Sensor position adjusting device and semiconductor device

Abstract

According to the sensor position adjusting device and the semiconductor device, when the sensor position adjusting device works, a gear transmission mechanism in a driving unit drives an adjusting block to move on a guiding unit in the first direction through gear meshing transmission, so that a sensor arranged on the adjusting block moves in the first direction. When the gear transmission mechanism carries out transmission, accidental displacement in the adjusting process can be effectively prevented, so that the position of the sensor arranged on the adjusting block is not prone to deviation, the stability and accuracy of sensor position adjustment are guaranteed, the risk of introducing errors in the operation process is reduced, and accurate adjustment of the position of the sensor can be achieved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of semiconductor equipment, and in particular to a sensor position adjustment device and a semiconductor equipment. Background Art

[0002] In the field of semiconductor manufacturing, many process steps need to be carried out in a vacuum environment. Physical vapor deposition (PVD) is one of the commonly used thin film preparation methods. The PVD process is usually carried out in a sealed chamber with a pedestal for supporting the wafer.

[0003] In the physical vapor deposition process, there are some specific process steps, such as the target pre-burning process or the coating process. In these process steps, the target material is easily deposited on the susceptor, which can cause a variety of problems, including particle generation, susceptor damage, and process performance degradation. To solve this problem, a shielding disk is introduced. When performing the above-mentioned specific processes, the shielding disk is placed above the susceptor to prevent the target material from being directly deposited on the susceptor; when performing the normal deposition process, the shielding disk needs to be rotated to an empty position in the chamber to avoid interfering with the deposition process.

[0004] However, the use of a shielding disk introduces new technical challenges. First, the position of the shielding disk needs to be precisely controlled to ensure that it correctly covers the susceptor in a specific process, while not interfering with the deposition process in a normal process. Second, because the shielding disk rotates in a sealed chamber, the operator cannot directly observe its position, so a sensor is used to detect the position of the shielding disk.

[0005] Taking into account the chamber processing and assembly tolerances, when using the sensor to actually detect the position of the shielding disk, the sensor needs to be position adjusted, but the accuracy of the existing position adjustment method needs to be further improved. Summary of the invention

[0006] The problem solved by the embodiments of the present invention is to provide a sensor position adjustment device and a semiconductor device, which are used to reduce the risk of introducing errors during operation and can achieve precise adjustment of the sensor position.

[0007] To solve the above problems, an embodiment of the present invention provides a sensor position adjustment device, comprising: a base unit; a guide unit, which is arranged on the base unit and extends along a first direction; an adjustment block, which is slidably arranged on the guide unit along the first direction, and the adjustment block is used to set the sensor; a driving unit, which is connected to the adjustment block, and the driving unit includes a gear transmission mechanism for driving the adjustment block to move on the guide unit along the first direction.

[0008] Optionally, the adjustment block includes a threaded hole extending along a first direction; the gear transmission mechanism includes: an adjusting screw, including an adjusting end and an adjusting screw connected to the adjusting end; a first gear, fixedly arranged on the adjusting screw; an adjusting shaft, including an optical axis portion and a threaded portion, the threaded portion and the threaded hole are threadedly matched; a second gear, fixedly arranged on the optical axis portion, the second gear is meshed with the first gear.

[0009] Optionally, the driving unit further includes: a support block fixedly disposed on the base unit; the adjusting screw passes through the support block, the adjusting end is located at the top of the support block, and the adjusting screw is located at the bottom of the support block.

[0010] Optionally, the driving unit further includes: a sleeve, located between the supporting block and the first gear, and the adjusting screw penetrates the sleeve.

[0011] Optionally, the guide unit includes: a supporting front plate, which is arranged on the base unit; a supporting rear plate, which is arranged on the base unit; a plurality of supporting columns, which are arranged between the supporting front plate and the supporting rear plate, and the supporting columns extend along the first direction; the adjustment block includes a plurality of through holes, and the through holes extend along the first direction, and the through holes are slidably matched with the supporting columns.

[0012] Optionally, a through hole is provided on the supporting rear plate; the optical axis portion passes through the through hole of the supporting rear plate; and the second gear is located on the optical axis portion on a side of the supporting rear plate away from the adjustment block.

