Bifocal pretreatment device for measuring roughness of metal film thickness material

Abstract

The invention belongs to the technical field of industrial automation, and particularly relates to a bifocal pretreatment device for measuring the roughness of a metal film thickness material, the bifocal pretreatment device comprises a transportation assembly, a magnetic attraction assembly and an electrolytic polishing pool, the left side and the right side of the electrolytic polishing pool are provided with a cleaning pool and an electrolytic pool respectively, and the transportation assembly is located above the electrolytic polishing pool. According to the device, the metal film corresponding to the magnetic attraction assembly is electromagnetically attracted through the conveying assembly, the magnetic attraction assembly is moved to the position above the electrolytic tank through the electric drive sliding rail, and the first magnetic attraction block and the attracted metal film are fed into electrolyte of the electrolytic tank by starting the electric push rod; by starting the second magnetic attraction block and adjusting the magnetism of the first magnetic attraction block at the same time, the metal film is made to suspend up and down in the electrolytic tank, the outer wall of the metal film can make contact with electrolyte at the same time, separation of bubbles is promoted through up-down suspension, the liquidity of the electrolyte is improved, and uniform distribution of reactants and products in the electrolyte is facilitated.

Description

Technical Field

[0001] The invention relates to the technical field of industrial automation, in particular to a dual-focus roughness preprocessing device for measuring the thickness of a metal film. Background Art

[0002] Dual-focus measurement of metal film thickness is a high-precision measurement method using spectral confocal displacement sensor technology. It is particularly suitable for measuring the thickness and distribution of self-supporting metal films. It is an indispensable part of the automated detection procedure during the processing of metal films. At the same time, in order to ensure the accuracy of the measurement and subsequent automated processing, the roughness of the metal film's exterior needs to be processed.

[0003] The polishing of metal films is mostly done by mechanical polishing and chemical polishing. Mechanical polishing can easily cause deformation of thin metal films, so electrolytic polishing is often used. If the metal films are stacked and placed in an electrolytic cell, adsorption between the two metal films will affect the electrolytic polishing effect. Therefore, a single metal film is often electropolished. Whether a filter frame or a clamping device is used to electropolish a single metal film, there will be electrolytic dead corners, i.e., the area where the filter frame and the metal film are bonded, and the area where the clamping device clamps the metal film, which will lead to uneven electrolytic polishing. At the same time, a large number of bubbles will be generated during the electrolytic polishing process, which will affect the electrolysis efficiency. Therefore, the metal film needs to be suspended up and down manually. Both the filter frame and the clamping device may cause deformation of the metal film during the up and down swinging process.

[0004] Therefore, we propose a dual-focus roughness pretreatment device for measuring the thickness of metal films, which is beneficial for making the outer wall of the metal film contact the electrolyte at the same time, and promotes the detachment of bubbles by suspending them up and down, increases the fluidity of the electrolyte, and helps to evenly distribute the reactants and products in the electrolyte. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the present invention provides a dual-focus metal film thickness material roughness preprocessing device to solve the problems existing in the above-mentioned background technology.

[0006] To achieve the above object, the present invention provides the following technical solutions: a dual-focus metal film thickness material roughness pretreatment device, comprising a transport component, a magnetic suction component and an electrolytic polishing pool, wherein a cleaning pool and an electrolytic pool are respectively provided on the left and right sides of the electrolytic polishing pool, the transport component is located above the electrolytic polishing pool, and the transport component is slidably connected to the magnetic suction component through an electric drive slide rail;

[0007] The slider of the magnetic attraction component is slidably connected to the electric drive rail, the bottom of the slider is connected to an electric push rod, the other end of the electric push rod is connected to an electromagnetic first magnetic attraction block, and the outer wall of the first magnetic attraction block is wrapped with a protective layer;

[0008] An electromagnetic second magnetic block is arranged below the electrolytic cell, the electrolytic cell is filled with electrolyte, the first magnetic block delivers the metal film into the electrolytic cell, the metal film is immersed in the electrolyte of the electrolytic cell, and the first magnetic block and the second magnetic block adjust the magnetic force by controlling the current so that the metal film floats between the first magnetic block and the second magnetic block;

[0009] The bottom surface of the electrolytic cell is provided with a flow-increasing component, which pressurizes the electrolyte and ejects it to push the metal film in a suspended state.

