Grinding disc flatness trimming device and trimming method

Abstract

The invention discloses a grinding disc flatness finishing device and method, and belongs to the technical field of grinding tool surface repairing. According to the trimming device, a grinding layer is arranged on the bottom face of the disc trimming ruler and arranged above the grinding disc, and a gradienter is arranged on the top face of the disc trimming ruler. The two sets of guiding pieces are located on the two opposite sides of the grinding disc correspondingly, guiding grooves are formed in the guiding pieces correspondingly, supporting springs are arranged at the bottoms of the guiding grooves correspondingly, the two ends of the disc repairing ruler are slidably connected into the guiding grooves in the two sides correspondingly, and the disc repairing ruler is pressed on the supporting springs. The two adjusting pieces are arranged above the guiding pieces correspondingly, the adjusting pieces are movably arranged in the direction perpendicular to the top face of the grinding disc, and the lower ends of the adjusting pieces are pressed on the top face of the disc repairing ruler. The trimming method comprises the following steps: S1, preliminarily correcting the disk ruler; s2, adjusting the height of the disc repairing ruler; s3, first-round finishing is carried out; and S4, sequentially repeating the step S2 and the step S3 at least once. According to the scheme, high correction efficiency is achieved, and the flatness of the surface of the trimmed grinding disc can be effectively guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of grinding tool surface repair, and in particular relates to a grinding disc flatness trimming device and a trimming method. Background Art

[0002] In modern high-end industrial manufacturing, especially in the fields of high-precision machining and semiconductor wafer processing, grinding and polishing technologies are widely used to ensure the finish, roughness and flatness of the workpiece surface. The grinding process can accurately cut the workpiece to the target thickness and ensure a high flatness of the workpiece surface. However, as the grinding process proceeds, due to the mutual friction between the workpiece and the grinding disc, not only the workpiece will be cut, but the grinding disc will also suffer uncontrollable wear. Since the linear speed of the inner edge of the grinding disc is lower than that of the outer edge, the inner edge of the grinding disc will be ground faster than the outer edge. At the same time, when the workpiece is grinding on the surface of the grinding disc, the grinding action mainly occurs in the effective contact area of ​​the disc surface between the inner edge and the outer edge, and the two sides of the disc surface cannot perform relative grinding movement with the workpiece. Therefore, over time, the middle part of the grinding disc is often worn into a pit, while the two sides are convex. The combined effect of the above two factors and other potential factors ultimately leads to the deterioration of the flatness of the grinding disc surface, which in turn affects the flatness of the workpiece surface, and may eventually cause the processed products to become defective products. Therefore, in order to improve the yield of the product, the flatness of the grinding disc surface must be trimmed in time.

[0003] There are two main methods of dressing at present: manual correction ring dressing and semi-automatic trimming tool dressing.

[0004] The manual correction ring dressing method is to replace the grinding workpiece with a diamond-coated ring, and manually adjust the position of the correction ring to achieve the effect of local dressing. Since the correction ring rotates on the guide structure installed on the edge of the grinding disc, its movement range is limited by the length of the rocker arm of the blocking structure, and the area of ​​the correction ring is large. When rotating, it will sweep across a large area, making it difficult to achieve precise fixed-point dressing. When the disc surface is high on one side and low on the other side, the correction ring cannot perform fixed-point cutting on the high point. In addition, the grinding efficiency of the correction ring dressing is low and the speed is slow.

[0005] Semi-automatic trimming tools are used for trimming. The trimming tools are similar to lathe tools. The motor drives the screw rod to drive the tool to reciprocate on the grinding disc, and the grinding disc rotates to perform trimming. Although this method can improve the trimming efficiency, due to the sharp design of the trimming tool head, uneven knife marks will inevitably be produced during trimming, which will affect the flatness of the disc surface. In addition, the path of the trimming tool cannot be guaranteed to be always horizontal. The trimming tool may take a straight line that is tilted upward or tilted downward. Although the trimmed disc surface is flat, the entire disc surface is tilted upward or downward as a whole. Summary of the invention

[0006] To address the deficiencies in the prior art, the present invention provides a grinding disc flatness dressing device and a dressing method, which can accurately correct the surface of the grinding disc, have a high correction efficiency, and can effectively ensure the flatness of the grinding disc surface after dressing.

