Automatic quantitative liquid feeding device for spin coating

Abstract

The invention relates to a spin-coating automatic quantitative liquid feeding device which comprises a pipetting assembly, a liquid feeding assembly, a liquid feeding assembly, a liquid feeding assembly, a liquid feeding assembly and a liquid feeding assembly. The pipetting assembly comprises a pipetting head and a pipetting needle tube, and the pipetting needle tube is detachably connected to the pipetting head; the moving module drives the pipetting assembly to do lifting motion and rotate on the horizontal plane, the pipetting assembly rotates on the horizontal plane so as to be switched among a liquid feeding station, a liquid adding station and a collecting station, and the spin-coating equipment is located at the liquid adding station; the material preparation assembly comprises a material preparation frame, a material preparation driving module and a plurality of standby needle tubes, and the standby needle tubes sequentially pass through the liquid feeding station along with movement of the material preparation frame; the liquid supply assembly comprises a liquid bottle, and the liquid bottle is located under the standby needle tube located at the liquid feeding station. The pipetting assembly is moved to the liquid feeding station, the liquid adding station and the collecting station in sequence, automatic liquid feeding, liquid adding and needle tube replacement are achieved, the machining efficiency is improved, the operation consistency is guaranteed, and the persuasion of the test effect is enhanced.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor processing equipment, and in particular to an automatic quantitative liquid application device for spin coating. Background Art

[0002] Spin coating is the abbreviation of spin coating, which is a commonly used preparation method for organic light-emitting diodes. The main equipment is a coating machine. Spin coating includes three steps: batching, high-speed rotation, and volatilization film formation. The thickness of the film is controlled by controlling the coating time, rotation speed, drop volume, and the concentration and viscosity of the solution used.

[0003] In the related art, when adding functional liquid to the spin coating equipment during the test process, a pipetting head based on the syringe principle is used, and the test personnel manually add the functional liquid to the processing surface of the spin coating equipment.

[0004] However, during the test, it is usually necessary to process a certain number of devices to increase the sample size in order to judge the processing quality based on the processing conditions of the large sample devices. When adding liquid manually, due to the influence of the consistency of manual operation, not only the amount of liquid added each time cannot be controlled consistently, but also the position of each addition is difficult to guarantee. Due to the influence of operation consistency, the processing effect obtained after the test is less convincing. In addition, after each addition, the needle needs to be replaced to avoid the residual functional liquid in the used needle from affecting the subsequent addition. After the needle is replaced manually, the liquid extraction and addition operations are performed, and the processing efficiency is extremely low. Summary of the invention

[0005] The embodiment of the present application provides an automatic quantitative liquid application device for spin coating to solve the technical problems in the related art that it is difficult to ensure the position of each manual liquid addition, the processing effect obtained after the test is less convincing due to the influence of operation consistency, and the manual replacement of the needle for reprocessing is extremely inefficient.

[0006] A spin coating automatic quantitative liquid feeding device is used for quantitatively and point-by-point liquid feeding to a spin coating device, wherein a liquid feeding hole is provided through the center of a cover body of the spin coating device, and the spin coating automatic quantitative liquid feeding device comprises:

[0007] A pipetting assembly, the pipetting assembly comprising a pipetting head and a pipetting needle, the pipetting needle being detachably connected to the pipetting head;

[0008] A moving module, the moving module drives the liquid transfer component to move up and down and rotate on a horizontal plane, the liquid transfer component rotates on a horizontal plane to switch between a liquid loading station, a liquid adding station and a collection station, and the spin coating device is located at the liquid adding station;

[0009] A material preparation component, the material preparation component includes a material preparation rack, a material preparation drive module and a plurality of spare needle tubes, the material preparation drive module drives the material preparation rack to move in the feeding direction, the plurality of spare needle tubes are vertically penetrated in the material preparation rack, and the plurality of spare needle tubes pass through the liquid application station in sequence as the material preparation rack moves;

[0010] The liquid supply component includes a liquid bottle, the liquid bottle is used to load functional liquid, the liquid bottle is located at the liquid supply station, and the liquid bottle is located directly below the spare needle tube at the liquid supply station.

[0011] In some embodiments, the pipetting head comprises:

[0012] A main body, the main body being mounted on a driving end of the moving module;

[0013] A tube body, the tube body is connected to the main body, and the pipette needle is sleeved on the tube body;

[0014] A piston rod, the piston rod being inserted through the tube body;

[0015] A liquid transfer drive, the liquid transfer drive is installed in the main body, the liquid transfer drive is connected to the piston rod to drive the piston rod to rise and fall relative to the tube body; wherein,

[0016] As the piston rod rises, the functional liquid in the liquid bottle is drawn into the pipette needle and the tube body.

