A power-assisted flip cover mechanism for vacuum coating equipment

Abstract

The present invention discloses a power-assisted flip cover mechanism of a vacuum coating device, comprising an upper cover, the upper cover is mounted on a cavity of the vacuum coating device, a fixing seat is arranged on the upper cover, a supporting seat is arranged on the cavity, the fixing seat and the supporting seat are connected by a rotating shaft, so that the upper cover can flip around the cavity; support rods and nitrogen springs are symmetrically arranged on both sides of the cavity, one end of the nitrogen spring is mounted on the cavity, and the other end is mounted on a mounting seat outside the upper cover, one end of the support rod is mounted on the cavity, and the other end is provided with a limiting slide; in a flip cover state, the support rod is connected to a second fixing bolt on the side of the upper cover through a limiting slide, and the support rod and the nitrogen spring are parallel to each other; in a closed cover state, the upper cover and the cavity are locked by a third fixing bolt, and the support rod and the nitrogen spring are located in the same straight line. The present invention is convenient in power assistance, can prevent the upper cover from falling, and reduce safety accidents.

Description

Technical Field

[0001] The invention relates to a power-assisted cover-turning mechanism, in particular to a power-assisted cover-turning mechanism for vacuum coating equipment. Background Art

[0002] At present, the production equipment of the semiconductor and photovoltaic industries has increased. In pursuit of pure, ultra-thin compound films, vacuum coating equipment has become a hot spot for research and development. From university laboratories to enterprise production lines, a large number of vacuum coating equipment have become indispensable and important equipment for the research and development of more efficient semiconductor and photovoltaic devices. The vacuum coating equipment is composed of modules such as the transition chamber, process chamber, carrier, carrier transmission mechanism in the chamber, target crucible, vacuum pipeline, process gas path, etc., and is produced through the synergy between various modules. Since the molecules produced by the thermal evaporation of the target material will inevitably adhere to the cavity during the coating process, the vacuum coating equipment needs to clean the chamber regularly. At present, the main cavity design of the vacuum coating equipment is that the chamber and the upper cover are separated and sealed by a sealing ring, so that the cover can be opened for chamber cleaning and target and carrier installation.

[0003] Existing vacuum coating equipment usually adopts a manual flip cover method, that is, manually opening the cover to achieve maintenance and inspection of the vacuum chamber. This method is labor-intensive, inefficient, and prone to safety accidents. At the same time, the manual opening method also has safety hazards. If the upper cover suddenly falls, it may cause harm to the operator. Although the rigid support component can support the upper cover, when closing the cover, the rigid support component needs to be separated from the upper cover, and subsequent closing of the cover still requires manual support, which greatly increases the danger of opening the cover. In addition, during the opening process of the existing vacuum coating equipment, the stability and reliability of the upper cover cannot be guaranteed, and it is easy to shake or displace, affecting the vacuum degree of the equipment and the quality of the film. Therefore, there is a large room for improvement in the flip cover of the existing vacuum coating equipment. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a power-assisted flip cover mechanism for vacuum coating equipment, which can greatly reduce the labor intensity of operators, prevent the upper cover from falling, protect the equipment, improve work efficiency, and also reduce the occurrence of safety accidents.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problems is to provide a power-assisted flip-up mechanism of a vacuum coating equipment, including an upper cover, wherein the upper cover is installed on the cavity of the vacuum coating equipment, a fixing seat is provided on the upper cover, and a supporting seat is provided on the cavity, the fixing seat and the supporting seat are connected by a rotating shaft, so that the upper cover can be flipped around the cavity; support rods and nitrogen springs are symmetrically provided on both sides of the cavity, one end of the nitrogen spring is installed on the cavity, and the other end is installed on the mounting seat outside the upper cover, one end of the support rod is installed on the cavity, and the other end is provided with a limiting slide groove; in the flip-up state, the support rod is connected to the second fixing bolt on the side of the upper cover through the limiting slide groove, and the support rod and the nitrogen spring are parallel to each other; in the closed state, the upper cover and the cavity are locked by a third fixing bolt, and the support rod and the nitrogen spring are located in the same straight line.

