Coating equipment and coating method

Abstract

The invention relates to the technical field of semiconductors or photovoltaics, in particular to coating equipment and a coating method, and aims to solve the problems that a target material can be taken out for replacement only after a process chamber is subjected to vacuum breaking, the replacement process is long in time consumption, and the production takt is influenced in the conventional coating equipment. The coating equipment comprises multiple sets of target material assemblies, multiple containing spaces can contain target materials correspondingly, a first driving assembly drives a shielding assembly to move so as to block communication between at least one containing space and a process cavity, so that at least one containing space forms a sealed space, at least another containing space is allowed to communicate with the process cavity, and the target materials are contained in the containing spaces. The target material corresponding to at least one accommodating space is replaced by exhausting or deflating the sealed space, the vacuum of the process chamber does not need to be broken, and the target material corresponding to at least another accommodating space can continue to work in the replacement process of the target material, so that the production time delayed by replacing the target material is shortened, the production takt is accelerated, and the production efficiency is improved. And the production efficiency and the utilization rate are improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor or photovoltaic technology, and in particular to a coating device and a coating method. Background Art

[0002] In the semiconductor and photovoltaic industries, coating technology is widely used as an important means to enhance material performance, improve surface characteristics and achieve specific functions. During the coating process, the target material in the process chamber is a key consumable and needs to be replaced frequently.

[0003] The coating process often needs to be carried out under vacuum conditions. In existing coating equipment, it is often necessary to break the vacuum in the process chamber before the target can be taken out for replacement. The replacement process is time-consuming, affecting the production cycle, and the production efficiency and production utilization rate are low. Summary of the invention

[0004] In view of this, the embodiments of the present application provide a coating device and a coating method to solve the problem that existing coating equipment often needs to break the vacuum of the process chamber before the target material can be taken out for replacement, which affects the production cycle, production efficiency and low production utilization rate.

[0005] In a first aspect, an embodiment of the present application provides a coating device, comprising: a process chamber, having a process chamber and a plurality of first openings, the process chamber being configured to accommodate a part to be coated, the first opening being able to connect the process chamber with the outside world; a plurality of target material assemblies, detachably connected to the process chamber; the target material assemblies comprising a target material; a plurality of sealed shells, the first end of the sealed shell having a second opening, the second end of the sealed shell having a third opening, the sealed shell having a accommodating space connecting the second opening and the third opening, the sealed shell being used to dock with the first opening and be sealedly connected to the process chamber, the accommodating space being able to communicate with the outside world through the second opening , and can be connected with the process chamber through the third opening, multiple accommodating spaces can respectively accommodate target materials, and the targets of multiple target material assemblies extend into the accommodating spaces through the second openings respectively, and the target material assemblies block the connection between the accommodating spaces and the outside world; at least one shielding assembly is arranged in the process chamber; a first driving assembly is connected to the shielding assembly, and is configured to drive at least partial movement of the shielding assembly to block the connection between at least one accommodating space and the process chamber, and allow at least another accommodating space to be connected with the process chamber; wherein the coating equipment also has multiple through holes, and the multiple through holes are respectively connected with the multiple accommodating spaces.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the process chamber also has a feed port and a discharge port arranged relatively to each other along a first direction, and both the feed port and the discharge port are connected to the process chamber; the coating equipment also includes: a transport component, which is at least partially disposed in the process chamber and is located on the side of the shielding component away from the sealing shell, and is configured to transport the parts to be coated along the first direction; wherein the multiple first openings are spaced apart along the first direction.

[0007] In combination with the first aspect, in certain implementations of the first aspect, the sealing shell is slidably connected to the process chamber along a second direction, and the second direction is perpendicular to the first direction; wherein the coating equipment also includes: a plurality of second driving components, which are respectively connected to the plurality of sealing shells, and are configured to drive the sealing shell along the second direction to approach the shielding component, or are configured to drive the sealing shell along the opposite direction of the second direction to separate from the shielding component.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the shielding assembly includes at least one shielding member; wherein the shielding member includes: a plurality of shielding portions, for blocking the connection between at least one accommodating space and the process chamber; at least one hollow portion, located between adjacent shielding portions, for allowing at least another accommodating space to be connected to the process chamber; wherein the first driving assembly is also configured to drive the shielding member to move in the first direction or in the opposite direction of the first direction, so that the shielding portion blocks the connection between at least one accommodating space and the process chamber, and the hollow portion allows at least another accommodating space to be connected to the process chamber.

[0009] In combination with the first aspect, in certain implementations of the first aspect, the shielding member further includes: at least two oppositely disposed connecting portions, the connecting portions connecting adjacent shielding portions, the two oppositely disposed connecting portions and the adjacent shielding portions enclosing a hollow portion; wherein the orthographic projection of the second end of the sealing shell on the shielding member can surround the hollow portion.

[0010] In combination with the first aspect, in certain implementations of the first aspect, the process chamber has a first guide groove and a second guide groove that are relatively arranged along a third direction, and the first guide groove and the second guide groove both extend along the first direction, wherein the third direction is perpendicular to the first direction; the shielding assembly includes one or more plate-shaped shielding members, the first end of the shielding assembly and the second end of the shielding assembly are relatively arranged along the third direction, and the first end of the shielding assembly and the second end of the shielding assembly are respectively inserted into the first guide groove and the second guide groove.

[0011] In combination with the first aspect, in certain implementations of the first aspect, the first end of the shielding assembly has a first groove, the first groove extends along the first direction, the opening direction of the first groove is opposite to the opening direction of the first guide groove, a first rack is arranged in the first groove, and the first rack extends along the first direction; the first driving assembly includes: a first gear, the first gear is meshed with the first rack; a first driving source is connected to the first gear and is configured to drive the first gear to rotate to drive the shielding assembly to move, and / or the second end of the shielding assembly has a second groove, the second groove extends along the first direction, the opening direction of the second groove is opposite to the opening direction of the second guide groove, a second rack is arranged in the second groove, and the second rack extends along the first direction; the first driving assembly includes: a second gear, the second gear is meshed with the second rack; a second driving source is connected to the second gear and is configured to drive the second gear to rotate to drive the shielding assembly to move.

[0012] In combination with the first aspect, in certain implementations of the first aspect, when the first drive assembly includes a first gear, the process chamber has a first connecting hole, and the first driving source includes: a first connecting shaft, one end of the first connecting shaft is connected to the first gear, the first connecting shaft passes through the first connecting hole and is sealed to the first connecting hole; a first power member is connected to the second end of the first connecting shaft, and is configured to drive the first connecting shaft to rotate so that the first connecting shaft drives the first gear to rotate.

[0013] In combination with the first aspect, in certain implementations of the first aspect, the coating device further includes: a first sealing member, disposed between the second end of the sealing shell and the shielding assembly.

[0014] In a second aspect, an embodiment of the present application provides a coating method, which is applied to the coating equipment mentioned in any one of the first aspect, and the coating method includes: a first driving component of the coating equipment drives at least partial movement of a shielding component of the coating equipment, and the shielding component blocks the connection between at least one accommodating space and a process chamber, so that at least one accommodating space forms a sealed space, and at least another accommodating space is allowed to be connected to the process chamber; the sealed space is deflated through the through hole of the coating equipment; after the air pressure in the sealed space is equal to the external air pressure, the target material of the coating equipment corresponding to at least one accommodating space is replaced.

[0015] In combination with the second aspect, in certain implementations of the second aspect, after the air pressure in the sealed space is equal to the external air pressure, the target material of the coating device corresponding to at least one accommodating space is replaced, including: after the air pressure in the sealed space is equal to the external air pressure, at least one group of target material assemblies with used target materials are removed from the process chamber of the coating device; at least one group of target material assemblies with unused target materials are detachably installed in the process chamber so that the target material assembly blocks the connection between the accommodating space and the outside world; and the sealed space is evacuated through the through hole so that the air pressure in the sealed space is equal to the air pressure in the process chamber.

[0016] The coating equipment provided in this embodiment includes multiple groups of target material assemblies, and each of the multiple sealed shells has a storage space capable of accommodating target materials. The first driving assembly can drive the shielding assembly to move to block the connection between at least one storage space and the process chamber, so that at least one storage space forms a sealed space, and allows at least another storage space to be connected with the process chamber. The sealed space is evacuated or deflated through the through hole to achieve replacement of the target material corresponding to at least one storage space. The process chamber does not need to be vacuum-broken, and during the process of replacing the target material corresponding to at least one storage space, the target material corresponding to at least another storage space can continue to work, thereby shortening the production time delayed by replacing the target material, accelerating the production rhythm, and improving the production efficiency and production utilization rate.

