Annealing equipment for flexible perovskite solar cell panel and annealing method thereof

By setting up an annealing equipment for cooling chambers in the heating chamber, using the multi-layer annular structure of an annular partition plate and guide rollers, the existing equipment has large footprints and slow production beats, and the perovskite solar panels have been realized The efficient annealing and cooling of the system improves space utilization and production efficiency.

CN119255688APending Publication Date: 2025-01-03CNNC OPTOELECTRONICS TECH (SHANGHAI) CO LTD
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Patent Information

Application Number
CN202411645560.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-15
Publication Date
2025-01-03

AI Technical Summary

Technical Problem

When handling flexible perovskite solar panels, existing annealing equipment needs to continuously increase the number of furnace bodies to match the production speed, resulting in limited production beats and excessive footprint, which affects the layout and efficiency of the production line.

Method used

An annealing device is designed to achieve roll-to-roll annealing of perovskite solar panels by setting a cooling chamber in the heating chamber and forming a multi-layer annular structure using an annular partition plate and guide rollers, saving space and improving production. efficiency.

Benefits of technology

The equipment realizes annealing and cooling of perovskite solar panels by setting the cooling chamber in the heating chamber, occupying less space, improving space utilization, and improving production efficiency, solving the equipment's footprint The issue of limited production beats.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention discloses annealing equipment for a flexible perovskite solar cell panel. The annealing equipment comprises a first partition plate, a second partition plate, a third partition plate, a guide roller and a winding mechanism, the first partition plate, the second partition plate and the third partition plate are each of an annular structure. The second partition plate is arranged in the first partition plate; the third baffle plate is arranged in the second baffle plate; a heating chamber is formed between the first partition plate and the second partition plate; a cooling cavity is formed between the second partition plate and the third partition plate; the plurality of guide rollers are arranged in the heating chamber and the cooling chamber; the winding mechanism is rotatably arranged at the center position in the third partition plate; through the arrangement, the problems that the production takt of a battery is seriously restricted or the occupied area of the annealing equipment is very wide because the annealing equipment can only be matched with the production speed of the last procedure by continuously increasing the number of furnace bodies are solved.
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Description

Technical Field

[0001] The utility model relates to the technical field of solar cells, and in particular to an annealing device and an annealing method for a flexible perovskite solar cell panel. Background Art

[0002] The development of photovoltaic technology has received extensive attention from countries around the world. As a new type of solar cell, perovskite solar cells have attracted great attention in the photovoltaic field due to their advantages such as high energy conversion efficiency, low cost, low-temperature preparation, and flexible components.

[0003] Lightweight and flexible perovskite solar cells have broad prospects in building integrated photovoltaics, wearable electronics, portable energy systems and aerospace applications. Flexible perovskite solar modules can be quickly produced through a roll-to-roll process to achieve the industrial application of perovskite solar panels. For the functional layers of different types of perovskite solar panels, such as titanium oxide layers, nickel oxide layers, and functional layers prepared from various oxides, they all need to be uniformly annealed by roll-to-roll unfolding, and even annealed under a protective atmosphere. At present, commonly used annealing equipment can only match the production speed of the previous process by continuously increasing the number of furnaces, which will seriously restrict the production rhythm of the battery or the annealing equipment will occupy a large area, which is very unfavorable to the production line layout and actual production efficiency. Summary of the invention

[0004] In view of this, the present application provides an annealing device and an annealing method for producing perovskite for flexible perovskite solar panels, which saves a certain amount of space by arranging the cooling chamber in the heating chamber.