[0013] Optionally, a groove is provided on the supporting front plate; the adjusting shaft further comprises: a recessed portion, located on a side of the threaded portion away from the optical axis portion, the recessed portion being provided in the groove.

[0014] Optionally, the adjustment block includes: a guide portion, used to cooperate with the guide unit; a threaded transmission portion, connected to the guide portion, and provided with the threaded hole; and a mounting portion, connected to the threaded transmission portion, for mounting the sensor.

[0015] Optionally, the base unit has a symmetrical structure, the guide unit, the adjustment block, the sensor and the drive unit constitute a sensing unit, and the sensor position adjustment device includes two sensing units, which are respectively located on both sides of the base unit.

[0016] An embodiment of the present invention also provides a semiconductor device, comprising: a chamber; a base located at the bottom of the chamber, the base being used to support a wafer; a cavity located on the side wall of the chamber and connected to the chamber; a shielding plate located in the cavity or the chamber, the shielding plate moving between the cavity and the chamber and being used to move from the cavity to above the base during the process; the sensor position adjustment device being arranged outside the cavity; and a sensor being arranged on the sensor position adjustment device and being used to detect the position of the shielding plate.

[0017] Optionally, a transparent window is provided on the cavity; the sensor position adjustment device makes the sensor correspond to the transparent window, and the sensor detects the position of the shielding plate through the transparent window.

[0018] Compared with the prior art, the technical solution of the embodiment of the present invention has the following advantages:

[0019] The sensor position adjustment device provided by the embodiment of the present invention comprises: a base unit; a guide unit, which is arranged on the base unit, and the guide unit extends along a first direction; an adjustment block, which is slidably arranged on the guide unit along the first direction, and the adjustment block is used to set a sensor; a driving unit, which is connected to the adjustment block, and the driving unit comprises a gear transmission mechanism, which is used to drive the adjustment block to move along the first direction on the guide unit. When the sensor position adjustment device provided by the embodiment of the present invention is working, the gear transmission mechanism in the driving unit drives the adjustment block to move along the first direction on the guide unit through gear meshing transmission, so that the sensor set on the adjustment block moves along the first direction. When the gear transmission mechanism is transmitting, it can effectively prevent accidental displacement during the adjustment process, so that the position of the sensor set on the adjustment block is not easy to shift, thereby ensuring the stability and accuracy of the sensor position adjustment, reducing the risk of introducing errors during operation, and realizing accurate adjustment of the sensor position. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a structural schematic diagram of a sensor position adjustment device according to an embodiment of the present invention at one viewing angle;

[0021] Figure 2 is a structural schematic diagram of the sensor position adjustment device according to another perspective of an embodiment of the present invention;

[0022] Figure 3 is a schematic structural diagram of a base unit according to an embodiment of the present invention;

[0023] Figure 4 is a schematic structural diagram of a guide unit disposed on a base unit in an embodiment of the present invention;

[0024] Figure 5is a schematic diagram of the structure of the supporting front plate according to an embodiment of the present invention;

[0025] Figure 6 is a schematic diagram of the structure of the supporting rear plate according to an embodiment of the present invention;

[0026] Figure 7 is a schematic diagram of the structure of the adjustment block according to an embodiment of the present invention;

[0027] Figure 8 is a schematic structural diagram of an adjusting shaft according to an embodiment of the present invention;

[0028] Fig. 9 is a schematic structural diagram of a semiconductor device from one perspective according to an embodiment of the present invention;

[0029] Fig.10 It is a schematic structural diagram of the semiconductor device from another perspective of an embodiment of the present invention. DETAILED DESCRIPTION

[0030] As known from the background art, considering the chamber processing and assembly tolerances, when using the sensor to actually detect the position of the shielding disk, the position of the sensor needs to be adjusted, but the accuracy of the existing position adjustment method needs to be further improved.

[0031] The existing sensor position adjustment device includes a fixing member and a sensor fixing screw, wherein the sensor is mounted on a quartz window in the chamber wall through the fixing member so as to be able to send a signal into the chamber through the quartz window. Specifically, the sensor is fixed to the fixing member through a fixing screw, and the screw is set in an oblong hole. When the screw is loosened, the screw can slide in the oblong hole, thereby driving the sensor to move. When the sensor is moved to the corresponding position, the fixing screw is tightened to complete the adjustment.

