Coating equipment and coating method

Abstract

The invention relates to the technical field of film coating, in particular to film coating equipment and a film coating method.The film coating equipment comprises an evaporation source, an evaporation baffle and a film coating cooling drum; the evaporation baffle comprises a main body part and shielding areas, the shielding areas are arranged on the edge of the main body part, and a hollow part is arranged between the shielding areas; the evaporation baffle has the beneficial effects that the evaporation baffle in a special shape is provided, the openings in the two sides of the side face of the evaporation baffle are designed to be in a triangular sawtooth shape, materials can be prevented from being deposited on a cooling drum, the thickness of a material film layer at the edge of a base film can be gradually reduced, the prepared film layer is more uniform, and the film layer is more uniform. And the problems of edge warping and edge bulging caused by the flanges are reduced.

Description

Technical Field

[0001] The present invention relates to the field of film coating technology, in particular to a film coating device and a film coating method. Background Art

[0002] The current collector is an important component of the secondary battery. At present, the composite current collector with the structure of "metal-molecular material-metal" is used to replace the traditional copper foil or aluminum foil current collector, which can effectively reduce the weight of the battery current collector and improve the safety and energy density of the battery. With the development of vacuum coating, the production process of flexible conductive films has gradually replaced the traditional electroplating, coating and chemical treatment methods by vacuum coating, which reduces pollution and has the advantages of strong coating bonding and uniform film layer. There are currently two types of vacuum coating equipment on the market, one is the drum coating equipment and the other is the suspension coating equipment.

[0003] Among them, the drum-type coating equipment is equipped with an evaporation cooling drum, which can achieve double-sided one-time film formation, which can greatly improve production efficiency. However, when using the drum-type coating, the cooling drum is set above the evaporation area, and the length of the drum is greater than the width of the film. If the baffle opening set on the evaporation source is the same width as the film surface, it will cause the material to diffuse to the drum not covered by the film. The material is deposited on the drum, affecting the cooling effect of the drum, and there is a risk of falling off as the coating thickens, affecting the product quality. Therefore, in order to avoid this situation, the evaporation baffle opening is generally set smaller than the width of the film when using the drum-type coating, blocking the edge of the film to prevent the material from being deposited on the coating drum. However, there are still some problems with doing so. If the size of the rib is too small, the shielding is incomplete, resulting in material deposition on the drum. The edge of the film is easily scratched or punctured by metal dendrites after contacting the material deposition area on the drum surface, resulting in film breakage. If the size of the rib is too large, since there is no metal vapor-deposited on the edge of the film shielded by the rib or the coating is too thin, the edge area is basically not heated, and the target coating area will have a wider temperature due to receiving metal vapor. There is a large temperature difference between the two, resulting in inconsistent film stress, and the edge of the film will form warping, which ultimately affects product quality. Summary of the invention

[0004] Some simplifications or omissions may be made in this section and the abstract and title of the present application to avoid obscuring the purpose of this section, the abstract and the title of the invention, and such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] In view of the above problems or problems existing in the prior art, the present invention is proposed.

[0006] In order to solve the above technical problems, the present invention provides the following technical solutions: the main body of the equipment includes an evaporation source, an evaporation baffle and a coating cooling drum;

[0007] The evaporation baffle comprises a main body and a shielding area, wherein the shielding area is arranged at the edge of the main body, and a hollow part is provided between the shielding areas.

[0008] As a preferred solution of the coating assembly of the present invention, the gap between the two shielding areas gradually becomes smaller along the direction of the main body of the evaporation baffle.

[0009] As a preferred solution of the coating component of the present invention, the shielding area array is arranged in any one or more combinations of wave-shaped, sawtooth-shaped and other structures.

[0010] As a preferred solution of the coating component described in the present invention, wherein: a dotted frame area S is defined.

[0011] The area of ​​the shielding area is S1;

[0012] The ratio of the shielding area to the dotted frame area is 1.15 to 1.4.

[0013] As a preferred solution of the coating component of the present invention, the shielding area is an isosceles triangle, and the inner angle of the shielding area is 30 to 60 degrees, and the height of the isosceles triangle is 1 to 5 cm.

