Ultrafast laser drilling device and using method thereof

Abstract

The invention provides an ultrafast laser drilling device and a using method thereof, the ultrafast laser drilling device is used for drilling on a part, and the ultrafast laser drilling device comprises a base, a supporting ring, a sliding window, a telescopic cover, vacuumizing equipment, an ultrafast laser machining head and a machine tool; the base is provided with a clamp used for clamping parts. The supporting ring is arranged in the horizontal direction and provided with a mounting hole. The sliding window is connected to the supporting ring in a sliding manner, can move in the mounting hole and is provided with a window mirror through which the ultrafast laser can penetrate; the telescopic cover is connected with the base and the sliding window, a closed cavity is defined by the telescopic cover, the base and the sliding window, and the parts are located in the closed cavity; the vacuumizing equipment is communicated with the closed cavity and is used for vacuumizing the closed cavity; the ultrafast laser processing head is used for generating an ultrafast laser beam which is vertically emitted into the window mirror; the machine tool is connected to the base and used for driving the base to move to a preset position. The quality and efficiency of ultrafast laser drilling can be improved, the structure is simple, and the universality is high.

Description

Technical Field

[0001] The present invention relates to the technical field of ultrafast laser hole making equipment, and more specifically, to an ultrafast laser hole making device and a use method thereof. Background Art

[0002] Ultrafast laser processing has the characteristics of material universality, no contact stress, high precision and small thermal effect. It has gradually been used in the processing of film holes on gas turbine and aircraft engine blades.

[0003] In order to reduce plasma shielding during laser hole making, improve slag removal efficiency and protect the lens, nitrogen and other protective gases are usually blown in. However, when the hole is deep, it is difficult for the auxiliary gas to act on the bottom of the hole, resulting in a decrease in hole making quality and efficiency. At the same time, due to being in the atmospheric environment, the surface of the material will still be oxidized and nitrided, affecting the performance of the material. Summary of the invention

[0004] 1. Technical issues to be resolved

[0005] The technical problem to be solved by the present invention is that the existing ultrafast laser hole making device has the technical problem of low hole making quality and efficiency.

[0006] (II) Technical solution

[0007] To achieve the above object, the technical solution adopted by the present invention is:

[0008] In a first aspect, the present invention provides an ultrafast laser hole-making device for making holes on parts, comprising a base, a support ring, a sliding window, a telescopic cover, a vacuum pumping device, an ultrafast laser processing head and a machine tool; the base is provided with a fixture for clamping parts; the support ring is arranged in a horizontal direction, and the support ring is provided with a mounting hole; the sliding window is slidably connected to the support ring, the sliding window can move and rotate in the mounting hole, and the sliding window has a window mirror for transmitting ultrafast laser; the telescopic cover connects the base and the sliding window, the telescopic cover, the base and the sliding window together form a closed cavity, and the part is located in the closed cavity; the vacuum pumping device is connected to the closed cavity, and is used to vacuum the closed cavity; the ultrafast laser processing head is used to generate an ultrafast laser beam that vertically enters the window mirror; the machine tool is connected to the base, and is used to drive the base to move to a preset position.

[0009] Preferably, the sliding window comprises a mirror sleeve and a window mirror, the mirror sleeve is provided with a processing window, and the window mirror covers the processing window and is sealed to the mirror sleeve.

[0010] Preferably, the outer diameter of the lens sleeve is larger than the aperture of the mounting hole.

[0011] Preferably, it also includes a cylinder body, one end of which is fixedly connected to a telescopic cover, and the other end of which is detachably connected to the base.

[0012] Preferably, it also includes a fastener and a sealing ring, wherein the sealing ring is arranged on the contact surface between the cylinder body and the base, and the fastener detachably connects the cylinder body and the base.

[0013] Preferably, the diameter of the window mirror is greater than 100 mm, and the inner diameter of the telescopic cover is equal to the inner diameter of the barrel.

[0014] Preferably, the vacuum extraction device comprises a vacuum pump and an air pipe, and the air pipe connects the closed chamber with the vacuum pump.

