Magnetic suspension gravity compensator frame and magnetic suspension gravity compensator

Abstract

The invention discloses a magnetic suspension gravity compensator frame and a magnetic suspension gravity compensator, and relates to the technical field of magnetic suspension. The gravity compensator is novel and reasonable in structure, and the centering connection structure can be quickly mounted and dismounted on the premise that the gravity compensator body does not need to be moved based on adaptive positioning of the second stator positioning structure and the first stator positioning structure on the centering connection structure and adaptive positioning of the second rotor positioning structure and the first rotor positioning structure on the centering connection structure. After the centering connection structure is installed, calibration and fixation of the rotor of the gravity compensator can be directly completed on the basis that no other extra fastening and measuring devices are needed at the same time, disassembly, assembly and positioning are fast, and the convenience of the gravity compensator in actual use is improved. When the centering connection structure is installed, relative fixation of the stator frame and the rotor frame is achieved, and transportation and transfer of the magnetic suspension gravity compensator are facilitated. The magnetic suspension gravity compensator comprises the magnetic suspension gravity compensator frame.

Description

Technical Field

[0001] The invention belongs to the technical field of magnetic suspension, and relates to a magnetic suspension gravity compensator, in particular to a novel magnetic suspension gravity compensator frame and a magnetic suspension gravity compensator comprising the magnetic suspension gravity compensator frame. Background Art

[0002] The magnetic levitation gravity compensator is based on magnetic levitation technology and can provide frictionless and wear-free support, while avoiding the parasitic forces and complex structural problems in traditional gravity unloading solutions. It plays a vital role in modern precision industry. It is mainly used in large-scale precision instruments and equipment that require non-contact support, such as the metrology frame of lithography machines and large space optical loads. The magnetic levitation gravity compensator uses the interaction force between permanent magnets to achieve passive suspension of the load. This method has a simple structure, no loss, and is easy to implement. When combined with an active control system, it can achieve six-degree-of-freedom stable suspension of large mass loads, which is crucial to ensuring the performance of precision equipment during the ground experimental verification phase.

[0003] However, there are technical difficulties in the practical application of the magnetic levitation gravity compensator, which is caused by its advantage of contactless six-free suspension, that is, the calibration of the mover of the magnetic levitation gravity compensator is more difficult. The mover in the working state has no physical contact with the stator. It is not easy to move the mover to the center of the gravity compensator using external devices, and it is also difficult to detect the current position of the mover through sensors or measuring devices. Therefore, it is impossible to know when the mover is in the zero position state, and it is difficult to control the mover to return to the zero position state. These problems will cause great trouble to the practical application of the magnetic levitation gravity compensator. At the same time, the mover is completely suspended from the stator. This unstable state will also hinder the transportation and transfer of the gravity compensator: bumps and vibrations on the road may cause random movement of the mover, and then collide with the stator or other components to damage the gravity compensator. These are the problems that the magnetic levitation gravity compensator needs to solve in practical applications. Summary of the invention

[0004] The purpose of the present invention is to provide a novel magnetic levitation gravity compensator frame and a magnetic levitation gravity compensator comprising the magnetic levitation gravity compensator frame, so as to solve the problems existing in the above-mentioned existing magnetic levitation gravity compensators that the calibration and fixation of the magnetic levitation gravity compensator mover are difficult and the transportation and transfer of the gravity compensator are inconvenient.

[0005] To achieve the above object, the present invention provides the following solutions:

[0006] The present invention provides a magnetic suspension gravity compensator frame, comprising a stator frame, a mover frame and a centering connection structure, wherein:

[0007] The stator frame is used to install the stator permanent magnet, and the stator frame is provided with a stator positioning structure 1;

[0008] The mover frame is used to install the mover permanent magnet, and the mover frame is provided with a mover positioning structure 1 matching the stator positioning structure 1;

[0009] The centering connection structure comprises a stator positioning structure 2 for being adapted to be connected with the stator positioning structure 1, and a mover positioning structure 2 for being adapted to be connected with the mover positioning structure 1. The centering connection structure is used to be detachably installed between the mover frame and the stator frame so that the mover frame and the stator frame can be switched between a zero position state and a working state. In the zero position state, the mover frame and the stator frame are connected and fixed by the centering connection structure. The mover frame is at the center position of the magnetic suspension gravity compensator and is positioned in the center with the stator frame. In the working state, the centering connection structure is detached from the mover frame and the stator frame, and the mover frame and the stator frame move relatively under the action of magnetic suspension.