[0005] According to one aspect of the present application, an annealing device for a flexible perovskite solar cell panel is provided, which is suitable for processing a flexible perovskite solar cell panel during a production process, and includes a first baffle plate, a second baffle plate, a third baffle plate, a guide roller, and a winding mechanism; the first baffle plate, the second baffle plate, and the third baffle plate are all annular structures, and through holes are provided on the first baffle plate, the second baffle plate, and the third baffle plate; the second baffle plate is arranged inside the first baffle plate, and there is a certain distance between the outer peripheral side of the second baffle plate and the inner peripheral side of the first baffle plate ; The third baffle plate is arranged inside the second baffle plate, and there is a certain distance between the outer peripheral side of the third baffle plate and the inner peripheral side of the second baffle plate; a heating chamber is formed between the first baffle plate and the second baffle plate; a cooling chamber is formed between the second baffle plate and the third baffle plate; there are multiple guide rollers, and the guide rollers are arranged in the heating chamber and the cooling chamber, suitable for conveying the perovskite solar cell panel and controlling the conveying direction; the winding mechanism is rotatably arranged at the center position in the third baffle plate, suitable for winding up the perovskite solar cell panel.

[0006] In a possible implementation, the number of guide rollers disposed in the heating chamber is more than two, and the guide rollers gradually approach from the inner peripheral side of the first baffle plate to the outer peripheral side of the second baffle plate, and are disposed around the second baffle plate.

[0007] In a possible implementation, the number of guide rollers disposed in the cooling chamber is more than two, and the guide rollers gradually approach from the inner peripheral side of the second baffle plate to the outer peripheral side of the third baffle plate, and are disposed around the first baffle plate.

[0008] In a possible implementation, a thermal insulation layer is provided on the outer peripheral side of the first baffle plate, the outer peripheral side of the second baffle plate, and the outer peripheral side of the third baffle plate.

[0009] In a possible implementation manner, the diameter of the guide roller is adjustable.

[0010] In a possible implementation, the setting position of the guide roller is adjustable.

[0011] In a possible implementation, the diameter of the guide roller is α, and the range of α is: 0.01m≤α≤0.02m.

[0012] In one possible implementation, a temperature control system and an atmosphere control system are provided on the inner side of the first baffle plate and the inner side of the second baffle plate; the temperature control system includes a temperature control meter, a solid-state relay, a heating element and a thermocouple group; the atmosphere control system includes a vacuum gauge and a charging and discharging pipeline.

[0013] In one possible implementation, the first baffle plate, the second baffle plate and the third baffle plate are rectangular ring structures or circular ring structures; the heating chamber and the cooling chamber are vacuum chambers or gas chambers.

[0014] In one possible implementation, the annealing treatment is performed using the above-mentioned device, comprising the following steps: the heating chamber and the cooling chamber are configured as vacuum chambers or gas chambers according to the needs of the previous step of the device; the non-film side of the perovskite solar cell panel is in contact with the guide roller; the guide roller drives the perovskite solar cell panel to pass through the heating chamber and the cooling chamber in sequence, and finally a winding mechanism winds up the annealed perovskite solar cell panel.

[0015] The beneficial effects of the present invention are as follows: by arranging a first baffle plate, a second baffle plate, a third baffle plate, a guide roller, a unwinding mechanism and a rewinding mechanism, the first baffle plate, the second baffle plate and the third baffle plate are arranged in order to form two independent chambers; the first baffle plate, the second baffle plate and the third baffle plate are all annular structures, and the first baffle plate, the second baffle plate and the third baffle plate are arranged in annular shapes in order to save a certain amount of space and facilitate the rewinding of the perovskite solar cell panel, and through holes are arranged on the first baffle plate, the second baffle plate and the third baffle plate, so that the perovskite solar cell panel can pass through the heating chamber and the cooling chamber in turn; the second baffle plate is arranged inside the first baffle plate, and there is a certain distance between the outer peripheral side of the second baffle plate and the inner peripheral side of the first baffle plate, and a heating chamber is formed between the first baffle plate and the second baffle plate, and such an arrangement makes the formed heating chamber have a certain large space The third baffle plate is arranged inside the second baffle plate, and there is a certain distance between the outer peripheral side of the third baffle plate and the inner peripheral side of the second baffle plate, and a cooling chamber is formed between the second baffle plate and the third baffle plate. Such an arrangement is to make the formed cooling chamber have a larger space; there are multiple guide rollers, and the guide rollers are arranged in the heating chamber and the cooling chamber. The guide rollers are arranged to control the direction of the perovskite solar cell panel and drive the perovskite solar cell panel to move; the winding mechanism is rotatably arranged at the center position in the third baffle plate, and is suitable for winding the perovskite solar cell panel after cooling; through the above arrangement, the present invention arranges the cooling chamber in the heating chamber, and is two independent chambers, which can anneal and cool the perovskite solar cell panel, and occupies less space, saves the space of the production room, and improves the space utilization rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 A schematic diagram showing the specific structure of an annealing device for a flexible perovskite solar cell panel according to an embodiment of the present application is shown. DETAILED DESCRIPTION

