Alkaline silicon cleaning liquid processing waste liquid treatment tank for integrated circuit

Abstract

The invention discloses an alkaline silicon cleaning liquid processing waste liquid treatment tank for an integrated circuit, and belongs to the technical field of waste liquid treatment tanks, the alkaline silicon cleaning liquid processing waste liquid treatment tank comprises a treatment tank cover, a treatment tank body and a liquid inlet pipe, the treatment tank cover is mounted at an opening of the treatment tank body, and the treatment tank cover sleeves the surface of the liquid inlet pipe; a mounting frame is fixed to the inner wall of the treatment tank body, a partition plate is fixed to the middle of the mounting frame, and filter screens mounted in the mounting frame are symmetrically arranged on the two sides of the partition plate; the filter screen filters the liquid and pre-filters a large number of flocculent floats or other insoluble impurities in the waste liquid, the workload of the waste liquid treatment equipment is reduced, the usability of an operator is improved, meanwhile, the stirring plate stirs the liquid, and the situation that the filter screen is blocked due to the fact that the flocculent floats or other insoluble impurities are accumulated on the surface of the filter screen is avoided; and moreover, when an operator replaces the mounting frame, the operator does not need to close the liquid inlet pipe any more, and the cleaning convenience of the operator is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of waste liquid treatment tanks, and in particular relates to a waste liquid treatment tank for processing alkaline silicon cleaning liquid for integrated circuits. Background Art

[0002] In the process of integrated circuit manufacturing, it is very common to use alkaline silicon cleaning fluid to clean silicon wafers. This cleaning fluid usually contains sodium hydroxide (NaOH) or potassium hydroxide (KOH), which is used to remove pollutants such as organic matter, oxides and metal ions on the surface of silicon wafers. When treating this type of waste liquid, common technologies include the combination of electrolysis technology and ion exchange membrane technology. Through electrolysis reaction, silicate ions are formed into removable compounds, while the recovery and harmless treatment of harmful substances are achieved. In addition, chemical precipitation, ion exchange, membrane separation technology, electrochemical treatment technology, etc. are used to remove heavy metal ions and organic matter from wastewater. When treating waste liquid, it may be necessary to divert the waste liquid to the waste liquid treatment tank for storage. Therefore, it can be seen that the existing waste liquid treatment tank basically meets people's use needs, but the following problems still exist.

[0003] When storing waste liquid, the operator pours the waste liquid into the waste liquid treatment tank through a catheter, so that the waste liquid treatment tank stores the waste liquid. Since there may be a large amount of flocculent floating matter or other insoluble impurities in the waste liquid, a large amount of flocculent floating matter or other insoluble impurities may be deposited at the bottom of the waste liquid treatment tank during the storage process. When a large amount of flocculent floating matter or other insoluble impurities are deposited at the bottom of the treatment tank, after the operator opens the drain valve, a large amount of flocculent floating matter or other insoluble impurities may flow along the pipeline to the waste liquid treatment equipment, which may increase the workload of waste liquid treatment, and a large amount of flocculent floating matter or other insoluble impurities may block the pipeline. For this reason, we propose an alkaline silicon cleaning liquid processing waste liquid treatment tank for integrated circuits. Summary of the invention

[0004] The invention provides an alkaline silicon cleaning liquid processing waste liquid treatment tank for integrated circuits, which pre-filters a large amount of flocculent floating matter or other insoluble impurities in the waste liquid through a filter screen, reduces the workload of waste liquid treatment equipment, prevents pipeline blockage, and improves operator usability.

[0005] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a processing tank for waste liquid from alkaline silicon cleaning liquid used for integrated circuits, comprising a processing tank cover, a processing tank body and a liquid inlet pipe, wherein the processing tank cover is installed at the opening of the processing tank body, and the processing tank cover is sleeved on the surface of the liquid inlet pipe, an installation frame is fixed to the inner wall of the processing tank body, and a partition is fixed to the middle of the installation frame, filters installed in the installation frame are symmetrically arranged on both sides of the partition, and a stirring member is attached to the surface of the filter screen, and the stirring member is connected to the processing tank body and the partition through a support frame.

