Anti-falling protection device of three-coordinate measuring machine, three-coordinate measuring machine and anti-falling protection method

Abstract

The invention provides an anti-falling protection device and method of a three-coordinate measuring machine and the three-coordinate measuring machine, and aims to realize seamless buffering and tight holding of a Z axis under the condition of accidental gas cut-off, prevent the Z axis from falling and improve the safety and reliability of the three-coordinate measuring machine. The limiting device is used for limiting movement of a z-axis balance guide rail of the three-coordinate measuring machine. The Z-axis damping cylinder is used for buffering a z-axis air floating guide rail of a three-axis moving mechanism in the three-coordinate measuring machine; the detection control unit comprises a first air pressure detection sensor used for detecting the air supply pressure of the z-axis balance guide rail; the second air pressure detection sensor is used for detecting the air supply pressure of the three-axis moving mechanism; the detection control unit controls the operation unit to start the z-axis damping air cylinder to buffer the z-axis air floating guide rail and start the Z-axis band-type brake air cylinder to limit movement of the z-axis balance guide rail according to detected air pressure data.

Description

Technical Field

[0001] The invention relates to the technical field of three-coordinate measuring machines, and in particular to a fall protection device for a three-coordinate measuring machine, a three-coordinate measuring machine and a fall protection method. Background Art

[0002] The three-dimensional coordinate measuring machine is a high-precision measuring device widely used in industrial manufacturing and quality control. Its core function is to measure the geometric size and shape of the workpiece with high precision through the precise movement of the X, Y and Z axes. In order to ensure the accuracy and stability of the measurement, modern three-dimensional coordinate measuring machines generally use air-floating guide technology, which forms an air film between the guide surface and the moving parts to achieve low-friction, high-precision movement and positioning. In addition, the three-dimensional coordinate measuring machine also uses a balancing cylinder to balance the weight of the Z axis through pneumatic balancing. The balancing cylinder works together with the air-floating cylinder to ensure the stability and accuracy of the Z axis in the vertical direction. The air-floating guide provides frictionless motion support, while the balancing cylinder is responsible for balancing the weight of the Z axis.

[0003] While the air-floating guide technology provides a high-precision measurement environment, it also has certain safety risks. Especially in the case of accidental air failure, the air-floating guide's clamping mechanism has a time delay and cannot be seamlessly locked, causing the Z axis to fall, which will damage the measuring equipment.

[0004] Although some equipment may be equipped with an emergency brake system, it is often unable to respond immediately at the moment of gas failure, causing the Z axis to fall in a short period of time. For high-precision measurement equipment such as a three-dimensional coordinate measuring machine, any tiny mechanical displacement or vibration may introduce significant measurement errors, thereby affecting the final measurement results, which will affect the accuracy and reliability of the measurement data. Therefore, how to effectively prevent the Z axis from falling in the event of an accidental gas failure has become an important technical challenge in the design and application of current three-dimensional coordinate measuring machines. Summary of the invention

[0005] In view of the above problems, the present invention provides a fall protection device, method and three-dimensional coordinate measuring machine, which realizes seamless buffering and clamping of the Z axis in the event of accidental gas failure, avoids the Z axis from falling, and improves the safety and reliability of the three-dimensional coordinate measuring machine.

[0006] The technical solution is as follows: a fall protection device for a three-coordinate measuring machine, comprising:

[0007] Operation unit, including:

[0008] Z-axis brake cylinder, used to limit the movement of the Z-axis balance guide of the three-dimensional coordinate measuring machine;

[0009] Z-axis damping cylinder, used to buffer the Z-axis air-floating guide rail of the three-axis moving mechanism in the three-axis coordinate measuring machine;

[0010] Detection control unit, including:

[0011] A first air pressure detection sensor is arranged on the air path from the air source to the z-axis balance guide rail, and is used to detect the air supply pressure for the z-axis balance guide rail;

[0012] A second air pressure detection sensor is arranged on the air path from the air source to the three-axis moving mechanism of the three-coordinate measuring machine, and is used to detect the air supply pressure for the three-axis moving mechanism;

[0013] The detection control unit controls the operation unit to start the z-axis damping cylinder to buffer the z-axis air floating guide rail and to start the z-axis brake cylinder to limit the movement of the z-axis balance guide rail according to the detected air pressure data.