[0015] Preferably, the telescopic cover is a bellows, the maximum extension and compression lengths of the bellows are both greater than 35% of its free length, and the maximum bending angle is greater than 90°.

[0016] In a second aspect, the present invention further provides a method for using the ultrafast laser hole making device described in any one of the above technical solutions, comprising the following steps:

[0017] S1, clamping the part in the fixture;

[0018] S2, sealingly connecting the telescopic cover, the base and the sliding window to enclose and form a closed cavity, wherein the parts are located in the closed cavity;

[0019] S3, starting the vacuum pumping equipment to evacuate the closed chamber to a preset vacuum degree;

[0020] S4, after reaching a preset vacuum degree, the machine tool drives the base to move to a preset position;

[0021] S5. An ultrafast laser processing head generates an ultrafast laser beam that vertically enters the window mirror, and the ultrafast laser beam acts on the part to make holes in the part.

[0022] Preferably, the method of use further comprises the following steps:

[0023] S6, the machine tool drives the base to move to the next preset position, and the ultrafast laser beam acts on the part to make a hole at the next preset position of the part;

[0024] S7, repeating step S6 until all holes are processed;

[0025] S8. Take out the parts and obtain the parts with holes.

[0026] (III) Beneficial effects

[0027] The above technical solution of the present invention has at least the following advantages:

[0028] 1. In the present invention, the telescopic cover, the base and the sliding window are enclosed to form a closed cavity. The parts are located in the closed cavity. A vacuum environment can be formed by evacuating the closed cavity. Holes are made on the parts in a vacuum environment, which is beneficial to suppress the recast layer and reduce microcracks, improve the quality of the inner wall of the micropores, increase the service life of the substrate, and enhance the deep hole processing capability. This improves the molding quality of the final part hole making and avoids oxidation and nitridation on the surface of the parts. In a vacuum environment, the processing efficiency and quality of small holes with a large aspect ratio are significantly improved.

[0029] 2. In the present invention, the parts are mounted on the base through a clamp, the telescopic cover connects the base and the sliding window, the sliding window is slidably connected to the support ring, and the sliding window can move in the mounting hole. The base is connected to the machine tool, and the machine tool can drive the base to move, thereby changing the posture of the parts clamped on the base. During the movement of the machine tool driving the base, the telescopic cover can be telescoped along the Z-axis direction and bent along the circumferential direction to adapt to the movement of the machine tool, while ensuring that the closed cavity is in a vacuum environment. At the same time, the sliding window is slidably connected to the support ring, which can adapt to the movement of the machine tool along the X and Y axis directions, as well as the rotational movement along the B / A axis and C axis directions, so as to avoid the external force generated by the movement of the machine tool acting on the telescopic tube and causing damage to the telescopic tube.

[0030] 3. In the present invention, the ultrafast laser processing head only moves along with the Z axis of the machine tool to change the position of the focus of the ultrafast laser beam on the part, thereby realizing hole making on the part, and no movement occurs in other directions. The machine tool drives the base to move, thereby realizing the change of the relative position between the part clamped on the base and the ultrafast laser beam, realizing hole making at different positions on the part, and one clamping can realize the preparation of multiple holes at different positions, avoiding multiple clamping of parts, and ensuring the hole position accuracy and group hole processing efficiency. The present invention has a simple structure, is easy to use, and is easy to integrate into the current mainstream ultrafast laser hole making platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0032] Figure 1 It is a schematic diagram of the structure of an ultrafast laser hole-making device provided in an embodiment of the present invention.

[0033] Figure 2 yes Figure 1A partial enlarged view of point A in the middle.

[0034] Figure 3 It is a structural schematic diagram of the ultrafast laser hole-making device provided by an embodiment of the present invention in a vacuum hole-making state.

[0035] Figure 4 yes Figure 3 A partial enlarged view of point B in the middle.

[0036] Figure 5 is a metallographic photograph of the air film hole provided in an embodiment of the present invention;

[0037] Figure 6 It is a metallographic photograph of the cross section of the air film hole provided in the embodiment of the present invention.

