Turbo molecular pump and molecular pump using method based on damping mechanism

Abstract

The invention relates to the technical field of turbo molecular pumps, in particular to a turbo molecular pump and a molecular pump using method based on a damping mechanism, the turbo molecular pump comprises a damping protection device installed on the outer side of the turbo molecular pump, and the damping protection device comprises an encircling damping device and a damping placement seat; the damping placement seat is horizontally mounted on the workbench, and a top buffer supporting end of the damping placement seat is in contact with the bottom of the turbo molecular pump; the encircling damping device comprises a contraction adjusting device, a buffer detection strip and a height adjusting mechanism; the height adjusting mechanism is fixedly mounted on the damping placement seat, and the movable end of the height adjusting mechanism can be adjusted to move in a lifting manner; the contraction adjusting device is installed at the movable end of the height adjusting mechanism, and the contraction end of the contraction adjusting device is provided with a transmission contraction strip. The buffer detection strip is installed on a transmission contraction strip of the contraction adjusting device, the buffer detection strip is tightly attached to the inner wall of the transmission contraction strip, the operation stability is effectively ensured, meanwhile, timely maintenance is facilitated, and the service life is prolonged.

Description

Technical Field

[0001] The present invention relates to the technical field of turbomolecular pumps, and in particular to a turbomolecular pump and a method for using the turbomolecular pump based on a shock absorbing mechanism. Background Art

[0002] In recent years, the molecular pump industry has developed rapidly, and dynamic balancing is a very important link in the production process of molecular pumps. The imbalance of rotating machinery is one of the common causes of vibration. In high-speed rotating machinery, imbalance is a very serious problem, and it is also the technical key to solving many high-speed mechanical vibration problems. The purpose of dynamic balancing is to ensure that the dynamic pressure on the bearing and the deformation of the rotor itself are within the allowable range during the startup and operation of the turbine rotor. During the dynamic balancing process, the turbine may sometimes become unstable, causing the pump body to tip over, the pump casing and the turbine to fly out, causing irreversible effects on the molecular pump. At the same time, if the turbine flies out, it may also cause certain harm to the operator.

[0003] Chinese patent CN220268027U discloses a protective device for a turbomolecular pump, including multiple limiting mechanisms, which are evenly distributed on the outside of the turbomolecular pump; the limiting mechanism includes an L-shaped frame, and the L-shaped frame is bolted to the support platform of the turbomolecular pump, one side of the L-shaped frame is connected to an arc frame, the outside of the L-shaped frame is connected to a connecting strip, and one side of the connecting strip is connected to a rubber strip. The device uses a rubber strip that has a certain deformation ability, and at the same time uses the meshing limit of the threaded sleeve and the threaded rod to allow the rubber strip to be auxiliary fixed on the outside of the molecular pump. Compared with the prior art, the device can assist in limiting the outside of the molecular pump, and at the same time can avoid damage to the molecular pump itself, and when the rubber strip is too loose, the threaded sleeve can continue to rotate so that the rubber strip continues to be in a horizontal state.

[0004] Although the existing technology can limit and fix the turbomolecular pump, due to the high rotation speed of the turbomolecular pump, improper support conditions of the pump body may cause the pump body to resonate during operation, and the resonance will cause the support mechanism to produce abnormal noise. At the same time, the existing protective device cannot effectively monitor the operating status of the turbomolecular pump in real time, resulting in the inability to timely and effectively maintain the turbomolecular pump, affecting the service life of the equipment. Summary of the invention

[0005] In view of the above problems, a turbomolecular pump and a method for using the turbomolecular pump based on a shock absorbing mechanism are provided. The shock absorbing protection device can effectively ensure the stability of the operation of the turbomolecular pump, and at the same time facilitate timely maintenance to increase the service life.

[0006] In order to solve the problems of the prior art, the present invention provides a turbomolecular pump, comprising a shock-absorbing protection device installed on the outside of the turbomolecular pump, the shock-absorbing protection device comprising an embracing shock-absorbing device and a shock-absorbing placement seat; the shock-absorbing placement seat is horizontally installed on a workbench, and the top buffer support end of the shock-absorbing placement seat is in contact with the bottom of the turbomolecular pump; the embracing shock-absorbing device comprises a contraction adjustment device, a buffer detection strip and a height adjustment mechanism; the height adjustment mechanism is fixedly installed on the shock-absorbing placement seat, and the movable end of the height adjustment mechanism can be adjusted and moved up and down; the contraction adjustment device is installed on the movable end of the height adjustment mechanism, and the contraction end of the contraction adjustment device is installed with a transmission contraction strip; the buffer detection strip is installed on the transmission contraction strip of the contraction adjustment device, and the buffer detection strip is tightly fitted with the inner wall of the transmission contraction strip.

[0007] Preferably, the contraction adjustment device includes an adjustment mounting plate installed on the movable end of the height adjustment mechanism, a mounting opening is provided at the axial position of the adjustment mounting plate, a plurality of limit telescopic guide rods are installed on the adjustment mounting plate and are evenly distributed around the axial center of the adjustment mounting plate, a mounting block is provided at the extending end of the limit telescopic guide rod, a first limit clamping shaft is symmetrically provided on the upper and lower sides of the mounting block, a first return spring is installed between the limit telescopic guide rod and the adjustment mounting plate, the contraction adjustment device is also equipped with a fitting contraction device for driving the transmission contraction bar to move, guide grooves are provided on the upper and lower sides of the transmission contraction bar, and the outer side of the transmission contraction bar is covered with anti-slip teeth.

[0008] Preferably, the fitting and shrinking device includes a guiding fitting mechanism installed on an adjusting mounting disk, wherein the working end of the guiding fitting mechanism is movably adjusted toward the axial position of the adjusting mounting disk, and a stabilizing conveying device is installed beside the guiding fitting mechanism, wherein the working end of the stabilizing conveying device contacts the anti-slip teeth of the transmission shrinking strip.