[0010] Preferably, the stator frame comprises an upper stator retaining plate, a lower stator retaining plate and a stator support angle, wherein:

[0011] The upper stator retaining plate is used to mount the upper stator permanent magnet;

[0012] The lower stator holding plate is used to install the lower stator permanent magnet, the lower stator holding plate is coaxial with the upper stator holding plate, and the lower stator holding plate is parallel to the upper stator holding plate, and the lower stator holding plate and the upper stator holding plate are connected and fixed by the stator support angle;

[0013] The outer edge of the lower stator retaining plate extends outward relative to the outer edge of the upper stator retaining plate, and the stator positioning structure 1 is arranged on the extended portion of the lower stator retaining plate;

[0014] The mover frame includes a mover retaining plate, a mover top plate and a column, wherein:

[0015] The mover retaining plate is used to mount the mover permanent magnet, and the mover retaining plate is movably mounted between the lower stator retaining plate and the upper stator retaining plate;

[0016] The mover top plate is located above the upper stator holding plate, and the mover top plate is connected and fixed to the mover holding plate through the column; a notch is provided on the mover top plate to form the mover positioning structure 1;

[0017] The centering connection structure is used to be detachably connected between the mover positioning structure 1 of the mover top plate and the stator positioning structure 1 of the lower stator retaining plate.

[0018] Preferably, the lower stator holding plate is a rectangular plate, and a right-angled groove is respectively provided at four corner positions of its upper surface, and the upper stator holding plate is a cross-shaped stator holding plate, and the four corners of the upper stator holding plate are respectively connected to the four right-angled grooves of the lower stator holding plate through a stator support angle, wherein the stator support angle is closely attached to the inner edge of the right-angled groove, and the stator positioning structure 1 is formed between the outer edge of the right-angled groove and the outer wall of the stator support angle;

[0019] The mover holding plate and the mover top plate are both cross-shaped plates, and the four branches of the mover holding plate and the mover top plate are aligned one by one, the four branch ends of the mover holding plate and the mover top plate are respectively connected and fixed by a column, the four branches of the mover holding plate are staggered with the four branches of the cross-shaped stator holding plate, and the mover positioning structure 1 is formed between every two adjacent branches of the mover top plate;

[0020] The centering connection structure is a corner centering structure, which is used to be nested outside the stator support angle, wherein the bottom of the corner centering structure is used to be embedded in a place of the stator positioning structure and is detachably connected to the stator positioning structure, and the top of the corner centering structure is used to be embedded in a place of the mover positioning structure and is detachably connected to the mover positioning structure.

[0021] Preferably, an upper through hole is provided on the top of the corner centering structure;

[0022] The four branch ends of the mover top plate are all T-shaped ends, and threaded blind holes corresponding to the upper through holes are provided at both ends of the T-shaped end for installing the corner centering structure.

[0023] Preferably, a lower through hole is provided on the side wall of the corner centering structure;

[0024] The outer side wall of the stator support angle is provided with a threaded hole corresponding to the lower through hole for installing the corner centering structure.

[0025] Preferably, in the zero position state, the outer wall surface of the corner centering structure, the outer wall surface of the lower stator retaining plate and the four branch outer wall surfaces of the mover top plate are located on the same rectangular outer peripheral wall surface.

[0026] Preferably, the corner centering structure includes a corner cross beam, a first side longitudinal beam and a second side longitudinal beam, the first side longitudinal beam and the second side longitudinal beam have the same structure, the middle parts of the first side longitudinal beam and the second side longitudinal beam are connected by the corner cross beam, and a through hole is opened at the corner position of the corner cross beam.

[0027] Preferably, the outer edge of the right-angle sink is also provided with a countersunk hole for connecting the magnetic suspension gravity compensator.

[0028] The present invention also proposes a magnetic levitation gravity compensator, comprising a stator permanent magnet, a mover permanent magnet and the above-mentioned magnetic levitation gravity compensator frame, wherein the stator frame is fixed on the magnetic levitation gravity compensator, and the center of the stator frame coincides with the center of the magnetic levitation gravity compensator, the stator permanent magnet is installed on the stator frame, and the mover permanent magnet is installed on the mover frame.

[0029] The present invention also proposes a magnetic levitation gravity compensator, including a stator permanent magnet, a mover permanent magnet and the above-mentioned magnetic levitation gravity compensator frame, the stator frame is fixed on the magnetic levitation gravity compensator, and the center of the stator frame coincides with the center of the magnetic levitation gravity compensator, the stator permanent magnet includes an upper stator permanent magnet and a lower stator permanent magnet, the upper stator permanent magnet is installed on the upper stator retaining plate, the lower stator permanent magnet is installed on the lower stator retaining plate, the mover permanent magnet is installed on the mover retaining plate, and the mover top plate is used to connect to the outside to output the gravity compensator force.