[0017] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0018] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar symbols throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0019] In the description of the present invention, it is necessary to understand that the terms “center”, “longitudinal”, “lateral”, “length”, “width”, “up”, “down”, “front”, “back”, “left”, “right”, “vertical”, “horizontal”, “top”, “bottom”, “inside”, “outside”, “clockwise”, “counterclockwise”, “axial”, “radial”, “circumferential”, etc., indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention or simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0020] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0021] In the present invention, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", "fix", "join", "hinge", etc. should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0022] like Figure 1As shown, the annealing device for the flexible perovskite solar cell panel includes a first baffle plate 110, a second baffle plate 120, a third baffle plate 130, a guide roller 200, a reeling mechanism 310 and a reeling mechanism 320; the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all annular structures, and the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all provided with through holes; the second baffle plate 120 is arranged inside the first baffle plate 110, and there is a certain distance between the outer peripheral side of the second baffle plate 120 and the inner peripheral side of the first baffle plate 110; the third baffle plate 130 is provided Inside the second baffle plate 120, there is a certain distance between the outer peripheral side of the third baffle plate 130 and the inner peripheral side of the second baffle plate 120; a heating chamber 300 is formed between the first baffle plate 110 and the second baffle plate 120; a cooling chamber 400 is formed between the second baffle plate 120 and the third baffle plate 130; a plurality of guide rollers 200 are provided, and the guide rollers 200 are provided in the heating chamber 300 and the cooling chamber 400, which are suitable for conveying the perovskite solar cell panel and controlling the conveying direction; the winding mechanism 520 is rotatably provided at the center position in the third baffle plate 130, which is suitable for collecting the perovskite solar cell panel.

[0023] Specifically, the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are arranged to form two independent chambers; the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all annular structures, so that the whole forms a multi-layer annular structure, forming a roll-to-roll chamber, and the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are arranged in annular shape to save a certain amount of space and facilitate the reeling of the perovskite solar cell panel, and the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all provided with through holes, and the size of the through holes is similar to the thickness of the perovskite solar cell; the second baffle plate 120 is arranged inside the first baffle plate 110, and there is a certain distance between the outer peripheral side of the second baffle plate 120 and the inner peripheral side of the first baffle plate 110, and the distance between the first baffle plate 110 and the second baffle plate 120 A heating chamber 300 is formed between the second baffle plates 120, and this arrangement is to make the formed heating chamber 300 have a certain large space; the third baffle plate 130 is arranged inside the second baffle plate 120, and there is a certain distance between the outer peripheral side of the third baffle plate 130 and the inner peripheral side of the second baffle plate 120, and a cooling chamber 400 is formed between the second baffle plate 120 and the third baffle plate 130, and this arrangement is to make the formed cooling chamber 400 have a larger space; a plurality of guide rollers 200 are arranged, and the guide rollers 200 are arranged in the heating chamber 300 and the cooling chamber 400, and the guide rollers 200 are arranged in the purpose of controlling the direction of the perovskite solar cell panel while also being able to drive the perovskite solar cell panel to move; the winding mechanism 520 is rotatably arranged at the center position in the third baffle plate 130, and is suitable for winding the perovskite solar cell panel after cooling.