[0007] In order to achieve the purpose of the present invention, the following scheme is proposed: A grinding disc flatness trimming device comprises a disc trimming ruler, a guide piece and an adjusting piece.

[0008] The repairing ruler is arranged above the grinding disc to be repaired, the bottom surface of the repairing ruler is provided with a grinding layer, and the middle part of the top surface of the repairing ruler is provided with a level.

[0009] There are two groups of guide members, which are located on opposite sides of the grinding disc. The guide members are provided with guide grooves, and their extending direction is perpendicular to the top surface of the grinding disc. Support springs are provided at the bottom of the guide grooves. The two ends of the repairing ruler are respectively slidably connected to the guide grooves on both sides, and the repairing ruler is pressed against the support spring, which is in a compressed state.

[0010] There are two adjusting members, which are respectively arranged above the guide members. The adjusting members are arranged to move in a direction perpendicular to the top surface of the grinding disc, and the lower ends of the adjusting members are pressed tightly against the top surface of the repairing disc ruler.

[0011] The grinding disc flatness trimming method is implemented using the above-mentioned grinding disc flatness trimming device, and the method comprises the following steps: S1: Preliminary calibration of the repairing ruler. Observe the horizontal state of the repairing ruler through a level meter and use the adjusting piece to adjust the distance between the repairing ruler and the grinding disc so that the repairing ruler is horizontal. S2: Adjust the height of the repairing ruler and move the two adjusting parts downward by the same distance so that the grinding layer is pressed tightly against the top surface of the grinding disc; S3: The first round of dressing, the driver is started to rotate the grinding disc, and the top surface of the grinding disc is in contact with the grinding layer to achieve the purpose of dressing; S4: Repeat step S2 and step S3 at least once.

[0012] The beneficial effects of the present invention are: 1. In terms of dressing efficiency, the present invention can greatly improve the dressing speed. Through a simple and direct dressing method, the entire grinding disc surface can be quickly leveled, thereby effectively saving time and cost. Compared with the manual correction ring dressing method that requires cumbersome manual adjustment and inefficient dressing process, the adjustment and dressing process provided by the present invention is faster and more accurate, which can greatly improve the dressing efficiency; compared with the dressing by the semi-automatic trimming tool, this solution can comprehensively level the surface of the grinding disc, has higher dressing accuracy, and can ensure the uniformity and accuracy of the grinding disc surface.

[0013] 2. Through the combined effect of the diamond grinding layer and the precise adjustment method, the present invention can complete the high-precision dressing of the grinding disc surface in a relatively short time, avoiding the problems of uneven dressing and insufficient dressing accuracy that may occur in traditional dressing methods.

[0014] 3. The trimming device of this scheme has a simple structure. Compared with the traditional trimming tool or correction ring trimming device, the device of the present invention is not only easy to manufacture, but also has a lower maintenance cost, which greatly reduces the cost of long-term use. At the same time, the compact design and high efficiency of the device make it highly adaptable in industrial applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings described herein are for illustrative purposes only of selected embodiments and not all possible implementations, and are not intended to limit the scope of the present invention.

[0016] Figure 1 The overall structural schematic diagram of the trimming device of the present application is shown.

[0017] Figure 2 The figure shows the installation structure diagram of the guide member and the adjusting member on the driver.

[0018] Figure 3 A schematic diagram of the bottom of the repairing ruler is shown.

