Plasma-assisted fine abrasive particle jet polishing processing and manufacturing device and plasma-assisted fine abrasive particle jet polishing processing and manufacturing method

Abstract

A plasma-assisted fine abrasive particle jet polishing machining and manufacturing device comprises a plasma generating system, a fine abrasive particle jet system and an auxiliary machining system, a loading disc of the auxiliary machining system is installed on one side of a workpiece converter, a rotating shaft is arranged at the axis position of the loading disc, and the rotating shaft is in transition fit with a rotator; the rotating speed control box controls the rotating speed of the rotating shaft; the tool converter is installed at the upper end of the connecting frame, the left end and the right end of the connecting frame are connected with the air suction pump through guide pipes respectively, and the bottoms of the guide pipes are communicated with the collecting chamber. The plasma generation system and the fine abrasive particle injection system are both located above the tool converter, the fine abrasive particle injection system is installed on the loading disc, and the plasma generation system is installed on the other side of the workpiece converter. The invention further provides a plasma-assisted fine abrasive particle jet polishing machining and manufacturing method. According to the invention, chips are easy to remove, the finishing surface shape precision is higher, and the processing controllability is high.

Description

Technical Field

[0001] The invention belongs to the field of atomic and near-atomic scale ultra-precision polishing, and specifically relates to a plasma-assisted micro-abrasive jet polishing manufacturing device and method. Background Art

[0002] Due to spatial structural limitations or thrust-to-weight ratio requirements, blind holes are widely used in integrated circuits, hydraulics, automobiles and other fields, such as positioning pin holes (blind holes) for dynamic balancing in rotating objects, and used as piston cylinders in hydraulic systems and internal combustion engines. However, the finishing of the inner surface of the blind hole is difficult, especially the processing of the bottom edges, and there is little research on blind holes by researchers at home and abroad, making the subsequent precision processing of the inside of the blind hole a major processing problem in China. Most domestic methods use chemical polishing to finish the inner surface of the pipe, however, chemical processing fluids can easily pollute the environment. Ultra-precision grinding and polishing is a near / non-destructive processing and manufacturing technology that removes surface burrs, damage layers and other defects without changing the physical properties of the workpiece material, thereby improving the surface accuracy and integrity of the workpiece. It is often used in the high-performance manufacturing of difficult-to-process material components or plastic material parts such as semiconductors, optical components, and functional ceramics.

[0003] Plasma-assisted polishing is a surface treatment technology in which plasma interacts with the material surface to improve the finish and quality of the material surface through chemical reactions and physical effects. The process is usually carried out under vacuum or atmosphere control, using a radio frequency plasma source to generate plasma. The charged particles in the plasma react chemically with the material surface to remove surface defects, oxides, organic contaminants or micro-roughness, etc., thereby achieving nano-scale flattening and microstructural regulation of the surface. Plasma-assisted polishing is different from traditional mechanical polishing methods. Traditional mechanical polishing mainly relies on mechanical force and abrasives to remove defects and roughness on the material surface, while plasma-assisted polishing uses the interaction between plasma and the material surface to achieve surface quality improvement.

[0004] In order to meet the polishing needs of different types of hard and brittle difficult-to-process materials, ultra-precision machining through abrasive jetting has emerged. Micro-abrasive jetting is a method that can effectively solve the problem of machining hard and brittle materials. Its working principle is that through the mixture of micro-abrasives and high-pressure gas, after being processed by a specially designed nozzle, the micro-abrasives are accelerated and shot toward the workpiece material, and the scouring and polishing effects of the abrasives are used to achieve material removal.

[0005] The invention patent (CN116061014A) has been published. The present invention discloses a precision polishing device and polishing method for a special-shaped blind cavity workpiece, comprising: a core, including a mounting section and a matching section, the outer wall shape of the matching section matches the shape of the inner cavity of the workpiece and is arranged in a preset ratio, extending into the inner cavity and having a gap with the inner cavity surface; a guide hole is provided in the core for the polishing medium to pass through and fill the gap between the matching section and the inner cavity; a recovery hole is provided in the matching section for the polishing medium to pass through and then export the polishing medium; a box; a fixing system for fixing the core and the workpiece; an ultrasonic generating system for providing ultrasonic vibration according to a set frequency. Based on this polishing device, the special-shaped blind cavity workpiece can be applied to abrasive flow polishing and ultrasonic polishing at the same time, which solves the problem that the abrasive or polishing liquid cannot pass through the blind hole directly, and avoids the use of a five-axis machine tool to install a grinding head to set a travel route for polishing, greatly reducing labor costs and processing costs, and effectively improving processing efficiency. However, this patent does not involve mechanisms such as plasma-assisted polishing, which can further improve the quality of ultra-precision polishing of atomic near-atomic scale of workpieces.

