Drying machine overload protection equipment for wafer processing and drying

Abstract

The invention relates to the technical field of wafer dryer circuit protection, in particular to a dryer overload protection device for wafer processing and drying, which comprises a circuit protection device, a circuit selection device and a plug-in device, a first damping spring is assembled and placed at the top of a second chuck, and an upper groove disc is assembled and placed at the top of a first sleeve disc; the bottom of a second conductive shell is assembled and placed at the top of the plug block; an upper power transmission frame and a first chuck are assembled and placed; a first conductive shell and the bottom end of a column block are assembled and placed; a second damping spring is assembled and placed at the bottom of a third chuck; the bottom end of the lower groove disc is assembled and placed on the top of the opposite disc, the bottom of the second sleeve disc and the top of the lower groove disc are assembled and placed, a pressing type installation structure convenient to assemble and replace is provided through the first damping spring, the second damping spring and the fuse wire, and the conductive connection structure is convenient to replace.

Description

Technical Field

[0001] The invention relates to the technical field of wafer drying machine circuit protection, in particular to an overload protection device for a wafer processing and drying dryer. Background Art

[0002] The power supply circuit of the wafer dryer uses an air switch or a fuse to achieve overload protection function. Taking the power supply circuit of the wafer dryer with a fuse as an example, the above-mentioned installed fuse is generally a glass tube fuse. The two ends of the glass tube fuse are placed in a limit position with the connecting piece. When the circuit voltage or current is too large, the fuse inside the glass tube will be heated and melted, making the entire circuit in an open circuit state, thereby avoiding damage to the electrical appliance.

[0003] The overload protection circuit devices of some wafer dryers usually use a single glass tube fuse to fit the connection structure of the power supply line and place it in a limit position. If the fuse in the glass tube blows, the staff needs to take out the blown fuse inside the glass tube for replacement, which affects the power supply recovery rate of the wafer dryer. The conductive connection structure placed in contact with the glass fuse is mostly a welded fixed power transmission structure, which is not convenient for replacing the conductive connection structure. Therefore, in view of the above problem, an overload protection device for a wafer processing and drying dryer is proposed. Summary of the invention

[0004] The object of the present invention is to provide an overload protection device for a wafer processing and drying dryer to solve the problem proposed in the above-mentioned background technology that a single glass tube fuse is placed in a close fit with the connection structure of the power supply line. If the fuse in the glass tube blows, the staff needs to take out the blown fuse inside the glass tube for replacement, which affects the power supply recovery rate of the wafer dryer. The conductive connection structure placed in close fit with the glass fuse is mostly a welded fixed power transmission structure, which is not convenient for replacing the conductive connection structure.

[0005] To achieve the above object, the present invention provides the following technical solutions: A wafer processing drying machine overload protection device comprises a circuit protection device, a circuit selection device and a plug-in device, wherein the circuit protection device is provided with a circuit selection device on the top, and the plug-in device is provided at the bottom of the circuit protection device, and the circuit protection device comprises a first housing, a second housing, a mounting plate, a first chuck, a second chuck, a third chuck, a fourth chuck, an upper power transmission frame, a fuse device, a power transmission assembly structure, a lower power transmission frame, a ring groove, a first slot, a second slot and a ring strip, the top and bottom ends of the first housing and the top and bottom ends of the second housing are fixedly provided with a mounting plate with an internal threaded hole, the first housing is fixedly provided with a first chuck, a second chuck, a third chuck and a fourth chuck, the upper power transmission frame comprises a round block, a column block, a strip plate and a slot, the bottom end of the round block is fixedly provided with a column block, and the round block is fixedly provided with one end of the round block close to the circuit selection device A strip plate is fixedly provided, and a slot hole is opened inside the strip plate. The power transmission assembly structure includes a pad, a plug, a first damping spring, a first set of discs, a second damping spring, a second set of discs, a conductive soft wire, an upper slot disc and a lower slot disc. A plug is fixedly provided inside the pad, and a first damping spring is assembled and placed on the top of the second chuck. The first set of discs is fixedly provided on the top support rod of the first damping spring. The second damping spring is assembled and placed on the bottom of the third chuck. The second set of discs is fixedly provided on the bottom support rod of the second damping spring. The top end line of the conductive soft wire is welded and fixed to the upper slot disc, and the bottom end line of the conductive soft wire is welded and fixed to the lower slot disc. The lower power transmission frame includes a placement disc, a pair of discs, a connecting plate and a connecting block. The top of the placement disc is fixedly provided with a pair of discs, and the placement disc is fixedly provided with a connecting plate at one end close to the plug-in device, and the bottom of the connecting plate is fixedly provided with a connecting block.