[0032] However, the sensor adjustment device needs to loosen or tighten the screws when adjusting the position of the sensor. This adjustment method is cumbersome to operate, and after the position is determined, tightening the screws will cause the sensor to shift, thereby deviating from the predetermined position.

[0033] In order to solve the technical problem, the sensor position adjustment device provided in the embodiment of the present invention includes: a base unit; a guide unit, which is arranged on the base unit, and the guide unit extends along a first direction; an adjustment block, which is slidably arranged on the guide unit along the first direction, and the adjustment block is used to set a sensor; a driving unit, which is connected to the adjustment block, and the driving unit includes a gear transmission mechanism, which is used to drive the adjustment block to move along the first direction on the guide unit. When the sensor position adjustment device provided in the embodiment of the present invention is working, the gear transmission mechanism in the driving unit works, and through precise gear meshing and transmission, the adjustment block is driven to move along the first direction on the guide unit, and the corresponding sensor set on the adjustment block moves along the first direction. First of all, transmission through the gear transmission mechanism can effectively prevent accidental displacement during the adjustment process, ensure the stability and accuracy of the adjustment, so that the position of the sensor set on the adjustment block is not easy to be offset, and the precise adjustment of the sensor position can be achieved, reducing the risk of introducing errors during operation.

[0034] In order to make the above-mentioned purposes, features and advantages of the embodiments of the present invention more obvious and understandable, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0035] refer to Figure 1 and Figure 2 A sensor position adjustment device provided by an embodiment of the present invention includes: a base unit 1; a guide unit, which is arranged on the base unit 1 and extends along a first direction; an adjustment block 2, which is slidably arranged on the guide unit along the first direction, and the adjustment block 2 is used to set a sensor 3; a driving unit, which is connected to the adjustment block 2, and the driving unit includes a gear transmission mechanism, which is used to drive the adjustment block 2 to move on the guide unit along the first direction.

[0036] When the sensor position adjustment device provided by the embodiment of the present invention is working, the gear transmission mechanism in the driving unit drives the adjustment block 2 to move along the first direction on the guide unit through gear meshing transmission, so that the sensor 3 set on the adjustment block 2 moves along the first direction. When the gear transmission mechanism is transmitting, it can effectively prevent accidental displacement during the adjustment process, so that the position of the sensor 3 set on the adjustment block 2 is not easy to shift, ensuring the stability and accuracy of the sensor position adjustment, improving the adjustment efficiency, reducing the risk of introducing errors during operation, and realizing accurate adjustment of the position of the sensor 3.

[0037] The base unit 1 serves as a mounting platform, so that the guide unit, the adjustment block 2, the drive unit, and the sensor 3 mounted thereon can operate accurately.

[0038] In this embodiment, Figure 3As shown, the base unit 1 includes: a first side wall structure 11 and a second side wall structure 12 that are relatively spaced apart; a top structure 13, which is located at the top of the first side wall structure 11 and the second side wall structure 12, and simultaneously connects the top of the first side wall structure 11 and the second side wall structure 12; two bottom structures 14, which are respectively arranged at the bottom of the first side wall structure 11 and the second side wall structure 12, and the two bottom structures 14 are away from the space between the first side wall structure 11 and the second side wall structure 12.

[0039] The base unit 1 forms a stable frame through the first side wall structure 11 and the second side wall structure 12 that are relatively spaced apart, and the top structure 13 connecting them, which is conducive to enhancing the stability of the base unit 1 itself and also provides a reliable installation foundation for the guide unit, the adjustment block 2 and the sensor 3. In addition, the two bottom structures 14 are away from the space between the first side wall structure 11 and the second side wall structure 12, so that other structures can be installed in the space between the first side wall structure 11 and the second side wall structure 12, which is conducive to improving space utilization.

[0040] Specifically, screw holes for fixing are arranged on the first side wall structure 11 , the second side wall structure 12 , the top structure 13 and the bottom structure 14 .

