Multi-element focusing device of EDS (energy dispersive spectrometer)

Abstract

The invention discloses a multi-element focusing device for an EDS (energy dispersive spectrometer), which comprises a flange mounting seat, a detector mounting seat and more than two flange plates, the more than two flange plates are mounted between the flange mounting seat and the detector mounting seat, at least one mounting surface of each flange plate is inclined, and the flange plates arranged at two ends are end flange plates. And the flange plate arranged in the middle is a middle flange plate. Through more than two groups of flange structures with inclined mounting surfaces, the direction, distance and the like of the probe can be accurately adjusted, the universality of the whole energy disperse spectroscopy is improved, and the use cost is reduced.

Description

Technical Field

[0001] The invention discloses an energy spectrometer, in particular to an EDS energy spectrometer multi-element focusing device, belonging to the technical field of analysis equipment. Background Art

[0002] Energy spectrometer is an instrument used to measure the energy distribution of particles or radiation in matter, and is widely used in many fields such as physics, chemistry, biology, etc. It can analyze the energy characteristics of various elements in a sample and help scientists perform qualitative and quantitative analysis.

[0003] The basic working principle of the energy spectrometer is to convert the signal generated by the interaction between incident radiation or particles and matter into measurable energy data. The sample is irradiated by radiation or particles, and the atoms or molecules in the sample interact with the incident particles and release energy. The released energy is captured by the detector and converted into electrical signals. After the signal is processed, an energy spectrum is generated to show the number or intensity of particles with different energies.

[0004] In materials science, it can be used to analyze the composition and structure of materials; in environmental science, it can be used to monitor and analyze pollutants; in the medical field, it can be used for the analysis and diagnosis of radioactive drugs; in nuclear science, it can be used for the identification and measurement of radionuclides.

[0005] Energy spectrometer is a powerful analytical tool that, if used properly, can provide important data support for scientific research and practical applications.

[0006] The energy spectrometer needs to be installed on the installation port of the scanning electron microscope. The port positions and installation surface angles of different models of scanning electron microscopes are different. When installing the EDS energy spectrometer, the direction and distance of the probe need to be adjusted according to the position of the internal sample stage and the sample focus position of the scanning electron microscope SEM. The energy spectrometer in the prior art is limited by its structure and can usually only be used for a specific scanning electron microscope. Replacing a different scanning electron microscope requires replacing a different energy spectrometer, which has a high cost, poor versatility, and is not convenient to use. Summary of the invention

[0007] In view of the above-mentioned shortcoming of poor versatility of energy spectrometers in the prior art, the present invention provides a multi-element focusing device for an EDS spectrometer, which can accurately adjust the direction, distance, etc. of the probe through more than two groups of flange structures with inclined mounting surfaces, thereby improving the versatility of the entire energy spectrometer and reducing the cost of use.

[0008] The technical solution adopted by the present invention to solve its technical problems is: a multi-element focusing device of an EDS spectrometer, the device comprising a flange mounting seat, a detector mounting seat and more than two flanges, the more than two flanges are installed between the flange mounting seat and the detector mounting seat, each flange has at least one mounting surface that is inclined, the flanges arranged at both ends are end flanges, and the flange arranged in the middle is an intermediate flange.

[0009] The technical solution adopted by the present invention to solve the technical problem further includes: The flange mounting seat is in the shape of a circular ring, and the two mounting surfaces are arranged in parallel. The flange mounting seat is provided with a first mounting hole for mounting the flange mounting seat together with the scanning electron microscope SEM mounting wall. The middle of the flange mounting seat is a first through hole for inserting the detector. The flange mounting seat is provided with a second mounting hole for mounting the end flange plate.

[0010] The detector mounting seat is in a circular shape, and two mounting surfaces are arranged in parallel. A sixth mounting hole for mounting an end flange is provided on the detector mounting seat, and a fifth through hole for inserting the detector is in the middle of the detector mounting seat.

[0011] The end flange is in the shape of a circular ring, wherein the angle between one mounting surface and the axis of the end flange is 90°, and the angle between the other mounting surface and the axis of the end flange is non-90°. A waist-shaped hole is provided on the end flange, and there are six waist-shaped holes. The six waist-shaped holes are evenly distributed in a circle along the center of the end flange. The number of waist-shaped holes and the mounting holes on the flange mounting seat are not equal. A step is provided at the bottom of the waist-shaped hole. The middle of the end flange is a through hole for inserting the detector, and the end flange is provided with mounting holes for installing other flanges or detector mounting seats.