[0006] Preferably, the fuse device includes a first conductive shell, a glass tube, a second conductive shell and a fuse, the glass tube is fixedly arranged at the bottom of the first conductive shell, the glass tube is slidably assembled with the second conductive shell, the fuse is fixedly arranged at the top of the second conductive shell, and the fuse is slidably assembled with the first conductive shell.

[0007] Preferably, a ring groove is formed at one end of the first housing close to the second housing, a first card slot is formed at one end of the first housing close to the circuit selection device, a second card slot is formed at one end of the second housing close to the circuit selection device, and a ring strip is fixedly provided at one end of the second housing close to the first housing.

[0008] Preferably, the circuit selection device includes a lower cover shell, an upper cover shell, an insert disk block and an arc groove. The circuit selection device is an assembled structure. The upper cover shell is assembled and placed on the top of the lower cover shell. The insert disk block is fixedly arranged on the top of the lower cover shell. The top of the upper cover shell is provided with an arc groove. The insert disk block is slidably assembled and placed with the arc groove, and the slot hole is slidably assembled and placed with the insert disk block.

[0009] Preferably, the plug-in device includes a machine disk, a connecting frame, a plug-in shell and a column rod, the connecting frame is fixedly arranged inside the machine disk, the plug-in shell is fixedly arranged on the outer sides of the four sides of the connecting frame, the column rod is fixedly arranged on the inner wall of the bottom end of the plug-in shell, and the inner wall of the plug-in shell and the column rod are assembled and placed with the connecting block.

[0010] Preferably, the bottom of the first chuck is assembled and placed with the top of the round block and the top of the strip plate, and the column block is assembled and placed with the matching groove opened at the top of the first conductive shell.

[0011] Preferably, the top end of the upper trough plate is assembled and placed with the bottom end of the plug block, the bottom end of the upper trough plate is assembled and placed with the top end of the first set of plates, the top end of the lower trough plate is assembled and placed with the bottom end of the second set of plates, and the bottom end of the lower trough plate is assembled and placed with the top end of the opposing plate.