[0041] The guide unit is disposed on the base unit 1 , and the guide unit extends along a first direction.

[0042] By limiting the movement of the guide unit along the first direction, a stable and precise moving track is provided for the adjustment block 2, so that the position adjustment accuracy of the sensor 3 is higher; although the guide unit does not directly contact the sensor 3, by controlling the movement of the adjustment block 2, the accuracy of the position adjustment of the sensor 3 can be indirectly improved.

[0043] like Figure 4 As shown, the guide unit includes: a supporting front plate 4, which is arranged on the base unit 1; a supporting rear plate 5, which is arranged on the base unit 1; and a plurality of supporting columns 6, which are arranged between the supporting front plate 4 and the supporting rear plate 5.

[0044] The support front plate 4 and the support rear plate 5 are fixed on the base unit 1 to form a stable support for the support column 6, ensuring the rigidity and stability of the guide unit; a plurality of support columns 6 are arranged between the support front plate 4 and the support rear plate 5 to act as guide rails.

[0045] As an example, the support front plate 4 is L-shaped, and the support rear plate 5 is also L-shaped. In other embodiments, the support front plate and the support rear plate may also be other shapes.

[0046] like Figure 5 and Figure 6As shown, the support front plate 4 and the support rear plate 5 are respectively fixed on the first side wall structure 11 and the second side wall structure 12. Specifically, the support front plate 4 is fixed to the first side wall structure 11 of the base unit 1 by screws, and the support rear plate 5 is fixed to the second side wall structure 12 of the base unit 1 by screws.

[0047] It should be noted that the extension of the guide unit along the first direction refers to the extension of the support column 6 along the first direction.

[0048] like Figure 7 As shown, the adjustment block 2 is slidably arranged on the guide unit along the first direction, and the adjustment block 2 is used to set the sensor 3.

[0049] The adjustment block 2 provides a mounting platform for the sensor 3 . When the sensor position adjustment device is working, the adjustment block 2 slides on the guide unit, and the sensor 3 moves following the adjustment block 2 .

[0050] In this embodiment, the adjustment block 2 includes a plurality of through holes 21 , and the through holes 21 extend along a first direction, and the through holes 21 are slidably matched with the support pillars 6 .

[0051] The through hole 21 of the adjustment block 2 plays a guiding and supporting role. The number of through holes 21 not only enhances the stability of the structure, but also improves the accuracy of adjustment, is conducive to dispersing the force points, reduces the shaking or offset that may occur during the adjustment process, and ensures the accuracy and reliability of the position adjustment of the sensor 3. In addition, the through hole 21 extends along the first direction, which is consistent with the movement direction of the adjustment block, reducing interference in other directions.

[0052] In this embodiment, the adjustment block 2 includes: a guide portion 22, which is used to cooperate with the guide unit.

[0053] The guide portion 22 of the adjustment block 2 is used to make the adjustment block 2 move along the first direction under the drive of the guide unit, thereby reducing the offset and shaking of the sensor 3 and improving the position adjustment accuracy of the sensor 3. The threaded hole 24 of the threaded transmission portion 23 cooperates with the thread of the driving unit to convert the rotational motion into precise linear motion, thereby achieving micron-level position adjustment.

[0054] In this embodiment, the adjustment block 2 further includes: a threaded transmission part 23 connected to the guide part 22 , and a threaded hole 24 is provided on the threaded transmission part 23 , and the threaded hole 24 extends along the first direction.

[0055] In this embodiment, the threaded hole 24 is a T-shaped thread. Compared with ordinary threads, T-shaped threads provide a larger contact area, which helps to improve load capacity and movement stability; and because the contact area is increased, the pressure distribution is more uniform, which can reduce thread wear and extend service life; in addition, the special shape of the T-shaped thread helps to reduce clearance and backlash, thereby improving the accuracy of position adjustment of the sensor 3.

[0056] In this embodiment, the adjustment block 2 further includes: a mounting portion 25 connected to the threaded transmission portion 23 and used for mounting the sensor 3 .

[0057] In this embodiment, two sides of the mounting portion 25 are respectively used to mount one of the sensors 3 , and one of the sensors 3 is located between the guide portion 22 and the mounting portion 25 .