[0017] In addition, during the process of replacing the target material, the process chamber does not need to be vacuumed, which is beneficial to reduce the introduction of impurities or contaminants into the process chamber and improve the coating quality. Moreover, since the coating process interruption time is short, the process conditions of the coating process can be maintained, which is beneficial to improve the process stability and further improve the coating quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the accompanying drawings, the above and other purposes, features and advantages of the present application will become more apparent. The accompanying drawings are used to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the accompanying drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application.

[0020] Figure 2a The present invention provides an embodiment of the present invention. Figure 1 A local enlarged schematic diagram of point A in the middle.

[0021] Figure 2b The present invention provides an embodiment of the present invention. Figure 1 A local enlarged schematic diagram of point B in the middle.

[0022] Figure 3 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present application.

[0023] Figure 4 The present invention provides an embodiment of the present invention. Figure 3 The schematic diagram of the structure of the coating equipment after the shielding component is moved is shown.

[0024] Figure 5 The present invention provides an embodiment of the present invention. Figure 3 The structure diagram of the coating equipment shown is after a set of target material components are disassembled.

[0025] Figure 6 Shown is a schematic flow chart of a coating method provided in one embodiment of the present application.

[0026] Figure 7 It is a schematic diagram of a process of replacing the target materials in at least another target material assembly after the air pressure in the sealed space is equal to the external air pressure, provided by an embodiment of the present application.

[0027] Figure 8 Shown is a schematic structural diagram of a coating device provided in yet another embodiment of the present application.

[0028] Fig. 9 The present invention provides an embodiment of the present invention. Figure 3 The schematic diagram of the structure of the coating equipment after the sealing shell slides is shown.

[0029] Fig.10a Shown is a schematic structural diagram of a shielding member provided in one embodiment of the present application.

[0030] Fig.10b The present invention provides an embodiment of the present invention. Fig.10a A partial enlarged schematic diagram of point C in the middle.

[0031] Fig.11a Shown is a schematic structural diagram of a target assembly, a shielding assembly and a portion of a process chamber provided in one embodiment of the present application.

[0032] Fig.11b The present invention provides an embodiment of the present invention. Fig.11a A partial enlarged schematic diagram of point D in the middle.

[0033] Fig.11c The present invention provides an embodiment of the present invention. Fig.11a A partial enlarged schematic diagram of point E in the middle.

[0034] Fig.12 The present invention provides an embodiment of the present invention. Fig.11a Schematic diagram of the target assembly, shielding assembly and part of the process chamber from an overhead perspective.

[0035] Fig.13 Shown is a schematic structural diagram of a target assembly, a shielding assembly, a portion of a transport assembly and a portion of a process chamber provided in one embodiment of the present application.

[0036] Fig.14a Shown is a schematic structural diagram of a target assembly, a shielding assembly, a portion of a transport assembly and a portion of a process chamber provided in another embodiment of the present application.

[0037] Fig.14bThe present invention provides an embodiment of the present invention. Fig.14a A partial enlarged schematic diagram of point F in the middle.

[0038] Reference numerals:

[0039] 10. Coating equipment; 11. Process chamber; 110. Process chamber; 111. First opening; 112. Feed port; 113. Discharge port; 114. First guide groove; 1140. First guide portion; 115. Second guide groove; 1150. Second guide portion; 116. First connecting hole; 117. Loading chamber; 118. Pretreatment chamber; 119. Post-treatment chamber; 1110. Unloading chamber; 12. Target assembly; 120. Target; 121. Electrical control assembly; 122. Ventilation assembly; 123. Target support assembly; 13. Sealed shell; 130. Accommodating space; 131. First end of sealed shell; 1310. Second opening; 132. Second end of sealed shell; 1320. Third opening; 14. Shielding member; 140. Shielding portion; 141. Hollow portion; 142. The first end of the shielding assembly; 1420, the third guide portion; 1421, the first groove; 1422, the first rack; 143, the second end of the shielding assembly; 1430, the fourth guide portion; 144, the connecting portion; 145, the shielding assembly; 15, the first driving assembly; 150, the first gear; 151, the first driving source; 1510, the first connecting shaft; 1511, the first power member; 1512, one end of the first connecting shaft; 1513, the second end of the first connecting shaft; 1514, the first sealed bearing; 152, the second driving source; 16, the through hole; 17, the exhaust gas assembly; 18, the transport assembly; 180, the roller; 19, the carrier plate; 20, the second driving assembly; 200, the rotating wheel; 201, the second connecting shaft; 202, the windable connecting member; 21, the second connecting hole; 22, the uniform gas assembly. DETAILED DESCRIPTION

[0040] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0041] In the semiconductor and photovoltaic industries, coating technology is widely used as an important means to enhance material performance, improve surface characteristics and achieve specific functions. During the coating process, the target material in the process chamber is a key consumable and needs to be replaced frequently.

[0042] The coating process often needs to be carried out under vacuum conditions. In existing coating equipment, the entire coating equipment is often shut down, and then the vacuum in the process chamber is broken. After the process chamber is opened, the target material can be taken out for replacement. The replacement process is time-consuming, affecting the production cycle, and the production efficiency and production utilization rate are low.

[0043] Figure 1 Shown is a schematic structural diagram of a coating device provided in one embodiment of the present application. Figure 2a The present invention provides an embodiment of the present invention. Figure 1 A local enlarged schematic diagram of point A in the middle. Figure 2b The present invention provides an embodiment of the present invention. Figure 1 A local enlarged schematic diagram of point B in the middle. Figure 3 Shown is a schematic structural diagram of a coating device provided in another embodiment of the present application. Figure 4 The present invention provides an embodiment of the present invention. Figure 3 The schematic diagram of the structure of the coating equipment after the shielding component is moved is shown. Figure 5 The present invention provides an embodiment of the present invention. Figure 3 The structure diagram of the coating equipment shown is after a set of target material components are disassembled.

[0044] like Figures 1 to 5 As shown, the coating equipment 10 includes: a process chamber 11, a plurality of target material assemblies 12, a plurality of sealed shells 13, a shielding assembly 145 and a first driving assembly 15.

[0045] The process chamber 11 has a process chamber 110 and a plurality of first openings 111. The process chamber 110 is configured to accommodate a part to be coated ( Figure 1 2 ). The first opening 111 can connect the process chamber 110 with the outside.

[0046] The plurality of target material assemblies 12 are detachably connected to the process chamber 11 . The target material assemblies 12 include targets 120 .

[0047] The first end 131 of the sealed shell has a second opening 1310, and the second end 132 of the sealed shell has a third opening 1320. The sealed shell 13 has a receiving space 130 communicating with the second opening 1310 and the third opening 1320. The sealed shell 13 is used to dock with the first opening 111 and is sealedly connected to the process chamber 11. The receiving space 130 can communicate with the outside through the second opening 1310, and can communicate with the process chamber 110 through the third opening 1320. Multiple receiving spaces 130 can respectively accommodate target materials 120. The sealed shell 13 is sealedly connected to the process chamber 11. The targets 120 of multiple target material assemblies 12 extend into the receiving space 130 through the second opening 1310, respectively, and the target material assemblies 12 block the communication between the receiving space 130 and the outside.

[0048] Exemplarily, the target 120 of each target assembly 12 can extend into the accommodating space 130 through the first opening 111 and the second opening 1310. Exemplarily, the third opening 1320 can connect the accommodating space 130 and the process chamber 110. Exemplarily, the third opening 1320 faces the part to be coated. Exemplarily, the second opening 1310 of the sealing shell 13 is used to dock with the first opening 111.

[0049] At least one shielding assembly 145 is disposed in the process chamber 110. Exemplarily, the shielding assembly 145 is located on the side of the target 120 facing the object to be coated. Exemplarily, the shielding assembly 145 is configured to block the communication between at least one accommodating space 130 and the process chamber 110, and allow at least another accommodating space 130 to communicate with the process chamber 110.

[0050] The first driving assembly 15 is connected to the shielding assembly 145. The first driving assembly 15 is configured to drive at least a portion of the shielding assembly 145 to block the communication between at least one receiving space 130 and the process chamber 110, and allow at least another receiving space 130 to communicate with the process chamber 110.

[0051] Exemplarily, the first driving component 15 drives the shielding component 145 to at least partially cover and seal the third opening 1320 corresponding to at least one accommodating space 130, thereby blocking the communication between at least one accommodating space 130 and the process chamber 110, and opens at least a portion of the third opening 1320 corresponding to at least another accommodating space 130, thereby allowing at least another accommodating space 130 to communicate with the process chamber 110.

[0052] The coating device 10 also has a plurality of through holes 16. The plurality of through holes 16 are respectively connected to the plurality of accommodating spaces 130. Exemplarily, the target assembly 12 is capable of sealing the first opening 111 or the second opening 1310. Exemplarily, after the target assembly 12 blocks the communication between the accommodating space 130 and the outside, and at least part of the shielding assembly 145 blocks the communication between the accommodating space 130 and the process chamber 110, the accommodating space 130 forms a sealed space, and the sealed space can be evacuated or deflated through the through holes 16.