[0012] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, the main body of the circuit protection device adopts an assembled structure, the first damping spring is assembled and placed on the top of the second chuck, the conductive soft wire, the upper slot plate and the lower slot plate are prefabricated integral parts, the upper slot plate is assembled and placed on the top of the first set of plates, the bottom of the plug block is assembled and placed on the top of the upper slot plate, the first conductive shell, the glass tube, the second conductive shell and the fuse are assembled structures, the pad plate is manually pressed down slowly, at this time the first damping spring is squeezed, the bottom of the second conductive shell is assembled and placed on the top of the plug block, the upper power transmission frame and the first chuck are assembled and placed, and then slowly release the hand until the first conductive shell and the bottom of the column block are connected. Assemble and place, the second damping spring is assembled and placed at the bottom of the third chuck, the second set of discs is manually lifted upward, the second damping spring is squeezed, the lower power transmission frame is assembled and placed on the top of the fourth chuck, the bottom end of the lower slot disc is assembled and placed on the top of the opposite disc, and then slowly releases the hand until the bottom of the second set of discs and the top of the lower slot disc are assembled and placed. After the circuit protection device is assembled, the first damping spring and the second damping spring are always in a squeezed state. The above-mentioned first damping spring, the second damping spring and the fuse provide a press-type installation structure that is easy to assemble and replace, and is easy to replace the conductive connection structure; 2. In the present invention, the circuit selection device is an assembled structure and can be assembled with the strip plate. The strip plate is slidably assembled with the plug-in disk block through the slot hole. The upper cover shell is slidably assembled with the plug-in disk block through the arc slot. Internal threaded holes are provided on the outer side of the top of the lower cover shell and the outer side of the bottom of the upper cover shell. The lower cover shell and the upper cover shell can be assembled and fixed by external studs. The plug-in device is an assembled structure and can be assembled and placed with the connecting block. The plug-in shell and the column rod arranged on the top of the machine disk are assembled with the connecting block. The circuit protection device, the circuit selection device and the plug-in device together constitute an overload protection circuit, which is convenient for switching the load protection circuit and improving the power supply recovery rate of the overload protection circuit to the wafer dryer. The fuse that has been blown can be repaired and replaced within the regular maintenance time range of the overload protection circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the structure of the first housing and the second housing of the present invention; Figure 3 This is a schematic diagram of the internal structure of the first housing of the present invention; Figure 4 This is a schematic diagram of the internal structure of the second housing of the present invention; Figure 5 For the present invention Figure 4 A schematic diagram of the structure at A; Figure 6 This is a schematic diagram of the distribution structure of the upper transmission rack and the lower transmission rack of the present invention; Figure 7 It is a schematic diagram of the position structure of the first chuck, the second chuck, the third chuck and the fourth chuck of the present invention; Figure 8 For the present invention Figure 7 Schematic diagram of the structure at B; Fig. 9 For the present invention Figure 7 Schematic diagram of the structure at C; Fig.10 This is a schematic diagram of the structure of the upper power transmission rack of the present invention; Fig.11 It is a schematic diagram of the cross-sectional structure of the upper power transmission rack of the present invention; Fig.12 This is a schematic diagram of the structure of the lower power transmission rack of the present invention; Fig.13 It is a schematic diagram of the cross-sectional structure of the lower transmission frame of the present invention; Fig.14 This is a schematic diagram of the connection block structure of the present invention; Fig.15 It is a structural schematic diagram of the fuse device of the present invention; Fig.16 It is a schematic diagram of the cross-sectional structure of the fuse device of the present invention; Fig.17 It is a schematic diagram of the installation positions of the upper slot plate and the lower slot plate of the present invention; Fig.18 For the present invention Fig.17 Schematic diagram of the structure at D; Fig.19 For the present invention Fig.17 Schematic diagram of the structure at E; Fig. 20 It is a schematic diagram of the installation position of the fuse device of the present invention; Fig.21 For the present invention Fig. 20 Schematic diagram of the structure at F; Fig. 22 A schematic diagram of the installation position of the power transmission assembly structure of the present invention; Fig.23 It is a schematic diagram of the installation structure of the conductive cord, the upper slot plate and the lower slot plate of the present invention; Fig.24 It is a schematic diagram of the structure of the circuit selection device of the present invention; Fig.25 It is a schematic diagram of the disassembly and assembly structure of the lower cover shell and the upper cover shell of the present invention; Fig.26 It is a schematic diagram of the cross-sectional structure of the lower cover shell and the upper cover shell of the present invention; Fig. 27 It is a schematic diagram of the structure of the plug-in device of the present invention; Fig.28 This is a schematic diagram of the structure of the machine disk and the connecting frame of the present invention; Fig.29 It is a schematic diagram of the cross-sectional structure of the machine disk of the present invention.

[0014] In the figure: 1, circuit protection device; 101, first housing; 102, second housing; 103, mounting plate; 104, first chuck; 105, second chuck; 106, third chuck; 107, fourth chuck; 108, upper power transmission frame; 1081, round block; 1082, column block; 1083, strip plate; 1084, slot; 109, fuse device; 1091, first conductive shell; 1092, glass tube; 1093, second conductive shell; 1094, fuse; 110, power transmission assembly structure; 1101, pad; 1102, plug block; 1103, first damping spring ; 1104, first set of disks; 1105, second damping spring; 1106, second set of disks; 1107, conductive soft wire; 1108, upper slot disk; 1109, lower slot disk; 111, lower transmission frame; 1111, placement disk; 1112, pair of disks; 1113, connecting plate; 1114, connecting block; 112, ring groove; 113, first card slot; 114, second card slot; 115, ring bar; 2, circuit selection device; 21, lower cover shell; 22, upper cover shell; 23, disk block; 24, arc slot; 3, plug-in device; 31, machine disk; 32, connecting frame; 33, plug shell; 34, pole. DETAILED DESCRIPTION