[0024] In one possible implementation, the number of guide rollers 200 arranged in the heating chamber 300 is more than two, and they are arranged from the inner peripheral side of the first baffle plate 110 to the outer peripheral side of the second baffle plate 120; the number of guide rollers 200 arranged in the cooling chamber 400 is more than two, and they are arranged from the inner peripheral side of the second baffle plate 120 to the outer peripheral side of the third baffle plate 130.

[0025] Specifically, Figure 1 As shown, in order to enable the perovskite solar cell panel to smoothly enter the heating chamber 300 for annealing and then enter the cooling chamber 400 for cooling, the guide roller 200 is arranged at a position as shown in FIG. Figure 1 As shown, Figure 1Taking the setting direction of the guide roller 200 in the example, but not limited to this embodiment, the guide roller 200 starts from the inner side of the first baffle plate 110 and the right side of the unwinding mechanism. Each time a guide roller 200 is set, the newly set guide roller 200 will be closer to the outer peripheral side of the second baffle plate 120. When the guide roller 200 is set to the left side of the second baffle plate 120 and near the switch valve of the second baffle plate 120, the setting of the guide roller 200 in the heating chamber 300 is completed; the setting of the guide roller 200 in the cooling chamber 400 is as follows Figure 1 As shown, the guide roller 200 starts from the inner side of the second baffle plate 120 and on the right side near the switch valve of the second baffle plate. Each time a new guide roller 200 is set, it will gradually approach the outer peripheral side of the third baffle plate 130. The guide roller 200 is set around the third baffle plate 130 until it ends on the left side of the third baffle plate 130 and near the switch valve of the third baffle plate 130; a guide roller 200 is also set on the inner side of the third baffle plate 130, which is used to guide the perovskite solar cell panel entering the third baffle plate 130 to the winding mechanism; and the speed of all guide rollers 200 is the same, so that the perovskite solar cell panel moves rapidly.

[0026] In a possible implementation, a thermal insulation layer 140 is disposed on the outer peripheral side of the first baffle plate 110 , the outer peripheral side of the second baffle plate 120 , and the outer peripheral side of the third baffle plate 130 .

[0027] Specifically, Figure 1 As shown, in order to ensure that the temperature in the heating chamber 300 and the cooling chamber 400 does not lose, a thermal insulation layer 140 is provided on the outer peripheral side of the first baffle plate 110, the outer peripheral side of the second baffle plate 120 and the outer peripheral side of the third baffle plate 130 to play a role in heat preservation, or the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are made of heat-insulating materials, which can also achieve a heat-insulating effect and avoid temperature loss in the heating chamber 300 and the cooling chamber 400.

[0028] In a possible implementation, the diameter of the guide roller 200 is adjustable; and the setting position of the guide roller 200 is adjustable.

[0029] Specifically, according to the needs of actual conditions, the required annealing time and cooling time may be different due to different actual conditions. At this time, the diameter of the guide roller 200 and the position of the guide roller 200 may be adjusted according to the needs of actual conditions. At the same time, the number of turns of the guide roller 200 may also be increased or reduced.

[0030] In a possible implementation, the diameter of the guide roller is α, and the range of α is: 0.01m≤α≤0.02m.

[0031] Specifically, Figure 1 As shown, the diameter of the guide roller 200 ranges from 0.01 m to 0.2 m, ensuring the integrity of the flexible perovskite solar cell panel film material when it travels on the roller system with this curvature.

[0032] In one possible implementation, a temperature control system and an atmosphere control system are provided on the inner side of the first baffle plate 110 and the inner side of the second baffle plate 120; the temperature control system includes a temperature control meter, a solid-state relay, a heating element and a thermocouple group; the atmosphere control system includes a vacuum gauge and a charging and discharging pipeline.

[0033] Specifically, the temperature control system and the atmosphere control system are provided to ensure the temperature uniformity and the annealing atmosphere environment of the film during the annealing process.

