A mixed gas collection and filling device

Abstract

The present invention discloses a mixed gas collecting and filling device, comprising a gas cylinder and two bases, wherein a placing seat is slidably arranged between the two bases, and a placing groove is arranged on the placing seat; a central axis is fixedly arranged on the placing seat, and a sinking groove is arranged on the base, and when the central axis is located in the sinking groove, the placing seat is in an inclined state, and when the gas cylinder is fixed, the central axis on the placing seat is in the sinking groove, and the placing seat is in an inclined and extended state, so that the gas cylinder can be placed in the placing groove on the placing seat more conveniently, and after the gas cylinder is placed, the gas cylinder and the placing seat are pushed to slide, and the central axis slides in the sinking groove and detaches from the sinking groove, so that the placing seat and the gas cylinder become a horizontal state, which is convenient for filling the gas cylinder with gas, and during the sliding process of the placing seat, the clamping member is passively charged, and after the gas cylinder slides to the fixed position, the clamping member is released so that it clamps the gas cylinder, thereby improving the portability when the gas cylinder is fixed.

Description

Technical Field

[0001] The invention relates to the technical field of mixed gas filling, and in particular to a mixed gas collecting and filling device. Background Art

[0002] In the semiconductor industry, a mixture of silane (SiH4), hydrogen (H2) and nitrogen (N2) has a variety of important applications, especially in processes such as thin film deposition, surface treatment and vapor deposition, making these mixed gases widely used in chemical vapor deposition processes to deposit silicon films on substrates, which is a key step in the manufacture of semiconductor devices such as transistors and solar cells. The combination of these gases can achieve high-purity, high-performance material deposition, meeting the high requirements of modern semiconductor devices for material quality and performance.

[0003] During the use and transportation of mixed gases, they are generally stored in gas cylinders. During the filling process, the gas cylinders used for filling need to be fixed. In the prior art, the gas cylinders are generally fixed by fixing frames. During the fixing process, since the gas cylinders are generally steel cylinders, they need to be moved to a fixed position on the fixing frame. This process is laborious and prone to collision and wear of the gas cylinders. Summary of the invention

[0004] The purpose of the present invention is to provide a mixed gas collecting and filling device to solve the above-mentioned deficiencies in the prior art.

[0005] In order to achieve the above object, the present invention provides the following technical solutions:

[0006] A mixed gas collecting and filling device comprises a gas cylinder and two bases, a placing seat is slidably arranged between the two bases, a placing groove is arranged on the placing seat, and a weighing device is fixedly arranged on the placing seat;

[0007] The placement seat is fixedly provided with a central axis, the base is provided with a sinking groove, and when the central axis is located in the sinking groove, the placement seat is in an inclined state;

[0008] A fixing frame is fixedly arranged on the base, a clamping piece for fixing the gas cylinder is slidably arranged on the fixing frame, a first spring is arranged between the clamping piece and the fixing frame, and two ends of the first spring are fixedly connected to the clamping piece and the fixing frame respectively;

[0009] It also includes a force storage component, which is used to store force on the clamping member when the placement seat slides, and release the clamping member after the placement seat completes sliding.

[0010] Preferably, a first gear is rotatably provided on the fixing frame, a rack is slidably provided on the clamping member, and the first gear is meshed with the rack for transmission.

[0011] Preferably, the force storage assembly includes a rotating rod rotatably arranged on the base, a rotating ring is rotatably arranged on the rotating rod, and a first torsion spring is arranged between the rotating rod and the rotating ring.

[0012] Preferably, a ratchet block is rotatably arranged on the rotating ring, a second torsion spring is arranged between the ratchet block and the rotating ring, a ratchet ring is fixedly arranged on the first gear, and the ratchet block is clamped with the ratchet ring.

[0013] Preferably, a second gear is fixedly provided on the rotating rod, a toothed plate is slidably provided on the base, the second gear is meshed with the toothed plate for transmission, and the toothed plate is rotatably connected to the placement seat.

