Multi-channel ultra-pure gas on-off control module

Abstract

The invention belongs to the technical field of gas conveying equipment, and relates to a multi-channel ultra-pure gas on-off control module which comprises a module body, a first port, a second port and a third port, and the first port, the second port and the third port are formed in the three side faces of the module body. A first flow channel communicated with the first port, a second flow channel communicated with the second port and a third flow channel communicated with the third port are arranged in the module body, a valve hole is formed in the bottom face of the module body, and the first flow channel, the second flow channel and the third flow channel are all communicated with the valve hole. One end of a first diaphragm valve is connected into the valve hole, the other end of the first diaphragm valve is connected with gas equipment, and a heating assembly is arranged in the module body. Three paths of gas are concentrated on one module, and the first diaphragm valve is used for controlling the on-off of mixing of the three paths of gas, so that the use amount of pipelines and valves is reduced, and the equipment cost and the occupied space are saved.

Description

Technical Field

[0001] The invention relates to the technical field of gas delivery equipment, and in particular to a multi-channel ultrapure gas on-off control module. Background Art

[0002] Semiconductor manufacturing processes may include thin film deposition processes, such as atomic layer deposition (ALD) and plasma enhanced chemical vapor deposition (PECVD), etc., to form various thin films on wafers or substrates to prepare semiconductor devices. Some deposition processes require the use of three gases for proportional mixing. In the prior art, the on and off of the three gases are mostly controlled by three pipelines and three valves, and then transported to the gas mixing terminal. This method involves the connection and transportation of multiple gases, which increases the use of valves, pipelines and various joints, and increases the workload of equipment assembly. Therefore, the present invention proposes a multi-channel ultra-pure gas on-off control module. Summary of the invention

[0003] The main purpose of the present invention is to provide a multi-channel ultra-pure gas on-off control module, which can reduce the use of pipelines and valves, reduce the difficulty of assembly, concentrate three-way gas into one module, and control the on-off of the three-way gas and gas mixture through the first diaphragm valve and the second diaphragm valve, making the operation more convenient.

[0004] The present invention achieves the above-mentioned purpose through the following technical scheme: a multi-channel ultra-pure gas on-off control module, including a module body, a first port, a second port and a third port arranged on three sides of the module body, a first flow channel connected to the first port, a second flow channel connected to the second port and a third flow channel connected to the third port are arranged in the module body, a valve hole is arranged on the bottom surface of the module body, the first flow channel, the second flow channel and the third flow channel are all connected to the valve hole, one end of a first diaphragm valve is connected to the valve hole, the other end of the first diaphragm valve is connected to a gas-using device, and a heating component is arranged in the module body.

[0005] Preferably, the first flow channel and the second flow channel are both configured as an L-shape with the vertical part facing upward, a fourth flow channel is vertically provided in the module body, the bottom end of the fourth flow channel is connected to the valve hole, the first flow channel and the second flow channel are both connected to the fourth flow channel, and a second diaphragm valve for controlling the on and off of the fourth flow channel is provided on the module body.

[0006] Preferably, the heating assembly comprises a heating rod and a thermocouple, the module body is provided with a heating rod mounting hole and a thermocouple mounting hole, and the heating rod and the thermocouple are fixed to the module body by fastening bolts.

[0007] Preferably, VCR joints are welded at the first port, the second port and the third port.

[0008] The beneficial effects of the technical solution of the present invention are:

[0009] The first flow channel, the second flow channel and the third flow channel are all connected to the valve hole, and the first diaphragm valve is connected in the valve hole, so that the three-way gas is concentrated into one module, and the on-off of the three-way gas mixing is controlled by the first diaphragm valve, thereby reducing the use of pipelines and valves, saving equipment costs and floor space;

[0010] The first port, the second port and the third port are all welded with VCR connectors to ensure the sealing of the ports, which is convenient for connecting various instruments or equipment;

[0011] The second diaphragm valve is used to control the on-off of the fourth flow channel. The first flow channel and the second flow channel are connected to the fourth flow channel, thereby controlling the on-off of the first flow channel and the second flow channel. The second diaphragm valve controls the on-off of the valve hole. The third flow channel is connected to the valve hole, thereby controlling the on-off of the third flow channel. The first diaphragm valve and the second diaphragm valve are both connected to the valve block body. There is no need to use multiple valves to control the on-off of multiple pipelines, and the operation is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a layout diagram of the multi-channel ultra-pure gas on-off control module of the embodiment when it is working.

[0013] Figure 2 It is a schematic diagram of the module body structure.

[0014] Figure 3 Schematic diagram of the third flow channel structure.

[0015] The numbers in the figure represent:

[0016] 1. Module body; 2. First port; 3. Second port; 4. Third port; 5. First flow channel; 6. Second flow channel; 7. Third flow channel; 8. Valve hole; 9. First diaphragm valve; 10. Fourth flow channel; 11. Valve body; 12. Screw; 13. Hand wheel; 14. Piston; 15. Valve disc; 16. Diaphragm; 17. Protrusion; 18. Through hole; 19. Heating rod mounting hole; 20. Thermocouple mounting hole. DETAILED DESCRIPTION

[0017] The present invention is further described in detail below with reference to specific embodiments.