[0015] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0016] In the embodiments of the present invention, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc. are based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limitations of the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance. Similarly, similar words such as "one", "an", or "the" do not indicate a quantitative limitation, but rather indicate the presence of at least one. Similar words such as "include" or "comprises" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0017] In addition, in the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0018] See also Figure 1-29 , the present invention provides a technical solution: A wafer processing drying machine overload protection device, comprising a circuit protection device 1, a circuit selection device 2 and a plug-in device 3, wherein the circuit protection device 1 is provided with the circuit selection device 2 at the top, and the plug-in device 3 is provided at the bottom of the circuit protection device 1, and the circuit protection device 1 comprises a first housing 101, a second housing 102, a mounting plate 103, a first chuck 104, a second chuck 105, a third chuck 106, a fourth chuck 107, an upper power transmission frame 108, a fuse device 109, a power transmission assembly structure 110, a lower power transmission frame 111, a ring groove 112, a first card slot 113, a second The card slot 114 and the ring strip 115, the top and bottom of the first housing 101 and the top and bottom of the second housing 102 are fixedly provided with a mounting plate 103 with an internal threaded hole, the first housing 101 is fixedly provided with a first chuck 104, a second chuck 105, a third chuck 106 and a fourth chuck 107, the upper power transmission frame 108 includes a round block 1081, a column block 1082, a strip 1083 and a slot 1084, the bottom of the round block 1081 is fixedly provided with a column block 1082, the end of the round block 1081 close to the circuit selection device 2 is fixedly provided with a strip 1083, and the strip 1084 is fixedly provided with a slot 1084. The power transmission assembly structure 110 includes a pad 1101, a plug 1102, a first damping spring 1103, a first set of discs 1104, a second damping spring 1105, a second set of discs 1106, a conductive flexible wire 1107, an upper slot disc 1108, and a lower slot disc 1109. The pad 1101 is fixed with a plug 1102, the top of the second chuck 105 is equipped with a first damping spring 1103, the top support rod of the first damping spring 1103 is fixed with the first set of discs 1104, and the bottom of the third chuck 106 is equipped with a second damping spring 1106. Spring 1105, the second damping spring 1105 is fixedly provided with a second set of discs 1106 at the bottom support rod, the top end line of the conductive soft wire 1107 is welded and fixed to the upper slot disc 1108, the bottom end line of the conductive soft wire 1107 is welded and fixed to the lower slot disc 1109, the lower power transmission frame 111 includes a plate 1111, a pair of plates 1112, a connecting plate 1113 and a connecting block 1114, the top of the plate 1111 is fixedly provided with a pair of plates 1112, the end of the plate 1111 close to the plug-in device 3 is fixedly provided with a connecting plate 1113, and the bottom of the connecting plate 1113 is fixedly provided with a connecting block 1114.

[0019] The fuse device 109 includes a first conductive shell 1091, a glass tube 1092, a second conductive shell 1093 and a fuse 1094. The glass tube 1092 is fixedly arranged at the bottom of the first conductive shell 1091, and the glass tube 1092 and the second conductive shell 1093 are slidably assembled. The fuse 1094 is fixedly arranged on the top of the second conductive shell 1093, and the fuse 1094 is slidably assembled with the first conductive shell 1091. When the circuit voltage or current in the overload protection device is too large, the fuse 1094 is first melted due to heat, thereby protecting the circuit.

