Grinding pad adjusting device head, grinding device and position detection device dismounting and mounting method

Abstract

The invention discloses a head of a grinding pad adjusting device, a grinding device and a dismounting and mounting method of a position detection device.The head of the grinding pad adjusting device is arranged on the grinding device and comprises a body; the position detection device is mounted on the body and used for detecting the position of the body in the vertical direction; wherein the edge area of the body is provided with a first through hole in the vertical direction, the position detection device extends into the first through hole from top to bottom, and the position detection device is locked and fixed in the first through hole through a locking device; through the matching mode of the through hole and the locking device, the position detection device is convenient to disassemble and assemble, and the matching precision requirement between the through hole and the position detection device is reduced; and when the grinding liquid enters the through hole to form crystals, the through hole is easy to clean, so that the grinding liquid crystals are prevented from being accumulated at the mounting position of the position detection device to influence disassembly and assembly.

Description

Technical Field

[0001] The invention relates to the field of semiconductor manufacturing, and in particular to a grinding pad adjusting device head, a grinding device and a method for disassembling and assembling a position detection device in the grinding pad adjusting device head. Background Art

[0002] CMP (Chemical Mechanical Polishing) is a key process in the field of semiconductor manufacturing. In the CMP process, LK, HHQK machines and EBARA machines are commonly used equipment types. In these machines, PC Arm (process control arm) is an important part of the polishing device. PC Arm has a pad conditioner head, a pressure control system, a drive system and a position sensor. The pressure control system applies appropriate pressure to the pad conditioner head so that the grinding disk on the pad conditioner head contacts the polishing pad. The drive system drives the pad conditioner head to rotate, thereby rotating the grinding disk to correct the polishing pad, remove residual slag on the polishing pad, and maintain the stability of the polishing rate (Removal Rate, referred to as RR).

[0003] When controlling the up and down movement of the grinding pad adjusting device head so that the grinding disk is pressed on the grinding pad with appropriate force, and when lifting the grinding pad adjusting device head when the grinding pad adjusting device head is idle and returning it to the cleaning cup area for cleaning, it is necessary to set a position sensor to monitor the position of the grinding pad adjusting device head, so that the grinding pad adjusting device head can be lowered to a suitable position to contact the grinding pad when pressed down for grinding, and can also accurately return to the cleaning cup when raised for cleaning.

[0004] At present, the position sensor is installed at the front end of the head of the grinding pad adjusting device. A threaded blind hole is opened on the head of the grinding pad adjusting device, which matches the external threaded column of the position sensor, so that the position sensor can be fixed on the head of the grinding pad adjusting device. However, this structure has the following problems: First, there is a large amount of grinding fluid in the working environment of the head of the grinding pad adjusting device. After working for a long time, the grinding fluid will enter the threaded hole of the head of the grinding pad adjusting device, and the grinding fluid is easy to form crystals in the threaded hole, which makes it difficult to disassemble and assemble the position sensor, affecting the working efficiency of the machine. Moreover, this crystal is located in the threaded blind hole and is difficult to clean. Second, when the position sensor is installed on the head of the grinding pad adjusting device, since the two are only fixed by thread matching, and there are no other fulcrums on the position sensor, this requires that the threaded column and the threaded hole must be completely matched and there must be no resistance in order to successfully install the position sensor, which places too high a requirement on the accuracy of the device. Summary of the invention

[0005] Based on the above problems, the purpose of the present invention is to provide a method for disassembling and assembling a polishing pad adjustment device head and a position detection device, so that the position detection device can be easily disassembled and assembled, and the crystals at the installation location of the position detection device can be easily cleaned.

[0006] To achieve the above object, the present invention provides a grinding pad adjustment device head, which is arranged on a grinding device and includes:

[0007] ontology;

[0008] A position detection device, mounted on the body, for detecting the position of the body in the vertical direction;

[0009] A first through hole in a vertical direction is opened in the edge area of ​​the body, and the position detection device extends into the first through hole from top to bottom, and is locked and fixed in the first through hole by a locking device.

[0010] Optionally, the locking means comprises a stud.

[0011] Optionally, a second through hole in a horizontal direction is provided between the inner side wall of the first through hole and the side wall of the body, the second through hole is communicated with the first through hole, and the second through hole is a threaded through hole and matches the stud;

[0012] The stud passes through the second through hole and abuts against the side wall of the position detection device in the first through hole, thereby fixing the position detection device; the nut is used to fix the stud in the second through hole.