[0006] The invention patent (CN115488699A) has been published, a method and device for plasma polishing a workpiece, the method for plasma polishing a workpiece includes the following steps: placing the workpiece to be polished on a workpiece rack in a polishing vacuum chamber, and evacuating the polishing vacuum chamber; introducing an inert gas into the vacuum chamber until the air pressure in the vacuum chamber reaches a set value; performing plasma heating on the workpiece to be polished; after completing the plasma heating, introducing a fluorine-containing gas into the vacuum chamber until the air pressure in the vacuum chamber reaches a set value; turning on the ion source, energizing the grid, and immersing the workpiece to be polished in the plasma for polishing; turning off the ion source, and simultaneously disconnecting the grid from the power supply, and thus completing the polishing of the workpiece; through the effective coordination of the ion source, high-frequency electric field, electromagnetic field and grid, effective control of the plasma is achieved, and immersion polishing is achieved; the present invention can achieve plasma conformal polishing of the workpiece, and realize polishing of complex-shaped surfaces and flat surfaces. However, this patent does not involve fine abrasive jet polishing, and there is still room for improvement in the efficient polishing of workpieces.

[0007] A Chinese invention patent (CN110303383A) has been published, a magnetorheological assisted atmospheric plasma polishing method for silicon-based components. This method solves the problem that residues are generated on the surface during existing atmospheric plasma processing, causing the surface quality of optical components to be seriously reduced. First, atmospheric plasma is used to process silicon-based components with He as carrier gas, CF4 as reaction gas, and O2 as auxiliary gas. After residues are generated, magnetorheology is used to polish the component surface. The residues generated are quickly removed by the flexible abrasive in the magnetic fluid, achieving high-efficiency polishing of silicon-based optical components. Summary of the invention

[0008] In order to overcome the shortcomings of the existing technology and to solve the problems of high-quality material removal, low polishing accuracy of the inner hole wall of the workpiece, and difficult removal of chips from blind hole processing, the present invention provides a plasma-assisted micro-abrasive jet polishing processing and manufacturing device and method with easy chip removal, high finishing surface accuracy, and high processing controllability. The device and method can not only greatly improve the polishing efficiency, but also achieve atomic and near-atomic scale polishing accuracy.

[0009] The technical solution adopted by the present invention to solve its technical problem is:

[0010] A plasma-assisted fine abrasive jet polishing manufacturing device, the device comprises a plasma generating system, a fine abrasive jet system and an auxiliary processing system, the auxiliary processing system comprises a speed control box, a rotator, a rotating shaft, a tool converter, a loading plate, a connecting frame, an air suction pump and a collecting chamber, the loading plate is installed on one side of the workpiece converter, the axis of the loading plate is provided with a rotating shaft, the rotating shaft and the rotator are transitionally matched, and the speed control box controls the rotating shaft speed through a wire; the tool converter is installed on the upper end of the connecting frame, the left and right ends of the connecting frame are respectively connected to the air suction pump through a conduit, the bottom of the conduit leads to the collecting chamber, the lower end of the connecting frame is installed at the upper end of the inner hole of the workpiece, and forms a closed space required for processing with the inner hole of the workpiece; the plasma generating system and the fine abrasive jet system are both located above the tool converter, the fine abrasive jet system is installed on the loading plate, and the plasma generating system is installed on the other side of the workpiece converter.

[0011] Furthermore, a rotating shaft and a guide rail are installed on the loading plate, and the rotating shaft is connected to the rotator to provide the required power for the micro-abrasive jet processing; the micro-abrasive jet system is connected to the guide rail of the loading plate, and the guide rail is distributed along the radius of the loading plate and is used to adjust the processing radius to adapt to the inner holes of workpieces of different sizes.

[0012] Preferably, the surface of the workpiece in the processing area is covered with a protective film, which protects the surface of the workpiece and prevents the surface of the workpiece from being oxidized by plasma and worn by fine abrasive particles.