[0014] Furthermore, the operation unit further includes:

[0015] The x-axis damping cylinder is used to buffer the x-axis air-floating guide rail in the three-axis moving mechanism;

[0016] The y-axis damping cylinder is used to buffer the y-axis air-floating guide rail in the three-axis moving mechanism.

[0017] Furthermore, the detection control unit also includes:

[0018] The first solenoid valve is used to control the x-, y-, and z-axis air-floating guide rails of the three-axis moving mechanism;

[0019] A second solenoid valve, used to control the Z-axis brake cylinder;

[0020] A third solenoid valve, used to control the x-axis damping cylinder, the y-axis damping cylinder, and the z-axis damping cylinder;

[0021] When the first air pressure detection sensor and / or the second air pressure detection sensor detects that the air pressure data is abnormal, the third solenoid valve is opened to control the x-, y-, and z-axis damping cylinders to buffer the x-, y-, and z-axis air-floating guide rails respectively;

[0022] The second solenoid valve is closed, controlling the Z-axis brake cylinder to be closed, and the cylinder of the Z-axis brake cylinder extends out to contact the Z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the Z-axis balance guide rail;

[0023] The first solenoid valve is closed to control the air-floating guide rails of the x-, y- and z-axes to clamp and stop moving.

[0024] Furthermore, a first pressure reducing valve is provided on the air path from the air source to the z-axis balance guide rail, and the first air pressure detection sensors are provided at both ends of the first pressure reducing valve respectively; a second pressure reducing valve is provided on the air path from the air source to the three-axis moving mechanism, and the second air pressure detection sensor is provided at one end where the second pressure reducing valve is connected to the three-axis moving mechanism.

[0025] Furthermore, an oil-water filter is provided between the first air pressure detection sensor and the air source.

[0026] Furthermore, the first air pressure detection sensor and the second air pressure detection sensor are pressure switches.

[0027] A three-coordinate measuring machine includes the above-mentioned anti-fall protection device of the three-coordinate measuring machine, the anti-fall device is connected to the three-axis moving mechanism of the three-coordinate measuring machine, the three-axis moving mechanism includes x-, y-, z-axis air-floating guide rails and a z-axis balancing guide rail, and the z-axis balancing guide rail is used to balance the z-axis of the three-coordinate measuring machine.

[0028] A method for preventing a coordinate measuring machine from falling is implemented based on the above-mentioned device for preventing a coordinate measuring machine from falling, and the method comprises the following steps:

[0029] When the three-axis coordinate measuring machine is ventilated, the first air pressure detection sensor and the second air pressure detection sensor detect that the air pressure meets the conditions and then open the first solenoid valve and the second solenoid valve, so that the x-axis, y-axis and z-axis air-floating guide rails of the three-axis moving mechanism can move freely, and the cylinder of the Z-axis brake cylinder retracts to release the restriction on the z-axis balance guide rail;

[0030] When the air pressure detected by the first air pressure detection sensor and / or the second air pressure detection sensor does not meet the conditions, the third solenoid valve is opened to control the x-, y-, and z-axis damping cylinders to buffer the x-, y-, and z-axis air-floating guide rails respectively; the second solenoid valve is closed to control the Z-axis brake cylinder to be closed, and the cylinder of the Z-axis brake cylinder extends out to contact the z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the z-axis balance guide rail; the first solenoid valve is closed to control the x-, y-, and z-axis air-floating guide rails to clamp and stop moving;

[0031] When the CMM is powered off, the first, second and third solenoid valves are closed, the air-floating guide rails of the x-, y- and z-axes are clamped and stop moving, and the cylinder of the Z-axis brake cylinder extends out and contacts the Z-axis balance guide rail of the CMM to limit the movement of the Z-axis balance guide rail.

