Integrated vacuum obtaining system equipment

By integrating vacuum acquisition system equipment, unifying the control of air intake and exhaust, and setting up fish-scale structure air intake ports and negative pressure sensors, the risk of flammable and explosive gas leakage of existing equipment is solved, achieving safety and early warning functions, and reducing the risk of combustion and explosion.

CN119267149APending Publication Date: 2025-01-07ZHONGKEYI (NANTONG) SEMICON EQUIP CO LTD +1
View PDF 0 Cites 0 Cited by

Patent Information

Application Number
CN202411465475.8
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-21
Publication Date
2025-01-07

AI Technical Summary

Technical Problem

The air intake and exhaust pipes of existing vacuum equipment are exposed to the atmosphere, posing a risk of flammable and explosive gas leakage, resulting in a high risk of combustion and explosion. Furthermore, process gas leakage during equipment operation may cause fires or explosions.

Method used

The design incorporates a single integrated vacuum system, which integrates vacuum generation equipment, nitrogen heating equipment, plate valves, overall control system, piping, and piping heating equipment within a cabinet. All components are controlled via a control panel. The cabinet door features a fish-scale structured air inlet, while the top houses the cabinet exhaust outlet, negative pressure sensor, and local exhaust fan. The exhaust outlet is a 0.153-meter circular pipe with a negative pressure of -250Pa and a local resistance coefficient of 0.5. An alarm is included for timely warning.

Benefits of technology

It reduces the concentration of flammable and explosive gases, decreases the risk of combustion and explosion, provides timely warnings to avoid accidents, and improves equipment safety.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN119267149A_ABST
    Figure CN119267149A_ABST
Patent Text Reader

Abstract

The invention discloses an integrated vacuum obtaining system device which comprises a cabinet body (1), a vacuum obtaining device (4), a nitrogen heating device (9), a plate valve (3), an overall control system (5), a pipeline (6) and a pipeline heating device (8) are arranged in the cabinet body (1), and the cabinet body (1) controls all switches of the integrated vacuum obtaining system device through a control panel (2). The control panel (2) monitors vacuum to obtain operation data of system equipment, if abnormity occurs, an alarm is given out in time through the alarm (7), a cabinet door of the cabinet body (1) is provided with a cabinet air inlet (10), and the top of the cabinet body (1) is provided with a cabinet air outlet (11), a negative pressure sensor and a local exhaust fan. The vacuum obtaining equipment and the pipeline are arranged in the cabinet, so that early warning can be performed in time, and flammable and explosive risks are reduced.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum obtaining equipment and relates to an integrated vacuum obtaining system equipment. Background Art

[0002] The existing vacuum obtaining equipment and its accessories have their own control systems, many control panels, and loose logical connections. The air inlet and exhaust pipes of the vacuum obtaining equipment are exposed to the atmosphere. When extracting flammable and explosive gases, there is a risk of leakage at the inlet and exhaust pipe interfaces, which causes flammable and explosive gases to diffuse in the air and cannot be discharged by the plant administration in time, resulting in extremely high risks of combustion and explosion.

[0003] The air inlet and exhaust pipes of existing vacuum acquisition equipment are exposed to the atmosphere. When extracting flammable and explosive gases, there is a risk of leakage at the inlet and exhaust pipe interfaces, which causes flammable and explosive gases to diffuse in the air and cannot be discharged by the plant administration in time, posing an extremely high risk of combustion and explosion.

[0004] A small amount of process gas leakage may occur during the operation of the equipment, and the process gas will accumulate in the chassis, which is very likely to cause serious accidents such as fire and explosion that endanger the safety of life and property. Summary of the invention

[0005] Purpose of the invention: The purpose of the present invention is to solve the deficiencies in the prior art and provide an integrated vacuum obtaining system.

[0006] The integrated vacuum acquisition system equipment includes a cabinet body. The interior of the cabinet body is arranged with vacuum acquisition equipment, nitrogen heating equipment, plate valves, an overall control system, pipelines and pipeline heating equipment. The cabinet body controls all switches of the integrated vacuum acquisition system equipment through a control panel. The control panel monitors the operating data of the vacuum acquisition system equipment. If an abnormality occurs, an alarm is promptly sounded through an alarm. A cabinet air inlet is arranged on the cabinet door of the cabinet body, and a cabinet exhaust port, a negative pressure sensor and a local exhaust fan are arranged on the top of the cabinet body.