[0053] Exemplarily, the coating device 10 can be any device capable of coating an object. Exemplarily, the coating method 1 can include a vapor deposition device. For example, the coating device 10 can include a physical vapor deposition (PVD) device. For example, the coating device 10 can include a magnetron sputtering PVD device. Exemplarily, the coating device 10 is used to coat parts or raw materials that form photovoltaic modules. For example, the coating device 10 can be used to coat silicon wafers. The coating device 10 can also be used to prepare a perovskite layer, an electron transport layer, a hole transport layer, an encapsulation layer, and a transparent electrode of a perovskite photovoltaic cell. The coating device 10 can also be used to prepare a laminated battery.

[0054] Specifically, the process chamber 11 encloses a process chamber 110. Exemplarily, the plurality of first openings 111 are configured to be located above the object to be coated, so that the target material 120 is located above the object to be coated. Figure 5 As shown, after the target assembly 12 is removed from the process chamber 11 , the first opening 111 is connected to the outside.

[0055] The target assembly 12 is any structure that can support the target 120 during the coating process. In some application scenarios, when the target 120 needs to be replaced, the target assembly 12 is removed from the process chamber 11, and then the target 120 on the target assembly 12 is replaced. The target 120 is detachably arranged on the target assembly 12. Exemplarily, the target assembly 12 includes: a target support assembly 123 and a target 120. The target support assembly 123 is used to support the target 120 so as to install and fix the target 120. Exemplarily, the target support assembly 123 and the target 120 can be detachably connected. Exemplarily, the shape of the target 120 includes a combination of one or more of the following shapes: square plate, long strip, round cake, etc. For example, the shape of the target 120 is tubular. This embodiment does not specifically limit the shape of the target 120.

[0056] Exemplarily, the target assembly 12 also includes: an electrical control assembly 121 and a ventilation assembly 122. The electrical control assembly 121 can be used to control and monitor signals, power, current, voltage, airflow, etc. during the coating process. The electrical control assembly 121 can serve as the cathode of the target 120. The ventilation assembly 122 can be used to input process gas into the process chamber 110 during the coating process so that the target 120 can obtain a sufficiently uniform glow discharge. Exemplarily, the coating equipment 10 also includes a gas homogenizing assembly 22. The gas homogenizing assembly 22 is communicated with the ventilation assembly 122 and is configured to homogenize the process gas introduced into the ventilation assembly 122. The gas homogenizing assembly 22 can be detachably connected to the target assembly 12.

[0057] Exemplarily, the shape of the sealed shell 13 is a tubular structure or a frame structure. The tubular structure or the frame structure is a hollow structure. For example, the second opening 1310 and the third opening 1320 can be openings on both sides of the sealed shell 13 having a frame structure. Exemplarily, the cross-sectional shape of the sealed shell 13 may include a ring. The cross-sectional shape of the accommodating space 130 may include a rectangle. The accommodating space 130 can be used to accommodate at least part of the target assembly 12 including the target 120. The specific shape of the sealed shell 13 can be designed according to the shape of the target assembly 12. Exemplarily, the number of sealed shells 13 is the same as the number of target assemblies 12. The sealed shell 13 corresponds to the target assembly 12 one by one.

[0058] Exemplarily, the shielding assembly 145 may include a plurality of shielding members 14. The shielding members 14 correspond to the target material assembly 12 one by one. The first driving assembly 15 is connected to the plurality of shielding members 14, and may control the shielding member 14 to open at least a portion of the third opening 1320 corresponding to the shielding member 14, so that the accommodation space 130 corresponding to the third opening 1320 is in communication with the process chamber 110, so that the target material 120 corresponding to the shielding member 14 can coat the part to be coated in the process chamber 110, and may also control the shielding member 14 to cover and seal the third opening 1320 corresponding to the shielding member 14. Exemplarily, the first driving assembly 15 drives at least one shielding member 14 to block the communication between the accommodation space 130 corresponding to the shielding member 14 and the process chamber 110, and drives another shielding member 14 to open at least a portion of the third opening 1320 corresponding to the shielding member 14, so that the accommodation space 130 corresponding to the shielding member 14 is in communication with the process chamber 110. Illustratively, at least a portion of the shielding assembly 145 may include a shielding member 14 .

[0059] Exemplarily, the shielding assembly 145 may include a shielding member 14. The shielding member 14 may be configured to open at least a portion of at least one third opening 1320, so that at least one third opening 1320 is in communication with the process chamber 110, and to cover and seal at least another third opening 1320. When the third opening 1320 is in communication with the process chamber 110, the accommodating space 130 is also in communication with the process chamber 110. By opening at least a portion of at least one third opening 1320 through the shielding member 14, the target material 120 corresponding to the at least one third opening 1320 can be coated on the object to be coated in the process chamber 110. The first driving assembly 15 may drive a shielding member 14 to block the communication between at least one accommodating space 130 and the process chamber 110, and allow at least another accommodating space 130 to be in communication with the process chamber 110.

[0060] Exemplarily, the first drive assembly 15 may include any structure capable of moving the shielding member 14. Exemplarily, the first drive assembly 15 may include one or more combinations of the following drive forms: a gear set, a sprocket chain, a lead screw guide, a cylinder, a motor, and a crank slider.

[0061] Exemplarily, the through hole 16 can be provided on the process chamber 11. The through hole 16 can communicate with the outside and the accommodation space 130. Exemplarily, the through hole 16 can also be provided on the target assembly 12, for example, the ventilation assembly 122 can form the through hole 16. Exemplarily, the through hole 16 can also be provided on the process chamber 11 and the sealing shell 13. The position and number of the through hole 16 can be set according to actual needs.

[0062] In some embodiments, the coating device 10 further includes a gas extraction component 17. The through hole 16 can connect the gas extraction component 17 and the accommodating space 130. The gas extraction component 17 is configured to extract or deflate the sealed space through the through hole 16. The gas extraction component 17 may include a vacuum pump, an air pump, and the like.

[0063] like Figures 1 to 5 As shown, the coating device 10 in this embodiment includes two sets of target material assemblies 12. For the convenience of description, Figure 3 The target assembly 12 on the left side can be expressed as target assembly 12a, the corresponding target 120 can be expressed as target 120a, the first opening 111 and the second opening 1310 passed by the target 120a are respectively expressed as first opening 111a and second opening 1310a, the accommodating space 130, the third opening 1320 and the sealing shell 13 corresponding to the second opening 1310a are respectively expressed as accommodating space 130a, the third opening 1320a and the sealing shell 13a, and the through hole 16 corresponding to the accommodating space 130a is expressed as 16a. Figure 3 The target assembly 12 on the right side can be expressed as target assembly 12b, the corresponding target 120 can be expressed as target 120b, the first opening 111 and the second opening 1310 passed by the target 120b are respectively expressed as first opening 111b and second opening 1310b, the accommodating space 130, the third opening 1320 and the sealing shell 13 corresponding to the second opening 1310b are respectively expressed as accommodating space 130b, the third opening 1320b and the sealing shell 13b, and the through hole 16 corresponding to the accommodating space 130b is expressed as 16b.

[0064] The working principle of the coating device 10 provided in this embodiment is described by taking the coating device 10 including two groups of target material assemblies 12 as an example. Of course, in other embodiments, the coating device 10 may include more than two groups of target material assemblies 12.

[0065] For example, Figure 3As shown, target 120a is an unused target shielded by shielding assembly 145, and target 120b is a used target in operation corresponding to accommodation space 130b connected to process chamber 110. Target 120b is about to be used up and needs to be replaced. When target 120b needs to be replaced, Figure 4 As shown, the first driving component 15 can drive the shielding component 145 to at least partially cover and seal the third opening 1320b, blocking the communication between the accommodating space 130b and the process chamber 110, so that the accommodating space 130b corresponding to the target assembly 12b forms a sealed space, and drives at least a portion of the shielding component 145 to move, so that at least a portion of the third opening 1320a is opened, allowing the accommodating space 130a to communicate with the process chamber 110, so that the target 120a of the target assembly 12a can coat the parts to be coated in the process chamber 110. The sealed space formed by the accommodating space 130b is deflated through the through hole 16b. After the air pressure in the sealed space is equal to the external air pressure, the target 120b in the target assembly 12b is replaced. As shown in Figure 5 As shown, the target assembly 120b is disassembled to replace the target 120b.

[0066] like Figure 4 As shown, when the target 120b is replaced, the shielding assembly 145 seals the third opening 1320b, and the accommodating space 130b corresponding to the target assembly 12b forms a sealed space, isolating the target 120b from the process chamber 110, thereby preventing the process chamber 110 from being vacuum-broken. At the same time, while the target 120b is being replaced, the target 120a can coat the parts to be coated in the process chamber 110.