[0009] Preferably, the guiding and fitting mechanism includes a bending guide rail rotatably mounted on the adjusting mounting plate, second limit clamping shafts are symmetrically installed on the upper and lower sides of the bending guide rail, and a plurality of guide rollers are provided inside the bending guide rail. The guiding and fitting mechanism also includes a rotating mounting seat installed beside the bending guide rail, a reset rod is slidably mounted on the rotating mounting seat, an extending end of the reset rod is rotatably connected to the bending guide rail, and a second reset spring is installed between the reset rod and the rotating mounting seat.

[0010] Preferably, the stable conveying device includes a limiting guide rail installed on the adjusting mounting disk, and a third limiting clamping shaft is symmetrically provided on the upper and lower sides of the limiting guide rail. A pressure stabilizing transmission gear is installed on the limiting guide rail, and the pressure stabilizing transmission gear conflicts with the anti-slip teeth of the transmission contraction strip. The stable conveying device also includes a rotation driving device for driving the pressure stabilizing transmission gear to rotate, and the rotation driving device includes a transmission shaft, a conduction slide groove is provided on the transmission shaft, a rotation locking disk is installed on the transmission shaft, a fixed limiting disk is installed below the rotation locking disk, the fixed limiting disk is fixedly connected to the adjusting mounting disk, and the rotation locking disk and the fixed limiting disk are both provided with through holes. The rotation driving device also includes a rotation driver that drives the transmission shaft to rotate.

[0011] Preferably, a transmission slip ring is installed inside the pressure-stabilizing transmission gear, and the transmission slip ring is slidably connected to the transmission shaft. A plurality of limit mounting grooves are provided inside the pressure-stabilizing transmission gear, and pressure springs are installed inside the limit mounting grooves. One end of the pressure spring is in contact with the limit mounting groove, and the end of the pressure spring away from the limit mounting groove is in contact with the transmission slip ring.

[0012] Preferably, the buffer detection strip includes a strip-shaped pressure airbag installed on the transmission contraction strip, and the buffer detection strip also includes an air pressure detection device installed on the side of the contraction adjustment device, and the air pressure detection device is connected to the strip-shaped pressure airbag.

[0013] Preferably, the height adjustment mechanism includes a fixed mounting frame installed on the shock-absorbing placement seat, an adjusting gear rod is installed on the fixed mounting frame, a limited movable component is installed on the adjusting gear rod, the limited movable component includes a limit clamping sleeve mounted on the adjusting gear rod, a plurality of movable clamping teeth are arranged inside the limit clamping sleeve, a push-to-unlock sleeve is installed inside the limit clamping sleeve, and a third reset spring is installed between the push-to-unlocking sleeve and the limit clamping sleeve.

[0014] Preferably, a buffer support plate is horizontally arranged directly above the shock-absorbing placement seat, and a plurality of buffer support blocks and a limiting suction cup are installed on the buffer support plate. A limiting guide rod is installed at the axial position of the shock-absorbing placement seat, and a first ball head is provided on the top of the limiting guide rod, which is hinged to the bottom of the buffer support plate. A plurality of buffer guide sleeves are also installed on the shock-absorbing placement seat, and the buffer guide sleeves are evenly arranged with the limiting guide rod as the axis, and buffer guide rods are installed inside the buffer guide sleeves, a second ball head is provided on the top of the buffer guide rod, and the second ball head is hinged to the bottom of the buffer support plate, and a buffer spring is installed between the buffer guide sleeve and the buffer guide rod.

[0015] A method for using a molecular pump based on a shock absorbing mechanism comprises the following steps;

[0016] S1. Gently place the turbomolecular pump on top of the shock-absorbing mount, making sure the pump body and the shock-absorbing mount are coaxially aligned.

[0017] S2. According to the size and installation requirements of the turbomolecular pump, adjust the contraction adjustment device to a suitable fixed position through the height adjustment mechanism to ensure that the contraction adjustment device can smoothly drive the transmission contraction bar to contract.

[0018] S3. Start the contraction adjustment device to drive the transmission contraction bar to contract. The contraction of the transmission contraction bar will drive the buffer detection bar to cling to the outer wall of the turbomolecular pump to form an embracing shock-absorbing structure.

[0019] S4. During the operation of the turbomolecular pump, use the monitoring function of the buffer detection strip to monitor the vibration in real time. If the vibration changes abnormally, such as increased amplitude or abnormal frequency, stop the pump immediately and perform troubleshooting or maintenance.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] 1. This device provides stable and effective shock-absorbing support for the turbomolecular pump through the dual shock-absorbing design of the shock-absorbing seat and the surrounding shock-absorbing device. The buffer support end of the shock-absorbing seat can directly absorb the vibration force of the pump body during operation, while the surrounding shock-absorbing device can achieve a tight embrace around the pump body through the cooperation of the height adjustment mechanism and the contraction adjustment device, further reducing the possibility of the pump body shaking around. This design not only significantly reduces the occurrence of resonance, but also ensures the stability of the pump body under high-speed operation and extends the service life of the equipment.

[0022] 2. The height adjustment mechanism and contraction adjustment device in this device enable this device to flexibly adapt to turbomolecular pumps of different sizes and installation requirements. The height adjustment mechanism allows the user to make fine adjustments according to the actual height of the pump body to ensure close contact between the pump body and the shock absorbing device. The contraction adjustment device can be contracted and adjusted according to the outer diameter of the pump body, achieving uniformity and effectiveness of the surrounding shock absorption. This design enhances the adaptability of this device, allowing it to be widely used in turbomolecular pumps of different models.

[0023] 3. The buffer detection strip in this device is an important part of this device. It not only has a shock-absorbing function, but also can monitor the vibration of the turbomolecular pump in real time. When the pump body vibrates abnormally, the buffer detection strip can quickly sense and feedback relevant information, so that the staff can find and deal with potential faults in time. This real-time monitoring function greatly improves the convenience and efficiency of maintenance, ensures the normal operation of the pump body and prolongs its service life. At the same time, it also provides strong support for the preventive maintenance of the equipment and reduces the losses caused by downtime due to failures. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a front view of a turbomolecular pump.