[0012] The angle α between the two mounting surfaces of the end flange is between 2° and 8°, preferably 5°.

[0013] A scale is arranged on the outer side of the end flange along the circumferential direction.

[0014] The intermediate flange is in the shape of a circular ring, and the angles between its two mounting surfaces and the axis of the intermediate flange are all non-90°. The intermediate flange is provided with a waist-shaped hole, which corresponds to the mounting holes on the adjacent flanges. There are six waist-shaped holes, which are evenly distributed along the circumference of the center of the intermediate flange. A step is provided at the bottom of the waist-shaped hole. The middle of the intermediate flange is a through hole for inserting the detector. The intermediate flange is provided with mounting holes for installing adjacent flanges. The angle β between the two mounting surfaces of the intermediate flange is between 4° and 16°, preferably 10°.

[0015] The two mounting surfaces of the intermediate flange are symmetrically arranged.

[0016] The upper and lower sides of the outer circle of the middle flange are respectively provided with scales along the circumferential direction.

[0017] The beneficial effect of the present invention is that the present invention can accurately adjust the direction, distance, etc. of the probe through more than two groups of flange structures with inclined mounting surfaces, thereby improving the versatility of the entire energy spectrometer and reducing the cost of use.

[0018] The present invention will be further described below in conjunction with the accompanying drawings and specific implementation methods. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure is a schematic diagram of the three-dimensional structure of the energy spectrometer to which the present invention is applied.

[0020] Figure 2 The figure is a schematic diagram of the front view structure of the energy spectrometer to which the present invention is applied.

[0021] Figure 3 The figure is a schematic diagram of the side structure of the energy spectrometer to which the present invention is applied.

[0022] Figure 4 for Figure 3 Schematic diagram of the AA section structure.

[0023] Figure 5 It is a schematic diagram of the front view structure of the flange seat in the present invention.

[0024] Figure 6 It is a schematic diagram of the top view structure of the flange seat in the present invention.

[0025] Figure 7 It is a schematic diagram of the rear view structure of the flange seat in the present invention.

[0026] Figure 8 It is a schematic diagram of the three-dimensional structure of the flange seat in the present invention.

[0027] Fig. 9 It is a schematic diagram of the front view structure of the first flange in the present invention.

[0028] Fig.10 This is a schematic diagram of the top view of the first flange in the present invention.

[0029] Fig.11 It is a schematic diagram of the rear view structure of the first flange in the present invention.

[0030] Fig.12 It is a schematic diagram of the three-dimensional structure of the first flange in the present invention.

[0031] Fig.13 It is a schematic diagram of the front view structure of the second flange in the present invention.

[0032] Fig.14 It is a schematic diagram of the top view structure of the second flange in the present invention.

[0033] Fig.15 It is a schematic diagram of the rear view structure of the second flange in the present invention.

[0034] Fig.16 It is a schematic diagram of the three-dimensional structure of the second flange in the present invention.

[0035] Fig.17 It is a schematic diagram of the front view structure of the third flange in the present invention.

[0036] Fig.18 This is a schematic diagram of the top view of the third flange in the present invention.

[0037] Fig.19 It is a schematic diagram of the rear view structure of the third flange in the present invention.

[0038] Fig. 20 It is a schematic diagram of the three-dimensional structure of the third flange in the present invention.

[0039] Fig.21 This is a schematic diagram of the front view structure of the detector mounting base in the present invention.

[0040] Fig. 22 It is a schematic diagram of the top view structure of the detector mounting base in the present invention.

[0041] Fig.23 It is a schematic diagram of the rear view structure of the detector mounting base in the present invention.

[0042] Fig.24 It is a schematic diagram of the three-dimensional structure of the detector mounting base in the present invention.

[0043] Fig.25 It is a schematic diagram of the three-dimensional structure of the flange seat and the first mounting structure of the first flange plate in the present invention.

[0044] Fig.26 It is a schematic structural diagram of the flange seat and the first mounting structure of the first flange plate in the exploded state in the present invention.

[0045] Fig. 27 It is a front view structural schematic diagram of the flange seat and the first flange plate first mounting structure in the present invention.