[0013] Optionally, at least two of the second through holes are formed on the main body, and the locking device includes at least two groups of the studs and the nuts.

[0014] Optionally, at least two of the second through holes are distributed in the vertical direction.

[0015] Optionally, at least two of the second through holes have an included angle of 0° to 180°.

[0016] Optionally, the position detection device is a capacitive displacement sensor or a laser displacement sensor.

[0017] The present invention also provides a grinding device, comprising:

[0018] Abrasive pad adjustment device head;

[0019] A polishing pad, arranged below the head of the polishing pad adjusting device;

[0020] Wherein, the position detection device is used to detect the position of the body in the vertical direction, so as to determine the distance between the body and the polishing pad.

[0021] The present invention also proposes a method for disassembling and assembling a position detection device, which is used for disassembling and assembling the position detection device in the head of the grinding pad adjustment device, comprising the following steps:

[0022] When removing the position detection device, loosen the locking device and take the position detection device out of the first through hole;

[0023] When installing the position detection device, the position detection device is extended into the first through hole, and the height of the position detection device in the first through hole is adjusted, and then the locking device is used to lock and fix the position detection device.

[0024] Optionally, after the position detection device is removed, the first through hole is cleaned.

[0025] Compared with the prior art, the technical solution of the present invention includes the following advantages and beneficial effects:

[0026] The technical solution provides a first through hole on the main body of the head of the grinding pad adjustment device, so that the position detection device extends into the first through hole, and the position detection device is locked and fixed in the first through hole by a locking device, thereby fixing the position detection device; through the cooperation of the through hole and the locking device, the position detection device is easy to disassemble and assemble, and the matching accuracy requirement between the through hole and the position detection device is reduced; when the grinding fluid enters the through hole to form crystals, the through hole design is also easy to clean, thereby preventing the grinding fluid crystals from accumulating at the installation position of the position detection device and affecting the disassembly and assembly.

[0027] Furthermore, the technical solution sets a stud as a locking device, and sets a second through hole between the main body and the first through hole to provide a stud path. By setting multiple second through holes with different heights and different angles, the position detection device is provided with locking forces of different heights and different horizontal directions, making the locking effect more stable and uniform. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the main body of the head of a polishing pad adjustment device of the present invention;

[0029] Figure 2 It is a schematic top view of the main body of another polishing pad adjustment device head of the present invention;

[0030] Figure 3 This is a schematic diagram of the main body of another polishing pad adjustment device head of the present invention. DETAILED DESCRIPTION

[0031] The following will be combined with the embodiments of the present invention Figure 1 to Figure 3 , the technical solutions, structural features, objectives achieved and effects in the embodiments of the present invention are described in detail.

[0032] It should be noted that the drawings are in a very simplified form and use non-precise proportions. They are only used to conveniently and clearly assist in explaining the embodiments of the present invention, and are not used to limit the conditions for the implementation of the present invention. Therefore, they have no substantive technical significance. Any structural modification, change in proportional relationship or adjustment of size should still fall within the scope of the technical content disclosed in the present invention without affecting the effects and purposes that can be achieved by the present invention.

[0033] It should be noted that, in the present invention, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only the elements explicitly listed, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0034] A CMP grinding device comprises a grinding pad adjusting device head and a grinding pad arranged below the grinding pad adjusting device head, wherein the grinding pad adjusting device head comprises a body, and the bottom end of the body is a grinding disc. The grinding pad adjusting device head is connected to a pressure control system and a drive control system of the grinding device, wherein the drive control system is used to control the grinding pad adjusting device head to move up and down so that the grinding disc contacts the grinding pad, and the drive control system also controls the grinding pad adjusting device head to rotate on the grinding pad, thereby playing a role in trimming the grinding pad, removing residual crystal slag on the grinding pad, and maintaining a stable grinding rate; the pressure control system is used to provide different pressures to the grinding pad adjusting device head so that the pressure between the grinding disc and the grinding pad is different to meet the requirements during the grinding process.