[0025] Figure 2 yes Figure 1 Cross-sectional view at section AA.

[0026] Figure 3 yes Figure 2 A partial enlarged view of point B in the middle.

[0027] Figure 4 A three-dimensional diagram of a turbomolecular pump Figure 1 .

[0028] Figure 5 A three-dimensional diagram of a turbomolecular pump Figure 2 .

[0029] Figure 6 A three-dimensional diagram of a turbomolecular pump Figure 3 .

[0030] Figure 7 yes Figure 6 A partial enlarged view of point C in the middle.

[0031] Figure 8 yes Figure 6 A partial enlarged view of point D in the middle.

[0032] Fig. 9 It is an exploded view of the pressure stabilizing drive gear in a turbomolecular pump.

[0033] Fig.10 The utility model is a three-dimensional schematic diagram of a vibration-absorbing placement seat in a turbomolecular pump.

[0034] The numbers in the figure are:

[0035] 1. Turbomolecular pump; 2. Contraction adjustment device; 21. Adjustment mounting plate; 22. Position-limiting telescopic guide rod; 221. Mounting block; 23. First return spring; 24. Fitting contraction device; 241. Guide fitting mechanism; 2411. Bending guide rail; 2412. Guide roller; 2413. Rotating mounting seat; 2414. Return rod; 2415. Second return spring; 242. Stable conveying device; 243. Position-limiting guide rail; 244. Pressure-stabilizing transmission gear; 2441. Position-limiting mounting groove; 2442. Transmission slip ring; 2443. Pressure spring; 245. Transmission shaft; 246. Rotating locking plate; 247 , fixed limit plate; 248, rotary drive; 3, transmission retraction strip; 31, guide slot; 32, anti-skid teeth; 4, buffer detection strip; 41, strip pressure airbag; 42, air pressure detection device; 5, height adjustment mechanism; 51, fixed mounting frame; 52, adjustment gear rod; 53, limit movable component; 531, limit clamping sleeve; 5311, movable clamping teeth; 532, push unlocking sleeve; 533, third reset spring; 6, shock-absorbing placement seat; 61, buffer support plate; 62, buffer support block; 63, limit suction cup; 64, limit guide rod; 65, buffer guide rod; 66, buffer guide sleeve; 67, buffer spring. DETAILED DESCRIPTION

[0036] In order to further understand the features, technical means, specific objectives and functions of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0037] See also Figures 1 to 10 As shown, a turbomolecular pump comprises a shock-absorbing protection device installed on the outside of the turbomolecular pump 1, the shock-absorbing protection device comprises an embracing shock-absorbing device and a shock-absorbing placement seat 6; the shock-absorbing placement seat 6 is horizontally installed on the workbench, and the top buffer support end of the shock-absorbing placement seat 6 is in contact with the bottom of the turbomolecular pump 1; the embracing shock-absorbing device comprises a contraction adjustment device 2, a buffer detection strip 4 and a height adjustment mechanism 5; the height adjustment mechanism 5 is fixedly installed on the shock-absorbing placement seat 6, and the movable end of the height adjustment mechanism 5 can be raised and lowered for adjustment and movement; the contraction adjustment device 2 is installed on the movable end of the height adjustment mechanism 5, and the contraction end of the contraction adjustment device 2 is installed with a transmission contraction strip 3; the buffer detection strip 4 is installed on the transmission contraction strip 3 of the contraction adjustment device 2, and the buffer detection strip 4 is tightly fitted with the inner wall of the transmission contraction strip 3.

[0038] The shock-absorbing placement seat 6 serves as the basic support of the turbomolecular pump 1, and the shock-absorbing placement seat 6 is horizontally installed on the workbench. The shock-absorbing placement seat 6 has a buffer support end, which is in direct contact with the bottom of the turbomolecular pump 1, and the buffer support end is used to absorb and disperse the vibration force generated when the turbomolecular pump 1 is in operation. The contraction adjustment device 2 is installed on the movable end of the height adjustment mechanism 5, and can be adjusted up and down according to the size and installation requirements of the turbomolecular pump 1. The contraction end of the turbomolecular pump 1 is equipped with a transmission contraction strip 3, which is arranged in an annular shape and is coaxial with the placement area of ​​the shock-absorbing placement seat 6 to ensure the uniformity and effectiveness of the surrounding shock absorption. The transmission contraction strip 3 is used as a connecting piece connecting the contraction adjustment device 2 and the buffer detection strip 4. The transmission contraction strip 3 is contracted and moved under the drive of the contraction adjustment device 2 to achieve a tight embrace of the outer side of the turbomolecular pump 1. The buffer detection strip 4 is tightly fitted on the inner wall of the transmission contraction strip 3, and is tightly attached to the outer wall of the turbomolecular pump 1 as the transmission contraction strip 3 contracts. The buffer detection strip 4 not only has a shock-absorbing function, but also can monitor the vibration of the turbomolecular pump 1 in real time.

[0039] Install the shock-absorbing seat 6 horizontally on the workbench to ensure stability. Place the turbomolecular pump 1 on top of the shock-absorbing seat 6, and try to keep the coaxial lines aligned. Adjust the contraction adjustment device 2 to a suitable fixed position through the height adjustment mechanism 5. Start the contraction adjustment device 2 to shrink the transmission contraction bar 3, thereby driving the buffer detection bar 4 to cling to the outer wall of the turbomolecular pump 1. The shock-absorbing seat 6 effectively absorbs the vibration force at the bottom of the turbomolecular pump 1 through the buffer support end. At the same time, the embracing buffer detection bar 4 can significantly reduce the vibration force of the pump body shaking around, ensuring the stability of the pump body operation.