[0067] For example, when the target 120b needs to be replaced, the target 120b can be stopped from working and the supply of process gas, and then the first driving assembly 15 drives the shielding assembly 145 to move, and the shielding assembly 145 blocks the communication between the accommodation space 130b and the process chamber 110, and the accommodation space 130b corresponding to the third opening 1320b forms a sealed space, and allows the accommodation space 130a to communicate with the process chamber 110. After the third opening 1320a is connected with the process chamber 110 and the accommodation space 130b forms a sealed space, the target 120a starts working and the supply of process gas is restored. In this process, the coating equipment 10 does not need to be powered off and shut down.

[0068] Exemplarily, when the target 120a is working, the parts to be coated under the target 120a are coated. When the target 120b is working, the parts to be coated under the target 120b are coated. Exemplarily, the parts to be coated under the target 120a and the parts to be coated under the target 120b can be different parts to be coated. For example, the parts to be coated corresponding to the targets 12 at different positions can be coated in different time periods. Exemplarily, the parts to be coated under the target 120a and the parts to be coated under the target 120b can also be the same parts to be coated. For example, the parts to be coated under the target 120b are moved to the bottom of the target 120a to continue coating.

[0069] Illustratively, during the process of replacing the used target 120 b , the shielding assembly 145 continues to seal the third opening 1320 b .

[0070] Exemplarily, after the air pressure in the sealed space is equal to the external air pressure, the target assembly 12b is removed from the process chamber 11. The target assembly 12b with the unused target 120b is detachably mounted on the process chamber 11, so that the target assembly 12b seals the first opening 111b or the second opening 1310b, and the accommodating space 130b forms a sealed space. The sealed space is evacuated through the through hole 16b, so that the air pressure in the sealed space is equal to the air pressure in the process chamber 110.

[0071] Further, when the target 120a needs to be replaced, the first driving assembly 15 drives at least part of the shielding assembly 145 to move, and the shielding assembly 145 covers and seals the third opening 1320a, blocking the communication between the accommodating space 130a and the process chamber 110, so that the accommodating space 130a corresponding to the target assembly 12a forms a sealed space, and drives at least part of the shielding assembly 145 to move, so that at least part of the third opening 1320b is opened, allowing the accommodating space 130b to communicate with the process chamber 110, so that the target 120b of the target assembly 12b can coat the parts to be coated in the process chamber 110. The sealed space formed by the accommodating space 130a is deflated through the through hole 16a. After the air pressure in the sealed space is equal to the external air pressure, the target 120a in the target assembly 12a is replaced.

[0072] In other embodiments, the coating device 10 may include more than two groups of target material assemblies 12. Exemplarily, the coating device 10 may include five groups of target material assemblies 12. Each time the shielding assembly 145 moves, three of the third openings 1320 may be connected to the process chamber 110, so that the targets 120 corresponding to the three third openings 1320 may coat the parts to be coated in the process chamber 110, and the remaining two third openings 1320 may be shielded and sealed. The targets 120 corresponding to the three third openings 1320 may be used to coat the corresponding parts to be coated. Exemplarily, in the coating device 10, a plurality of parts to be coated may be respectively located below the targets 120 of the plurality of groups of target material assemblies 12, and the targets 120 coat the parts to be coated corresponding to the targets 120. After the targets 120 are used up and replaced, the unused targets 120 may continue to coat the parts to be coated at the positions corresponding to the replaced targets 120 that have been used.

[0073] The coating equipment 10 provided in this embodiment includes multiple groups of target material assemblies 12, and the respective receiving spaces 130 of the multiple sealed shells 13 can accommodate the target material 120. The first driving assembly 15 can drive at least partial movement of the shielding assembly 145 to block the communication between at least one receiving space 130 and the process chamber 110, so that at least one receiving space 130 forms a sealed space, and allows at least another receiving space 130 to communicate with the process chamber 110. The sealed space is evacuated or deflated through the through hole 16 to achieve replacement of the target material 120 corresponding to at least one receiving space 130. The process chamber 110 does not need to be broken by vacuum, and during the process of replacing the target material 120 corresponding to at least one receiving space 130, the target material 120 corresponding to at least another receiving space 130 can continue to work, thereby shortening the production time delayed by replacing the target material 120, accelerating the production rhythm, and improving the production efficiency and production utilization rate.

[0074] In addition, during the process of replacing the target material 120, the process chamber 110 does not need to be vacuumed, which is beneficial to reduce the introduction of impurities or contaminants into the process chamber 110, thereby improving the coating quality. Moreover, since the coating process interruption time is short, the process conditions of the coating process can be maintained, which is beneficial to improve process stability, speed up production cycle, and further improve coating quality and production efficiency.

[0075] Figure 6 Shown is a schematic flow chart of a coating method provided in one embodiment of the present application.

[0076] like Figure 6 As shown, this embodiment further provides a coating method. The coating method is applied to the coating device 10 mentioned in any embodiment of the present application. The coating method includes the following steps.

[0077] In step S600, the first driving component 15 of the coating equipment 10 drives at least part of the shielding component 145 of the coating equipment 10 to move, and the shielding component 145 blocks the connection between at least one accommodating space 130 and the process chamber 110, so that at least one accommodating space 130 forms a sealed space and allows at least another accommodating space 130 to communicate with the process chamber 110.

[0078] Step S610 , venting the sealed space through the through hole 16 of the coating equipment 10 .

[0079] Step S620 , after the air pressure in the sealed space is equal to the external air pressure, replace the target material 120 corresponding to at least one of the accommodating spaces 130 .

[0080] Exemplarily, the air pressure in the sealed space is equal to the external air pressure, which means that the air pressure in the sealed space is approximately equal to the external air pressure, or the difference between the air pressure in the sealed space and the external air pressure is within a preset range. As long as the target assembly 12 can be safely removed from the process chamber 11. Exemplarily, the difference between the air pressure in the sealed space and the external air pressure can be between -20Pa and 20Pa.

[0081] In the coating method provided in this embodiment, during the process of replacing the target material 120, the first driving component 15 can drive at least a partial movement of the shielding component 14 to block the communication between at least one accommodating space 130 and the process chamber 110, and allow at least another accommodating space 130 to be connected to the process chamber 110, thereby realizing the switching of the targets 120 corresponding to different accommodating spaces 130, that is, during the process of replacing the target material 120, the process chamber 110 does not need to be vacuum-broken, and the target material 120 corresponding to the accommodating space 130 connected to the process chamber 110 can continue to work, thereby shortening the production time delayed by replacing the target material 120, accelerating the production rhythm, and improving the production efficiency and production utilization rate.

[0082] In addition, the connection between the accommodating space 130 and the process chamber 110 is blocked by the shielding component 145, so that the accommodating space 130 forms a sealed space, and the sealed space is evacuated or deflated through the through hole 16 to realize the replacement of the target material 120 in the sealed space. During the replacement of the target material 120, the process chamber 110 does not need to be vacuum-broken, which is beneficial to reduce the introduction of impurities or pollutants into the process chamber 110, thereby improving the coating quality. Moreover, since the interruption time of the coating process is short, the process conditions of the coating process can be maintained, which is beneficial to improve the process stability, speed up the production rhythm, and further improve the coating quality and production efficiency.

[0083] Figure 7 The figure shows a schematic diagram of a process for replacing the target material in at least another target material assembly after the air pressure in the sealed space is equal to the external air pressure, provided by an embodiment of the present application. Figure 6Based on the embodiment shown, Figure 7 The embodiment shown is described below in detail. Figure 7 The embodiment shown and Figure 7 The differences and similarities of the illustrated embodiments are not described in detail.

[0084] After the air pressure in the sealed space is equal to the external air pressure, replacing the target material 120 corresponding to at least one accommodating space 130 includes the following steps.

[0085] Step S700 , after the air pressure in the sealed space is equal to the external air pressure, at least one group of target material assemblies 12 having used target materials 120 is removed from the process chamber 11 of the coating equipment 10 .

[0086] In step S710 , at least one group of target assemblies 12 having unused targets 120 is detachably mounted in the process chamber 11 , so that the target assemblies 12 block the communication between the accommodation space 130 and the outside.

[0087] In step S720 , the sealed space is evacuated through the through hole 16 to make the air pressure in the sealed space equal to the air pressure in the process chamber 110 .

[0088] Exemplarily, the coating device 10 further includes a gas extraction component 17. The through hole 16 can connect the gas extraction component 17 and the accommodating space 130. Step S610 may include: the gas extraction component 17 vents the sealed space through the through hole 16. Step S720 may include: the gas extraction component 17 evacuates the sealed space through the through hole 16, so that the air pressure in the sealed space is equal to the air pressure of the process chamber 110.

[0089] Exemplarily, after the shielding assembly 145 seals the third opening 1320 , the third opening 1320 may be continuously sealed until the target material 120 corresponding to the third opening 1320 needs to start coating.

