Battery piece fragmentation evaporation annealing equipment and use method

Abstract

The invention discloses a piece-by-piece evaporation annealing device for a battery piece and a use method, the piece-by-piece evaporation annealing device for the battery piece comprises a scribing feeding device, a piece arranging and stacking device, an evaporation device, an annealing device and a discharging device, and the scribing feeding device is used for scribing the battery piece to form piece-by-piece battery pieces and conveying the piece-by-piece battery pieces to the piece arranging and stacking device; the piece arranging and stacking device is used for stacking a plurality of battery pieces, putting the battery pieces into a material box and conveying the battery pieces into the evaporation device; the evaporation device is used for evaporating passivation layers on the sections of the plurality of battery piece fragments in the material box and conveying the passivation layers to the annealing device; the annealing device is used for annealing the plurality of battery pieces in the material box after evaporation and conveying the battery pieces to the discharging device; and the discharging device is used for carrying the plurality of battery piece fragments in the annealed material box. According to the technical scheme, the problem of large-scale production of section passivation of the cell slices can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of cell slice passivation, and in particular to a cell slice evaporation annealing device and a use method thereof. Background Art

[0002] The cross-section of the cell slices formed after the cell is divided has not been passivated, resulting in increased edge recombination and reduced conversion efficiency. When the photovoltaic modules produced by this method work under a certain system voltage, the sodium ions present in the photovoltaic modules will gather at the cross-section under the action of the electric field to form a leakage channel, thereby reducing the insulation resistance of the positive and negative electrodes of the photovoltaic modules. This not only reduces the photoelectric conversion efficiency of the photovoltaic modules, but also further leads to a reduction in the reliability of the photovoltaic modules.

[0003] In the related art, the cross section of the cell slice is passivated by physical deposition, that is, by evaporation coating. Specifically, multiple cell slices are stacked and placed in a vacuum environment, and the target material is thermally evaporated to deposit a passivation layer on the cross section of the cell slice; then the multiple cell slices are annealed. The above method completes the repair of the cross section of the cell slice, so an automated equipment is urgently needed to complete the large-scale production of cross section passivation of the cell slice. Summary of the invention

[0004] The object of the present invention is to provide a cell slice evaporation annealing device and a passivation method to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a battery cell slicing evaporation annealing device, comprising a slicing and loading device, a wafer sorting and stacking device, a evaporation device, an annealing device and a unloading device, wherein the slicing and loading device is used to slice the battery cells into battery cell slices and convey them to the wafer sorting and stacking device; the wafer sorting and stacking device is used to stack a plurality of the battery cell slices into a material box and convey them to the evaporation device; the evaporation device is used to evaporate a passivation layer on the cross-section of the plurality of the battery cell slices in the material box and convey them to the annealing device; the annealing device is used to anneal the plurality of the battery cell slices in the material box after evaporation and convey them to the unloading device; the unloading device is used to transport the plurality of the battery cell slices in the material box after annealing.

[0006] Preferably, the slicing and loading device includes a feeding mechanism, a wafer transport arm, a slicing mechanism, a spacing transfer arm and a loading mechanism, the wafer transport arm is used to transport the battery cell carried on the feeding mechanism to the slicing mechanism, the slicing mechanism is used to divide the battery cell into the battery cell slices, the spacing transfer arm is used to separate the multiple battery cell slices and transport them to the loading mechanism, and the loading mechanism is used to correct the multiple battery cell slices and transport them to the wafer sorting and stacking device.

[0007] Preferably, the separation and transfer arm is provided with a drying mechanism, and when the separation and transfer arm separates and transports a plurality of the battery cell slices to the loading mechanism, the drying mechanism can dry the cross-sectional areas of the plurality of the battery cell slices.

[0008] Preferably, the wafer sorting and stacking device includes a stacking arm, a loading mechanism and a material box transfer mechanism. The stacking arm can stack the multiple battery cell slices conveyed by the dicing and loading device, and the cross-sections of the multiple battery cell slices are coplanar. The loading mechanism is used to carry the material box and make the stacked multiple battery cell slices located in the material box. The material box transfer mechanism is used to transport the material box carried by the loading mechanism to the evaporation device.