[0058] The mounting portion 25 provides mounting locations for a plurality of sensors 3. By mounting the sensors 3 on both sides of the mounting portion 25 and placing one of the sensors 3 between the guide portion 22 and the mounting portion 25, space utilization is improved. In addition, by having a plurality of sensors 3 working simultaneously at different locations, data collection capability and accuracy are enhanced.

[0059] It should be noted that the mounting portion 25, the guide portion 22 and the threaded transmission portion 23 are an integrated structure. The mounting portion 25, the guide portion 22 and the threaded transmission portion 23 are an integrated structure to improve assembly efficiency, achieve more compact space utilization, reduce the connection points between parts, and reduce potential movement errors. In other embodiments, the mounting portion, the guide portion and the threaded transmission portion can also be a single component, which is assembled to form an adjustment block.

[0060] The driving unit is disposed on the base unit and connected to the adjusting block 2 . The driving unit includes a gear transmission mechanism for driving the adjusting block 2 to move along the first direction on the guiding unit.

[0061] The driving unit realizes the precise movement of the adjustment block 2 in the first direction through the gear transmission mechanism. The gear transmission mechanism is used to prevent accidental displacement during the sensor adjustment process. Both ensure the stability and accuracy of the position adjustment of the sensor 3.

[0062] In this embodiment, the driving unit and the adjusting block 2 are transmitted through threaded cooperation, and the adjusting block 2 is located on the side of the base unit 1 .

[0063] In this embodiment, the threaded cooperation between the driving unit and the adjusting block 2 can convert the rotational motion into the linear motion of the adjusting block 2 .

[0064] Specifically, the adjustment block 2 includes a threaded hole 24 extending along a first direction, and the gear transmission mechanism includes: an adjustment screw 7, including an adjustment end and an adjustment screw connected to the adjustment end; a first gear 8, fixedly arranged on the adjustment screw; an adjustment shaft 9 (such as Figure 8 As shown), it includes an optical axis portion 93 and a threaded portion 91, and the threaded portion 91 is threadedly matched with the threaded hole 24; the second gear 11 is fixedly arranged on the optical axis portion 93, and the second gear 11 is meshed with the first gear 8.

[0065] The first gear 8 is driven to rotate by the rotation of the adjusting screw 7, and the second gear 11 is driven to rotate by the gear meshing, so that the adjusting shaft 9 rotates, and then the threaded portion 91 on the adjusting shaft 9 is threadedly matched with the threaded hole 24 in the adjusting block 2, and finally the threaded match converts the rotational motion into the linear motion of the adjusting block 2. This transmission method has high adjustment accuracy and stability. Moreover, the threaded match between the threaded portion 91 on the adjusting shaft 9 and the threaded hole 24 in the adjusting block 2 is self-locking, which can prevent the sensor 3 from accidentally moving during the adjustment process.

[0066] In this embodiment, the first gear 8 is fixed to the adjusting screw by a set screw. The first gear 8 is fixed to the adjusting screw by a set screw, so that a stable connection is achieved between the first gear 8 and the adjusting screw, providing a reliable basis for transmission. Specifically, the first gear 8 can have a threaded hole 24 on its side for installing a set screw, and the set screw passes through the threaded hole 24 of the first gear 8, and its end is pressed against the surface of the adjusting screw or a preset groove.

[0067] In this embodiment, the driving unit further includes: a supporting block 10 fixedly disposed on the base unit 1 .

[0068] The support block 10 is fixedly arranged on the base unit 1 to ensure the structural stability of the driving unit and provide reliable support for the adjusting screw 7. The support block 10 is firmly connected to the base unit 1, so that the adjusting screw 7 can maintain stable movement in the vertical direction, and also provides a stable working platform for other transmission components such as the gear transmission structure.

[0069] In this embodiment, the support block 10 is fixedly arranged on the top structure 13 of the base unit 1 by screws. In other embodiments, the support block can also be connected to the base unit by other means.

[0070] In this embodiment, the adjusting screw 7 passes through the supporting block 10 , the adjusting end is located at the top of the supporting block 10 , and the adjusting screw is located at the bottom of the supporting block 10 .