[0020] An annular groove 112 is provided at one end of the first housing 101 close to the second housing 102, a first card slot 113 is provided at one end of the first housing 101 close to the circuit selection device 2, a second card slot 114 is provided at one end of the second housing 102 close to the circuit selection device 2, and an annular strip 115 is fixedly provided at one end of the second housing 102 close to the first housing 101; first, the internal threads of the mounting plate 103 provided at the bottom of the first housing 101 and the bottom of the second housing 102 are assembled by external studs, and then the internal threads of the mounting plate 103 provided at the top of the first housing 101 and the top of the second housing 102 are assembled by external studs, and the annular groove 112 contacts the annular strip 115 to form a cover of the circuit protection device 1, wherein a dust filter is fixedly provided inside the second housing 102, and external air enters the first housing 101 and the second housing 102 through the dust filter, so as to realize heat exchange and cooling between the external air and the conductive components inside the cover.

[0021] The circuit selection device 2 includes a lower cover shell 21, an upper cover shell 22, an insert disk block 23 and an arc groove 24. The circuit selection device 2 is an assembled structure. The upper cover shell 22 is assembled and placed on the top of the lower cover shell 21. The insert disk block 23 is fixedly arranged on the top of the lower cover shell 21. The top of the upper cover shell 22 is provided with an arc groove 24. The insert disk block 23 and the arc groove 24 are slidably assembled and placed, and the slot 1084 and the insert disk block 23 are slidably assembled and placed; the strip 1083 is slidably assembled with the insert disk block 23 through the slot 1084, and internal threaded holes are provided on the outer side of the top of the lower cover shell 21 and the outer side of the bottom of the upper cover shell 22. The assembly method of the external studs and the lower cover shell 21 and the upper cover shell 22 by threaded rotation facilitates the assembly of the circuit protection device 1 and the circuit selection device 2.

[0022] The plug-in device 3 includes a disk 31, a connecting frame 32, a plug-in shell 33 and a pole 34. The connecting frame 32 is fixedly arranged inside the disk 31, the plug-in shell 33 is fixedly arranged on the four outer sides of the connecting frame 32, and the pole 34 is fixedly arranged on the inner wall of the bottom end of the plug-in shell 33. The inner wall of the plug-in shell 33 and the pole 34 are assembled and placed with the connecting block 1114; through the above arrangement, it is convenient to assemble the circuit protection device 1 and the plug-in device 3.

[0023] The bottom of the first chuck 104 is assembled and placed with the top of the round block 1081 and the top of the strip 1083, and the column block 1082 is assembled and placed with the matching groove opened at the top of the first conductive shell 1091; the upper transmission frame 108 is clamped between the first chuck 104 and the fuse device 109, which is convenient for regular inspection and replacement of the upper transmission frame 108.

[0024] The top of the upper slot plate 1108 is assembled and placed with the bottom of the plug block 1102, the bottom of the upper slot plate 1108 is assembled and placed with the top of the first set of plates 1104, the top of the lower slot plate 1109 is assembled and placed with the bottom of the second set of plates 1106, and the bottom of the lower slot plate 1109 is assembled and placed with the top of the counter plate 1112; the conductive soft wire 1107, the upper slot plate 1108 and the lower slot plate 1109 are an integrated conductive structure, the top end wire and the bottom end wire of the conductive soft wire 1107 are stripped to expose part of the wire, and the hoop is manually pressed on the conductive soft wire 1107 07, at this time, the hoop is fitted with the upper slot disk 1108, and then the fitting end faces of the hoop and the upper slot disk 1108 are welded and fixed, and the hoop is manually pressed onto the bottom exposed wire of the conductive soft wire 1107, at this time, the hoop is fitted with the lower slot disk 1109, and then the fitting end faces of the hoop and the lower slot disk 1109 are welded and fixed, wherein the conductive soft wire 1107 is a spirally wound flexible wire, and the conductive soft wire 1107, the upper slot disk 1108 and the lower slot disk 1109 can be regularly disassembled, assembled and replaced as a whole.

[0025] Four circuit protection devices 1 are arranged in an annular manner on the outside of the circuit selection device 2 and the plug-in device 3. The first housing 101, the mounting plate 103, the first chuck 104, the second chuck 105, the third chuck 106 and the fourth chuck 107 together constitute a first single-sided cover shell. The first single-sided cover shell is provided with an annular groove 112 and a first groove 113 inside. The second housing 102 and the mounting plate 103 together constitute a second single-sided cover shell. The upper transmission frame 108 and the lower transmission frame 111 are both integrated conductive structures.