[0010] Further: the flow-increasing component includes a booster water pump, the water inlet of the booster water pump is connected to a return pipe, the other end of the return pipe is connected to the bottom of the electrolytic cell, the water outlet of the booster water pump corresponds to a flow-increasing row, the flow-increasing row is located at the bottom of the hydrolysis cell, and is located between the first magnetic block and the second magnetic block.

[0011] Furthermore: an electrolytic assembly is installed at the bottom of the electrolytic cell, and the electrolytic assembly includes an electrolyzer. A positive terminal and a negative terminal are arranged on the left side of the electrolyzer. The positive terminal and the negative terminal are connected to the electrolyte of the electrolytic cell. The left and right sides of the electrolyzer have symmetrical structures.

[0012] Furthermore: the first magnetic block is in the shape of a flat plate and has an electromagnet built in it.

[0013] Further: the first magnetic block is in a rectangular shape, and a groove is provided on its bottom surface, and an electromagnet is installed inside the side wall of the groove.

[0014] Furthermore: a cleaning component is installed under the cleaning pool, and the cleaning component includes a cleaning air pump. The exhaust port of the cleaning air pump is connected to an exhaust pipe, and the air inlet of the cleaning air pump is connected to an air intake cylinder. Exhaust plates are arranged on the front and rear sides of the cleaning pool, and one-way air nozzles are equidistantly arranged on the side walls of the exhaust pipe. The other end of the exhaust pipe is connected to the corresponding exhaust plate.

[0015] Compared with the prior art, the technical effects and advantages of the present invention are as follows:

[0016] 1. The dual-focus material roughness pretreatment device for measuring the thickness of metal films of the present invention is provided with a transport component, an electrolytic cell, a first magnetic block and a second magnetic block. The transport component is used to electromagnetically adsorb the metal film corresponding to the magnetic component, and the magnetic component is moved to the top of the electrolytic cell by an electric drive slide rail. The first magnetic block and the adsorbed metal film are sent into the electrolyte of the electrolytic cell by starting the electric push rod. The metal film is suspended up and down in the electrolytic cell by starting the second magnetic block and adjusting the magnetism of the first magnetic block at the same time, which is beneficial for the outer wall of the metal film to contact the electrolyte at the same time. The up and down suspension promotes the detachment of bubbles, increases the fluidity of the electrolyte, and helps the uniform distribution of reactants and products in the electrolyte.

[0017] 2. The dual-focus roughness pretreatment device for measuring the thickness of metal films of the present invention, through the setting of the flow-increasing component, starts the booster water pump to extract the electrolyte from both sides of the bottom of the electrolytic cell, and then pressurizes the electrolyte through the booster water pump and sprays it out through the flow-increasing row. The sprayed water flow can form a water flow impact on the bottom of the metal film, which can further maintain the metal film in a suspended state in the electrolyte, which is beneficial to ensure that the metal film remains suspended in an upper and lower state during the electrolysis process.

[0018] 3. The dual-focus material roughness pretreatment device for measuring the thickness of metal films of the present invention has a first magnetic block which is arranged in a rectangular shape. Metal workpieces of different shapes are placed in the groove of the first magnetic block. The metal workpieces are fixed by starting the electromagnets on the side walls of the grooves. The magnetic assembly is moved to the top of the electrolytic cell by an electric-driven slide rail. The first magnetic block and the adsorbed metal film are sent into the electrolyte of the electrolytic cell by starting the electric push rod. The metal film is suspended up and down in the electrolytic cell by adjusting the magnetism of the multiple electromagnets on the side walls of the first electromagnetic block and the magnetism of the first magnetic block. In combination with the flow-increasing assembly, metal workpieces of different shapes can be temporarily suspended in the electrolytic cell. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 It is a schematic cross-sectional view of the polishing electrolytic cell structure of the present invention;

[0021] Figure 3 It is a schematic cross-sectional view of the polishing electrolytic cell and the transport assembly structure of the present invention;

[0022] Figure 4 It is a schematic cross-sectional view of the transport component structure of the present invention;

[0023] Figure 5 It is a schematic diagram of the structure of the cleaning component of the present invention;

[0024] Figure 6It is a schematic cross-sectional structure diagram of a polishing electrolytic cell and a transport assembly structure according to another embodiment of the present invention;

[0025] Figure 7 This is a schematic diagram of the structure of a magnetic attraction component according to another embodiment of the present invention;

[0026] Figure 8 It is a schematic cross-sectional view of the structure of a magnetic attraction component according to another embodiment of the present invention;

[0027] Fig. 9 It is a schematic diagram of the structure of the electrolytic assembly of the present invention;

[0028] Fig.10 It is a schematic diagram of the structure of the flow-increasing component of the present invention.