[0032] The anti-fall protection device of the three-axis coordinate measuring machine of the present invention monitors the air supply pressure of the air source for the z-axis balance guide and the three-axis moving mechanism in real time through the first air pressure detection sensor and the second air pressure detection sensor. Once the air pressure abnormality is detected, the protection mechanism is immediately triggered. When the air pressure abnormality is detected, the x-, y-, and z-axis damping cylinders are controlled to buffer the corresponding air-floating guides, slow down the movement speed of each axis, avoid the impact force caused by sudden stop, and ensure the stability and safety of the equipment; the z-axis brake cylinder is controlled to be closed, and the cylinder of the z-axis brake cylinder is extended to contact the z-axis balance guide, so as to limit the movement of the z-axis balance guide and prevent falling due to gravity; finally, the x-, y-, and z-axis air-floating guides themselves respond abnormally to clamp and stop moving, and seamless clamping is achieved through the rapid response of the damping cylinder and the z-axis balance guide, thereby ensuring the safety of the three-axis coordinate measuring machine.

[0033] The present invention also adopts solenoid valve for control, through the coordinated work of air pressure detection sensor, solenoid valve and brake cylinder, adopts the method of the present invention, when the air pressure meets the conditions, the first solenoid valve and the second solenoid valve are opened, the x-, y- and z-axis air-floating guide rails and the Z-axis brake cylinder resume normal working state, does not affect the precise movement and positioning of the Z-axis, in the case of power failure, all solenoid valves are closed, the x-, y- and z-axis air-floating guide rails are clamped and stop moving, the cylinder of the Z-axis brake cylinder extends out and contacts the z-axis balance guide rail, limits the movement of the z-axis balance guide rail, effectively prevents the Z-axis from falling in the event of accidental air or power failure, and ensures that the Z-axis can be reliably prevented from falling under various working conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 A control schematic diagram of a fall protection device for a three-coordinate measuring machine in implementation;

[0035] Figure 2 The figure is a schematic diagram of the steps of a fall protection method for a three-coordinate measuring machine in implementation. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments, and people familiar with this technology can understand other advantages and effects of the present invention from the contents disclosed in this specification. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict.

[0037] See Figure 1 , a fall protection device for a three-coordinate measuring machine, comprising:

[0038] Operation unit, including:

[0039] The Z-axis brake cylinder 101 is connected to the Z-axis balance guide of the three-axis moving mechanism in the three-axis coordinate measuring machine and is used to limit the movement of the Z-axis balance guide 1 of the three-axis coordinate measuring machine;

[0040] The Z-axis damping cylinder 102 is connected to the Z-axis air-floating guide rail of the three-axis moving mechanism in the three-axis coordinate measuring machine, and is used to buffer the Z-axis air-floating guide rail 2 of the three-axis moving mechanism in the three-axis coordinate measuring machine;

[0041] Detection control unit, including:

[0042] A first air pressure detection sensor 201 is disposed on the air path from the air source 3 to the z-axis balance rail, and is used to detect the air pressure of the z-axis balance rail;

[0043] The second air pressure detection sensor 202 is arranged on the air path from the air source to the three-axis moving mechanism of the three-coordinate measuring machine, and is used to detect the air supply pressure for the three-axis moving mechanism;

[0044] The detection control unit controls the operation unit to start the z-axis damping cylinder 201 to buffer the z-axis air-floating guide rail 2 and to start the z-axis brake cylinder 102 to limit the movement of the z-axis balance guide rail according to the detected air pressure data.

