Ceramic substrate wax sticking device

By designing fixing components and cleaning components in the ceramic substrate wax adhesive device, the problems of cracking and debris cleaning of the ceramic substrate during heating are solved, and the stable heating and automatic cleaning of the substrate are achieved, which improves the project progress and work efficiency.

CN119400708APending Publication Date: 2025-02-07安徽陶陶新材料科技有限公司
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Patent Information

Application Number
CN202411302320.2
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-09-18
Publication Date
2025-02-07

AI Technical Summary

Technical Problem

During the heating process of ceramic substrates, high temperatures may cause the substrate to break, and the staff cannot detect and clean the debris in time, causing the debris to block the device and affect the progress of the project.

Method used

A ceramic substrate wax adhesive device is designed, including a fixing assembly and a cleaning assembly. The fixing assembly can fix the ceramic substrate through the cooperation of rack, bevel gear and elastic traction rope to ensure its stability during heating. The cleaning assembly can automatically clean up debris caused by cracks by rotating the door shaft, door panel and L-shaped stop.

Benefits of technology

Through the design of the fixed assembly, the ceramic substrate remains stable during the heating process, reducing the risk of accidental damage and improving heating efficiency. The automation of cleaning components can quickly and safely clean up debris, improve work efficiency and reduce the risk of manual cleaning.

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Abstract

The invention discloses a ceramic substrate wax sticking device, and relates to the technical field of wax sticking device.The ceramic substrate wax sticking device comprises a working support, a working table is fixedly connected to the top of the working support, a pair of rail grooves are formed in the surface of the working table, a feeding plate is arranged at the top of the working table, and a sliding rod is fixedly connected to the bottom of the feeding plate; a fixing assembly is arranged on the upper surface of the workbench and comprises a rack, the rack is fixedly connected to one side of the feeding plate, the upper surface of the workbench is rotationally connected with a first bevel gear, the side wall of the first bevel gear is in meshed connection with a second bevel gear, and the top of the first bevel gear is rotationally connected with a rotating rod; the technical problems that during heating, the temperature is very high, when a ceramic substrate is broken due to high temperature, a worker cannot find and clean fragments in time, and if the fragments cannot be cleaned in time, the fragments may block the device, so that the device is damaged, and the project progress is affected are solved.
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Description

Technical Field

[0001] The invention relates to the technical field of wax sticking device design, in particular to a wax sticking device for a ceramic substrate. Background Art

[0002] The ceramic substrate waxing device is a device used to produce semiconductor chips, and is usually used in the waxing step in the semiconductor manufacturing process. In the semiconductor process, wax is a material used to protect the surface and edges of the chip to avoid damage in subsequent process steps. This device usually consists of a wax spraying system, a wax drying system, and an automated control system. During operation, the ceramic substrate is first heated, and then passes through the wax spraying system to evenly spray the wax on the surface of the substrate. The substrate then enters the wax drying system for drying to ensure that the wax is firmly attached to the surface of the substrate.

[0003] After searching, the patent document (authorization announcement number is CN114566441A) includes a frame, a heating table, a conveying plate, and a cooling tray. The conveying plate is placed under the heating table, and the conveying plate is movable. The cooling tray and the heating table are staggered horizontally. A lifting platform is installed under the heating table, and a plurality of top blocks are arranged on the lifting platform. Avoidance grooves are arranged on the conveying plate and the top blocks, and the top blocks can pass through the avoidance grooves; a cooling fan is installed on the cooling tray; and the cooling tray can be lifted and installed on the frame. This silicon wafer wax sticking device facilitates the heating operation of the quartz ingot disk, and the heated quartz ingot disk is easy to take and operate. The heating and cooling of the quartz ingot disk can be realized on the same device, which is more convenient to operate and can speed up the cooling speed.

[0004] However, the above device still has shortcomings:

[0005] During heating, the temperature is very high. When the ceramic substrate breaks due to high temperature, the staff cannot find and clean up the fragments in time. If the fragments cannot be cleaned up in time, the fragments may block the device, causing damage to the device, and thus affecting the progress of the project. Summary of the invention

[0006] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a ceramic substrate wax sticking device, which solves the problem that when the temperature is very high during heating, when the ceramic substrate is broken due to high temperature, the staff cannot find and clean up these fragments in time. If these fragments cannot be cleaned up in time, these fragments may block the device, thereby causing damage to the device and affecting the progress of the project.