[0009] Preferably, the evaporation device includes an evaporation mechanism and a material box conveying mechanism, the evaporation mechanism can coat the cross-sections of the multiple battery cell slices in the material box with a passivation layer, the material box conveying mechanism is used to convey the material box carrying the multiple battery cell slices from the sheet sorting and stacking device to the evaporation mechanism, and to convey the material box after evaporation to the annealing device.

[0010] Preferably, the unloading device includes a material receiving and conveying mechanism, a separation mechanism and a wafer loading mechanism, the material receiving and conveying mechanism is used to receive the material box after annealing and convey it to the separation mechanism, and the separation mechanism is used to transfer the multiple battery cells in the material box to the wafer loading mechanism.

[0011] Preferably, it also includes a material box circulation device, and the unloading device can drive at least one of the material boxes to be conveyed to the material box circulation device, and the material box circulation device is used to convey at least one of the material boxes to the sheet sorting and stacking device.

[0012] The present application also discloses a method of use, which is applicable to the above-mentioned cell slice evaporation annealing equipment, and the method of use comprises: The dicing and loading device dices the battery cell to form the battery cell slices, and then the dicing and loading device transports the battery cell slices to the wafer sorting and stacking device.

[0013] The wafer sorting and stacking device stacks the multiple battery cell slices so that the cross-sections of the multiple battery cell slices are coplanar, and puts them into a material box, with the cross-sections of the multiple battery cell slices exposed outside the material box, and then the wafer sorting and stacking device transports the material box to the evaporation device.

[0014] The material box is located in the evaporation device, and the evaporation device evaporates the passivation layer on the cross-sections of the plurality of battery cell slices in the material box, and then the evaporation device transports the material box to the annealing device.

[0015] The annealing device performs annealing on the plurality of battery cells in the material box after evaporation, and then the annealing device transports the material box to the unloading device.

[0016] The unloading device carries the plurality of battery cell slices in the material box after annealing, so that the plurality of battery cell slices are separated from the material box.

[0017] Preferably, it also includes: The unloading device can drive at least one of the material boxes to be transported to the material box circulation device, and the material box circulation device is used to transport at least one of the material boxes to the sheet sorting and stacking device.

[0018] Preferably, the step of the dicing and loading device dicing the battery cell to form the battery cell slices, and then the dicing and loading device transporting the battery cell slices to the wafer sorting and stacking device includes: The cell transporter carries the battery cell carried by the feeding mechanism to the dicing mechanism, and the dicing mechanism divides the battery cell into the battery cell slices.

[0019] While the separation and transfer arm separates at least two of the battery cell slices and transports them to the loading mechanism, the drying mechanism can dry the cross-sectional areas of at least two of the battery cell slices. The loading mechanism carries multiple battery cell slices and transports them to the slice sorting and stacking device.

[0020] The technical solution adopted in this application can achieve the following beneficial effects: On the one hand, the present application discloses a battery cell slicing evaporation annealing device, in which a slicing and loading device is used to slice battery cells to form battery cell slices and convey them to a slice sorting and stacking device; the slice sorting and stacking device is used to stack multiple battery cell slices into a material box and convey them to an evaporation device; the evaporation device is used to evaporate a passivation layer on the cross-section of multiple battery cell slices in the material box and convey them to an annealing device; the annealing device is used to anneal the multiple battery cell slices in the material box after evaporation and convey them to a unloading device; the unloading device is used to carry the multiple battery cell slices in the material box after annealing.

[0021] The above structure completes the cell slicing and segmenting, cell stacking, cell evaporation passivation layer, cell annealing and cell unloading processes in sequence through the cooperation between the slicing and loading device, the cell sorting and stacking device, the evaporation device, the annealing device and the unloading device, thereby realizing the automation of the cell slice cross-section passivation, and further enabling the cell slice evaporation annealing equipment to complete the large-scale production of cell slice cross-section passivation.