[0006] Furthermore, the cooperation between the rotating shaft, the fixing pin, the fixing seat and the supporting seat is a clearance cooperation; a sealing ring is arranged between the upper cover and the cavity; the cooperation hole between the rotating shaft and the fixing seat is a waist hole, and the reserved single-side clearance is greater than the compression amount of the sealing ring; the cooperation hole between the fixing seat and the fixing pin is a waist hole, which is used to manually adjust the position of the upper cover during the process of opening and closing the cover.

[0007] Furthermore, first fixing bolts are arranged around the fixing seat and waist holes are used as matching holes, and the fixing seat is fixed to the upper cover by the first fixing bolts; two upper cover clamping screws are arranged in the middle of the fixing seat, and the upper cover clamping screws and the fixing seat are threadedly connected, and clamping nuts are arranged between the upper cover clamping screws and the fixing seat, and the upper cover clamping screws and the upper cover are abutted against each other.

[0008] Furthermore, the shaft outer sleeve is provided with a shaft bushing.

[0009] Furthermore, the material of the rotating shaft bushing is a self-lubricating material.

[0010] Furthermore, in the flip cover state, the fixing seat and the supporting seat are locked by a fixing pin, and a cotter pin is inserted into the fixing pin.

[0011] Furthermore, in the closed state, the support rod is fixed on the cavity through a support rod rubber seat.

[0012] Furthermore, the support rod rubber seat is made of rubber or polyurethane.

[0013] Furthermore, there are two support seats, which are welded to the cavity, and the welding position is located at the extension of the top of the cavity.

[0014] Furthermore, a handle is provided on a side of the upper cover away from the fixing seat.

[0015] Compared with the prior art, the present invention has the following beneficial effects: 1. Reduce labor intensity: The present invention adopts a nitrogen spring to assist the flipping and closing of the cover. Through the elastic force of the nitrogen spring, it can provide assistance when flipping the cover and provide support when closing the cover, which greatly reduces the labor intensity of manual opening of the cover and improves work efficiency. 2. Improve safety: After the flip cover is flipped to the maximum stroke, the present invention fixes the upper cover through the fixing pin and the support rod on the rotating shaft connecting block to prevent the upper cover from falling, avoiding the safety hazard of the upper cover suddenly falling in the prior art causing harm to the operator. 3. Ensure stability: The present invention realizes the adjustability of the upper cover position through the clearance cooperation between the rotating shaft and the support seat and the fixing seat, avoiding the slight shaking or displacement of the upper cover in the flipping process in the prior art, and ensuring the vacuum degree of the equipment and the quality of the film. 4. Convenient maintenance and overhaul: The flip cover design of the present invention makes the maintenance and overhaul of the vacuum chamber more convenient and quick, improves the maintenance efficiency of the equipment, and prolongs the service life of the equipment. 5. Wide scope of application: The technical solution of the present invention can be widely used in various equipment that requires flipping and closing the cover, and has a wide range of application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a structural schematic diagram of the power-assisted flipping mechanism of the vacuum coating equipment of the present invention in the flipping state;

[0017] Figure 2 It is a structural schematic diagram of the power-assisted flip cover mechanism of the vacuum coating equipment of the present invention in the closed state;

[0018] Figure 3 It is a schematic diagram of the explosion structure of the power-assisted flip mechanism of the vacuum coating equipment of the present invention;

[0019] Figure 4 for Figure 3 The enlarged structural diagram at position I in the middle;

[0020] Figure 5 for Figure 4 Schematic diagram of the use of the clamping screw and the clamping nut of the middle upper cover.

[0021] The markings in the figure are:

[0022] 1-upper cover; 2-fixing seat; 3-first fixing bolt; 4-cotter pin; 5-spindle; 6-support seat; 7-fixing pin; 8-spindle bushing; 9-support rod rubber seat; 10-support rod; 11-second fixing bolt; 12-nitrogen spring; 13-cavity; 14, third fixing bolt; 15-handle; 16-mounting seat; 17-limiting slide groove; 18-upper cover clamping screw; 19-clamping nut; 20-sealing ring. DETAILED DESCRIPTION

[0023] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0024] Figure 1 It is a structural schematic diagram of the power-assisted flipping mechanism of the vacuum coating equipment of the present invention in the flipping state; Figure 2 It is a structural schematic diagram of the power-assisted flip cover mechanism of the vacuum coating equipment of the present invention in the closed state; Figure 3 It is a schematic diagram of the explosion structure of the power-assisted flip mechanism of the vacuum coating equipment of the present invention.