[0018] Example:

[0019] like Figures 1 to 3As shown, a multi-channel ultrapure gas on-off control module of the present invention comprises a module body 1, a first port 2, a second port 3 and a third port 4 arranged on three sides of the module body 1, a first flow channel 5 connected to the first port 2, a second flow channel 6 connected to the second port 3 and a third flow channel 7 connected to the third port 4 are arranged in the module body 1, a valve hole 8 is arranged on the bottom surface of the module body 1, the first flow channel 5, the second flow channel 6 and the third flow channel 7 are all connected to the valve hole 8, one end of a first diaphragm valve 9 is connected to the valve hole 8, the other end of the first diaphragm valve 9 is connected to a gas-using device through a VCR connector, and a heating component is arranged in the module body 1.

[0020] The first flow channel 5 and the second flow channel 6 are both set to be L-shaped with the vertical part facing upward. A fourth flow channel 10 is vertically arranged in the module body 1. The bottom end of the fourth flow channel 10 is connected to the valve hole 8. The first flow channel 5 and the second flow channel 6 are both connected to the fourth flow channel 10. A second diaphragm valve for controlling the opening and closing of the fourth flow channel 10 is provided on the module body 1. The second diaphragm valve includes a valve body 11, a screw rod 12 is vertically provided on the top of the valve body 11, the screw rod 12 is connected to the valve body 11 by threads, a hand wheel 13 is connected to the top of the screw rod 12, a piston 14 is vertically provided in the valve body 11, the bottom end of the screw rod 12 is rotatably connected to the upper end surface of the piston 14, a valve disc 15 is connected to the lower end surface of the piston 14, an elastic diaphragm 16 is provided below the valve disc 15, the valve body 11 is provided with a protrusion 17 located below the diaphragm 16, the protrusion 17 is provided with a through hole 18 connected to the fourth flow channel 10, and the first flow channel 5 and the second flow channel 6 are both connected to the valve cavity of the valve body 11. The hand wheel 13 is turned to drive the piston 14 to drive the valve flap 15 downward, and the valve flap 15 presses the diaphragm 16 onto the protrusion 17, thereby blocking the through hole 18. At the same time, the diaphragm 16 cooperates with both sides of the protrusion 17 to disconnect the first flow channel 5 and the second flow channel 6. Compared with the traditional three-way valve, the second diaphragm valve can simultaneously control the opening and closing of the first flow channel 5, the second flow channel 6 and the fourth flow channel 10, and can separate the three flow channels respectively.

[0021] The heating assembly includes a heating rod and a thermocouple. The module body 1 is provided with a heating rod mounting hole 19 and a thermocouple mounting hole 20. The heating rod and the thermocouple are fixed to the module body 1 by fastening bolts, thereby facilitating the installation and disassembly of the heating rod and the thermocouple. The heating rod generates heat and conducts the heat to the internal gas through the module body 1. The thermocouple is used to monitor the temperature.

[0022] The first port 2 , the second port 3 and the third port 4 are all welded with VCR joints by automatic orbital welding.

[0023] The working process of the present application is as follows: the first port 2, the second port 3 and the third port 4 are connected to three gas pipelines through VCR connectors, which are respectively used to transport gas a, gas b and gas c. A mass flow meter is provided at the connection between the gas pipeline and the port to monitor the input flow ratio of each gas. The first diaphragm valve 9 is opened, and the gas a flowing through the first flow channel 5 and the gas b flowing through the second flow channel 6 are merged in the valve body 11 of the first diaphragm valve 9, and enter the fourth flow channel 10 through the through hole 18, and finally enter the first diaphragm valve 9. The gas c enters the first diaphragm valve 9 through the third flow channel 7. The first diaphragm valve 9 is opened, and the three gases are mixed in the valve cavity of the first diaphragm valve 9 and enter the gas terminal.

[0024] The above are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the creative concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A multi-channel ultrapure gas on-off control module, characterized in that: The invention comprises a module body, a first port, a second port and a third port arranged on three sides of the module body, a first flow channel connected to the first port, a second flow channel connected to the second port and a third flow channel connected to the third port are arranged in the module body, a valve hole is arranged on the bottom surface of the module body, the first flow channel, the second flow channel and the third flow channel are all connected to the valve hole, one end of a first diaphragm valve is connected to the valve hole, the other end of the first diaphragm valve is connected to a gas-using device, and a heating component is arranged in the module body.

2. A multi-channel ultrapure gas on-off control module according to claim 1, characterized in that: The first flow channel and the second flow channel are both set to be L-shaped with the vertical part facing upward. A fourth flow channel is vertically arranged in the module body. The bottom end of the fourth flow channel is connected to the valve hole. The first flow channel and the second flow channel are both connected to the fourth flow channel. A second diaphragm valve for controlling the opening and closing of the fourth flow channel is provided on the module body.

3. A multi-channel ultrapure gas on-off control module according to claim 1, characterized in that: The heating assembly comprises a heating rod and a thermocouple. The module body is provided with a heating rod mounting hole and a thermocouple mounting hole. The heating rod and the thermocouple are fixed to the module body by fastening bolts.

4. A multi-channel ultrapure gas on-off control module according to claim 1, characterized in that: VCR joints are welded at the first port, the second port and the third port.

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