[0030] Compared with the prior art, the present invention has achieved the following technical effects:

[0031] The magnetic levitation gravity compensator frame proposed in the present invention has a novel and reasonable structure. It is based on the stator positioning structure 2 and the mover positioning structure 2 on the centering connection structure, which are respectively adapted and positioned with the stator positioning structure 1 and the mover positioning structure 1. The centering connection structure can be quickly installed and disassembled without moving the gravity compensator body. Not only can the calibration and fixation of the gravity compensator mover be completed directly and simultaneously without any additional fastening and measuring devices after the centering connection structure is installed, but also the disassembly and positioning are quick, which increases the convenience of the gravity compensator in actual use. When the centering connection structure is installed, the relative fixation of the stator frame and the mover frame is achieved, which facilitates the transportation and transfer of the magnetic levitation gravity compensator.

[0032] In some technical solutions disclosed in the present invention, the centering connection structure used for fixing and calibration is located on the outside of the gravity compensator frame. It can not only be quickly disassembled and assembled at any time, but also does not expand the overall external dimensions of the gravity compensator, thus saving space and facilitating transportation and handling.

[0033] The magnetic levitation gravity compensator proposed in the present invention includes the above-mentioned magnetic levitation gravity compensator frame and has all the characteristics of the above-mentioned magnetic levitation gravity compensator frame, which will not be described in detail here. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0035] Figure 1 It is a schematic diagram of the overall structure of the magnetic suspension gravity compensator frame disclosed in an embodiment of the present invention;

[0036] Figure 2 for Figure 1 A top view of the magnetic levitation gravity compensator frame;

[0037] Figure 3 It is a schematic diagram of the overall structure of the stator frame disclosed in the embodiment of the present invention;

[0038] Figure 4 for Figure 2 The main view of the middle stator frame;

[0039] Figure 5 for Figure 2 A top view of the middle stator frame;

[0040] Figure 6 for Figure 2 Top view of the middle stator frame;

[0041] Figure 7 It is a schematic diagram of the overall structure of an upper stator retaining plate in a stator frame disclosed in an embodiment of the present invention;

[0042] Figure 8 It is a schematic diagram of the overall structure of a lower stator retaining plate in a stator frame disclosed in an embodiment of the present invention;

[0043] Fig. 9 It is a schematic diagram of the overall structure of the stator support angle in the stator frame disclosed in the embodiment of the present invention;

[0044] Fig.10 It is a schematic diagram of the overall structure of the mover frame disclosed in an embodiment of the present invention;

[0045] Fig.11 for Fig.10 The main view of the middle moving subframe;

[0046] Fig.12 for Fig.10Top view of the middle moving subframe;

[0047] Fig.13 for Fig.10 Top view of the middle moving subframe;

[0048] Fig.14 It is a schematic diagram of the overall structure of a mover retaining plate in a mover frame disclosed in an embodiment of the present invention;

[0049] Fig.15 It is a schematic diagram of the overall structure of a mover top plate in a mover frame disclosed in an embodiment of the present invention;

[0050] Fig.16 It is a schematic diagram of the overall structure of a column in a moving subframe disclosed in an embodiment of the present invention;

[0051] Fig.17 It is a schematic diagram of the overall structure of the centering connection structure disclosed in an embodiment of the present invention.

[0052] In the figure, reference numerals are: 100, magnetic suspension gravity compensator frame;

[0053] 1. Stator frame; 11. Stator positioning structure 1; 12. Upper stator retaining plate; 13. Lower stator retaining plate; 14. Stator support angle; 15. Right angle sink groove; 16. Threaded hole; 17. Countersunk hole;

[0054] 2. Mover frame; 21. Mover positioning structure 1; 22. Mover retaining plate; 23. Mover top plate; 24. Column; 25. Threaded blind hole;

[0055] 3. Centering connection structure; 31. Upper through hole; 32. Lower through hole; 33. Corner cross beam; 34. First side longitudinal beam; 35. Second side longitudinal beam; 36. Through hole. DETAILED DESCRIPTION

[0056] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0057] One of the purposes of the present invention is to provide a novel magnetic levitation gravity compensator frame to solve the problems of the existing magnetic levitation gravity compensator, that is, the magnetic levitation gravity compensator mover calibration and fixation are difficult, and the gravity compensator is not convenient to transport and transfer.

[0058] Another object of the present invention is to provide a magnetic levitation gravity compensator comprising the above-mentioned magnetic levitation gravity compensator frame.