[0046] Fig.28 It is a schematic diagram of the three-dimensional structure of the flange seat and the first flange plate and the second mounting structure in the present invention.

[0047] Fig.29 It is a schematic structural diagram of the flange seat and the first flange plate and the second mounting structure in the exploded state in the present invention.

[0048] Fig.30It is a front view structural schematic diagram of the flange seat and the first flange plate and the second mounting structure in the present invention.

[0049] In the figure, 1-scanning electron microscope SEM mounting wall, 2-electronics system, 21-electronics system control board, 22-electronics system box, 23-radiator, 3-detector, 4-electron trap, 5-flange mounting seat, 51-first mounting hole, 52-first through hole, 53-second mounting hole, 54-first sealing ring mounting groove, 55-first scale, 56-second sealing ring mounting groove, 6-first flange, 61-first waist-shaped hole, 62-second through hole, 63-third mounting hole, 64-third sealing ring mounting groove, 65- Second scale, 7-second flange, 71-second waist-shaped hole, 72-third through hole, 73-fourth mounting hole, 74-third scale, 75-fourth scale, 8-third flange, 81-third waist-shaped hole, 82-fourth through hole, 83-fifth mounting hole, 84-fourth sealing ring mounting groove, 85-fifth scale, 86-fifth sealing ring mounting groove, 9-detector mounting seat, 91-sixth mounting hole, 92-fifth through hole, 10-screw, 11-first sealing ring, 12-second sealing ring, 13-third sealing ring. DETAILED DESCRIPTION

[0050] This embodiment is a preferred implementation mode of the present invention. Other embodiments whose principles and basic structures are the same or similar to those of this embodiment are within the protection scope of the present invention.

[0051] EDS (Energy Dispersive X-Ray Spectroscopy) spectrometer is a commonly used working unit of the scanning electron microscope SEM (Scanning Electron Microscope, Chinese name: scanning electron microscope). It can perform qualitative and quantitative analysis of elemental composition and point-line-surface distribution analysis, which can make up for the deficiency of SEM that can only perform morphological analysis.

[0052] The present invention mainly protects a multi-element focusing device for an EDS spectrometer, which is used in conjunction with the EDS spectrometer and mainly comprises a flange mounting seat 5, a detector mounting seat 9 and two or more flanges, wherein the two or more flanges are mounted between the flange mounting seat 5 and the detector mounting seat 9, and each flange has at least one mounting surface that is inclined, i.e., the angle between the inclined mounting surface and the axis of the flange is not 90°.

[0053] The following will be specifically described using three flange structures. During implementation, the number of flanges may also be two or more.

[0054] Please refer to the attached Figure 5 To Attachment Figure 8In this embodiment, the flange mounting seat 5 is in a circular shape, and the two mounting surfaces are arranged in parallel. A first mounting hole 51 is provided on the flange mounting seat 5. There are three first mounting holes 51. The three first mounting holes 51 are evenly distributed along the circumference of the center of the flange mounting seat 5. The flange mounting seat 5 can be installed together with the scanning electron microscope SEM mounting wall 1 through the first mounting holes 51. The middle of the flange mounting seat 5 is a first through hole 52 for inserting the detector 3. The flange mounting seat 5 is provided with a second mounting hole 53 for installing the first flange plate 6. In this embodiment, there are eight second mounting holes 53. During specific implementation, they can also be specifically set according to actual needs. The eight second mounting holes 531 are evenly distributed along the circumference of the center of the flange mounting seat 5. Preferably, the second mounting holes 53 are blind holes. During specific implementation, through holes can also be used. In this embodiment, a first sealing ring installation groove 54 is provided on one side of the flange mounting seat 5 for installing the second sealing ring 12 to achieve sealing between the first flange 6 and the flange mounting seat 5, and a second sealing ring installation groove 56 is provided on the other side of the flange mounting seat 5 for installing the first sealing ring 11 to achieve sealing between the flange mounting seat 5 and the SEM mounting wall 1. In this embodiment, a first scale 55 is provided on the outer side of the flange mounting seat 5 along the circumferential direction.