[0040] The buffer detection strip 4 can monitor the vibration in real time while being in close contact with the outer wall of the turbomolecular pump 1. If the vibration changes abnormally, such as increased amplitude or abnormal frequency, it indicates that the turbomolecular pump 1 may be faulty or require maintenance. At this time, the staff can intervene in time according to the monitoring results to ensure the normal operation of the pump body and extend its service life.

[0041] This device effectively solves the resonance problem that may be caused by high speed and improper support conditions of the turbomolecular pump 1, reduces abnormal noise of the equipment, and improves the stability of operation. At the same time, through the real-time monitoring function of the buffer detection strip 4, timely monitoring and maintenance of the operating status of the turbomolecular pump 1 are achieved, improving the convenience and efficiency of maintenance.

[0042] See also Figures 1 to 5As shown, the contraction adjustment device 2 includes an adjustment mounting disk 21 installed on the movable end of the height adjustment mechanism 5, and a mounting opening is provided at the axial position of the adjustment mounting disk 21. A plurality of limit telescopic guide rods 22 are installed on the adjustment mounting disk 21 and are evenly distributed with the axial center of the adjustment mounting disk 21. An installation block 221 is provided at the extending end of the limit telescopic guide rod 22, and a first limit clamping shaft is symmetrically provided on the upper and lower sides of the installation block 221. A first return spring 23 is installed between the limit telescopic guide rod 22 and the adjustment mounting disk 21. The contraction adjustment device 2 is also equipped with a fitting contraction device 24 for driving the transmission contraction bar 3 to move. The transmission contraction bar 3 is provided with guide grooves 31 on the upper and lower sides, and the outer side of the transmission contraction bar 3 is covered with anti-slip teeth 32.

[0043] A plurality of position-limiting telescopic guide rods 22 are evenly distributed on the adjustment mounting plate 21, with the axis of the adjustment mounting plate 21 as the center. The extending end of the position-limiting telescopic guide rod 22 is provided with a mounting block 221, and the upper and lower sides of the mounting block 221 are symmetrically provided with a first position-limiting clamping shaft for guiding the movement of the transmission contraction strip 3. The first return spring 23 is installed between the position-limiting telescopic guide rod 22 and the adjustment mounting plate 21, and is used to ensure that the position-limiting telescopic guide rod 22 maintains an expanded state at the beginning, so that the transmission contraction strip 3 is arranged in a ring shape. The fitting contraction device 24 is used to drive the transmission contraction strip 3 to contract and move, so as to achieve a tight embrace of the outer side of the turbomolecular pump 1.

[0044] The guide slot 31 of the transmission contraction strip 3 matches the first limit clamping shaft to ensure that the transmission contraction strip 3 can be contracted smoothly and evenly. The outer side of the transmission contraction strip 3 is covered with anti-slip teeth 32 to increase the friction with the fitting contraction device 24 and improve the stability of the embrace.

[0045] Install the shock-absorbing placement seat 6 horizontally on the workbench to ensure stability. Place the turbomolecular pump 1 on the top of the shock-absorbing placement seat 6, and try to keep the coaxial lines aligned. Adjust the contraction adjustment device 2 to a suitable fixed position through the height adjustment mechanism 5. In the initial state, due to the action of the first reset spring 23, the limit telescopic guide rod 22 remains in an expanded state, so that the transmission contraction strip 3 is set in a ring shape. Start the fitting contraction device 24 to drive the transmission contraction strip 3 to contract and move. During the movement of the transmission contraction strip 3, the guide slot 31 cooperates with the first limit clamping shaft to maintain a stable and uniform contraction. At the same time, the limit telescopic guide rod 22 follows the transmission contraction strip 3 to perform synchronous contraction and movement to ensure the tightness and uniformity of the embrace. The transmission contraction strip 3 also drives the buffer detection strip 4 to be close to the outer wall of the turbomolecular pump 1, and the buffer detection strip 4 realizes shock absorption and real-time monitoring of the pump body. The contraction adjustment device 2 effectively drives the buffer detection strip 4 to be close to the outside of the turbomolecular pump 1 through the transmission contraction strip 3.

[0046] See also Figure 4 and Figure 5As shown, the laminating and shrinking device 24 includes a guiding laminating mechanism 241 installed on the adjusting mounting disk 21, and the working end of the guiding laminating mechanism 241 is movably adjusted toward the axial position of the adjusting mounting disk 21. A stabilizing conveying device 242 is installed on the side of the guiding laminating mechanism 241, and the working end of the stabilizing conveying device 242 is in contact with the anti-slip teeth 32 of the transmission shrinking strip 3.

[0047] The working end of the guiding fitting mechanism 241 is movably adjusted toward the axial position of the adjusting mounting plate 21. When the fitting and shrinking device 24 is started, the movable end of the guiding fitting mechanism 241 will automatically approach the turbomolecular pump 1, thereby guiding the transmission shrinking strip 3 to shrink and move. It is ensured that the transmission shrinking strip 3 can shrink smoothly and evenly, and drive the buffer detection strip 4 to fit closely with the outer wall of the turbomolecular pump 1.

[0048] The working end of the guiding laminating mechanism 241 contacts the anti-skid teeth 32 of the transmission shrinking strip 3, and is used to cooperate with the anti-skid teeth 32 of the transmission shrinking strip 3 to stabilize the conveying. During the process of the transmission shrinking strip 3 shrinking and moving, the stable conveying device 242 provides necessary support and guidance to ensure the laminating stability of the transmission shrinking strip 3 during the conveying process. The accuracy and stability of the conveying laminating of the transmission shrinking strip 3 are improved to prevent deviation or jamming during the shrinking process.