[0013] The plasma generating system comprises a gas supply module, a radiation power module and a plasma excitation module, wherein the gas supplied by the gas supply module comprises cooling gas, reaction gas and inert gas, the plasma excitation module comprises a plasma torch, an impedance matcher, an induction coil and an electric spark generator, the right side of the gas supply box of the gas supply module is respectively connected with the cooling gas, reaction gas and inert gas through a conduit, wherein the inert gas and the reaction gas flow out from the inner pipe of the plasma torch through the conduit after being mixed in the supply box, and the cooling gas flows out from the outer pipe of the plasma torch alone; the plasma torch is arranged above the tool converter and is installed in cooperation with the left side of the tool converter, the induction coil surrounds the bottom of the plasma torch, the positive pole of the radio frequency power supply of the radiation power module is connected to one end of the induction coil through the impedance matcher, the negative pole of the radio frequency power supply and the other end of the induction coil are both grounded, and the spark generator is located in the inner pipe of the plasma torch.

[0014] The micro-abrasive injection system includes an abrasive supply module and a nozzle module, wherein the abrasive supply module includes an air compressor, an abrasive storage chamber and a conduit, and the nozzle module includes a nozzle body, a connecting cap and a nozzle; the upper left end of the abrasive storage chamber is connected to the air compressor, and the lower right end of the abrasive storage chamber is connected to the nozzle module through the conduit, one end of the connecting cap of the nozzle module cooperates with the nozzle body, and the other end of the connecting cap cooperates with the nozzle, the nozzle body is connected to the conduit, and the connecting cap is connected to the guide rail of the loading plate.

[0015] Furthermore, the abrasive supply module also includes a flow control valve, and the flow control valve is arranged inside the abrasive storage chamber; the abrasive supply module adopts a flow-limiting feeding method. During the micro-abrasive jetting process, the flow control valve is opened, and the micro-abrasive can be accelerated to be ejected under the auxiliary action of the high-speed airflow.

[0016] Furthermore, the nozzle of the nozzle module adopts a conical nozzle. The cone mainly has the function of guiding flow and accelerating particles. Since it is in a compressed state, the abrasive is easier to be sucked in. Moreover, due to the gathering effect of the straight section, the ejected particle beam is more concentrated, which is conducive to efficient material removal.

[0017] The cooling gas is helium or argon; the reaction gas is oxygen or water vapor; and the inert gas is helium or argon.

[0018] The fine abrasive particles include one of nano diamond, boron carbide, silicon carbide, silicon nitride, silicon oxide, gallium oxide, aluminum oxide, or a mixture of at least two or more thereof.

[0019] The free radicals in the plasma have strong oxidizing properties and chemically react with the atoms on the surface of the inner hole of the workpiece to form a modified layer with lower hardness.

[0020] A plasma-assisted fine abrasive jet polishing manufacturing method, using plasma-assisted oxidation of a workpiece material to form a soft modified layer, and then removing the modified layer by fine abrasive jetting, the method comprising the following steps:

[0021] (1) Fix the connecting frame on the workpiece, ensure that the center hole of the connecting frame is coaxial with the blind hole of the workpiece, and cover the surface of the workpiece with a protective film in the processing area;

[0022] (2) Turn on the suction pump to put the inner chamber of the connecting frame into a vacuum state, and then turn off the suction pump;

[0023] (3) controlling the tool converter to adjust to the plasma generating system;

[0024] (4) starting the gas supply box to allow the reaction gas and the inert gas to flow into the inner cavity of the plasma torch tube, and the cooling gas to flow into the outer cavity of the plasma torch tube;

[0025] (5) starting the radio frequency power supply and the spark generator, igniting and ionizing the inert gas through the spark igniter, and the high-frequency current generated by the radio frequency power supply flows into the coil to generate a high-frequency induction magnetic field, and the reaction gas is excited to generate plasma;

[0026] (6) Control the tool converter to adjust to the fine abrasive jet system;

[0027] (7) Adjust the nozzle module so that its injection point is aligned with the inner hole wall of the workpiece;

[0028] (8) The air compressor, the flow control valve and the speed control box are started simultaneously, and the nozzle module performs circumferential shear impact micro-removal on the denatured layer of the inner hole wall of the workpiece;

[0029] (9) Close the flow control valve and turn on the suction pump, use the high-speed airflow to blow the abrasive particles and chips in the inner hole of the workpiece into the two sides of the inner chamber of the connecting frame, and then recover them to the collection chamber through the suction pump;

[0030] (10) Repeat step (2) to step (9) 2-3 times, and adjust the repetition cycle of the above steps according to the actual workpiece processing parameter index requirements;

[0031] (11) Turn off all switches, disassemble the connecting frame, and complete the processing.

[0032] Furthermore, in the step (1), the protective film protects the surface of the workpiece, preventing the surface of the workpiece from being oxidized by plasma and worn by fine abrasive particles.