[0022] On the other hand, the present application discloses a method of use for implementing the above-mentioned passivation repair method, and the disclosed method of use includes: The dicing and loading device scribes the battery cells to form battery cell slices, and then the dicing and loading device transports the battery cell slices to the wafer sorting and stacking device.

[0023] In this step, the cell dicing process is completed, realizing the automated large-scale production of cell slicing.

[0024] The wafer stacking device stacks multiple battery cell slices so that the cross-sections of the multiple battery cell slices are coplanar, and puts them into a material box, with the cross-sections of the multiple battery cell slices exposed outside the material box, and then the wafer stacking device transports the material box to the evaporation device.

[0025] In this step, multiple battery cell slices are stacked and their cross-sections are made coplanar, that is, multiple battery cell slices are used as a unit for subsequent passivation and annealing processes, so as to achieve the purpose of improving efficiency. At the same time, the cross-sections of multiple battery cell slices are exposed outside the material box to avoid the phenomenon of passivation layer plating during the passivation process.

[0026] The material box is located in the evaporation device, which evaporates a passivation layer on the cross-sections of multiple battery cells in the material box, and then the evaporation device transports the material box to the annealing device.

[0027] In this step, the evaporation device can form a gaseous passivation material by heating the target material through a resistance wire, or irradiating the target material with a laser, or bombarding the target material with an electron beam, so as to form a passivation layer on the cross-sections of multiple battery cell slices.

[0028] The annealing device performs annealing on the multiple battery cells in the material box after evaporation, and then the annealing device transports the material box to the unloading device.

[0029] In this step, the annealing device anneals multiple cell slices to change the interface structure between the passivation layer and the cross section in the multiple cell slices to destroy the Si dangling bonds, reduce the probability of minority carriers in the cross section meeting and recombination on the surface, thereby reducing the surface recombination rate. The free hydrogen atoms in the annealing device can occupy the vacancies of the dangling bonds of the cross section, reduce the interface state density on the surface to achieve the effect of reducing the surface recombination rate, thereby achieving a passivation effect to improve the photoelectric conversion efficiency of the cell slices.

[0030] The unloading device carries the multiple battery cell slices in the material box after annealing, so that the battery cell slices are separated from the material box. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without paying creative work.

[0032] Figure 1 This is a flow chart of the cell slicing evaporation annealing equipment disclosed in the embodiment of the present application; Figure 2 This is a schematic diagram of the structure of the distance transfer hand disclosed in the embodiment of the present application; Figure 3 A top view of a dicing and loading device disclosed in an embodiment of the present application; Figure 4 It is a partial side view of the cell slicing evaporation annealing equipment disclosed in an embodiment of the present application.

[0033] In the figure: 100, wafer scribing and loading device; 110, feeding mechanism; 111, first feeding channel; 112, wafer moving gripper; 113, second feeding channel; 120, wafer transport arm; 130, wafer scribing mechanism; 140, spacing transfer arm; 150, loading mechanism; 210, wafer stacking arm; 220, loading mechanism; 230, material box transfer mechanism; 300, evaporation device; 400, annealing device; 500, unloading device; 600, material box circulation device. DETAILED DESCRIPTION

[0034] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The preferred embodiments of the present invention are given in the drawings. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present invention more thoroughly understood.

[0035] It should be noted that when an element is referred to as being "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element at the same time.

[0036] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0037] like Figures 1 to 4As shown, the present application discloses a cell slicing evaporation annealing device, and the disclosed cell slicing evaporation annealing device includes a dicing and loading device 100, a slice sorting and stacking device, a evaporation device 300, an annealing device 400 and a unloading device 500.

[0038] Specifically, the dicing and loading device 100 is used to slice the battery cells into battery cell slices and convey them to the wafer sorting and stacking device; the wafer sorting and stacking device is used to stack multiple battery cell slices into a material box and convey them to the evaporation device 300; the evaporation device 300 is used to evaporate a passivation layer on the cross-section of the multiple battery cell slices in the material box and convey them to the annealing device 400; the annealing device 400 is used to anneal the multiple battery cell slices in the material box after evaporation and convey them to the unloading device 500; the unloading device 500 is used to transport the multiple battery cell slices in the material box after annealing.