[0049] See also Figures 5 to 7 As shown, the guiding and fitting mechanism 241 includes a bending guide rail 2411 rotatably mounted on the adjusting mounting plate 21, and second limit clamping shafts are symmetrically installed on the upper and lower sides of the bending guide rail 2411. A plurality of guide rollers 2412 are provided inside the bending guide rail 2411. The guiding and fitting mechanism 241 also includes a rotating mounting seat 2413 installed beside the bending guide rail 2411, and a reset rod 2414 is slidably mounted on the rotating mounting seat 2413. The extending end of the reset rod 2414 is rotatably connected to the bending guide rail 2411, and a second reset spring 2415 is installed between the reset rod 2414 and the rotating mounting seat 2413.

[0050] The second limit clamping shaft is used to match the transmission retracting bar 3 and the guide clamping slot 31 to ensure stable guidance and limit of the transmission retracting bar 3. The guide roller 2412 is arranged inside the bending guide rail 2411, and is used to reduce friction when the transmission retracting bar 3 moves along the bending guide rail 2411, so as to improve the moving efficiency and stability. A reset rod 2414 is slidably mounted on the rotating mounting seat 2413, and the extended end of the reset rod 2414 is rotatably connected to the bending guide rail 2411, and a second reset spring 2415 is installed between the two. This structure is used to provide a reset force after the bending guide rail 2411 moves.

[0051] When the fitting and shrinking device 24 is not activated, the bending guide rail 2411 and the transmission shrinking strip 3 thereon are in the initial position, and the second reset spring 2415 is in an uncompressed state. When the fitting and shrinking device 24 is started, the stabilizing conveying device 242 starts to work, driving the transmission shrinking strip 3 to shrink and move. One end of the transmission shrinking strip 3 is fixedly connected to the bending guide rail 2411, so that the movable end of the bending guide rail 2411 is pulled toward the turbomolecular pump 1. The bending guide rail 2411 moves under the pull of the transmission shrinking strip 3, and the bending guide rail 2411 rotates along the adjustment mounting disk 21, while its movable end approaches the turbomolecular pump 1. In this process, the guide roller 2412 inside the bending guide rail 2411 effectively reduces the friction force when the transmission shrinking strip 3 moves, ensuring smooth movement. As the bending guide rail 2411 moves, the reset rod 2414 is pulled, and the second reset spring 2415 is gradually compressed.

[0052] When the stable conveying device 242 drives the transmission retracting strip 3 to reset, the second reset spring 2415 releases energy, driving the reset pull rod 2414 and the bending guide rail 2411 to reset to the initial position. Through the movement and reset of the bending guide rail 2411, the transmission retracting strip 3 can be stably and evenly retracted and reset, thereby driving the buffer detection strip 4 to fit closely with the outer wall of the turbomolecular pump 1 and quickly reset when needed.

[0053] See also Figures 5 to 8 As shown, the stable conveying device 242 includes a limiting guide rail 243 installed on the adjusting mounting disk 21, and the third limiting clamping shaft is symmetrically provided on the upper and lower sides of the limiting guide rail 243. A pressure stabilizing transmission gear 244 is installed on the limiting guide rail 243, and the pressure stabilizing transmission gear 244 conflicts with the anti-slip teeth 32 of the transmission contraction strip 3. The stable conveying device 242 also includes a rotation driving device for driving the pressure stabilizing transmission gear 244 to rotate, and the rotation driving device includes a transmission shaft 245, and the transmission shaft 245 is provided with a conduction slide groove, and a rotation locking disk 246 is installed on the transmission shaft 245. A fixed limiting disk 247 is installed below the rotation locking disk 246, and the fixed limiting disk 247 is fixedly connected to the adjusting mounting disk 21. The rotation locking disk 246 and the fixed limiting disk 247 are both provided with through holes, and the rotation driving device also includes a rotation driver 248 that drives the transmission shaft 245 to rotate.

[0054] The third limiting clamping shaft is symmetrically arranged on the upper and lower sides of the limiting guide rail 243, and the third limiting clamping shaft matches the guide clamping groove 31 of the transmission retracting strip 3, so as to improve the stability of the transmission retracting strip 3 during transportation. The limiting guide rail 243 is installed with a pressure stabilizing transmission gear 244, which is in direct contact with the anti-skid teeth 32 of the transmission retracting strip 3. When the transmission retracting strip 3 needs to be retracted and moved, the pressure stabilizing transmission gear 244 will rotate accordingly to provide driving force for the transmission retracting strip 3. The rotary drive device is a key part of the stable conveying device 242, which includes a transmission shaft 245, a transmission chute, a rotation locking disk 246, a fixed limiting disk 247 and a rotary driver 248. The transmission shaft 245 is provided with a transmission chute, which is used to cooperate with the pressure stabilizing transmission gear 244 to achieve stable transmission. The rotary driver 248 drives the transmission shaft 245 to rotate, thereby driving the pressure stabilizing transmission gear 244 to rotate. This rotation process ensures that the transmission retracting strip 3 can be retracted and moved according to a predetermined speed and path.

[0055] When the transmission retracting bar 3 is adjusted to the desired position, the staff needs to ensure that the transmission shaft 245 remains in the current position so that the transmission retracting bar 3 can be stably attached to the outer wall of the turbomolecular pump 1. To this end, the staff can lock the transmission shaft 245 in the specified position by sequentially passing the positioning pin through the insertion holes on the rotating locking plate 246 and the fixed limiting plate 247. This step ensures stability and reliability in subsequent work.

[0056] See also Figure 7 and Fig. 9 As shown, a transmission slip ring 2442 is installed inside the voltage-stabilizing transmission gear 244, and the transmission slip ring 2442 is slidably connected to the transmission shaft 245. A plurality of limit mounting grooves 2441 are provided inside the voltage-stabilizing transmission gear 244. A pressure spring 2443 is installed inside the limit mounting grooves 2441. One end of the pressure spring 2443 is in contact with the limit mounting groove 2441, and the end of the pressure spring 2443 away from the limit mounting groove 2441 is in contact with the transmission slip ring 2442.