[0055] Please refer to the attached Fig. 9 To Attachment Fig.12In this embodiment, the first flange 6 is in a circular shape, wherein the angle between one mounting surface (the mounting surface in contact with the flange mounting seat 5) and the axis of the first flange 6 is 90°, and the angle between the other mounting surface and the axis of the first flange 6 is non-90°, that is, there is a certain angle between the two mounting surfaces of the first flange 6. In this embodiment, the angle α between the two mounting surfaces of the first flange 6 is between 2° and 8°, preferably 5°. In this embodiment, a first waist-shaped hole 61 is provided on the first flange 6, and the first waist-shaped hole 61 is provided corresponding to the second mounting hole 53. In this embodiment, six first waist-shaped holes 61 are provided. When implementing, they can also be specifically set according to actual needs. The six first waist-shaped holes 61 are evenly distributed along the center of the first flange 6. In this embodiment, the number of the first waist-shaped holes 61 and the second mounting holes 53 is not equal, and the first waist-shaped holes 61 are waist-shaped, which can ensure that the first flange 6 and the flange mounting seat 5 can be adjusted 360° at all angles without any adjustment blind spot, and can ensure that at any angle, there are at least four screws to connect the first flange 6 and the flange mounting seat 5 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the first waist-shaped hole 61, which can be used to clamp the screw cap. The middle of the first flange 6 is a second through hole 62 for inserting the detector 3. The first flange 6 is provided with a third mounting hole 63 for mounting the second flange 7. In this embodiment, eight third mounting holes 63 are provided. In specific implementation, they can also be specifically set according to actual needs. The eight third mounting holes 63 are evenly distributed along the center of the first flange 6. Preferably, the third mounting holes 63 are blind holes. In specific implementation, through holes can also be used. In this embodiment, a third sealing ring mounting groove 64 is provided on one side of the first flange 6 for mounting the third sealing ring 13 to achieve sealing between the second flange 7 and the first flange 6. In this embodiment, a second scale 65 is provided on the outer side of the first flange 6 along the circumferential direction.

[0056] Please refer to the attached Fig.13 To Attachment Fig.16In this embodiment, the second flange 7 is in a circular shape, and the angles between its two mounting surfaces and the axis of the second flange 7 are all non-90°, that is, there is a certain angle between the two mounting surfaces of the second flange 7 and the plane defined by the second flange 7. In this embodiment, the angle β between the two mounting surfaces of the second flange 7 is between 4° and 16°, preferably 10°, and the two mounting surfaces of the second flange 7 are symmetrically arranged, that is, the angle between each mounting surface of the second flange 7 and the plane defined by the second flange 7 is between 2° and 8°, preferably 5°. In this embodiment, a second waist-shaped hole 71 is provided on the second flange 7, and the second waist-shaped hole 71 is provided corresponding to the third mounting hole 63. In this embodiment, six second waist-shaped holes 71 are provided. In specific implementation, they can also be specifically set according to actual needs. The six second waist-shaped holes 71 are evenly distributed along the center of the second flange 7. In this embodiment, the number of the second waist-shaped holes 71 and the third mounting hole 63 is not equal, and the second waist-shaped hole 71 is waist-shaped, which can ensure that the second flange 7 and the first flange 6 can be adjusted 360° at all angles without an adjustment blind spot, and can ensure that at any angle, there are at least four screws connecting the second flange 7 and the first flange 6 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the second waist-shaped hole 71, which can be used to clamp the screw cap. The middle of the second flange 7 is a third through hole 72 for inserting the detector 3. The second flange 7 is provided with a fourth mounting hole 73 for mounting the third flange 8. In this embodiment, eight fourth mounting holes 73 are provided. In specific implementation, they can also be specifically set according to actual needs. The eight fourth mounting holes 73 are evenly distributed along the circumference of the center of the second flange 7. Preferably, the fourth mounting holes 73 are blind holes. In specific implementation, through holes can also be used. In this embodiment, the outer side of the second flange 7 is provided with a third ruler 74 and a fourth ruler 75 along the circumferential direction. The third ruler 74 and the fourth ruler 75 are respectively arranged on the upper and lower sides of the outer circle of the second flange 7.