[0014] As a preferred solution of the coating assembly of the present invention, wherein: S1 / S=1:2;

[0015] The inner angle of the shielding area is 45°.

[0016] As a preferred solution of the coating assembly of the present invention, wherein: the evaporation baffle is configured to be movable relative to the coating cooling drum during the coating process;

[0017] It comprises an inductive transmission device, which is used to identify the change of the area of ​​the shielding film in the shielding area during the coating process and drive the shielding area baffle to move.

[0018] Beneficial effects of the present invention: The present invention provides an evaporation baffle with a special shape, and the openings on both sides of the evaporation baffle are designed to be triangular serrated, which can not only prevent the material from being deposited on the cooling drum, but also gradually thin the material film layer thickness at the edge of the base film, making the prepared thin film layer more uniform, and reducing the problem of warping and bulging edges caused by the baffle.

[0019] Another object of the invention is to provide a coating method.

[0020] As a preferred solution of the film coating assembly of the present invention, wherein: a suitable film base film is selected, and the film base film is placed on a film coating cooling drum in the film coating equipment;

[0021] The relative position of the thin film base film and the evaporation baffle is adjusted so that the orthographic projection of the thin film base film on the evaporation baffle at least partially overlaps with the shielding area.

[0022] Controlling the transport rate of the thin film base film and coating the surface of the thin film base film;

[0023] The coated film base film is rolled up.

[0024] As a preferred solution of the film coating assembly of the present invention, the orthographic projection of the thin film base film on the evaporation baffle completely overlaps with the shielding area.

[0025] As a preferred solution of the coating component described in the present invention, wherein: the orthographic projection of the thin film base film on the evaporation baffle completely overlaps with the shielding area, the orthographic projection of the thin film base film on the evaporation baffle partially overlaps with the main body, and the overlapping width of the orthographic projection of the thin film base film on the evaporation baffle and the main body is m≤8mm.

[0026] The beneficial effects of the present invention are: making the prepared film layer more uniform and reducing the edge warping and bulging problems caused by the retaining edge. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0028] Figure 1 It is a bottom view of the main body of the prior art device.

[0029] Figure 2 This is a bottom view of the equipment body of the coating component.

[0030] Figure 3 This is the main view of the equipment body of the coating component.

[0031] Figure 4 A side view of the equipment body of the coating component.

[0032] Figure 5 Schematic diagram of the sawtooth baffle structure of the coating component.

[0033] Figure 6 Schematic diagram of the wavy baffle structure of the coating component.

[0034] Figure 7 Schematic diagram of the fan-shaped baffle structure of the coating component.

[0035] Figure 8Schematic diagram of the pointed cone baffle structure of the coating component.

[0036] Fig. 9 For coating components Figure 7 Enlarged view of the structure of area C in the middle and schematic diagram of metal vapor flow.

[0037] Fig.10 Schematic diagram of the metal coating cross-section of the coated component. DETAILED DESCRIPTION

[0038] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings.

[0039] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0040] Secondly, the term "one embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The term "in one embodiment" that appears in different places in this specification does not necessarily refer to the same embodiment, nor is it a separate or selective embodiment that is mutually exclusive with other embodiments.

[0041] Example 1

[0042] Reference Figures 1 to 4 , which is the first embodiment of the present invention, provides a coating assembly, which includes an evaporation source 101, an evaporation baffle 102 and a coating cooling drum 103; the drum-type coating device is provided with an evaporation port toward the evaporation source 101, the evaporation port almost covers the axial length of the coating cooling drum 103, and the evaporation port has a certain lateral width so that the film wound on the coating cooling drum 103 is exposed to the evaporation source 101; the evaporation baffle 102 is provided at the evaporation port, and is relatively provided on both sides of the axial direction of the coating cooling drum 103;

[0043] The evaporation baffle 102 includes a main body 102a and a shielding area A. The main body 102a is used to connect with the evaporation port. The shielding area A is located within the evaporation port. The shielding areas A on both sides limit the length of the evaporation port, that is, limit the axial area of ​​the film exposed to the evaporation source 101 and the coating cooling drum 103. The shielding areas A are set at the edge of the main body 102a, and there are hollow parts between the shielding areas A.