[0034] In a possible implementation, the first baffle plate 110 , the second baffle plate 120 , and the third baffle plate 130 are rectangular ring structures or circular ring structures.

[0035] Specifically, Figure 1 As shown, the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are not only circular ring structures but also rectangular ring structures, as long as the whole can be a multi-layer ring structure.

[0036] In a possible implementation, the heating chamber 300 and the cooling chamber 400 may be vacuum chambers or gas chambers.

[0037] Specifically, when the roll-to-roll annealing equipment is connected with the vacuum coating equipment, the heating chamber 300 and the cooling chamber 400 can be vacuum chambers to maintain the vacuum environment for coating and annealing and ensure the quality of coating and annealing crystallization; when the roll-to-roll annealing equipment is connected with the non-vacuum coating equipment, a certain flow of protective gas can be introduced into the heating chamber 300 and the cooling chamber 400 to maintain the annealing environment and ensure the quality of thin film deposition and annealing crystallization.

[0038] In order to prevent the heating chamber and the cooling chamber from interfering with each other, a switch valve is provided on the through hole. The switch valve is provided so that when not in use, the switch valve can be closed so that the two chambers are not connected. Moreover, the switch valve is small and can only pass the perovskite solar cell panel. Therefore, opening the switch valve during use will not cause the two chambers to affect each other.

[0039] In order to enable the perovskite solar cell panel to enter the heating chamber 300 from the previous device, an unwinding mechanism 510 is provided between the previous device and the heating chamber 300, and the unwinding mechanism 510 is suitable for unwinding the perovskite solar cell panel.

[0040] The annealing treatment is performed using the above-mentioned equipment, including the following steps: the heating chamber 300 and the cooling chamber 400 are set to be a vacuum chamber or a gas chamber according to the needs of the equipment in the previous step; the non-film side of the perovskite solar cell panel is in contact with the guide roller 200; the guide roller 200 drives the perovskite solar cell panel to pass through the heating chamber 300 and the cooling chamber 400 in sequence, and finally the winding mechanism 520 winds up the annealed perovskite solar cell panel.

[0041] The perovskite solar cell panel is annealed in a roll-to-roll chamber through the above steps.

[0042] When the present invention is used: first, according to the needs of the situation, the heating chamber 300 and the cooling chamber 400 are made into vacuum chambers or gas chambers, and the perovskite solar cell panel is placed through the unwinding mechanism 510, and guided by the guide roller 200, and the surface of the perovskite solar cell panel with the film does not contact the guide roller 200, and the perovskite solar cell panel is driven by the guide roller 200 to pass through the heating chamber 300 and the cooling chamber 400 at a uniform speed for annealing, and finally reaches the winding mechanism 520.

[0043] The present application sets the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 to form two independent chambers; the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all annular structures, so that the whole forms a multi-layer annular structure, and it is convenient to roll up the perovskite solar cell panel, and the first baffle plate 110, the second baffle plate 120 and the third baffle plate 130 are all provided with switch valves, and the switch valves are provided so that the switch valves can be closed when not in use, and the switch valves are small and can only pass the perovskite solar cell panel, so opening the switch valves when in use will not cause the two chambers to affect each other;

[0044] A heating chamber 300 is formed between the first baffle plate 110 and the second baffle plate 120, and a cooling chamber 400 is formed between the second baffle plate 120 and the third baffle plate 130; the guide roller 200 is provided to control the direction of the perovskite solar cell panel and drive the perovskite solar cell panel to move; the unwinding mechanism 510 is suitable for releasing the perovskite solar cell panel to be annealed and cooled; the rewinding mechanism 520 is suitable for rewinding the perovskite solar cell panel after cooling; a heat insulation layer 140 is provided on the outer peripheral side of the first baffle plate 110, the outer peripheral side of the second baffle plate 120 and the outer peripheral side of the third baffle plate 130 to play a role in heat preservation; the heating chamber 300 and the cooling chamber 400 can be a vacuum chamber or a gas chamber in order to adapt to different connection equipment;

[0045] Through the above settings, the present application not only saves space on the laboratory table and improves space utilization, but also can adapt to different connection equipment, which is more practical. It solves the technical problem that the annealing equipment can only match the production speed of the previous process by continuously increasing the number of furnace bodies, which will seriously restrict the production rhythm of the battery or the annealing equipment will occupy a very large area.