[0057] Please refer to the attached Fig.17 To Attachment Fig. 20In this embodiment, the third flange 8 is in a circular shape, and the angle between one of the mounting surfaces of the third flange 8 (the mounting surface in contact with the detector mounting seat 9) and the axis of the third flange 8 is 90°, and the angle between the other mounting surface and the axis of the third flange 8 is non-90°, that is, there is a certain angle between the two mounting surfaces of the third flange 8. In this embodiment, the angle γ between the two mounting surfaces of the third flange 8 is between 2° and 8°, preferably 5°. In this embodiment, a third waist-shaped hole 81 is provided on the third flange 8, and the third waist-shaped hole 81 is provided corresponding to the fourth mounting hole 73. In this embodiment, six third waist-shaped holes 81 are provided. When implementing, they can also be specifically set according to actual needs. The six third waist-shaped holes 81 are evenly distributed along the circumference of the center of the third flange 8. In this embodiment, the number of the third waist-shaped holes 81 and the fourth mounting hole 73 is not equal, and the third waist-shaped hole 81 is waist-shaped, which can ensure that the third flange 8 and the second flange 7 can be adjusted 360° at all angles without an adjustment blind spot, and can ensure that at any angle, there are at least four screws between the third flange 8 and the second flange 7 to ensure the fixation of the connection between the two. In this embodiment, a step is provided at the bottom of the third waist-shaped hole 81, which can be used to clamp the screw cap. The third flange 8 has a fourth through hole 82 in the middle for inserting the detector 3. The third flange 8 has a fifth mounting hole 83 for mounting the detector mounting seat 9. In this embodiment, six fifth mounting holes 83 are provided. In specific implementation, they can also be specifically set according to actual needs. The six fifth mounting holes 83 are evenly distributed along the circumference of the center of the third flange 8. Preferably, the fifth mounting holes 83 are blind holes. In specific implementation, through holes can also be used. In this embodiment, a fourth sealing ring mounting groove 84 is provided on one side of the third flange 8 for mounting the fourth sealing ring to achieve sealing between the third flange 8 and the second flange 7. A fifth sealing ring mounting groove 86 is provided on the other side of the third flange 8 for mounting the fifth sealing ring to achieve sealing between the detector mounting seat 9 and the third flange 8. In this embodiment, a fifth scale 85 is provided on the outer side of the third flange 8 along the circumferential direction.

[0058] Please refer to the attached Fig.21 To Attachment Fig.24 In this embodiment, the detector mounting base 9 is in a circular shape, and the two mounting surfaces are arranged in parallel. A sixth mounting hole 91 is opened on the detector mounting base 9. There are six sixth mounting holes 91. The six sixth mounting holes 91 are evenly distributed along the center of the detector mounting base 9. The detector mounting base 9 and the third flange 8 can be installed together through the sixth mounting holes 91. The middle of the detector mounting base 9 is a fifth through hole 92, and the detector 3 is fixedly installed in the fifth through hole 92.

[0059] In the above embodiment, three flanges are used as an example for explanation, wherein the first flange 5 and the third flange 7 are arranged at both ends, which are defined as end flanges respectively, and the second flange 6 is arranged in the middle, which is defined as the middle flange. If two flanges are provided, the second flange 6 in the middle can be cancelled. If more flanges are provided, the flanges of the second flange 6 structure can be added accordingly. As for the setting of the sealing ring installation groove and the sealing ring, as long as the sealing between the corresponding flanges can be satisfied, there is no specific limitation on which flange to be set on. The three flanges in this embodiment are stacked and their diameters decrease successively. Preferably, the diameter of the upper-level flange is smaller than the opening position of the waist-shaped hole on the current-level flange, that is, the upper-level flange will not block the waist-shaped hole on the current-level flange, so that the screws in the waist-shaped hole can be easily removed and installed, and the relative angle between the flanges can be easily adjusted.

[0060] When the present invention is applied in an energy spectrometer, the flange mounting base 5 is fixedly mounted on the mounting wall 1 of a scanning electron microscope (SEM), the detector 3 is fixedly mounted in the fifth through hole 92 on the detector mounting base 9, an electron trap 4 is fixedly mounted on one end of the detector 3, and an electronic system 2 is fixedly mounted on the other end of the detector 3. The electronic system 2 mainly includes an electronic system box 22, an electronic system control board 21 arranged inside the electronic system box 22, and a radiator 23 fixedly mounted on the electronic system box 22.