[0044] The evaporation baffle 102 is arranged inside the drum-type coating equipment along the axial direction of the coating cooling drum 103 .

[0045] The evaporation baffle 102 is almost attached to the coating cooling drum 103. The evaporation baffle 102 is designed to be a concave arc surface that matches the shape of the coating cooling drum 103. This design can reduce the gap between the evaporation baffle 102 and the coating cooling drum 103, preventing the material from evaporating onto the coating cooling drum 103 or material residues from splashing onto the coating cooling drum 103 due to the large gap.

[0046] In addition, the evaporation baffle 102 is designed to be a concave arc surface that matches the shape of the drum. The side facing the drum is the front side, and the other side is the back side. The opening of the side baffle on the back side is designed to be gradually thinned toward the edge of the opening. This design can maintain and clean aluminum slag. Aluminum slag will be deposited in this section, and the inclined design toward the inside of the coating drum can prevent the aluminum slag from being pried with force, which may cause damage to the coating drum due to mistakes. At the same time, this section is close to the evaporation source, and the heat dissipation effect will be worse if the baffle is thicker, and the heat dissipation will be faster if the baffle is thinner. This is the prior art and will not be described in detail.

[0047] The evaporation baffle 102 is connected to a film thickness monitoring sensing transmission device, which can monitor the thickness of the material deposited on the edge of the film and whether there is material deposited on the coating cooling roller 103. The evaporation baffle 102 is automatically extended and retracted according to the feedback from the monitoring device to adjust the position of the evaporation baffle 102. This technology is existing technology and will not be repeated here.

[0048] At the same time, the main body 102a and the shielding area A together form the evaporation baffle 102, and the shielding area A is fixedly installed on the side of the main body 102a close to the film; in this solution, the thickness of the shielding area A is the same as that of the main body 102a.

[0049] like Figure 1 In the prior art, the evaporation source 101 and the coating cooling drum 103 are shielded by four baffles, among which Figure 2 As shown, evaporation baffles 102 are used on the left and right sides, and the upper and lower baffles use the horizontal baffles 102b of the prior art without any improvement; it was found during work that due to the large width of the evaporation baffle 102, after the coating is completed, the plated metal layer will leave a blank near the edge of the film, which is an important reason for the warping of the film edge; if the contact area between the baffle and the film is reduced, the metal vapor overflow will exceed the standard, causing the material to diffuse to the drum not covered by the film, and the material will be deposited on the drum, affecting the cooling effect of the drum.

[0050] like Figure 2 As described above, the present invention will Figure 1 The two left and right opposing baffles are replaced with evaporation baffles 102, which intercept steam in some areas and do not intercept steam in other areas, so that a small amount of metal vapor is plated on the edge of the film.

[0051] In order to ensure that the metal vapor is as small as possible near the edge of the film, the shielding area A is arranged along the horizontal array of the evaporation port, and a gap is left between two adjacent shielding areas A to form the above-mentioned hollow part; at the same time, the width of the gap between two adjacent shielding areas A gradually decreases toward the direction of the main body 102a. The advantage of this design is that the amount of metal hot gas diffusing toward the edge of the thin film base film 201 gradually decreases.

[0052] Example 2

[0053] This is the second embodiment of the present invention, and this embodiment further optimizes the structure of the first embodiment.

[0054] like Figures 1 to 10 As shown, in this embodiment 2, the minimum gap width between two adjacent shielding areas A is 0, that is, the edge point of two adjacent shielding areas A is P, and the point P of the shielding areas A intersects; in addition, the maximum gap width between two adjacent shielding areas A is located at the outer edge of the shielding area A, that is, the distance between the outer edge points Q of the two shielding areas A; the intersection points P and the outer edge points Q between the shielding areas A of multiple arrays are connected one by one with line segments, the line connecting point P is parallel to the line connecting point Q, and the farthest distance of point P is the length of the dotted frame 104, the width between the two straight lines is the width of the dotted frame 104, and the enclosed area is counted as S.

[0055] The area of ​​the shielding region is the sum of the areas of shielding regions A of multiple arrays, calculated as S1.