[0038] The reference numerals in the figures are:

[0039] 1. Base; 2. Support ring; 3. Sliding window; 4. Telescopic cover; 5. Vacuum extraction equipment; 6. Ultrafast laser beam; 7. Barrel; 8. Fasteners; 9. Sealing ring; 10. Parts; 20. Air film hole; 11. Fixture; 12. Chassis; 21. Mounting hole; 31. Window mirror; 32. Mirror cover; 41. Sealed chamber; 51. Vacuum pump; 52. Air pipe; 71. Pressure gauge; 321. Processing window. DETAILED DESCRIPTION

[0040] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0041] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly located on the other element or indirectly located on the other element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element.

[0042] It should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention, and do not indicate that a device or element must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.

[0043] In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating relative importance or indicating the number of technical features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined. The specific implementation of the present invention is described in more detail below in conjunction with specific embodiments:

[0044] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, an embodiment of the present invention provides an ultrafast laser hole-making device for making holes on a part 10, comprising a base 1, a support ring 2, a sliding window 3, a telescopic cover 4, a vacuum pumping device 5, an ultrafast laser processing head (not shown) and a machine tool (not shown); the base 1 is provided with a fixture 11 for clamping the part; the support ring 2 is arranged in a horizontal direction, and the support ring 2 is provided with a mounting hole 21; the sliding window 3 is slidably connected to the support ring 2, and the sliding window 3 can move in the mounting hole 21, and the sliding window 3 has a window mirror 31 for transmitting ultrafast laser; the telescopic cover 4 connects the base 1 and the sliding window 3, and the telescopic cover 4, the base 1 and the sliding window 3 together form a closed cavity 41, and the part 10 is located in the closed cavity 41; the vacuum pumping device 5 is connected to the closed cavity 41, and is used to evacuate the closed cavity 41; the ultrafast laser processing head is used to generate an ultrafast laser beam 6 that vertically enters the window mirror; the machine tool is connected to the base 1, and is used to drive the base 1 to move to a preset position.

[0045] Specifically, the sliding window 3 is arranged at one end where the laser is incident. The window mirror 31 is arranged at the center of the mirror sleeve 32 along the axis to ensure that the laser is vertically transmitted from the window mirror 31. The window mirror 31 is a high-strength and high-transmittance glass with a thickness of 10 mm and a diameter of 200 mm, and a thickness of 5-15 mm. The transmittance of the laser with a wavelength of 1010 nm to 1080 nm is greater than 99%, and the installation edge of the window mirror 31 is sealed by a sealant. The outer side of the support ring 2 is fixed on the Z axis of the machine tool body. The upper end of the support ring 2 is a flat annular end face. The side where the mirror sleeve 32 contacts the support ring 2 is provided with a flat annular end face. The annular end face of the mirror sleeve 32 is pressed on the support ring 2 under the action of gravity. The support ring 2 supports the sliding window 3 to move up and down along the Z axis of the machine tool by supporting the mirror sleeve 32. When the sliding window 3 is subjected to a lateral force, the mirror sleeve 32 can move laterally in the support ring 2. The upper end face of the telescopic cover 4 is welded and fixed on the lower end face of the mirror sleeve 32, and the installation edge is sealed with a sealant. The base 1 is composed of a chassis 12 and a fixture 11. A positioning and mounting hole is provided at the center of the upper end surface of the chassis 12 for mounting the fixture 11. A boss is provided at the center of the lower end surface of the chassis 12, which can be quickly aligned with the table of the machine tool. The outer periphery of the chassis 12 is provided with mounting holes, which can be connected to the table of the machine tool by screws.

[0046] In one embodiment, the sliding window 3 includes a mirror cover 32 and a window mirror 31 . The mirror cover 32 is provided with a processing window 321 . The window mirror 31 covers the processing window 321 and is sealed to the mirror cover 32 .

[0047] In one embodiment, the outer diameter of the mirror cover 32 is larger than the aperture of the mounting hole 21, so as to ensure that the mirror cover 32 does not fall out when sliding on the support ring 2.