[0019] Markings in the figure: repairing ruler - 1, grinding layer - 11, slider - 12, guide part - 2, guide groove - 21, countersunk hole - 22, arc groove - 23, slide groove - 24, adjusting part - 3, screw part - 31, scale rod - 32, arch frame - 4, level - 5, driver - 6, grinding disc - 7, locking screw - 8. DETAILED DESCRIPTION

[0020] To make the objectives, technical solutions and advantages of the embodiments of the present invention more clear, the implementation modes of the present invention are described in detail below with reference to the accompanying drawings. However, the embodiments described in the present invention are only part of the embodiments of the present invention, rather than all the embodiments.

[0021] Embodiment 1, as Figures 1 to 3 As shown, a grinding disc flatness trimming device includes: a disc trimming ruler 1, a guide member 2 and an adjusting member 3.

[0022] The repairing ruler 1 is arranged above the grinding disc 7 to be repaired, the bottom surface of the repairing ruler 1 is provided with a grinding layer 11, and the middle part of the top surface of the repairing ruler 1 is provided with a level 5.

[0023] There are two groups of guide members 2, which are respectively located on the opposite sides of the grinding disc 7. The guide members 2 are all provided with guide grooves 21, and their extending direction is perpendicular to the top surface of the grinding disc 7. Support springs are provided at the bottom of the guide grooves 21. The two ends of the repairing ruler 1 are respectively slidably connected to the guide grooves 21 on both sides, and the repairing ruler 1 is pressed against the support springs. The support springs are in a compressed state. The guide grooves 21 are used to guide the repairing ruler 1 to move in a direction perpendicular to the top surface of the grinding disc.

[0024] There are two adjusting members 3, which are respectively arranged above the guide members 2. The adjusting members 3 are arranged to move in a direction perpendicular to the top surface of the grinding disc 7, and the lower ends of the adjusting members 3 are pressed tightly against the top surface of the repairing ruler 1.

[0025] The method for dressing a grinding disc using a grinding disc flatness dressing device comprises the following steps: S1: Preliminary calibration of the repairing ruler 1, firstly, the grinding disc 7 is set on a driver 6, and the grinding disc is set horizontally; the horizontal state of the repairing ruler 1 is observed by the level 5, and the distance between the repairing ruler 1 and the grinding disc 7 is adjusted by the adjusting member 3, so that the repairing ruler 1 is horizontal. Preferably, after completing the above steps, the height consistency of multiple points on the repairing ruler 1 can be detected by a micrometer to ensure that the repairing ruler 1 is horizontal; S2: Adjust the height of the repairing ruler 1, move the two adjusting members 3 downward by the same distance, so that the grinding layer 11 is pressed against the top surface of the grinding disc 7; preferably, a scale value can be set on the adjusting member 3, and the two adjusting members 3 can be accurately controlled to move by the same distance by observing the scale value; S3: the first round of dressing, the driver 6 is started to rotate the grinding disc 7, and the top surface of the grinding disc 7 is in contact with the grinding layer 11 to achieve the purpose of dressing; S4: Repeat step S2 and step S3 at least once in sequence to achieve the purpose of multiple trimming of the surface of the grinding disc 7 until the grooves on the top surface of the grinding disc 7 are completely eliminated, thereby further ensuring the uniformity and accuracy of the trimming effect.

[0026] As a preferred solution, Figures 1 to 3As shown, the projection of the guide groove 21 on the bottom surface is an "I"-shaped structure, and the middle section has an opening on the side facing the grinding disc 7 for passing the repairing ruler 1. Both ends of the repairing ruler 1 are provided with sliders 12 that match the guide groove 21, and the shape of the slider 12 matches the projection shape of the guide groove 21 on the bottom surface. Specifically, the slider 12 is an "I"-shaped structure. This matching structure allows the slider 12 and the guide groove 21 to have multiple matching surfaces, which can effectively improve the installation stability and stability of the repairing ruler 1, and prevent the repairing ruler 1 from frequent shaking and vibration when the grinding disc 7 is trimmed, thereby affecting the flatness of the grinding disc 7 after trimming. If the cross-section of the guide groove 21 is designed as a conventional rectangular groove or dovetail groove structure, due to the small number of matching surfaces between the slider 12 and the guide groove 21, it is easy to cause the repairing ruler 1 to have a large displacement or reciprocating swing around the axis during the trimming process, thereby reducing the flatness of the surface of the grinding disc 7.