[0056] It should be noted that, in the experiment, it was found that the combination of shielding areas A with different structures would cause the film to have a concave-convex surface, and the improvement effect was not very obvious. Therefore, this embodiment only compares shielding areas A with the same structure; therefore, in this embodiment, the points P between the shielding areas A of multiple arrays are located on the same straight line, and the outer edge points Q are also located on the same straight line;

[0057] The ratio of S1 / S can be adjusted by using different sizes of the shielding area A. In this embodiment, the dashed frame 104 adopts that the line connecting the two farthest points P is the length of the dashed frame 104, and the perpendicular line connecting the point Q to the point P is the width of the dashed frame 104, which is also the perpendicular line connecting the outer edge point Q to the point P of the shielding area A, that is, the height H of the shielding area A; it should be noted here that all the lines connecting the points P are straight lines and all intersect with the main body 102a. Figure 5-8 As shown, by adjusting the shape of the shielding area A, the total area S of the shielding area A in the dotted frame 104 is adjusted, thereby adjusting the ratio S / S1; for example: Figure 5 , in the array triangle occlusion area A within the dashed box 104, the ratio of S1 / S can be determined to be 1:2; Figure 7 , in the array fan-shaped shielding area A within the dotted frame 104, the ratio of S1 / S can be greater than 1:2; Figure 8In the array tip cone shielding area A within the dotted frame 104 , the ratio of S1 / S can be less than 1:2.

[0058] Explanation of relevant names in the experiment of the present invention:

[0059] Edge warping height: the height difference between the edge of the processed film base film 201 and the plane of the film base film 201; specifically, the film after coating is cut, the edges on both sides of the film are retained, and the film is cut into samples with a length of 1m, the same processed film is taken into three samples, three points are taken from the left and right edges of the film, that is, six points are taken from one sample, and the distances from the lower surface of the film base film 201 to the six warping points are measured with a ruler, and then the average value is taken;

[0060] Membrane surface utilization rate: the ratio of the available surface area of ​​the processed film base film 201 to the surface area of ​​the film base film 201; the film surface utilization rate is measured and calculated using the area method. Specifically, the unusable film base film 201 is cut off, and the length and width of the available film base film 201 after cutting are measured with a tape measure, and the surface area of ​​the available film base film 201 is calculated. The ratio of the surface area of ​​the available film base film 201 to the surface area of ​​the initial film base film 201 is the membrane surface utilization rate.

[0061] It should be noted that the shielding area A adopts a symmetrical structure, and the shielding area A is divided into a left side A1 and a right side A2.

[0062] Sawtooth baffle: Figure 5 As shown, the sawtooth baffle is formed by a linear array of multiple triangular shielding areas A, wherein the left side surface A1 and the right side surface A2 of the triangular shielding area A are both straight surfaces, and the triangle of this scheme is an equilateral triangle;

[0063] Wave-shaped baffle: Figure 6 As shown, the wavy baffle is formed by a linear array of multiple raised shielding areas A, wherein the left side surface A1 is a curved surface with half concave and the other half convex, and the right side surface A2 is the same;

[0064] Fan-shaped plate: Figure 7 As shown, the fan-shaped baffle is composed of a plurality of fan-shaped shielding areas A in a linear array, wherein the left side surface A1 and the right side surface A2 are both convex arc-shaped curved surfaces;

[0065] Conical baffle: Figure 8 As shown, the pointed cone baffle is composed of a linear array of blocking areas A whose left side surface A1 and right side surface A2 are both concave arc-shaped surfaces.

[0066] Take a thin film base film 201, place it under the coating cooling drum 103 of the coating equipment, take one of the above-mentioned evaporation baffle types, and Figure 2The position shown is fixed below the coating cooling drum, the distance between the evaporation baffle and the surface of the coating cooling drum 103 is 0.8 cm, the coating equipment is turned on, and the transportation rate of the thin film base film 201 is kept unchanged, that is, the speed of the thin film base film 201 is set to 100 m / min, and the wire feeding speed of the evaporation boat is set to 350 mm / min. After the coating is completed, the film surface utilization rate and edge warping are measured, and then a new thin film base film 201 is taken, and another evaporation baffle is selected to repeat the above process. The experimental data are recorded as follows.