[0045] By using the anti-fall protection device of the three-dimensional coordinate measuring machine in the embodiment, in the event of accidental gas interruption, the first air pressure detection sensor and / or the second air pressure detection sensor can quickly detect the air pressure abnormality, and immediately control the Z-axis damping cylinder to buffer the Z-axis air floating guide rail, so that the cylinder of the Z-axis brake cylinder is extended to contact the Z-axis balance guide rail of the three-dimensional coordinate measuring machine, thereby limiting the movement of the Z-axis balance guide rail. The seamless response ensures that the Z-axis balance guide rail can be limited at the moment of gas interruption, so that real-time measures can be taken when gas interruption is detected to prevent the Z-axis from accidentally falling, and avoid damage to expensive components such as the measuring head and probe caused by the falling of the Z-axis.

[0046] In one embodiment, not only the Z axis is protected, but also the X axis and the Y axis are protected. The specific configuration is as follows: the operation unit further includes:

[0047] The x-axis damping cylinder 103 is used to buffer the x-axis air-floating guide rail 4 in the three-axis moving mechanism;

[0048] The y-axis damping cylinder 104 is used to buffer the y-axis air-floating guide rail 5 in the three-axis moving mechanism.

[0049] By setting the X-axis damping cylinder and the Y-axis damping cylinder, the X, Y, and Z axes can be fully buffered in the event of an accidental gas cut-off, ensuring that all axes can be buffered at the moment of gas cut-off, slowing down the movement speed of each axis, avoiding movement caused by sudden stop, and preventing accidental movement.

[0050] In the embodiment, for the convenience of control, the detection control unit further includes:

[0051] The first solenoid valve 203 is used to control the three-axis moving mechanism, including the x-axis air-floating guide rail 2, the y-axis air-floating guide rail 4, and the z-axis air-floating guide rail 5;

[0052] The second solenoid valve 204 is used to control the Z-axis brake cylinder 102;

[0053] The third solenoid valve 205 is used to control the x-axis damping cylinder 102, the y-axis damping cylinder 103, and the z-axis damping cylinder 104;

[0054] When an unexpected gas failure occurs, the first air pressure detection sensor 201 and / or the second air pressure detection sensor 102 detects abnormal air pressure data, and the third solenoid valve 205 is opened to control the x-axis damping cylinder 102, the y-axis damping cylinder 103, and the z-axis damping cylinder 104 to buffer the x-axis air-floating guide rail 2, the y-axis air-floating guide rail 4, and the z-axis air-floating guide rail 5 respectively;

[0055] The second solenoid valve 204 is closed, controlling the Z-axis brake cylinder 101 to be closed. When the Z-axis brake cylinder 101 is closed, the cylinder of the Z-axis brake cylinder is extended. At this time, the cylinder of the Z-axis brake cylinder 101 is extended to contact the Z-axis balance guide 1 of the three-dimensional coordinate measuring machine to limit the movement of the Z-axis balance guide 1;

[0056] The first electromagnetic valve 203 is closed, controlling the x-axis air-floating guide rail 2, the y-axis air-floating guide rail 4, and the z-axis air-floating guide rail 5 to be tightly clamped and stop moving.

[0057] In one embodiment, the first air pressure detection sensor 201 and the second air pressure detection sensor 202 use a pressure switch 202, and the specific arrangement positions are:

[0058] A first pressure reducing valve 6 is also provided on the air path from the air source 3 to the z-axis balance guide 1, and first air pressure detection sensors 201 are provided at both ends of the first pressure reducing valve 6, respectively, to detect the pressure before and after the precise pressure reduction of the z-axis balance cylinder; a second pressure reducing valve 7 is also provided on the air path from the air source 3 to the x-, y-, and z-axis air floating guides of the three-axis moving mechanism, and a second air pressure detection sensor 202 is provided at one end where the second pressure reducing valve 7 is connected to the three-axis moving mechanism, and threshold values ​​are set for the first air pressure detection sensor 201 and the second air pressure detection sensor 202 to detect the air supply pressure value, and the circuit is automatically opened or closed according to the set pressure threshold.