[0071] The adjusting screw 7 penetrates the support block 10, so that the adjusting end is located at the top of the support block 10, and the adjusting screw is located at the bottom, forming a vertically penetrating operating component. By placing the adjusting end at the top, the operator can easily perform the adjustment operation, and the adjusting screw at the bottom can be effectively connected with other transmission components (such as a gear transmission mechanism). In addition, the vertical penetration structure of the adjusting screw 7 allows it to have a larger adjustment range, increasing the flexibility and adaptability of the sensor position adjustment device.

[0072] It should be noted that the portion of the support block 10 that is fixedly connected to the top structure 13 and the portion of the support block 10 through which the adjusting screw 7 passes are at different heights, so that the support block 10 can adapt to various spatial position requirements.

[0073] As an example, the adjustment end is in a shape suitable for manual operation, such as a hexagonal shape or with a handle.

[0074] It should be noted that the first gear 8 is arranged between the support block 10 and the support rear plate 5. The first gear 8 is arranged between the support block 10 and the support rear plate 5, so that the first gear 8 is close to the adjustment shaft 9, so that the first gear 8 is easy to mesh with the second gear 11 on the adjustment shaft 9, which is conducive to preventing accidental displacement during sensor adjustment.

[0075] In this embodiment, a groove 41 is provided on the supporting front plate 4 ; the adjusting shaft 9 further includes: a recess 92 located at a side of the threaded portion 91 away from the optical axis portion 93 , and the recess 92 is provided in the groove 41 .

[0076] The groove 41 on the support front plate 4 and the recess 92 on the adjustment shaft 9 are used to realize the positioning and limiting functions of the adjustment shaft 9, which is beneficial to the stability of the gear transmission structure. Specifically, the cooperation between the groove 41 and the recess 92 not only provides a support point when the adjustment shaft 9 rotates, but also effectively prevents the adjustment shaft 9 from axial displacement during operation, and ensures the accuracy and repeatability of the adjustment process by limiting the unnecessary movement of the adjustment shaft 9.

[0077] It should be noted that the cooperation between the groove 41 and the recess 92 needs to ensure that the adjustment shaft 9 can rotate smoothly in the groove 41 while maintaining sufficient stability.

[0078] It should also be noted that the adjustment shaft 9 is arranged horizontally, which provides a stable operation basis for the precise position adjustment of the sensor 3 and is conducive to the accuracy and convenience of the position adjustment of the sensor 3 .

[0079] In this embodiment, the optical axis portion 93 is located outside the adjustment block 2. The optical axis portion 93 is located outside the adjustment block 2, which provides space for the installation of the second gear 11 and can reduce the complexity of the interior of the adjustment block 2.

[0080] In this embodiment, a through hole 51 is provided on the supporting rear plate 5 ; the optical axis portion 93 passes through the through hole 51 of the supporting rear plate 5 .

[0081] In this embodiment, the second gear 11 is located on the optical axis portion 93 of the supporting rear plate 5 away from the adjusting block 2. By arranging the second gear 11 on the optical axis portion 93 of the supporting rear plate 5 away from the adjusting block 2, the second gear 11 is easy to assemble and maintain.

[0082] As an example, the second gear 11 is fixed to the optical axis portion 93 by a set screw. The second gear 11 is fixed to the optical axis portion 93 by a set screw, so that the second gear 11 and the optical axis portion 93 are firmly connected, providing a reliable basis for transmission. Specifically, the second gear 11 can have a threaded hole 24 on its side for installing a set screw, and the set screw passes through the threaded hole 24 of the gear, and its end is pressed against the surface of the optical axis portion 93 or a preset groove.

[0083] It should be noted that the driving unit further includes: a sleeve 12, which is located between the support block 10 and the first gear 8, and the sleeve 12 is penetrated by the adjusting screw.

[0084] The sleeve 12 is located between the support block 10 and the first gear 8 and is penetrated by the adjusting screw. The sleeve 12 limits the axial movement of the first gear 8, so that during the transmission process, the rotational movement of the adjusting screw can be transmitted to the first gear 8 more smoothly and accurately, and then drive the adjustment block 2 to move through the gear transmission mechanism.