[0027] Preferably, Figure 2 As shown, a countersunk hole 22 is provided on the bottom surface of the middle section of the I-shaped structure of the guide member 2 corresponding to the guide groove 21. The support spring is a cylindrical spring structure, and its lower end is inserted into the countersunk hole 22 to prevent the support spring from falling off.

[0028] Further preferably, Figure 2 As shown, the side wall of the middle section of the I-shaped structure of the guide groove 21 is provided with an arc groove 23 which is coaxial with the countersunk hole 22 and has the same inner diameter. The support spring is extended and retracted along the axial direction of the arc groove 23. The arc groove 23 can guide the support spring to extend and retract, thereby preventing the support spring from being offset or twisted.

[0029] Preferably, Figure 1 , Figure 2 As shown, at least one side of the guide member 2 is provided with a slide groove 24 connected to the guide groove 21, and the side of the slider 12 is penetrated by a locking screw 8 corresponding to the slide groove 24. The locking screw 8 passes through the slide groove 24, and the bottom surface of the head of the locking screw 8 is pressed against the outer wall of the guide member 2, which is used to fix the slider 12 in the guide groove 21, thereby locking the position of the repairing ruler 1, and further preventing the repairing ruler 1 from moving when the grinding disc 7 is being trimmed.

[0030] Preferably, Figure 1 As shown, the adjusting member 3 is a rod-shaped structure, the lower section of which is a screw portion 31, and an arch frame 4 is provided above the guide member 2. The screw portion 31 passes through the arch frame 4 through a threaded structure, and the screw portion 31 is perpendicular to the top surface of the grinding disc 7. By rotating the screw portion 31, the adjusting member 3 can be moved in a direction perpendicular to the top surface of the grinding disc 7, thereby achieving the purpose of adjusting the height of the repairing ruler 1, and this adjustment method is more suitable for micro-adjustment, which helps to improve the horizontal adjustment accuracy of the repairing ruler 1.

[0031] Further preferably, a scale rod 32 is coaxially provided on the top of the screw portion 31, and the minimum scale value on the scale rod 32 is 1 μm, so that the lifting height of the adjusting member 3 can be visually observed, so that the two adjusting members 3 can move the same distance during the adjustment process.

[0032] Preferably, the grinding layer 11 is made of corundum particles with a mesh size of 80 to 200. Specifically, the corundum is formed on the bottom surface of the repairing ruler 1 by spraying or electroplating.

[0033] As a preferred solution, the driver 6 can be used as a grinding device using a grinding disc 7, and the guide member 2 can be detachably mounted on the driver 6, and the guide member 2 can be specifically mounted by screw connection. As a further preferred solution, the arch frame 4 and the corresponding guide member 2 are an integral structure to reduce the number of parts to be disassembled. As another embodiment, the arch frame 4 can be detachably connected to the driver 6.

[0034] The above description is only a preferred embodiment of the present invention, and is not intended to be the only one or to limit the present invention. Those skilled in the art should understand that various changes or equivalent substitutions made to the present invention without departing from the scope of the present invention are within the scope of protection of the present invention.