[0007] To achieve the above-mentioned purpose, the present invention proposes a ceramic substrate wax sticking device, comprising a working bracket, the top of the working bracket is fixedly connected to a workbench, a pair of track grooves are opened on the surface of the workbench, a loading plate is arranged on the top of the workbench, a sliding rod is fixedly connected to the bottom of the loading plate, the sliding rod is slidably connected to the inside of the track groove, and a fixing component is arranged on the upper surface of the workbench, wherein:

[0008] The fixing assembly comprises a rack, the rack being fixedly connected to one side of the loading plate, the upper surface of the working table being rotatably connected to the first bevel gear, the side wall of the first bevel gear being meshed with the second bevel gear, the top of the first bevel gear being rotatably connected to the rotating rod, the side wall of the rotating rod being fixedly connected to the elastic traction rope, the upper surface of the working table being fixedly connected to the square shell, the side wall of the square shell being provided with a fixed slide groove, the inside of the fixed slide groove being slidably connected to the first driving rod, one end of the elastic traction rope is fixedly connected to the rotating rod, the other end of the elastic traction rope is fixedly connected to the first driving rod, and one end of the first driving rod extending in the square shell is rotatably connected to the roller, the fixing assembly is slidably connected to a fixing block on the side away from the fixing slide groove, the side wall of the fixing block is sleeved with a spring, the two ends of the spring are respectively fixedly connected to the fixing block and the square shell, the bottom of the fixing block is provided with an inclined surface, the roller is arranged on the inclined surface, and the side wall of the square shell is provided with a first slide groove.

[0009] Preferably, a side wall of the working support is fixedly connected with a transverse plate, an upper surface of the transverse plate is fixedly connected with a collecting frame, a surface of the working table is provided with a discharge groove, and the discharge groove is arranged directly above the collecting frame.

[0010] Preferably, the discharge groove is arranged between a pair of track grooves.

[0011] Preferably, a shell is fixedly connected to the upper surface of the working bracket.

[0012] Preferably, a placement groove is provided on the upper surface of the loading plate, and a ceramic substrate is arranged inside the placement groove.

[0013] The top of described sliding panel also is provided with an interlocking structure, and the interlocking structure is hinged on the base plate, is fixed with a backing pin on the top of described sliding panel, and the interlocking structure is hinged on the base plate, is fixed with a backing pin on the top of described sliding panel, and the interlocking structure is hinged on the base plate, and the interlocking structure is hinged on the base plate, and the interlocking structure is hinged on the base plate

[0014] Preferably, the movable groove is arranged on a side of the loading plate close to the first bevel gear.

[0015] Preferably, a heating plate is fixedly connected to the upper surface of the workbench, and the heating plate is arranged inside the shell.

[0016] Preferably, the fixing assembly is entirely arranged inside the housing.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. Through the setting of the fixed component, it can be achieved that when heating, the staff needs to put the ceramic substrate into the placement groove and then push the loading plate until the ceramic substrate is pushed above the heating plate. During the movement of the loading plate, the rack will gradually mesh with the second bevel gear and drive the second bevel gear to rotate. Through the meshing of the second bevel gear, the first bevel gear will rotate synchronously, and the rotating rod will rotate synchronously with the first bevel gear. Through the rotation of the rotating rod, the elastic traction rope will be wrapped around the side wall of the rotating rod, and the rotating rod will slowly pull the first drive rod to move. The first drive rod will slowly slide in the fixed slide groove, and the roller will squeeze the inclined surface, and then squeeze the first drive rod out of the square shell until the fixed block is against the ceramic substrate, thereby achieving the effect of fixing the ceramic substrate.

[0019] The advantage of this design is that fixing the ceramic substrate can maintain its stability during the heating process, prevent it from shaking or moving, and ensure the uniformity and consistency of the heating process. Secondly, fixing the ceramic substrate can reduce the risk of accidental injury or damage caused by movement or shaking, and ensure safety during use. Finally, fixing the ceramic substrate can improve the heating efficiency, ensure that the heat is fully transferred to the material, and improve the efficiency and speed of heating.