[0035] The drive control system controls the head of the grinding pad adjusting device to move downward so that the grinding disc reaches above the grinding pad, or when the head of the grinding pad adjusting device is idle, the head of the grinding pad adjusting device moves upward and returns to the cleaning cup area for cleaning. During the up and down movement of the head of the grinding pad adjusting device, in order to enable the grinding disc to accurately reach above the grinding pad and enable the head of the grinding pad adjusting device to accurately return to the cleaning cup, a position detection device is provided on the head body of the grinding pad adjusting device to monitor the height of the head body of the grinding pad adjusting device in the vertical direction, thereby determining the distance between the body and the grinding pad, and further facilitating accurate control of the grinding pressure. The position detection device can also compensate for the wear of the head of the grinding pad adjusting device, ensuring that the position and pressure of the head of the grinding pad adjusting device can be kept highly consistent during each grinding process, thereby improving the stability and repeatability of the grinding process.

[0036] The current position detection device uses a threaded connection installation method, which will cause the grinding fluid to enter the threaded hole to form crystals and be difficult to clean, making it difficult to disassemble and assemble the position detection device, affecting the working efficiency of the grinding device; and because it only relies on threaded connection and there are no other fulcrums on the position detection device, this places high requirements on the accuracy of the position detection device and the threaded hole.

[0037] In order to solve the above problems, the present invention provides a through hole on the body, allows the position detection device to extend into the through hole, and uses a locking device to lock and fix the position detection device in the through hole, thereby fixing the position detection device. By adopting the through hole and the locking device in a coordinated manner, the position detection device is easy to disassemble and assemble, and the matching accuracy requirements between the through hole and the position detection device are reduced; when the grinding liquid enters the through hole and forms crystals, the through hole design is also easy to clean, thereby preventing the grinding liquid crystals from accumulating at the installation position of the position detection device and affecting the disassembly and assembly.

[0038] For details, see Figure 1, is a body 10 of the head of a grinding pad adjustment device according to an embodiment of the present invention, the bottom end of the body 10 is a grinding disc (not shown in the figure), and the position detection device is installed on the body 10 to detect the position of the body 10 in the vertical direction, and then the distance between the body 10 and the grinding pad below, and the distance between the body 10 and the cleaning cup above can be determined according to the position. Specifically, a first through hole 20 in the vertical direction is opened in the edge area of ​​the body 10, and the first through hole 20 passes through the edge area of ​​the body 10 from top to bottom. The position detection device has a vertical portion, and its vertical portion extends into the first through hole 20 from top to bottom. The vertical portion of the position detection device is locked and fixed in the first through hole 20 by a locking device. When removing the position detection device, the locking device is released to remove the position detection device from the first through hole 20. Since the first through hole 20 does not need to completely match the size of the position detection device, the processing accuracy requirement is reduced, and processing is convenient. Moreover, the fixing and disassembly are carried out by the locking device, and the disassembly and assembly are more convenient.

[0039] In this embodiment, a second through hole 30 in a horizontal direction is provided between the inner side wall of the first through hole 20 and the side wall of the body 10, the axis of the second through hole 30 is perpendicular to the axis of the first through hole 20 and the second through hole 30 is connected to the first through hole 20. The locking device includes a stud, and the second through hole 30 is a threaded through hole, and its size matches the stud of the locking device. When the position detection device needs to be fixed, the stud is screwed from the outside to the inside and passed through the second through hole 30, against the side wall of the position detection device in the first through hole 20, thereby playing the role of fixing the position detection device.

[0040] By setting a stud as a locking device and cooperating with the second through hole 30 to fix the position detection device, it is easy to disassemble and assemble. When the grinding liquid enters the second through hole 30 and crystallizes, it is also easy to clean the second through hole 30, ensuring that the device can be used for a long time.

[0041] Furthermore, a nut matching the stud may be provided, and after the stud abuts against the position detection device, the nut may be used to further reinforce the stud on the outside of the body 10 .

[0042] The position detection device needs to have high sensitivity and accuracy, and may be, for example, a capacitive displacement sensor or a laser displacement sensor.

[0043] In other embodiments, in order to achieve a better locking effect, such as Figure 2As shown, two second through holes 30 are provided on the body 10 and the two second through holes 30 are at the same level, and correspondingly, the locking device includes two sets of studs and nuts. There is a certain angle between the two second through holes 30, so as to provide locking forces in different horizontal directions to lock the position detection device, so that the installation effect of the position detection device is more stable. According to the actual structural limitations of the grinding device, the angle between the two second through holes 30 can be 0° to 180°.