[0025] See also Figure 1 , Figure 2 and Figure 3 The power-assisted flipping mechanism of the vacuum coating equipment provided by the present invention comprises an upper cover 1, wherein the upper cover 1 is mounted on a cavity 13 of the vacuum coating equipment, a fixing seat 2 is arranged on the upper cover 1, a supporting seat 6 is arranged on the cavity 13, the fixing seat 2 and the supporting seat 6 are connected by a rotating shaft 5, so that the upper cover 1 can flip around the cavity 13; support rods 10 and nitrogen springs 12 are symmetrically arranged on both sides of the cavity 13, one end of the nitrogen spring 12 is mounted on the cavity 13, and the other end is mounted on a mounting seat 16 outside the upper cover 1, one end of the support rod 10 is mounted on the cavity 13, and the other end is provided with a limiting slide groove 17; in the flipping state, the support rod 10 is connected to the second fixing bolt 11 on the side of the upper cover 1 through the limiting slide groove 17, and the support rod 10 and the nitrogen spring 12 are parallel to each other; in the closed state, the upper cover 1 and the cavity 13 are locked by the third fixing bolt 14, and the support rod 10 and the nitrogen spring 12 are located in the same straight line. This not only makes the structure more compact, but also ensures that the support rod 10 and the nitrogen spring 12 are parallel to each other in the flip state, which is more stable.

[0026] The technical problems solved by the present invention and the technical solutions adopted are as follows:

[0027] (1) The problem of high labor intensity in opening the upper cover: In the process of opening the cover of the existing vacuum coating equipment, it is necessary to manually apply a large force, which is labor-intensive and has low work efficiency. The present invention can greatly reduce the labor intensity of the operator by using the nitrogen spring 12 to assist in flipping and closing the cover, prevent the upper cover 1 from falling, protect the equipment, improve work efficiency, and also reduce the occurrence of safety accidents.

[0028] (2) Safety issues for personnel opening the upper cover: In the process of manually opening and closing the cover of existing vacuum coating equipment, there is a safety hazard that the upper cover 1 may suddenly fall, which may cause harm to the operator and the equipment. The present invention welds a support seat 6 on the cavity 13, connects the fixing seat 2 and the rotating shaft 5 on the upper cover, and introduces a support rod 10 and a fixing pin 7, which provide multiple protections to prevent the upper cover 1 from falling, thereby ensuring the safety and reliability of the upper cover.

[0029] (3) The problem of stability of the upper cover flipping: In the process of opening the cover of the existing vacuum coating equipment, the upper cover 1 is prone to slight shaking or displacement, which affects the vacuum degree of the equipment and the quality of the film. The rotating shaft 5 of the present invention adopts a clearance fit, so that the upper cover 1 can adjust its position to a certain extent to ensure good vacuum performance, thereby ensuring the vacuum degree of the equipment and the quality of the film. Preferably, the fitting of the rotating shaft 5, the fixing pin 7, the fixing seat 2, and the supporting seat 6 are all clearance fits; a sealing ring 20 is provided between the upper cover 1 and the cavity 13; the fitting hole between the rotating shaft 5 and the fixing seat 2 is a waist hole, and the reserved single-side gap is greater than the compression amount of the sealing ring 20; the fitting hole between the fixing seat 2 and the fixing pin 7 is also a waist hole, which is used to manually adjust the position of the upper cover 1 during the process of opening and closing the cover.

[0030] Please continue to see Figure 4 and Figure 5 , further, first fixing bolts 3 are arranged around the fixing seat 2 and waist holes are used as matching holes, and the fixing seat 2 is fixed on the upper cover 1 through the first fixing bolts 3; two upper cover clamping screws 18 are arranged in the middle of the fixing seat 2, and the upper cover clamping screws 18 and the fixing seat 2 are threadedly connected, and a clamping nut 19 is arranged between the upper cover clamping screws 18 and the fixing seat 2, and the upper cover clamping screws 18 and the upper cover 1 are in contact. That is, the function of the four first fixing bolts 3 around the upper cover 1 and the fixing seat 2 is to fix the upper cover 1 and the fixing seat 2, and these four first fixing bolts 3 have corresponding threaded holes on the upper cover 1, and the upper cover 1 positions corresponding to the two middle upper cover clamping screws 18 have no threaded holes, and directly press against the upper cover 1, and the function is that when the upper cover position needs to be adjusted when closing the cover, the four first fixing bolts 3 around the upper cover are used to adjust the preload force, and the two middle upper cover clamping screws 18 and the clamping nut 19 are used to tighten and clamp the upper cover 1.