[0020] 2. Through the setting of the cleaning component, when the ceramic substrate is broken due to some factors during the heating process, the fixed block will lose the support of the ceramic substrate. During the fixing operation, as the rotating rod rotates, the fixed block will resist the ceramic substrate and cannot move anymore. The roller is at the center of the inclined plane at this time. Since the elastic traction rope has strong elasticity, the elastic traction rope will continue to be wound with the rotation of the rotating rod, which causes the elastic traction rope to always be in a taut state. When the fixed block loses the support of the ceramic substrate, the elastic traction rope will quickly pull the first driving rod to slide again, and the fixed block will also move forward under the drive of the first driving rod. The moving short rod of the fixed block will also slide in the first slide groove, and the first slide groove will touch the driven block and push it to move. Through the movement of the driven block, the driven block will drive the L-shaped block to rotate with the nut as the axis point, and the end of the L-shaped block will leave the bottom of the door panel. At this time, the door panel loses the support of the L-shaped block, and the door panel will rotate with the rotating door shaft as the axis point, and all the fragments will fall into the collection frame, thereby achieving the cleaning effect.

[0021] The advantage of this design is that when the ceramic substrate is broken, the cleaning work can be completed without human intervention. In addition, no additional power source is required. It only needs to be used in conjunction with the ceramic substrate. The cleaning operation is performed through the cleaning component, which can save the staff's cleaning time, greatly improve work efficiency, and avoid the risk of staff being burned during cleaning work. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0023] Figure 2 It is a front view structural schematic diagram of the present invention;

[0024] Figure 3 For the present invention Figure 2 Schematic diagram of the structure at A in the middle;

[0025] Figure 4 It is a schematic diagram of the structure of the fixing assembly of the present invention;

[0026] Figure 5 It is a schematic diagram of the bottom structure of the loading plate of the present invention;

[0027] Figure 6 For the present invention Figure 5 Schematic diagram of the structure at B in the middle;

[0028] Figure 7 For the present invention Figure 2 Schematic diagram of the structure at point C in the middle.

[0029] In the figure: 1. working bracket; 11. horizontal plate; 12. working table; 13. track groove; 14. discharge groove; 2. collecting frame; 3. shell; 4. feeding plate; 41. placement groove; 42. slide rod; 5. ceramic substrate; 6. fixing component; 61. rack; 62. first bevel gear; 63. second bevel gear; 64. rotating rod; 65. elastic traction rope; 66. square shell; 661. first slide groove; 67. fixed slide groove; 68. first driving rod; 681. roller; 69. fixed block; 691. inclined plane; 610. spring; 7. cleaning component; 71. rotating door shaft; 72. door panel; 73. moving groove; 74. driven block; 75. round rod; 76. second driving rod; 77. connecting rod; 78. driven round rod; 79. L-shaped stopper; 710. nut; 711. short rod; 8. heating plate. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] like Figure 1-7 As shown, a wax sticking device for ceramic substrates comprises a working support 1, the top of the working support 1 is fixedly connected to a working table 12, and a pair of track grooves 13 are formed on the surface of the working table 12.

[0032] The side wall of the working bracket 1 is fixedly connected with a horizontal plate 11, the upper surface of the horizontal plate 11 is fixedly connected with a collecting frame 2, a discharge groove 14 is opened on the surface of the workbench 12, the discharge groove 14 is arranged directly above the collecting frame 2, the discharge groove 14 is arranged between a pair of track grooves 13, and the upper surface of the working bracket 1 is fixedly connected with a shell 3.

[0033] A heating plate 8 is fixedly connected to the upper surface of the workbench 12 . The heating plate 8 can provide heat to heat the material. The heating plate 8 is arranged inside the housing 3 .

[0034] A loading plate 4 is provided on the top of the workbench 12, and a placement groove 41 is opened on the upper surface of the loading plate 4. A ceramic substrate 5 is provided inside the placement groove 41. When heating, the staff needs to place the ceramic substrate 5 into the placement groove 41 and then push the loading plate 4 until the ceramic substrate 5 is pushed above the heating plate 8.

[0035] A slide bar 42 is fixedly connected to the bottom of the loading plate 4 , and the slide bar 42 is slidably connected to the inside of the track groove 13 . A fixing component 6 is provided on the upper surface of the workbench 12 , and the fixing component 6 is entirely arranged inside the housing 3 .