[0059] The pressure switch can trigger the switch action immediately when abnormal air pressure is detected, without waiting for signal processing and transmission time, thereby achieving instantaneous response, allowing the device to quickly activate the protection mechanism at the moment of gas failure to prevent accidental movement of the Z axis and other axes. The instantaneous response ensures that the device can immediately enter the protection state at the moment of abnormal air pressure, further improving the safety and reliability of the equipment.

[0060] In one implementation, an oil-water filter 7 is also provided between the first air pressure detection sensor 201 and the air source 3. The oil-water filter plays an important role in removing moisture and oil, improving the stability of the pneumatic system, and extending the life of the equipment in the anti-fall protection device of the three-dimensional coordinate measuring machine. By ensuring the cleanliness and dryness of the air source, the stability and reliability of the equipment are improved, the maintenance cost of the equipment is reduced, and the smooth progress of high-precision measurement tasks is ensured.

[0061] In an embodiment of the present invention, a three-coordinate measuring machine is also provided, including the anti-fall device of the three-coordinate measuring machine in the above embodiment, the anti-fall device is connected to the three-axis moving mechanism of the three-axis moving mechanism of the three-axis measuring machine, the three-axis moving mechanism includes x-, y-, z-axis air-floating guide rails and a z-axis balancing guide rail, and the z-axis balancing guide rail is used to balance the z-axis of the three-coordinate measuring machine.

[0062] See Figure 2 In an embodiment of the present invention, a fall protection method for a three-coordinate measuring machine is also provided. The fall protection device for the three-coordinate measuring machine in the above embodiment is implemented, and the method comprises the steps of:

[0063] Step S1: When the three-coordinate measuring machine is ventilated, the first air pressure detection sensor and the second air pressure detection sensor detect that the air pressure meets the conditions and then open the first solenoid valve and the second solenoid valve, so that the x-axis, y-axis and z-axis air-floating guide rails of the three-axis moving mechanism can move freely, and the cylinder of the Z-axis brake cylinder retracts to release the restriction on the z-axis balance guide rail;

[0064] Step S2: When the air pressure detected by the first air pressure detection sensor and / or the second air pressure detection sensor does not meet the conditions, the third solenoid valve is opened to control the x-, y-, and z-axis damping cylinders to buffer the x-, y-, and z-axis air-floating guide rails respectively; the second solenoid valve is closed to control the Z-axis brake cylinder to be closed, and the cylinder of the Z-axis brake cylinder extends out to contact the z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the z-axis balance guide rail; the first solenoid valve

[0065] Step S3: When the three-dimensional coordinate measuring machine is powered off, the first, second and third solenoid valves are closed, the air-floating guide rails of the x-, y- and z-axes are clamped and stop moving, and the cylinder of the Z-axis brake cylinder extends out to contact the Z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the Z-axis balance guide rail.

[0066] By adopting the method in the embodiment, under normal working state, when the air pressure meets the conditions, the first solenoid valve and the second solenoid valve are opened, the air-floating guide rails of the x-, y-, and z-axes enter normal working state, and the cylinder of the Z-axis brake cylinder is retracted, which does not affect the precise movement and positioning of the Z-axis. The solenoid valve and the Z-axis brake cylinder are precisely controlled to ensure the precise movement and positioning of the Z-axis, thereby improving the measurement accuracy;

[0067] When the air pressure is abnormal, the third solenoid valve opens to control the x-, y-, and z-axis damping cylinders to buffer the corresponding air-floating guide rails, avoiding the impact force caused by sudden stops and ensuring the stability and safety of the equipment; the second solenoid valve closes to control the Z-axis brake cylinder to close, and the cylinder of the Z-axis brake cylinder extends to contact the z-axis balance guide rail, limiting the movement of the z-axis balance guide rail to prevent it from falling due to gravity; the first solenoid valve closes to control the x-, y-, and z-axis air-floating guide rails to hold and stop moving;

[0068] In the event of a power outage, all solenoid valves are closed, the air-floating guide rails on the x-, y-, and z-axes are clamped and stop moving, and the cylinder of the z-axis brake cylinder extends out to contact the z-axis balance guide rail, limiting the movement of the z-axis balance guide rail to ensure the safety of the equipment.