[0048] In one embodiment, it also includes a barrel 7, one end of which is fixedly connected to the telescopic cover 4, and the other end of the barrel 7 is detachably connected to the base 1. The upper end surface of the barrel 7 is welded and fixed to the lower end surface of the telescopic cover 4, and the installation edge is sealed with a sealant. The upper end surface circumference of the chassis 12 is connected to the lower end surface of the barrel 7 along the axis. Specifically, the mirror sleeve 32, the support ring 2, the barrel 7, and the chassis 12 are made of aluminum alloy, and the clamp 11 is made of stainless steel.

[0049] In one of the embodiments, it further includes a fastener 8 and a sealing ring 9. The sealing ring 9 is arranged on the contact surface between the barrel body 7 and the base 1. The fastener 8 can detachably connect the barrel body 7 and the base 1.

[0050] In one embodiment, the diameter of the window mirror 31 is greater than 100 mm, and the inner diameter of the telescopic cover 4 is equal to the inner diameter of the barrel 7 .

[0051] In one embodiment, the vacuum pump 5 includes a vacuum pump 51 and an air pipe 52, and the air pipe 52 connects the closed chamber 41 with the vacuum pump 51. The vacuum pump 51 has a pumping speed of 15 m / s when in operation. 3 / h, ultimate pressure ≤6×10 -2 Pa.

[0052] In one embodiment, the telescopic cover 4 is a bellows, the maximum extension and compression lengths of the bellows are greater than 35% of its free length, and the maximum bending angle is greater than 90°. Specifically, the telescopic cover 4 is an axially telescopic and transversely incompressible bellows structure.

[0053] In one embodiment, a pressure gauge 71 is further included, and the pressure gauge is used to detect the air pressure in the sealed cavity 41, and further to detect the vacuum degree in the sealed cavity 41. The pressure gauge 71 has a measuring range of -0.1 to 0 MPa and an accuracy of 0.002 MPa.

[0054] The present invention also provides a method for using the ultrafast laser hole-making device of any one of the above technical solutions, comprising the following steps:

[0055] S1, clamping the part 10 in the fixture 11;

[0056] S2, the telescopic cover 4, the base 1 and the sliding window 3 are sealed and connected to form a closed cavity 41, and the component 10 is located in the closed cavity 41;

[0057] S3, start the vacuum pumping device 5 to evacuate the closed chamber to reach a preset vacuum degree;

[0058] S4, after reaching the preset vacuum degree, the machine tool driving base 1 moves to the preset position;

[0059] S5. The ultrafast laser processing head generates an ultrafast laser beam that vertically enters the window mirror 31 . The ultrafast laser beam acts on the part 10 and makes a hole in the part 10 , thereby forming an air film hole 20 on the part 10 .

[0060] In one embodiment, the method further comprises the following steps:

[0061] S6, the machine tool driving base 1 moves to the next preset position, and the ultrafast laser beam acts on the part 10 to make a hole at the next preset position of the part 10;

[0062] S7, repeating step S6 until all holes are processed;

[0063] S8. Take out the parts and obtain the parts with holes.

[0064] Specifically, the specific implementation steps of the present invention are as follows:

[0065] Step 1: Clamp the part 10 on the fixture 11 of the base 1;

[0066] Step 2: The telescopic cover 4, the base 1 and the sliding window 3 are sealed and connected to form a closed cavity 41, thereby forming a complete sealed environment;

[0067] Step 3: Start the vacuum pump 51 to evacuate the inside of the sealed chamber 41, and observe the value of the pressure gauge 71 until the vacuum degree reaches above -0.09 MPa.

[0068] Step 4: Adjust the punching posture of part 10 through the five-axis (X, Y, Z, B / A, C) motion system of the machine tool. During the movement of the machine tool, the telescopic cover 4 is deformed, and the sliding window 3 and the support ring 2 slide relative to each other to adapt to the movement and rotation of the adaptive base 1. Under the premise of ensuring the vacuum sealing effect, the machine tool is adapted.

