Rotary joint with modularized sealing structure for manufacturing integrated circuit

Through the design of modular seal structure and sealing module, the problem of insufficient machining accuracy and seal reliability of existing rotary joints is solved, and the reliability of high-precision sealing and multi-type media conveying is achieved. It is suitable for the strict work of integrated circuit manufacturing condition.

CN119289190APending Publication Date: 2025-01-10TENGXUAN TECH
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Patent Information

Application Number
CN202411315784.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-20
Publication Date
2025-01-10

AI Technical Summary

Technical Problem

The integrated machining structure of existing rotary joints leads to low machining accuracy, poor seal reliability and poor assembly process, which makes it difficult to meet the high requirements for cleanliness and multi-type media delivery in integrated circuit manufacturing.

Method used

The rotary joint adopts a modular sealing structure. By setting the moving end and the static end oil channel on the rotating shaft and axially aligning the sealing modules, the moving ring, sealing seat, static ring assembly and sealing spring are used to achieve high-precision sealing, combined with the separation Covers and leak tanks prevent media leakage and dust from entering.

Benefits of technology

It improves the assembly processability and seal reliability of the rotary joints, ensures high-precision processing and medium conveying sealing effect under severe working conditions, and is suitable for the high cleanliness requirements of integrated circuit manufacturing.

✦ Generated by Eureka AI based on patent content.

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    Figure CN119289190A_ABST
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Abstract

The invention provides a rotary joint with a modularized sealing structure for integrated circuit manufacturing, which comprises a shell and a rotary shaft inserted into the shell, a movable end oil duct is arranged on the rotary shaft, a static end oil duct corresponding to the movable end oil duct in position is arranged on the shell, and a sealing ring is arranged on the rotary shaft. A plurality of sealing modules corresponding to the static end oil channels are sequentially arranged in the axial direction, each sealing module comprises a movable ring, a sealing seat and two static ring assemblies, and the sealing modules can be combined on a rotating shaft according to the requirements of a medium channel in advance through the modular sealing structure. On one hand, the manufacturability of assembly assembling is improved, meanwhile, the sealing module serves as a component, machining precision can be improved conveniently, high-precision machining and processing of key components can be carried out, the overall sealing reliability can be guaranteed, and the sealing module is suitable for the strict working condition requirement of integrated circuit manufacturing.
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