[0090] Exemplarily, the air pressure in the sealed space is equal to the air pressure in the process chamber 110, which means that the air pressure in the sealed space is approximately equal to the air pressure in the process chamber 110, or the difference between the air pressure in the sealed space and the air pressure in the process chamber 110 is within a preset range. As long as the sealed space is opened, the target 120 can start working safely without being subjected to large air pressure fluctuations. Exemplarily, the difference between the air pressure in the sealed space and the air pressure in the process chamber 110 can be between -20Pa and 20Pa.

[0091] The coating method provided in this embodiment is characterized by detachably installing a target assembly 12 with an unused target material 120 on a process chamber 11. The target assembly 12 blocks the connection between the accommodating space 130 and the outside, and evacuates the sealed space to make the air pressure in the sealed space equal to the air pressure in the process chamber 110, so that the accommodating space 130 is ready to be connected with the process chamber 110, and the unused target material 120 is ready to replace another used target material 120 that is about to be replaced, thereby improving the continuity and stability of the production process, thereby improving the production efficiency.

[0092] Figure 8 Shown is a schematic structural diagram of a coating device provided in yet another embodiment of the present application.

[0093] In some embodiments, Figure 1 , Figure 3 and Figure 8 As shown, the process chamber 11 further has an inlet 112 and an outlet 113 arranged opposite to each other along the first direction. The inlet 112 and the outlet 113 are both connected to the process chamber 110 .

[0094] The coating device 10 further includes a transport component 18. The transport component 18 is at least partially disposed in the process chamber 110 and is located on a side of the shielding component 145 away from the sealed shell 13. The transport component 18 is configured to transport the object to be coated along a first direction.

[0095] The plurality of first openings 111 are arranged at intervals along the first direction.

[0096] Specifically, the to-be-coated part is coated to form a coated part. The feed port 112 is the entrance for the to-be-coated part to enter the process chamber 110. The discharge port 113 is the exit for the coated part to leave the process chamber 110.

[0097] For example, Figure 8As shown, the coating equipment 10 may include a plurality of chambers, and the transport component 18 transports the parts to be coated in other chambers to the process chamber 110 for coating, and transports the coated parts away from the process chamber 110. The transport component 18 may also be partially disposed in other chambers. Exemplarily, along the first direction, the coating equipment 10 may include: a loading chamber 117, a pretreatment chamber 118, a process chamber 110, a post-treatment chamber 119 and a unloading chamber 1110 that are interconnected in sequence. The loading chamber 117 is used to transport the parts to be coated into the chamber of the coating equipment 10. The pretreatment chamber 118 is used to pre-treat the parts to be coated, such as heating or cleaning. The post-treatment chamber 119 is used to post-treat the parts to be coated after coating, such as cooling or inert gas intervention. The unloading chamber 1110 transports the coated parts after coating away from the chamber of the coating equipment 10. The transport assembly 18 is disposed in the loading chamber 117 , the pre-processing chamber 118 , the process chamber 110 , the post-processing chamber 119 and the unloading chamber 1110 .

[0098] Exemplarily, the transport assembly 18 may include a motor (not shown) and a plurality of rollers 180. The motor drives the plurality of rollers 180 to rotate.

[0099] Exemplarily, the coating device 10 may further include at least one carrier plate 19. The carrier plate 19 is disposed on a side of the transport component 18 facing the target material 120 and is configured to carry at least one piece to be coated. The transport component 18 transports the piece to be coated by transporting the carrier plate 19.

[0100] Exemplarily, the coating device 10 may include a plurality of process chambers 110. The plurality of process chambers 110 may be used to coat the object to be coated. This arrangement allows the target material 120 corresponding to each process chamber 110 to be replaced without stopping the machine, further improving production efficiency.

[0101] The coating device 10 provided in this embodiment also includes a transport component 18, which can transport the parts to be coated along a first direction. A plurality of first openings 111 are arranged at intervals along the first direction, so that a plurality of target materials 120 can be arranged on the path of the parts to be coated. Each target material 120 can coat the parts to be coated, so that the coating device 10 can adapt to large-scale assembly line production to more efficiently coat a large number of parts to be coated.

[0102] Fig. 9 The present invention provides an embodiment of the present invention. Figure 3 The schematic diagram of the structure of the coating equipment after the sealing shell slides is shown.

[0103] In some embodiments, Figures 3 to 5 as well as Fig. 9As shown, the sealing shell 13 is slidably connected to the process chamber 11 along a second direction. The second direction is perpendicular to the first direction.

[0104] The coating device 10 also includes: a plurality of second drive components 20. The plurality of second drive components 20 are respectively connected to the plurality of sealed shells 13. The second drive component 20 is configured to drive the sealed shell 13 to approach the shielding component 145 along the second direction. This facilitates the third opening 1320 corresponding to the sealed shell 14 to be sealed by the shielding component 145, so that the accommodation space 130 corresponding to the sealed shell 13 forms a sealed space. The second drive component 20 can also be configured to drive the sealed shell 13 to separate from the shielding component 145 in the opposite direction of the second direction. So that the shielding component 145 opens at least part of the third opening 1320, so that the accommodation space 130 corresponding to the sealed shell 13 is connected to the process chamber 110.

[0105] Specifically, each sealed shell 13 can be driven by its corresponding second driving assembly 20 along the second direction to approach the shielding assembly 145 , or driven along the opposite direction of the second direction to move away from the shielding assembly 145 or separate from the shielding assembly 145 .

[0106] The working principle of the coating device 10 provided in this embodiment is described by taking the coating device 10 including two sets of target material assemblies 12 as an example. The second drive assembly 20 corresponding to the sealed shell 13a is expressed as the second drive assembly 20a. The second drive assembly 20 corresponding to the sealed shell 13b is expressed as the second drive assembly 20b.

[0107] For example, when the target 120b needs to be replaced, Fig. 9 As shown, the second driving assembly 20a can drive the sealed housing 13a to separate from the shielding assembly 145 in the opposite direction of the second direction. The second driving assembly 20b can also drive the sealed housing 13b to move away from the shielding assembly 145 in the opposite direction of the second direction. Then, as shown in FIG. Figure 4 As shown, the first driving assembly 15 drives the shielding assembly 145 to move, so that at least part of the third opening 1320a is opened, the accommodating space 130a is connected to the process chamber 110, and the third opening 1320b is covered. The second driving assembly 20a drives the sealing shell 13a to approach the shielding assembly 145 along the second direction, and the second driving assembly 20b drives the sealing shell 13b to approach the shielding assembly 145 along the second direction, so that the shielding assembly 145 seals the third opening 1320b corresponding to the target assembly 12b, and the accommodating space 130b corresponding to the target assembly 12b forms a sealed space.

[0108] Exemplarily, the coating device 10 further includes a second seal (not shown in the figure). The second seal is disposed between the sealing shell 13 and the process chamber 11. Exemplarily, the first end 131 of the sealing shell is slidably connected to the process chamber 11. A plurality of sealing rings are disposed around the first end 131 of the sealing shell so that when the second driving assembly 20b drives the sealing shell 13b to approach the shielding assembly 145 in the opposite direction of the second direction, the first end 131 of the sealing shell is still sealed and connected to the process chamber 11.

[0109] For example, the second drive assembly 20 may include any structure capable of driving the sealed housing 13 in the second direction or in the opposite direction of the second direction. Figure 2a and Fig. 9 As shown, the process chamber 11 has a plurality of second connection holes 21. The second drive assembly 20 includes a rotating wheel 200, a second connecting shaft 201 and a retractable connecting member 202. The retractable connecting member 202 is disposed in the process chamber 110 and connected to the sealed shell 13. One end of the second connecting shaft 201 is connected to the central hole of the rotating wheel 200, the second connecting shaft 201 passes through the second connecting hole 21 and is sealed and connected to the second connecting hole 21, and the side wall of the other end of the second connecting shaft 201 is connected to the retractable connecting member 202. The rotating wheel 200 is configured to drive the second connecting shaft 201 to rotate forward or reverse, so that the retractable connecting member 202 is wound around the side wall of the other end of the second connecting shaft 201 or is released by the side wall of the other end of the second connecting shaft 201. Thereby, the driving of the sealed shell 13 is realized. Exemplarily, the retractable connecting member 202 can be a rope or a metal chain.

[0110] Exemplarily, the second drive assembly 20 may include one or more of the following drive forms: a gear set, a sprocket chain, a lead screw guide, a cylinder, a motor, and a crank slider. This embodiment does not specifically limit the structure of the second drive assembly 20.