[0067] Experiment 1:

[0068] Experiment 1 Prerequisite: The straight line connecting the P points of the occlusion area A is parallel to the straight line connecting the Q points of the occlusion area A, and the distance between the two straight lines in this experiment is the same as the width of the baffle in the prior art; at the same time, the number of occlusion areas A of different shapes is the same.

[0069] Table 1. Membrane surface utilization of evaporation baffles of different shapes at different ratios

[0070]

[0071] It is not difficult to see from Table 1 that for different types of baffles, when the ratio of the total area of ​​the shielding area A to the area of ​​the dotted frame 104 reaches 1:2, the sawtooth baffle has the best effect, that is, the baffle formed by an array of multiple triangular shielding areas A has the best effect.

[0072] As the utilization rate of the film surface continues to increase, the waste cut by the cutting process after coating is also reduced. This solution not only greatly improves the utilization rate of the thin film base film 201, but also improves the product utilization rate and saves costs. According to theory, the metal coating will increase the temperature. If the temperature difference between the thin film base film 201 without metal coating and the metal coating is too large, warping will occur. Therefore, the existing technology will cause the edge of the thin film base film 201 to warp; considering that the amount of metal vapor between the two shielding areas A will become less and less near the edge of the film, combined with the diffusion mechanism of the metal vapor itself, it will also affect the warping height of the edge of the film, so adjusting the relevant parameters of the shielding area A will theoretically also affect the utilization rate of the film.

[0073] Experiment 2:

[0074] In this experiment, a sawtooth baffle is selected, that is, the same triangular shielding area A is arranged in a linear array, a sawtooth baffle is selected, and the ratio of the total area of ​​the shielding area A to the area of ​​the dotted frame 104 is 1:2; the same thin film base film 201 is selected, and the angle α of the shielding area A is repeatedly tested according to the steps of Experiment 1, wherein, Figure 5 As shown, the angle α is one of the parameters of the shielding area A, that is, the angle between the left side A1 and the right side A2 of the shielding area A. The angle α is controlled by adjusting the height H of the shielding area A, that is, adjusting the width of the dotted frame 104.

[0075] Based on Experiment 1, the processed thin film base film 201 was cut horizontally, and the edge metal layer faded area was taken for observation under a microscope and photographed to calculate the angle β between the lower surface of the cross section and the inclined surface, as shown in FIG. Fig.10 As shown, it can be foreseen that as the angle β continues to increase, it means that the area where the color of the metal layer becomes lighter will become smaller and smaller, which also means that the temperature difference between the edge of the thin film base film 201 and the metal layer will gradually become smaller, and the processed metal layer of the thin film base film 201 will be more uniform and have a better anti-warping effect.

[0076] Table 2. The number of burrs under the evaporation baffle at different shielding area angles

[0077]

[0078] It can be seen from Table 2 that when the angle α of the shielding area A is 45°, the angle β of the metal coating can reach a peak value, that is, at this time, the temperature of the edge of the processed thin film base film 201 is basically close to the temperature of the metal coating, which increases the uniformity of the metal coating and further reduces the possibility of film warping; at the same time, it is found that when the angle α of the shielding area A is outside 30-60°, the metal vapor escape will exceed the standard, so the value out of the range will not be recorded.

[0079] Experiment 3

[0080] In order to further verify whether the height H of the shielding area A has an effect on the coating, a serrated baffle is selected, and the angle α of the shielding area A is selected to be 45 degrees. By controlling the change of the height H of the shielding area A, the hypothesis is verified.

[0081] Table 3. Effect of the height of the shielding area in the dotted box on the membrane surface utilization

[0082]

[0083] It is not difficult to see from Experiment 2 that with the change of angle α, angle β changes significantly; in Experiment 3, when angle α remains unchanged, changing the height H of shielding area A does not affect angle β. When the value of H is less than 1, metal vapor escape exceeds the standard. It can be concluded that angle α is one of the important factors affecting angle β. It is also found in the experiment that with the adjustment of the size of shielding area A, when the height of shielding area A is between 1 and 5 cm, there will be no problem of metal vapor escape, and the membrane surface utilization rate can be guaranteed to reach 100%.