[0006] Furthermore, the stirring component includes a fixed block, a stirring plate, a rotating rod, a transmission rod, a first gear, a second gear, a rotating groove and a rotating block. The two side ends of the support frame are respectively fixed between the partition surface and the inner wall of the treatment tank body, a rotating sleeve is fixed in the middle of the support frame, and a transmission rod passes through the middle of the rotating sleeve, the two side ends of the transmission rod are respectively fixed with a first gear and a fixed block that fits with the filter screen, and a plurality of groups of stirring plates are fixed around the fixed block, one side end of the first gear is meshed with a second gear, and the second gear is fixed on the rotating rod, and the rotating rod is rotatably connected to the treatment tank body and the partition, and a plurality of groups of water wheels are fixed to the end of the rotating rod close to the partition.

[0007] Furthermore, rotating blocks are symmetrically fixed to both end portions of the rotating rod, and the surfaces of the rotating blocks are sleeved with rotating grooves respectively fixed between the inner wall of the treatment tank and the surface of the partition.

[0008] Furthermore, a docking tube is threadedly installed on the end of the liquid inlet pipe, and a liquid separating tank is fixed at the end of the docking tube, two sealing plugs are embedded in the liquid separating tank, and a connecting rod is fixed between the two sets of sealing plugs, a bolt is fixed to one end of the other sealing plug, and a threaded sleeve fixed to the liquid separating tank is sleeved on the surface of the bolt, a turntable is fixed to the end of the threaded sleeve, and a drain port is symmetrically fixed to the end of the liquid separating tank away from the docking tube, and the drain port and the water wheel are aligned with each other.

[0009] Furthermore, the sealing plugs are all configured to be cylindrical, the liquid separation tank is configured to be a hollow cylinder, and the inner wall diameter of the hollow cylinder of the liquid separation tank matches the diameter of the cylindrical surface of the sealing plug.

[0010] Furthermore, a handle is fixed on any side of the turntable surface, and several groups of handle surfaces fixed on one side of the turntable surface are provided with several groups of wavy grooves.

[0011] Furthermore, the surfaces of the bolts are all provided with threads, and the threaded sleeves are internally provided with internal threads opposite to the threads on the surfaces of the bolts.

[0012] The beneficial effects of the present invention are: The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank is provided with a partition, a filter screen and a mounting frame. By pouring the liquid into the chamber formed by the partition and the tank body of the treatment tank, the filter screen filters the liquid, and pre-filters a large amount of flocculent floating matter or other insoluble impurities in the waste liquid, thereby reducing the workload of the waste liquid treatment equipment, preventing pipeline blockage, and improving the usability of the operator. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank is provided with a water wheel, a rotating rod, a second gear, a first gear, a transmission rod, a fixed block and a stirring plate. After the water wheel rotates, the water wheel drives the second gear to rotate through the rotating rod. After the second gear and the first gear are meshed with each other, the first gear drives the transmission rod to rotate, and the transmission rod drives the stirring plate to rotate through the rotating rod, so that the stirring plate liquid is stirred, and a large amount of flocculent floating matter or other insoluble impurities are prevented from accumulating on the surface of the filter screen to cause the filter screen to be blocked, thereby improving the filtering efficiency. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank is provided with a turntable, bolts, threaded sleeves, drainage ports, connecting rods, sealing plugs and a liquid separator. When an operator rotates the turntable, the turntable drives the bolts to rotate, so that the bolts and the threaded sleeves are threadedly matched, the bolts push the sealing plugs to move, and the sealing plugs push another sealing plug to move through the connecting rods, so that the sealing plugs close one set of drainage ports and open another set of drainage ports, and the other set of drainage ports discharges liquid into another installation frame. When the operator replaces the installation frame, the operator is no longer required to close the liquid inlet pipe, thereby improving the convenience of the operator's cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a front cross-sectional structural schematic diagram of the present invention; Figure 2 It is a schematic diagram of a top-view cross-sectional structure of a first gear and a support frame of the present invention; Figure 3 It is a schematic diagram of a top cross-sectional structure of a first gear and a second gear of the present invention; Figure 4 It is a schematic diagram of the top cross-sectional structure of the stirring plate and the fixing block of the present invention; Figure 5 For the present invention Figure 1 A schematic diagram of the enlarged structure at A in the middle; Figure 6 For the present invention Figure 1 A schematic diagram of the enlarged structure at B in the middle; Figure 7 For the present invention Figure 1 Schematic diagram of the enlarged structure at point C in the middle.