[0033] The beneficial effects of the present invention are mainly manifested in:

[0034] 1) Easy chip removal. Chips are generated during the polishing process, and the surface processing accuracy is affected by continuous accumulation. The present invention adopts micro-abrasive jet technology to remove the chips. During the processing, high-speed airflow is used to blow the chips in the hole to the inner chamber of the connecting frame, and then the chips in the inner chamber of the connecting frame are sucked into the collection chamber by an air suction pump. The chips can be effectively removed in time, so that the surface of the workpiece is kept clean, thereby ensuring the polishing process.

[0035] 2) High finishing surface accuracy. The present invention adopts plasma-assisted polishing technology, using the strong oxidizing property of free radicals in plasma to chemically react with atoms on the surface of the inner hole of the workpiece to form a denatured layer with low hardness, and then uses micro-abrasive jet technology to vertically spray and remove materials, which can greatly improve the surface accuracy.

[0036] 3) High controllability of processing. Micro-abrasive processing is a process in which sharp abrasives erode materials, and there are many effective cutting edges. The amount of material removed can be controlled according to gas pressure and abrasive size, etc. It has a high processing efficiency for local processing of materials, and the removal rate of soft and tough materials is very low.

[0037] 4) Wide processing range. The rotating shaft and guide rail are installed on the loading plate, and the rotating shaft is connected to the rotator to provide the required power for the micro-abrasive jet processing. The guide rail is distributed along the radius of the loading plate, and the nozzle module is installed on the guide rail to adjust its processing radius to adapt to the inner holes of workpieces of different sizes.

[0038] 5) The present invention has relatively low requirements on processing equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Schematic diagram of the plasma-assisted micro-abrasive jet polishing manufacturing device.

[0040] Figure 2 Schematic diagram of the processing principle of plasma-assisted micro-abrasive jet polishing manufacturing device.

[0041] Figure 3 Schematic diagram of microscopic material removal in plasma-assisted micro-abrasive jet polishing manufacturing equipment.

[0042] Figure 4 Schematic diagram of the nozzle module of the plasma-assisted micro-abrasive jet polishing manufacturing device.

[0043] Figure 5 Schematic diagram of the loading plate of the plasma-assisted micro-abrasive jet polishing manufacturing device.

[0044] Figure 6 This is a schematic diagram of the auxiliary loading plate rotation of the plasma-assisted micro-abrasive jet polishing manufacturing device.

[0045] Among them, 1. gas supply box; 2. plasma torch tube; 3. electric spark generator; 4. radio frequency power supply; 5. impedance matching device; 6. induction coil; 7. air compressor; 8. abrasive storage chamber; 9. flow control valve; 10. conduit; 11. nozzle body; 12. connecting cap; 13. nozzle; 14. tool converter; 15. loading plate; 16. rotating shaft; 17. rotator; 18. speed control box; 19. guide rail; 20. connecting frame; 21. suction pump; 22. collection chamber; 23. workpiece; 101. high-speed airflow; 102. nozzle module; 201. inner wall of workpiece hole; 202. denatured layer; 203. plasma oxidation; 204. fine abrasive jet removal; 301. fine abrasive; 302. shear impact; 303. debris; 401. cooling gas; 402. reaction gas; 403. inert gas. DETAILED DESCRIPTION

[0046] The present invention will be further described below in conjunction with the accompanying drawings.

[0047] Reference Figure 1 to Figure 6 A plasma-assisted fine abrasive jet polishing manufacturing device comprises a plasma generating system, a fine abrasive jetting system and an auxiliary processing system, wherein the plasma generating system comprises a gas supply module, a radiation power module and a plasma excitation module, wherein the gas supplied by the gas supply module comprises a cooling gas 401, a reaction gas 402 and an inert gas 403, the plasma excitation module comprises a plasma torch 2, an impedance matching device 5, an induction coil 6 and an electric spark generator 3, the right side of the gas supply box 1 of the gas supply module is connected to the cooling gas 401, the reaction gas 402 and the inert gas 403 through a conduit 10 respectively. 403 is connected, wherein the inert gas 403 and the reaction gas 402 are mixed in the supply box and flow out from the internal pipeline of the plasma torch tube 2 through the conduit 10, and the cooling gas 401 flows out from the external pipeline of the plasma torch tube 2 alone; the plasma torch tube 2 is arranged above the tool converter 14 and is installed in cooperation with the left side of the tool converter 14, the induction coil 6 surrounds the bottom of the plasma torch tube 2, the positive electrode of the radio frequency power supply 4 of the radiation power module is connected to one end of the induction coil 6 through an impedance matcher, the negative electrode of the radio frequency power supply 4 and the other end of the induction coil 6 are grounded, and the spark generator 3 is located in the internal pipeline of the plasma torch tube 2;