[0026] The power transmission assembly structure 110 is a conductive transmission structure installed between the bottom of the fuse device 109 and the top of the lower power transmission frame 111. A silicone strip is fixed inside the square hole opened at the top of the pad 1101. The pad 1101 and the plug 1102 are an integrated structure. The first damping spring 1103 and the first set of disks 1104 are an integrated structure. The second damping spring 1105 and the second set of disks 1106 are an integrated structure. The conductive soft wire 1107, the upper slot plate 1108 and the lower slot plate 1109 are an integrated conductive structure.

[0027] Working process: The present invention provides an overload protection circuit device for a wafer dryer, wherein a circuit protection device 1, a circuit selection device 2 and a plug-in device 3 together constitute an overload protection circuit, which has the function of facilitating switching of the load protection circuit, thereby improving the power supply recovery rate of the overload protection circuit to the wafer dryer. The first damping spring 1103, the second damping spring 1105 (the first damping spring 1103 and the second damping spring 1105 are conductive connection structures) and the fuse 1094 provide a push-type installation structure that is easy to assemble and replace, thereby facilitating regular replacement of the conductive connection structure.

[0028] The main body of the circuit protection device 1 adopts an assembled structure, wherein the first housing 101, the first chuck 104, the second chuck 105, the third chuck 106 and the fourth chuck 107 are an integrated combined housing. Figure 17-19 As shown, the first damping spring 1103 is assembled and placed on the top of the second chuck 105, the conductive soft wire 1107, the upper slot plate 1108 and the lower slot plate 1109 are prefabricated integral parts, the upper slot plate 1108 is assembled and placed on the top of the first set plate 1104, the bottom of the plug block 1102 is assembled and placed on the top of the upper slot plate 1108, the first conductive shell 1091, the glass tube 1092, the second conductive shell 1093 and the fuse 1094 are assembled structures, the pad 1101 is manually pressed downward slowly, at this time the first damping spring 1103 is squeezed, the bottom of the second conductive shell 1093 is assembled and placed on the top of the plug block 1102, the upper power transmission frame 108 and the first chuck 104 are assembled and placed, and then slowly release the hand until the first conductive shell 1091 Assemble and place it with the bottom end of the column block 1082, and the second damping spring 1105 is assembled and placed on the bottom of the third chuck 106. Manually lift the second set of discs 1106 upwards to squeeze the second damping spring 1105, and assemble and place the lower power transmission frame 111 on the top of the fourth chuck 107. The bottom end of the lower slot disc 1109 is assembled and placed on the top of the disc 1112, and then slowly release your hands until the bottom of the second set of discs 1106 is assembled and placed with the top of the lower slot disc 1109. After the circuit protection device 1 is assembled, the first damping spring 1103 and the second damping spring 1105 are always in a squeezed state. The above-mentioned first damping spring 1103 and second damping spring 1105 provide a press-type installation structure for the circuit protection device 1 that is easy to assemble and replace.

[0029] The first housing 101 and the second housing 102 are both provided with mounting plates 103 on the top. The internal threads of the mounting plates 103 provided on the bottom of the first housing 101 and the bottom of the second housing 102 are first assembled with external studs, and then the internal threads of the mounting plates 103 provided on the top of the first housing 101 and the top of the second housing 102 are assembled with external studs until the annular groove 112 and the annular strip 115 are fitted and contacted to form an external cover structure of the circuit protection device 1. A glass fiber filter for ventilation, heat dissipation and dust prevention is fixedly provided inside the second housing 102. At this time, the strip plate 1083 is assembled and fitted with the first slot 113 and the second slot 114 to limit the position, and the connecting plate 1113 is assembled and fitted with the first slot 113 and the second slot 114 to limit the position.

[0030] The circuit selection device 2 is an assembled structure and can be assembled in combination with the strip plate 1083. The strip plate 1083 is slidably assembled with the plug-in plate block 23 through the slot 1084. The upper cover shell 22 is slidably assembled with the plug-in plate block 23 through the arc slot 24. Internal threaded holes are provided on the outer side of the top of the lower cover shell 21 and the outer side of the bottom of the upper cover shell 22. The lower cover shell 21 and the upper cover shell 22 can be assembled and fixed by external studs.