[0014] In the figure: 1. Treatment tank cover; 2. Treatment tank body; 3. Liquid inlet pipe; 4. Support frame; 5. Mounting frame; 6. Filter screen; 7. Partition plate; 8. Fixed block; 9. Stirring plate; 10. Rotating rod; 11. Transmission rod; 12. First gear; 13. Second gear; 14. Rotating trough; 15. Rotating block; 16. Turntable; 17. Bolt; 18. Threaded sleeve; 19. Drain port; 20. Connecting rod; 21. Sealing plug; 22. Butt pipe; 23. Liquid separator; 24. Rotating sleeve; 25. Water wheel. DETAILED DESCRIPTION

[0015] In order to further understand the content, features and effects of the present invention, the following embodiments are given as examples and described in detail with reference to the accompanying drawings.

[0016] Example: See also Figure 1 - Figure 7 A waste liquid treatment tank for processing alkaline silicon cleaning liquid for integrated circuits, comprising a treatment tank cover 1, a treatment tank body 2 and a liquid inlet pipe 3, wherein the treatment tank cover 1 is threadedly installed at the opening of the treatment tank body 2, and the treatment tank cover 1 is sleeved on the surface of the liquid inlet pipe 3, an installation frame 5 is welded to the inner wall of the treatment tank body 2, and a partition 7 is welded to the middle of the installation frame 5, and filter screens 6 threadedly installed in the installation frame 5 are symmetrically arranged on both sides of the partition 7, and a stirring member is attached to the surface of the filter screen 6, and the stirring member is supported by a support frame 4. It is connected to the treatment tank body 2 and the partition 7, and is fixed on the inner wall of the treatment tank body 2 through the mounting frame 5, and a partition 7 is installed in the middle of the mounting frame 5, so that the partition 7 divides the treatment tank body 2 into two chambers. When the liquid is discharged into the treatment tank body 2 through the liquid inlet pipe 3, the filter screen 6 threadedly installed in the middle of the mounting frame 5 is convenient for pre-filtering a large amount of flocculent floating matter or other insoluble impurities in the waste liquid, thereby reducing the workload of the waste liquid treatment equipment, preventing pipeline blockage, and improving the usability of the operator.

[0017] In other embodiments, the stirring member includes a fixed block 8, a stirring plate 9, a rotating rod 10, a transmission rod 11, a first gear 12, a second gear 13, a rotating groove 14 and a rotating block 15. The ends of both sides of the support frame 4 are respectively welded between the surface of the partition 7 and the inner wall of the treatment tank body 2, and a rotating sleeve 24 is welded in the middle of the support frame 4, and the middle of the rotating sleeve 24 is penetrated by the transmission rod 11. The ends of both sides of the transmission rod 11 are respectively welded with the first gear 12 and the fixed block 8 that fits with the filter screen 6, and the fixed block 8 is welded with a plurality of groups of stirring plates 9. The first gear 12 is welded to the inner wall of the treatment tank body 2. The side ends are all meshed with a second gear 13, and the second gear 13 is welded on the rotating rod 10, and the rotating rod 10 is rotatably connected to the treatment tank body 2 and the partition 7. The two side ends of the rotating rod 10 are symmetrically welded with rotating blocks 15, and the surfaces of the rotating blocks 15 are sleeved with rotating grooves 14 respectively fixed between the inner wall of the treatment tank body 2 and the surface of the partition 7. The end of the rotating rod 10 close to the partition 7 is fixed with a plurality of groups of water wheels 25. When the liquid inlet pipe 3 discharges the liquid into the liquid separation tank 23 through the butt pipe 22, the liquid is discharged from the liquid separation tank 23 through the discharge port 19. After the liquid flows onto the surface of the water wheel 25, the water wheel 25 is pushed by the liquid, and the water wheel 25 pushes the rotating rod 10 to move, and the rotating rod 10 drives the rotating block 15 set in a round pancake shape to rotate in the rotating groove 14 set in a cylindrical groove, so that the rotating rod 10 drives the second gear 13 to rotate. When the second gear 13 rotates, the second gear 13 and the first gear 12 are meshed with each other. The second gear 13 drives the transmission rod 11 to rotate through the first gear 12, and the transmission rod 11 rotates in the rotating sleeve 24. The rotating sleeve 24 increases the transmission rod 11 to rotate. The rotation stability is improved, and the rotating sleeve 24 is between the inner wall of the treatment tank body 2 and the surface of the partition 7 through the support frame 4, which is convenient for supporting the transmission rod 11, increasing the rotation stability of the transmission rod 11, and when the transmission rod 11 is rotating, the transmission rod 11 drives the stirring plate 9 to rotate through the fixed block 8, so that the fixed block 8 drives the stirring plate 9 to rotate. During the rotation of the stirring plate 9, the stirring plate 9 stirs the liquid to avoid a large amount of flocculent floating matter or other insoluble debris from accumulating on the surface of the filter screen 6, causing the filter screen 6 to be blocked, thereby improving the filtration efficiency.