[0084] In summary, in the dotted frame 104, the total area S1 of the shielding area A: the area S of the dotted frame 104 is 1:2, the shielding area A is an isosceles triangle, and its angle α is 45 degrees. At the same time, the width of the dotted frame 104 is controlled between 1 and 5 cm. Under this working condition, the equipment can not only improve the utilization rate of the film surface, but also reduce the processing steps of the thin film base film 201, thereby greatly reducing the processing cost; at the same time, when the film surface utilization rate reaches 100%, the cutting process in the thin film process can be ignored, which not only reduces the cost but also simplifies the process steps.

[0085] Example 3

[0086] Reference Figures 1 to 10 , which is the fourth embodiment of the present invention, in order to further improve and optimize the stability of the overall equipment coating, the overall equipment transportation steps and parameters are set.

[0087] Select a suitable film base film 201, and place the film base film 201 on a coating cooling drum in a coating device;

[0088] The relative position of the thin film base film 201 and the evaporation baffle 102 is adjusted so that the orthographic projection of the thin film base film 201 on the evaporation baffle 102 and the shielding area A at least partially overlap.

[0089] Controlling the transport rate of the thin film base film 201 and performing coating on the surface of the thin film base film 201;

[0090] The coated thin film base film 201 is rolled up.

[0091] The orthographic projection of the thin film base film 201 on the evaporation baffle 102 completely overlaps with the shielding area A, and the orthographic projection of the thin film base film 201 on the evaporation baffle 102 does not overlap with the main body 102 a .

[0092] The orthographic projection of the thin film base film 201 on the evaporation baffle 102 completely overlaps with the shielding area A, and the orthographic projection of the thin film base film 201 on the evaporation baffle 102 partially overlaps with the main body 102a. The overlapping width of the orthographic projection of the thin film base film 201 on the evaporation baffle 102 and the main body 102a is m≤8mm.

[0093] It should be noted that due to the design of the hollow part, there is still a certain risk that the metal vapor will overflow to the edge of the film and multiply on the coating cooling drum. Therefore, the edge of the film base film 201 can be partially completely blocked by the main body of the evaporation baffle. This part of the film is used to block the overflowing metal vapor, but the blocking width should not exceed 8mm, otherwise the film may also have warping problems caused by blank areas.

[0094] The operation is as follows:

[0095] 1. Substrate selection and preparation

[0096] First, a suitable thin film base film 201 is selected, which depends on the required coating material and the application of the final product. The quality and characteristics of the thin film base film 201 will directly affect the quality and performance of the coating.

[0097] 2. Substrate placement

[0098] The selected thin film base film 201 is placed flatly on the coating cooling drum in the coating equipment. This step is very important because the flatness of the substrate will affect the uniformity and quality of the coating.

[0099] 3. Adjust the relative position of the evaporation baffle and the base film

[0100] The relative positions of the evaporation baffle 102 and the thin film base film 201 are adjusted to ensure that the orthographic projection of the base film on the evaporation baffle at least partially overlaps with the shielding area A. This adjustment is to ensure that the desired coating pattern or area is formed on the base film.

[0101] 4. Control the transport rate

[0102] During the coating process, it is very important to control the transport rate of the thin film base film 201. The transport rate should match the deposition rate of the evaporated material to ensure the continuity and uniformity of the coating process.

[0103] 5. Coating operation

[0104] After adjusting the relative position and the transport rate, coating begins on the surface of the thin film base film 201. This step usually involves evaporating the material and depositing it on the base film to form the desired thin film layer.

[0105] 6. Rolling completed

[0106] After coating is completed, the thin film base film 201 coated with the material is rolled up for subsequent inspection, packaging and use.

[0107] The coating method achieves precise coating on the surface of the thin film base film 201 by precisely controlling the relative position of the base film and the evaporation baffle, and adjusting the transport rate.