[0111] The coating equipment 10 provided in this embodiment also includes multiple second driving components 20. Each sealing shell 13 can be driven by its corresponding second driving component 20 to drive the sealing shell 13 along the second direction to approach the shielding component 145, or to drive the sealing shell 13 and the shielding component 145 in the opposite direction of the second direction to separate. This can avoid friction between the sealing shell 13 and the shielding component 145 when the shielding component 145 moves, thereby extending the service life of the shielding component 145 and the sealing shell 13 and reducing the movement complexity of the shielding component 145. The second driving component 20 drives the sealing shell 13 to move, and the first driving component 15 drives the shielding component 145 to move, thereby jointly realizing the sealing of the third opening 1320 or connecting the accommodating space 130 with the process chamber 110.

[0112] In some embodiments, step S600, the first driving component 15 of the coating device 10 drives at least a portion of the shielding component 145 of the coating device 10 to move, and the shielding component 145 blocks the communication between at least one containing space 130 and the process chamber 110, so that at least one containing space 130 forms a sealed space, and allows at least another containing space 130 to communicate with the process chamber 110, including: the first driving component 15 drives at least a portion of the shielding component 145 to move to cover at least one third opening 1320, and opens at least a portion of at least another third opening 1320, so that the containing space 130 corresponding to at least another third opening 1320 is connected to the process chamber 110; the second driving component 20 drives the sealing shell 13 corresponding to at least one third opening 1320 to approach the shielding component 145 along the second direction, so that the shielding component 145 is sealed with at least one third opening 1320, and the containing space 130 corresponding to at least one third opening 1320 forms a sealed space.

[0113] Exemplarily, before the first driving component 15 drives at least part of the shielding component 145 to move to cover at least one third opening 1320 and open at least part of at least another third opening 1320 so that the accommodating space 130 corresponding to at least another third opening 1320 is connected to the process chamber 110, the above-mentioned step S600 also includes: the second driving component 20 drives the sealing shell 13 corresponding to at least one group of target materials 120 away from the shielding component 145 in the opposite direction of the second direction.

[0114] Fig.10a Shown is a schematic structural diagram of a shielding member provided in one embodiment of the present application. Fig.10b The present invention provides an embodiment of the present invention. Fig.10a A partial enlarged schematic diagram of point C in the middle.

[0115] In some embodiments, Figure 3 , Figure 4 , Fig.10a and Fig.10b As shown, the shielding member 14 includes: a plurality of shielding portions 140 and at least one hollow portion 141 .

[0116] The shielding portion 140 is used to block the communication between the at least one accommodating space 130 and the process chamber 110. For example, the shielding portion 140 may also be used to cover the at least one third opening 1320.

[0117] At least one hollow portion 141 is located between adjacent shielding portions 140, and is used to allow at least another accommodating space 130 to communicate with the process chamber 110. The first driving assembly 15 is further configured to drive the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the communication between at least one accommodating space 130 and the process chamber 110, and the hollow portion 141 allows at least another accommodating space 130 to communicate with the process chamber 110.

[0118] Continuing to take the coating device 10 including two groups of target material assemblies 12 as an example, the working principle of the coating device 10 provided in this embodiment is described. Figure 3 The shielding portion 140 located on the left side in FIG. 1 may be referred to as shielding portion 140 a . Figure 3 The shielding portion 140 on the right side can be described as a shielding portion 140b. A hollow portion 141 is between the shielding portion 140a and the shielding portion 140b.

[0119] like Figure 3 As shown, the shielding portion 140a can be used to shield the target assembly 12a. When the shielding portion 140a blocks the communication between the accommodation space 130a and the process chamber 110, the hollow portion 141 allows the accommodation space 130b to communicate with the process chamber 110. After the shielding member 14 moves in the opposite direction of the first direction, as shown in FIG. Figure 4 As shown, the shielding portion 140 b shields the third opening 1320 b. When the shielding portion 140 b shields the third opening 1320 b, the hollow portion 141 communicates with the accommodating space 130 a and the process chamber 110 .

[0120] The number and area of ​​the shielding parts 140 can be set according to the number and position of the target assemblies 12. The number of hollow parts 141 can be set according to the number of shielding parts 140 and the number of targets 120 that need to be worked. Specifically, the hollow part 141 can open at least part of the third opening 1320, so that the accommodation space 130 corresponding to the third opening 1320 is connected to the process chamber 110. Exemplarily, the cross-sectional area of ​​the hollow part 141 can be set according to the size of the target 120. Exemplarily, the number of shielding members 14 can be one, and the number of shielding parts 140 is two. When the hollow part 141 opens at least part of at least one third opening 1320, the shielding part 140 can cover the remaining third openings 1320 to reduce the contamination of the working target 120 to the remaining target assemblies 12.

[0121] The coating equipment 10 provided in this embodiment, the shielding member 14 includes a plurality of shielding parts 140 and at least one hollow part 141, and the hollow part 141 is located between adjacent shielding parts 140. By moving a shielding member 14, the target materials 120 corresponding to different accommodating spaces 130 can be switched, which simplifies the movement of the shielding member 14, helps to reduce the time used for replacing the target material 120, and improves production efficiency.

[0122] In some embodiments, step S600 includes: the first driving component 15 drives the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the connection between at least one accommodating space 130 and the process chamber 110, at least one accommodating space 130 forms a sealed space, and the hollow portion 141 allows at least another accommodating space 130 to be connected to the process chamber 110.

[0123] In some embodiments, the second driving assembly 20 is further configured to drive the sealing shell 13 corresponding to at least one group of target assemblies 12 to approach the shielding portion 140 corresponding to at least one group of target assemblies 12 so that the third opening 1320 corresponding to at least one group of target assemblies 12 is sealed by the shielding portion 140 .

[0124] The working principle of the coating device 10 provided in this embodiment is described by taking the coating device 10 including two sets of target material assemblies 12 as an example. Figure 3 When the target 120b is working, the second driving assembly 20 drives the sealing shell 13a to approach the shielding portion 140a, so that the third opening 1320a is sealed by the shielding portion 140a. Thus, the inactive target 120 is sealed, so that at least part of the target assembly 12 in the sealed space corresponding to the target 120 is prevented from being contaminated, thereby increasing the life of the target assembly 12.

[0125] In some embodiments, step S600 includes: the first driving component 15 drives the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the connection between at least one accommodating space 130 and the process chamber 110, and the hollow portion 141 allows at least another accommodating space 130 to be connected with the process chamber 110; the second driving component 20 drives the sealing shell 13 corresponding to at least one third opening 1320 along the second direction to approach the shielding portion 140, so that the shielding portion 140 seals at least one third opening 1320, and the accommodating space 130 corresponding to at least one third opening 1320 forms a sealed space.

[0126] Exemplarily, the first driving component 15 drives the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the communication between at least one accommodating space 130 and the process chamber 110, and the hollow portion 141 allows at least another accommodating space 130 to communicate with the process chamber 110, which may include: the first driving component 15 drives the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 closes at least one third opening 1320 to block the communication between the accommodating space 130 corresponding to at least one third opening 1320 and the process chamber 110, and the hollow portion 141 opens at least part of at least another third opening 1320 to allow the accommodating space 130 corresponding to at least another third opening 1320 to communicate with the process chamber 110.

[0127] Exemplarily, before the first driving component 15 drives the shielding member 14 to move in the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the connection between at least one accommodating space 130 and the process chamber 110, and the hollow portion 141 allows at least another accommodating space 130 to be connected with the process chamber 110, the above-mentioned step S600 also includes: the second driving component 20 drives the sealing shell 13 corresponding to at least one group of target materials 120 away from the shielding portion 140 in the opposite direction of the second direction.

[0128] In some embodiments, Fig.10a As shown, the shielding member 14 also includes: at least two relatively arranged connecting portions 144. The connecting portions 144 connect adjacent shielding portions 140. The two relatively arranged connecting portions 144 and the adjacent shielding portions 140 enclose a hollow portion 141. The orthographic projection of the second end 132 of the sealing shell on the shielding member 14 can surround the hollow portion 141. Such an arrangement enables the two relatively arranged connecting portions 144 and the adjacent shielding portion 140 to shield the second end 132 of the sealing shell corresponding to the third opening 1320 connected to the process chamber 110, which is beneficial to reduce the contamination of the second end 132 of the sealing shell by particles of the target material 120, improve the matching accuracy of the sealing shell 13 and the shielding member 14, and improve the sealing between the sealing shell 13 and the shielding member 14.

[0129] Exemplarily, the orthographic projection of the second end 132 of the sealing shell on the shielding member 14 is annular, and the annular orthographic projection can surround the hollow portion 141 .

[0130] In some embodiments, the coating device 10 further includes: a first sealing member, which is disposed between the second end 132 of the sealing shell and the shielding assembly 145. This arrangement can improve the sealing performance between the sealing shell 13 and the shielding assembly 145.

[0131] Exemplarily, the first sealing member includes a sealing ring. At least one sealing ring is disposed on the side 14 of the second end 132 of the sealing shell facing the shielding member. This arrangement allows the sealing ring to move with the sealing shell 13, thereby increasing the accuracy of the first sealing member sealing the sealing shell 13 and the shielding assembly 145.