[0017] In some embodiments, the pipette needle and the spare needle both include:

[0018] A first countersunk hole section, wherein the tube body is inserted into the first countersunk hole section of the pipette needle tube or the spare needle tube, and the outer side surface of the tube body is in contact with the hole wall of the first countersunk hole section;

[0019] A second through hole section, wherein the second through hole section is connected to the first counterbore section; wherein

[0020] The piston rod descends to abut against the bottom of the first counterbore section, and pushes down the pipette needle to separate the pipette needle from the tube body.

[0021] In some embodiments, the plurality of spare needle tubes are elastically lifted and lowered on the material preparation rack;

[0022] The liquid transfer assembly descends, the tube body is inserted into the spare needle tube at the liquid supply station, and the spare needle tube is pressed down to extend the spare needle tube into the liquid bottle.

[0023] In some embodiments, the material preparation component further includes:

[0024] A plurality of support sleeves, wherein the plurality of support sleeves are arranged along the feeding direction, the spare needle tube is passed through the support sleeve, and the outer side surface of the spare needle tube is provided with a step surface, and the step surface is attached to the top surface of the support sleeve;

[0025] A plurality of elastic members, wherein the plurality of elastic members are respectively connected to the plurality of support sleeves, and the two ends of the elastic members are respectively connected to the support sleeves and the standby frame; wherein,

[0026] As the tube body descends, the spare needle tube is sleeved onto the tube body, and the tube body drives the spare needle tube to be pressed downward, thereby reducing the elasticity of the support sleeve.

[0027] In some embodiments, the liquid supply assembly further comprises:

[0028] A liquid supply plate, on which the liquid bottle is detachably mounted;

[0029] A liquid supply driving member drives the liquid supply plate to move in a liquid supply direction, so as to drive the liquid bottle on the liquid supply plate to move to a liquid supply station.

[0030] In some embodiments, the liquid supply assembly further includes a locking structure, and the liquid bottle is connected to the liquid supply plate via the locking structure; the locking structure includes:

[0031] A positioning plate, the positioning plate is fixed on the surface of the liquid supply plate, and the side surface of the positioning plate is matched with the circumferential side surface of the liquid bottle;

[0032] A locking linear module is installed on the liquid supply plate, and a driving end of the locking linear module is pressed against the liquid bottle, and the liquid bottle is clamped between the positioning plate and the driving end of the locking linear module.

[0033] In some embodiments, the movable module includes a mounting seat, which is the driving end of the movable module, and the pipetting head can be detachably mounted on the mounting seat; the mounting seat includes a mounting groove, and the pipetting head is located in the mounting groove, and the side of the pipetting head is tightened by multiple bolts to fix the pipetting head.

[0034] In some embodiments, the automatic quantitative liquid application device for spin coating further comprises a collecting container, wherein the collecting container is located at the collecting station, and the collecting container collects the pipette needle removed from the pipette head.

[0035] In some embodiments, the automatic quantitative liquid application device for spin coating further includes a processing chamber, and the pipetting component, the moving module, the material preparation component and the liquid supply component are all located in the processing chamber.

[0036] The beneficial effects of the technical solution provided by this application include:

[0037] The embodiment of the present application provides a spin coating automatic quantitative liquid application device, which drives the pipetting component to move through a mobile module so that the pipetting component can be moved to the liquid application station, the liquid adding station and the collection station in sequence. Among them, at the liquid application station, the material preparation component sends the spare syringe to the liquid application station, and the pipetting head also moves to the liquid application station. The pipetting head descends to install the spare syringe. At this time, the spare syringe is installed as the pipetting syringe. After the pipetting syringe is installed, the pipetting head and the pipetting syringe continue to descend, and the pipetting syringe extends into the liquid bottle to extract the functional liquid. Therefore, the pipetting head descends to install the syringe and directly extract the functional liquid. The extraction efficiency of the functional liquid is higher, and there is no need to move the pipetting head multiple times, which reduces the positioning steps and the number of movements of the pipetting head. Therefore, the working steps are simplified and the liquid adding efficiency is improved.

[0038] After the pipette head extracts the functional liquid, the pipette head carrying the functional liquid moves to the liquid adding station. Since the position of the pipette head at the liquid adding station is fixed, the position consistency of the pipette head is better each time the liquid is added. The pipette head descends at the liquid adding station and extends from the liquid adding hole into the spin coating equipment to add liquid. Since the pipette head is automatically driven to move by the mobile module, the position and height of the pipette head at the liquid adding station are consistent each time it moves, which ensures the consistency of the position and height of each liquid addition, ensures the consistency of the operation of each liquid addition, and improves the persuasiveness of the spin coating test results.

[0039] Finally, the pipetting head moves to the collection station, and the used material transfer needle is removed to facilitate the subsequent installation of the next spare needle to the pipetting head, thereby facilitating the processing of the next device.