[0044] In another embodiment, in order to obtain a better locking effect, as Figure 3 As shown, two second through holes 30 are provided on the body 10, and the two second through holes 30 are arranged to be distributed in the vertical direction, that is, to have different heights, thereby providing locking forces of different heights to lock the position detection device and obtain a better fixing effect. In practice, when the angle between the two second through holes 30 is 0°, it is easier to process and operate.

[0045] In more embodiments, the above two embodiments can be combined to make the two second through holes 30 have different heights and a certain angle. Further, multiple second through holes 30 and corresponding locking devices are provided, so that at least two second through holes 30 are distributed in the vertical direction to provide locking forces at different heights, and at least two second through holes 30 have an angle of 0° to 180° to provide locking forces in different horizontal directions, so that the locking effect is more stable. Further, the second through holes 30 are evenly distributed in the horizontal direction to make the locking force more uniform, so as to avoid damage to the position detection device due to force applied in a single direction.

[0046] Based on the above-mentioned grinding device and grinding pad adjusting device head, this embodiment further discloses a method for disassembling and assembling a position detection device in the grinding pad adjusting device head, comprising the following steps:

[0047] When removing the position detection device, loosen the nut and the stud in the second through hole 30, and take the position detection device out of the first through hole 20;

[0048] When installing the position detection device, extend the position detection device into the first through hole 20 from top to bottom, and adjust the height of the position detection device in the first through hole 20 so that the position detection device can reach the height of the second through hole 30, then use a stud to pass through the second through hole 30 and press against the outer wall of the position detection device in the first through hole 20, and use a nut to further reinforce the stud on the outside of the main body 10, so as to fix the position detection device.

[0049] If a plurality of second through holes 30 and locking devices are provided, the studs and nuts are removed one by one when the position detection device is removed, and the studs and nuts are fixed one by one when the position detection device is installed.

[0050] After the position detection device is removed, if there are crystals of the grinding liquid in the first through hole 20 and the second through hole 30 , the first through hole 20 and the second through hole 30 are cleaned.

[0051] Although the content of the present invention has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the present invention. After reading the above content, it will be apparent to those skilled in the art that various modifications and substitutions of the present invention will occur. Therefore, the protection scope of the present invention should be limited by the appended claims.

Claims

1. A grinding pad adjustment device head, arranged on a grinding device, characterized in that: include: ontology; A position detection device is installed on the main body and is used to detect the position of the main body in the vertical direction; wherein a first through hole in the vertical direction is opened in the edge area of ​​the main body, and the position detection device extends from top to bottom into the first through hole, and is locked and fixed in the first through hole by a locking device.

2. The polishing pad conditioning device head according to claim 1, characterized in that: The locking device comprises a stud and a nut matched with the stud.

3. The polishing pad conditioning device head according to claim 2, characterized in that: A second through hole in a horizontal direction is provided between the inner side wall of the first through hole and the side wall of the body, the second through hole is communicated with the first through hole, the second through hole is a threaded through hole and matches the stud; The stud passes through the second through hole and abuts against the side wall of the position detection device in the first through hole, thereby fixing the position detection device; The nut is used to fix the stud in the second through hole.

4. The polishing pad conditioning device head according to claim 3, characterized in that: At least two of the second through holes are formed on the main body, and the locking device includes at least two groups of the studs and the nuts.

5. The polishing pad conditioning device head according to claim 4, characterized in that: At least two of the second through holes are distributed in the vertical direction.

6. The polishing pad conditioning device head according to claim 4 or 5, characterized in that: At least two of the second through holes have an included angle of 0° to 180°.

7. The polishing pad conditioning device head according to claim 4, characterized in that: The position detection device is a capacitive displacement sensor or a laser displacement sensor.

8. A grinding device, characterized in that: include: The polishing pad adjustment device head according to any one of claims 1 to 7; A polishing pad, arranged below the head of the polishing pad adjusting device; Wherein, the position detection device is used to detect the position of the body in the vertical direction, so as to determine the distance between the body and the grinding pad.

9. A method for disassembling and assembling a position detection device, used for disassembling and assembling the position detection device in the head of the polishing pad adjustment device according to any one of claims 1 to 7, characterized in that: The following steps are involved: When removing the position detection device, loosen the locking device and take the position detection device out of the first through hole; When installing the position detection device, the position detection device is extended into the first through hole, and the height of the position detection device in the first through hole is adjusted, and then the locking device is used to lock and fix the position detection device.

10. The method for disassembling and assembling a position detection device according to claim 9, characterized in that: After removing the position detection device, the first through hole is cleaned.

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