[0039] During the use of the cell slicing evaporation annealing equipment, the slicing and loading device 100 slices the cell into cell slices and transports them to the wafer sorting and stacking device; the wafer sorting and stacking device stacks a plurality of cell slices, and the cross sections of the plurality of cell slices are coplanar, and are uniformly placed in a material box, and then transported to the evaporation device 300; the evaporation device 300 sublimates the target material (metal oxide, such as aluminum oxide, titanium oxide, etc.), and the gaseous target material evaporates and adheres to the cross sections of the plurality of cell slices in the material box to form a passivation layer, and then The material box is then conveyed to the annealing device 400; the annealing device 400 anneals the multiple battery cell slices in the material box after vapor deposition to change the interface structure between the passivation layer and the cross section in the multiple battery cell slices to destroy the Si dangling bonds, reduce the probability of minority carriers (minority carriers) in the cross section meeting and recombination on the surface, thereby reducing the surface recombination rate, and then the material box is conveyed to the unloading device 500; the unloading device 500 carries the multiple battery cell slices in the material box after annealing to separate the multiple battery cell slices from the material box.

[0040] The above structure completes the cell slicing and segmenting, cell stacking, cell evaporation passivation layer, cell annealing and cell unloading processes in sequence through the cooperation between the slicing and loading device 100, the slice sorting and stacking device, the evaporation device 300, the annealing device 400 and the unloading device 500, thereby realizing the automation of the cell slice cross-section passivation, and further enabling the cell slice evaporation annealing equipment to complete the large-scale production of cell slice cross-section passivation.

[0041] In the prior art, chemical deposition is used, that is, multiple cell slices are placed in a carrier, and the carrier is processed in turn through a PECVD device and an ALD passivation device, which requires manual loading and unloading, and production is easily interrupted. Since special gases are introduced during the processing of the PECVD device and the ALD passivation device, it is relatively dangerous, and the environmental requirements for the production of photovoltaic modules are relatively high, resulting in the two being unable to coexist in the same room. At the same time, the passivated cell slices cannot be placed for too long, and the passivation layer is difficult to preserve for a long time due to its water absorption, making it unsuitable for mass production; or, the multiple cell slices located in the carrier are processed through a PEALD deposition device. Although compared with the above-mentioned passivation equipment, the PEALD deposition equipment achieves an optimized integrated design, the step of introducing special gases cannot be avoided in the processing technology, and mass production cannot be achieved.

[0042] The cell slice evaporation annealing equipment disclosed in the present application is applied to the cross-section passivation needs of cell slices through physical deposition, i.e. evaporation. The physical deposition does not require the introduction of special gases, and the passivation layer is plated on the cross-section surface of the cell slice only through the sublimation of the target material. The process is simple and can be directly connected to the cell string welding equipment. The prepared cell strings can be directly used to prepare photovoltaic modules, thereby ensuring the passivation effect while meeting the requirements of mass production.

[0043] In an embodiment of the present application, the slicing and loading device 100 may include a feeding mechanism 110, a wafer transport arm 120, a slicing mechanism 130, a spacing transfer arm 140 and a loading mechanism 150. Specifically, the wafer transport arm 120 is used to transport the battery cells carried on the feeding mechanism 110 to the slicing mechanism 130, the slicing mechanism 130 is used to divide the battery cells into battery cell slices, the spacing transfer arm 140 is used to separate multiple battery cell slices and transport them to the loading mechanism 150, and the loading mechanism 150 is used to correct multiple battery cell slices and transport them to the wafer sorting and stacking device.