[0029] The accompanying drawings are marked as follows: 1. Transport assembly; 11. Electric drive slide rail; 2. Magnetic assembly; 21. Protective layer; 22. Slider; 23. Electric push rod; 24. First magnetic block; 241. Electromagnet; 3. Electrolytic polishing tank; 31. Electrolytic tank; 32. Cleaning tank; 33. Second magnetic block; 34. Cleaning assembly; 341. Cleaning air pump; 342. Exhaust pipe; 343. Intake cylinder; 344. One-way air nozzle; 345. Exhaust plate; 35. Electrolytic assembly; 351. Electrolyzer; 352. Positive terminal; 353. Negative terminal; 36. Flow increasing assembly; 361. Booster water pump; 362. Return pipe; 363. Flow increasing row. DETAILED DESCRIPTION

[0030] The technical solution of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the present invention. In addition, the forms of the various structures recorded in the following embodiments are merely illustrative, and the structures involved in the present invention are not limited to the various structures recorded in the following embodiments. All other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the present invention.

[0031] Example:

[0032] See also Figure 1-10 The present invention provides a technical solution: dual-focus metal film thickness measurement technology is a high-precision non-contact measurement method, which is mainly used to measure the thickness of metal films. It is based on the principle of white light spectral confocality. Two coaxially symmetrically installed spectral confocal sensors are used to perform high-precision optical positioning and aiming on the upper and lower surfaces of the metal film. After the light emitted by the sensor is focused on the sample surface and reflected back, only light of a specific wavelength can be separated and identified by the monochromator, thereby determining the axial position of the sample surface. Then, by calculating the position difference between the upper and lower surfaces of the film and calibrating and adjusting with a known standard thickness block (such as a small-sized or 0.2mm thick thin block), the thickness of the film can be accurately measured.

[0033] In order to make better use of the metal film and measure it more accurately, the surface roughness of the metal film needs to be pre-processed. It is necessary to use a dual-focus metal film thickness material roughness pre-processing device, including a transportation component 1, a magnetic suction component 2 and an electrolytic polishing pool 3. The electrolytic polishing pool 3 has a cleaning pool 32 and an electrolytic pool 31 on the left and right sides respectively. The metal film or other metal workpiece is electropolished by the electrolytic pool 31, and the metal film or other metal workpiece is cleaned by the cleaning pool 32.

[0034] The electrolytic cell 31 is filled with an electrolyte, which refers to a liquid or molten substance that acts as an ion conductor in an electrochemical reaction, and can conduct current and participate in the redox reaction on the electrode.

[0035] An electrolytic assembly 35 is installed at the bottom of the electrolytic cell 31, and the electrolytic assembly 35 includes an electrolyzer 351;

[0036] The electrolyzer 351 is a device that triggers redox reactions through electric current. It is mainly used for electrochemical reactions in electrolyte solutions or molten electrolytes. It is mainly composed of a power supply, an electrolytic cell, an anode, a cathode and a necessary control system. When the DC power supply is turned on, the current passes through the electrolyte, causing the positive ions in the electrolyte to move toward the cathode and gain electrons to undergo a reduction reaction, while the negative ions move toward the anode and lose electrons to undergo an oxidation reaction.

[0037] A positive terminal 352 and a negative terminal 353 are disposed on the left side of the electrolyzer 351 . The positive terminal 352 and the negative terminal 353 are connected to the electrolyte of the electrolytic cell 31 . The left and right sides of the electrolyzer 351 have symmetrical structures.

[0038] Under the action of electric current, the metal ions on the metal film or the outer wall of other metal workpieces are oxidized and dissolved, and hydrogen and oxygen are produced at the same time. This dissolution process is selective. The protruding parts are dissolved first due to the higher current density, making the metal surface smoother and brighter to achieve the purpose of surface roughness treatment.