[0040] In addition, since the pipetting head is driven to rotate and switch the workstations, the pipetting head passes through the liquid application workstation, liquid adding workstation and collection workstation in sequence, and moves from the collection workstation to the liquid application workstation again. The workstation switching is smoother, the processing rhythm is better, and the processing efficiency is improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0042] Figure 1 A schematic diagram of a spin coating automatic quantitative liquid loading device provided in an embodiment of the present application;

[0043] Figure 2 A top view of the automatic quantitative liquid application device for spin coating provided in an embodiment of the present application;

[0044] Figure 3A schematic diagram of the interior of a pipetting head provided in an embodiment of the present application;

[0045] Figure 4 A schematic diagram of a tube body, a piston rod and a pipette needle provided in an embodiment of the present application;

[0046] Figure 5 A schematic diagram of a material preparation component and a liquid supply component provided in an embodiment of the present application;

[0047] Figure 6 A partial schematic diagram of a material preparation assembly provided in an embodiment of the present application;

[0048] Figure 7 A schematic diagram of a liquid supply assembly provided in an embodiment of the present application.

[0049] In the figure: 1, liquid transfer assembly; 11, liquid transfer head; 111, main body; 112, tube body; 113, piston rod; 114, liquid transfer drive; 12, liquid transfer needle; 12a, first countersunk hole section; 12b, second through hole section; 12c, step surface; 2, mobile module; 21, mobile frame; 22, rotating drive; 23, lifting drive; 24, mounting seat; 24a, mounting groove; 3, material preparation assembly; 3 1. Material preparation seat; 32. Material preparation rack; 33. Material preparation drive module; 34. Material preparation needle tube; 35. Support sleeve; 36. Elastic part; 4. Liquid supply assembly; 41. Liquid bottle; 42. Liquid supply seat; 43. Liquid supply plate; 44. Locking structure; 441. Positioning plate; 442. Locking linear module; 5. Collection container; 6. Spin coating equipment; 6a. Liquid adding hole; A. Liquid applying station; B. Liquid adding station; C. Collection station. DETAILED DESCRIPTION

[0050] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of this application.

[0051] The embodiment of the present application provides a spin coating automatic quantitative liquid feeding device, which moves the pipetting component to the liquid feeding station, the liquid adding station and the collection station in sequence, realizes automatic liquid feeding, liquid adding and needle tube replacement, improves processing efficiency, ensures operation consistency, and enhances the persuasiveness of the test results. The present application solves the technical problems in the related art that the position of each manual liquid addition is difficult to guarantee, and due to the influence of operation consistency, the persuasiveness of the processing effect obtained after the test is poor, and the manual replacement of the needle and reprocessing is extremely inefficient.

[0052] Reference Figure 1 and Figure 2 , an automatic quantitative liquid feeding device for spin coating, used for quantitative and fixed-point liquid feeding to a spin coating device 6, a liquid feeding hole 6a is provided through the center of the cover body of the spin coating device 6.

[0053] Reference Figure 1 and Figure 2 The rotary automatic quantitative liquid application device comprises a pipetting component 1, a moving module 2, a material preparation component 3 and a liquid supply component 4. The moving module 2 drives the pipetting component 1 to pass through the liquid application station A, the liquid adding station B and the collection station C in sequence, and circulates among the liquid application station A, the liquid adding station B and the collection station C. The material preparation component 3 supplies the needle tube to the pipetting component 1 at the liquid application station A, and the liquid supply component 4 provides the functional liquid to the pipetting component 1 at the liquid application station A. The spin coating device 6 is located at the liquid adding station B, and the pipetting component 1 descends at the liquid adding station B and causes the needle tube to pass through the liquid adding hole 6a or even into the spin coating device 6, and liquid is added to the spin coating device 6. The pipetting component 1 removes the used needle tube at the collection station C. Then the pipetting component 1 moves to the liquid application station A again.

[0054] With this arrangement, since the pipetting head 11 is driven to rotate and switch the workstations, the pipetting head 11 passes through the liquid application workstation A, the liquid addition workstation B and the collection workstation C in succession, and moves from the collection workstation C to the liquid application workstation A again. The workstation switching is smoother, the processing rhythm is better, and the processing efficiency is improved.

[0055] In addition, since the pipetting component 1 realizes movement through the mobile module 2, the position consistency of each movement is better, which ensures the operational consistency of multiple processing and enhances the convincingness of the processing effect.

[0056] Reference Figure 1 , Figure 3 and Figure 4 The pipetting assembly 1 includes a pipetting head 11 and a pipetting needle 12, and the pipetting needle 12 is detachably connected to the pipetting head 11. The pipetting head 11 extracts the functional liquid through the pipetting needle 12, and adds the functional liquid from the pipetting needle 12 to the spin coating device 6.