[0057] The pressure stabilizing transmission gear 244 is in direct contact with the anti-skid teeth 32 of the transmission retracting strip 3. When the transmission retracting strip 3 needs to be retracted and moved, the pressure stabilizing transmission gear 244 can directly provide driving force for the transmission retracting strip 3. In order to achieve stable transmission, a transmission slip ring 2442 is also installed inside the pressure stabilizing transmission gear 244, and the transmission slip ring 2442 is slidably connected with the transmission shaft 245 through a conductive slide groove. When the transmission shaft 245 rotates under the drive of the rotary driver 248, the transmission shaft 245 drives the transmission slip ring 2442 to rotate together through the conductive slide groove. The rotation of the transmission slip ring 2442 pushes the pressure spring 2443 to be compressed in the limit installation groove 2441. One end of the pressure spring 2443 conflicts with the limit installation groove 2441, and the other end conflicts with the transmission slip ring 2442. As the transmission slip ring 2442 rotates, the compression force of the pressure spring 2443 gradually increases and pushes the pressure stabilizing transmission gear 2444 to rotate.

[0058] The rotation of the pressure stabilizing transmission gear 244 will drive the transmission retracting strip 3 to move synchronously. Due to the presence of the pressure spring 2443, even if the transmission shaft 245 stops rotating, the pressure of the pressure spring 2443 will continue to push the pressure stabilizing transmission gear 244 to press the transmission retracting strip 3, ensuring the stability of the transmission retracting strip 3 in the retracted state.

[0059] See also Figures 4 to 6 As shown, the buffer detection strip 4 includes a strip-shaped pressure airbag 41 installed on the transmission contraction strip 3, and the buffer detection strip 4 also includes an air pressure detection device 42 installed on the side of the contraction adjustment device 2, and the air pressure detection device 42 is connected to the strip-shaped pressure airbag 41.

[0060] The strip-shaped pressure-receiving airbag 41 is installed on the inner wall of the transmission contraction strip 3 and fits tightly with the transmission contraction strip 3. When the transmission contraction strip 3 contracts under the drive of the contraction adjustment device 2, the strip-shaped pressure-receiving airbag 41 will then be closely attached to the outer wall of the turbomolecular pump 1. The strip-shaped pressure-receiving airbag 41 has a certain elasticity and pressure bearing capacity, and can absorb and disperse the vibration force generated by the turbomolecular pump 1 when it is running. This embracing shock-absorbing method can significantly reduce the vibration force of the pump body shaking around, ensuring the stability of the pump body operation.

[0061] The air pressure detection device 42 is installed on the side of the contraction adjustment device 2 and is connected to the strip-shaped pressure airbag 41 through a pipeline or other connection methods. The air pressure detection device 42 can monitor the air pressure changes in the strip-shaped pressure airbag 41 in real time. When the turbomolecular pump 1 vibrates during operation, the strip-shaped pressure airbag 41 will be squeezed, causing the air pressure inside it to change. The air pressure detection device 42 can capture this change.

[0062] When the turbomolecular pump 1 starts to operate, the vibration force generated will be transmitted to the strip pressure airbag 41 through the turbomolecular pump 1. After the strip pressure airbag 41 is squeezed, the internal air pressure will change. It will be monitored in real time by the air pressure detection device 42. The air pressure detection device 42 outputs the monitored air pressure changes to the control system. The staff can judge the vibration condition of the turbomolecular pump 1 based on the signal output by the air pressure detection device 42. If the vibration is abnormal, such as increased amplitude or abnormal frequency, it indicates that the turbomolecular pump 1 may be faulty or require maintenance. According to the monitoring results, the staff can intervene in time and take necessary maintenance measures to ensure the normal operation of the pump body and extend its service life.

[0063] See also Figures 1 to 3 As shown, the height adjustment mechanism 5 includes a fixed mounting frame 51 installed on the shock-absorbing placement seat 6, an adjusting gear rod 52 is installed on the fixed mounting frame 51, a limiting movable component 53 is installed on the adjusting gear rod 52, the limiting movable component 53 includes a limiting clamping sleeve 531 sleeved on the adjusting gear rod 52, a plurality of movable clamping teeth 531 are arranged inside the limiting clamping sleeve 531, a push-unlocking sleeve 532 is installed inside the limiting clamping sleeve 531, and a third reset spring 533 is installed between the push-unlocking sleeve 532 and the limiting clamping sleeve 531.

[0064] When the height needs to be adjusted, first push the push-unlock sleeve 532. When the push-unlock sleeve 532 is subjected to external force, it will overcome the elastic force of the third return spring 533 and slide along the adjustment gear rod 52. The sliding of the push-unlock sleeve 532 will drive the movable clamping teeth 5311 in the limit clamping sleeve 531 to disengage from the tooth groove on the adjustment gear rod 52, thereby unlocking the limit clamping sleeve 531. After the limit clamping sleeve 531 is unlocked, it can slide freely up and down along the adjustment gear rod 52 to adjust the height of the contraction adjustment device 2 and the transmission contraction strip 3 and the buffer detection strip 4 thereon.

[0065] When the height is adjusted to a suitable level, release the push-to-unlock sleeve 532. Under the elastic force of the third reset spring 533, the push-to-unlock sleeve 532 will reset, and drive the movable latching teeth 5311 in the limit clamping sleeve 531 to re-engage with the tooth grooves on the adjusting gear rod 52, thereby achieving height locking.

[0066] The height adjustment mechanism 5 has a precise adjustment capability, and can achieve fine adjustment of the height by adjusting the scale or tooth groove on the tooth rod 52. The design of the limit movable component 53 ensures high stability and reliability. In the locked state, the movable latch 5311 is tightly engaged with the tooth groove on the adjustment tooth rod 52 to prevent accidental changes in height.