[0039] Since the electrolyte is corrosive, the metal film and other metal workpieces that have completed electrolytic polishing need to be cleaned.

[0040] The cleaning pool 32 is filled with cleaning liquid, and a cleaning component 34 is installed under the cleaning pool 32. The cleaning component 34 is used to clean the metal film and other metal workpieces. The cleaning component 34 includes a cleaning air pump 341, and the exhaust port of the cleaning air pump 341 is connected to an exhaust pipe 342, and the air inlet of the cleaning air pump 341 is connected to an air intake cylinder 343. External air enters the cleaning air pump 341 from the air inlet through the air intake cylinder 343. Exhaust plates 345 are arranged on the front and rear sides of the cleaning pool 32, and one-way air nozzles 344 are equidistantly arranged on the side walls of the exhaust pipe 342. The other end of the exhaust pipe 342 is connected to the exhaust plate 345. The cleaning air pump 341 sprays the airflow into the cleaning pool 32 through the one-way air nozzle 344 of the exhaust plate 345, and the airflow drives the water flow to flush and clean the metal film and other metal workpieces.

[0041] The transport component 1 is located above the electrolytic polishing pool 3, and the transport component 1 is slidably connected to the magnetic attraction component 2 via an electric drive slide rail 11, and the magnetic attraction component 2 is driven to move by starting the electric drive slide rail 11 of the transport component 1;

[0042] The slider 22 of the magnetic attraction component 2 is slidably connected to the electric drive rail 11, and an electric push rod 23 is connected to the bottom of the slider 22. The electric drive rail 11 is started and the electric push rod 23 is driven to move through the slider 22. The other end of the electric push rod 23 is connected to an electromagnetic first magnetic attraction block 24. The first magnetic attraction block 24 is driven to adjust its height by starting the electric push rod 23. The outer wall of the first magnetic attraction block 24 is wrapped with a protective layer 21. The protective layer 21 can be made of rubber material, which can protect the first magnetic attraction block 24 from being corroded by electrolyzed water and does not affect the transmission of magnetism.

[0043] The first magnetic block 24 is in the shape of a flat plate and has an electromagnet 241 built therein. Since most metal films are in the shape of a flat plate, the magnetic force formed by the electromagnet 241 of the first magnetic block 24 can attract the metal film, and the metal film can be adsorbed by adjusting the current.

[0044] An electromagnetic second magnetic block 33 is provided below the electrolytic cell 31. The first magnetic block 24 delivers the metal film into the electrolytic cell 31. The electric drive rail 11 is started by the transport component 1 to drive the slider 22 to move. When the slider 22 is located above the electrolytic cell 31, it stops. Then the electric push rod 23 is started to deliver the first magnetic block 24 into the electrolyte of the electrolytic cell 31. The metal film is immersed in the electrolyte of the electrolytic cell 31 and floats between the first magnetic block 24 and the second magnetic block 33. The magnetic force is controlled by adjusting the current of the first electromagnetic block and the second electromagnetic block so that the metal film floats between the first magnetic block 24 and the second magnetic block 33.

[0045] The metal film corresponding to the magnetic attraction component 2 is electromagnetically adsorbed by the transport component 1, and the magnetic attraction component 2 is moved to the top of the electrolytic cell 31 by the electric drive slide rail 11. The first magnetic attraction block 24 and the adsorbed metal film are sent into the electrolyte of the electrolytic cell 31 by starting the electric push rod 23. The metal film is suspended up and down in the electrolytic cell 31 by starting the second magnetic attraction block 33 and adjusting the magnetism of the first magnetic attraction block at the same time, which is beneficial for the outer wall of the metal film to contact the electrolyte at the same time. The up and down suspension promotes the detachment of bubbles, increases the fluidity of the electrolyte, and makes the reactants and products evenly distributed in the electrolyte.

