 cover the upper end of the container 4 to prevent the liquid in the container 4 from splashing outward.

[0065] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0067] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. An InP seed crystal surface treatment device, characterized in that: include: A workbench (1) on which a plurality of containing boxes (2) are rotatably arranged, wherein the containing boxes (2) are suitable for containing containers; A position limiting protection component (3), which is arranged on the container box (2), and the position limiting protection component (3) is suitable for limiting splashing of liquid in the container; The container moves vertically downward, and the guide piece (32) of the position limiting protection component (3) slides to both sides, so that the container is inserted into the position limiting protection component (3); The protection plate (33) of the position limiting protection assembly (3) is suitable for covering the open upper end of the container; The position limiting protection component (3) comprises: a position limiting cylinder (31) which is vertically arranged in the container box (2); A guide sheet (32), wherein the two guide sheets (32) are arranged opposite to each other, and the guide sheets (32) are suitable for sliding radially along the limiting cylinder (31); Protective plates (33), wherein the two protective plates (33) are slidably disposed on the limiting cylinder (31), and the lower ends of the guide plates (32) are fixed on the protective plates (33); The container pushes the two guide plates (32) to move away from each other, and after the container is placed in the limiting cylinder (31), the bottom wall of the protection plate (33) is adapted to abut against the open cup wall of the container; Two limiting plates (34) are slidably arranged in the limiting cylinder (31), one limiting plate (34) corresponds to one protective plate (33), and the limiting plates (34) are linked to the protective plates (33); A protrusion (35) is fixed to the lower end of the protective plate (33), and the protrusion (35) is suitable for abutting against the inner wall of the limiting plate (34); A positioning strip (36) is fixed to the outer wall of the limiting piece (34), the positioning strip (36) passes through the limiting tube (31), and the positioning strip (36) is suitable for abutting against the inner wall of the containing box (2); The limiting piece (34) is in an arc shape, and the outer diameter of the circle formed by the two limiting pieces (34) is smaller than the inner diameter of the limiting cylinder (31); A support plate (37) is fixed to the inner wall of each of the limiting plates (34), and the line where the two supporting plates (37) abut against each other and the line where the two limiting plates (34) abut against each other are perpendicular to each other; A buffer strip (38) is fixed on the support plate (37), and one end of the buffer strip (38) is slidably disposed on another support plate (37) disposed opposite thereto; The buffer strip (38) is arranged along the circumference of the inner wall of the limiting piece (34); When the two limiting plates (34) move away from each other, the two buffer strips (38) move towards each other; The longitudinal section of the buffer strip (38) is trapezoidal, and the inner wall of the buffer strip (38) is arc-shaped.

2. The InP seed crystal surface treatment device according to claim 1, characterized in that: The limiting cylinder (31) is provided with a slide groove matched with the protective plate (33), and the bottom wall of the protective plate (33) is suitable for abutting against the inner bottom wall of the slide groove; Wherein, when the two protection plates (33) move away from each other, the side wall of the slide groove is suitable for scraping off liquid adhered to the bottom wall of the protection plate (33).

3. A method for operating the InP seed crystal surface treatment device according to claim 1, characterized in that: include: When the container is moved vertically downward to be placed into the container box (2), the container presses the two guide plates (32) to move them apart until the container is inserted into the limit protection assembly (3); After the container is placed inside, the two protection plates (33) move towards each other, and while clamping the container to limit the position, the protection plates (33) cover the upper end of the container to prevent the liquid in the container from splashing outwards.

Citation Information

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