[0067] See also Figure 1 and Fig.10As shown, a buffer support plate 61 is horizontally arranged directly above the shock-absorbing placement seat 6, and a plurality of buffer support blocks 62 and a limiting suction cup 63 are installed on the buffer support plate 61. A limiting guide rod 64 is installed at the axial position of the shock-absorbing placement seat 6, and a first ball head is provided on the top of the limiting guide rod 64, which is hinged to the bottom of the buffer support plate 61. A plurality of buffer guide sleeves 66 are also installed on the shock-absorbing placement seat 6, and the buffer guide sleeves 66 are evenly arranged with the limiting guide rod 64 as the axis, and a buffer guide rod 65 is installed inside the buffer guide sleeves 66, and a second ball head is provided on the top of the buffer guide rod 65, which is hinged to the bottom of the buffer support plate 61, and a buffer spring 67 is installed between the buffer guide sleeve 66 and the buffer guide rod 65.

[0068] The shock-absorbing placement seat 6 is horizontally mounted on a workbench as a basic support for the turbomolecular pump 1. A buffer support plate 61 is arranged above the shock-absorbing placement seat 6, and the buffer support plate 61 directly supports the bottom of the turbomolecular pump 1 through a plurality of buffer support blocks 62 to ensure that the pump body is stably placed.

[0069] A limiting suction cup 63 is also installed on the buffer support plate 61. The limiting suction cup 63 can absorb the placed turbomolecular pump 1 to further prevent the pump body from being displaced during operation, thereby ensuring the stability of the pump body.

[0070] A limit guide rod 64 is installed at the axis position of the shock-absorbing placement seat 6, and the limit guide rod 64 is slidably connected to the shock-absorbing placement seat 6 and can move freely in the vertical direction. A first ball head is provided on the top of the limit guide rod 64, and the ball head is hinged to the bottom of the buffer support plate 61, which can effectively ensure that the buffer support plate 61 is installed in the center of the axis position of the shock-absorbing placement seat 6.

[0071] A plurality of buffer guide sleeves 66 are evenly installed on the shock-absorbing placement seat 6. The buffer guide sleeves 66 are distributed with the limiting guide rod 64 as the axis, and a buffer guide rod 65 is installed inside. The top of the buffer guide rod 65 is also provided with a second ball head, which is hinged to the bottom of the buffer support plate 61. A buffer spring 67 is installed between the buffer guide sleeve 66 and the buffer guide rod 65. When the pump body vibrates during operation, the buffer spring 67 can absorb and disperse the vibration force, effectively reducing the amplitude of the pump body shaking around. When the pump body is vibrated, the buffer support block 62 first absorbs part of the vibration force, while the limiting suction cup 63 ensures that the pump body will not be displaced due to the vibration. Then, the buffer guide rod 65 elastically expands and contracts under the action of the buffer spring 67, further absorbing and dispersing the remaining vibration force.

[0072] A method for using a molecular pump based on a shock absorbing mechanism comprises the following steps;

[0073] S1. Gently place the turbomolecular pump 1 on the top of the shock-absorbing seat 6, and ensure that the pump body and the shock-absorbing seat 6 are coaxially aligned.

[0074] S2. According to the size and installation requirements of the turbomolecular pump 1, the contraction adjustment device 2 is adjusted to a suitable fixed position through the height adjustment mechanism 5 to ensure that the contraction adjustment device 2 can smoothly drive the transmission contraction bar 3 to contract.

[0075] S3, start the contraction regulating device 2 to drive the transmission contraction bar 3 to contract. The contraction of the transmission contraction bar 3 will drive the buffer detection bar 4 to be close to the outer wall of the turbomolecular pump 1 to form an embracing shock-absorbing structure.

[0076] S4. During the operation of the turbomolecular pump 1, the vibration is monitored in real time using the monitoring function of the buffer detection strip 4. If the vibration changes abnormally, such as increased amplitude or abnormal frequency, the pump body is stopped immediately, and troubleshooting or maintenance is performed.

[0077] The above embodiments only express one or several implementation modes of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the protection scope of the present invention. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the attached claims.

Claims

1. A turbomolecular pump, comprising a shock absorbing protection device installed outside the turbomolecular pump (1), characterized in that: The shock-absorbing protection device comprises an embracing shock-absorbing device and a shock-absorbing placement seat (6); The shock-absorbing placement seat (6) is horizontally installed on the workbench, and the top buffer support end of the shock-absorbing placement seat (6) is in contact with the bottom of the turbomolecular pump (1); The embracing shock-absorbing device comprises a contraction adjustment device (2), a buffer detection strip (4) and a height adjustment mechanism (5); The height adjustment mechanism (5) is fixedly mounted on the shock-absorbing placement seat (6), and the movable end of the height adjustment mechanism (5) can be adjusted and moved up and down; The contraction adjustment device (2) is installed on the movable end of the height adjustment mechanism (5), and the contraction end of the contraction adjustment device (2) is installed with a transmission contraction bar (3); The buffer detection strip (4) is installed on the transmission contraction strip (3) of the contraction adjustment device (2), and the buffer detection strip (4) is tightly fitted to the inner wall of the transmission contraction strip (3).

2. A turbomolecular pump according to claim 1, characterized in that: The contraction adjustment device (2) comprises an adjustment mounting plate (21) mounted on the movable end of the height adjustment mechanism (5), a plurality of position-limiting telescopic guide rods (22) are mounted on the adjustment mounting plate (21), an extension end of the position-limiting telescopic guide rod (22) is provided with a mounting block (221), upper and lower sides of the mounting block (221) are symmetrically provided with first position-limiting clamping shafts, a first return spring (23) is mounted between the position-limiting telescopic guide rod (22) and the adjustment mounting plate (21), and the contraction adjustment device (2) is further provided with a fitting contraction device (24) for driving the transmission contraction bar (3) to move, upper and lower sides of the transmission contraction bar (3) are provided with guide grooves (31), and the outer side of the transmission contraction bar (3) is covered with anti-slip teeth (32).