[0069] By adopting the method in the embodiment, the air pressure detection sensor, the solenoid valve and the brake cylinder work together to provide protection in the event of a gas outage. In addition, the solenoid valve is closed and the brake cylinder is reset in the event of a power outage, thereby ensuring the safety and reliability of the equipment in any emergency situation. A protection mechanism under various working conditions is implemented to ensure that the Z-axis can be reliably prevented from falling under various working conditions. By preventing the Z-axis from accidentally falling and providing buffer protection for each axis, the measurement error introduced by mechanical displacement or vibration is reduced, and the accuracy and reliability of the measurement data are improved.

[0070] In one embodiment, a solenoid valve opening delay time is also set, specifically, an opening delay time of the first solenoid valve and the second solenoid valve. When the three-dimensional coordinate measuring machine is ventilated, after the first air pressure detection sensor and the second air pressure detection sensor detect that the air pressure meets the conditions, when the delay time meets the set threshold, the first solenoid valve and the second solenoid valve are opened. The opening delay time can be 3 seconds, 5 seconds, 10 seconds, etc., and can be adjusted according to actual conditions. The delay time can be set before operating after the equipment reaches a stable pressure state, which can avoid abnormal situations and allow the air pressure to reach a relatively stable level, which helps to improve the measurement accuracy and reliability.

[0071] It is to be understood that the present invention is described by some embodiments, and it is known to those skilled in the art that various changes or equivalent substitutions may be made to these features and embodiments without departing from the spirit and scope of the present invention. In addition, under the teachings of the present invention, these features and embodiments may be modified to adapt to specific circumstances and materials without departing from the spirit and scope of the present invention. Therefore, the present invention is not limited by the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the scope of protection of the present invention.

Claims

1. A fall protection device for a three-dimensional coordinate measuring machine, characterized in that: include: Operation unit, including: Z-axis brake cylinder, used to limit the movement of the Z-axis balance guide of the three-dimensional coordinate measuring machine; Z-axis damping cylinder, used to buffer the Z-axis air-floating guide rail of the three-axis moving mechanism in the three-axis coordinate measuring machine; Detection control unit, including: A first air pressure detection sensor is arranged on the air path from the air source to the z-axis balance guide rail, and is used to detect the air supply pressure for the z-axis balance guide rail; A second air pressure detection sensor is arranged on the air path from the air source to the three-axis moving mechanism of the three-coordinate measuring machine, and is used to detect the air supply pressure for the three-axis moving mechanism; The detection control unit controls the operation unit to start the z-axis damping cylinder to buffer the z-axis air floating guide rail and to start the z-axis brake cylinder to limit the movement of the z-axis balance guide rail according to the detected air pressure data.

2. The anti-fall protection device for a three-dimensional coordinate measuring machine according to claim 1, characterized in that: The operation unit also includes: The x-axis damping cylinder is used to buffer the x-axis air-floating guide rail in the three-axis moving mechanism; The y-axis damping cylinder is used to buffer the y-axis air-floating guide rail in the three-axis moving mechanism.