[0036] The fixing assembly 6 includes a rack 61, which is fixedly connected to one side of the loading plate 4. The upper surface of the workbench 12 is rotatably connected to the first bevel gear 62, and the side wall of the first bevel gear 62 is meshedly connected to the second bevel gear 63. The second bevel gear 63 can be fixed by connecting a small rod and other tool stacking areas so that it can stably mesh with the first bevel gear 62 to prevent it from falling or shifting. During the movement of the loading plate 4, the rack 61 will gradually mesh with the second bevel gear 63 and drive the second bevel gear 63 to rotate. Through the meshing with the second bevel gear 63, the first bevel gear 62 rotates synchronously, and the rotating rod 64 rotates synchronously with the first bevel gear 62. The top of the first bevel gear 62 is rotatably connected to the rotating rod 64, and the side wall of the rotating rod 64 is fixedly connected to an elastic traction rope 65. Through the rotation of the rotating rod 64, the elastic traction rope 65 will be wound around the side wall of the rotating rod 64. In addition, the elastic traction rope 65 has a strong The upper surface of the workbench 12 is fixedly connected with a square shell 66, and a fixed slide groove 67 is provided on the side wall of the square shell 66. A first driving rod 68 is slidably connected inside the fixed slide groove 67. One end of the elastic traction rope 65 is fixedly connected to the rotating rod 64, and the other end of the elastic traction rope 65 is fixedly connected to the first driving rod 68. One end of the first driving rod 68 extending into the square shell 66 is rotatably connected with a roller 681, and a fixed block 69 is slidably connected to the side of the fixed component 6 away from the fixed slide groove 67. Through the rotation of the rotating rod 64, the elastic traction rope 65 will be wound around the side wall of the rotating rod 64, and the rotating rod 64 will slowly pull the first driving rod 68 to move, and the first driving rod 68 will slowly slide in the fixed slide groove 67, and the roller 681 will squeeze the inclined surface 691, and then squeeze the first driving rod 68 out of the square shell 66 until the fixed block 69 is against the ceramic substrate 5, thereby achieving the effect of fixing the ceramic substrate 5.

[0037] Fixing the ceramic substrate 5 can maintain its stability during the heating process, prevent it from shaking or moving, and ensure the uniformity and consistency of the heating process. Secondly, fixing the ceramic substrate 5 can reduce the risk of accidental injury or damage caused by movement or shaking, and ensure safety during use. Finally, fixing the ceramic substrate 5 can improve the heating efficiency, ensure that the heat is fully transferred to the material, and improve the efficiency and speed of heating.

[0038] A spring 610 is sleeved on the side wall of the fixed block 69 , and two ends of the spring 610 are respectively fixedly connected to the fixed block 69 and the square shell 66 . A slope 691 is provided at the bottom of the fixed block 69 , and the roller 681 is arranged on the slope 691 . A first sliding groove 661 is provided on the side wall of the square shell 66 .

[0039] During the fixing operation, as the rotating rod 64 rotates, the fixing block 69 will abut against the ceramic substrate 5 and cannot move anymore. The roller 681 is now at the center position of the inclined surface 691. Since the elastic traction rope 65 has strong elasticity, the elastic traction rope 65 will continue to be wound as the rotating rod 64 rotates, which causes the elastic traction rope 65 to always be in a taut state. At this time, the elastic potential energy stored in the elastic traction rope 65 will be converted into the power required for the cleaning component 7.

[0040] A cleaning component 7 is provided on the upper surface of the loading plate 4. When the ceramic substrate 5 is broken due to certain factors during the heating process, the fixed block 69 will lose the support of the ceramic substrate 5. At this time, the cleaning component 7 can cooperate with the fixing component 6 to perform the cleaning operation. The cleaning component 7 includes a rotating door shaft 71, and the rotating door shaft 71 is fixedly connected to the lower surface of the loading plate 4. The side wall of the rotating door shaft 71 is fixedly connected with a door panel 72, and the door panel 72 is arranged at the bottom of the loading plate 4. A movable groove 73 is opened on the upper surface of the loading plate 4, and the movable groove 73 is arranged on the side of the loading plate 4 close to the first bevel gear 62.

[0041] A short rod 711 is fixedly connected to the side wall of the fixing block 69 . The short rod 711 passes through the first sliding groove 661 and extends to the outside of the square shell 66 .