[0057] Reference Figure 3 and Figure 4Specifically, the pipetting head 11 includes a main body 111, a tube body 112, a piston rod 113 and a pipetting drive 114. The main body 111 is installed at the driving end of the mobile module 2, and an installation space is reserved inside the main body 111. The tube body 112 extends from the main body 111 to the inside of the main body 111 and is fixedly connected to the main body 111. The top end of the pipetting needle 12 is sleeved on the tube body 112 to be detachably connected to the pipetting head 11. The piston rod 113 is inserted into the tube body 112, and part of the piston rod 113 extends into the inside of the main body 111. The pipetting drive 114 is installed in the main body 111, and the pipetting drive 114 is drivingly connected to the piston rod 113 to drive the piston rod 113 to rise and fall relative to the tube body 112. In this embodiment, the pipetting drive 114 includes a screw mechanism or a linear motor.

[0058] The liquid transfer drive 114 drives the piston rod 113 to rise and fall relative to the tube body 112. As the piston rod 113 rises, the functional liquid in the liquid bottle 41 is drawn into the liquid transfer needle tube 12 and the tube body 112. The piston rod 113 descends to discharge the functional liquid.

[0059] By setting it in this way, the amount of liquid taken and discharged each time can be controlled by controlling the moving distance of the piston rod 113 through the liquid transfer driving member 114. Therefore, the liquid transfer driving member 114 is used to achieve quantitative liquid taking and liquid addition, and ensure the consistency of liquid addition of the functional liquid during each processing.

[0060] Furthermore, a rubber ring is sleeved on the piston rod 113, and the rubber ring is close to or at the bottom of the piston rod 113. The rubber ring improves the sealing between the circumferential side of the piston rod 113 and the inner wall of the tube body 112, and ensures that the pumping and discharging of liquid can be achieved by lifting and lowering the piston rod 113.

[0061] Reference Figure 3 and Figure 4 Furthermore, a spring is provided between the tube body 112 and the piston rod 113 to increase the damping of the relative motion between the piston rod 113 and the tube body 112 by utilizing the elastic force of the spring, so as to improve the motion accuracy of the piston rod 113 and improve the volume accuracy of the liquid addition.

[0062] Reference Figure 4 , wherein the pipette needle 12 includes a first countersunk hole section 12a and a second through hole section 12b, which are arranged up and down and communicated with each other. When the pipette needle 12 is connected to the tube body 112, the tube body 112 is inserted into the first countersunk hole section 12a of the pipette needle 12, and the outer side surface of the tube body 112 is attached to the hole wall of the first countersunk hole section 12a, so that the top end of the pipette needle 12 is tightly sleeved on the tube body 112, thereby realizing the connection between the pipette needle 12 and the tube body 112.

[0063] When the pipetting head 11 takes liquid, the pipetting needle 12 extends into the functional liquid, and as the piston rod 113 rises, the functional liquid passes through the second through hole section 12b and the first counterbore section 12a in turn and enters the tube body 112 .

[0064] In addition, the bottom end of the piston rod 113 can extend out of the tube body 112 and abut against the bottom of the first countersunk hole section 12a. At the collection station C, the pipetting drive 114 further drives the piston rod 113 to descend, and the piston rod 113 descends to abut against the bottom of the first countersunk hole section 12a, and pushes down the pipette needle 12 to separate the pipette needle 12 from the tube body 112, thereby realizing the automatic separation of the pipette needle 12 and the pipette head 11.

[0065] In this way, the piston rod 113 can not only realize the functions of taking and discharging liquid, but also can realize the detachment of the pipette needle 12 by using the piston rod 113. The arrangement of the corresponding structures of the piston rod 113 and the pipette needle 12 enriches the functions of the piston rod 113, has an ingenious structure, and can realize the automatic detachment of the pipette needle 12 without arranging many additional structures.

[0066] Furthermore, the bottom end of the piston rod 113 is configured in a truncated cone shape, and correspondingly, the hole wall of the first counterbore section 12 a close to the bottom is in conformity with the bottom end of the piston rod 113 .

[0067] With such arrangement, when the pipette needle tube 12 is installed, the bottom end of the piston rod 113 is outside the tube body 112, and the truncated cone shape of the bottom end of the piston rod 113 makes it easier to insert into the first countersunk hole section 12a of the pipette needle tube 12, thereby facilitating the installation of the pipette needle tube 12. In addition, when the piston rod 113 further abuts against the bottom of the first countersunk hole section 12a, since the hole wall of the first countersunk hole section 12a near the bottom fits the bottom end shape of the piston rod 113, the bottom end side surface of the piston rod 113 is tightly attached to the first countersunk hole section 12a, so as to fully discharge the functional liquid in the pipette needle tube 12.