[0018] In other embodiments, a butt joint 22 is threadedly installed at the end of the liquid inlet pipe 3, and a liquid separator 23 is welded at the end of the butt joint 22. Two groups of sealing plugs 21 are embedded in the liquid separator 23, and a connecting rod 20 is welded between the two groups of sealing plugs 21. A bolt 17 is welded at one end of the other sealing plug 21, and a threaded sleeve 18 fixed to the liquid separator 23 is sleeved on the surface of the bolt 17, and a turntable 16 is fixed at the end of the threaded sleeve 18. The surface of the bolt 17 is provided with a thread, and the threaded sleeve 18 is provided with an internal thread opposite to the thread provided on the surface of the bolt 17. A drain port 19 is symmetrically fixed to the end of the liquid separator 23 away from the butt joint 22, and the drain port 19 is aligned with the water wheel 25. When the operator cleans a large amount of flocculent floating matter or other insoluble debris attached to the surface of the filter screen 6, the operator separates the treatment tank cover 1 from the treatment tank body 2, and then the operator rotates the turntable 16, and the turntable 16 with The threads on the surface of the moving bolt 17 and the internal threads on the inner wall of the threaded sleeve 18 are threadedly matched with each other, so that the bolt 17 pushes the sealing plug 21 to move during the rotation process, and the sealing plug 21 pushes the other sealing plug 21 to slide in the liquid separation tank 23 through the connecting rod 20, so that the sealing plug 21 opens the drainage port 19, and the other sealing plug 21 closes the other drainage port 19. After the other drainage port 19 no longer discharges liquid, the liquid no longer pushes the other water wheel 25 parallel to the other drainage port 19 to rotate, and the operator cleans a large amount of flocculent floating matter or other insoluble debris attached to the surface of the filter screen 6 on one side of the other water wheel 25, thereby exchanging the use status of the two sets of partitions 7. When the operator is cleaning, the operator no longer needs to close the liquid inlet pipe 3 and clean a large amount of flocculent floating matter or other insoluble debris attached to the surface of the filter screen 6, thereby improving the convenience of cleaning for the operator.

[0019] In other embodiments, the sealing plug 21 is configured to be cylindrical, the separator tank 23 is configured to be hollow cylindrical, and the inner wall diameter of the hollow cylinder of the separator tank 23 matches the diameter of the cylindrical surface of the sealing plug 21. By matching the cylindrical surface diameter of the sealing plug 21 with the inner wall diameter of the hollow cylinder of the separator tank 23, the sealing plug 21 can rotate in the separator tank 23, thereby increasing the stability of the sealing plug 21 rotating in the separator tank 23, and the surface of the sealing plug 21 fits the inner wall of the separator tank 23, thereby increasing the sealing performance of the separator tank 23.

