Preparation method of base material surface curve folding type stretchable metal mesh
By directly depositing metal grids on glass or film using masks and vacuum coating technology, the problems of limited uniaxial tensile performance, difficulty in fitting and high production costs of existing metal grids in applications are solved, achieving The effect of multi-axial tensile performance improvement and production cost reduction.
Patent Information
- Application Number
- CN202411474480.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-01-17
AI Technical Summary
In the application of existing metal grids, there are problems such as limited uniaxial tensile bending performance, inability to bond with hyperbolic curved glass, difficulty in bonding and adhering of film and infrared substrates, and the inability to achieve vacuum coating in traditional production methods.
By designing a mask, the metal grid is made on glass or film, and vacuum coating technology is used to directly deposit the metal grid, which solves the secondary lamination and adhesion problems caused by traditional transfer methods.
The multi-axial tensile performance of the metal mesh has been improved, and it can be bonded to glass with various curvature changes, reducing production costs, solving the problem of difficulty in bonding and adhering to infrared substrates, and expanding the application scope of metal mesh.
Smart Images
Figure CN119320925A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of metal grid preparation, and in particular to a method for preparing a curved foldable stretchable metal grid on the surface of a substrate. Background Art
[0002] Metal mesh has the characteristics of radar stealth and mid- and near-infrared transparency. Therefore, metal mesh is used in infrared detection window glass of stealth aircraft. This product can meet the requirements of infrared detectors without affecting radar stealth performance. At the same time, due to the low surface resistance of metal mesh, it has obvious advantages in stealth of low-frequency radar waves, which can make up for the shortcomings of conventional metal oxide conductive film as stealth film layer in stealth performance of low-frequency radar waves.
[0003] However, the application of existing metal meshes has the following three problems: The first problem is that the existing metal meshes only have the performance of uniaxial stretchability and bendability, and the stretching range is limited. It can only be applied to single-curved glass. When bonding with hyperbolic glass, the mesh will fail locally and wrinkle locally due to the hyperbolic bending. The second problem is that due to the film's absorption of mid- and near-infrared, the metal mesh cannot be bonded to the infrared substrate using film, and the bonding and attachment of the metal mesh to the infrared substrate becomes a new problem. The third problem is that traditional metal meshes can only be made on a polymer soft substrate such as PET, and then attached to glass and other products by transfer printing or bonding. The above three problems limit the use of metal meshes.
[0004] On the other hand, in the production of metal grids, traditional metal grids are not produced by vacuum coating with the help of mask plates, but are realized by transfer. The main reason is that the mask plate cannot be made into the mesh structure required for the grid, and the mask plate with a mesh structure cannot be formed due to the falling of the grid, which limits the application of vacuum coating in the field of metal grids. Summary of the invention
[0005] The purpose of the present invention is to provide a method for preparing a curved foldable stretchable metal grid on the surface of a substrate. By designing a corresponding mask plate, the metal grid can be directly made on a glass or film product, thereby solving the secondary bonding and adhesion problems caused by the traditional metal grid being made on a film medium and then transferred, and solving the metal grid adhesion problem of the infrared detection window.
[0006] The above technical objectives of the present invention are achieved through the following technical solutions: A method for preparing a curved foldable stretchable metal grid on a substrate surface, characterized in that it comprises the following steps: S1, cutting the metal plate to the required size, engraving it with a laser engraving machine, and engraving a curved parallel array of hollowed-out mesh wires inside to form a mask plate; S2, adding a frame around the mask plate with the hollow mesh wires carved, and stretching and straightening it to fix it; S3, placing the mask plate on the pre-cleaned substrate and in close contact with the substrate, and placing it on the tooling in the vacuum coating chamber, and the target material is set on the mask plate; S4, coating the target material on the substrate by vacuum coating to form a substrate for primary coating; S5, performing subsequent multiple coatings by rotating the horizontal angle of the mask plate or the substrate alone; S6, cutting and trimming the dimensions of the four sides of the substrate after multiple coatings are completed, and completing the preparation of the curved foldable stretchable metal grid on the surface of the substrate.