[0068] Reference Figure 1 and Figure 2 , wherein the mobile module 2 drives the pipetting component 1 to move up and down and rotate on a horizontal plane, and the pipetting component 1 rotates on a horizontal plane to switch between the liquid adding station A, the liquid adding station B and the collection station C.

[0069] With this arrangement, the pipetting component 1 is driven by the moving module 2 to accurately move to each station, and when adding liquid to the spin coating device 6, the height of the pipetting component 1 is consistent each time the liquid is added to control the consistency of the liquid addition height.

[0070] Reference Figure 1 and Figure 2Specifically, the mobile module 2 includes a mobile frame 21, a lifting drive member 23, a rotating drive member 22 and a mounting seat 24. The rotating drive member 22 is mounted on the mobile frame 21, the lifting drive member 23 is mounted on the driving end of the rotating drive member 22, the mounting seat 24 is mounted on the driving end of the lifting drive member 23, and the pipetting head 11 of the pipetting assembly 1 is detachably mounted on the mounting seat 24.

[0071] With such arrangement, the lifting drive member 23 can drive the liquid transfer component 1 to move up and down, and the rotating drive member 22 can drive the liquid transfer component 1 to rotate in a horizontal plane.

[0072] In this embodiment, the rotating drive member 22 includes a belt mechanism, and the lifting drive member 23 is installed on the driven wheel of the belt mechanism, which can support the continuous rotation of the pipetting component 1 in the horizontal plane and circulate in the liquid filling station A, the liquid adding station B and the collection station C.

[0073] Reference Figure 1 and Figure 2 , wherein the mounting seat 24 includes a mounting groove 24 a , the pipetting head 11 is located in the mounting groove 24 a , and the side of the pipetting head 11 is tightened by a plurality of bolts to fix the pipetting head 11 .

[0074] Specifically, a plurality of bolts are threadedly installed in the mounting seat 24 from the outer side surface of the mounting seat 24 , and the bolts extend into the mounting groove 24 a . The bolts press the pipetting head 11 against the groove wall of the mounting groove 24 a to fix the pipetting head 11 .

[0075] In this way, the pipetting head 11 can be fixed by a plurality of bolts, and the position of the pipetting head 11 can be flexibly adjusted relative to the mounting seat 24 before being fixed, thereby ensuring the installation accuracy of the pipetting head 11 and ensuring that the pipetting head 11 can be accurately moved to each station. In addition, the method of fixing by abutting is convenient for replacing the pipetting head 11.

[0076] Reference Figure 1 , Figure 5 and Figure 6 , wherein the material preparation assembly 3 includes a material preparation seat 31, a material preparation rack 32, a material preparation drive module 33 and a plurality of spare needle tubes 34. The material preparation rack 32 is slidably arranged on the material preparation seat 31, and the material preparation drive module 33 drives the material preparation rack 32 to move in the feeding direction. In this embodiment, the feeding direction is the tangent direction of the movement path of the pipetting head 11. A plurality of spare needle tubes 34 are vertically penetrated in the material preparation rack 32, and a plurality of spare needle tubes 34 are arranged in the feeding direction, and a plurality of spare needle tubes 34 pass through the liquid loading station A in sequence as the material preparation rack 32 moves. In this embodiment, the material preparation drive module 33 includes a screw mechanism or a linear motor.

[0077] In this arrangement, by pre-setting a plurality of spare needle tubes 34, and sequentially sending the spare needle tubes 34 to the liquid feeding station A, the pipetting head 11 also moves to the liquid feeding station A, and the pipetting head 11 descends to install the spare needle tube 34. Therefore, it is convenient to supply the spare needle tube 34 to the pipetting head 11 at the liquid feeding station A, thereby improving the liquid adding efficiency.

[0078] It should be noted that after the spare needle 34 is installed on the pipetting head 11, it becomes the pipetting needle 12. The spare needle 34 and the pipetting needle 12 have the same structure. In this embodiment, the spare needle 34 and the pipetting needle 12 are distinguished by name according to whether they are installed on the pipetting head 11.

[0079] In addition, in some embodiments, the size specifications of the plurality of spare needle tubes 34 are different, that is, the needle tip diameters are different, to meet different liquid addition requirements. However, regardless of whether the size of the spare needle tubes 34 is the same, the structure of the top of the spare needle tube 34 cooperating with the tube body 112 and the piston rod 113 is the same.

[0080] The spare needle tubes 34 are elastically lifted and lowered on the material preparation rack 32 .