[0085] In this embodiment, the sleeve 12 is mounted on the support block 10 by interference fit or other fixing methods, with its upper end in contact with the lower surface of the support block 10 and its lower end in contact with the upper surface of the first gear 8 .

[0086] When the sensor position adjustment device is working, the operator rotates the adjustment screw 7 in the drive unit, and the rotational motion of the adjustment screw 7 is transmitted to the first gear 8 through the adjustment screw. In this process, the sleeve 12 plays a supporting and guiding role in the axial direction of the adjustment screw 7, which is conducive to ensuring the smooth and accurate transmission of the motion. Because the first gear 8 is meshed with the second gear 11 fixed on the optical axis portion 93 of the adjustment shaft 9, when the first gear 8 rotates, it drives the second gear 11 to rotate, thereby driving the adjustment shaft 9 to rotate. The threaded portion 91 of the adjustment shaft 9 is threadedly matched with the threaded hole 24 on the adjustment block 2. As the adjustment shaft 9 rotates, the threaded transmission converts the rotational motion into the linear motion of the adjustment block 2, effectively preventing accidental displacement during the adjustment process. Under the action of the threaded transmission, the adjustment block 2 slides precisely and controllably in the first direction along the guide unit (such as the support column 6), and the sliding accuracy is guaranteed by the accuracy of the gear transmission mechanism. Since the sensor 3 is fixed on the adjustment block 2, as the adjustment block 2 moves, the position of the sensor 3 is also accurately adjusted. By controlling the rotation angle of the adjusting screw 7, the position of the sensor 3 can be fine-tuned. The gear transmission mechanism and the threaded joints improve the high precision and stability of the adjustment. When the sensor 3 reaches the desired position, stop rotating the adjusting screw 7, and the sensor 3 will remain in the adjusted position and will not easily deviate.

[0087] In addition, in this embodiment, the base unit 1 has a symmetrical structure, the guide unit, the adjustment block 2, the sensor 3 and the drive unit constitute a sensing unit, and the sensor position adjustment device includes two sensing units, which are respectively located on both sides of the base unit 1.

[0088] The symmetrical structure of the base unit 1 is conducive to evenly distributing the force of the sensor position adjustment device, improving the balance of the sensor position adjustment device, and the sensors 3 on both sides can be adjusted independently without interfering with each other, which is convenient for separate maintenance or upgrading, and is conducive to improving the accuracy and flexibility of the position adjustment of the sensor 3. By matching sensors 3 of different types or specifications in different sensing units, complex application requirements can also be met.

[0089] refer to Fig. 9 and Fig.10 The embodiment of the present invention also provides a semiconductor device, including: a chamber 100; a base 200, located at the bottom of the chamber 100, and the base 200 is used to carry a wafer; a cavity 300, located on the side wall of the chamber 100 and connected to the chamber 100; a shielding plate 400, arranged in the cavity 300, and used to move from the cavity 300 to the top of the base 200 during the process; the sensor position adjustment device 500, arranged outside the cavity 300; a sensor 3, arranged on the sensor position adjustment device 500, and used to detect the position of the shielding plate 400.

[0090] When the semiconductor device provided by the embodiment of the present invention performs a physical vapor deposition process, the shielding plate 400 moves from the cavity 300 to the top of the base 200 to shield the base 200, so that the target material during the physical vapor deposition process will not be deposited on the base 200. When it is necessary to detect the position of the shielding plate 400, the sensor position adjustment device 500 provided by the embodiment of the present invention is used to accurately adjust the position of the sensor 3. Through the gear transmission mechanism in the driving unit, the adjustment block 2 can be driven to accurately move along the first direction on the guide unit, driving the sensor 3 to accurately move in the first direction, achieving high-precision adjustment of the position of the sensor 3, effectively preventing accidental displacement during the adjustment process, and ensuring the stability and accuracy of the adjustment.

[0091] In this embodiment, a transparent window (not shown in the figure) is provided on the cavity 300; the sensor position adjustment device 500 makes the sensor 3 correspond to the transparent window, and the sensor 3 detects the position of the shielding plate 400 through the transparent window.