[0059] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0060] Example 1

[0061] like Figure 1 to Figure 17As shown, this embodiment proposes a magnetic levitation gravity compensator frame 100, including a stator frame 1, a mover frame 2, a centering connection structure 3, screws, cylindrical pins and other auxiliary structural parts. Among them: the stator frame 1 can be directly used as the base of the magnetic levitation gravity compensator. The magnetic levitation gravity compensator is generally a symmetrical structure, and its overall structure has a central axis. Correspondingly, the magnetic levitation gravity compensator frame 100 also has a central axis. The central axis of the magnetic levitation gravity compensator frame 100 is the central axis of the magnetic levitation gravity compensator. The stator frame 1 is used to install the stator permanent magnet, and the stator frame 1 is provided with a stator positioning structure 11; the mover frame 2 is used to install the mover permanent magnet, and the mover frame 2 is provided with a mover positioning structure 21 matching the stator positioning structure 11. There is space for installing the centering connection structure 3 between the matching stator positioning structure 11 and the mover positioning structure 21; the centering connection structure 3 has a stator positioning structure 2 for adapting and connecting with the stator positioning structure 11, so that And a mover positioning structure 2 for adapting and connecting with a mover positioning structure 1 21, the centering connection structure 3 as a whole is used to be detachably installed between the mover frame 2 and the stator frame 1, so that the mover frame 2 and the stator frame 1 can be switched between a zero position state and a working state, wherein, in the zero position state, the mover frame 2 and the stator frame 1 are connected and fixed by the centering connection structure 3, and the centering connection structure 3 plays a role in limiting the mover frame 2 and the stator frame 1. At this time, the mover frame 2 is in the center position of the entire magnetic levitation gravity compensator, and the center position not only refers to the coincidence of the center axis of the mover frame 2, the center axis of the stator frame 1 and the center axis of the magnetic levitation gravity compensator (that is, the mover frame 2 and the stator frame 1 are center-positioned), but also on this center axis, the mover frame 2 is also in the center of the magnetic levitation gravity compensator. When in working state, the centering connection structure 3 is disassembled from the mover frame 2 and the stator frame 1. At this time, the centering connection structure 3 and the mover frame 2 and the stator frame 1 are all detached from each other, and the limiting effect of the centering connection structure 3 on the mover frame 2 and the stator frame 1 is released. The mover frame 2 and the stator frame 1 can move relatively under the action of magnetic suspension, and realize the suspension support function of the magnetic suspension gravity compensator. Based on the adaptation and positioning of the stator positioning structure 11 and the mover positioning structure 121 on the centering connection structure 3, the centering connection structure 3 can be quickly installed and disassembled without moving the gravity compensator body. Not only can the calibration and fixation of the gravity compensator mover be completed directly and simultaneously without any additional fastening and measuring devices after the centering connection structure is installed, but also the disassembly and assembly positioning are quick, which increases the convenience of the gravity compensator in actual use.

[0062] In this embodiment, Figure 3 to Figure 9As shown, the stator frame 1 includes an upper stator retaining plate 12, a lower stator retaining plate 13 and a stator support angle 14, wherein: the upper stator retaining plate 12 is used to install the upper stator permanent magnet, the lower stator retaining plate 13 directly serves as the base of the magnetic levitation gravity compensator, and the lower stator retaining plate 13 is used to install the lower stator permanent magnet, the lower stator retaining plate 13 is coaxial with the upper stator retaining plate 12, and the lower stator retaining plate 13 is parallel to the upper stator retaining plate 12, and the lower stator retaining plate 13 is connected and fixed to the upper stator retaining plate 12 through the stator support angle 14. As shown Figures 10 to 16 As shown, the mover frame 2 includes a mover retaining plate 22, a mover top plate 23 and a column 24, wherein: the mover retaining plate 22 is used to install the mover permanent magnet, and the mover retaining plate 22 is movably installed between the lower stator retaining plate 13 and the upper stator retaining plate 12; the mover top plate 23 is located above the upper stator retaining plate 12, and the mover top plate 23 is connected and fixed to the mover retaining plate 22 through the column 24; a notch is provided on the mover top plate 23 to form a mover positioning structure 121; the centering connection structure 3 is used to be detachably connected between the mover positioning structure 121 of the mover top plate 23 and the stator positioning structure 11 of the lower stator retaining plate 13. Based on the above-mentioned structure of the stator frame 1 and the mover frame 2, a two-dimensional permanent magnet array type magnetic suspension gravity compensator can be formed.

[0063] In some specific embodiments, the parallel spacing between the upper stator retaining plate 12 and the lower stator retaining plate 13 in the stator frame 1 is preferably equal to the parallel spacing between the mover retaining plate 22 and the mover top plate 23 in the mover frame 2. Based on this, the height of the centering connection structure 3 should preferably satisfy: in the zero position state, the mover retaining plate 22 is exactly located in the middle position of the upper stator retaining plate 12 and the lower stator retaining plate 13 (that is, the distance between the mover retaining plate 22 and the upper stator retaining plate 12 is the same as the distance between the mover retaining plate 22 and the lower stator retaining plate 13), thereby ensuring that the mover frame 2 is in the center of the magnetic suspension gravity compensator in the zero position state.