3. The anti-fall protection device for a three-dimensional coordinate measuring machine according to claim 2, characterized in that: The detection control unit also includes: The first solenoid valve is used to control the x-, y-, and z-axis air-floating guide rails of the three-axis moving mechanism; A second solenoid valve, used to control the Z-axis brake cylinder; A third solenoid valve, used to control the x-axis damping cylinder, the y-axis damping cylinder, and the z-axis damping cylinder; When the first air pressure detection sensor and / or the second air pressure detection sensor detects that the air pressure data is abnormal, The third solenoid valve is opened to control the x-axis, y-axis, and z-axis damping cylinders to buffer the x-axis, y-axis, and z-axis air-floating guide rails respectively; The second solenoid valve is closed, controlling the Z-axis brake cylinder to be closed, and the cylinder of the Z-axis brake cylinder extends out to contact the Z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the Z-axis balance guide rail; The first solenoid valve is closed to control the air-floating guide rails of the x-, y- and z-axes to clamp and stop moving.

4. The anti-fall protection device for a three-dimensional coordinate measuring machine according to claim 1, characterized in that: A first pressure reducing valve is also provided on the air path from the air source to the z-axis balance guide rail, and the first air pressure detection sensors are respectively provided at both ends of the first pressure reducing valve. A second pressure reducing valve is also provided on the air path from the air source to the three-axis moving mechanism, and the second air pressure detection sensor is provided at one end where the second pressure reducing valve is connected to the three-axis moving mechanism.

5. The anti-fall protection device for a three-dimensional coordinate measuring machine according to claim 4, characterized in that: An oil-water filter is also provided between the first air pressure detection sensor and the air source.

6. The anti-fall protection device for a three-dimensional coordinate measuring machine according to claim 1, characterized in that: The first air pressure detection sensor and the second air pressure detection sensor are pressure switches.

7. A three-dimensional coordinate measuring machine, characterized in that: An anti-fall protection device for a three-dimensional coordinate measuring machine comprising any one of claims 1 to 6, wherein the anti-fall device is connected to a three-axis moving mechanism of the three-dimensional coordinate measuring machine, wherein the three-axis moving mechanism comprises x-, y-, z-axis air-floating guide rails and a z-axis balancing guide rail, wherein the z-axis balancing guide rail is used to balance the z-axis of the three-dimensional coordinate measuring machine.

8. A method for preventing a three-dimensional coordinate measuring machine from falling, characterized in that: The anti-fall protection device based on the above-mentioned three-coordinate measuring machine is implemented, and the method includes the steps of: When the three-axis coordinate measuring machine is ventilated, the first air pressure detection sensor and the second air pressure detection sensor detect that the air pressure meets the conditions and then open the first solenoid valve and the second solenoid valve, so that the x-axis, y-axis and z-axis air-floating guide rails of the three-axis moving mechanism can move freely, and the cylinder of the Z-axis brake cylinder retracts to release the restriction on the z-axis balance guide rail; When the air pressure detected by the first air pressure detection sensor and / or the second air pressure detection sensor does not meet the conditions, the third solenoid valve is opened to control the x-, y-, and z-axis damping cylinders to buffer the x-, y-, and z-axis air-floating guide rails respectively; the second solenoid valve is closed to control the Z-axis brake cylinder to be closed, and the cylinder of the Z-axis brake cylinder extends out to contact the z-axis balance guide rail of the three-dimensional coordinate measuring machine to limit the movement of the z-axis balance guide rail; the first solenoid valve is closed to control the x-, y-, and z-axis air-floating guide rails to clamp and stop moving; When the CMM is powered off, the first, second and third solenoid valves are closed, the air-floating guide rails of the x-, y- and z-axes are clamped and stop moving, and the cylinder of the Z-axis brake cylinder extends out and contacts the Z-axis balance guide rail of the CMM to limit the movement of the Z-axis balance guide rail.

9. The anti-fall protection method for a three-dimensional coordinate measuring machine according to claim 8, characterized in that: Set the delay time for the solenoid valve to open. When the three-dimensional coordinate measuring machine is ventilated, after the first air pressure detection sensor and the second air pressure detection sensor detect that the air pressure meets the conditions, when the delay time meets the set threshold, the first solenoid valve and the second solenoid valve are opened.

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