[0046] The bottom surface of the electrolytic cell 31 is provided with a flow increasing assembly 36, and the flow increasing assembly 36 pressurizes the electrolyte and ejects it to push the metal film in a suspended state;

[0047] The flow-increasing component 36 includes a booster water pump 361, the water inlet of the booster water pump 361 is connected to a return pipe 362, the other end of the return pipe 362 is connected to the bottom of the electrolytic cell 31, and the water outlet of the booster water pump 361 corresponds to a flow-increasing row 363, and the flow-increasing row 363 is located at the bottom of the hydrolysis cell and between the first magnetic block 24 and the second magnetic block 33;

[0048] By starting the booster water pump 361, the electrolyte is pumped out from both sides of the bottom of the electrolytic cell 31, and then the electrolyte is pressurized by the booster water pump 361 and sprayed out through the flow-increasing row 363. The sprayed water flow can form a water flow impact under the metal membrane, which can further maintain the metal membrane in a suspended state in the electrolyte, and can ensure that the metal membrane remains suspended up and down during the electrolysis process.

[0049] It should be noted that: when the power is on, the positive and negative ions in the electrolyte will form a double layer around the electrode, but this charge distribution is limited to the area near the electrode. The charge (ion) gradient of the solution area outside the double layer is evenly and continuously distributed, which means that the solution in these areas remains electrically neutral as a whole. Therefore, when the booster pump 361 is used to extract electrolyte from the electrolytic cell, as long as the double layer area is not touched, the extracted liquid will be electrically neutral, that is, the extracted electrolyte will not be charged.

[0050] Example 2

[0051] The first magnetic block 24 is in a rectangular shape, and a groove is formed on the bottom surface thereof. An electromagnet 241 is installed inside the side wall of the groove, that is, an electromagnet 341 is provided on each side wall of the groove.

[0052] Put metal workpieces of different shapes into the groove of the first magnetic block 24, fix the metal workpiece by starting the electromagnet 241 on the side wall of the groove, move the magnetic component 2 to the top of the electrolytic cell 31 by the electric drive slide rail 11, and send the first magnetic block 24 and the adsorbed metal film into the electrolyte of the electrolytic cell 31 by starting the electric push rod 23, and make the metal film float up and down in the electrolytic cell 31 by adjusting the magnetism of multiple electromagnets 241 on the side wall of the first electromagnetic block and the magnetism of the first magnetic block, and then cooperate with the flow increase component 36 to make metal workpieces of different shapes temporarily suspended in the electrolytic cell 31.

[0053] The electric drive slide rail 11 in the transport component 1 has a built-in travel sensor, which can determine the position of the slider 22. Then the entire device is added to the industrial automation system. The metal film on the external transfer equipment is picked up by the transport component 1 and the magnetic component 2. The surface roughness of the metal film is pre-treated by the transport component 1 and the magnetic component 2 through the electrolytic polishing pool 3. The transport component 1 and the magnetic component 2 then place the treated metal film on another external transfer component.

[0054] The working principle of the embodiment of the present invention is as follows: the electric slide rail of the transport component 1 is started to drive the slider 22 to start, the electric push rod 23 is started to drive the height of the first electromagnetic block to drop, and then the electromagnet 241 is started to generate magnetic force to magnetically adsorb the metal film on the external transport equipment, and then the electric push rod 23 is started to reset, and then the electric slide rail drives the slider 22 to move to the top of the electrolytic cell 31 of the electrolytic polishing cell 3;

[0055] The first magnetic block 24 and the adsorbed metal film are sent into the electrolyte of the electrolytic cell 31 by starting the electric push rod 23, and the metal film is suspended up and down in the electrolytic cell 31 by starting the second magnetic block 33 and adjusting the magnetism of the first magnetic block at the same time. The electrolyte is pumped out from both sides of the bottom of the electrolytic cell 31 by starting the booster water pump 361, and then the electrolyte is pressurized by the booster water pump 361 and sprayed out through the flow-increasing row 363, so that the sprayed water flow can form a water flow impact on the bottom of the metal film, which can further keep the metal film in a suspended state in the electrolyte;

[0056] After the electrolytic polishing is completed, the second magnetic block 33 is closed to strengthen the magnetism of the electromagnet 241 of the first magnetic block 24, and the metal film is magnetically adsorbed again, and then the electric push rod 23 is started to reset, and the slider 22 is driven to move above the cleaning tank 32 through the electric drive rail 11;

[0057] The cleaning tank 32 is filled with cleaning liquid. By starting the electric push rod 23 and using the first magnetic block 24, the metal film is sent into the cleaning tank 32, and then the cleaning air pump 341 sprays the air flow into the cleaning tank 32 through the one-way air nozzle 344 of the exhaust plate 345, and the air flow drives the water flow to flush and clean the metal film.