[0064] In some specific embodiments, Figure 3 to Figure 9 As shown, the lower stator retaining plate 13 is a rectangular plate, preferably a square plate, and a right-angle groove 15 is respectively provided at the four corner positions of its upper surface. Correspondingly, the upper stator retaining plate 12 is preferably a cross-shaped stator retaining plate, and its outer contour is also preferably a square. The upper stator retaining plate 12 and the lower stator retaining plate 13 are coaxial in the upper and lower directions, and the four corners of the upper stator retaining plate 12 are respectively connected to the four right-angle grooves 15 of the lower stator retaining plate 13 through a stator supporting angle 14, wherein the stator supporting angle 14 is close to the inner edge of the right-angle groove 15, and a stator positioning structure 11 is formed between the outer edge of the right-angle groove 15 and the outer wall of the stator supporting angle 14.

[0065] In some specific embodiments, Figures 10 to 16As shown, preferably, both the mover retaining plate 22 and the mover top plate 23 are cross-shaped plates, the mover retaining plate 22 and the mover top plate 23 are coaxial, and the four branches of the mover retaining plate 22 and the mover top plate 23 are aligned one by one, and the four branch ends of the mover retaining plate 22 and the mover top plate 23 are respectively connected and fixed by a column 24, and the four branches of the mover retaining plate 22 are staggered with the four branches of the cross-shaped stator retaining plate. Preferably, in the aforementioned zero position state, the four branches of the mover retaining plate 22 are rotated 90 degrees relative to the four branches of the upper stator retaining plate 12 (i.e., the cross-shaped stator retaining plate), and the four branches of the mover retaining plate 22 are located exactly at the center position of the four branch intervals of the upper stator retaining plate 12 (i.e., the cross-shaped stator retaining plate). In this embodiment, as Fig.13 As shown, a mover positioning structure 21 is formed between each two adjacent branches of the mover top plate 23. Based on the above structure, the centering connection structure 3 is preferably a corner centering structure, whose corner is 90 degrees, and the corner centering structure is used to be nested outside the stator support angle 14, wherein the bottom of the corner centering structure is used to be embedded in the stator positioning structure 11 and detachably connected to the stator positioning structure 11, and the top of the corner centering structure is used to be embedded in the mover positioning structure 21 and detachably connected to the mover positioning structure 21.

[0066] Specifically, preferably, the middle positions of the four branch ends of the mover retaining plate 22 are respectively provided with screw countersunk holes and pin holes for tightening, which are used to connect with the column 24. The mover top plate 23 adopts a special cross shape, and the four branches are respectively provided with screw countersunk holes and pin holes for tightening, which are used to connect with the column 24. The column 24 has threaded holes and pin holes corresponding to the mover retaining plate 22 and the mover top plate 23, which can connect the two and form the mover frame 2 as a whole.

[0067] In some specific embodiments, Figure 3 and Figure 8 As shown, the outer edge of the lower stator holding plate 13 extends outward relative to the outer edge of the upper stator holding plate 12, and a stator positioning structure 11 is provided on the extended portion of the lower stator holding plate 13. Based on this, the outer dimensions of the lower stator holding plate 13 are slightly larger than those of the upper stator holding plate 12. The upper stator holding plate 12 is respectively provided with screw countersunk holes for tightening and pin holes for positioning. The cross-sectional dimensions in the horizontal plane of the lower stator holding plate 13 are the horizontal cross-sectional dimensions of the entire gravity compensator. In addition to screw countersunk holes and pin holes for connecting with the stator support angle 14, the right-angled recessed grooves 15 around it are also provided with countersunk holes 17 for connecting the magnetic suspension gravity compensator. The countersunk holes 17 are preferably located at the corners of the right-angled recessed grooves 15.

[0068] In some specific embodiments, the stator support angle 14 has three threaded holes and two pin holes located in the middle of the threaded holes in the vertical direction. These hole positions correspond to the upper and lower stator retaining plates, and the upper and lower stator retaining plates can be connected to form the stator frame 1 as a whole.

[0069] In some specific embodiments, Figure 1 and Fig.17 As shown, the corner centering structure specifically includes a corner cross beam 33, a first side longitudinal beam 34 and a second side longitudinal beam 35. The first side longitudinal beam 34 and the second side longitudinal beam 35 respectively serve as two side surfaces of the corner centering structure, and the two have the same structure. The middle parts of the first side longitudinal beam 34 and the second side longitudinal beam 35 are connected by the corner cross beam 33. An upper through hole 31 is provided at the top of the corner centering structure, that is, the top of the first side longitudinal beam 34 and the second side longitudinal beam 35. Correspondingly, the four branch ends of the rotor top plate 23 are all T-shaped ends, and threaded blind holes 25 corresponding to the upper through holes 31 are provided at both ends of the T-shaped ends for installing the corner centering structure; accordingly, lower through holes 32 are provided near the bottom of the side walls of the corner centering structure, that is, the side walls of the first side longitudinal beam 34 and the second side longitudinal beam 35, and are close to the bottom. The stator support angle 14 has multi-axial hole positions, which not only has three threaded holes and two pin holes located in the middle of the threaded holes in the vertical direction (these hole positions correspond to the upper and lower stator retaining plates 13, and the retaining plates can be connected to form the stator frame 1 as a whole), but also has threaded holes 16 corresponding to the lower through holes 32 on the outer side walls for installing the corner centering structure. The corner centering structure (i.e., the centering connection structure 3) can play a calibration and fixing role while being able to be quickly disassembled and assembled. A single centering connection structure 3 has only two screw positions on the top and bottom for fixing, which makes disassembly and assembly simple and quick, and can improve the efficiency and convenience of calibration and fixation.