[0031] In the power-assisted flip mechanism of the vacuum coating equipment provided by the present invention, the rotating shaft 5 is provided with a rotating shaft bushing 8 on its outer sleeve, and the material of the rotating shaft bushing 8 is preferably a self-lubricating material, such as brass.

[0032] The power-assisted flip cover mechanism of the vacuum coating equipment provided by the present invention, in the flip cover state, the fixing seat 2 and the support seat 6 are locked by the fixing pin 7, and the split pin 4 is inserted into the fixing pin 7. In the closed cover state, the support rod 10 is fixed to the cavity 13 by the support rod rubber seat 9; the material of the support rod rubber seat 9 is elastic material such as rubber and polyurethane.

[0033] The power-assisted flip cover mechanism of the vacuum coating device provided by the present invention has two support seats 6 welded to the cavity 13 at the outer extension of the cavity top. A handle 15 is provided on the side of the upper cover 1 away from the fixing seat 2 .

[0034] The power-assisted flip mechanism of the vacuum coating equipment provided by the present invention is installed and used as follows:

[0035] Step 1: Introduce nitrogen spring 12 to assist. In the flip cover mechanism of the vacuum coating equipment, a nitrogen assist spring device is introduced. The effective working pressure of the nitrogen spring 12 is 600N or above. The nitrogen spring 12 is installed on both sides of the upper cover 1, and the support seat 6 is installed on the corresponding cavity flange.

[0036] Step 2: Welding the support seat 6. Weld the support seat outside the cavity 13 of the vacuum coating equipment. The welding position of the support seat 6 is located at the top extension of the cavity, and the number of welding is two to ensure the stability and reliability of the upper cover 1.

[0037] Step 3: Connect the fixing seat 2 and the rotating shaft 5. The fixing seat 2 and the supporting seat 6 connected to the upper cover are fixed in advance with the first fixing bolt 3, and the split pin 4 is used to prevent the rotating shaft 5 from slipping out. The matching of the rotating shaft 5 with the fixing seat 2 and the supporting seat 6 is a clearance match, which is convenient for adjusting the position after the upper cover 1 is closed. Figure 4 shown.

[0038] Step 4: Flip and fix the upper cover. When the upper cover 1 is flipped manually, the nitrogen spring 12 is under pressure and has a large elastic force, which helps the upper cover 1 to flip. When the upper cover is flipped to the maximum stroke, the elastic force of the nitrogen spring 12 is automatically weakened, but since the upper cover 1 is gradually lifted, the angle of gravity decreases, and the manpower required is correspondingly reduced. Therefore, the manpower required for the entire flipping process is greatly reduced. When the upper cover is flipped to the maximum stroke, the upper cover is fixed by the fixing pin 7 and the support rod 10 on the shaft connecting block. The cotter pin 4 is inserted into the fixing pin 7 to prevent the fixing pin 7 from slipping out, and the support rod 10 fixes the upper cover 1 through the second fixing bolt 11.

[0039] Step 5: Close the upper cover and adjust the position of the upper cover. Unscrew the second fixing bolt 11, pull out the cotter pin 4, remove the fixing pin 7 and the support rod 10, and drive the upper cover 1 to close by manpower. During the process, the nitrogen spring 12 is compressed, the elastic force gradually increases, and the supporting force on the upper cover 1 gradually increases, so the manpower required to support the upper cover 1 is greatly reduced, so that the upper cover 1 can be closed slowly, and due to the loose connection of the rotating shaft 5 and the supporting force of the nitrogen spring 12, the upper cover 1 can be easily adjusted by adjusting the tightness of the first fixing bolt 3 and the clamping nut 16. The two clamping nuts 19 in the middle can clamp the upper cover 1 to ensure that the upper cover 1 is closed horizontally, thereby ensuring the vacuum degree of the cavity, and because the sealing surface of the entire closing operation is suspended and does not contact other mechanical parts, the preload force of the first fixing bolt 3 is adjusted above the upper cover 1 and does not contact the sealing surface below. After closing the cover, there is a sealing ring as a buffer to protect the sealing surface from being scratched. After the upper cover 1 is adjusted, the upper cover 1 and the cavity 12 are fastened by the third fixing bolts 14 to prevent the upper cover 1 from being accidentally opened, thereby meeting the process vacuum requirement.