[0007] A further improvement of the present invention is that the cabinet exhaust port is made of a round tube with a diameter of 0.153 meters, the length of the cabinet body is 1.3 meters, the width of the cabinet body is 0.8 meters, and the gas volume in the cabinet body is 1.64 cubic meters.

[0008] A further improvement of the present invention is that the negative pressure value of the cabinet exhaust port is -250Pa, and the air pressure value in the cabinet body is 101325Pa.

[0009] A further improvement of the present invention is that, according to the area ratio of the cabinet exhaust port to the cabinet body, a local resistance coefficient of 0.5 is obtained.

[0010] A further improvement of the present invention is that, according to the formula: ; get: ; in u is the gas flow rate in the pipeline, ΔP is the pressure drop value, ρ is the density of air at 20°C; is the local resistance coefficient.

[0011] A further improvement of the present invention is that the internal gas flow rate of the circular tube is: ; in u is the gas flow rate in the pipeline, A 2 is the cross-sectional area of ​​the cabinet exhaust port, Q is the gas flow value.

[0012] A further improvement of the present invention is that the gas exchange efficiency in the cabinet body is: ; in Q is the gas flow value; V is the gas volume in the cabinet, and 2 is the safety factor.

[0013] A further improvement of the present invention is that the air inlet of the cabinet is a fish scale structure.

[0014] Compared with the prior art, the integrated vacuum obtaining system device provided by the present invention achieves at least the following beneficial effects: The integrated vacuum obtaining system equipment of the present invention can arrange the vacuum obtaining equipment and pipelines in the cabinet of the integrated vacuum obtaining system, control the switches of all equipment through a control panel, monitor their operating data, arrange an air inlet with a fish scale structure on the cabinet door, and arrange a cabinet exhaust port, a negative pressure sensor and a local exhaust fan on the top of the cabinet body. Even if a leakage occurs, it can be extracted by the local exhaust fan, thereby reducing the concentration of flammable and explosive gases in the cabinet, thereby reducing the risk of combustion and explosion. The negative pressure sensor can detect the pressure difference between the inside and outside of the cabinet at all times. If the gas extraction function is reduced or fails, a timely warning can be given through an alarm, and an alarm can be quickly sounded to avoid accidents. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view of the integrated vacuum obtaining system device of the present invention; Figure 2 It is the internal structure diagram of the present invention.

[0016] In the figure: 1. Cabinet body; 2. Control panel; 3. Plate valve; 4. Vacuum acquisition equipment; 5. Overall control system; 6. Pipeline; 7. Alarm; 8. Pipeline heating equipment; 9. Nitrogen heating equipment; 10. Cabinet air inlet; 11. Cabinet exhaust port. DETAILED DESCRIPTION

[0017] Various exemplary embodiments of the present invention are now described in detail. It should be noted that unless otherwise specifically stated, the relative arrangement of the components and steps, numerical expressions and numerical values ​​described in these embodiments do not limit the scope of the present invention. The following description of at least one exemplary embodiment is actually only illustrative and is not intended to be any limitation on the present invention and its application or use.

[0018] The techniques, methods and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and devices should be considered as part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0019] See the instruction manual Figure 1-2 The integrated vacuum acquisition system equipment comprises a cabinet body 1, wherein the interior of the cabinet body 1 is provided with a vacuum acquisition device 4, a nitrogen heating device 9, a plate valve 3, an overall control system 5, a pipeline 6 and a pipeline heating device 8. The cabinet body 1 controls all switches of the integrated vacuum acquisition system equipment through a control panel 2. The control panel 2 monitors the operating data of the vacuum acquisition system equipment. If an abnormality occurs, an alarm is promptly sounded through an alarm 7. A cabinet air inlet 10 is arranged on the cabinet door of the cabinet body 1, and a cabinet exhaust port 11, a negative pressure sensor and a local exhaust fan are arranged on the top of the cabinet body 1.