[0070] In some specific embodiments, Figure 1 As shown, after the two upper protrusions of the centering connection structure 3 are connected to the mover top plate 23, they can form a structure similar to a closed hand ring shape, which is convenient for personnel to manually carry and control the gravity compensator.

[0071] In some specific embodiments, Figure 1 and Fig.17 As shown, a through hole 36 is provided at the corner position of the corner beam 33 of the centering connection structure 3, and the corner beam 33 is higher than the lower stator retaining plate 13, which makes the bottom of the through hole 36 vacant, thereby realizing the avoidance design of the countersunk hole 17. This structure can ensure that the gravity compensator can be installed and fixed as a whole even when the centering connection structure 3 is installed, reducing the difficulty and steps of installing the gravity compensator.

[0072] In some specific embodiments, the corner centering structure (i.e., the centering connection structure 3) is preferably an integrally formed structure with uniform thickness, and its thickness is exactly the difference between the horizontal cross-sectional dimensions of the upper stator retaining plate 12 and the lower stator retaining plate 13. In this way, when the centering connection structure 3 is installed (i.e., in the zero position state), the outer wall surface of the corner centering structure, the outer wall surface of the lower stator retaining plate 13, and the four branch outer wall surfaces of the mover top plate 23 are located on the same rectangular outer peripheral wall surface, and the overall outer dimensions of the gravity compensator will not be enlarged or partially bulged, which is convenient for future transportation and transfer installation.

[0073] The working principle of the magnetic levitation gravity compensator frame 100 is described below in combination with the structure of the magnetic levitation gravity compensator frame 100.

[0074] When the centering connection structure 3 is in the installed state, the mover frame 2 will be in the zero position state, that is, the mover is in the center position of the gravity compensator. The installation of the centering connection structure 3 can return the mover frame 2 to the zero position state without using any other auxiliary devices and measuring devices. This function allows the gravity compensator to return to zero quickly without other measurement and correction steps, greatly improving the efficiency of the gravity compensator in actual use and testing.

[0075] When the centering connection structure 3 is in the installed state, the moving subframe 2 will be in a fixed state and cannot move any more. The gravity compensator fixed by the centering connection structure 3 is more convenient for transportation and transfer, or installation on other external structures. At the same time, the installed centering connection structure 3 does not increase the external size of the gravity compensator, making it easier to carry, stack and transfer in batches and boxes.

[0076] When the centering connection structure 3 is in a disassembled state, the stator frame 1 and the mover frame 2 can work completely normally without being disturbed by the centering connection structure 3 .

[0077] Only when the mover frame 2 is in the zero position state of the gravity compensator can all four centering connection structures 3 be fully installed. This means that as long as all four centering connection structures 3 are installed, the mover frame 2 must be in the initial position of the gravity compensator, and no additional correction and measurement of the mover frame 2 is required, which plays a role in rapid calibration.

[0078] When all four centering connection structures 3 are installed, the mover frame 2 is fixed to the stator frame 1 through the centering connection structure 3, and the entire mover frame 2 can no longer be moved, which is convenient for transportation and transfer. In this way, the centering connection structure 3 plays a role in fixing the gravity compensator. This fixing function is achieved simultaneously with the calibration function, which is more efficient and convenient.

[0079] The magnetic suspension gravity compensator frame 100 is specifically a two-dimensional permanent magnet array magnetic suspension gravity compensator frame, which can quickly calibrate and fix the mover frame, and the specific beneficial effects are as follows:

[0080] (i) The calibration and fixation of the gravity compensator mover can be completed directly and simultaneously after the centering connection structure 3 is installed, without any additional fastening, measuring and auxiliary devices.

[0081] The mover and stator of the magnetic levitation gravity compensator do not have any physical contact, so it is difficult to determine when the mover is in the center position. The traditional gravity compensator frame requires additional measuring devices during the test process to understand the real-time position of the mover. This makes measurement and calibration inconvenient and low in accuracy. The magnetic levitation gravity compensator frame proposed in the present invention uses the stator positioning structure 2 and the mover positioning structure 2 of the central connection structure to match the stator positioning structure 1 and the mover positioning structure 1 respectively, so that as long as the centering connection structure is installed, the mover frame must be in the center position, which greatly simplifies the test process of the gravity compensator and improves the centering accuracy of the mover.