[0132] In some embodiments, the second driving assembly 20 is further configured to drive the sealing shell 13 corresponding to the accommodating space 130 connected to the process chamber 110 through the hollow portion 141 to approach the connecting portion 144 and the shielding portion 140, so that the connecting portion 144 and the shielding portion 140 are sealed and connected to the second end 132 of the sealing shell. In this way, the two relatively arranged connecting portions 144 and the adjacent shielding portion 140 can seal the second end 132 of the sealing shell corresponding to the accommodating space 130 connected to the process chamber 110, further reducing the contamination of the second end 132 of the sealing shell by particles of the target material 120, improving the matching accuracy of the sealing shell 13 and the shielding member 14, and improving the sealing between the sealing shell 13 and the shielding member 14.

[0133] In some embodiments, after the first driving component 15 drives the shielding member 14 to move along the first direction or the opposite direction of the first direction, so that the shielding portion 140 blocks the connection between at least one accommodating space 130 and the process chamber 110, and the hollow portion 141 allows at least another accommodating space 130 to be connected to the process chamber 110, step S600 also includes: the second driving component 20 drives the sealing shell 13 corresponding to at least one group of target materials 120 along the second direction to approach the shielding member 14, so that the relatively arranged connecting portion 144 and the adjacent shielding portion 140 seal the second end 132 of the sealing shell corresponding to the accommodating space 130 connected to the process chamber 110.

[0134] Fig.11a Shown is a schematic structural diagram of a target assembly, a shielding assembly and a portion of a process chamber provided in one embodiment of the present application. Fig.11b The present invention provides an embodiment of the present invention. Fig.11a A partial enlarged schematic diagram of point D in the middle. Fig.11c The present invention provides an embodiment of the present invention. Fig.11a A partial enlarged schematic diagram of point E in the middle. Fig.12 The present invention provides an embodiment of the present invention. Fig.11a Schematic diagram of the target assembly, shielding assembly and part of the process chamber from an overhead perspective.

[0135] In some embodiments, Figures 10a to 12 As shown, the process chamber 11 has a first guide groove 114 and a second guide groove 115 arranged opposite to each other along a third direction. The first guide groove 114 and the second guide groove 115 both extend along the first direction. The third direction is perpendicular to the first direction.

[0136] The shielding assembly 145 includes one or more plate-shaped shielding members 14. The first end 142 of the shielding assembly and the second end 143 of the shielding assembly are arranged opposite to each other along the third direction. The first end 142 of the shielding assembly and the second end 143 of the shielding assembly are inserted into the first guide groove 114 and the second guide groove 115 respectively.

[0137] Exemplarily, the shapes of the first guide groove 114 and the second guide groove 115 are respectively adapted to the shapes of the first end 142 and the second end 143 of the shielding assembly. Exemplarily, the cross-sectional shape of the shielding assembly 145 is a rectangle. The first end 142 and the second end 143 of the shielding assembly respectively correspond to two opposite sides of the rectangle.

[0138] Exemplarily, the third direction may be perpendicular to both the first direction and the second direction.

[0139] Exemplarily, the first guide groove 114 has at least one first guide portion 1140 on one side facing the first end 142 of the shielding assembly. The first guide portion 1140 extends along the first direction. The first end 142 of the shielding assembly includes at least one third guide portion 1420 on one side facing the first guide portion 1140. The third guide portion 1420 extends along the first direction. The first guide portion 1140 is adapted to the third guide portion 1420. Exemplarily, the first guide portion 1140 is a strip-shaped protrusion, and the third guide portion 1420 is a strip-shaped groove.

[0140] Exemplarily, the second guide groove 115 has at least one second guide portion 1150 on one side facing the second end 143 of the shielding assembly. The second guide portion 1150 extends along the first direction. The second end 143 of the shielding assembly includes at least one fourth guide portion 1430 on one side facing the second guide portion 1150. The fourth guide portion 1430 extends along the first direction. The second guide portion 1150 is adapted to the fourth guide portion 1430. Exemplarily, the second guide portion 1150 is a strip-shaped protrusion, and the fourth guide portion 1430 is a strip-shaped groove.

[0141] In the coating equipment 10 provided in this embodiment, the shielding component 145 is in the shape of a plate, and the movement of the shielding component 145 is guided by the first guide groove 114 and the second guide groove 115, thereby improving the movement accuracy of the shielding component 145, and the first end 142 of the shielding component and the second end 143 of the shielding component are respectively inserted into the first guide groove 114 and the second guide groove 115, which can reduce the contamination of the first end 142 of the shielding component, the second end 143 of the shielding component and the first guide groove 114 and the second guide groove 115 by particles in the process chamber 110, which is beneficial for the first guide groove 114 and the second guide groove 115 to maintain the guiding accuracy and reduce the maintenance of the coating equipment 10.

[0142] Fig.13Shown is a schematic structural diagram of a target assembly, a shielding assembly, a portion of a transport assembly and a portion of a process chamber provided in one embodiment of the present application. Fig.14a Shown is a schematic structural diagram of a target assembly, a shielding assembly, a portion of a transport assembly and a portion of a process chamber provided in another embodiment of the present application. Fig.14b The present invention provides an embodiment of the present invention. Fig.14a A partial enlarged schematic diagram of point F in the middle.

[0143] In some embodiments, Figures 10a to 14b As shown, the first end 142 of the shielding assembly has a first groove 1421. The first groove 1421 extends along the first direction, and the opening direction of the first groove 1421 is opposite to the opening direction of the first guide groove 114. A first rack 1422 is arranged in the first groove 1421. The first rack 1422 extends along the first direction.

[0144] The first driving assembly 15 includes: a first gear 150 and a first driving source 151. The first gear 150 is meshed with the first rack 1422. The first driving source 151 is connected to the first gear 150 and is configured to drive the first gear 150 to rotate, so as to drive the shielding assembly 145 to move.

[0145] Exemplarily, the first rack 1422 is disposed on a plane of the first groove 1421 that is parallel to the first direction and the third direction. The axis of the first gear 150 is parallel to the third direction. Exemplarily, the first driving source 151 can be disposed in the process chamber 110 or outside the process chamber 110.

[0146] In the coating device 10 provided in this embodiment, the first end 142 of the shielding assembly has a first groove 1421, and the opening direction of the first groove 1421 is opposite to the opening direction of the first guide groove 114, so that the first gear 150 and the first rack 1422 between the first groove 1421 and the first guide groove 114 are not easily contaminated by particles in the process chamber 110, which is conducive to maintaining the driving accuracy of the first driving assembly 15 and reducing the maintenance of the coating device 10. In addition, by driving the first rack 1422 to move by the first gear 150, the displacement of the shielding assembly 145 can be accurately controlled, the displacement accuracy of the shielding assembly 145 is guaranteed, and the accuracy of the matching between the shielding assembly 145 and the sealing shell 13 is improved.

[0147] In some embodiments, Fig.14b As shown, the first driving assembly 15 includes a first gear 150. The process chamber 11 has a first connecting hole 116. The first driving source 151 includes: a first connecting shaft 1510 and a first power member 1511.

[0148] One end 1512 of the first connecting shaft is connected to the first gear 150 . The first connecting shaft 1510 passes through the first connecting hole 116 and is sealed and connected to the first connecting hole 116 .

[0149] The first power member 1511 is connected to the second end 1513 of the first connecting shaft, and is configured to drive the first connecting shaft 1510 to rotate, so that the first connecting shaft 1510 drives the first gear 150 to rotate.

[0150] Exemplarily, the first connection hole 116 can connect the process chamber 110 with the outside. Exemplarily, the first connection shaft 1510 is sleeved with a first sealed bearing 1514, and the first sealed bearing 1514 is sealed and connected to the process chamber 11 to seal the first connection hole 116. Exemplarily, the first connection shaft 1510 is sealed and connected to the process chamber 11 by a magnetic fluid sealing technology. Exemplarily, a magnetic fluid is provided between the first connection shaft 1510 and the first sealed bearing 1514 to seal the first connection shaft 1510 and the first sealed bearing 1514. Exemplarily, a magnetic fluid can also be provided inside the first sealed bearing 1514.

[0151] Exemplarily, the first power member 1511 may include a pulley, and the pulley is driven by a belt to rotate to realize the rotation of the first connecting shaft 1510. Exemplarily, the first power member 1511 may also include a motor, such as a servo motor. This embodiment does not specifically limit the first power member 1511. Exemplarily, the moving distance of the shielding assembly 145 is controlled by controlling the rotation angle of the first gear 150.