[0048] Optionally, the plasma torch 2 is a key component of the plasma pretreatment equipment, which adopts a coaxial design and is composed of an inner and outer pipe made of glass. During operation, the inner pipe is injected with an inert gas 403 and a reaction gas 402, which are all for exciting and maintaining the active particles required for oxidation treatment; after the inert gas 403 in the plasma torch 2 is ignited, a stable plasma environment is quickly formed. A large amount of cooling gas 401 is injected into the outer pipe, thereby taking away the heat energy transferred by the plasma core, which helps to reduce the operating temperature of the torch and prevent the glass tube from bursting or melting due to excessive temperature. With the excitation of the electric spark, the inert gas 403 is gradually activated in the torch to form a weak plasma. During operation, the electric spark ignition device is first used to ignite and ionize the inert gas 403; the 13.56MHz radio frequency power supply 4 is combined with the iron coil surrounding the torch to form a high-frequency electromagnetic field inside the torch. Driven by the electric field, the ionized gas collides strongly with the unionized gas in rapid motion, which causes the gas to continue to ionize, so that the reaction gas 402 is excited or dissociated to form active groups with strong oxidizing ability for surface oxidation treatment.

[0049] The micro-abrasive particle injection system includes an abrasive particle supply module and a nozzle module 102, wherein the abrasive particle supply module includes an air compressor 7, an abrasive particle storage chamber 8, a flow control valve 9 and a conduit 10, and the nozzle module 102 includes a nozzle body 11, a connecting cap 12 and a nozzle 13; the upper left end of the abrasive particle storage chamber 8 is connected to the air compressor 7, the lower right end of the abrasive particle storage chamber 8 is connected to the nozzle module through the conduit 10, and the flow control valve 9 is arranged inside the abrasive particle storage chamber 8; one end of the connecting cap 12 of the nozzle module 102 cooperates with the nozzle body 11, and the other end of the connecting cap 12 cooperates with the nozzle 13, the nozzle body 11 is connected to the conduit 10, and the connecting cap 12 is connected to the guide rail 19 of the loading plate 15;

[0050] Optionally, the abrasive supply module adopts a flow-limiting feeding method. During the micro-abrasive jetting process, the flow control valve 9 is opened, and the micro-abrasive particles can be ejected faster with the assistance of the high-speed airflow.

[0051] Optionally, the nozzle 13 of the nozzle module 102 adopts a conical nozzle. The cone shape mainly has the function of guiding flow and accelerating particles. Since it is in a compressed shape, the abrasive is easier to be sucked in, and due to the gathering effect of the straight section, the ejected particle beam is more concentrated, which is conducive to efficient material removal.

[0052] The auxiliary processing system includes a speed control box 18, a rotator 17, a rotating shaft 16, a tool converter 14, a loading plate 15, a connecting frame 20, an air suction pump 21 and a collection chamber 22. The loading plate 15 is installed on the left side of the workpiece converter 14. The loading plate 15 is provided with a rotating shaft 16 at the axis center. The rotating shaft 16 and the rotator 17 are transitionally matched. The speed control box 18 controls the speed of the rotating shaft 16 through a wire; the tool converter 14 is installed on the upper end of the connecting frame 20, and the left and right ends of the connecting frame 20 are respectively connected to the air suction pump 21 through a conduit, and the bottom of the conduit leads to the collection chamber 22. The lower end of the connecting frame 20 is installed at the upper end of the inner hole of the workpiece 23, forming a closed space required for processing with the inner hole of the workpiece 23.

[0053] Optionally, a rotating shaft 16 and a guide rail 19 are installed on the loading plate 15, and the rotating shaft 16 is connected to the rotator 17 to provide the required power for the fine abrasive jet processing. The guide rail 19 is distributed along the radius of the loading plate 15, and a nozzle module is installed on the guide rail 19 to adjust its processing radius so as to adapt to the inner holes of the workpiece 23 of different sizes.

[0054] Optionally, the surface of the workpiece in the processing area is covered with a protective film, which protects the surface of the workpiece and prevents the surface of the workpiece from being oxidized by plasma and worn by fine abrasive particles.

[0055] The free radicals in the plasma have strong oxidizing properties and chemically react with the atoms on the surface of the inner hole of the workpiece to form a modified layer with lower hardness.