[0082] (ii) The centering connection structure 3 used for fixing and calibration is located on the outside of the gravity compensator frame and can be quickly disassembled and assembled at any time.

[0083] The traditional magnetic levitation gravity compensator needs to fill the gap between the mover and the stator with pads in multiple places to fix the position of the mover. When the gravity compensator needs to be used, these pads are removed to suspend the mover. However, these pads are numerous and narrow, and removing them will consume a lot of manpower and time costs. The magnetic levitation gravity compensator frame proposed in the present invention has a centering connection structure filled and installed in the four missing corners of the frame. The four centering connection structures are located outside the four sides of the frame without blocking any other parts of the frame, making it convenient and quick to disassemble and assemble.

[0084] (iii) Even after the centering connection structure 3 is installed, the overall external dimensions of the gravity compensator do not expand, thus saving space and facilitating transportation and handling.

[0085] Although the centering connection structure of the present invention is installed outside the frame, the overall shape of the frame is still square. This regular shape is convenient for stacking, transferring and carrying the gravity compensator. In contrast, the shapes of other gravity compensators are mostly irregular shapes, which are not convenient for stacking, transferring and carrying.

[0086] Example 2

[0087] This embodiment proposes a magnetic levitation gravity compensator, including a stator permanent magnet, a mover permanent magnet and the magnetic levitation gravity compensator frame 100 disclosed in Example 1, the stator frame 1 is fixed on the magnetic levitation gravity compensator, and the center of the stator frame 1 coincides with the center of the magnetic levitation gravity compensator, the stator permanent magnet includes an upper stator permanent magnet and a lower stator permanent magnet, the upper stator permanent magnet is installed on the upper stator retaining plate 12, the lower stator permanent magnet is installed on the lower stator retaining plate 13, the mover permanent magnet is installed on the mover retaining plate 22, and the mover top plate 23 is used to connect to the outside to output the gravity compensator force.

[0088] The above-mentioned magnetic levitation gravity compensator is specifically a two-dimensional permanent magnet array type magnetic levitation gravity compensator. When fixing and calibrating the mover, refer to Example 1, and the specific working principle and technical effects are not repeated here.

[0089] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A magnetic levitation gravity compensator frame, It is characterized in that It comprises a stator frame (1), a mover frame (2) and a centering connection structure (3), wherein: The stator frame (1) is used to mount the stator permanent magnet, and the stator frame (1) is provided with a stator positioning structure 1 (11); The mover frame (2) is used to mount the mover permanent magnet, and the mover frame (2) is provided with a mover positioning structure 1 (21) matching the stator positioning structure 1 (11); The centering connection structure (3) comprises a stator positioning structure 2 for being adapted to be connected with the stator positioning structure 1 (11), and a mover positioning structure 2 for being adapted to be connected with the mover positioning structure 1 (21). The centering connection structure (3) is used to be detachably installed between the mover frame (2) and the stator frame (1) so as to switch the mover frame (2) and the stator frame (1) between a zero position state and a working state. In the zero position state, the mover frame (2) and the stator frame (1) are connected and fixed by the centering connection structure (3). The mover frame (2) is located at the center position of the magnetic suspension gravity compensator and is aligned and positioned with the stator frame (1). In the working state, the centering connection structure (3) and the mover frame (2) and the stator frame (1) are detached from each other. The mover frame (2) and the stator frame (1) move relatively under the action of magnetic suspension.

2. The magnetic levitation gravity compensator frame according to claim 1, It is characterized in that The stator frame (1) comprises an upper stator retaining plate (12), a lower stator retaining plate (13) and a stator support angle (14), wherein: The upper stator retaining plate (12) is used for mounting the upper stator permanent magnet; The lower stator retaining plate (13) is used to mount the lower stator permanent magnet, the lower stator retaining plate (13) is coaxial with the upper stator retaining plate (12), and the lower stator retaining plate (13) is parallel to the upper stator retaining plate (12), and the lower stator retaining plate (13) and the upper stator retaining plate (12) are connected and fixed via the stator support angle (14); The outer edge of the lower stator retaining plate (13) extends outward relative to the outer edge of the upper stator retaining plate (12), and the stator positioning structure 1 (11) is arranged on the extended portion of the lower stator retaining plate (13); The mover frame (2) comprises a mover retaining plate (22), a mover top plate (23) and a column (24), wherein: The mover retaining plate (22) is used to mount the mover permanent magnet, and the mover retaining plate (22) is movably mounted between the lower stator retaining plate (13) and the upper stator retaining plate (12); The mover top plate (23) is located above the upper stator retaining plate (12), and the mover top plate (23) is connected and fixed to the mover retaining plate (22) via the upright column (24); a notch is provided on the mover top plate (23) to form the mover positioning structure 1 (21); The centering connection structure (3) is used for detachably connecting between the mover positioning structure 1 (21) of the mover top plate (23) and the stator positioning structure 1 (11) of the lower stator retaining plate (13).