[0007] Preferably, the metal plate in S1 is selected from a stainless steel plate or an aluminum plate, and the thickness of the metal plate is 0.1-0.5 mm.
[0008] Preferably, the width of the uniaxial mesh lines engraved inside the mask plate in S1 is 10 to 100 microns, and the line spacing is 50 to 1000 microns.
[0009] Preferably, the substrate in S3 is one of glass or film, the target material is a metal target material selected from one of gold, silver, copper and aluminum, and the target material is arranged at a distance of 150 mm above the mask plate.
[0010] Preferably, the vacuum coating method in S4 is selected from magnetron sputtering, evaporation, and ion plating.
[0011] Preferably, the specific preparation steps of the magnetron sputtering are: start the mechanical pump and the bypass valve, wait until the chamber pressure reaches 2×10 -3 ~8×10 -3 mbar, close the bypass valve, open the molecular pump and the main valve, and wait until the chamber pressure drops to 4×10 -6 ~14×10 - 6 mbar, 99.999% high-purity argon gas with a flow rate of 290-390 sccm was introduced to make the gas pressure reach the ignition pressure of 2×10 -3 ~8×10 -3mbar, turn on the target power supply, adjust the sputtering power to 700~1300W, observe the ignition, adjust the gas flow meter after ignition to adjust the film growth pressure, move the target to the invalid sputtering area through the moving carriage in the furnace, and pre-sputter for 1 minute. After the sputtering glow is stable, set the moving carriage operation program to reciprocating uninterrupted movement, and use the moving carriage to reciprocately coat the substrate with the glow turned on. The target particles are deposited on the surface of the workpiece substrate through the gap of the prefabricated mask plate to form metal wire texture.
[0012] Preferably, the thickness of the target material for one-time plating of the reciprocating coating is 30-40 nm, and the thickness of the final metal grid is 1-10 microns.
[0013] Preferably, the multiple coating method of magnetron sputtering in S5 is specifically as follows: after the coating reaches the expected thickness, turn off the cathode power supply of the magnetron sputtering coating machine, open the door when the air pressure in the coating furnace reaches atmospheric pressure, take out the substrate to check the quality of the metal grid texture, adjust the relative rotation angle between the substrate and the mask plate, and then put the substrate back under the mask plate, keep the substrate and the mask in close contact, prepare for subsequent coating, evacuate the chamber to a vacuum state again and repeat step S4.
[0014] Preferably, in S4, the coating projection area can be changed by changing the angle to adjust the wire diameter of the metal grid, specifically, the axial angle between the substrate and the mask plate is controlled to change the coating projection area of the target relative to the substrate.
[0015] In summary, the present invention has the following beneficial effects: 1. Compared with the technical solution of the present invention which involves transferring the metal grid to a PET film and then making the metal grid on a product such as glass by transfer and bonding, the metal grid preparation method of the present invention can make the metal grid on a glass product or a film. Directly preparing the metal grid on the glass product can greatly reduce the production cost and completely solve the problem that the infrared substrate cannot be bonded with a third medium made of non-infrared material, thereby achieving direct deposition of the metal grid on the infrared material. The metal grid preparation method of the present invention is not limited to curved folding metal grids, but is also applicable to the production of traditional straight and arc-shaped metal grids.
[0016] 2. The linear / single-arc metal grids in the prior art can only be stretched uniaxially, and the stretchable size does not exceed 45% of the original size. The curved folding metal grid design of the present invention has multi-axial stretching performance, and the stretching amplitude can be increased by 2-5 times. The curved folding metal grid of the present invention is made on the adhesive film and can be bonded to glass with various curvature changes, solving the problem that traditional metal grids can only be made on flat or single-curved glass. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 It is a structural diagram of the mask design of the present invention; Figure 2 It is a schematic diagram of the placement of the coating material of the present invention; Figure 3 It is a schematic diagram of the structure of the primary-film-plated metal grid of the present invention; Figure 4 It is a schematic diagram of the secondary film-plated metal grid structure of the present invention; Figure 5 It is a schematic diagram of the three-layer coated metal grid structure of the present invention; Figure 6 It is a schematic diagram of the four-times coated metal grid structure of the present invention; Figure 7 It is a schematic diagram of the placement of coating materials under the condition of changing the wire diameter of the present invention. DETAILED DESCRIPTION
[0018] The specific implementation manner of the present invention is further described below in conjunction with the accompanying drawings, and this embodiment does not constitute a limitation of the present invention.