[0014] Preferably, a locking block is slidably provided on the fixing frame, the locking block is engaged with the first gear, a cross bar is fixedly provided between the two locking blocks, and the cross bar abuts against the gas cylinder.

[0015] Preferably, a third spring is provided between the locking block and the fixing frame, and two ends of the third spring are fixedly connected to the locking block and the fixing frame respectively.

[0016] Preferably, a sliding block is slidably provided on the fixing frame, a clamping block is slidably provided on the sliding block, a clamping slot is provided on the clamping member, the clamping block is clamped with the clamping slot, an inclined surface is provided on the clamping block, and the inclined surface is in contact with the clamping member;

[0017] A second spring is arranged between the clamping block and the sliding block, and two ends of the second spring are fixedly connected to the clamping block and the sliding block respectively.

[0018] Preferably, a push-pull block is fixedly provided on the sliding block, and the push-pull block is slidably connected to the rack.

[0019] Preferably, a plurality of balls are rollingly arranged on the push-pull block, and the plurality of balls are in contact with the rack;

[0020] A rotating member is rotatably arranged on the fixing frame, and the rotating member is threadedly connected with the sliding block.

[0021] In the above technical solution, the mixed gas collecting and filling device provided by the present invention has the beneficial effects of:

[0022] When the gas cylinder is fixed, the central axis on the placement seat is in the sinking groove, and the placement seat is in an inclined and extended state, so that the gas cylinder can be placed in the placement groove on the placement seat more conveniently. After the gas cylinder is placed, the gas cylinder and the placement seat are pushed to slide, and the central axis slides in the sinking groove and disengages from the sinking groove, so that the placement seat and the gas cylinder become horizontal, which is convenient for filling the gas cylinder with gas, and during the sliding process of the placement seat, the clamping member is passively charged, and after the gas cylinder slides to the fixed position, the clamping member is released to clamp the gas cylinder, which improves the portability of the gas cylinder when it is fixed, avoids the difficulty in moving to the fixed position due to the excessive weight of the gas cylinder, and avoids the problem of collision and wear between the gas cylinder and the ground during the movement, thereby improving the stability when filling the gas into the gas cylinder.

[0023] It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure.

[0024] This application document provides an overview of various implementations or examples of the technology described in the present disclosure, and is not a comprehensive disclosure of the entire scope or all features of the disclosed technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can also be obtained based on these drawings.

[0026] Figure 1 A schematic diagram of the overall structure of a gas cylinder after being fixed according to an embodiment of the present invention;

[0027] Figure 2 A schematic diagram of the base and fixing frame structure provided in an embodiment of the present invention;

[0028] Figure 3 A schematic diagram of the internal structure of a base provided in an embodiment of the present invention;

[0029] Figure 4 A top view of a fixed frame provided by an embodiment of the present invention;

[0030] Figure 5 A schematic diagram of the structure of a rotating ring and a first gear provided in an embodiment of the present invention;

[0031] Figure 6 A schematic diagram of the internal structure of a sliding block provided in an embodiment of the present invention;

[0032] Figure 7 A schematic diagram of a rack structure provided in an embodiment of the present invention.

[0033] Description of reference numerals:

[0034] 1. Gas cylinder; 2. Base; 21. Sinking groove; 3. Placement seat; 31. Placement groove; 32. Central axis; 33. Tooth plate; 34. Weighing device; 4. Fixed frame; 41. First gear; 42. Ratchet ring; 5. Rotating rod; 51. Rotating ring; 52. Ratchet block; 53. Second gear; 6. Clamping part; 61. First spring; 62. Rack; 63. Slot; 7. Sliding block; 71. Block; 72. Inclined surface; 73. Second spring; 74. Push-pull block; 75. Ball; 8. Locking block; 84. Crossbar; 82. Third spring; 9. Rotating part. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical solution and advantages of the embodiments of the present disclosure clearer, the technical solution of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0036] Please refer to 1-7, a mixed gas collecting and filling device, including a gas cylinder 1 and two bases 2, a placing seat 3 is slidably arranged between the two bases 2, a placing groove 31 is arranged on the placing seat 3, and a weighing device 34 is fixedly arranged on the placing seat 3; a central axis 32 is fixedly arranged on the placing seat 3, a sinking groove 21 is arranged on the base 2, and when the central axis 32 is located in the sinking groove 21, the placing seat 3 is in an inclined state; a fixing frame 4 is fixedly arranged on the base 2, and a clamping member 6 for fixing the gas cylinder 1 is slidably arranged on the fixing frame 4, a first spring 61 is arranged between the clamping member 6 and the fixing frame 4, and the two ends of the first spring 61 are fixedly connected to the clamping member 6 and the fixing frame 4 respectively; it also includes a force storage component, which is used to store force on the clamping member 6 when the placing seat 3 slides, and release the clamping member 6 after the placing seat 3 completes sliding, and when the gas cylinder 1 is fixed, the placing seat 3 is in an extended and tilted state, and the gas cylinder 1 is placed in the placing groove 31 on the placing seat 3, and then the gas is pushed. The bottle 1 slides with the placement seat 3. During the sliding of the placement seat 3, the central axis 32 slides in the sinking groove 21 and separates from the sinking groove 21, and the placement seat 3 gradually returns to a horizontal state, which can more conveniently move the gas cylinder 1 to a fixed position, so that the gas cylinder 1 can be more conveniently moved to a fixed position when it is fixed, and it can avoid friction between the gas cylinder 1 and the ground when adjusting the position of the gas cylinder 1, resulting in wear of the gas cylinder 1 and instability during movement, which not only improves the efficiency when filling the gas, but also reduces the labor intensity when fixing the gas cylinder 1; the fixing frame 4 and the base 2 can be connected by bolts, and the device can be fixed as a whole at a fixed position when the gas cylinder 1 is inflated; and when the placement seat 3 slides and moves the gas cylinder 1 to a fixed position, the clamping member 6 will be charged by the power storage component, and after the gas cylinder 1 moves to the fixed position, the clamping member 6 releases to clamp the gas cylinder 1, thereby improving the stability of the gas cylinder 1 during the filling process.

[0037] Specifically, a first gear 41 is rotatably provided on the fixing frame 4, and a rack 62 is slidably provided on the clamping member 6. The first gear 41 is meshed with the rack 62 for transmission. After the gas cylinder 1 moves to the fixed position, the first gear 41 rotates, and the clamping member 6 slides through the rack 62 to clamp and fix the gas cylinder 1. In the process of the clamping member 6 sliding to clamp the gas cylinder 1, the first spring 61 is compressed. After the gas filling is completed, the clamping member 6 releases the clamping of the gas cylinder 1 when the first spring 61 is reset, so that after the gas is filled, it is more convenient to loosen the fixation of the gas cylinder 1.

[0038] In an embodiment further provided by the present invention, the power storage component includes a rotating rod 5 rotatably arranged on the base 2, a rotating ring 51 is rotatably arranged on the rotating rod 5, a first torsion spring is arranged between the rotating rod 5 and the rotating ring 51, a ratchet block 52 is rotatably arranged on the rotating ring 51, a second torsion spring is arranged between the ratchet block 52 and the rotating ring 51, a ratchet ring 42 is fixedly arranged on the first gear 41, the ratchet block 52 is clamped with the ratchet ring 42, a second gear 53 is fixedly arranged on the rotating rod 5, a tooth plate 33 is slidably arranged on the base 2, the second gear 53 is meshed with the tooth plate 33 for transmission, and the tooth plate 33 is rotatably connected to the placement seat 3, when the placement seat 3 slides, it drives the tooth plate 33 to slide, so that the second gear 53 rotates with the rotating rod 5, and the rotating rod 5 rotates During the process, under the action of the ratchet block 52 and the ratchet ring 42, the first torsion spring is contracted and accumulated, and after the gas cylinder 1 and the placement seat 3 are moved to the fixed position, the first gear 41 is released. Under the action of the first torsion spring resetting, the rotating ring 51 drives the first gear 41 to rotate through the engagement of the ratchet block 52 and the ratchet ring 42, so that the rack 62 drives the clamping member 6 to slide and clamp the gas cylinder 1, which greatly improves the portability of the gas cylinder 1 during the fixing process; when the placement seat 3 slides out to facilitate the removal of the gas cylinder 1, the toothed plate 33 drives the rotating rod 5 and the rotating ring 51 to rotate, and under the action of the ratchet block 52 and the second torsion spring, the ratchet block 52 will not drive the ratchet ring 42 and the first gear 41 to rotate, so that the placement seat 3 can slide and remove the gas cylinder 1.