[0020] In other embodiments, a handle is welded on either side of the surface of the turntable 16, and several groups of wavy grooves are provided on the surfaces of the handles welded on one side of the surface of the turntable 16. When the operator rotates the turntable 16, the operator holds the handles welded on either side of the surface of the turntable 16, and the several groups of threaded grooves provided on the surface of the turntable 16 increase the friction of the operator's hand on the surface of the turntable 16, thereby ensuring the stability of the turntable 16 when the operator rotates it.

[0021] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not intended to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A waste liquid treatment tank for processing alkaline silicon cleaning liquid for integrated circuits, comprising a treatment tank cover (1), a treatment tank body (2) and a liquid inlet pipe (3), characterized in that: A treatment tank cover (1) is installed at the opening of the treatment tank body (2), and the treatment tank cover (1) is sleeved on the surface of the liquid inlet pipe (3). A mounting frame (5) is fixed to the inner wall of the treatment tank body (2), and a partition (7) is fixed in the middle of the mounting frame (5). Filters (6) mounted in the mounting frame (5) are symmetrically arranged on both sides of the partition (7), and a stirring member is attached to the surface of the filter (6). The stirring member is connected to the treatment tank body (2) and the partition (7) through a support frame (4).

2. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 1, characterized in that: The stirring member comprises a fixed block (8), a stirring plate (9), a rotating rod (10), a transmission rod (11), a first gear (12), a second gear (13), a rotating groove (14) and a rotating block (15). The two side ends of the support frame (4) are respectively fixed between the surface of the partition plate (7) and the inner wall of the treatment tank body (2). A rotating sleeve (24) is fixed in the middle of the support frame (4), and a transmission rod (11) is passed through the middle of the rotating sleeve (24). The two side ends of the transmission rod (11) are respectively A first gear (12) and a fixed block (8) that is in contact with the filter screen (6) are fixed, and a plurality of groups of stirring plates (9) are fixed around the fixed block (8). A second gear (13) is meshed at one end of the first gear (12), and the second gear (13) is fixed on a rotating rod (10). The rotating rod (10) is rotatably connected to the treatment tank body (2) and the partition (7). A plurality of groups of water wheels (25) are fixed at one end of the rotating rod (10) close to the partition (7).

3. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 2, characterized in that: Rotating blocks (15) are symmetrically fixed to both end portions of the rotating rod (10), and the surfaces of the rotating blocks (15) are sleeved with rotating grooves (14) respectively fixed between the inner wall of the treatment tank body (2) and the surface of the partition (7).

4. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 1, characterized in that: A butt joint pipe (22) is threadedly mounted on the end of the liquid inlet pipe (3), and a liquid separation tank (23) is fixed to the end of the butt joint pipe (22). Two sealing plugs (21) are embedded in the liquid separation tank (23), and a connecting rod (20) is fixed between the two sets of sealing plugs (21). A bolt (17) is fixed to one end of the other sealing plug (21), and a threaded sleeve (18) fixed to the liquid separation tank (23) is sleeved on the surface of the bolt (17), and a rotating disk (16) is fixed to the end of the threaded sleeve (18). A liquid discharge port (19) is symmetrically fixed to the end of the liquid separation tank (23) away from the butt joint pipe (22), and the liquid discharge port (19) and the water wheel (25) are aligned with each other.

5. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 4, characterized in that: The sealing plugs (21) are all configured in a cylindrical shape, the liquid separation tank (23) is configured in a hollow cylindrical shape, and the inner wall diameter of the hollow cylinder of the liquid separation tank (23) matches the surface diameter of the cylinder of the sealing plug (21).

6. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 4, characterized in that: A handle is fixed on any side of the surface of the turntable (16), and a plurality of groups of handles fixed on one side of the surface of the turntable (16) are provided with a plurality of groups of wavy grooves.

7. The integrated circuit alkaline silicon cleaning liquid processing waste liquid treatment tank according to claim 4, characterized in that: The surfaces of the bolts (17) are provided with threads, and the interior of the threaded sleeve (18) is provided with internal threads which are opposite to the threads provided on the surfaces of the bolts (17).

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