[0040] Through the above steps, the present invention realizes assisted flipping and closing of the cover, greatly reduces the labor intensity of manual flipping, improves work efficiency, and effectively prevents the risk of sudden falling of the upper cover, improves the safety of operation, ensures the stability and reliability of the upper cover, and ensures the vacuum degree of the equipment operation and the quality of the film.

[0041] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art may make some modifications and improvements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be based on the definition of the claims.

Claims

1. A power-assisted flip cover mechanism for a vacuum coating device, comprising an upper cover (1), characterized in that: The upper cover (1) is mounted on a cavity (13) of a vacuum coating device; a fixing seat (2) is provided on the upper cover (1); a supporting seat (6) is provided on the cavity (13); the fixing seat (2) and the supporting seat (6) are connected via a rotating shaft (5) so that the upper cover (1) can be turned around the cavity (13); support rods (10) and nitrogen springs (12) are symmetrically provided on both sides of the cavity (13); one end of the nitrogen spring (12) is mounted on the cavity (13), and the other end is mounted on the outside of the upper cover (1). The support rod (10) is mounted on a mounting seat (16), one end of the support rod (10) is mounted on the cavity (13), and the other end is provided with a limiting slide groove (17); in a flip-cover state, the support rod (10) is connected to a second fixing bolt (11) on the side of the upper cover (1) via the limiting slide groove (17), and the support rod (10) and the nitrogen spring (12) are parallel to each other; in a closed cover state, the upper cover (1) and the cavity (13) are locked via a third fixing bolt (14), and the support rod (10) and the nitrogen spring (12) are located in the same straight line; The matching of the rotating shaft (5), the fixing pin (7) with the fixing seat (2) and the supporting seat (6) is a clearance match; a sealing ring (20) is provided between the upper cover (1) and the cavity (13); the matching hole between the rotating shaft (5) and the fixing seat (2) is a waist hole, and the reserved single-side gap is larger than the compression amount of the sealing ring (20); the matching hole between the fixing seat (2) and the fixing pin (7) is a waist hole, which is used to manually adjust the position of the upper cover (1) during the process of opening and closing the cover; First fixing bolts (3) are arranged around the fixing seat (2) and waist holes are used as matching holes. The fixing seat (2) is fixed to the upper cover (1) by the first fixing bolts (3). Two upper cover clamping screws (18) are arranged in the middle of the fixing seat (2). The upper cover clamping screws (18) and the fixing seat (2) are threadedly connected, and a clamping nut (19) is arranged between the upper cover clamping screws (18) and the fixing seat (2). The upper cover clamping screws (18) and the upper cover (1) are in contact with each other.

2. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 1, characterized in that: The outer cover of the rotating shaft (5) is provided with a rotating shaft bushing (8).

3. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 2, characterized in that: The material of the rotating shaft bushing (8) is a self-lubricating material.

4. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 1, characterized in that: In the flip cover state, the fixing seat (2) and the supporting seat (6) are locked by means of a fixing pin (7), and a split pin (4) is inserted into the fixing pin (7).

5. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 1, characterized in that: In the closed state, the support rod (10) is fixed on the cavity (13) via the support rod rubber seat (9).

6. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 5, characterized in that: The support rod rubber seat (9) is made of rubber or polyurethane.

7. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 1, characterized in that: The number of the support seats (6) is two, which are welded to the cavity (13), and the welding position is located at the extension of the top of the cavity.

8. The power-assisted flip cover mechanism of the vacuum coating equipment according to claim 1, characterized in that: A handle (15) is provided on a side of the upper cover (1) away from the fixing seat (2).

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