[0042] A driven block 74 is provided on the upper surface of the loading plate 4. When the fixed block 69 loses the support of the ceramic substrate 5, the elastic traction rope 65 will quickly pull the first driving rod 68 to slide again, and the fixed block 69 will also move forward under the drive of the first driving rod 68, and the moving short rod 711 passing through the fixed block 69 will also slide in the first sliding groove 661, and the first sliding groove 661 will touch the driven block 74 and push it to move. The bottom of the driven block 74 is fixedly connected to a round rod 75, and the round rod 75 is slidably connected in the moving groove 73. The bottom of the round rod 75 is fixedly connected to a second driving rod 76, and the outer side of the second driving rod 76 is rotatably connected to a connecting rod 77, and one end of the connecting rod 77 is rotatably connected to the second driving rod On 76, the other end of the connecting rod 77 is rotatably connected to a driven round rod 78, and the end of the driven round rod 78 is fixedly connected to an L-shaped stopper 79, one end of the L-shaped stopper 79 is provided with a driven round rod 78, and the other end of the L-shaped stopper 79 extends to the lower surface of the door panel 72, and the bottom of the L-shaped stopper 79 is threadedly connected to a nut 710. Through the movement of the driven block 74, the driven block 74 will drive the L-shaped stopper 79 to rotate with the nut 710 as the axis point, and the end of the L-shaped stopper 79 will leave the bottom of the door panel 72. At this time, the door panel 72 loses the support of the L-shaped stopper 79, and the door panel 72 will rotate with the rotating door shaft 71 as the axis point, and those fragments will all fall into the collection frame 2, thereby achieving a cleaning effect.

[0043] When the ceramic substrate 5 is broken, the cleaning work can be completed without human intervention. In addition, no additional power source is required. It only needs to be used in conjunction with the ceramic substrate 5. The cleaning operation is performed through the cleaning component 7, which can save the staff's cleaning time, greatly improve work efficiency, and avoid the risk of staff being burned when performing cleaning work.

[0044] Working principle: When heating, the staff needs to place the ceramic substrate 5 into the placement groove 41 and then push the loading plate 4 until the ceramic substrate 5 is pushed above the heating plate 8. During the movement of the loading plate 4, the rack 61 will gradually mesh with the second bevel gear 63 and drive the second bevel gear 63 to rotate. Through the meshing of the second bevel gear 63, the first bevel gear 62 rotates synchronously, and the rotating rod 64 rotates synchronously with the first bevel gear 62. Through the rotation of the rotating rod 64, the elastic traction rope 65 will be wrapped around the side wall of the rotating rod 64, and the rotating rod 64 will slowly pull the first driving rod 68 to move. The first driving rod 68 will slowly slide in the fixed slide groove 67, and the roller 681 will squeeze the inclined surface 691, and then squeeze the first driving rod 68 out of the square shell 66 until the fixed block 69 is against the ceramic substrate 5, thereby achieving the effect of fixing the ceramic substrate 5.

[0045] When the ceramic substrate 5 is broken due to some factors during the heating process, the fixing block 69 will lose the support of the ceramic substrate 5. During the fixing operation, as the rotating rod 64 rotates, the fixing block 69 will abut against the ceramic substrate 5 and cannot move anymore. The roller 681 is at the center of the inclined surface 691 at this time. Since the elastic traction rope 65 has a strong elasticity, the elastic traction rope 65 will continue to be wound with the rotation of the rotating rod 64, which causes the elastic traction rope 65 to be always in a taut state. When the fixing block 69 loses the support of the ceramic substrate 5, the elastic traction rope 65 will quickly pull the first driving rod 68 to slide again. The first slide groove 661 will touch the driven block 74 and push it to move. Through the movement of the driven block 74, the driven block 74 will drive the L-shaped stopper 79 to rotate with the nut 710 as the axis point, and the end of the L-shaped stopper 79 will leave the bottom of the door panel 72. At this time, the door panel 72 loses the support of the L-shaped stopper 79, and the door panel 72 will rotate with the rotating door shaft 71 as the axis point. All the fragments will fall into the collection frame 2, thereby achieving the cleaning effect.

[0046] Finally, the staff uses a tool to turn 79 again to a position where 72 can be clamped.

[0047] The above embodiments are only used to illustrate the technical method of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical method of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical method of the present invention.