3. The magnetic levitation gravity compensator frame according to claim 2, It is characterized in that The lower stator retaining plate (13) is a rectangular plate, and a right-angled groove (15) is respectively provided at four corner positions of its upper surface; the upper stator retaining plate (12) is a cross-shaped stator retaining plate; the four corners of the upper stator retaining plate (12) are respectively connected to the four right-angled grooves (15) of the lower stator retaining plate (13) through a stator support angle (14); wherein the stator support angle (14) is closely attached to the inner edge of the right-angled groove (15); and the stator positioning structure (11) is formed between the outer edge of the right-angled groove (15) and the outer wall of the stator support angle (14); The mover retaining plate (22) and the mover top plate (23) are both cross-shaped plates, and the four branches of the mover retaining plate (22) and the mover top plate (23) are aligned one by one in the upper and lower parts, and the four branch ends of the mover retaining plate (22) and the mover top plate (23) are respectively connected and fixed by a column (24), and the four branches of the mover retaining plate (22) are staggered with the four branches of the cross-shaped stator retaining plate, and the mover positioning structure (21) is formed between each two adjacent branches of the mover top plate (23); The centering connection structure (3) is a corner centering structure, and the corner centering structure is used to be nested outside the stator support angle (14), wherein the bottom of the corner centering structure is used to be embedded in the stator positioning structure (11) and is detachably connected to the stator positioning structure (11), and the top of the corner centering structure is used to be embedded in the mover positioning structure (21) and is detachably connected to the mover positioning structure (21).

4. The magnetic levitation gravity compensator frame according to claim 3, It is characterized in that An upper through hole (31) is provided on the top of the corner centering structure; The four branch ends of the mover top plate (23) are all T-shaped ends, and threaded blind holes (25) corresponding to the upper through holes (31) are provided at both ends of the T-shaped ends for installing the corner centering structure.

5. The magnetic levitation gravity compensator frame according to claim 3, It is characterized in that A lower through hole (32) is formed on the side wall of the corner centering structure; The outer side wall of the stator support angle (14) is provided with a threaded hole (16) corresponding to the lower through hole (32) for installing the corner centering structure.

6. The magnetic levitation gravity compensator frame according to any one of claims 3 to 5, It is characterized in that In the zero position state, the outer wall surface of the corner centering structure, the outer wall surface of the lower stator retaining plate (13) and the four branch outer wall surfaces of the mover top plate (23) are located on the same rectangular outer peripheral wall surface.

7. The magnetic levitation gravity compensator frame according to any one of claims 3 to 5, It is characterized in that The corner centering structure comprises a corner cross beam (33), a first side longitudinal beam (34) and a second side longitudinal beam (35); the first side longitudinal beam (34) and the second side longitudinal beam (35) have the same structure; the middle parts of the first side longitudinal beam (34) and the second side longitudinal beam (35) are connected by the corner cross beam (33); and a through hole (36) is provided at a corner position of the corner cross beam (33).

8. The magnetic levitation gravity compensator frame according to any one of claims 3 to 5, It is characterized in that The outer edge of the right-angled groove (15) is also provided with a countersunk hole (17) for connecting the magnetic suspension gravity compensator.

9. A magnetically suspended gravity compensator, It is characterized in that The invention comprises a stator permanent magnet, a mover permanent magnet and the magnetic levitation gravity compensator frame (100) as claimed in claim 1, wherein the stator frame (1) is fixed on the magnetic levitation gravity compensator, and the center of the stator frame (1) coincides with the center of the magnetic levitation gravity compensator, the stator permanent magnet is mounted on the stator frame (1), and the mover permanent magnet is mounted on the mover frame (2).

10. A magnetically suspended gravity compensator, It is characterized in that It comprises a stator permanent magnet, a mover permanent magnet and a magnetic levitation gravity compensator frame (100) as claimed in any one of claims 2 to 8, wherein the stator frame (1) is fixed on the magnetic levitation gravity compensator, and the center of the stator frame (1) coincides with the center of the magnetic levitation gravity compensator, the stator permanent magnet comprises an upper stator permanent magnet and a lower stator permanent magnet, the upper stator permanent magnet is mounted on the upper stator retaining plate (12), the lower stator permanent magnet is mounted on the lower stator retaining plate (13), the mover permanent magnet is mounted on the mover retaining plate (22), and the mover top plate (23) is used for connecting to the outside to output the gravity compensator force.

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