[0081] With this arrangement, on the one hand, during the process of the pipetting head 11 descending and plugging with the spare needle tube 34, the spare needle tube 34 is in soft contact with the pipetting head 11 because the spare needle tube 34 is elastically raised and lowered, and the pipetting head 11 is not easy to collide with the spare needle tube 34 and damage each other, and the spare needle tube 34 can be gradually sleeved on the tube body 112 of the pipetting head 11 as it descends. On the other hand, after the pipetting head 11 presses down the spare needle tube 34 to complete the connection between the two, the spare needle tube 34 descends and is inserted into the functional liquid stored in the liquid supply component 4, and the functional liquid can be extracted. The needle tube installation and liquid extraction steps are arranged at the same station, which improves the liquid addition efficiency.

[0082] Reference Figure 1 , Figure 5 and Figure 6 Specifically, the material preparation assembly 3 further includes: a plurality of support sleeves 35 and a plurality of elastic members 36. The plurality of support sleeves 35 are arranged along the feeding direction, the spare needle tube 34 is inserted through the support sleeve 35, and the outer side surface of the spare needle tube 34 is provided with a step surface 12c, and the step surface 12c is attached to the top surface of the support sleeve 35. The step surface 12c of the spare needle tube 34 overlaps the top surface of the support sleeve 35, so that the spare needle tube 34 is supported.

[0083] Reference Figure 1 , Figure 5 and Figure 6, multiple elastic members 36 are respectively connected to multiple supporting sleeves 35, and both ends of the elastic member 36 are respectively connected to the supporting sleeve 35 and the standby frame. In this embodiment, the elastic member 36 includes a spring. The supporting sleeve 35 is elastically connected to the standby frame through the elastic member 36. When the standby needle tube 34 is pressed down, the standby needle tube 34 pushes the supporting sleeve 35 and elastically decreases synchronously with the supporting sleeve 35.

[0084] In this arrangement, as the tube body 112 of the pipette head 11 descends, the spare needle tube 34 is sleeved onto the tube body 112, and the tube body 112 drives the needle tube to be pressed down, thereby reducing the elasticity of the support sleeve 35. By providing the support sleeve 35, on the one hand, the placement position of the spare needle tube 34 is determined; on the other hand, the support sleeve 35 protects the spare needle tube 34, and when the spare needle tube 34 is installed, the spare needle tube 34 is supported laterally to protect the spare needle tube 34.

[0085] Reference Figure 1 , Figure 2 , Figure 5 and Figure 7 , wherein the liquid supply assembly 4 includes a liquid bottle 41, and the liquid bottle 41 is used to load the functional liquid. The liquid bottle 41 is located at the liquid supply station A, and the liquid bottle 41 is located directly below the spare needle tube 34 at the liquid supply station A. When the spare needle tube 34 is installed on the pipetting head 11, the spare needle tube 34 is pressed down and extends into the liquid bottle 41 to extract the functional liquid.

[0086] Reference Figure 1 , Figure 5 and Figure 7 Further, the liquid supply assembly 4 also includes a liquid supply seat 42 and a liquid supply plate 43. The liquid bottle 41 is detachably mounted on the liquid supply plate 43. The liquid supply plate 43 is slidably arranged on the liquid supply seat 42 along the liquid supply direction. In this embodiment, the liquid supply direction is perpendicular to the feeding direction. The liquid bottle 41 moves with the liquid supply plate 43 to move to the liquid supply station A.

[0087] In some embodiments, the liquid supply assembly 4 further includes a liquid supply drive, which is mounted on the liquid supply seat 42 and is drivingly connected to the liquid supply plate 43 to drive the liquid supply plate 43 to move in the liquid supply direction. The liquid supply drive includes a screw mechanism or a linear motor.

[0088] In this arrangement, the liquid bottle 41 is driven to move by the liquid supply drive to facilitate moving the liquid bottle 41 to the liquid supply station A, so as to facilitate direct extraction of functional liquid after the spare needle tube 34 is installed; or the liquid bottle 41 is driven away from the liquid supply station A to facilitate replacement of the liquid bottle 41.

[0089] Reference Figure 1 , Figure 5 and Figure 7Further, the liquid supply assembly 4 further includes a locking structure 44, and the liquid bottle 41 is connected to the liquid supply plate 43 through the locking structure 44. The locking structure 44 allows the liquid bottle 41 to be detachably connected to the liquid supply plate 43, and it is convenient to replace the liquid bottle 41.

[0090] Reference Figure 1 , Figure 5 and Figure 7 , wherein the locking structure 44 includes a positioning plate 441 and a locking linear module 442. The positioning plate 441 is fixed on the surface of the liquid supply plate 43, and the side of the positioning plate 441 is matched with the circumferential side of the liquid bottle 41. In this embodiment, the positioning plate 441 is an arc-shaped plate, and the liquid bottle 41 is against the inner side of the arc-shaped plate. The locking linear module 442 is installed on the liquid supply plate 43, and the driving end of the locking linear module 442 is pressed against the liquid bottle 41, and the liquid bottle 41 is clamped between the positioning plate 441 and the driving end of the locking linear module 442. In this embodiment, the locking linear module 442 includes a screw mechanism, a linear motor or a screw.