3. A turbomolecular pump according to claim 2, characterized in that: The laminating and shrinking device (24) comprises a guiding laminating mechanism (241) mounted on the adjusting mounting plate (21), wherein the working end of the guiding laminating mechanism (241) is movable and adjustable toward the axial position of the adjusting mounting plate (21), and a stabilizing conveying device (242) is mounted on the side of the guiding laminating mechanism (241), wherein the working end of the stabilizing conveying device (242) contacts with the anti-slip teeth (32) of the transmission shrinking strip (3).

4. A turbomolecular pump according to claim 3, characterized in that: The guiding and fitting mechanism (241) includes a bending guide rail (2411) rotatably mounted on the adjusting mounting plate (21), and second limit clamping shafts are symmetrically mounted on the upper and lower sides of the bending guide rail (2411), and a plurality of guide rollers (2412) are arranged inside the bending guide rail (2411). The guiding and fitting mechanism (241) also includes a rotating mounting seat (2413) mounted on the side of the bending guide rail (2411), and a reset rod (2414) is slidably mounted on the rotating mounting seat (2413), and the extending end of the reset rod (2414) is rotatably connected to the bending guide rail (2411), and a second reset spring (2415) is installed between the reset rod (2414) and the rotating mounting seat (2413).

5. A turbomolecular pump according to claim 3, characterized in that: The stable conveying device (242) comprises a limiting guide rail (243) mounted on the adjusting mounting plate (21), a third limiting clamping shaft is symmetrically provided on the upper and lower sides of the limiting guide rail (243), a pressure stabilizing transmission gear (244) is mounted on the limiting guide rail (243), the pressure stabilizing transmission gear (244) is in conflict with the anti-slip teeth (32) of the transmission contraction strip (3), and the stable conveying device (242) also comprises a rotation driving device for driving the pressure stabilizing transmission gear (244) to rotate, and the rotation driving device The invention comprises a transmission shaft (245), a transmission slide groove is provided on the transmission shaft (245), a rotation locking disk (246) is installed on the transmission shaft (245), a fixed limit disk (247) is installed below the rotation locking disk (246), the fixed limit disk (247) is fixedly connected to the adjustment installation disk (21), and the rotation locking disk (246) and the fixed limit disk (247) are both provided with insertion holes. The rotation driving device also comprises a rotation driver (248) that drives the transmission shaft (245) to rotate.

6. A turbomolecular pump according to claim 5, characterized in that: A transmission slip ring (2442) is installed inside the pressure stabilizing transmission gear (244), a plurality of limit installation grooves (2441) are arranged inside the pressure stabilizing transmission gear (244), and a pressure spring (2443) is installed inside each of the limit installation grooves (2441), one end of the pressure spring (2443) contacts the limit installation groove (2441), and one end of the pressure spring (2443) away from the limit installation groove (2441) contacts the transmission slip ring (2442).

7. A turbomolecular pump according to claim 1, characterized in that: The buffer detection strip (4) comprises a strip-shaped pressure airbag (41) mounted on the transmission contraction strip (3), and the buffer detection strip (4) further comprises an air pressure detection device (42) mounted on the side of the contraction adjustment device (2), and the air pressure detection device (42) is connected to the strip-shaped pressure airbag (41).

8. A turbomolecular pump according to claim 1, characterized in that: The height adjustment mechanism (5) comprises a fixed mounting frame (51) mounted on the shock-absorbing placement seat (6); an adjusting gear rod (52) is mounted on the fixed mounting frame (51); a limit movable assembly (53) is mounted on the adjusting gear rod (52); the limit movable assembly (53) comprises a limit clamping sleeve (531) sleeved on the adjusting gear rod (52); a plurality of movable clamping teeth (5311) are arranged inside the limit clamping sleeve (531); a push-unlocking sleeve (532) is also installed inside the limit clamping sleeve (531); and a third reset spring (533) is installed between the push-unlocking sleeve (532) and the limit clamping sleeve (531).

9. A turbomolecular pump according to claim 1, characterized in that: A buffer support plate (61) is horizontally arranged directly above the shock-absorbing placement seat (6), and a plurality of buffer support blocks (62) and a limiting suction cup (63) are installed on the buffer support plate (61). A limiting guide rod (64) is installed at the axial position of the shock-absorbing placement seat (6), and a first ball head is provided at the top of the limiting guide rod (64), and the first ball head is hinged to the bottom of the buffer support plate (61). A plurality of buffer guide sleeves (66) are also installed on the shock-absorbing placement seat (6), and the buffer guide sleeves (66) are uniformly arranged with the limiting guide rod (64) as the axial center. Buffer guide rods (65) are installed inside the buffer guide sleeves (66), and a second ball head is provided at the top of the buffer guide rod (65), and the second ball head is hinged to the bottom of the buffer support plate (61). A buffer spring (67) is installed between the buffer guide sleeve (66) and the buffer guide rod (65).

10. A method for using a molecular pump based on a damping mechanism, using a turbomolecular pump according to any one of claims 1 to 9, characterized in that: The steps include: S1. Place the turbomolecular pump (1) on top of the shock-absorbing mounting seat (6), and ensure that the pump body and the shock-absorbing mounting seat (6) are coaxially aligned; S2. According to the size and installation requirements of the turbomolecular pump (1), the contraction adjustment device (2) is adjusted to a suitable fixed position through the height adjustment mechanism (5); S3, starting the contraction adjustment device (2) to drive the transmission contraction strip (3) to contract, and the contraction of the transmission contraction strip (3) will drive the buffer detection strip (4) to be close to the outer wall of the turbomolecular pump (1), forming an embracing shock-absorbing structure; S4, during the operation of the turbomolecular pump (1), using the monitoring function of the buffer detection strip (4) to monitor the vibration in real time; If there are any abnormal changes in vibration, such as increased amplitude or abnormal frequency, stop the pump immediately and perform troubleshooting or maintenance.

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