[0039] Furthermore, a locking block 8 is slidably provided on the fixing frame 4, and the locking block 8 is engaged with the first gear 41. A cross bar 84 is fixedly provided between the two locking blocks 8, and the cross bar 84 abuts against the gas cylinder 1. When the locking block 8 is engaged with the first gear 41, the rotating rod 5 rotates to cause the first torsion spring to contract and accumulate force. When the gas cylinder 1 moves to a fixed position, it abuts against and pushes the cross bar 84, causing the locking block 8 to slide and disengage from the first gear 41. At this time, the first gear 41 rotates under the action of the first torsion spring, causing the clamping member 6 to slide to clamp the gas cylinder 1.

[0040] Furthermore, a third spring 82 is provided between the locking block 8 and the fixing frame 4, and the two ends of the third spring 82 are fixedly connected to the locking block 8 and the fixing frame 4 respectively. When the gas cylinder 1 moves to the fixed position, the cross bar 84 is pushed to make the locking block 8 slide and compress the third spring 82. When the gas filling is completed and the gas cylinder 1 is taken away, under the action of the third spring 82, the locking block 8 slides and engages with the first gear 41, so as to fix the gas cylinder 1 next time.

[0041] In an embodiment further provided by the present invention, a sliding block 7 is slidably provided on the fixing frame 4, a clamping block 71 is slidably provided on the sliding block 7, a clamping groove 63 is provided on the clamping member 6, the clamping block 71 is clamped with the clamping groove 63, an inclined surface 72 is provided on the clamping block 71, and the inclined surface 72 contacts the clamping member 6; a second spring 73 is provided between the clamping block 71 and the sliding block 7, and the two ends of the second spring 73 are respectively fixedly connected to the clamping block 71 and the sliding block 7. After the gas filling is completed, the sliding block 7 slides so that the clamping block 71 and the clamping groove 63 are clamped together. 3 is disengaged, the clamping member 6 loses the restriction of the clamping block 71 and is reset under the action of the first spring 61, so that the clamping member 6 releases the clamping of the gas cylinder, which greatly improves the portability of removing the gas cylinder 1 after the gas filling is completed; when the clamping member 6 slides to clamp the gas cylinder 1, when the clamping member 6 slides to the position where the clamping block 71 is aligned with the clamping groove 63, under the action of the second spring 73, the clamping block 71 is engaged with the clamping groove 63, and the clamping member 6 is fixed and locked, which improves the stability of the clamping member 6 when fixing the gas cylinder 1.