[0069] Step 5: Use visible light auxiliary focusing (indicator light, CCD imaging) or laser ranging to focus the ultrafast laser beam 6 on the hole position to be made in the part 10 to perform laser hole making.

[0070] Step 6: After processing the previous hole, adjust the blade position to the next hole until the group hole processing is completed.

[0071] Step 7: Stop the vacuum pump 51 to evacuate, disassemble the connection between the base 1 and the cylinder 7, obtain the hole-formed part 10, and use clean gauze or other tools to clean the inner and outer surfaces of the ultrafast laser hole-formation device in time.

[0072] Finally, the entrance and cross-sectional morphology of the air film hole 20 on the part 10 after the hole is made by this method are as follows: Figure 5 and Figure 6 As shown, it can be seen that the hole shape is round, the contour is regular, the hole wall surface is smooth and flat, and there are no processing defects.

[0073] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An ultrafast laser hole making device for making holes in parts, characterized in that: include: A base, wherein the base is provided with a fixture for clamping parts; A support ring is arranged in a horizontal direction, and the support ring is provided with a mounting hole; A sliding window, wherein the sliding window is slidably connected to the supporting ring, the sliding window can move and rotate in the mounting hole, and the sliding window has a window mirror for transmitting ultrafast laser; A telescopic cover is connected to the base and the sliding window, wherein the telescopic cover, the base and the sliding window together form a closed cavity, and the parts are located in the closed cavity; A vacuum pumping device, connected to the sealed chamber, for vacuuming the sealed chamber; An ultrafast laser processing head, used for generating an ultrafast laser beam vertically incident on the window mirror; The machine tool is connected to the base and is used to drive the base to move to a preset position.

2. The ultrafast laser hole making device according to claim 1, characterized in that: The sliding window comprises a mirror sleeve and a window mirror, the mirror sleeve is provided with a processing window, and the window mirror covers the processing window and is sealed and connected to the mirror sleeve.

3. The ultrafast laser hole making device according to claim 2, characterized in that: The outer diameter of the lens sleeve is larger than the aperture of the mounting hole.

4. The ultrafast laser hole making device according to claim 1, characterized in that: It also includes a cylinder body, one end of which is fixedly connected to a telescopic cover, and the other end of the cylinder body is detachably connected to the base.

5. The ultrafast laser hole making device according to claim 4, characterized in that: It also includes a fastener and a sealing ring, wherein the sealing ring is arranged on the contact surface between the cylinder body and the base, and the fastener is detachably connected to the cylinder body and the base.

6. The ultrafast laser hole making device according to claim 4, characterized in that: The diameter of the window mirror is greater than 100 mm, and the inner diameter of the telescopic cover is equal to the inner diameter of the barrel.

7. The ultrafast laser hole making device according to claim 1, characterized in that: The vacuum pumping device comprises a vacuum pump and an air pipe, and the air pipe connects the closed cavity and the vacuum pump.

8. The ultrafast laser hole making device according to claim 1, characterized in that: The telescopic cover is a bellows, the maximum extension and compression lengths of the bellows are both greater than 35% of its free length, and the maximum bending angle is greater than 90°.

9. A method for using the ultrafast laser hole making device according to any one of claims 1 to 8, characterized in that: The following steps are involved: S1, clamping the part in the fixture; S2, sealingly connecting the telescopic cover, the base and the sliding window to enclose and form a closed cavity, wherein the parts are located in the closed cavity; S3, starting the vacuum pumping equipment to evacuate the closed chamber to a preset vacuum degree; S4, after reaching a preset vacuum degree, the machine tool drives the base to move to a preset position; S5. An ultrafast laser processing head generates an ultrafast laser beam that vertically enters the window mirror, and the ultrafast laser beam acts on the part to make holes in the part.

10. The method of use according to claim 9, characterized in that: The following steps are also included: S6, the machine tool drives the base to move to the next preset position, and the ultrafast laser beam acts on the part to make a hole at the next preset position of the part; S7, repeating step S6 until all holes are processed; S8. Take out the parts and obtain the parts with holes.

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