[0091] In this way, by making the driving end of the locking linear module 442 away from the positioning plate 441, the fixed state of the liquid bottle 41 can be released, and it is convenient to replace the liquid bottle 41. In addition, the shape of the positioning plate 441 is convenient for positioning the placement position of the liquid bottle 41, ensuring that the placement position of the liquid bottle 41 is consistent each time.

[0092] Reference Figure 1 and Figure 2 The automatic quantitative liquid feeding device for spin coating further comprises a collecting container 5, which is located at the collecting station C. The top surface of the collecting container 5 is open, and the collecting container 5 collects the pipette needle 12 removed from the pipette head 11. After the pipette assembly 1 moves to the collecting station C, the pipette assembly 1 is located above the collecting container 5, and after the pipette needle 12 of the pipette assembly 1 is removed, it falls into the collecting container 5 for collection.

[0093] The automatic quantitative liquid application device for spin coating further comprises a processing chamber (not shown in the figure), wherein the liquid transfer assembly 1, the moving module 2, the material preparation assembly 3, the liquid supply assembly 4, the collection container 5 and the spin coating device 6 are all located in the processing chamber. In this embodiment, the processing chamber comprises a glove box.

[0094] With this arrangement, liquid addition operations are performed in the processing chamber, which makes it easy to control the stability of the processing environment and to maintain the processing environment at a set process environment, thereby improving the processing quality.

[0095] The embodiment of the present application provides a spin coating automatic quantitative liquid application device, which drives the pipetting component 1 to move through the mobile module 2, so that the pipetting component 1 can be moved to the liquid application station A, the liquid adding station B and the collection station C in sequence. Among them, at the liquid application station A, the material preparation component 3 sends the spare needle tube 34 to the liquid application station A, and the pipetting head 11 also moves to the liquid application station A. The pipetting head 11 descends to install the spare needle tube 34. At this time, the spare needle tube 34 is installed as the pipetting needle tube 12. After the pipetting needle tube 12 is installed, the pipetting head 11 and the pipetting needle tube 12 continue to descend, and the pipetting needle tube 12 extends into the liquid bottle 41 to extract the functional liquid. Therefore, the pipetting head 11 descends to install the needle tube and directly extract the functional liquid. The extraction efficiency of the functional liquid is higher, and there is no need to move the pipetting head 11 multiple times, which reduces the positioning steps and the number of movements of the pipetting head 11. Therefore, the working steps are simplified and the liquid adding efficiency is improved.

[0096] After the pipette head 11 extracts the functional liquid, the pipette head 11 carrying the functional liquid moves to the liquid adding station B. Since the position of the pipette head 11 at the liquid adding station B is fixed, the position consistency of the pipette head 11 is better each time the liquid is added. The pipette head 11 descends at the liquid adding station B and extends from the liquid adding hole 6a into the spin coating device 6 to add liquid. Since the pipette head 11 is automatically driven to move by the mobile module 2, the position and height of the pipette head 11 at the liquid adding station B are consistent each time it moves, that is, the consistency of the position and height of each liquid addition is guaranteed, the consistency of the operation of each liquid addition is ensured, and the convincingness of the spin coating test results is improved.

[0097] Finally, the pipetting head 11 is moved to the collecting station C, and the used material transfer needle is removed to facilitate the subsequent installation of the next spare needle 34 to the pipetting head 11, so as to facilitate the processing of the next device.

[0098] In addition, since the pipetting head 11 is driven to rotate and switch the workstations, the pipetting head 11 passes through the liquid application workstation A, the liquid addition workstation B and the collection workstation C in succession, and moves from the collection workstation C to the liquid application workstation A again. The workstation switching is smoother, the processing rhythm is better, and the processing efficiency is improved.

[0099] In the description of the present application, it should be noted that the terms "upper", "lower", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. Unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be a connection between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0100] It should be noted that, in this application, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the presence of other identical elements in the process, method, article or device including the elements.

[0101] The above description is only a specific implementation of the present application, so that those skilled in the art can understand or implement the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but will conform to the widest range consistent with the principles and novel features applied for herein.