[0042] In the embodiment provided by the present invention, a push-pull block 74 is fixedly provided on the sliding block 7, and the push-pull block 74 is slidably connected to the rack 62; a plurality of ball bearings 75 are rollingly provided on the push-pull block 74, and the plurality of ball bearings 75 are in contact with the rack 62; a rotating member 9 is rotatably provided on the fixed frame 4, and the rotating member 9 is threadedly connected to the sliding block 7, and the ball bearings 75 are provided to make it contact with the rack 62, so that when the clamping member 6 slides and resets, the friction resistance of the rack 62 is reduced, and after the gas filling is completed, the rotating member 9 is rotated, and the sliding block 7 slides, so that the clamping block 71 is disengaged from the slot 63, and when the clamping block 71 slides, the rack 62 is pulled to slide by the push-pull block 74 to disengage from the first gear 41, thereby improving the reset of the clamping member 6 and releasing the efficiency and stability of the clamping of the gas cylinder 1. After the gas cylinder 1 is removed, the rotating member 9 is rotated to reset the sliding block 7.

[0043] The placement seat 3 mentioned in the present invention is provided with a weighing device 34, and its fixed position is as shown in the attached Figure 3 As shown in the figure, it is used to monitor the weight of the gas cylinder 1 when the gas cylinder 1 is filled with gas, so as to observe the filling status and filling degree of the gas cylinder. At the same time, the shape and size of the weighing device 34 can be set according to the specifications required in the actual inflation process. When the gas cylinder 1 is placed in the placement groove 31 mentioned in the present invention, the gas cylinder 1 is located above the weighing device 34, and the weighing device 34 is a prior art, and its working principle and operation method are common knowledge and conventional technical means known to those skilled in the art, and will not be elaborated on.

[0044] Working principle: When fixing the gas cylinder 1, the placement seat 3 is in an extended and tilted state, and the gas cylinder 1 is placed in the placement groove 31 on the placement seat 3, and then the gas cylinder 1 and the placement seat 3 are pushed to slide. During the sliding process of the placement seat 3, under the cooperation of the central axis 32 and the sinking groove 21, the placement seat 3 gradually returns to a horizontal state, and drives the tooth plate 33 to slide when the placement seat 3 slides, so that the second gear 53 rotates with the rotating rod 5. During the rotation process, because the first gear 41 is locked by the locking block 8, under the engagement of the ratchet ring 42 and the ratchet block 52, the rotating ring 51 is also locked, and the rotating rod 5 is rotating. The first torsion spring is tightened and stored force. Subsequently, when the placement seat 3 slides until the gas cylinder 1 abuts against the cross bar 84 and pushes the cross bar 84 to slide, the locking block 8 slides with the cross bar 84 and compresses the third spring 82. At this time, the locking block 8 is disengaged from the first gear 41, and the force of the first torsion spring is released, driving the rotating ring 51 and rotating the first gear 41 through the ratchet block 52 and the ratchet ring 42. The first gear 41 rotates and drives the clamping member 6 to slide and clamp the gas cylinder 1 through the rack 62. At this time, the first spring 61 is compressed, and during the sliding process of the clamping member 6, it abuts against the inclined surface 72 on the clamping block 71, and pushes the clamping block 71 to slide, thereby pressing the second spring 73. The clamping member 6 is compressed. When the clamping member 6 slides to the position where the block 71 is aligned with the slot 63, the block 71 is engaged with the slot 63 under the action of the second spring 73, and the clamping member 6 is fixed and locked. At this time, the gas cylinder 1 is fixed and the gas cylinder 1 can be filled with gas. After the filling is completed, the rotating member 9 is rotated to make the sliding block 7 slide, so that the push-pull block 74 pulls the rack 62, and the rack 62 is disengaged from the first gear 41, and the sliding block 7 slides, driving the block 71 to slide and disengage from the slot 63. At this time, the first spring 61 is reset, so that the clamping member 6 is reset and disengaged from the gas cylinder 1. After the clamping members 6 on both sides of the gas cylinder 1 are reset , pull out the gas cylinder 1 and the placement seat 3. During the sliding process of the placement seat 3, the central axis 32 slides into the sinking groove 21, and the placement seat 3 drives the gas cylinder 1 to tilt, so that the gas cylinder 1 can be taken away more conveniently; during the sliding process of the placement seat 3, the third spring 82 pushes the locking block 8 and the cross bar 84 to reset, and the locking block 8 is engaged with the first gear 41. At this time, the toothed plate 33 drives the rotating rod 5 and the rotating ring 51 to rotate. Under the action of the ratchet block 52 and the second torsion spring, the ratchet block 52 will not drive the ratchet ring 42 and the first gear 41 to rotate. Therefore, when the placement seat 3 slides to remove the gas cylinder 1, it will not be disturbed and the gas cylinder 1 can be removed more conveniently.