Claims

1. A wax sticking device for ceramic substrates, characterized in that: The invention comprises a working support (1), the top of the working support (1) is fixedly connected to a working table (12), the surface of the working table (12) is provided with a pair of track grooves (13), the top of the working table (12) is provided with a loading plate (4), the bottom of the loading plate (4) is fixedly connected to a sliding rod (42), the sliding rod (42) is slidably connected to the inside of the track groove (13), and the upper surface of the working table (12) is provided with a fixing component (6), wherein: The fixing assembly (6) comprises a rack (61), wherein the rack (61) is fixedly connected to one side of the loading plate (4); the upper surface of the workbench (12) is rotatably connected to a first bevel gear (62); the side wall of the first bevel gear (62) is meshingly connected to a second bevel gear (63); the top of the first bevel gear (62) is rotatably connected to a rotating rod (64); the side wall of the rotating rod (64) is fixedly connected to an elastic traction rope (65); the upper surface of the workbench (12) is fixedly connected to a square shell (66); the side wall of the square shell (66) is provided with a fixed slide groove (67); the interior of the fixed slide groove (67) is slidably connected to a first driving rod (68); one end of the elastic traction rope (65) is fixedly connected to the upper surface of the workbench (12); The fixing assembly (6) is fixedly connected to the rotating rod (64), and the other end of the elastic traction rope (65) is fixedly connected to the first driving rod (68). One end of the first driving rod (68) extending into the square shell (66) is rotatably connected to a roller (681). The side of the fixing assembly (6) away from the fixed sliding groove (67) is slidably connected to a fixing block (69). The side wall of the fixing block (69) is sleeved with a spring (610). The two ends of the spring (610) are respectively fixedly connected to the fixing block (69) and the square shell (66). The bottom of the fixing block (69) is provided with an inclined surface (691), and the roller (681) is arranged on the inclined surface (691). The side wall of the square shell (66) is provided with a first sliding groove (661).

2. A wax sticking device for ceramic substrates according to claim 1, characterized in that: The side wall of the working support (1) is fixedly connected to a transverse plate (11), the upper surface of the transverse plate (11) is fixedly connected to a collection frame (2), and the surface of the working table (12) is provided with a discharge groove (14), and the discharge groove (14) is arranged directly above the collection frame (2).

3. A wax sticking device for ceramic substrates according to claim 2, characterized in that: The discharge groove (14) is arranged between a pair of track grooves (13).

4. A wax sticking device for ceramic substrates according to claim 1, characterized in that: The upper surface of the working bracket (1) is fixedly connected to a housing (3).

5. A wax sticking device for ceramic substrates according to claim 1, characterized in that: The upper surface of the loading plate (4) is provided with a placement groove (41), and a ceramic substrate (5) is arranged inside the placement groove (41).

6. A wax sticking device for ceramic substrates according to claim 1, characterized in that: A cleaning assembly (7) is provided on the upper surface of the loading plate (4), and the cleaning assembly (7) includes a rotating door shaft (71), and the rotating door shaft (71) is fixedly connected to the lower surface of the loading plate (4); the side wall of the rotating door shaft (71) is fixedly connected to a door plate (72), and the door plate (72) is arranged at the bottom of the loading plate (4); a movable groove (73) is opened on the upper surface of the loading plate (4); a driven block (74) is provided on the upper surface of the loading plate (4); a round rod (75) is fixedly connected to the bottom of the driven block (74), and the round rod (75) is slidably connected in the movable groove (73); a second driving rod (76) is fixedly connected to the bottom of the round rod (75), and the second driving rod The outer side of the door panel (76) is rotatably connected to a connecting rod (77), one end of the connecting rod (77) is rotatably connected to the second driving rod (76), the other end of the connecting rod (77) is rotatably connected to a driven round rod (78), the end of the driven round rod (78) is fixedly connected to an L-shaped stopper (79), one end of the L-shaped stopper (79) is provided with a driven round rod (78), the other end of the L-shaped stopper (79) extends to the lower surface of the door panel (72), the bottom of the L-shaped stopper (79) is threadedly connected to a nut (710), the side wall of the fixed block (69) is fixedly connected to a short rod (711), the short rod (711) passes through the first slide groove (661) and extends to the outside of the square shell (66).

7. A wax sticking device for ceramic substrates according to claim 6, characterized in that: The movable groove (73) is arranged on a side of the loading plate (4) close to the first bevel gear (62).

8. A wax sticking device for ceramic substrates according to claim 4, characterized in that: A heating plate (8) is fixedly connected to the upper surface of the workbench (12), and the heating plate (8) is arranged inside the outer shell (3).

9. A wax sticking device for ceramic substrates according to claim 8, characterized in that: The fixing assembly (6) is arranged as a whole inside the housing (3).

Citation Information

Patent Citations

  • Wax sticking device and method for silicon wafer

    CN114566441A