[0152] In the coating equipment 10 provided in this embodiment, one end 1512 of the first connecting shaft is connected to the first gear 150, the first connecting shaft 1510 passes through the first connecting hole 116, and the second end 1513 of the first connecting shaft is connected to the first power member 1511, so that the first power member 1511 can be arranged outside the process chamber 110, which can avoid the interference of the first driving component 15 driving the first gear 150 to rotate on the coating process and improve the coating quality.

[0153] In some embodiments, Fig.12 As shown, the second end 143 of the shielding assembly has a second groove ( Fig.12 The second groove extends along the first direction. The opening direction of the second groove is opposite to the opening direction of the second guide groove 115. The second groove is provided with a second rack ( Fig.12 The second rack extends along the first direction.

[0154] The first driving assembly 15 includes: a second gear ( Fig.12The second gear is meshed with the second rack. The second driving source 152 is connected to the second gear and is configured to drive the second gear to rotate so as to drive the shielding assembly to move.

[0155] Exemplarily, the second rack is disposed on a plane of the second groove parallel to the first direction and the third direction. The axis of the second gear is parallel to the third direction. Exemplarily, the second driving source 152 can be disposed in the process chamber 110 or outside the process chamber 110.

[0156] Exemplarily, the first driving assembly 15 includes a first driving source 151 and a second driving source 152. The first driving source 151 and the second driving source 152 respectively drive the first gear and the second gear to rotate synchronously, so as to drive the shielding assembly 145 to move.

[0157] In some embodiments, the first driving assembly 15 includes a second gear. The process chamber 11 has a second connecting hole. The second driving source 152 includes: a second connecting shaft and a second power member.

[0158] One end of the second connecting shaft is connected to the second gear, and the second connecting shaft passes through the second connecting hole and is sealed and connected to the second connecting hole.

[0159] The second power member is connected to the second end of the second connecting shaft and is configured to drive the second connecting shaft to rotate so that the second connecting shaft drives the second gear to rotate.

[0160] Exemplarily, the second connecting hole can connect the process chamber 110 with the outside. Exemplarily, the second connecting sleeve is provided with a second sealed bearing, and the second sealed bearing is sealed and connected to the process chamber to seal the second connecting hole. Exemplarily, the second connecting shaft is sealed and connected to the process chamber by magnetic fluid sealing technology. Exemplarily, a magnetic fluid is provided between the second connecting shaft and the second sealed bearing to seal the second connecting shaft and the second sealed bearing. Exemplarily, a magnetic fluid may also be provided in the second sealed bearing.

[0161] For example, the second power member may include a pulley, and the pulley is driven by a belt to rotate to realize the rotation of the second connecting shaft. For example, the second power member may also include a motor, such as a servo motor. This embodiment does not specifically limit the second power member. For example, the moving distance of the shielding assembly 145 is controlled by the number of revolutions of the second gear.

[0162] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0163] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "provided with", "having", etc. are open words, referring to "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with it.

[0164] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0165] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0166] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.

Claims

1. A coating device, characterized in that: include: A process chamber, comprising a process chamber and a plurality of first openings, wherein the process chamber is configured to accommodate a piece to be coated, and the first openings can connect the process chamber with the outside; A plurality of target material assemblies are detachably connected to the process chamber; the target material assemblies include target materials; A plurality of sealed shells, wherein the first end of the sealed shell has a second opening, the second end of the sealed shell has a third opening, the sealed shell has a storage space communicating with the second opening and the third opening, the sealed shell is used to dock with the first opening and is sealedly connected to the process chamber, the storage space can communicate with the outside through the second opening, and can communicate with the process chamber through the third opening, the plurality of storage spaces can respectively accommodate the target materials, the targets of the plurality of target material assemblies extend into the storage space through the second opening respectively, and the target material assemblies block the communication between the storage space and the outside; A shielding component is disposed in the process chamber; a first driving assembly connected to the shielding assembly and configured to drive at least a portion of the shielding assembly to move so as to block the communication between at least one of the accommodating spaces and the process chamber and allow at least another of the accommodating spaces to communicate with the process chamber; Wherein, the coating equipment further has a plurality of through holes, and the plurality of through holes are respectively connected to the plurality of accommodating spaces.

2. The coating device according to claim 1, characterized in that: The process chamber also has a feed inlet and a discharge port arranged opposite to each other along a first direction, and both the feed inlet and the discharge port are connected to the process chamber; The coating equipment also includes: A transport component, at least partially disposed in the process chamber and located on a side of the shielding component away from the sealing shell, and configured to transport the piece to be coated along the first direction; Wherein, a plurality of the first openings are arranged at intervals along the first direction.

3. The coating device according to claim 2, characterized in that: The sealing shell is slidably connected to the process chamber along a second direction, and the second direction is perpendicular to the first direction; Wherein, the coating equipment further comprises: A plurality of second driving assemblies are respectively connected to the plurality of sealing shells, and are configured to drive the sealing shells along the second direction to approach the shielding assembly, or to drive the sealing shells along the opposite direction of the second direction to separate from the shielding assembly.

4. The coating device according to claim 2, characterized in that: The shielding assembly includes at least one shielding member; Wherein, the shielding member comprises: A plurality of shielding parts, used to block the communication between at least one of the accommodating spaces and the process chamber; at least one hollow portion, located between adjacent shielding portions, for allowing at least another accommodating space to communicate with the process chamber; Wherein, the first driving component is further configured to drive the shielding member to move along the first direction or the opposite direction of the first direction, so that the shielding portion blocks the connection between at least one of the accommodating spaces and the process chamber, and the hollow portion allows at least another of the accommodating spaces to communicate with the process chamber.

5. The coating device according to claim 4, characterized in that: The shielding member further comprises: At least two connecting parts arranged opposite to each other, the connecting parts connecting the adjacent shielding parts, and the two connecting parts arranged opposite to each other and the adjacent shielding parts enclosing the hollow part; Wherein, the orthographic projection of the second end of the sealing shell on the shielding member can surround the hollow portion.

6. The coating device according to claim 2, characterized in that: The process chamber has a first guide groove and a second guide groove which are arranged opposite to each other along a third direction, wherein the first guide groove and the second guide groove both extend along the first direction, wherein the third direction is perpendicular to the first direction; The shielding assembly includes one or more plate-shaped shielding members, the first end of the shielding assembly and the second end of the shielding assembly are relatively arranged along the third direction, and the first end of the shielding assembly and the second end of the shielding assembly are respectively inserted into the first guide groove and the second guide groove.

7. The coating device according to claim 6, characterized in that: The first end of the shielding assembly has a first groove, the first groove extends along the first direction, the opening direction of the first groove is opposite to the opening direction of the first guide groove, a first rack is arranged in the first groove, and the first rack extends along the first direction; The first driving assembly comprises: a first gear meshing with the first rack; a first driving source connected to the first gear and configured to drive the first gear to rotate so as to drive the shielding assembly to move, and / or The second end of the shielding assembly has a second groove, the second groove extends along the first direction, the opening direction of the second groove is opposite to the opening direction of the second guide groove, a second rack is arranged in the second groove, and the second rack extends along the first direction; The first driving assembly comprises: a second gear, the second gear meshing with the second rack; The second driving source is connected to the second gear and is configured to drive the second gear to rotate so as to drive the shielding assembly to move.

8. The coating device according to claim 7, characterized in that: In the case where the first driving assembly includes the first gear, the process chamber has a first connecting hole, and the first driving source includes: a first connecting shaft, one end of which is connected to the first gear, and the first connecting shaft passes through the first connecting hole and is sealed and connected to the first connecting hole; The first power member is connected to the second end of the first connecting shaft and is configured to drive the first connecting shaft to rotate so that the first connecting shaft drives the first gear to rotate.

9. The coating device according to any one of claims 1 to 8, characterized in that: Also includes: The first sealing member is arranged between the second end of the sealing shell and the shielding assembly.

10. A coating method, characterized in that: Applied to the coating device according to any one of claims 1 to 9, the coating method comprises: The first driving component of the coating device drives at least part of the shielding component of the coating device to move, and the shielding component blocks the communication between at least one of the accommodating spaces and the process chamber, so that at least one of the accommodating spaces forms a sealed space, and allows at least another of the accommodating spaces to communicate with the process chamber; venting the sealed space through the through hole of the coating device; After the air pressure in the sealed space is equal to the external air pressure, the target material of the coating device corresponding to at least one of the accommodating spaces is replaced.

11. The coating method according to claim 10, characterized in that: After the air pressure in the sealed space is equal to the external air pressure, replacing the target material of the coating device corresponding to at least one of the accommodating spaces comprises: After the air pressure in the sealed space is equal to the external air pressure, removing at least one group of target material components of the coating equipment having the used target material from the process chamber of the coating equipment; Removably installing at least one group of the target material assemblies having unused target materials in the process chamber, so that the target material assemblies block the communication between the accommodation space and the outside; The sealed space is evacuated through the through hole so that the air pressure in the sealed space is equal to the air pressure in the process chamber.

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