[0046] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical solutions and concepts of the present invention within the scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. An annealing device for a flexible perovskite solar cell panel, characterized in that: It includes a first baffle plate, a second baffle plate, a third baffle plate, a guide roller and a winding mechanism; The first baffle plate, the second baffle plate and the third baffle plate are all annular structures, and the first baffle plate, the second baffle plate and the third baffle plate are all provided with through holes; The second baffle plate is arranged inside the first baffle plate, and there is a certain distance between the outer circumference of the second baffle plate and the inner circumference of the first baffle plate; The third baffle plate is arranged inside the second baffle plate, and there is a certain distance between the outer circumference of the third baffle plate and the inner circumference of the second baffle plate; A heating chamber is formed between the first baffle plate and the second baffle plate; A cooling chamber is formed between the second baffle plate and the third baffle plate; The number of the guide rollers is multiple, and the guide rollers are arranged in the heating chamber and the cooling chamber, and are suitable for conveying the perovskite solar cell panel and controlling the conveying direction; The rolling mechanism is rotatably arranged at a central position in the third baffle plate, and is suitable for rolling up the perovskite solar cell panel.

2. The annealing device for a flexible perovskite solar cell panel according to claim 1, characterized in that: The number of guide rollers arranged in the heating chamber is more than two, and they are gradually approached from the inner peripheral side of the first baffle plate to the outer peripheral side of the second baffle plate, and are arranged around the second baffle plate.

3. The annealing device for a flexible perovskite solar cell panel according to claim 1 or 2, characterized in that: The number of guide rollers arranged in the cooling chamber is more than two, and they are gradually approached from the inner peripheral side of the second baffle plate to the outer peripheral side of the third baffle plate, and are arranged around the first baffle plate.

4. The annealing device for a flexible perovskite solar cell panel according to claim 1, characterized in that: The outer peripheral side of the first baffle plate, the outer peripheral side of the second baffle plate and the outer peripheral side of the third baffle plate are all provided with a thermal insulation layer.

5. The annealing device for a flexible perovskite solar cell panel according to claim 4, characterized in that: The diameter of the guide roller is adjustable.

6. The annealing device for a flexible perovskite solar cell panel according to claim 5, characterized in that: The setting position of the guide roller is adjustable.

7. The annealing device for a flexible perovskite solar cell panel according to claim 6, characterized in that: The diameter of the guide roller is α, and the range of α is: 0.01m≤α≤0.02m.

8. The annealing device for a flexible perovskite solar cell panel according to claim 6, characterized in that: The inner side of the first baffle plate and the inner side of the second baffle plate are both provided with a temperature control system and an atmosphere control system; The temperature control system includes a temperature control meter, a solid-state relay, a heating element and a thermocouple group; The atmosphere control system includes a vacuum gauge and a gas charging and discharging pipeline.

9. The annealing device for a flexible perovskite solar cell panel according to claim 1, characterized in that: The first baffle plate, the second baffle plate and the third baffle plate are rectangular ring structures or circular ring structures; The heating chamber and the cooling chamber are vacuum chambers or gas chambers.

10. A method for annealing a perovskite solar cell panel, characterized in that: The annealing process is carried out using the apparatus of claims 1 to 9, comprising the following steps: The heating chamber and the cooling chamber are configured as vacuum chambers or gas chambers according to the needs of the equipment in the previous step; The non-film side of the perovskite solar cell panel is in contact with the guide roller; The guide roller drives the perovskite solar cell panel to pass through the heating chamber and the cooling chamber in sequence, and finally the winding mechanism winds up the annealed perovskite solar cell panel.