[0108] Importantly, it should be noted that the construction and arrangement of the present application shown in a plurality of different exemplary embodiments are only exemplary. Although only a few embodiments are described in detail in this disclosure, it should be readily understood by those who refer to this disclosure that many modifications are possible (e.g., the size, scale, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, directional changes, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in the application. For example, the element shown as integrally formed can be composed of multiple parts or elements, the position of the element can be inverted or otherwise changed, and the nature or number or position of the discrete element can be changed or changed. Therefore, all such modifications are intended to be included in the scope of the present invention. The order or sequence of any process or method steps can be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and is not only structurally equivalent but also equivalent structure. Without departing from the scope of the present invention, other replacements, modifications, changes and omissions can be made in the design, operating conditions and arrangement of the exemplary embodiments. Therefore, the invention is not limited to a specific embodiment, but extends to numerous modifications still falling within the scope of the appended claims.

[0109] Additionally, in order to provide a concise description of exemplary embodiments, all features of an actual embodiment (ie, those features that are not relevant to the best mode presently contemplated for carrying out the invention or those that are not relevant to implementing the invention) may not be described.

[0110] It will be appreciated that in the development of any actual implementation, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will be a routine task of design, fabrication, and production for those of ordinary skill having the benefit of this disclosure without undue experimentation.

[0111] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A coating device, characterized in that: include, The device body (100) includes an evaporation source (101), an evaporation baffle (102) and a coating cooling drum (103); The evaporation baffle (102) comprises a main body (102a) and a shielding area (A), wherein the shielding area (A) is arranged at the edge of the main body (102a), and a hollow portion is provided between the shielding areas (A).

2. The coating device according to claim 1, characterized in that: The gap between the two shielding areas (A) gradually becomes smaller along the direction of the main body (102a) of the evaporation baffle (102).

3. The coating device according to claim 2, characterized in that: The shielding area (A) array is arranged in any one or more combinations of wave-shaped, sawtooth-shaped and other structures.

4. The coating device according to claim 3, characterized in that: The intersection point between the shielding areas (A) is P; the maximum gap point between two adjacent shielding areas (A) is Q; The areas enclosed by connecting the intersection points P and outer edge points Q of the occlusion areas A of multiple arrays with line segments one by one are counted as S, and the sum of the areas of the occlusion areas A of multiple arrays is counted as S1. S and S1 satisfy the following relationship: S1 / S=1:1.5~1:

4.

5. The coating device according to any one of claims 1 to 3, characterized in that: The shielding area (A) is an isosceles triangle, and the inner angle of the shielding area (A) is 30 to 60 degrees, and the height of the isosceles triangle (A) is 1 to 5 cm.

6. The coating device according to claim 5, characterized in that: Said S1 / S=1:2; The inner angle of the shielding area (A) is 45°.

7. The coating device according to claim 6, characterized in that: The shielding area (A) of the evaporation baffle (102) is arranged to be movable relative to the coating cooling drum during the coating process; It comprises an inductive transmission device, which is used to identify the change of the area of ​​the shielding area (A) blocking the film during the coating process and drive the shielding area (A) to move.

8. A coating method, characterized in that: A coating assembly comprising any one of claims 1 to 6; and Selecting a suitable film base film (201), and placing the film base film (201) on a film coating cooling drum in a film coating device; The relative position of the thin film base film (201) and the evaporation baffle (102) is adjusted so that the orthographic projection of the thin film base film (201) on the evaporation baffle (102) at least partially overlaps with the shielding area (A). Controlling the transport rate of the thin film base film (201) and performing coating on the surface of the thin film base film (201); The coated thin film base film (201) is rolled up.

9. The coating method according to claim 7, wherein: The orthographic projection of the thin film base film (201) on the evaporation baffle (102) completely overlaps with the shielding area (A), and the orthographic projection of the thin film base film (201) on the evaporation baffle (102) does not overlap with the main body (102a).

10. The coating method according to claim 7, characterized in that: The orthographic projection of the thin film base film (201) on the evaporation baffle (102) completely overlaps with the shielding area (A), the orthographic projection of the thin film base film (201) on the evaporation baffle (102) partially overlaps with the main body (102a), and the overlapping width of the orthographic projection of the thin film base film (201) on the evaporation baffle (102) and the main body (102a) is m≤8mm.

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