[0019] A method for preparing a curved foldable stretchable metal grid on a substrate surface comprises the following steps: S1, cutting the metal plate to the required size, engraving it with a laser engraving machine, and engraving a curved parallel array of hollowed-out mesh wires inside to form a mask plate.
[0020] S2, such as Figure 1 As shown, a frame is installed around the mask plate with the hollow mesh wires carved, and the frame is stretched, straightened and fixed to prevent deformation and adhesion of the wire gaps.
[0021] S3, such as Figure 2 As shown, the mask plate is placed above the pre-cleaned substrate and in close contact with the substrate, and is placed on a tooling in the vacuum coating chamber, and the target material is set above the mask plate.
[0022] S4, coating the target material on the substrate by vacuum coating to form a substrate for one-time coating.
[0023] S5, performing subsequent multiple coatings by rotating the horizontal angle of the mask plate or the substrate separately.
[0024] S6, cutting and trimming the dimensions of the four sides of the substrate after multiple coatings are completed, and completing the preparation of the curved foldable stretchable metal grid on the surface of the substrate.
[0025] The metal plate is selected from a stainless steel plate or an aluminum plate, the thickness of the metal plate is 0.1-0.5 mm, and is cut into required sizes.
[0026] The width of the single-axis mesh lines engraved inside the mask plate is 10 to 100 microns, and the line spacing is 50 to 1000 microns.
[0027] The substrate is one of glass or film, the target is a metal target selected from one of gold, silver, copper and aluminum, and the target is arranged at a distance of 150 mm above the mask plate.
[0028] The vacuum coating method is selected from one of magnetron sputtering, evaporation and ion plating.
[0029] This example takes magnetron sputtering as an example. The specific preparation steps of magnetron sputtering are as follows: start the mechanical pump and the bypass valve, and wait until the chamber pressure reaches 2×10 -3 ~8×10 -3 mbar, close the bypass valve, open the molecular pump and the main valve, and wait until the chamber pressure drops to 4×10 -6 ~14×10 -6 mbar, 99.999% high-purity argon gas with a flow rate of 290-390 sccm was introduced to make the gas pressure reach the ignition pressure of 2×10 -3 ~8×10 -3 mbar, turn on the target power supply, adjust the sputtering power to 700~1300W, observe the glowing situation, adjust the gas flow meter after glowing to adjust the film growth pressure, move the target to the invalid sputtering area through the moving trolley in the furnace, and pre-sputter for 1 minute. After the sputtering glow is stable, set the moving trolley operation program to reciprocating uninterrupted movement, and use the moving trolley to reciprocately coat the substrate with the glow turned on. The target particles are deposited on the surface of the workpiece substrate through the gap of the prefabricated mask plate to form metal wire textures, such as Figure 3 shown.
[0030] The target material thickness of the reciprocating coating is 30~40nm, and the final metal grid thickness is 1~10 microns.
[0031] The multiple coating methods of magnetron sputtering are as follows: after the coating reaches the expected thickness, turn off the cathode power supply of the magnetron sputtering coating machine, open the door when the air pressure in the coating furnace reaches atmospheric pressure, take out the substrate to check the quality of the metal grid texture, adjust the relative rotation angle between the substrate and the mask plate, and then put the substrate back under the mask plate to keep the substrate and the mask in close contact, prepare for subsequent coating, evacuate the chamber to a vacuum state and repeat step S4. The substrate can be coated twice, three times, four times or N times by the above method to form a finer metal grid, thereby meeting higher product requirements. Figures 4 to 6 shown.