[0031] The plug-in device 3 is an assembled structure and can be assembled and placed with the connecting block 1114 . The plug-in housing 33 and the column rod 34 arranged on the top of the machine disk 31 are engaged and assembled with the connecting block 1114 .

[0032] Circuit orientation of the device: the bottom end of the connecting frame 32 is electrically connected to the power supply line, the top of the plug-in plate block 23 is assembled and placed with the power supply end of the wafer dryer, when the wafer dryer is in normal use, the current is transmitted to the plug shell 33 through the connecting frame 32, the plug shell 33 is charged, the column 34 is fixed to the inner wall of the bottom end of the plug shell 33, the column 34 is also charged, the connecting block 1114 is assembled on the outside of the plug shell 33 and the column 34, the current passes through the connecting block 1114, the connecting plate 1113, the plate 1111 and the matching plate 1112, the matching plate 1112 and the lower slot plate 1109 are fitted and limited The current passes through the lower slot plate 1109, the conductive soft wire 1107 and the upper slot plate 1108. The upper slot plate 1108 is fitted and limited with the plug block 1102. The current passes through the plug block 1102, the second conductive shell 1093, the fuse 1094 and the first conductive shell 1091. The first conductive shell 1091 is fitted and limited with the column block 1082. The current passes through the column block 1082, the round block 1081 and the strip plate 1083. The strip plate 1083 is connected to the insert plate block 23 through the slot hole 1084. The top of the insert plate block 23 is assembled with the power supply end of the wafer dryer.

[0033] When the wafer dryer current overload causes the fuse 1094 to blow, turn off the external circuit switch of the power supply line at the bottom of the connecting frame 32, and the power supply end of the wafer dryer can select the remaining plug-in blocks 23 for assembly and placement, and then turn on the external circuit switch of the power supply line at the bottom of the connecting frame 32 to quickly restore power to the wafer dryer.

[0034] First, the mounting plate 103 provided at the bottom of the first housing 101 and the bottom of the second housing 102 is screwed in the opposite direction through the external studs, and then the mounting plate 103 provided at the top of the first housing 101 and the top of the second housing 102 is screwed in the opposite direction through the external studs until the annular groove 112 is out of contact with the annular strip 115, and the external cover structure of the circuit protection device 1 can be opened.

[0035] The fuse device 109 is a combined structure. By pulling the first conductive shell 1091 and the second conductive shell 1093 relatively along the vertical direction, the damaged second conductive shell 1093 and the fuse 1094 can be replaced as a whole.

[0036] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A wafer processing drying machine overload protection device, comprising a circuit protection device (1), a circuit selection device (2) and a plug-in device (3), characterized in that: The circuit protection device (1) is provided with a circuit selection device (2) at the top, and a plug-in device (3) is provided at the bottom of the circuit protection device (1). The circuit protection device (1) comprises a first housing (101), a second housing (102), a mounting plate (103), a first chuck (104), a second chuck (105), a third chuck (106), a fourth chuck (107), an upper power transmission frame (108), a fuse device (109), a power transmission assembly structure (110), a lower power transmission frame (111), a ring groove (112), a first clamping groove (113), a second clamping groove (114), and a ring strip (115). The top and bottom of the first housing (101) and the second housing (102) are provided with a circuit selection device (2) at the top, and a plug-in device (3) is provided at the bottom. 102) is fixedly provided with a mounting plate (103) with an internal threaded hole at both the top and bottom ends; a first chuck (104), a second chuck (105), a third chuck (106) and a fourth chuck (107) are fixedly provided inside the first housing (101); the upper power transmission frame (108) comprises a round block (1081), a column block (1082), a strip plate (1083) and a slot hole (1084); a column block (1082) is fixedly provided at the bottom end of the round block (1081); a strip plate (1083) is fixedly provided at one end of the round block (1081) close to the circuit selection device (2); a slot hole (1084) is provided inside the strip plate (1083); the power transmission assembly structure The structure (110) comprises a pad (1101), a plug (1102), a first damping spring (1103), a first set of disks (1104), a second damping spring (1105), a second set of disks (1106), a conductive cord (1107), an upper slot disk (1108) and a lower slot disk (1109), wherein the pad (1101) is fixedly provided with a plug (1102), the top of the second chuck (105) is provided with a first damping spring (1103), the top support rod of the first damping spring (1103) is fixedly provided with the first set of disks (1104), the bottom of the third chuck (106) is provided with a second damping spring (1105), and the second damping A second set of discs (1106) is fixedly arranged on the support rod at the bottom end of the spring (1105); the top end line of the conductive soft wire (1107) is fixedly arranged on the upper slot disc (1108) by welding; the bottom end line of the conductive soft wire (1107) is fixedly arranged on the lower slot disc (1109) by welding; the lower power transmission frame (111) comprises a mounting disc (1111), a counter disc (1112), a connecting plate (1113) and a connecting block (1114); the top end of the mounting disc (1111) is fixedly arranged with the counter disc (1112); the end of the mounting disc (1111) close to the plug-in device (3) is fixedly arranged with a connecting plate (1113); and the bottom of the connecting plate (1113) is fixedly arranged with a connecting block (1114).