[0044] The above structure first realizes the loading, transportation and slicing of battery cells in sequence through the feeding mechanism 110, the wafer transport arm 120 and the slicing mechanism 130, so as to form battery cell slices, and then transfers the separated battery cell slices through the separation transfer arm 140 to avoid the battery cell slices being too close to each other and colliding during the transportation process. Finally, the loading mechanism 150 corrects the battery cell slices to ensure the loading accuracy of the wafer stacking device. Of course, the wafer transport arm 120 can be a combination of a Bernoulli suction cup and a driving electric cylinder, an electrostatic adsorption component and a cylinder combination, etc., and this application does not impose any restrictions; the slicing mechanism 130 can be realized by specific structures such as mechanical slicing, laser thermal slicing and damage-free slicing, which are all existing technologies and will not be elaborated on here.

[0045] In addition, the feeding mechanism 110 may include a first feeding channel 111 and a film handling gripper 112, the first feeding channel 111 carries a plurality of stacked battery cells, and the film handling gripper 112 can transport them one by one to the dicing mechanism 130; or, the feeding mechanism 110 may include a second feeding channel 113, a film handling gripper 112 and at least two first feeding channels 111, the film handling gripper 112 transports the battery cells carried on at least two first feeding channels 111 one by one, and a correction visual camera is arranged above the second feeding channel 113 to assist the film handling gripper 112 in improving the accuracy of film placement. The first feeding channel 111 and the second feeding channel 113 can both be conveyor belt channels, transport fork channels, roller channels, etc., and this application does not impose any restrictions on this.

[0046] In a further technical solution, a drying mechanism may be provided on the separation and transfer hand 140. Since the battery cells are divided into battery cell slices by laser non-destructive cutting in the prior art, water cooling or other cooling of the battery cells is also required, so water droplets may be attached to the cross-sectional area of ​​the battery cell slices. When the separation and transfer hand 140 separates and transfers multiple battery cell slices to the feeding mechanism 150, the drying mechanism may dry the cross-sectional area of ​​the multiple battery cell slices, thereby ensuring that no impurities such as water droplets are attached to the battery cell slices. Of course, the drying mechanism may be a hot air gun, an infrared heating lamp tube, an infrared heating LED lamp bead, etc., and this application does not impose any restrictions on this.

[0047] In addition, a position detection component is provided at the feeding end of the feeding mechanism 150, which can confirm the position of the battery cell slice to determine whether it needs to be corrected, thereby optimizing the logic of battery cell slice transportation and achieving the purpose of improving efficiency. Of course, the position detection component can be a through-beam sensor, a proximity sensor, a 2D camera module, etc., and this application does not impose any restrictions on this.

[0048] In an embodiment of the present application, the wafer sorting and stacking device may include a stacking arm 210, a loading mechanism 220 and a material box transfer mechanism 230. Specifically, the stacking arm 210 can stack multiple battery cell slices conveyed by the dicing and loading device 100, and the cross-sections of the multiple battery cell slices are coplanar. The loading mechanism 220 is used to carry the material box and make the stacked multiple battery cell slices located in the material box. The material box transfer mechanism 230 is used to transport the material box carried by the loading mechanism 220 to the evaporation device 300.

[0049] The above structure first stacks a plurality of battery cell slices through the stacking arm 210, and makes the cross-sections of the plurality of battery cell slices coplanar, so that it is convenient for the subsequent evaporation device 300 to evaporate the cross-sections of the plurality of battery cell slices at one time, and then the stacked plurality of battery cell slices are placed in the material box through the loading mechanism 220, so as to facilitate unified transportation. The material box can also protect the plurality of battery cell slices.

[0050] In addition, the loading mechanism 220 may include a loading arm and a receiving platform, the receiving platform may carry multiple stacked battery cell slices, and the loading arm receives the material box to load the multiple stacked battery cell slices; or, the loading mechanism 220 may include a transport robot and a carrying platform, the carrying platform may receive the material box, and the transport robot may clamp the multiple stacked battery cell slices and move them into the material box. This application does not impose any restrictions on this.

[0051] In an embodiment of the present application, the evaporation device 300 may include an evaporation mechanism and a material box conveying mechanism. Specifically, the evaporation mechanism can coat a passivation layer on the cross-sections of multiple battery cell slices in the material box. The material box conveying mechanism is used to convey the material box carrying multiple battery cell slices from the wafer sorting and stacking device to the evaporation mechanism, and to transport the evaporated material box to the annealing device 400.