[0032] like Figure 7As shown, during the coating process, the coating projection area can be changed by changing the angle to adjust the wire diameter of the metal grid, specifically, the axial angle between the substrate and the mask plate is controlled to change the coating projection area of the target relative to the substrate.
[0033] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and protection scope of the present invention, and such modifications or equivalent substitutions should also be deemed to fall within the protection scope of the technical solution of the present invention.
Claims
1. A method for preparing a curved foldable stretchable metal grid on a substrate surface, characterized in that: The steps include: S1, cutting the metal plate to the required size, engraving it with a laser engraving machine, and engraving a curved parallel array of hollowed-out mesh wires inside to form a mask plate; S2, adding a frame around the mask plate with the hollow mesh wires carved, and stretching and straightening it to fix it; S3, placing the mask plate on the pre-cleaned substrate and in close contact with the substrate, and placing it on the tooling in the vacuum coating chamber, and the target material is set on the mask plate; S4, coating the target material on the substrate by vacuum coating to form a substrate for primary coating; S5, performing subsequent multiple coatings by rotating the horizontal angle of the mask plate or the substrate alone; S6, cutting and trimming the dimensions of the substrate after multiple coatings to complete the preparation of the curved foldable stretchable metal grid on the surface of the substrate.
2. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: The metal plate in S1 is selected from a stainless steel plate or an aluminum plate, and the thickness of the metal plate is 0.1-0.5 mm.
3. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: The width of the uniaxial mesh lines engraved inside the mask plate in S1 is 10 to 100 microns, and the line spacing is 50 to 1000 microns.
4. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: The substrate in S3 is one of glass or film, the target material is a metal target material selected from one of gold, silver, copper and aluminum, and the target material is arranged at a distance of 150 mm above the mask plate.
5. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: The vacuum coating method in S4 is selected from magnetron sputtering, evaporation, and ion plating.
6. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 5, characterized in that: The specific preparation steps of the magnetron sputtering are as follows: start the mechanical pump and the bypass valve, and wait until the chamber pressure reaches 2×10 -3 ~8×10 -3 mbar, close the bypass valve, open the molecular pump and the main valve, and wait until the chamber pressure drops to 4×10 -6 ~14×10 -6 mbar, 99.999% high-purity argon gas with a flow rate of 290-390 sccm was introduced to make the gas pressure reach the ignition pressure of 2×10 -3 ~8×10 -3 mbar, turn on the target power supply, adjust the sputtering power to 700~1300W, observe the ignition, adjust the gas flow meter after ignition to adjust the film growth pressure, move the target to the invalid sputtering area through the moving carriage in the furnace, and pre-sputter for 1 minute. After the sputtering glow is stable, set the moving carriage operation program to reciprocating uninterrupted movement, and use the moving carriage to reciprocately coat the substrate with the glow turned on. The target particles are deposited on the surface of the workpiece substrate through the gap between the prefabricated mask plate to form metal wire texture.
7. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 6, characterized in that: The thickness of the target material of the reciprocating coating is 30-40 nm, and the thickness of the final metal grid is 1-10 microns.
8. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: The multiple coating methods of magnetron sputtering in S5 are specifically as follows: after the coating reaches the expected thickness, turn off the cathode power supply of the magnetron sputtering coating machine, open the door when the air pressure in the coating furnace reaches atmospheric pressure, take out the substrate to check the quality of the metal grid texture, adjust the relative rotation angle between the substrate and the mask plate, and then put the substrate back under the mask plate to keep the substrate and the mask in close contact, prepare for subsequent coating, evacuate the chamber to a vacuum state again and repeat step S4.
9. The method for preparing a curved foldable stretchable metal grid on a substrate surface according to claim 1, characterized in that: In S4, the coating projection area can be changed by changing the angle to adjust the wire diameter of the metal grid, specifically, the axial angle between the substrate and the mask plate is controlled to change the coating projection area of the target relative to the substrate.