[0045] The above description is only by way of illustration of certain exemplary embodiments of the present invention. It is undoubted that those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A mixed gas collecting and filling device, comprising a gas cylinder (1) and two bases (2), characterized in that: A placement seat (3) is slidably disposed between the two bases (2), a placement groove (31) is disposed on the placement seat (3), and a weighing device (34) is fixedly disposed on the placement seat (3); The placement seat (3) is fixedly provided with a central axis (32), the base (2) is provided with a sinking groove (21), and when the central axis (32) is located in the sinking groove (21), the placement seat (3) is in a tilted state; A fixing frame (4) is fixedly arranged on the base (2), a clamping member (6) for fixing the gas cylinder (1) is slidably arranged on the fixing frame (4), a first spring (61) is arranged between the clamping member (6) and the fixing frame (4), and two ends of the first spring (61) are respectively fixedly connected to the clamping member (6) and the fixing frame (4); It also includes a force storage component, which is used to store force on the clamping member (6) when the placement seat (3) slides, and release the clamping member (6) after the placement seat (3) completes sliding; A first gear (41) is rotatably provided on the fixing frame (4), a rack (62) is slidably provided on the clamping member (6), and the first gear (41) and the rack (62) are meshed for transmission; The force storage component comprises a rotating rod (5) rotatably arranged on a base (2), a rotating ring (51) rotatably arranged on the rotating rod (5), and a first torsion spring is arranged between the rotating rod (5) and the rotating ring (51); A ratchet block (52) is rotatably arranged on the rotating ring (51), a second torsion spring is arranged between the ratchet block (52) and the rotating ring (51), a ratchet ring (42) is fixedly arranged on the first gear (41), and the ratchet block (52) is clamped with the ratchet ring (42); A second gear (53) is fixedly provided on the rotating rod (5), a toothed plate (33) is slidably provided on the base (2), the second gear (53) is meshed with the toothed plate (33) for transmission, and the toothed plate (33) is rotatably connected to the placement seat (3); A locking block (8) is slidably disposed on the fixing frame (4), the locking block (8) being clamped with the first gear (41), a cross bar (84) being fixedly disposed between the two locking blocks (8), the cross bar (84) being in contact with the gas cylinder (1); A third spring (82) is provided between the locking block (8) and the fixing frame (4), and two ends of the third spring (82) are respectively fixedly connected to the locking block (8) and the fixing frame (4).

2. A mixed gas collecting and filling device according to claim 1, characterized in that: A sliding block (7) is slidably provided on the fixing frame (4), a clamping block (71) is slidably provided on the sliding block (7), a clamping groove (63) is provided on the clamping member (6), the clamping block (71) is clamped with the clamping groove (63), an inclined surface (72) is provided on the clamping block (71), and the inclined surface (72) is in contact with the clamping member (6); A second spring (73) is provided between the clamping block (71) and the sliding block (7), and two ends of the second spring (73) are respectively fixedly connected to the clamping block (71) and the sliding block (7).

3. A mixed gas collecting and filling device according to claim 2, characterized in that: A push-pull block (74) is fixedly arranged on the sliding block (7), and the push-pull block (74) is slidably connected to the rack (62).

4. A mixed gas collecting and filling device according to claim 3, characterized in that: A plurality of balls (75) are rotatably disposed on the push-pull block (74), and the plurality of balls (75) are in contact with the rack (62); A rotating member (9) is rotatably arranged on the fixing frame (4), and the rotating member (9) is threadedly connected to the sliding block (7).

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