[0020] The cabinet exhaust port 11 is made of a round tube with a diameter of 0.153 meters. The length of the cabinet body 1 is 1.3 meters. The width of the cabinet body 1 is 0.8 meters. The volume of gas in the cabinet body 1 is 1.64 cubic meters.

[0021] The negative pressure value of the cabinet exhaust port 11 is -250Pa, and the air pressure value in the cabinet body 1 is 101325Pa; According to the area ratio of the cabinet exhaust port 11 and the cabinet body 1, the local resistance coefficient is 0.5 according to the fluid manual; The cross-sectional area of ​​the cabinet exhaust port 11 is A2 = π∗0.153∗0.153 / 4 square meters; The cross-sectional area A1 of the cabinet body 1 is 1.3*0.8 square meters.

[0022] The exhaust resistance mainly comes from the sudden decrease in the pipe diameter at the exhaust port, that is, the local flow resistance: According to the formula: ; get: ; in u is the gas flow rate in the pipeline, ΔP is the pressure drop value, ρ is the density of air at 20°C; is the local resistance coefficient.

[0023] The internal gas flow rate of the circular tube is: ; in u is the gas flow rate in the pipeline, A 2 is the cross-sectional area of ​​the cabinet exhaust port, Q is the gas flow value.

[0024] The gas exchange efficiency in the cabinet body 1 is: ; in Q is the gas flow value; V is the gas volume in the cabinet body 1, and 2 is the safety factor.

[0025] Considering the various complex mechanical structures inside the chassis, the exhaust time required for possible gas leakage should be longer and a certain safety factor of 2 should be given.

[0026] The cabinet air inlet 10 is a fish-scale structure, which is conducive to the air circulation inside the cabinet body (1) and is convenient and reliable.

[0027] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described or replace them in similar ways, but they will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

Claims

1. An integrated vacuum obtaining system device, characterized in that: The cabinet body (1) comprises a cabinet body, wherein a vacuum obtaining device (4), a nitrogen heating device (9), a plate valve (3), an overall control system (5), a pipeline (6) and a pipeline heating device (8) are arranged inside the cabinet body (1); the cabinet body (1) controls all switches of the integrated vacuum obtaining system equipment through a control panel (2); the control panel (2) monitors the operating data of the vacuum obtaining system equipment, and if an abnormality occurs, an alarm is promptly issued through an alarm (7); a cabinet air inlet (10) is arranged on the cabinet door of the cabinet body (1); and a cabinet exhaust port (11), a negative pressure sensor and a local exhaust fan are arranged on the top of the cabinet body (1).

2. The integrated vacuum obtaining system equipment according to claim 1, characterized in that: The cabinet exhaust port (11) is made of a round tube with a diameter of 0.153 meters, the length of the cabinet body (1) is 1.3 meters, the width of the cabinet body (1) is 0.8 meters, and the volume of gas in the cabinet body (1) is 1.64 cubic meters.

3. The integrated vacuum obtaining system equipment according to claim 2, characterized in that: The negative pressure value of the cabinet exhaust port (11) is -250 Pa, and the air pressure value in the cabinet body (1) is 101325 Pa.

4. The integrated vacuum obtaining system equipment according to claim 2, characterized in that: According to the area ratio of the cabinet exhaust port (11) and the cabinet body (1), the local resistance coefficient is 0.

5.

5. The integrated vacuum obtaining system equipment according to claim 4, characterized in that: According to the formula: ; get: ; in u is the gas flow rate in the pipeline, ΔP is the pressure drop value, ρ is the density of air at 20°C; is the local resistance coefficient.

6. The integrated vacuum obtaining system equipment according to claim 5, characterized in that: The internal gas flow rate of the circular tube is: ; in u is the gas flow rate in the pipeline, A 2 is the cross-sectional area of ​​the cabinet exhaust port, Q is the gas flow value.

7. The integrated vacuum obtaining system equipment according to claim 6, characterized in that: The gas exchange efficiency in the cabinet body (1) is: ; in Q is the gas flow value; V is the volume of gas in the cabinet body (1), and 2 is the safety factor.

8. The integrated vacuum obtaining system equipment according to any one of claims 1 to 7, characterized in that: The cabinet air inlet (10) is a fish scale structure.