2. According to claim 1, a wafer processing drying dryer overload protection device is characterized in that: The fuse device (109) comprises a first conductive shell (1091), a glass tube (1092), a second conductive shell (1093) and a fuse (1094); the glass tube (1092) is fixedly arranged at the bottom of the first conductive shell (1091); the glass tube (1092) and the second conductive shell (1093) are slidably assembled; the fuse (1094) is fixedly arranged at the top of the second conductive shell (1093); the fuse (1094) and the first conductive shell (1091) are slidably assembled.

3. According to claim 1, a wafer processing drying dryer overload protection device is characterized in that: An annular groove (112) is provided at one end of the first housing (101) close to the second housing (102), a first clamping groove (113) is provided at one end of the first housing (101) close to the circuit selection device (2), a second clamping groove (114) is provided at one end of the second housing (102) close to the circuit selection device (2), and a ring strip (115) is fixedly provided at one end of the second housing (102) close to the first housing (101).

4. According to claim 1, a wafer processing drying dryer overload protection device is characterized in that: The circuit selection device (2) comprises a lower cover shell (21), an upper cover shell (22), an insert disk block (23) and an arc groove (24). The circuit selection device (2) is an assembled structure. The upper cover shell (22) is assembled and placed on the top of the lower cover shell (21). The insert disk block (23) is fixedly arranged on the top of the lower cover shell (21). The arc groove (24) is opened on the top of the upper cover shell (22). The insert disk block (23) and the arc groove (24) are slidably assembled and placed. The slot hole (1084) and the insert disk block (23) are slidably assembled and placed.

5. The overload protection device for a drying machine for wafer processing and drying according to claim 1, characterized in that: The plug-in device (3) comprises a machine disk (31), a connecting frame (32), a plug-in shell (33) and a column (34); the connecting frame (32) is fixedly arranged inside the machine disk (31); the plug-in shell (33) is fixedly arranged on the four outer sides of the connecting frame (32); the column (34) is fixedly arranged on the inner wall of the bottom end of the plug-in shell (33); the inner wall of the plug-in shell (33) and the column (34) are assembled and placed with the connecting block (1114).

6. The overload protection device for a drying machine for wafer processing and drying according to claim 1, characterized in that: The bottom of the first chuck (104) is assembled and placed with the top of the round block (1081) and the top of the strip plate (1083), and the column block (1082) is assembled and placed with the matching groove opened at the top of the first conductive shell (1091).

7. The overload protection device for a drying machine for wafer processing and drying according to claim 1, characterized in that: The top end of the upper trough plate (1108) is assembled and placed with the bottom end of the plug (1102), the bottom end of the upper trough plate (1108) is assembled and placed with the top end of the first set of plates (1104), the top end of the lower trough plate (1109) is assembled and placed with the bottom end of the second set of plates (1106), and the bottom end of the lower trough plate (1109) is assembled and placed with the top end of the counter plate (1112).

Images