[0052] In the above structure, the evaporation mechanism may include a furnace body assembly and an electron beam gun; or, the evaporation mechanism may include a furnace body assembly and a resistance heating element; or, the evaporation mechanism may include a furnace body assembly and a laser emitter. The present application does not impose any restrictions on this. The evaporation mechanism realizes the cross-section coating of a plurality of battery cell slices by a physical deposition method of bombarding a target material with an electron beam, or resistively heating the target material, or irradiating the target material with a laser.

[0053] Among them, the material box handling mechanism can be a handling robot arm, an electric cylinder and a mechanical clamp combination and a sprocket material channel, etc., and this application does not impose any restrictions on this.

[0054] In an embodiment of the present application, the unloading device 500 may include a material receiving and conveying mechanism, a separation mechanism and a wafer loading mechanism. Specifically, the material receiving and conveying mechanism is used to receive the annealed material box and convey it to the separation mechanism, and the separation mechanism is used to transfer multiple battery cells in the material box to the wafer loading mechanism.

[0055] In the above structure, the separation mechanism separates the battery cell segments from the material box, which not only facilitates the transportation of multiple battery cell segments to other equipment, but also facilitates the rapid recycling of the material box.

[0056] In an embodiment of the present application, the disclosed cell slicing evaporation annealing equipment may further include a material box circulation device 600. Specifically, the unloading device 500 may drive at least one material box to be transported to the material box circulation device 600. The material box circulation device 600 is used to transport at least one material box to the wafer sorting and stacking device.

[0057] In the above structure, the separated material boxes in the unloading device 500 can be collected by the material box circulation device 600 and transported to the sheet sorting and stacking device for recycling, thereby avoiding time-consuming and labor-intensive manual transportation and facilitating automated integrated design.

[0058] The present application also discloses a method of use, which is applicable to the above-mentioned cell slice evaporation annealing equipment, and the method of use includes: The dicing and loading device 100 scribes the battery cells to form battery cell slices, and then the dicing and loading device 100 transports the battery cell slices to the wafer sorting and stacking device.

[0059] In this step, the cell dicing process is completed, realizing the automated large-scale production of cell slicing.

[0060] The wafer sorting and stacking device stacks multiple battery cell slices so that the cross-sections of the multiple battery cell slices are coplanar, and puts them into a material box, with the cross-sections of the multiple battery cell slices exposed outside the material box, and then the wafer sorting and stacking device transports the material box to the evaporation device 300.

[0061] In this step, multiple battery cell slices are stacked and their cross-sections are made coplanar, that is, multiple battery cell slices are used as a unit for subsequent passivation and annealing processes, so as to achieve the purpose of improving efficiency. At the same time, the cross-sections of multiple battery cell slices are exposed outside the material box to avoid the phenomenon of passivation layer plating during the passivation process.

[0062] The material box is located in the evaporation device 300 , and the evaporation device 300 evaporates a passivation layer on the cross-sections of a plurality of battery cells in the material box, and then the evaporation device 300 transports the material box to the annealing device 400 .

[0063] In this step, the evaporation device 300 can form a gaseous passivation material by heating the target material through a resistance wire, or irradiating the target material with a laser, or bombarding the target material with an electron beam, so as to form a passivation layer on the cross-sections of multiple battery cell slices.

[0064] The annealing device 400 performs annealing on the multiple battery cells in the material box after evaporation, and then the annealing device 400 transports the material box to the unloading device 500 .

[0065] In this step, the annealing device 400 anneals the multiple battery cell slices to change the interface structure between the passivation layer and the cross section in the multiple battery cell slices to destroy the Si dangling bonds, thereby reducing the probability of minority carriers in the cross section meeting and recombination in the cross section, thereby reducing the cross section recombination rate. The free hydrogen atoms in the annealing device 400 can occupy the vacancies of the dangling bonds in the cross section, reducing the interface state density of the cross section to achieve the effect of reducing the cross section recombination rate, thereby achieving a passivation effect to improve the photoelectric conversion efficiency of the battery cell slices.