[0061] Rotate the first flange 6, the second flange 7 and the third flange 8. The end faces of each flange have an angle, which can be adjusted 360° around their respective rotation axes. Adjust the angle of each flange separately, so as to adjust the direction of the detector optical axis until it coincides with the focus, and then fix it. Please refer to the attached Fig.25 To Attachment Fig.30 The figure takes the connection relationship between the first flange 6 and the flange mounting seat 5 as an example for explanation, wherein the attached Fig.25 To Attachment Fig. 27 When the display is 0°, the connection diagram between the first flange 6 and the flange mounting seat 5 is shown. In the figure, the first flange 6 and the flange mounting seat 5 are fixed by eight screws. Fig.28 To Attachment Fig.30 It shows a schematic diagram of the connection between the first flange 6 and the flange mounting seat 5 when rotated 22.50°. In the figure, the first flange 6 and the flange mounting seat 5 are fixed by six screws.

[0062] The present invention uses more than two groups of flange structures with inclined mounting surfaces to accurately adjust the direction, distance, etc. of the probe, thereby improving the versatility of the entire energy spectrometer and reducing the use cost.

Claims

1. A multi-element focusing device for an EDS spectrometer, characterized by: The device comprises a flange mounting seat (5), a detector mounting seat (9) and two or more flanges, wherein the two or more flanges are mounted between the flange mounting seat (5) and the detector mounting seat (9), and each flange has at least one mounting surface that is inclined, wherein the flanges arranged at both ends are end flanges, and the flange arranged in the middle is an intermediate flange.

2. The multi-element focusing device of EDS spectrometer according to claim 1, characterized in that: The flange mounting seat (5) is in the shape of a ring, and the two mounting surfaces are arranged in parallel. The flange mounting seat (5) is provided with a first mounting hole (51) for mounting the flange mounting seat (5) and the scanning electron microscope (SEM) mounting wall (1) together, the middle of the flange mounting seat (5) is a first through hole (52) for inserting the detector (3), and the flange mounting seat (5) is provided with a second mounting hole (53) for mounting the end flange.

3. The multi-element focusing device of EDS spectrometer according to claim 1, characterized in that: The detector mounting seat (9) is annular in shape, with two mounting surfaces arranged in parallel. A sixth mounting hole (91) for mounting an end flange is provided on the detector mounting seat (9), and a fifth through hole (92) for inserting the detector (3) is provided in the middle of the detector mounting seat (9).

4. The multi-element focusing device of EDS spectrometer according to claim 1, characterized in that: The end flange is in the shape of a ring, wherein the angle between one mounting surface and the axis of the end flange is 90°, and the angle between the other mounting surface and the axis of the end flange is non-90°. The end flange is provided with a waist-shaped hole, and there are six waist-shaped holes, which are evenly distributed along the center of the end flange. The number of waist-shaped holes is not equal to the number of mounting holes on the flange mounting seat (5). A step is provided at the bottom of the waist-shaped hole. The middle of the end flange is a through hole for inserting the detector (3). The end flange is provided with a mounting hole for mounting other flanges or a detector mounting seat (9).

5. The multi-element focusing device for EDS spectrometer according to claim 4, characterized in that: The angle α between the two mounting surfaces of the end flange is between 2° and 8°, preferably 5°.

6. The multi-element focusing device for EDS spectrometer according to claim 4, characterized in that: A scale is arranged on the outer side of the end flange along the circumferential direction.

7. The multi-element focusing device for EDS spectrometer according to claim 1, characterized in that: The intermediate flange is in the shape of a ring, and the angles between its two mounting surfaces and the axis of the intermediate flange are all non-90°. The intermediate flange is provided with a waist-shaped hole, and the waist-shaped hole is arranged corresponding to the mounting holes on the adjacent flange. There are six waist-shaped holes, and the six waist-shaped holes are evenly distributed along the circumference of the center of the intermediate flange. A step is arranged at the bottom of the waist-shaped hole. The middle of the intermediate flange is a through hole for inserting the detector (3). The intermediate flange is provided with a mounting hole for mounting the adjacent flange. The multi-element focusing device of the EDS spectrometer according to claim 7 is characterized in that the angle β between the two mounting surfaces of the intermediate flange is between 4° and 16°, preferably 10°.

8. The multi-element focusing device for EDS spectrometer according to claim 7, characterized in that: The two mounting surfaces of the intermediate flange are symmetrically arranged.

9. The multi-element focusing device for EDS spectrometer according to claim 7, characterized in that: The upper and lower sides of the outer circle of the middle flange are respectively provided with scales along the circumferential direction.

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