[0056] A plasma-assisted micro-abrasive jet polishing manufacturing method utilizes plasma-assisted oxidation of a workpiece material to form a soft modified layer, and then removes the modified layer by micro-abrasive jetting. This method can not only greatly improve the polishing efficiency, but also achieve atomic and near-atomic scale polishing accuracy.

[0057] The polishing method comprises the following steps:

[0058] (1) The connecting frame 20 is fixed on the workpiece, and the central hole of the connecting frame 20 must be coaxial with the blind hole of the workpiece 23, and the surface of the workpiece in the processing area is covered with a protective film.

[0059] (2) Turn on the suction pump 21 to put the inner chamber of the connecting frame 20 into a vacuum state, and then turn off the suction pump 21.

[0060] (3) Control the tool converter 14 to adjust to the plasma generating system.

[0061] (4) Start the gas supply box 1 to allow the reaction gas 402 and the inert gas 403 to flow into the inner cavity of the plasma torch tube 2, and the cooling gas 401 to flow into the outer cavity of the plasma torch tube 2.

[0062] (5) Start the RF power supply 4 and the spark generator 3. The inert gas 403 is ignited and ionized by the spark igniter. The high-frequency current generated by the RF power supply 4 flows into the coil to generate a high-frequency induced magnetic field. The reaction gas 402 is excited to generate plasma.

[0063] (6) Control the tool converter 14 to adjust to the fine abrasive jet system.

[0064] (7) Adjust the nozzle module so that its injection point is aligned with the inner hole wall of the workpiece 23.

[0065] (8) The air compressor 7, the flow control valve 9 and the speed control box 18 are started simultaneously, and the nozzle module performs circumferential shear impact micro-removal on the denatured layer of the inner hole wall of the workpiece 23.

[0066] (9) Close the flow control valve 9 and open the suction pump 21. With the assistance of the high-speed airflow, the abrasive particles and chips in the inner hole of the workpiece 23 are blown into the two sides of the inner chamber of the connecting frame 20, and then recovered to the collection chamber 22 through the suction pump 21.

[0067] (10) Repeat step 2) to step 9) 2-3 times, and adjust the repetition cycle of the above steps according to the actual workpiece processing parameter index requirements.

[0068] (11) Turn off all switches, disassemble the connecting frame 20, and complete the processing.

[0069] Example 1

[0070] The present invention is used for processing a workpiece blind hole 23 (silicon material, optical crystal, glass, functional ceramics, etc., and various difficult-to-process materials) with a size of 30 mm in diameter and 90 mm in length.

[0071] The polishing method includes the following steps:

[0072] (1) The connecting frame 20 is fixed on a blind hole workpiece 23 with a diameter of 3 mm and a length of 90 mm. The center hole of the connecting frame 20 must be coaxial with the blind hole of the workpiece 23, and the surface of the workpiece in the processing area is covered with a protective film.

[0073] (2) Turn on the suction pump 21 to put the inner chamber of the connecting frame 20 into a vacuum state, and then turn off the suction pump 21.

[0074] (3) Control the tool converter 14 to adjust to the plasma generating system.

[0075] (4) Start the gas supply box 1 to allow the reaction gas 402 and the inert gas 403 to flow into the inner cavity of the plasma torch tube 2, and the cooling gas 401 to flow into the outer cavity of the plasma torch tube 2.

[0076] (5) Start the RF power supply 4 and the spark generator 3. The inert gas 403 is ignited and ionized by the spark igniter. The high-frequency current generated by the RF power supply 4 flows into the coil to generate a high-frequency induced magnetic field. The reaction gas 402 is excited to generate plasma.

[0077] (6) Control the tool converter 14 to adjust to the fine abrasive jet system.

[0078] (7) Adjust the nozzle module so that its spray point is aligned with the inner wall of the blind hole 23 of the workpiece.

[0079] (8) The air compressor 7, the flow control valve 9 and the speed control box 18 are started simultaneously, and the nozzle module performs circumferential shear impact micro-removal on the denatured layer on the inner wall of the blind hole of the workpiece 23.

[0080] (9) Close the flow control valve 9 and open the suction pump 21, and use the high-speed airflow to blow the abrasive particles and chips in the blind hole of the workpiece 23 into both sides of the inner chamber of the connecting frame 20, and then recover them to the collection chamber 22 through the suction pump 21.

[0081] (10) Repeat step 2) to step 9) 2-3 times, and adjust the repetition cycle of the above steps according to the actual workpiece processing parameter index requirements.