[0066] The unloading device 500 transports the multiple battery cell slices in the material box after annealing, so that the battery cell slices are separated from the material box.

[0067] In the embodiments of the present application, the disclosed method of use may also include: The unloading device 500 can drive at least one material box to be transported to the material box circulation device 600, and the material box circulation device 600 is used to transport at least one material box to the sheet sorting and stacking device.

[0068] In this step, the material box circulation device 600 avoids the time-consuming and labor-intensive manual handling by conveying the separated material boxes to the sheet sorting and stacking device, and is also conducive to the automatic circulation of the material boxes and the improvement of the handling efficiency.

[0069] In the embodiment of the present application, the dicing and loading device 100 dices the battery cell to form battery cell slices, and then the dicing and loading device 100 transports the battery cell slices to the wafer sorting and stacking device, which may include: The wafer transport arm 120 transports the battery cells carried by the feeding mechanism 110 to the dicing mechanism 130 , and the dicing mechanism 130 divides the battery cells into battery cell slices.

[0070] While the separation and transfer arm 140 separates at least two battery cell slices and transports them to the loading mechanism 150, the drying mechanism can dry the cross-sectional area of ​​at least two battery cell slices. The loading mechanism 150 carries and aligns multiple battery cell slices and transports them to the slice sorting and stacking device.

[0071] In this step, since water droplets will adhere to the cross-sectional area of ​​the battery cell slices due to the water cooling treatment after the battery cell slices are cut, the cross-sectional area of ​​the battery cell slices is dried by a drying mechanism to avoid relative displacement of the battery cell slices due to static friction affected by water droplets in subsequent stacking operations, thereby avoiding uneven stacking of the battery cell slices.

[0072] In the embodiment of the present application, the wafer sorting and stacking device stacks a plurality of battery cell slices so that the cross sections of the plurality of battery cell slices are coplanar and puts them into a material box, and the cross sections of the plurality of battery cell slices are exposed outside the material box, and then the wafer sorting and stacking device transports the material box to the evaporation device 300, which may include: The stacking arm 210 can stack the multiple battery cell slices conveyed by the dicing and loading device 100 , and the cross-sections of the multiple battery cell slices are coplanar.

[0073] The loading mechanism 220 carries a material box and places a plurality of stacked battery cells in the material box.

[0074] The material box transfer mechanism 230 transports the material box carried by the loading mechanism 220 to the evaporation device 300 .

[0075] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A cell slice evaporation annealing device, characterized in that: The invention comprises a dicing and loading device (100), a wafer sorting and stacking device, a vapor deposition device (300), an annealing device (400) and a feeding device (500), wherein the dicing and loading device (100) is used for dicing a battery cell into battery cell slices and conveying them to the wafer sorting and stacking device; the wafer sorting and stacking device is used for stacking a plurality of battery cell slices into a material box and conveying them to the vapor deposition device (300); the vapor deposition device (300) is used for vapor deposition of a passivation layer on the cross-sections of a plurality of battery cell slices in the material box and conveying them to the annealing device (400); The annealing device (400) is used to anneal the plurality of battery cell slices in the material box after vapor deposition and transport them to the unloading device (500); the unloading device (500) is used to transport the plurality of battery cell slices in the material box after annealing.

2. The cell slicing evaporation annealing equipment according to claim 1, characterized in that: It also includes a material box circulation device (600), and the unloading device (500) can drive at least one of the material boxes to be transported to the material box circulation device (600), and the material box circulation device (600) is used to transport at least one of the material boxes to the sheet sorting and stacking device.

3. The cell slicing evaporation annealing equipment according to claim 1, characterized in that: The evaporation device (300) comprises an evaporation mechanism and a material box conveying mechanism, wherein the evaporation mechanism can coat a passivation layer on the cross-sections of the plurality of battery cell slices in the material box, and the material box conveying mechanism is used to convey the material box carrying the plurality of battery cell slices from the wafer sorting and stacking device to the evaporation mechanism, and to convey the material box after evaporation to the annealing device (400).