[0092] A transparent window is provided on the cavity 300, and the sensor position adjustment device 500 is provided outside the cavity 300, so that the sensor 3 corresponds to the transparent window, and the position of the shielding plate 400 is detected through the transparent window, which not only enables the sensor 3 to accurately detect the position of the shielding plate 400, but also avoids the sensor 3 from being directly exposed to the corrosive gas or high temperature environment that may exist in the chamber 100, thereby extending the service life of the sensor 3. By arranging the sensor position adjustment device 500 outside the cavity 300 and combining the use of the transparent window, the precise adjustment of the position of the sensor 3 is achieved, thereby improving the accuracy and reliability of the semiconductor device.

[0093] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. A sensor position adjustment device, characterized in that: include: Base unit; A guide unit, disposed on the base unit, and extending along a first direction; an adjusting block, slidably disposed on the guide unit along the first direction, the adjusting block being used to set a sensor; A driving unit is arranged on the base unit and connected to the adjusting block. The driving unit comprises a gear transmission mechanism for driving the adjusting block to move along the first direction on the guiding unit.

2. The sensor position adjustment device according to claim 1, characterized in that: The adjustment block includes a threaded hole extending along a first direction; The gear transmission mechanism comprises: an adjusting screw, comprising an adjusting end and an adjusting screw connected to the adjusting end; A first gear, fixedly disposed on the adjusting screw; The adjusting shaft comprises an optical axis portion and a threaded portion, wherein the threaded portion and the threaded hole are threadably matched; The second gear is fixedly arranged on the optical axis portion, and the second gear is meshed with the first gear.

3. The sensor position adjustment device according to claim 2, characterized in that: The driving unit further comprises: a support block fixedly disposed on the base unit; The adjusting screw passes through the supporting block, the adjusting end is located at the top of the supporting block, and the adjusting screw is located at the bottom of the supporting block.

4. The sensor position adjustment device according to claim 3, characterized in that: The driving unit further comprises: A shaft sleeve is located between the support block and the first gear, and the adjusting screw penetrates the shaft sleeve.

5. The sensor position adjustment device according to claim 2, characterized in that: The guide unit comprises: a supporting front plate, which is arranged on the base unit; A supporting rear plate, disposed on the base unit; A plurality of support columns are arranged between the support front plate and the support rear plate, and the support columns extend along the first direction; The adjustment block includes a plurality of through holes, and the through holes extend along a first direction, and the through holes are slidably matched with the support columns.

6. The sensor position adjustment device according to claim 5, characterized in that: The supporting rear plate is provided with a through hole; the optical axis portion passes through the through hole of the supporting rear plate; and the second gear is located on the optical axis portion of the supporting rear plate on a side away from the adjusting block.

7. The sensor position adjustment device according to claim 5, characterized in that: The support front plate is provided with a groove; The adjusting shaft further includes: a recessed portion located at a side of the threaded portion away from the optical axis portion, and the recessed portion is arranged in the groove.

8. The sensor position adjustment device according to claim 2, characterized in that: The adjustment block comprises: a guide portion, used to cooperate with the guide unit; A threaded transmission part connected to the guide part, the threaded hole being provided on the threaded transmission part; The mounting portion is connected to the threaded transmission portion and is used for mounting the sensor.

9. The sensor position adjustment device according to claim 1, characterized in that: The base unit has a symmetrical structure. The guide unit, the adjustment block, the sensor and the drive unit form a sensing unit. The sensor position adjustment device includes two sensing units, which are respectively located on both sides of the base unit.

10. A semiconductor device, characterized in that: include: Chamber; A base, located at the bottom of the chamber, and used to support the wafer; a cavity, located on a side wall of the chamber and communicating with the chamber; A shielding plate, disposed in the cavity, and used to move from the cavity to above the base during the process; The sensor position adjustment device according to any one of claims 1 to 9, arranged outside the cavity; A sensor is arranged on the sensor position adjustment device and is used to detect the position of the shielding plate.

11. The semiconductor device according to claim 10, wherein: A transparent window is provided on the cavity; The sensor position adjustment device makes the sensor correspond to the transparent window, and the sensor detects the position of the shielding plate through the transparent window.

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