[0082] (11) Turn off all switches, disassemble the connecting frame 20, and complete the processing.

[0083] Example 2

[0084] The present invention is used for processing a workpiece through hole 23 (silicon material, optical crystal, glass, functional ceramics, etc., and various difficult-to-process materials) with a size of 30 mm in diameter and 90 mm in length.

[0085] The polishing method includes the following steps:

[0086] (1) Install a seal on the bottom surface of a through-hole workpiece 23 with a diameter of 3 mm and a length of 90 mm. (2) Fix the connecting frame 20 on the through-hole workpiece 23, ensuring that the center hole of the connecting frame 20 is coaxial with the through-hole 23 of the workpiece, and cover the surface of the workpiece with a protective film in the processing area.

[0087] (3) Turn on the suction pump 21 to put the inner chamber of the connecting frame 20 into a vacuum state, and then turn off the suction pump 21.

[0088] (4) Control the tool converter 14 to adjust to the plasma generating system.

[0089] (5) Start the gas supply box 1 to allow the reaction gas 402 and the inert gas 403 to flow into the inner cavity of the plasma torch tube 2, and the cooling gas 401 to flow into the outer cavity of the plasma torch tube 2.

[0090] (6) Start the RF power supply 4 and the spark generator 3. The inert gas 403 is ignited and ionized by the spark igniter. The high-frequency current generated by the RF power supply 4 flows into the coil to generate a high-frequency induced magnetic field. The reaction gas 402 is excited to generate plasma.

[0091] (7) Control the tool converter 14 to adjust to the fine abrasive jet system.

[0092] (8) Adjust the nozzle module so that its spray point is aligned with the inner wall of the through hole 23 of the workpiece.

[0093] (9) The air compressor 7, the flow control valve 9 and the speed control box 18 are started simultaneously, and the nozzle module performs circumferential shear impact micro-removal on the denatured layer on the inner wall of the through hole of the workpiece 23.

[0094] (10) Close the flow control valve 9 and open the suction pump 21, and use the high-speed airflow to blow the abrasive particles and chips in the through hole of the workpiece 23 into the two sides of the inner chamber of the connecting frame 20, and then recover them to the collection chamber 22 through the suction pump 21.

[0095] (11) Repeat step 3) to step 10) 2-3 times, and adjust the repetition cycle of the above steps according to the actual workpiece processing parameter index requirements.

[0096] (12) Turn off all switches, disassemble the connecting frame 20, and complete the processing.

[0097] The contents described in the embodiments of this specification are merely an enumeration of the implementation forms of the inventive concept and are for illustrative purposes only. The protection scope of the present invention should not be considered to be limited to the specific forms described in this embodiment, and the protection scope of the present invention also extends to equivalent technical means that can be thought of by ordinary technicians in this field based on the inventive concept.

Claims

1. A plasma-assisted fine abrasive jet polishing manufacturing device, characterized in that: The device comprises a plasma generating system, a fine abrasive injection system and an auxiliary processing system. The auxiliary processing system comprises a speed control box, a rotator, a rotating shaft, a tool converter, a loading plate, a connecting frame, an air suction pump and a collecting chamber. The loading plate is installed on one side of the workpiece converter. The axis of the loading plate is provided with a rotating shaft, which is transitionally matched with the rotator. The speed control box controls the rotating shaft speed through a wire. The tool converter is installed on the upper end of the connecting frame. The left and right ends of the connecting frame are respectively connected to the air suction pump through a conduit. The bottom of the conduit leads to the collecting chamber. The lower end of the connecting frame is installed at the upper end of the inner hole of the workpiece to form a closed space required for processing with the inner hole of the workpiece. The plasma generating system and the fine abrasive injection system are both located above the tool converter. The fine abrasive injection system is installed on the loading plate, and the plasma generating system is installed on the other side of the workpiece converter.

2. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 1, characterized in that: A rotating shaft and a guide rail are installed on the loading plate, and the rotating shaft is connected to the rotator to provide the required power for the micro-abrasive jet processing; the micro-abrasive jet system is connected to the guide rail of the loading plate, and the guide rail is distributed along the radius of the loading plate and is used to adjust the processing radius to adapt to the inner holes of workpieces of different sizes.

3. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 1 or 2, characterized in that: The workpiece surface is covered with a protective film in the processing area, which protects the workpiece surface and prevents the workpiece surface from being oxidized by plasma and worn by fine abrasive particles.

4. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 1 or 2, characterized in that: The plasma generating system comprises a gas supply module, a radiation power module and a plasma excitation module, wherein the gas supplied by the gas supply module comprises cooling gas, reaction gas and inert gas, the plasma excitation module comprises a plasma torch, an impedance matcher, an induction coil and an electric spark generator, the right side of the gas supply box of the gas supply module is respectively connected with the cooling gas, reaction gas and inert gas through a conduit, wherein the inert gas and the reaction gas flow out from the inner pipe of the plasma torch through the conduit after being mixed in the supply box, and the cooling gas flows out from the outer pipe of the plasma torch alone; the plasma torch is arranged above the tool converter and is installed in cooperation with the left side of the tool converter, the induction coil surrounds the bottom of the plasma torch, the positive pole of the radio frequency power supply of the radiation power module is connected to one end of the induction coil through the impedance matcher, the negative pole of the radio frequency power supply and the other end of the induction coil are both grounded, and the spark generator is located in the inner pipe of the plasma torch.

5. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 1 or 2, characterized in that: The micro-abrasive injection system includes an abrasive supply module and a nozzle module, wherein the abrasive supply module includes an air compressor, an abrasive storage chamber and a conduit, and the nozzle module includes a nozzle body, a connecting cap and a nozzle; the upper left end of the abrasive storage chamber is connected to the air compressor, and the lower right end of the abrasive storage chamber is connected to the nozzle module through the conduit, one end of the connecting cap of the nozzle module cooperates with the nozzle body, and the other end of the connecting cap cooperates with the nozzle, the nozzle body is connected to the conduit, and the connecting cap is connected to the guide rail of the loading plate.

6. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 5, characterized in that: The abrasive supply module also includes a flow control valve, which is arranged inside the abrasive storage chamber; the abrasive supply module adopts a flow-limiting feeding method, and during the micro-abrasive jetting process, the flow control valve is opened, and the micro-abrasive can be ejected faster with the assistance of high-speed airflow.

7. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 5, characterized in that: The nozzle of the nozzle module is a conical nozzle.

8. The plasma-assisted fine abrasive jet polishing manufacturing device according to claim 1 or 2, characterized in that: The cooling gas is helium or argon; the reaction gas is oxygen or water vapor; the inert gas is helium or argon; The fine abrasive particles include one or a mixture of at least two or more of nano diamond, boron carbide, silicon carbide, silicon nitride, silicon oxide, gallium oxide, and aluminum oxide; The free radicals in the plasma have strong oxidizing properties and chemically react with the atoms on the surface of the inner hole of the workpiece to form a modified layer with lower hardness.

9. A method for implementing the plasma-assisted micro-abrasive jet polishing manufacturing device as claimed in claim 1, characterized in that: The method comprises the following steps: (1) Fix the connecting frame on the workpiece, ensure that the center hole of the connecting frame is coaxial with the blind hole of the workpiece, and cover the surface of the workpiece with a protective film in the processing area; (2) Turn on the suction pump to put the inner chamber of the connecting frame into a vacuum state, and then turn off the suction pump; (3) controlling the tool converter to adjust to the plasma generating system; (4) starting the gas supply box to allow the reaction gas and the inert gas to flow into the inner cavity of the plasma torch tube, and the cooling gas to flow into the outer cavity of the plasma torch tube; (5) starting the radio frequency power supply and the spark generator, igniting and ionizing the inert gas through the spark igniter, and the high-frequency current generated by the radio frequency power supply flows into the coil to generate a high-frequency induction magnetic field, and the reaction gas is excited to generate plasma; (6) Control the tool converter to adjust to the fine abrasive jet system; (7) Adjust the nozzle module so that its injection point is aligned with the inner hole wall of the workpiece; (8) The air compressor, the flow control valve and the speed control box are started simultaneously, and the nozzle module performs circumferential shear impact micro-removal on the denatured layer of the inner hole wall of the workpiece; (9) Close the flow control valve and turn on the suction pump, use the high-speed airflow to blow the abrasive particles and chips in the inner hole of the workpiece into the two sides of the inner chamber of the connecting frame, and then recover them to the collection chamber through the suction pump; (10) Repeat step (2) to step (9) 2-3 times, and adjust the repetition cycle of the above steps according to the actual workpiece processing parameter index requirements; (11) Turn off all switches, disassemble the connecting frame, and complete the processing.

10. The method according to claim 9, characterized in that In the step (1), the protective film protects the surface of the workpiece and prevents the surface of the workpiece from being oxidized by plasma and worn by fine abrasive particles.

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