4. The cell slicing evaporation annealing equipment according to claim 1, characterized in that: The slicing and loading device (100) comprises a feeding mechanism (110), a wafer transport arm (120), a slicing mechanism (130), a distance transfer arm (140) and a loading mechanism (150), wherein the wafer transport arm (120) is used to transport the battery cell carried on the feeding mechanism (110) to the slicing mechanism (130), the slicing mechanism (130) is used to split the battery cell into battery cell slices, the distance transfer arm (140) is used to separate a plurality of battery cell slices and transport them to the loading mechanism (150), and the loading mechanism (150) is used to straighten a plurality of battery cell slices and transport them to the wafer sorting and stacking device.

5. The cell slicing evaporation annealing equipment according to claim 4, characterized in that: The separation and transfer arm (140) is provided with a drying mechanism. When the separation and transfer arm (140) separates and transfers a plurality of the battery cell segments to the loading mechanism (150), the drying mechanism can dry the cross-sectional areas of the plurality of the battery cell segments.

6. The cell slicing evaporation annealing equipment according to claim 1, characterized in that: The wafer sorting and stacking device comprises a stacking arm (210), a loading mechanism (220) and a material box transfer mechanism (230). The stacking arm (210) can stack the multiple battery cell slices conveyed by the dicing and loading device (100), and the cross-sections of the multiple battery cell slices are coplanar. The loading mechanism (220) is used to carry the material box and make the stacked multiple battery cell slices located in the material box. The material box transfer mechanism (230) is used to transport the material box carried by the loading mechanism (220) to the evaporation device (300).

7. The cell slicing evaporation annealing equipment according to claim 1, characterized in that: The unloading device (500) comprises a material receiving and conveying mechanism, a separation mechanism and a wafer loading mechanism, wherein the material receiving and conveying mechanism is used to receive the material box after annealing and convey it to the separation mechanism, and the separation mechanism is used to transfer the plurality of battery cells in the material box to the wafer loading mechanism.

8. A method of use, applicable to the cell slice evaporation annealing equipment according to any one of claims 1 to 7, characterized in that: The method of use includes: The dicing and loading device (100) dices the battery cell to form the battery cell slices, and then the dicing and loading device (100) transports the battery cell slices to the wafer sorting and stacking device; The wafer sorting and stacking device stacks a plurality of the battery cell slices so that the cross sections of the plurality of the battery cell slices are coplanar, and places the plurality of the battery cell slices in a material box, with the cross sections of the plurality of the battery cell slices exposed outside the material box, and then the wafer sorting and stacking device transports the material box to the evaporation device (300); The material box is located in the evaporation device (300), the evaporation device (300) evaporates the passivation layer on the cross-sections of the plurality of battery cell slices in the material box, and then the evaporation device (300) transports the material box to the annealing device (400); The annealing device (400) performs annealing on the plurality of battery cells in the material box after evaporation, and then the annealing device (400) transports the material box to the unloading device (500); The unloading device (500) transports the plurality of battery cell slices in the material box after annealing, so that the plurality of battery cell slices are separated from the material box.

9. The method of use according to claim 8, characterized in that: Also includes: The unloading device (500) can drive at least one of the material boxes to be transported to the material box circulation device (600), and the material box circulation device (600) is used to transport at least one of the material boxes to the sheet sorting and stacking device.

10. The method of use according to claim 8, characterized in that: The step of the dicing and loading device (100) dicing the battery cell to form the battery cell slices, and then the dicing and loading device (100) transporting the battery cell slices to the wafer sorting and stacking device comprises: The cell transporter (120) transports the battery cell carried by the feeding mechanism (110) to the dicing mechanism (130), and the dicing mechanism (130) divides the battery cell into the battery cell slices; While the separation and transfer arm (140) separates at least two of the battery cell slices and transports them to the loading mechanism (150), the drying mechanism can dry the cross-sectional areas of at least two of the battery cell slices. The loading mechanism (150) carries multiple battery cell slices and transports them to the slice sorting and stacking device.

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