Claims

1. An automatic quantitative liquid feeding device for spin coating, used for quantitative and fixed-point liquid feeding to a spin coating device, wherein a liquid feeding hole is provided through the center of the cover of the spin coating device, and characterized in that: The automatic quantitative liquid application device for spin coating comprises: A pipetting assembly, the pipetting assembly comprising a pipetting head and a pipetting needle, the pipetting needle being detachably connected to the pipetting head; A moving module, the moving module drives the liquid transfer component to move up and down and rotate on a horizontal plane, the liquid transfer component rotates on a horizontal plane to switch between a liquid loading station, a liquid adding station and a collection station, and the spin coating device is located at the liquid adding station; A material preparation component, the material preparation component includes a material preparation rack, a material preparation drive module and a plurality of spare needle tubes, the material preparation drive module drives the material preparation rack to move in the feeding direction, the plurality of spare needle tubes are vertically penetrated in the material preparation rack, and the plurality of spare needle tubes pass through the liquid application station in sequence as the material preparation rack moves; The liquid supply component includes a liquid bottle, the liquid bottle is used to load functional liquid, the liquid bottle is located at the liquid supply station, and the liquid bottle is located directly below the spare needle tube at the liquid supply station.

2. The automatic quantitative liquid feeding device for spin coating according to claim 1, characterized in that: The pipetting head comprises: A main body, the main body being mounted on a driving end of the moving module; A tube body, the tube body is connected to the main body, and the pipette needle is sleeved on the tube body; A piston rod, the piston rod being inserted through the tube body; A liquid transfer drive, the liquid transfer drive is installed in the main body, the liquid transfer drive is connected to the piston rod to drive the piston rod to rise and fall relative to the tube body; wherein, As the piston rod rises, the functional liquid in the liquid bottle is drawn into the pipette needle and the tube body.

3. The automatic quantitative liquid feeding device for spin coating according to claim 2, characterized in that: The pipette needle and the spare needle both include: A first countersunk hole section, wherein the tube body is inserted into the first countersunk hole section of the pipette needle tube or the spare needle tube, and the outer side surface of the tube body is in contact with the hole wall of the first countersunk hole section; A second through hole section, wherein the second through hole section is connected to the first counterbore section; wherein The piston rod descends to abut against the bottom of the first counterbore section, and pushes down the pipette needle to separate the pipette needle from the tube body.

4. The automatic quantitative liquid feeding device for spin coating according to claim 2, characterized in that: The plurality of spare needle tubes are elastically lifted and lowered on the material preparation rack; The liquid transfer assembly descends, the tube body is inserted into the spare needle tube at the liquid supply station, and the spare needle tube is pressed down to extend the spare needle tube into the liquid bottle.

5. The automatic quantitative liquid feeding device for spin coating according to claim 4, characterized in that: The material preparation component also includes: A plurality of support sleeves, wherein the plurality of support sleeves are arranged along the feeding direction, the spare needle tube is passed through the support sleeve, and the outer side surface of the spare needle tube is provided with a step surface, and the step surface is attached to the top surface of the support sleeve; A plurality of elastic members, wherein the plurality of elastic members are respectively connected to the plurality of support sleeves, and the two ends of the elastic members are respectively connected to the support sleeves and the standby frame; wherein, As the tube body descends, the spare needle tube is sleeved onto the tube body, and the tube body drives the spare needle tube to be pressed downward, thereby reducing the elasticity of the support sleeve.

6. The automatic quantitative liquid feeding device for spin coating according to claim 1, characterized in that: The liquid supply assembly also includes: A liquid supply plate, on which the liquid bottle is detachably mounted; The liquid supply seat, the liquid supply plate is arranged on the liquid supply seat along the liquid supply direction, and the liquid bottle on the liquid supply plate is suitable for moving to the liquid supply station.

7. The automatic quantitative liquid feeding device for spin coating according to claim 6, characterized in that: The liquid supply assembly further includes a locking structure, through which the liquid bottle is connected to the liquid supply plate; the locking structure includes: A positioning plate, the positioning plate is fixed on the surface of the liquid supply plate, and the side surface of the positioning plate is matched with the circumferential side surface of the liquid bottle; A locking linear module is installed on the liquid supply plate, and a driving end of the locking linear module is pressed against the liquid bottle, and the liquid bottle is clamped between the positioning plate and the driving end of the locking linear module.

8. The automatic quantitative liquid feeding device for spin coating according to claim 1, characterized in that: The movable module comprises a mounting seat, which is the driving end of the movable module, and the pipetting head can be detachably mounted on the mounting seat; the mounting seat comprises a mounting groove, and the pipetting head is located in the mounting groove, and the side surface of the pipetting head is tightened by a plurality of bolts to fix the pipetting head.

9. The automatic quantitative liquid feeding device for spin coating according to claim 1, characterized in that: It also includes a collecting container, which is located at the collecting station and collects the pipette needles removed from the pipette head.

10. The automatic quantitative liquid feeding device for spin coating according to claim 1, characterized in that: It also includes a processing chamber, in which the pipetting component, the moving module, the material preparation component and the liquid supply component are all located.

Images