Claims

1. A grinding disc flatness trimming device, characterized in that: include: A repairing ruler (1) is arranged above the grinding disc (7) to be repaired, the bottom surface of the repairing ruler (1) is provided with a grinding layer (11), and the middle part of the top surface of the repairing ruler (1) is provided with a level (5); The guide members (2) are provided with two groups, which are respectively located on opposite sides of the grinding disc (7). The guide members (2) are provided with guide grooves (21), whose extending direction is perpendicular to the top surface of the grinding disc (7). Support springs are provided at the bottom of the guide grooves (21). The two ends of the repairing ruler (1) are respectively slidably connected to the guide grooves (21) on both sides, and the repairing ruler (1) is pressed against the support springs, and the support springs are in a compressed state. There are two adjusting members (3), which are respectively arranged above the guide member (2). The adjusting members (3) are arranged to move in a direction perpendicular to the top surface of the grinding disc (7), and the lower end of the adjusting member (3) is pressed against the top surface of the repairing ruler (1).

2. A grinding disc flatness trimming device according to claim 1, characterized in that: The projection of the guide groove (21) on the bottom surface is an "I"-shaped structure, and the middle section has an opening on the side facing the grinding disc (7) for passing the repairing ruler (1), and both ends of the repairing ruler (1) are provided with sliders (12) that cooperate with the guide groove (21), and the shape of the sliders (12) matches the projection shape of the guide groove (21) on the bottom surface.

3. A grinding disc flatness trimming device according to claim 2, characterized in that: A countersunk hole (22) is provided on the bottom surface of the middle section of the I-shaped structure of the guide member (2) corresponding to the guide groove (21); the support spring is a cylindrical spring structure, and its lower end is inserted into the countersunk hole (22).

4. A grinding disc flatness trimming device according to claim 3, characterized in that: An arc groove (23) coaxial with the countersunk hole (22) and having the same inner diameter as the countersunk hole (22) is formed on the side wall of the middle section of the I-shaped structure of the guide groove (21), and the support spring expands and contracts along the axial direction of the arc groove (23).

5. The grinding disc flatness trimming device according to claim 2, characterized in that: The guide member (2) is provided with a slide groove (24) in communication with the guide groove (21) on at least one side thereof, and a locking screw (8) corresponding to the slide groove (24) is passed through the side surface of the slider (12), the locking screw (8) passes through the slide groove (24), and the bottom surface of the head of the locking screw (8) is pressed against the outer wall of the guide member (2).

6. The grinding disc flatness trimming device according to claim 1, characterized in that: The adjusting member (3) is a rod-shaped structure, the lower section of which is a screw portion (31). An arch frame (4) is provided above the guide member (2). The screw portion (31) passes through the arch frame (4) via a threaded structure. The screw portion (31) is perpendicular to the top surface of the grinding disc (7).

7. A grinding disc flatness trimming device according to claim 6, characterized in that: A scale rod (32) is coaxially arranged at the top of the screw rod portion (31), and the minimum scale value on the scale rod (32) is 1 μm.

8. The grinding disc flatness trimming device according to claim 1, characterized in that: The grinding layer (11) is made of diamond grains with a mesh size of 80 to 200.

9. The grinding disc flatness trimming device according to claim 1, characterized in that: The driver (6) is a grinding device, the grinding disc (7) is detachably mounted on the driver (6), and the guide member (2) is detachably mounted on the driver (6).

10. A method for trimming the flatness of a grinding disc, characterized in that: The method is implemented by using the grinding disc flatness dressing device according to any one of claims 1 to 9, and comprises the following steps: S1: Preliminary calibration of the repairing ruler (1), observing the horizontal state of the repairing ruler (1) by means of a spirit level (5), and adjusting the distance between the repairing ruler (1) and the grinding disc (7) by means of an adjusting member (3) so that the repairing ruler (1) is in a horizontal state; S2: Adjust the height of the repairing ruler (1) and move the two adjusting members (3) downward by the same distance so that the grinding layer (11) is pressed tightly against the top surface of the grinding disc (7); S3: the first round of dressing, starting the driver (6) to rotate the grinding disc (7), so that the top surface of the grinding disc (7) contacts the grinding layer (11) to achieve the purpose of dressing; S4: Repeat step S2 and step S3 at least once.

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