[0058] The basic principles and main features of the present invention and the advantages of the present invention are shown and described above. For those skilled in the art, it is obvious that the present invention is not limited to the details of the above exemplary embodiments, and the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention; therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive. The scope of the present invention is limited by the attached claims rather than the above description. Therefore, it is intended to include all changes within the meaning and scope of the equivalent elements of the claims in the present invention, and any figure marks in the claims should not be regarded as limiting the claims involved.

[0059] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dual-focus metal film thickness material roughness pretreatment device, comprising a transport component (1), a magnetic suction component (2) and an electrolytic polishing pool (3), wherein a cleaning pool (32) and an electrolytic pool (31) are respectively provided on the left and right sides of the electrolytic polishing pool (3), and the transport component (1) is located above the electrolytic polishing pool (3), characterized in that: The transport component (1) is slidably connected to the magnetic attraction component (2) via an electric drive slide rail (11); The slider (22) of the magnetic attraction component (2) is slidably connected to the electric drive slide rail (11), the bottom of the slider (22) is connected to an electric push rod (23), the other end of the electric push rod (23) is connected to an electromagnetic first magnetic attraction block (24), and the outer wall of the first magnetic attraction block (24) is wrapped with a protective layer (21); An electromagnetic second magnetic block (33) is arranged below the electrolytic cell (31); the electrolytic cell (31) is filled with electrolyte; the first magnetic block (24) delivers the metal film into the electrolytic cell (31); the metal film is immersed in the electrolyte of the electrolytic cell (31); the first magnetic block (24) and the second magnetic block (33) adjust the magnetic force by controlling the current so that the metal film floats between the first magnetic block (24) and the second magnetic block (33); A flow-increasing component (36) is installed on the bottom surface of the electrolytic cell (31), and the flow-increasing component (36) pressurizes the electrolyte and sprays it out to push the metal film in a suspended state.

2. A dual-focus metal film thickness material roughness preprocessing device according to claim 1, characterized in that: The flow-increasing component (36) comprises a booster water pump (361), the water inlet of the booster water pump (361) is connected to a return pipe (362), the other end of the return pipe (362) is connected to the bottom of the electrolytic cell (31), the water outlet of the booster water pump (361) corresponds to a flow-increasing row (363), and the flow-increasing row (363) is located at the bottom of the hydrolysis cell and between the first magnetic block (24) and the second magnetic block (33).

3. A dual-focus metal film thickness material roughness preprocessing device according to claim 1, characterized in that: An electrolytic assembly (35) is installed at the bottom of the electrolytic cell (31), and the electrolytic assembly (35) includes an electrolyzer (351). A positive terminal (352) and a negative terminal (353) are arranged on the left side of the electrolyzer (351). The positive terminal (352) and the negative terminal (353) are connected to the electrolyte of the electrolytic cell (31), and the left and right sides of the electrolyzer (351) have symmetrical structures.

4. A dual-focus metal film thickness material roughness preprocessing device according to claim 2, characterized in that: The first magnetic attraction block (24) is in the shape of a flat plate and has an electromagnet (241) built in it.

5. A dual-focus metal film thickness material roughness preprocessing device according to claim 2, characterized in that: The first magnetic attraction block (24) is in the shape of a rectangular parallelepiped, and a groove is provided on its bottom surface, and an electromagnet (241) is installed inside the side wall of the groove.

6. A dual-focus metal film thickness material roughness preprocessing device according to claim 1, characterized in that: A cleaning component (34) is installed below the cleaning pool (32), and the cleaning component (34) includes a cleaning air pump (341). The exhaust port of the cleaning air pump (341) is connected to an exhaust pipe (342), and the air inlet of the cleaning air pump (341) is connected to an air inlet cylinder (343). Exhaust plates (345) are arranged on the front and rear sides of the cleaning pool (32), and one-way air nozzles (344) are equidistantly arranged on the side wall of the exhaust pipe (342), and the other end of the exhaust pipe (342) is connected to the exhaust plate (345).

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